JPH0947043A - Controller for actuator having hysteresis - Google Patents

Abstract

PROBLEM TO BE SOLVED: To linearize an actuator having hysteresis based on the information of current status amount of actuator and to realize highly accurate positioning by providing linear feedback compensation. SOLUTION: The controller controls an actuator having hysteresis in the relationship between input and output. The controller comprises a resistive heater 3 for varying the input to an actuator 1, a strain gauge 2 for measuring the output from the actuator 1, and an adding section 6 for receiving a command input signal 7 to the resistive heater 3 and an output signal from the strain gauge 2 to operate an input signal to the resistive heater 3, wherein the command input signal and the input signal are in-phase while the command input signal and the output signal have a linear relationship.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention aims to controllably compensate the hysteresis of an actuator having a hysteresis so as to have a linear characteristic and to improve the controllability by performing a linear feedback to this system. The present invention relates to a control device for an actuator having a characteristic hysteresis.

[0002]

2. Description of the Related Art Generally, an actuator having hysteresis is a non-linear control object as indicated by its hysteretic property. In the actuator control device according to the prior art, the linear control method P is applied to the non-linear control object.
Control is performed by using ID (Proportional plus Integral plus Derivative) feedback and the like.

On the other hand, for example, in Japanese Unexamined Patent Publication No. 6-310751, a displacement amount of a piezoelectric ceramic actuator, which generates mechanical energy by applying a DC voltage and is slightly displaced, is linear with respect to an input voltage. Discloses a technique of non-linearly amplifying an input voltage and applying a non-linear output voltage obtained by the non-linear amplification to a piezoelectric ceramic actuator. This technique was able to make the displacement amount of the piezoelectric ceramic actuator linear or quasi-linear with respect to the input voltage.

[0004]

However, in the above-mentioned prior art, since there is no general-purpose PID gain determination method capable of obtaining good controllability in all control regions, the gain is determined by trial and error. Therefore, when the control target is changed or when shape memory alloys having slightly different characteristics are used, it is necessary to adjust the gain from the beginning.

On the other hand, in the technique disclosed in Japanese Unexamined Patent Publication No. 6-310751, the nonlinear characteristic of the actuator is improved by performing feedforward compensation based on the driving parameter of the actuator measured in advance,
Although the characteristics are linear or quasi-linear, the current state quantity of the actuator is not monitored in the above configuration, so there is no guarantee that the linearization is actually performed due to disturbance or modeling error.

The present invention has been made in view of the above problems. An object of the present invention is to monitor the current state quantity of an actuator and linearize the actuator having hysteresis based on this information. It is an object of the present invention to provide an actuator control device having hysteresis that enables highly accurate positioning by providing linear feedback compensation for the linearized actuator.

[0007]

In order to achieve the above object, the first aspect of the present invention is a controller for controlling an actuator having a hysteresis in the relationship between the input and the output, in which a target input signal and the actuator are A calculation output means for calculating and outputting an input signal to the actuator in response to the output signal from the output signal, a correction means for making the target input signal and the input signal in phase, and the target input signal and the output signal. And a linear compensating means having a linear relationship.

According to a second aspect, in a control device for controlling an actuator whose input-output relationship has a hysteresis, a correction signal calculation means for receiving an output signal from the actuator and calculating a correction output signal,
Adder means for receiving a target input signal and the corrected output signal to generate and output an input signal to the actuator from the sum of the two, a correction means for making the target input signal and the input signal in phase, and the target It is characterized by comprising a linear compensating means for making the input signal and the output signal have a linear relationship.

A third aspect of the present invention is, in a control device for controlling an actuator whose input-output relationship has a hysteresis, input changing means for changing the input of the actuator, and output measurement for measuring the output of the actuator. Means, operation output means for receiving a target input signal to the input changing means and a measurement output signal from the output measuring means to calculate and output an input signal to the input changing means, the target input signal and the It is characterized by comprising a correction means for making the input signal the same phase and a linear compensation means for making the target input signal and the measured output signal have a linear relationship.

The operations of the first to third aspects are as follows. That is, in the first aspect, the calculation output means calculates and outputs the input signal to the actuator based on the target input signal and the output signal from the actuator, and the correction means calculates the target input signal and the input signal. Have the same phase, and the target signal and the output signal have a linear relationship by the linear compensating means.

In the second aspect, the correction signal calculating means calculates the correction output signal based on the output signal from the actuator, and the adding means calculates the sum of the two based on the target input signal and the correction output signal. To generate and output the input signal to the actuator, the correcting means makes the target input signal and the input signal in phase, and the linear compensating means makes the target input signal and the output signal have a linear relationship.

Furthermore, in the third aspect, the input of the actuator is changed by the input changing means, the output of the actuator is measured by the output measuring means, and the target input signal to the input changing means and the above-mentioned by the arithmetic output means. The input signal to the input changing means is calculated and output in response to the measured output signal from the output measuring means, the target input signal and the input signal are made in phase by the correcting means, and the target input is made by the linear compensating means. There is a linear relationship between the signal and the measured output signal.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. First, FIGS. 1 to 3 are views showing the configuration of an actuator having hysteresis according to the first embodiment of the present invention. Incidentally, these FIG. 1 to FIG.
In the description, the same components will be denoted by the same reference numerals.

As shown in FIG. 1, the command input signal (X
The output signal (X) of d) 7 and the strain gauge 2 is output to the comparison unit 8, and the comparison unit 8 calculates the difference between the two. The difference signal of the comparison unit 8 is output to the linear compensation unit 9, and the linear compensation unit 9 performs proportional compensation on the difference signal.
A target input signal (U) is generated. The target input signal (U) 5 of the linear compensating unit 9 and the correction output signal (S) of the correction output unit 4 are output to the adding unit 6, both of which are added, and the output of the adding unit 6 Signal (V) is resistance heater 3
Is output to In the resistance heater 3, the temperature of the shape memory alloy 1 which is the actuator is controlled based on the output signal (V). The strain gauge 2 measures the strain (ε) of the shape memory alloy 1 that is the actuator and outputs it as an output signal (X). This output signal (X) is output to the correction output unit 4 and also fed back to the comparison unit 8.

In FIG. 1, a schematic view of the block 10 and the block 11 which constitute the control system is shown in FIG. In FIG. 2, the control chip 13 excludes the constituent elements in the block 10 from the constituent elements in the block 11 constituting the control system, the correction output unit 4, the addition unit 6, the comparison unit 8, The circuit configuration including the linear compensating unit 9 is integrated into a single chip with a memory that stores electrical parts and algorithms.

