JPH0942222A - Spanworm type actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a spanworm type actuator which uses not two as in conventional ways but a single casing and which utilizes a pair of guide members that stop the actuator from rotating. SOLUTION: A casing 1 freely slidably engaged with a pair of guide members b1, b2 has a brake unit 4 incorporated into the guide member b1 side thereof and has a pair of forward and backward stepping units 51 , 52 incorporated into the guide member b2 side thereof. Fluid pressure is input to the pressure chamber 53 of the stepping unit, the guide members are clamped by compression of a clamp member 52 in the direction of an axis via the piston 50 of the stepping unit, the piston 50 is stopped from moving, the casing is pressed by reaction, and the fluid pressure is input to the pressure chamber 44 of the brake unit to release the brake. Then stepping is made by the stroke of a casing piston, the pressure chamber 44 is opened to the atmosphere to apply the brake, the pressure chamber 53 is opened to the atmosphere to unclamp the clamp member, and the piston is pushed back by the pressure of a receiving member 51.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scale-taker insect type actuator which moves relative to a guide member in steps of one pitch, and more particularly, holds a position of a work receiver on a jig and The present invention relates to an actuator suitable for a positioning drive device when changing according to a model.

[0002]

2. Description of the Related Art Conventionally, as a worm insect type actuator,
According to Japanese Patent Laid-Open No. 47-32631, a pair of casings that are extendably connected via a hydraulic jack are slidably engaged with a rod-shaped guide member, and each casing is used as a guide member. Incorporating a hydraulic brake unit that locks and unlocks the other, the brake unit of one casing is locked, the brake unit of the other casing is unlocked, and the other casing is stepped by the extension operation of the hydraulic jack. And then
With the brake unit of the other casing in the locked state and the brake unit of the one casing in the unlocked state, one casing is stepped to the other casing side by the contraction operation of the hydraulic jack, and the actuator is guided by repeating the above operation. It is known that a member is made to step toward one pitch along a member.

[0003]

By the way, in order to improve the responsiveness of control of the actuator, a valve for controlling oil supply / discharge to / from the hydraulic jack or the brake unit is attached to the casing, and the hydraulic jack or the brake unit and the valve are attached. It is desirable to reduce the fluid path length between and as short as possible.

In the above-mentioned conventional example, since the hydraulic jack can be integrated in one casing, a valve block having a valve for a brake unit and a valve for the hydraulic jack built in the casing can be attached to the casing.
Fluid pressure can be input to the brake unit and the hydraulic jack via each valve by a common piping member connected to the valve block, but since the other casing moves relative to the one casing, it is built in the other casing. When the valve for the second brake unit is housed in the valve block attached to the one casing, the valve block and the second brake unit have no choice but to be connected via a flexible hose, and the second brake unit has to be connected. The control response of the unit deteriorates, and bending and stretching of the flexible hose accompanying relative movement of the other casing causes fatigue of the hose, resulting in poor durability.

In this case, it is conceivable to attach the valve for the second brake unit to the other casing, but in this case, the piping member connected to the pressure source is separately provided on one casing side and the other casing side. It is necessary to handle the piping, which makes the piping troublesome.

Further, in the above-mentioned conventional example, since the step is carried out at the pitch corresponding to the stroke of the hydraulic jack in any of the reciprocating movements, the step pitch in the forward movement and the step pitch in the backward movement are When the actuator is used as a positioning drive device for the workpiece receiver on the jig, the position of the workpiece receiver can be changed only at a pitch that is an integral multiple of the stepping pitch, which impairs the degree of freedom of position change.

Furthermore, in the above-mentioned conventional example, since the actuator is composed of two casings that move relative to each other,
Only a part of the actuator (one of the two casings) can be used as a fixed part of the driven object such as a work receiver, which impairs the rigidity and accuracy of positioning the driven object.

When the actuator is to be prevented from rotating with respect to the guide member, it is necessary to provide a second guide member parallel to the guide member and form an engaging portion for the second guide member in each casing. The actuator is long in the longitudinal direction of the guide member, and if an engaging portion for preventing rotation is further provided on the guide member, the actuator becomes large and heavy.

