JPH0947964A - Grinding method and grinding machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform optimum grinding by reliably and simply feeding even a small amount of grinding liquid. SOLUTION: In a grinding machining device to grind a material 2 to be ground by a grinding wheel 1 as grinding liquid 5 is fed to a grinding point 4 through a nozzle 3 and in the grinding machining device having a nozzle tip in a shape to which the shape of the outer periphery of the grinding wheel is transferred, and in a method to grind the material 2 to be ground by the grinding wheel 1 as the grinding liquid 5 is fed to the grinding point through the nozzle 3, the nozzle 3 having a tip shape to which the surface shape of the grinding wheel 1 is transferred is used, and the tip part of the nozzle 3 is adhered to the surface of the grinding wheel and the material 2 to be ground is ground as grinding liquid is fed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to supply of a grinding liquid in a grinding technique.

[0002]

2. Description of the Related Art When grinding a work material with a grindstone, the friction at the grinding point (the contact point between the grindstone and the work material) is reduced, and the chip escape is improved, so that the chips are abrasive grains. Since it is necessary to prevent welding or adhesion to the blade, in grinding
It is necessary that the grinding fluid is reliably supplied to the grinding point. Therefore, conventionally, as a means for supplying a grinding fluid in a grinding process using a grindstone, as shown in FIG. 1A, an appropriate distance is set to avoid interference due to contact with the grindstone 1 or the work material 2. A method is generally used in which the grinding fluid 5 is sprayed from the tip of the nozzle 3 toward the grinding point 4. However, in this method, since the grindstone 1 is rotating at high speed,
An air flow layer (air layer) is formed on the outer peripheral surface, and the arrival of the grinding fluid 5 at the grinding point 4 is hindered. Therefore, it is the current situation that a large amount of grinding fluid must be jetted at high pressure toward the grinding point. Also, depending on the form of the grindstone, work material, nozzle, etc., part of the work material passes between the nozzle and the grinding point during rotation, so it is completely impossible for the grinding fluid to reach the grinding point during that time. And the grinding fluid was scattered.

[0003] As means for solving such problems,
There is a so-called "winding nozzle" by Yokogawa et al. Of Meiji University ("Recommended method of grinding" published by Industrial Research Society
No. 62-43834), this device is a box-type enclosure consisting of a baffle that blocks the air layer on the surface of the grindstone, an enclosing plate that covers the surface of the grindstone, and an adjusting plate that determines the outflow thickness of the grinding fluid. Since it is configured as, the shape of the nozzle tends to be large,
It may be difficult to attach it to an existing machine, and in the case of a whetstone with a large undulation in the thickness direction of the whetstone (for example, a full-scale whetstone), the gap between the whetstone and the nozzle tip becomes large, and the supply of grinding fluid There is a problem that the amount tends to increase.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is possible to supply the grinding liquid reliably to the grinding point even with a simpler and small amount of grinding liquid, and to perform optimum grinding. An object of the present invention is to provide a grinding method and a grinding processing device.

[0005]

That is, the gist of the present invention resides in that in a grinding apparatus for grinding a work material with a grindstone while supplying a grinding liquid from a nozzle to a grinding point, the tip shape of the nozzle is the grindstone. In a grinding device characterized in that the outer peripheral shape is transferred, and in a grinding process of grinding a work material with a grindstone while supplying a grinding liquid from a nozzle to a grinding point, the tip shape of the nozzle is the grindstone outer peripheral shape. This is a grinding liquid supply device used in grinding, characterized in that it has a transferred shape. All or the tip of the nozzle used here is preferably made of a material having good machinability such as carbon, resin or alloy. Further, in the method of the present invention for grinding a work material with a grindstone while supplying a grinding liquid from a nozzle to a grinding point, the tip shape of the nozzle is a transfer of the surface shape of the grindstone, and the tip part of the nozzle is Start grinding of the work material in the method of grinding the work material while closely adhering to the grindstone surface and supplying the grinding fluid, and in the method of grinding the work material with the grindstone while supplying the grinding fluid from the nozzle to the grinding point Before doing so, press the tip of the nozzle against the surface of the grindstone to grind the nozzle tip, transfer the surface shape of the grindstone to the nozzle tip, fix the nozzle at this position, or until the nozzle tip does not contact the grindstone. A method of grinding the work material while supplying the grinding liquid from the nozzle to which the surface shape of the grindstone is transferred after the work piece is slightly retracted and fixed is also summarized.