Further, the control chip 13 is connected to the shape memory alloy 1 through a flexible cable 20 made of a polyimide having a high temperature resistance that does not hinder the movement of the shape memory alloy 1. Also, this control chip 1
3 is connected to the resistance heater 3 via wirings 16 and 17, and the strain gauge 2 is connected via wirings 18 and 19.
The wirings 16 to 19 are embedded in the flexible cable 20 so as not to break. In addition to the above, the control chip 13 serves as a terminal for connection with the outside, and includes a grounding terminal 14 and a power supply terminal 15 for inputting about + 5V, the command input signal terminal 7, and a signal monitor for the strain gauge 2. A terminal 12 is provided.

In such a configuration, the correction output signal S of the correction output unit 4 is calculated by the following equation (1) based on the output signal X input to the correction output unit 4 and is added to the addition unit 6. Is output.

S = C0 + C1 (X-X0) + C2 (X-X0) ³ (1) The constants C0, C1, C2 and X0 in the above formula (1) are determined as follows, for example. That is, as shown in FIG. 3, a sinusoidal input signal V whose amplitude exponentially attenuates is applied to the resistance heater 3 with respect to the system in which only the block 10 is taken out, and the distortion at that time is applied. The output signal X of the gauge 2 is monitored.

At this time, the temperature T of the shape memory alloy 1 heated by the resistance heater 3 is measured by, for example, a thermocouple (not shown), and the strain of the shape memory alloy 1 is converted from the output signal of the strain gauge 2. If the relationship between ε and the temperature T is illustrated, a general hysteresis carp including a major loop and a minor loop as shown in FIG. 4 can be obtained. In the figure, the vertical axis represents strain ε and the horizontal axis represents temperature T.

Actually, in addition to the relationship shown in FIG. 4, the effect of filtering by the resistance heater 3 and the strain gauge 2 is added to this system, but slightly, the input signal V and the output signal X are added. The relationship is as shown in FIG.
The ordinate and abscissa of FIG. 5 represent measured numerical data proportional to the output signal X and the input signal V, respectively.

The state of the time response of the output signal X is shown in FIG. 6. From this FIG. 6, there are several points where the time derivative of the output signal X is zero, that is, X changes from increasing to decreasing, or from decreasing to increasing. It is extracted and shown by a white dot in FIG. 7. However, FIG.
In FIG. 5, the vertical axis and the horizontal axis are interchanged for the following function approximation operation.

In the following equation (2), dX / dt =
While approximating with a linear cubic function with respect to X with 0,
Each constant term except the positive constant r is determined by the least squares method. The cubic function 27 thus determined is as shown in FIG. The following expression (2) is given by the output signal X,
It is an approximate model that describes the hysteresis relationship of the input signal V.

[0023]

[Equation 1]

Block 1 modeled by the above equation (2)
When the target input signal U expressed by the following equation (3) is given to the controlled object within 0, the nonlinear term is compensated and the target input signal U and the output signal X are linearized as shown in the following equation (4). To be done.

[0025]

[Equation 2]

Further, the target input signal U is changed to the command input signal Xd.
And the output signal X and the proportional gain indicating the linear compensator 9-
The total control system synthesized by K and K as shown in the following equation (5) is given by the following equation (6). Here, Xe represents X-Xd.

[0027]

(Equation 3)

As a result, in this control system, Xe converges to zero, so that the output signal X coincides with the target value Xd and the position control is achieved. However, in the above equation, the gain K indicates a positive constant.

The effects obtained by the first embodiment will be described below. In the controller of the actuator having hysteresis according to the first embodiment, the linearization is performed by the nonlinear term compensation based on the characteristic measurement of the controlled object, and the linearized control is performed on the linearized object. The gain determination method can be determined by taking over the conventional control theory.

Further, in the conventional PID control, integral compensation is indispensable in order to reduce the steady-state deviation, and therefore the responsiveness was reduced, but in this embodiment, if modeling is sufficiently performed, Particularly, integral compensation is not required, and high position control can be realized without impairing responsiveness.

The control according to this embodiment was actually applied to the shape memory alloy actuator and the step response was measured. As a result, the output signal of the actuator coincided with the command input signal as shown in FIG. Therefore, the first
It is clear that the desired control is realized in the embodiment.

Although the first embodiment of the present invention has been described above, it is needless to say that various modifications and changes can be made to the respective configurations of this embodiment without departing from the spirit of the invention. . For example, first, the linear compensation unit 9 may perform proportional and integral compensation. According to this,
It is possible to reduce the steady-state deviation when the modeling error of the controlled object cannot be ignored. Secondly, the linear compensation section 9 may perform proportional and differential compensation. According to this, it becomes possible to improve the response speed of the controlled object. Thirdly, the linear compensation unit 9 may perform proportional, integral and differential compensation. According to this, it becomes possible to positively design the response of the controlled object into a desired response waveform.

Fourthly, the correction output unit 4 may use the following equation (7) considering even higher order terms. However, in this case, the model approximation corresponding to the above equation (2) also needs to be performed on the fifth-order linear polynomial according to the following equation (8). As a result, it becomes possible to design the target calculation unit in consideration of the details of the hysteresis shape.

[0034]

(Equation 4)

Fifth, the above actuator may be a piezo actuator. In this case, a pair of electrode plates that change the electric field is used instead of the resistance heater 3 that changes the temperature of the actuator. At this time,
The strain gauge may be a laser displacement meter or the like.
Further, sixthly, the actuator may be a mechanical gel actuator. In that case, instead of the resistance heater 3 that changes the temperature of the actuator, pH
A pair of electrode plates for changing the electric field is used. At this time, the strain gauge may be a linear gauge or the like.

As described above, according to the first embodiment, the one-chip control system is attached to the shape memory alloy so as not to hinder the movement of the control system. It can be used without being aware of. Furthermore, it is also possible to design a linear compensator for giving a desired response to a linearized controlled object by using a conventional linear control method.

Next, FIGS. 9 and 10 are views showing the structure of an actuator having hysteresis according to the second embodiment of the present invention. 9 and 10, the same components as those shown in FIG. 1 described above are designated by the same reference numerals and will be described.

As shown in FIG. 9, in the first embodiment shown above, the output of the adder 6 was directly connected to the resistance heater 3, but in the second embodiment, , And is connected to the resistance heater 3 via the switch 26. Further, the initialization unit 22 that receives the input of the initialization command signal 21
Is newly provided, and the output of the initialization unit 22 is connected to the inputs of the switch 26 and the correction output unit 4, respectively.