In view of the above points, the present invention enables simplification of the handling of the piping member by enabling the stepping using a single casing, and the rigidity of positioning the driven object. ， Ensure accuracy, and make it possible to make a difference between the forward pitch and the backward pitch.
Another object of the present invention is to provide a small and lightweight shingling insect type actuator which can be prevented from rotating with respect to the guide member.

[0010]

In order to achieve the above object,
The present invention is a scale-worm insect actuator that moves relative to a guide member, wherein a casing slidably engaged with a pair of guide members arranged in parallel and a casing positioned on one guide member side. A built-in brake unit, and a pair of forward and backward stepping units installed in the casing on the side of the other guide member,
The brake unit includes a brake piston, a lock member that locks and unlocks the casing with respect to one guide member in conjunction with the brake piston, and a biasing unit that biases the brake piston in the lock direction of the lock member. And a pressure chamber that presses the brake piston in the unlocking direction of the lock member, wherein each of the stepping units has a forward moving direction in the forward direction for the forward moving step unit,
The return direction is the reverse direction, and for the return step unit, the return direction is the forward direction and the forward direction is the reverse direction, and the forward step piston and the forward stepping piston are urged in the forward direction. Female member, a clamp member that is interposed between the stepping piston and the receiving member, and that clamps the other guide member when receiving a pressing force in the opposite direction from the stepping piston, and the stepping member. A pressure chamber for pressing the piston in the opposite direction is provided, and fluid pressure is input to the pressure chamber of the forward step unit and the brake unit during forward step, and the backward step unit during backward step. A fluid supply means for inputting a fluid pressure is provided in the pressure chamber of 1 and the pressure chamber of the brake unit.

The actuator is prevented from rotating by slidably engaging the casing with a pair of parallel guide members. Further, the casing is not provided with an engaging portion for exclusive use of the rotation stopper, but with respect to one guide member. Utilizing the engaging portion as the arrangement space for the brake unit and the engaging portion for the other guide member as the arrangement space for the step unit,
Since the brake unit and the stepping unit can be assembled in the casing with good space efficiency, the actuator can be reduced in size and weight.

Since the lock member is normally pressed and held in the locked state by the biasing means of the brake unit via the brake piston, the casing is locked with respect to one of the guide members, and the driven object mounted on the actuator is Positioned and held in place.

When a fluid pressure is input to the pressure chamber of the forward step unit, the clamp member of the step unit is axially compressed between the step piston and the receiving member to clamp the guide member, The stepping piston of the stepping unit becomes immovable with respect to the other guide member, and the casing is pressed in the forward direction by the reaction force due to the fluid pressure in the pressure chamber. At this time, the fluid pressure is also input to the pressure chamber of the brake unit. According to this, the lock member is switched to the unlocked state via the brake piston, and the fluid pressure in the pressure chamber of the forward step unit increases. The casing steps in the forward direction by the stroke of the stepping piston.

After this step, both the pressure chamber of the brake unit and the pressure chamber of the forward step unit are opened to the atmosphere.
According to this, the lock member of the brake unit is switched to the locked state to lock the casing in the step position, the clamp member of the step unit is switched to the unclamped state, and the clamp member is urged by the receiving member. The stepping piston is pushed back with respect to the casing to the stroke end position in the forward movement direction via, and returns to the original state. Then, by repeating the above-described operation, the casing steps in the forward movement direction for one pitch with the stroke of the forward movement piston of the forward movement stepping unit.

Even when fluid pressure is input to the pressure chamber of the backward step unit and the brake unit, the casing operates in the same manner as described above, and the casing is equivalent to the stroke of the forward piston of the backward step unit. Step back. In this way, since the forward movement and the backward movement are performed by using different step units, it is possible to make a difference between the forward step and the backward step.