This will be described in more detail below. When grinding the work material with the grindstone while supplying the grinding fluid from the nozzle to the grinding point, avoid the influence of the air layer due to the high-speed rotation of the grindstone and reliably supply the grinding fluid to the grinding point as much as possible. The tip of the nozzle should be close to the grinding point. But,
In reality, the nozzle itself has a finite size, and it is unavoidable to keep a constant interval so that the tip of the nozzle does not contact and interfere with the work material or the grindstone (see FIG. 1A). Further, if the outer peripheral shape of the work material is not arcuate, it is necessary to further widen this interval. On the other hand, as shown in FIG. 1 (b), it is possible to supply the grinding fluid along the surface of the grindstone before the grinding point, but since the distance from the grinding point is long, the grinding fluid reaches the grinding point. Before it does, the efficiency of supplying the grinding fluid that reaches the grinding point is deteriorated. Therefore, it is necessary to supply the grinding liquid as close as possible to the surface of the grindstone, but in this case too, if the nozzle is brought too close to the grindstone, the nozzle comes into contact with the grindstone.

Therefore, in the present invention, by supplying the grinding liquid from the surface of the grindstone having a predetermined distance before the grinding point, it is possible to avoid the interference between the work material or the grindstone and the nozzle tip at the grinding point, and the nozzle. By supplying the grinding liquid by making the tip of the wheel extremely close to the surface of the grindstone, the grinding liquid is supplied inside the air layer generated by the high-speed rotation of the grindstone, and the grinding liquid is not shaken to the grinding point efficiently. And it made sure that it could be reached. As a method and an apparatus for supplying a grinding fluid extremely closely to such a grindstone surface, the present inventors once grind the tip of a grinding fluid supply nozzle with a grindstone and transfer the surface shape of the grindstone to the nozzle tip, The present invention has been completed on the idea of performing grinding while supplying a grinding liquid from a nozzle having a transferred tip shape.

That is, in the present invention, before the grinding of the work material is started, the tip of the nozzle for supplying the grinding fluid is pressed against the surface of the grindstone to grind the nozzle tip, and the surface shape of the grindstone is transferred to the nozzle tip. Then, fix the nozzle at this position or retract it until the nozzle tip does not slightly contact the grindstone and fix it, then grind the work material while supplying the grinding liquid from the nozzle to which the surface shape of the grindstone is transferred. Of.

By thus transferring the surface shape of the grindstone to the nozzle, the distance between the grindstone and the nozzle can be minimized. Grinding the nozzle tip and fixing it at the position at the end of transfer, or retracting and fixing until the nozzle tip does not come into contact with the grindstone, theoretically, the distance between the nozzle tip and the grindstone thereafter is "running of the grindstone" + "grindstone surface""Roughness", which is the smallest. Since the grinding fluid is discharged from such a minimum interval, the grinding fluid does not bounce on the surface of the air layer generated by the rotation of the grindstone and enters the inside of the grinding wheel, and therefore a high pressure, large amount of grinding fluid is directly aimed at the grinding point. No need to fly. For this reason, the point before the grinding point, for example, 90
Even if the nozzle tip is fixed to the surface of the grindstone at a temperature of 10 ° and the grinding liquid is supplied, the supply efficiency does not decrease, and if this is done, there is no need to consider the problem of interference with the work material or the grindstone. . Further, since the grinding fluid is supplied in close contact with the minimum spacing, the amount of the grinding fluid is very small and can be reduced to about 1/2 to 1/20 of the conventional amount. Further, since the nozzle of the present invention transfers the surface shape of the grindstone, it can be easily applied to a grindstone and a nozzle having any surface shape in principle, and the grinding fluid is supplied in close contact with the surface of the grindstone. be able to. Further, when the distance between the nozzle and the grindstone is increased due to abrasion of the grindstone or the like, it can be easily corrected by moving the nozzle to the grindstone side. Conversely, when more grinding fluid is required, such as when performing heavy grinding with a large work material feed rate and high grinding speed, slightly retract the nozzle and widen the gap between the nozzle tip and the grindstone. You can easily adjust with.