The initialization unit 22 outputs the parameter adjustment signal 24 to the switch 26 when the initialization command signal 21 is "ON", and identifies the control model in the block 10 from the output signal (X). Furthermore, the signal 23 for initializing the internal parameters of the correction output unit 4 is output to the correction output unit 4. The switch 26 is configured to cut off the output from the adder 6 and make it conductive to the terminal 25 when the initialization command signal 21 is “ON”. Further, the output signal (X) of the strain gauge 2 is connected so as to be input to the initialization unit 22. The other configurations are similar to those of the first embodiment described above, and thus detailed description thereof is omitted here.

In FIG. 9, the states of the block 10 and the block 11 constituting the control system are shown in FIG. 9 has substantially the same configuration as that of FIG. 2 described above, but the control chip 13 has a grounding terminal 14 as a terminal for connection with the outside, a power supply terminal 15 for inputting about +5 V, The difference is that an initialization command signal terminal 21 is provided in addition to the command input signal terminal 7 and the signal monitor terminal 12 of the strain gauge 2.

In such a configuration, the correction output signal S of the correction output unit 4 is arithmetically output based on the output signal X based on the above equation (1), and the constant C0 of the above equation (1) is used. , C1, C2, X0 are determined as follows, for example.

That is, when the initialization command signal 21 is turned on, the switch 26 interlocks with it and cuts off the output from the adder section 6 and makes it conductive to the terminal 25. Next, the parameter adjusting signal 2 having a sinusoidal shape whose amplitude is exponentially stored in advance is stored in the initialization unit 22.
4 is output. Then, the input signal V is applied to the resistance heater 3
The output signal X of the strain gauge 2 at that time is monitored.

In the initialization section 22, the signal output is smoothed by a predetermined filter, and then time differential processing is performed. The point where the differential value becomes zero is the input signal V and the output signal X. Extract several points in combination. Based on the extracted points, the curve fitting processing routine in the initialization unit 22 approximates them by a linear cubic function relating to the output signal X with dX / dt = 0 in the equation (2), and Each constant term except the positive constant r is determined by the least squares method.

Then, the internal parameters of the correction output unit 4 are initialized on the basis of the constant terms obtained by the initialization signal 23. The correction output unit 4 thus initialized
Are stored in non-volatile memory. After this series of processing is completed, the switch 26 is connected to the output of the adder 6 and is disconnected from the terminal 25 in conjunction with this.

After the initialization of the internal parameters of the correction output unit 4 is completed, the target input signal expressed by the equation (3) is given to the control target in the block 10 modeled by the equation (2). When U is given, the non-linear term is compensated and the target input signal U and the output signal X are linearized as in the above equation (4). Further, the target input signal U is generated from the command input signal Xd, the output signal X, and the proportional gain −K indicating the linear compensator 9 as shown in the above equation (5), and the entire control system is represented by the above equation (6). Like Xe represents X-Xd.

As a result, since Xe of the control system converges to zero, the output signal X coincides with the command input signal Xd which is the target value, and the position control is achieved. However, the gain K indicates a positive constant.

As described above, in the actuator control device having hysteresis according to the second embodiment, the contents of the correction output section can be updated by the initialization command signal, so that fatigue and changes in operating conditions can occur. It is possible to deal with the case where the control characteristic is deteriorated due to the change of the internal parameter of the controlled object. Furthermore, since the control parameters required for linearization can be easily determined, it is possible to flexibly deal with changes such as fatigue of the controlled object.

Next, FIGS. 11 to 13 are views showing the configuration of an actuator having hysteresis according to the third embodiment of the present invention. 11 to 13, the same components as those shown in FIG. 1 described above are designated by the same reference numerals.

As shown in FIG. 11, in the above-described first embodiment (FIG. 1), the adding section 6 is constructed so as to be directly connected to the resistance heater 3. In the second embodiment, the addition unit 6 is configured to be connected to the resistance heater 3 via the input subtraction unit 30 and the input linear compensation unit 29. More specifically, the output of the addition unit 6 is connected to the input of the input subtraction unit 30, and the input change target signal (V) is input from the addition unit 6 to the input subtraction unit 3.
It is output to 0. The input subtraction unit 30 calculates the difference between the input change target signal (V) and the output signal of the thermocouple 28, and outputs the output signal related to the difference to the input linear compensation unit 29.

Then, in the input section linear compensation section 29,
Linear compensation is performed on the output signal of the input subtraction unit 30 to generate a signal, which is output to the resistance heater 3. The output signal (T) of the resistance heater 3 is the thermocouple 2
8, the temperature of the actuator is measured by the thermocouple 28, and a signal related to the temperature is input to the input subtraction unit 30.
Is output to Other configurations are similar to those of the above-described first embodiment, and therefore detailed description thereof is omitted here.

In FIG. 11, an external view of the block 10 and the block 11 which constitute the control system is shown in detail in FIG.
As shown in FIG. The control chip 13 has wirings 16 and 1
7 is connected to the resistance heater 3, wirings 18 and 19 are connected to the strain gauge 2 and wirings 31 and 32 are connected to the thermocouple 28, and the wirings 16 to 19, 31 and 32 are flexible so as not to break. It is embedded in the cable 20. Further, the control chip 13 has a grounding terminal 14, a power supply terminal 15 for inputting about + 5V, the command input signal terminal 7, and a signal monitoring terminal 12 of the strain gauge 2 as terminals for connection with the outside. Is provided.

In such a configuration, the correction output signal S of the correction output unit 4 is arithmetically output based on the output signal X based on the equation (1), and the constant C0 of the equation (1), C1, C2 and X0 are determined as follows, for example.

That is, the block 10 shown in FIG.
The PI feedback system shown in the block 33 is provided so that the heating / cooling by the heater is robust against the temperature disturbance for the system in which only the inside is taken out. Then, a sinusoidal input signal V whose amplitude decays exponentially is given,
The output signal X of the strain gauge 2 at that time is monitored. At this time, the temperature T of the shape memory alloy 1 heated by the resistance heater 3 is measured by the thermocouple 28,
If the relationship between the strain ε of the shape memory alloy 1 converted from the signal output of the strain gauge 2 and the temperature T is illustrated, a general hysteresis including a major loop and a minor loop as shown in FIG. The carp is obtained.