Further, since the casing is single, a valve block incorporating a valve for the brake unit, a valve for the forward step unit and a valve for the backward step unit, which constitutes the fluid supply means, is provided. A fluid pressure can be input to each unit with high responsiveness from a common pipe member connected to the casing and connected to the valve block, and the handling of the pipe member with respect to the actuator is simplified. Furthermore, since the actuator is composed of a single casing, the entire actuator can be used as a fixed part of the driven object, and the rigidity and accuracy of positioning the driven object are ensured.

By the way, when a heavy object is moved by an actuator, it is desirable to provide a pair of brake units in order to ensure locking. In this case, the pair of brake units are arranged so that the locking direction of the lock member of each of the brake units faces outward in the longitudinal direction of the casing, and the both brake pistons are locked between the brake pistons of the both brake units. It is desirable to provide a common urging means for urging in the direction so as to share the parts.

Further, a pair of forward and backward stepping units are arranged so that the forward direction of each stepping unit faces outward in the longitudinal direction of the casing, and the receiving member of both stepping units. Is configured to be biased in the positive direction by a common biasing means provided between both receiving members, the number of parts can be further reduced, which is advantageous.

Various types of lock members and clutch members are conceivable, but they may be constituted by disc spring-like members whose inner diameter is reduced when a pressing force from a brake piston or a stepping piston is received. If so, the structure becomes simple. Further, if the lock member and the clamp member are provided with a collet chuck that is externally inserted to the guide member, durability is improved and the restraining force on the guide member can be increased, which is advantageous.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an arrangement portion of a work receiver on a jig used in an automobile manufacturing line or the like, in which a rod-shaped guide member b is horizontally provided on a jig main body a and a guide member b is provided. A work receiver c, which is a driven object, is attached to an actuator A that moves left and right along the structure, and the position of the work receiver c can be changed according to the model of the work.

The actuator A comprises a casing 1 slidably engaged with a guide member b, a valve block 2 is attached to the outer surface of the casing 1, and a pipe member 3 connected to the valve block 2 is connected to the valve block 2. A pressure fluid such as compressed air is supplied to actuate the actuator A by air pressure. Further, in this embodiment, as shown in FIG. 2, a pair of first and second guide members b parallel to each other.
1, b2 are provided, and the casing 1 of the actuator A is slidably engaged with both guide members b1, b2 to prevent the actuator A from rotating.

A pair of brake units 4 and 4 are installed in the casing 1 so as to be located on the side of the first guide member b1, and are also located at the side of the second guide member b2 so that one for right movement and one for left movement. A pair of step units 5 ₁ and 5 ₂ are incorporated.

Each brake unit 4 includes a brake piston 40 and a lock member 41 that locks and unlocks the casing 1 with respect to the first guide member b1 by interlocking with the piston 40. The locking member 41 is shown in FIG.
As shown in FIG. 3, the disc spring-shaped member 100 is formed with a radial slit extending from the inner peripheral side to the middle of the radial direction. The member 100 is a receiving portion integrated with the brake piston 40 and the casing 1 facing the piston 40. 42, the disc spring-like member 100 is compressed in the axial direction when the pressing force from the brake piston 40 to the receiving portion 42 side is received, and the inner diameter of the member 100 is reduced. The peripheral edge bites the guide member b1, and the casing 1 is locked with respect to the first guide member b1.

The brake unit 4 further includes a biasing means 43 for biasing the brake piston 40 to the lock member 41, that is, a biasing means 43 for biasing the brake piston 40 toward the receiving portion 42, and an unlocking direction of the brake piston 40 to the lock member 41. And a pressure chamber 44 that presses the lock member 41 at all times. The lock member 41 is normally kept in the locked state by the urging force of the urging means 43, and the lock member is locked by the air pressure input from the air supply / exhaust port 44a to the pressure chamber 44. 41 is switched to the unlocked state.

The urging means 43 is composed of a coil spring, but it may be composed of an air spring or the like. It is also possible to dispose the receiving portion 42 inward of the brake piston 40 in the longitudinal direction of the casing 1 and set the locking direction of the lock member 41 inward of the casing 1 in the longitudinal direction. Then, the receiving portion 42 is arranged outside the longitudinal direction of the casing 1 with respect to the braking piston 40, and the locking direction is set outside the longitudinal direction of the casing 1. The common urging means 43 arranged between the two can be urged in the locking direction.