[0010]

Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 2 shows an outline of the device of the present invention. In this grinding apparatus, the grindstone 1 grinds the work material 2 while supplying the grinding liquid from the nozzle 3 to the grinding point 4. The nozzle constitutes a grinding liquid supply device, and the grinding liquid 5 can be supplied from a supply port 7 at the tip through a grinding liquid supply pipe 6. The nozzle shape may be any shape as long as it does not physically interfere with other device parts,
It is necessary to use materials with good machinability such as carbon, resin, and alloys with high free-cutting property. This is because it is necessary to prevent the occurrence of burrs and the like, improve the transfer accuracy, shorten the transfer time, and prevent the grindstone from being wasted such as damage or wear. In the present invention, since the grindstone surface shape is transferred to the tip of the nozzle, it can be basically applied to a grindstone having any surface shape, and the grinding fluid can be supplied in close contact with the grindstone surface. it can. 3 (a) (b) (c)
An enlarged cross-sectional view of various whetstone surface shapes and the nozzle tip to which these are transferred is shown in FIG. The position of the nozzle 3 with respect to the grindstone 1 does not need to be close to the grinding point 4 so that the nozzle tip may interfere with the work material 2 or the grindstone 1, and before the grinding point 4, for example, at a position of θ = 10 to 120 °. Just fix it.

In order to carry out the method of the present invention with such an apparatus, first, before starting the grinding of the work material 2, the tip of the nozzle 3 is pressed against the surface of the grindstone 1 in advance to grind the tip of the nozzle. Then, the surface shape of the grindstone 1 is transferred to the tip of the nozzle. Since all or the tip of the nozzle 3 is made of a material having good machinability such as carbon, the surface shape of the grindstone is easily transferred. The amount of grinding of the nozzle tip portion may be performed until a part or all of the grinding liquid supply port 7 comes into contact with the grindstone surface. Since further grinding simply wastes the nozzle material, the nozzle 3 is fixed at this position by the fixing screw 8 or is retracted and fixed by the fixing screw 8 until the tip of the nozzle does not slightly contact the grindstone 1. In this way, it is possible to manufacture the nozzle 3 in which the surface shape of the grindstone 1 is transferred, and the grinding device and the grinding liquid supply device equipped with such a nozzle. Then, the workpiece 2 is ground while the grinding liquid 5 is closely attached to the surface of the grindstone and supplied from the nozzle 3 to which the surface shape of the grindstone 1 is transferred.

According to the grinding apparatus and the grinding method of the present invention, it is possible to easily keep the distance between the tip of the nozzle and the grindstone to a minimum, and thinly grind the grindstone surface by supplying a small amount of grinding liquid from the gap between the nozzle and the grindstone. It is possible to obtain a state in which the liquid is evenly distributed. Therefore, while reducing the consumption of grinding fluid,
The scattering of grinding fluid is also small, which improves the pollution of equipment and environment. Therefore, as compared with the conventional method of supplying the grinding fluid, the grinding fluid preparation apparatus, the supply apparatus, the collection apparatus, the filtration equipment, and the like can be downsized and the grinding fluid supply cost can be reduced.
The present invention is not limited to the above embodiment,
It goes without saying that it can be applied to various nozzle shapes.