Actually, in addition to the relationship shown in FIG. 4, the effect of response delay in the resistance heater 3 and the strain gauge 2 to a small extent is added to this system, and the input signal V and the output signal are added. The relationship with X is as shown in FIG. The ordinate and abscissa of FIG. 5 represent measured numerical data proportional to the output signal X and the input signal V, respectively.

From FIG. 5, the time differential of X is zero, that is, the points at which X increases and decreases or decreases and increases are extracted as shown by the white dots in FIG. In (2), approximation is performed with a linear cubic function relating to X with dX / dt = 0, and each constant term except for the positive constant r is determined by the least squares method. The cubic function 27 thus determined is shown in FIG. The equation (2) is an approximate model that describes the hysteresis relationship between the output signal X and the input signal V.

Block 1 modeled by the above equation (2)
When the input signal U expressed by the above equation (3) is given to the controlled object within 0, the nonlinear term is compensated and the input signal U and the output signal X are linearized as indicated by the above equation (4). .

Further, the target input signal U is changed to the command input signal Xd.
Then, the output signal X and the linear compensator 9 are generated from the proportional gain −K as in the above equation (5), and the entire control system becomes as in the above equation (6). Here, Xe represents X-Xd.
As a result, in this control system, Xe converges to zero, so that the output X coincides with the target value Xd and the position control is achieved. However, the gain K indicates a positive constant.

Although the third embodiment of the present invention has been described above, it is needless to say that various modifications and changes can be made to the respective configurations of this embodiment without departing from the spirit of the invention. . That is, first, the input linear compensation unit 29
Alternatively, proportional and differential compensation may be performed. According to this, the phase delay of the heater unit 3 can be improved. Further, secondly, the input linear compensation unit 29
Alternatively, proportional, integral compensation and differentiation may be performed.
According to this, it is possible to improve the phase delay of the heater unit 3 and reduce the steady deviation to improve the linearity.

Thirdly, the input linear compensator 29 is used.
Alternatively, proportional compensation may be performed. According to this,
When the non-linearity or response delay of the heater section 3 is small, the controllability can be most easily improved.

As described above, according to the third embodiment, since the feedback loop of the heater portion is provided, it is possible to reduce the adverse effect due to the temperature disturbance. Further, even when the model approximation in the above equation (2) is not valid due to the large non-linear characteristic of the heater itself, this feedback loop improves the non-linearity in the heater section, and since it approximates to linear, the above model approximation is effective. To work.

Further, according to the third embodiment, since the heater is driven by measuring the temperature and forming the feedback system, it is robust against temperature disturbance.
It is possible to construct a (robust) control system.

The embodiment of the present invention has been described above, but the summary of the present invention is as follows. (1) In a control device for controlling an actuator whose input-output relationship has a hysteresis, an arithmetic output unit that receives a target input signal and an output signal from the actuator and arithmetically outputs the input signal to the actuator, An actuator control device having hysteresis, comprising: a correction means for making the target input signal and the input signal have the same phase; and a linear compensation means for making the target input signal and the output signal have a linear relationship. .

In this structure, the target input signal and the input signal have the same phase, and the calculation output means causes the target input signal and the output signal from the actuator to have a linear relationship. In this way, since the target input signal and the output signal from the actuator have a linear relationship in the calculation output means, the hysteresis characteristic of the actuator is controllably reduced. (2) In a control device for controlling an actuator whose input-output relationship has a hysteresis, a correction signal calculating means for calculating a correction output signal by receiving an output signal from the actuator, a target input signal and the correction output signal. Receiving means for generating and outputting an input signal to the actuator from the sum of the two, correction means for making the target input signal and the input signal in phase, and the target input signal and the output signal being linear. A controller for an actuator having hysteresis, characterized in that:

In such a configuration, the correction signal calculating means receives the output signal and calculates the correction output signal,
The adding means receives the corrected output signal and the target input signal and generates an input signal to the actuator from the sum of the two. The target input signal and the input signal have the same phase, and the target input signal and the The output signal from the actuator has a linear relationship. This allows
Controllably, the hysteresis characteristic of the actuator is reduced. (3) In the above (2), the correction signal calculation means is based on the output signal X and has the following relationship:
A controller for an actuator having hysteresis, characterized by outputting

[0065]

(Equation 5)

However, n is a natural number, X0 and Ck (k = 0
~ N) represents a constant. In such a configuration, the correction signal calculation means outputs the correction output signal S based on the output signal X. This makes it possible to generate a corrected output signal that reduces the hysteresis of the actuator. (4) In a control device for controlling an actuator whose input-output relationship has a hysteresis, an input changing means for changing the input of the actuator, an output measuring means for measuring the output of the actuator, and an input changing means. Of the target input signal and the measured output signal from the output measuring means to calculate and output the input signal to the input changing means, and the target input signal and the input signal have the same phase. A control device for an actuator having hysteresis, comprising: a correction means; and a linear compensation means having a linear relationship between the target input signal and the measured output signal.

In such a structure, the input of the actuator is changed by the input changing means, the output of the actuator is measured by the output measuring means, and the arithmetic output means receives the target input signal and the output signal. By generating the input signal to the input changing means,
The target input signal and the input signal have the same phase, and the target input signal and the output signal from the output measuring means have a linear relationship.

As a result, the target input signal and the output signal from the output measuring means have a linear relationship, so that the hysteresis characteristic of the actuator is controllably reduced. (5) In a control device for controlling an actuator whose input-output relationship has hysteresis, a means for changing the input of the actuator, a means for measuring the output of the actuator, and a measurement output signal from the output measuring means. And a correction signal calculating means for calculating a correction output signal and an addition means for receiving the correction output signal and the target input signal and generating and outputting an input signal to the input changing means from a sum of the two. A controller for an actuator having hysteresis, wherein the target input signal and the input signal have the same phase, and the target input signal and the measured output signal have a linear relationship.

In such a configuration, the input of the actuator is changed by the input changing means, the output of the actuator is measured by the output measuring means, the output signal is received, and the correction output is made by the correction signal calculating means. A signal is calculated, the correction output signal and the target input signal are received by the adding means, an input signal to the input changing means is generated and output from the sum of the two, and the target input signal and the input signal have the same phase. In addition, the target input signal to the input changing means and the output signal from the output measuring means have a linear relationship.
As a result, the hysteresis of the actuator is improved and the controllability is improved. (6) In the above (5), the correction signal calculating means is based on the output signal X and the correction output signal S according to the following equation.
A controller for an actuator having hysteresis, characterized by outputting

[0070]

(Equation 6)

However, n is a natural number, X0 and Ck (k = 0
~ N) represents a constant. In such a configuration, the correction signal calculation means outputs the correction output signal S based on the output signal X. This makes it possible to generate a corrected output signal that reduces the hysteresis of the actuator. (7) In the above (1), there is provided a comparing means for outputting a difference signal between the command input signal and the output signal from the actuator, and a linear compensating means for performing linear compensation on the difference signal and outputting the target input signal. A control device for an actuator having hysteresis, wherein the output signal approaches the command input signal.