[0026] Migidoyo stepping unit 5 ₁ a stepped piston 50, the receiving Me member 51 is biased to the right toward the stepped piston 50, stepped piston 50 and the receiving Me member 51 And a pressure chamber 53 that presses the stepping piston 50 to the left, and a clamp member 52 that is interposed between the clamp member 52 and the second guide member b2.

The clamp member 52 is composed of a disc spring-like member 100 similar to the lock member 41, and the receiving member 51 has a piston portion 51a formed at its tail end.
In the above, the urging means 54 composed of an air spring is urged to the right. When the stepping piston 50 reaches the right stroke end position, the receiving member 5
1 is moved to the right by the stopper portion 5 provided on the casing 1.
Therefore, the clamp member 52 is not compressed in the axial direction at all times and is held in the unclamped state. On the other hand, when the stepping piston 50 is pressed to the left by the input of the air pressure from the air supply / exhaust port 53a to the pressure chamber 53, the disc spring-shaped member 1 serving as the clamp member 52 is pressed.
00 is axially compressed between itself and the receiving member 51 to reduce the inner diameter thereof, and the inner peripheral edge of the member 100 bites the second guide member b2 to be in a clamped state. The left movement is blocked, and the casing 1 is pressed to the right by the reaction force due to the air pressure in the pressure chamber 53.
The biasing means 54 of the receiving member 51 may be composed of something other than an air spring such as a coil spring.

[0028] Hidaridoyo stepping unit 5 _2, the only structure itself Migidoyo stepping unit 5 ₁ and direction is in the opposite are identical, the same components as Migidoyo stepping unit 5 ₁ The same reference numerals are given and their explanations are omitted.

The stepping unit 5 ₁ for right movement may be arranged on the left side and the stepping unit 5 ₂ for left movement may be arranged on the right side, but in the present embodiment, the stepping unit 5 ₁ for right movement is arranged on the right side and the stepping unit for left movement 5 ₁ is arranged on the right side. Placing the advancing unit 5 ₂ on the left side, both the advancing units 5 ₁ , 5 ₂
Of the receiving members 51, 51 of the casing 1 are arranged so as to be adjacent to each other inward in the longitudinal direction of the casing 1.
51 can be urged by a common urging means 54 arranged between the two.

The valve block 2 mounted on the casing 1 includes a pressure chamber 4 of a pair of brake units 4 and 4.
A pair of brake valves 20, 20 for controlling supply / exhaust to / from 4, 44, a right valve 21 for controlling supply / exhaust to / from the pressure chamber 53 of the right step unit 5 ₁ , and a left step unit. A valve 22 for left movement for controlling supply / exhaust of 5 _{2 to / from} the pressure chamber 53 is provided. Each of these valves 20, 2
Reference numerals 1 and 22 are electromagnetic valves, and are switched and controlled by a signal from a controller (not shown). In addition, each valve 20,
The air supply ports 20a, 21a, 22a and the exhaust ports 20b, 21b, 22b of 21, 21 are silenced with the common piping member 3 via the air supply and exhaust manifold passages 23, 24 in the valve block 2, respectively. Connected to the container 25. still,
Even when each valve 20, 21, 22 is individually attached to the casing 1, by attaching the manifold to the casing 1,
Air can be supplied to the valves 20, 21, 22 from the common piping member 3.

Next, the operation of the actuator A will be described. When causing the actuator A is shifted rightward, first pressure chamber 53 of Migidoyo stepping unit 5 ₁ enter the air pressure clamps the second guide member b2 by the clamp member 52 of the walking advance unit 5 ₁ as described above To prevent the stepping piston 50 of the stepping unit 5 _{1 from} moving to the left, and then to input air pressure to the pressure chambers 44, 44 of both brake units 4, 4.
The lock members 41, 41 of both brake units 4, 4 are switched to the unlocked state. According to this, the casing 1 steps rightward by the stroke of the stepping piston 50 as shown in FIG. 4A by the reaction force due to the air pressure in the pressure chamber 53 of the rightward stepping unit 5 ₁ . .

