JPH0949078A - Holder for film forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate the charging and discharging of small-sized parts having a diameter of <=1mm into and out of a holder formed by connecting a circular truncated cone shape or prismoid shell having the diameter decreasing outward to both ends of a cylinder or polygonal shell regardless of the shapes, sizes and quantities of these parts and to form uniform films by using the holder at the time of subjecting the parts to sputtering. SOLUTION: The holder 1 is constituted by mounting the shell 3 of the octagonal prismoid shape to both ends of the polygonal shell 2. The peak part of the prismoid shell is provided with a hole 4 for inserting the target and the hole is used commonly as the inlet and outlet for the parts to be housed in the holder 1. The prismoid shell 3 is formed to the axial length approximately equal to the axial length of the polygonal shell 2. A circular surface plate 6 is mounted by means of many connecting bolts 5 to the shell. The polygonal shell 2 is meshed. As a result, the parts are stabilized in the polygonal cylindrical shell 2 part in the central part of the holder 1 even if the parts housed therein is small in quantity. The discharge of the parts is executed simply by directing the target insertion hole downward and lightly vibrating the holder.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holder for holding a component of a film forming apparatus for forming a thin film on the surface of a small component such as ceramics.

[0002]

2. Description of the Related Art A rotatable cylindrical holder for holding small parts such as ceramics is provided in a vacuum chamber, the small parts are stored in the holder, and the small parts are irradiated with a thin film forming material (target). There is an apparatus for forming a thin film of a target on the surface of a small part. For example, JP-A-61-19417
Japanese Patent Publication 7 discloses a device shown in FIG. FIG.
The cylindrical holder 12 in the vacuum container 21 at
The circumferential surface is made of stainless steel mesh, in which small parts are stored and rotated. The film forming material 16 is heated by the crucible 17.

FIG. 2 shows a schematic view of an example of a conventional holder 1. This conventional holder 1 has a cylindrical shape (the shell 2 part is 1
This is a structure having a circular hole 4 in the center of the end plate 13 so that a target can be loaded.
The parts are put in and taken out by providing a door 14 on a part of the end plate 13 and opening and closing the door 14. Further, a blade 15 for stirring small parts is attached to the inside of the cylindrical surface.

[0004]

The conventional holder shown in FIG. 2 has a small part for forming a film with a diameter of 1 mm or more, and cannot be used for smaller parts. This largely depends on the gap size of the holder, and it is very difficult to reduce the gap particularly at the door portion. Further, in the conventional cylindrical holder shown in FIG. 2, the smaller the shape of the small parts and the smaller the amount, the more difficult the stable stirring becomes, and the more difficult the uniform film formation becomes. Further, since the conventional holder has a cylindrical holder shape, problems such as parts overflowing from the target holes during sputtering have occurred.

An object of the present invention is to provide a technique for improving a holder for holding a component of a film forming apparatus for forming a thin film on the surface of such a small component such as ceramics. A uniform film can be formed when the amount is small,
An object is to achieve stable sputtering without causing overflow or the like.

[0006]

DISCLOSURE OF THE INVENTION The present invention is a film forming apparatus holder provided in a vacuum chamber for accommodating small parts for thin film forming. The holder is provided at both ends of a cylindrical or polygonal shell, and outwardly from each end. It is a holder for a film forming apparatus, which is a holder having a shape in which conical trapezoidal or truncated pyramidal shells having a reduced diameter are connected in series.

This holder is provided with an opening at the top of the truncated cone-shaped or truncated pyramid-shaped shell that serves as both a target insertion hole and a small component entrance / exit, and does not provide a small component entrance / exit door, so that it is independent of the door gap. This is preferable because small parts with small dimensions can be processed.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION The film-forming holder of the present invention is an improvement over the conventional drawbacks and is relatively easy and stable.
It is possible to form a uniform thin film on the entire surface of a large number of small parts having various shapes. In particular, a uniform film can be formed regardless of the shape, size, and quantity of the parts, and the parts can be easily taken in and out, and maintenance can be facilitated.

In the present invention, it is an object of the present invention to obtain stable spatter when the small parts are small and small in number. First, in order to reduce the gap, the door for inserting and removing the parts is eliminated. Next, both end faces of the cylinder are squeezed to prevent the small storage parts from overflowing. Also, in order to facilitate the taking out of small parts, it is possible to take them in and out through the target insertion hole.

FIG. 1 shows an embodiment of the present invention. FIG.
1A is a front view, and FIG. 1B is a side view. Holder 1
Is a holder having a shape in which decagonal pyramidal shells 3 and 3 are attached to both ends of a decagonal polygonal shell 2, and a hole 4 for inserting a target is provided at the top of the truncated pyramidal shell 3. The hole 4 also serves as an entrance / exit of a small component housed in the holder. The truncated pyramidal shell 3 has, in the example, an axial length dimension that is substantially equal to the polygonal shell 2. This holder 1 is connected with a large number of connecting bolts 6
It is attached to circular face plates 6, 6 having a diameter of 20 mm, and the total length in the axial direction is approximately 450 mm. The polygonal shell 2 is a mesh.

In this embodiment, the truncated cone-shaped shells 3 at both ends of the polygonal cylindrical shell 2 are narrowed toward the target hole 4. As a result, even if a small amount of small parts are stored, the small parts are stabilized in the polygonal tubular shell 2 at the center of the holder 1. Further, by appropriately providing blades inside the holder, stable stirring of small parts is possible. Further, since there is no door, and because there is a door, it is possible to eliminate the gap that is unavoidable at that portion. This holder 1 can disassemble the polygonal cylindrical shell 2 and the truncated pyramid shell 3, and the overhaul for repair and maintenance is easy.

[0012]

[Example] Using the example and the conventional holder, Ti
Sputtering was carried out and the results are compared and shown below. In the conventional type, all the parts were left in the gap, and all parts could not be taken out unless the rocking motion was performed considerably.
In the example, all the parts could be easily taken out only by slightly vibrating with the target insertion hole facing downward.

[0013]

As the holder of the present invention has been devised in its shape and the door has been eliminated, the gap can be reduced, stable film formation is possible without problems during sputtering, and small parts can be discharged. It was possible to provide an easy holder.

[Brief description of drawings]

FIG. 1A is a front view and FIG. 1B is a side view of a holder of an embodiment.

FIG. 2 is a (a) front view and a (b) side view of a conventional holder.

FIG. 3 is an overall explanatory view of a film forming apparatus.

[Explanation of symbols]

 1 Holder 2 Shell 3 Shell 4 Hole 5 Bolt 6 Face Plate 12 Holder 13 End Plate 14 Door 15 Blade 16 Film Forming Material 17 Crucible 21 Vacuum Container

Claims (2)

[Claims] 1. A holder for a film forming apparatus, which is provided in a vacuum chamber for accommodating small parts for thin film forming, and has a truncated cone shape or a pyramid at each end of a cylindrical or polygonal shell, the diameter of which is reduced outward from each end. A holder for a film forming apparatus, which is a holder having a shape in which trapezoidal shells are continuously provided. 2. The holder for a film forming apparatus according to claim 1, wherein an opening that doubles as a target insertion hole and a small component entrance / exit is provided at the top of the truncated cone-shaped or truncated pyramid-shaped shell.