In such a configuration, the comparing means outputs a difference signal between the command input signal and the output signal from the actuator, and the linear compensating means performs linear compensation on the difference signal to obtain the target input signal. Is output. Thereby, the output signal can be controlled so as to approach the command input signal. (8) A control device for an actuator having hysteresis according to the above (7), wherein the linear compensation is proportional compensation.

In such a configuration, proportional compensation is performed by the proportional compensation means. As a result, the command input signal can be controlled to approach the target input signal without causing a phase delay. (9) The control device for an actuator having hysteresis according to the above (7), wherein the linear compensation is proportional and integral compensation.

In such a configuration, the proportional / integral compensation means performs proportional / integral compensation. This allows
The command input signal can be controlled so as to approach the target input signal with a small steady deviation. (10) The control device for an actuator having hysteresis as described in (7) above, wherein the linear compensation is proportional or differential compensation.

In such a configuration, the proportional / differential compensation means performs the proportional / differential compensation. This allows
The command input signal can be controlled so as to approach the target input signal with high responsiveness. (11) In (7) above, the linear compensation is proportional, integral,
An actuator control device having hysteresis characterized by differential compensation.

With such a configuration, the proportional, integral, and differential compensation means perform proportional, integral, and differential compensation.
This facilitates the response waveform setting when controlling the command input signal to approach the target input signal. (12) In the above (2), there are provided comparison means for outputting a difference signal between the command input signal and the output signal from the actuator, and linear compensation means for performing linear compensation on the difference signal and outputting the target input signal. An actuator control device having hysteresis, wherein the output signal approaches the command input signal.

In such a configuration, the comparison means outputs the difference signal between the command input signal and the output signal from the actuator, and the linear compensation means performs linear compensation on the difference signal to obtain the target input signal. Output. Thereby, the output signal can be controlled so as to approach the command input signal. (13) The control device for an actuator having hysteresis according to the above (12), wherein the linear compensation is proportional compensation.

In such a configuration, proportional compensation is performed by the proportional compensation means. As a result, the command input signal can be controlled to approach the target input signal without causing a phase delay. (14) The control device for an actuator having hysteresis according to the above (2), wherein the linear compensation is proportional and integral compensation.

In such a configuration, the proportional / integral compensation means performs the proportional / integral compensation. This allows
The command input signal can be controlled so as to approach the target input signal with a small steady deviation. (15) The control device for an actuator having hysteresis as described in (12) above, wherein the linear compensation is proportional or differential compensation.

In such a configuration, the proportional / differential compensation means performs proportional / differential compensation. This allows
Since the proportional / differential compensation is performed by the proportional / differential compensating means, it is possible to control so that the command input signal approaches the target input signal with high responsiveness. (16) The control device for an actuator having hysteresis as described in (12) above, wherein the linear compensation is proportional, integral, or differential compensation.

In such a structure, the proportional, integral, and differential compensation means perform proportional, integral, and differential compensation.
Accordingly, since the proportional, integral, and differential compensation means perform proportional, integral, and differential compensation, it becomes easy to set a response waveform when controlling the command input signal to approach the target input signal. (17) In the above (4), it has a comparing means for outputting a difference signal between the command input signal and the measurement output signal, and a linear compensating means for performing linear compensation on the difference signal and outputting the target input signal. A controller for an actuator having hysteresis, wherein the output signal approaches the command input signal.

In such a configuration, the comparison means outputs the difference signal between the command input signal and the output signal from the actuator, the linear compensation means performs linear compensation on the difference signal, and outputs the target input signal. To do. Thereby, the output signal can be controlled so as to approach the command input signal. (18) The control device for an actuator having hysteresis according to the above (17), wherein the linear compensation is proportional compensation.

In such a configuration, proportional compensation is performed by the proportional compensation means. As a result, the command input signal can be controlled to approach the target input signal without causing a phase delay. (19) The control device for an actuator having hysteresis as described in (17) above, wherein the linear compensation is proportional and integral compensation.

In such a configuration, the proportional / integral compensation means performs the proportional / integral compensation. This allows
The command input signal can be controlled so as to approach the target input signal with a small steady deviation. (20) The control device for an actuator having hysteresis according to the above (17), wherein the linear compensation is proportional or differential compensation.

In such a configuration, the proportional / differential compensation is performed by the proportional / differential compensation means. This allows
The command input signal can be controlled so as to approach the target input signal with high responsiveness. (21) The control device for an actuator having hysteresis as described in (17) above, wherein the linear compensation is proportional, integral, or differential compensation.

In such a configuration, the proportional, integral, and differential compensation means perform proportional, integral, and differential compensation.
This facilitates the response waveform setting when controlling the command input signal to approach the target input signal. (22) In the above (5), it has a comparing means for outputting a difference signal between the command input signal and the measurement output signal, and a linear compensating means for performing linear compensation on the difference signal and outputting the target input signal. A controller for an actuator having hysteresis, wherein the output signal approaches the command input signal.

In such a configuration, the comparison means outputs the difference signal between the command input signal and the output signal from the actuator, the linear compensation means performs linear compensation on the difference signal, and outputs the target input signal. To do. Thereby, the output signal can be controlled so as to approach the command input signal. (23) The control device for an actuator having hysteresis according to the above (22), wherein the linear compensation is proportional compensation.

In such a configuration, proportional compensation is performed by the proportional compensation means. As a result, the command input signal can be controlled to approach the target input signal without causing a phase delay. (24) The control device for an actuator having hysteresis according to the above (22), wherein the linear compensation is proportional and integral compensation.

In such a configuration, the proportional / integral compensation means performs proportional / integral compensation. This allows
The command input signal can be controlled so as to approach the target input signal with a small steady deviation. (25) The control device for an actuator having hysteresis according to the above (22), wherein the linear compensation is proportional or differential compensation.

In such a configuration, the proportional / differential compensation is performed by the proportional / differential compensation means. This allows
The command input signal can be controlled so as to approach the target input signal with high responsiveness. (26) The control device for an actuator having hysteresis as described in (22) above, wherein the linear compensation is proportional, integral or differential compensation.