When the casing 1 is stepped as described above, the pressure chambers 44, 44 of both brake units 4, 4 are opened to the atmosphere, and as shown in FIG.
The lock members 41, 41 of No. 4 are switched to the locked state, and then the pressure chamber 53 of the step unit 5 ₁ for right movement is opened to the atmosphere. According to this, the clamp member 52 is switched to the unclamped state, and the stepping piston 50 moves relatively to the casing 1 and the second guide member b2 via the clamp member 52 by the urging force of the receiving member 51. It is pushed back to the right stroke end position and returned to the state shown in FIG.

By repeating the above operation, the casing 1 steps to the right by one pitch with the stroke of the stepping piston 50 of the step unit 5 ₁ for right movement. If air is supplied to and exhausted from the pressure chamber 53 of the left-moving step unit 5 ₂ instead of the right-moving step unit 5 ₁ , the casing 1 will move the step-up piston 50 of the left-side step unit 5 _{2 by} the same action as above. Stroke to the left for 1 pitch.

Here, in the illustrated example, the strokes of the stepping pistons 50 of the stepping units 5 ₁ and 5 ₂ are set to be equal, but if the strokes are made different, the position of the work receiver c is considerably increased. You will be able to change it with great freedom. For example, 5 mm piston stroke of Migidoyo stepping unit 5 _1, by setting the piston stroke of Hidaridoyo stepping unit 5 ₂ to 2 mm, 2 to the left by 1 KaiAyumiSusumu rightward KaiAyumiSusumu By doing so, the work receiver c can be displaced to the right by 1 mm, and the position can be changed at a finer pitch than the piston stroke.

When the jig is used, a large thrust force may act on the actuator A through the work receiver c. To hold the actuator A at a fixed position against the thrust force, the brake unit 4 is used. It is necessary to increase the restraining force, and in this case, it is desired to increase the diameter of the guide member b1 to increase the contact length with the lock member 41. On the other hand, the load at the time of changing the position of the work receiver c is small, and even if the guide member b2 has a small diameter, the stepping reaction force is sufficiently received by the clamp member 52 that clamps the guide member b2. In this embodiment, the first guide member b1 is used for the brake unit 4 and the second guide member b2 is used for the step units 5 ₁ and 5 ₂ , so that the second guide member b2 is used as the first guide member b1. The actuator A can be made smaller as much as possible. Actuator A
Depending on the usage example, the load is always small and the load may be large when the position is changed. In this case, the first guide member b1 may be thin and the second guide member b2 may be thick.

By the way, in the above embodiment, the lock member 4
1 and the clamp member 52 are respectively constituted by the disc spring-shaped member 100, but each guide member b as in the embodiment shown in FIG.
The lock member 41 and the clamp member 52 may be configured by fitting the collet chuck 101, which is externally inserted into the components 1 and b2, into the inner circumference of the disc spring member 100. In the illustrated example, the collet chuck 101 for the clamp member 52 is the receiving member 51.
Is integrated into. When the lock member 41 is provided with the collet chuck 101, the first guide member b
Because 1 can be locked surely regardless of the moving direction,
Only one brake unit 4 is required.

Further, the lock member 41 and the clamp member 52
Can be composed of a plurality of segment plates 102 divided in the circumferential direction as shown in FIG. In this case, as shown in FIG.
Is brought into contact with the braking piston 40 and the stepping piston 50 via the retainer ring 103 that supports the outer edge portion thereof. According to this, when the pressing force from each piston 40, 50 acts, the segment plate 102 tilts so as to stand up in the radial direction by using the retainer ring 103 as the radial reaction force receiver, and the inner edge portion thereof is guided by each guide. Members b1, b
Bite into 2. As in the embodiment shown in FIG. 8, the lock member 41 and the clamp member 52 are attached to the segment plate 1
02 and the collet chuck 101 may be combined.