[0013]

EXAMPLE An example of the present invention will be described below. (Example 1) According to the present invention, the outer periphery of a silicon single crystal wafer (150 mmφ) was ground. The whetstone used was a metal bond-diamond outer shape of 200 mmφ, thickness of 14 mm (of which whetstone part width was 10 mm), and the surface shape was of the type shown in FIG. 3 (a). The nozzle is made of graphite and has a prismatic shape with a width of 12 mm and a thickness of 8 mm, and is equipped with a grinding fluid supply pipe of 3 mmφ. The nozzle tip position was 45 ° before the grinding point on the grindstone. Before the outer periphery of the wafer was ground, the tip of the nozzle was pressed against the grindstone, and the tip of the nozzle was ground until the grinding liquid supply port came into contact with the surface of the grindstone, whereby the surface shape of the grindstone was transferred to the tip of the nozzle. Next, the nozzle was fixed as it was at the position where the transfer was completed, and the outer periphery grinding of the wafer was started. The grinding fluid supply rate is 400 cc / mim, which is about
About 1/5 of 2000cc / mim. As a result, extremely good grinding was possible and the finished surface of the wafer as the work material was smooth, even though the supply amount of the grinding fluid was greatly reduced. The degree of wear of the grindstone was also the same as before, and the pollution of the equipment and environment due to the scattering of grinding fluid was also significantly improved.

(Embodiment 2) The supply speed of the grinding fluid was further increased to 10
Grinding was performed in the same manner as in Example 1 except that the speed was 0 cc / min and 1/20 of the conventional one. As a result, there was no difference from Example 1, and satisfactory grinding could be performed without causing problems such as clogging due to lack of grinding liquid.

[0015]

According to the present invention, when grinding a work material with a grindstone while supplying a grinding fluid from a nozzle to a grinding point, the consumption of the grinding fluid is easily about 1/2 to 1/20 of the conventional one. Can be reduced to Moreover, no reduction in the life of the grindstone due to this is recognized, and the scattering of the grinding fluid is reduced.
Therefore, compared with the conventional method of supplying the grinding fluid, the grinding fluid preparation apparatus, the supply apparatus, the recovery apparatus, the filtration equipment, etc. can be all downsized, and the grinding fluid supply cost can be reduced. Further, since the excess grinding liquid is not supplied, the scattering of the grinding liquid is reduced and the maintenance due to the dirt of the device is facilitated. Further, since the present invention can be implemented in the form of a small nozzle, it can be applied to a grinding apparatus using a conventional nozzle with a simple modification.

[Brief description of drawings]

FIG. 1 is a schematic conceptual view of a conventional grinding apparatus. (A) When the grinding fluid is sprayed (b) When the grinding fluid is supplied to the grindstone surface

FIG. 2 is a schematic diagram of the device of the present invention.

3 (a) to 3 (c) are enlarged cross-sectional views showing states of various grindstone surface shapes and nozzle tips to which they are transferred.

[Explanation of symbols]

 1 Grindstone 2 Work Material 3 Nozzle 4 Grinding Point 5 Grinding Fluid 6 Grinding Fluid Supply Pipe 7 Grinding Fluid Supply Port 8 Nozzle Fixing Screw

Claims (5)

[Claims] 1. A grinding apparatus for grinding a work material with a grindstone while supplying a grinding fluid from a nozzle to a grinding point, wherein the nozzle tip shape is a shape to which a grindstone outer peripheral shape is transferred. apparatus. 2. A grinding process for grinding a work material with a grindstone while supplying a grinding liquid from a nozzle to a grinding point, wherein the nozzle tip shape is a shape in which a grindstone outer peripheral shape is transferred. Used grinding fluid supply device. 3. The apparatus according to claim 1, wherein all or the tip of the nozzle is made of carbon, resin or alloy having good machinability. 4. A method for grinding a work material with a grindstone while supplying a grinding fluid from a nozzle to a grinding point, wherein the tip shape of the nozzle is a transfer of the surface shape of the grindstone, and the tip part of the nozzle is A method of grinding a work material while closely adhering to the surface of a grindstone and supplying a grinding fluid. 5. A method of grinding a work material with a grindstone while supplying a grinding liquid to a grinding point from a nozzle, in which the tip of the nozzle is pressed against the surface of the grindstone before the grinding of the work material is started. Grind the tip of the nozzle, transfer the surface shape of the grindstone to the nozzle tip, fix the nozzle at this position or slightly retract it until the nozzle tip no longer contacts the grindstone, and then transfer the surface shape of the grindstone. Method to grind the work material while supplying the grinding fluid from the nozzle.