In such a configuration, the proportional, integral, and differential compensation means perform proportional, integral, and differential compensation.
This facilitates the response waveform setting when controlling the command input signal to approach the target input signal. (27) The control device for an actuator having hysteresis according to the above (1), wherein the actuator is a shape memory alloy actuator.

With such a structure, the shape memory alloy actuator is linearly driven. This reduces hysteresis. (28) The control device for an actuator having hysteresis as described in (1) above, wherein the actuator is a chemo-mechanical gel actuator.

With such a structure, the chemo-mechanical gel actuator is linearly driven. This allows
Hysteresis is reduced. (29) The control device for an actuator having hysteresis according to the above (1), wherein the actuator is a piezo actuator.

With such a structure, the piezo actuator is driven linearly. This reduces hysteresis. (30) The control device for an actuator having hysteresis according to the above (2), wherein the actuator is a shape memory alloy actuator.

With such a structure, the shape memory alloy actuator is linearly driven. This reduces hysteresis. (31) The control device for an actuator having hysteresis as described in (2) above, wherein the actuator is a chemo-mechanical gel actuator.

With this structure, the chemo-mechanical gel actuator is driven linearly. This allows
Hysteresis is reduced. (32) The control device for an actuator having hysteresis as described in (2) above, wherein the actuator is a piezo actuator.

The piezo actuator is driven linearly. This reduces hysteresis. (33) The control device for an actuator having hysteresis according to the above (4), wherein the actuator is a shape memory alloy actuator.

With such a structure, the shape memory alloy actuator is linearly driven. This reduces hysteresis. (34) The control device for an actuator having hysteresis according to the above (4), wherein the actuator is a chemo-mechanical gel actuator.

With this structure, the chemo-mechanical gel actuator is driven linearly. This allows
Hysteresis is reduced. (35) The control device for an actuator having hysteresis as described in (4) above, wherein the actuator is a piezo actuator.

With such a structure, the piezo actuator is driven linearly. This reduces hysteresis. (36) The control device for an actuator having hysteresis according to the above (5), wherein the actuator is a shape memory alloy actuator.

With such a structure, the shape memory alloy actuator is linearly driven. This reduces hysteresis. (37) The control device for an actuator having hysteresis according to the above (5), wherein the actuator is a chemo-mechanical gel actuator.

With such a structure, the chemo-mechanical gel actuator is linearly driven. This allows
Hysteresis is reduced. (38) The control device for an actuator having hysteresis as described in (5) above, wherein the actuator is a piezo actuator.

With such a structure, the piezo actuator is driven linearly. This reduces hysteresis. (39) The control device for an actuator having hysteresis according to the above (33), wherein the input changing means is a resistance pair heater.

In such a structure, the temperature of the shape memory alloy is changed by the resistance pair heater. Thereby, the shape memory alloy can be deformed. (40) The control device for an actuator having hysteresis as set forth in (33), wherein the output measuring means is a strain gauge.

With such a structure, the strain of the shape memory alloy is measured by the strain gauge. Thereby, the deformation amount of the shape memory alloy can be known. (41) The control device for an actuator having hysteresis as described in (34) above, wherein the input changing means is a pH changing device including an electrode.

In such a structure, the pH of the chemo-mechanical gel actuator is changed by the resistance pair heater. As a result, the volume of the chemo-mechanical gel actuator can be changed. (42) The control device for an actuator having hysteresis as set forth in (34), wherein the output measuring means is a linear gauge.

In such a configuration, the change amount of the chemo-mechanical gel actuator is measured by the linear gauge. Thereby, the deformation amount of the chemo-mechanical gel actuator can be known. (43) The control device for an actuator having hysteresis as set forth in (35), wherein the input changing means is an electric field changing device including electrodes.

In such a structure, the electric field applied to the piezoelectric actuator is changed by the electric field changing means. Thereby, the piezo actuator can be deformed. (44) The control device for an actuator having hysteresis as described in (35) above, wherein the output measuring means is a laser displacement meter.

With such a structure, the amount of deformation of the piezo actuator is measured by the laser displacement meter. Therefore, the amount of deformation of the piezo actuator can be measured with the laser displacement meter in a non-contact manner. (45) In the above (1), an initialization means for receiving an initialization command signal and the output signal, and generating an initialization signal for initializing a parameter adjusting signal and a parameter of the input signal computing means; A control device for an actuator having hysteresis, comprising a switch that receives an activation command signal and switches an input to the actuator between the input signal and the parameter adjusting signal.

In such a configuration, the initialization means initializes the parameters of the input signal arithmetic unit. This enables control according to the characteristics of the actuator. (46) In the above (2), initialization means for receiving the initialization command signal and the output signal, and generating an initialization signal for initializing the parameter adjustment signal and the parameter of the correction output calculation means, and the initialization means. A control device for an actuator having hysteresis, comprising a switch that receives an activation command signal and switches an input to the actuator between the input signal and the parameter adjusting signal.

In such a configuration, the parameters of the correction output calculation device are initialized by the initialization means. Thereby, it is possible to reset the parameters of the correction output calculation device according to the characteristics of the actuator. (47) In the above (4), an initialization means for receiving the initialization command signal and the measurement output signal and generating a parameter adjustment signal and an initialization signal for initializing the parameters of the input signal computing means, A control device for an actuator having hysteresis, comprising a switch for receiving an initialization command signal and switching an input to the input changing means between the target input signal and the parameter adjusting signal.

In such a configuration, the initialization means initializes the parameters of the input signal arithmetic unit. This allows readjustment when the actuator characteristics change. (48) In the above (5), an initialization means for receiving the initialization command signal and the measurement output signal and generating an initialization signal for initializing the parameter adjustment signal and the parameter of the correction signal calculation means, A control device for an actuator having hysteresis, comprising a switch for receiving an initialization command signal and switching an input to the input changing means between the target input signal and the parameter adjusting signal.

In such a configuration, the parameters of the correction output calculation device are initialized by the initialization means. As a result, it is possible to reset the parameters of the correction output calculation device according to the characteristics of the other type actuator. (49) In the above (7), an initialization means for receiving the initialization command signal and the output signal, and generating an initialization signal for initializing the parameter adjustment signal and the parameter of the correction output calculation means; A control device for an actuator having hysteresis, comprising a switch that receives an activation command signal and switches an input to the actuator between the input signal and the parameter adjusting signal.

In such a configuration, the initialization means initializes the parameters of the input signal arithmetic unit. This allows readjustment when the actuator characteristics change. (50) In the above (12), an initialization means for receiving the initialization command signal and the output signal, and generating an initialization signal for initializing the parameter adjustment signal and the parameter of the correction output calculation means, and the initialization means. A control device for an actuator having hysteresis, comprising a switch that receives an activation command signal and switches an input to the actuator between the input signal and the parameter adjusting signal.

In such a configuration, the parameters of the correction output calculation device are initialized by the initialization means. As a result, it is possible to reset the parameters of the correction output calculation device according to the characteristics of the other type actuator. (51) In the above (17), an initialization means for receiving the initialization command signal and the measurement output signal, and generating an initialization signal for initializing a parameter adjusting signal and a parameter of the input signal computing means, A control device for an actuator having hysteresis, comprising a switch for receiving an initialization command signal and switching an input to the input changing means between the target input signal and the parameter adjusting signal.

In such a configuration, the initialization means initializes the parameters of the input signal arithmetic unit. This allows readjustment when the actuator characteristics change. (52) In the above (22), an initialization means for receiving the initialization command signal and the measurement output signal and generating an initialization signal for initializing a parameter adjustment signal and a parameter of the correction signal calculation means, A control device for an actuator having hysteresis, comprising a switch for receiving an initialization command signal and switching an input to the input changing means between the target input signal and the parameter adjusting signal.

In such a configuration, the parameters of the correction output calculation device are initialized by the initialization means. As a result, it is possible to reset the parameters of the correction output calculation device according to the characteristics of the other type actuator. (53) In a control device for controlling an actuator whose input-output relationship has hysteresis, means for changing the input of the actuator, means for measuring the output of the actuator, and means for measuring the input of the actuator. A correction signal calculation means for receiving a measurement output signal from the output measurement means to calculate a correction output signal; and a correction signal calculation means for receiving the correction output signal and the target input signal, and an input change target to the input change means from the sum of the two. An adding means for generating and outputting a signal, an input subtracting means for measuring a difference between the input change target signal and an output of the input measuring means, and an output of the input subtracting means are linearly compensated and output to the input changing means. An input part linear compensating means is provided, the output of the input changing means is stabilized, the target input signal and the input signal are in phase, and Control device for an actuator having a hysteresis target input signal and the measurement output signal is characterized by a linear relationship.

In such a configuration, the output of the input changing means is measured by the means for measuring the input of the actuator,
The input subtraction means obtains the difference between the input change target signal and the output of the input measuring means, and the input linear compensation means linearly compensates the output of the subtraction means and inputs the output to the input change means. Therefore, the non-linearity of the input changing means is corrected, and the model suitability of the compensation calculating means in the model formula is improved. (54) The control device for an actuator having hysteresis as set forth in (53), wherein the input linear compensation means is proportional compensation.

In such a configuration, proportional compensation is performed by the input section linear compensating means. Therefore, the input changing means can be proportionally compensated. (55) The control device for an actuator having hysteresis according to the above (53), wherein the input linear compensation means is proportional and integral compensation.

In such a configuration, the input linear compensation means performs proportional and integral compensation. Therefore, it becomes possible to perform proportional and integral compensation on the input changing means. (56) The control device for an actuator having hysteresis according to (53), wherein the input linear compensation means is proportional or differential compensation.

In such a configuration, the input section linear compensating means performs proportional and differential compensation. Therefore, it becomes possible to perform proportional and differential compensation on the input changing means. (57) The control device for an actuator having hysteresis as set forth in (53), wherein the input linear compensation means is proportional, integral, or differential compensation.

In such a configuration, proportional, integral, and differential compensation are performed by the input section linear compensating means. Therefore, it becomes possible to perform proportional, integral and differential compensation on the input changing means. (58) In the above (53), there is provided a comparing means for outputting a difference signal between the command input signal and the measurement output signal, and a linear compensating means for performing linear compensation on the difference signal and outputting the target input signal. A controller for an actuator having hysteresis, wherein the output signal approaches the command input signal.

In such a configuration, the comparison means outputs the difference signal between the command input signal and the measurement output signal,
The linear compensation means performs linear compensation on the differential signal and outputs the target input signal. Therefore, the output signal approaches the command input signal. (59) In the controller of the actuator having hysteresis as described in (53) above, the correction signal calculating means outputs the correction output signal S based on the output signal X in the following relationship.

[0124]

(Equation 7)

However, n is a natural number, X0 and Ck (k = 0
~ N) represents a constant. In such a configuration, the correction signal calculation means outputs the correction output signal S based on the output signal X according to the following equation. Therefore, the position controllability is improved. (60) In the control device for an actuator having hysteresis as described in (59) above, the correction signal calculation means outputs the correction output signal S based on the output signal X in the following relationship.

[0126]

(Equation 8)

However, n is a natural number, X0 and Ck (k = 0 to 0)
n) represents a constant. In such a configuration, the correction signal calculation means outputs the correction output signal S based on the output signal X according to the following equation. Therefore, the position controllability is improved. (61) The control device for an actuator having hysteresis according to (53), wherein the actuator is a shape memory alloy actuator.

In such a configuration, the shape memory alloy actuator is the control target. Therefore, it is robust against temperature disturbance. (62) The control device for an actuator having hysteresis according to the above (53), wherein the actuator is a chemo-mechanical gel actuator.

With such a configuration, the chemo-mechanical gel actuator is the control target. Therefore, it is robust against pH disturbance. (63) The control device for an actuator having hysteresis according to the above (53), wherein the actuator is a piezo actuator.

In such a configuration, the controlled object is the piezo actuator. Therefore, it is robust against electric field disturbance. (64) The control device for an actuator having hysteresis according to (58), wherein the actuator is a shape memory alloy actuator.

In such a configuration, the shape memory alloy actuator is the control target, and the position control is performed. Therefore, a position control system that is robust against temperature disturbance is configured. (65) The control device for an actuator having hysteresis according to the above (58), wherein the actuator is a chemo-mechanical gel actuator.

In such a configuration, the chemo-mechanical gel actuator is the control target, and the position control is performed. Therefore, a position control system that is robust against pH disturbance is configured. (66) The control device for an actuator having hysteresis according to the above (58), wherein the actuator is a piezo actuator.

In such a configuration, the piezo actuator is the control target and the position control is performed. Therefore, a position control system that is robust against electric field disturbance is configured. (67) The control device for an actuator having hysteresis as set forth in (61), wherein the input changing means is a resistance pair heater.

In such a structure, the input changes depending on the resistance and the heater. Therefore, the temperature can be changed. (68) The control device for an actuator having hysteresis according to the above (61), wherein the output measuring means is a strain gauge.

In such a structure, the output is measured by the strain gauge. Therefore, the strain can be measured. (69) In the control device for an actuator having hysteresis as described in (62), the input changing means is a pH changing device including an electrode.

In such a configuration, the input is changed by the pH changing device composed of the electrodes. Therefore, a pH change is possible. (70) The control device for an actuator having hysteresis according to the above (62), wherein the output measuring means is a linear gauge.

With such a configuration, the output is measured with a linear gauge. Therefore, the volume change can be measured. (71) The control device for an actuator having hysteresis as set forth in (63), wherein the input changing means is an electric field changing device including electrodes.

In such a configuration, the input changes with the electric field changing device. Therefore, the electric field is variable. (72) The control device for an actuator having hysteresis according to the above (63), wherein the output measuring means is a laser displacement meter.

With such a configuration, the output is measured by the laser displacement meter. Therefore, the amount of displacement can be measured. (73) The control device for an actuator having hysteresis as set forth in (64), wherein the input changing means is a resistance pair heater.

In such a configuration, the position is controlled by changing the input with the resistor and the heater. Therefore, position control using temperature as an input becomes possible. (74) The control device for an actuator having hysteresis as set forth in (64), wherein the output measuring means is a strain gauge.

In such a configuration, the output is measured by the strain gauge and the position is controlled. Therefore, it becomes possible to perform position control using the distortion as an output. (75) The control device for an actuator having hysteresis as described in (65) above, wherein the input changing means is a pH changing device including an electrode.

With such a configuration, the pH changing device changes the input to control the position. Therefore, position control using pH as an input becomes possible. (76) The control device for an actuator having hysteresis according to the above (65), wherein the output measuring means is a linear gauge.

In such a configuration, the output is measured by the linear gauge and the position is controlled. Therefore, it becomes possible to perform position control using volume change as an output. (77) The control device for an actuator having hysteresis as set forth in (66), wherein the input changing means is an electric field changing device including electrodes.

In such a configuration, the electric field changing device changes the input to control the position. Therefore, position control using the electric field as an input becomes possible. (78) The control device for an actuator having hysteresis according to the above (66), wherein the output measuring means is a laser displacement meter.

In such a structure, the output is measured by the laser displacement meter and the position is controlled. Therefore, it becomes possible to perform position control using displacement as an output. However, the linear relationship means that when the input amplitude becomes K times, the output amplitude becomes K times within the input / output allowable range and the predetermined error range, and the respective frequencies do not change except for the phase relationship. Means that.

[0146]

As described in detail above, according to the present invention,
Accurate positioning is possible by monitoring the current state quantity of the actuator, linearizing the actuator with hysteresis based on this information, and providing linear feedback compensation for this linearized actuator. A control device for an actuator having hysteresis can be provided.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a control device for an actuator having hysteresis according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram of a control device for an actuator having hysteresis according to the first embodiment of the present invention.

FIG. 3 is a block diagram showing in detail a part of the configuration of the control device for the actuator having hysteresis according to the first embodiment of the present invention.

FIG. 4 is a temperature-strain hysteresis diagram for explaining a control device for an actuator having hysteresis according to the first embodiment of the present invention.

FIG. 5 is a voltage-output hysteresis diagram for explaining the control device for the actuator having hysteresis according to the first embodiment of the present invention.

FIG. 6 is a time chart for explaining a control device for an actuator having hysteresis according to the first embodiment of the present invention.

FIG. 7 is a carp fitting diagram for explaining the control device for the actuator having hysteresis according to the first embodiment of the present invention.

FIG. 8 is a step response diagram for explaining the control device for the actuator having hysteresis according to the first embodiment of the present invention.

FIG. 9 is a block diagram showing a configuration of a control device for an actuator having hysteresis according to a second embodiment of the present invention.

FIG. 10 is a schematic diagram showing in detail a part of the configuration of the control device for the actuator having hysteresis according to the second embodiment of the present invention.

FIG. 11 is a block diagram showing a configuration of a control device for an actuator having hysteresis according to a third embodiment of the present invention.

FIG. 12 is a block diagram showing in detail a part of a configuration of a control device for an actuator having hysteresis according to a third embodiment of the present invention.

FIG. 13 is a schematic diagram of a control device for an actuator having hysteresis according to a third embodiment of the present invention.

[Explanation of symbols]

1 ... Shape memory alloy, 2 ... Strain gauge, 3 ... Resistance heater,
4 ... Correction output section, 5 ... Target input signal, 6 ... Addition section, 7 ...
Command input signal, 8 ... Comparison unit, 9 ... Linear compensation unit, 10, 1
1 ... Block, 12 ... Output signal, 13 ... Control chip, 1
4 ... Grounding terminal, 15 ... Power supply terminal, 16-19 ... Wiring,
20 ... Cable, 21 ... Initialization command signal, 22 ... Initialization part, 23 ... Initialization signal, 24 ... Parameter adjustment signal,
25 ... terminal, 26 ... switch, 27 ... cubic function, 28 ...
Thermocouple, 29 ... Input section linear compensation section, 30 ... Input subtraction section,
31, 32 ... Wiring, 33 ... Block.

Claims (3)

[Claims] 1. A control device for controlling an actuator whose input-output relationship has a hysteresis, wherein a calculation output means for receiving a target input signal and an output signal from the actuator and calculating and outputting the input signal to the actuator. An actuator having hysteresis, comprising: a target input signal and a correction unit that makes the input signal in phase with each other; and a linear compensation unit that makes a linear relationship between the target input signal and the output signal. Control device. 2. A control device for controlling an actuator whose input-output relationship has a hysteresis, in which a correction signal calculating means for calculating a correction output signal by receiving an output signal from said actuator, a target input signal and said correction signal. Adder means for receiving the output signal and generating and outputting an input signal to the actuator from the sum of the two, correction means for making the target input signal and the input signal in phase, the target input signal and the output signal And a linear compensating means having a linear relationship, and a controller for an actuator having hysteresis, comprising: 3. A control device for controlling an actuator whose input-output relationship has hysteresis, wherein input changing means for changing the input of the actuator, output measuring means for measuring the output of the actuator, and the input change. Means for calculating and outputting an input signal to the input changing means by receiving a target input signal to the means and a measurement output signal from the output measuring means, and the target input signal and the input signal in phase A controller for an actuator having hysteresis, comprising: a compensating unit that makes a linear relationship between the target input signal and the measured output signal.