Further, the lock member 41 and the clamp member 52
Is a ball type collet chuck 1 as shown in FIG.
It is also possible to configure with 04. The chuck 104
Is an outer race 104a with a tapered inner peripheral surface
And a collet-shaped inner race 104b having a tapered outer peripheral surface, and a ball 104c interposed between both races 104a and 104b.
a, 104b as a pair of end pieces 104d, 1 at both ends
When the outer race 104a is connected to the outer race 104a by a pressing force in the direction of the arrow from the piston for braking or stepping, the ball 104c
The inner race 104b is reduced in diameter through the clamp so that the guide members b1 and b2 are clamped. 1 in the figure
Reference numeral 04e is a ball retainer.

As described above, various kinds of lock members 41 and clamp members 52 are conceivable, but in order to reduce the number of parts and reduce the cost, the disc spring member 100 is used.
It is preferable to use a combination of the disc spring-shaped member 100 and the collet chuck 101 in order to achieve both cost reduction and durability. Further, in the above embodiment, air is used as the working fluid of the actuator A, but liquid such as oil can be used.

[0040]

As is apparent from the above description, according to the present invention, a forward direction and a backward direction are provided by a brake unit incorporated in a single casing and a pair of forward and backward steps units. Since it is possible to distribute the fluid pressure by distributing it on the casing from the piping member common to each unit, it is possible to simplify the handling of the piping member with respect to the actuator and to reduce the entire actuator. Since it can be used for the fixed part of the driven object, the rigidity and accuracy of positioning of the driven object can be ensured, and further, the step pitch can be made different between the forward movement and the backward movement. The degree of freedom in changing the position of the can be increased. Further, a pair of guide members arranged in parallel to prevent the actuator from rotating can be efficiently used for the brake unit and the step unit, and the actuator can be made smaller and lighter.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of use of the actuator of the present invention.

FIG. 2 is a cutaway side view of a first embodiment of the actuator of the present invention.

FIG. 3 is a front view of a disc spring member used as a lock member or a clamp member in the first embodiment.

4 (a) and 4 (b) are views showing the operation of the first embodiment.

FIG. 5 is a cutaway side view of the second embodiment.

FIG. 6 is a cutaway side view of the third embodiment.

FIG. 7 is a front view of a segment plate used as a lock member or a clamp member in the third embodiment.

FIG. 8 is a cutaway side view of the fourth embodiment.

FIG. 9 is a sectional view of a ball-type collet chuck used as a lock member or a clamp member.

[Explanation of symbols]

A actuator b1 first guide member (one guide member) b2 second guide member (other guide member) 1 casing 2 valve block (fluid supply means) 4 brake unit 40 brake piston 41 lock member 42 receiving portion 43 biasing Means 44 Pressure chamber 5 ₁ , 5 ₂ Step unit 50 Step piston 51 Receiving member 52 Clamping member 53 Pressure chamber 54 Biasing means 100 Disc spring member 101 Collet chuck

Claims (6)

[Claims] 1. A scale taking insect type actuator that moves relative to a guide member, the casing slidably engaged with a pair of guide members arranged in parallel, and the casing is positioned on one guide member side. And a pair of forward and backward stepping units that are installed in the casing on the side of the other guide member. The brake unit includes a brake piston and a brake unit. A locking member that locks and unlocks the casing with respect to one guide member in conjunction with the piston, a biasing unit that biases the braking piston in the locking direction of the locking member, and a braking piston unlocking direction of the locking member. The stepping unit includes a pressure chamber for pressing the forward stepping unit, and the forward stepping unit has a forward moving direction in the forward direction and a backward moving direction in the reverse direction. Direction, the stepping unit for backward movement, with the backward direction as the forward direction and the forward direction as the reverse direction, the stepping piston, the receiving member biased in the forward direction toward the stepping piston, and the stepping unit. A clamp member, which is interposed between the advancing piston and the receiving member, clamps the other guide member when receiving a pressing force in the opposite direction from the advancing piston, and the advancing piston in the opposite direction. It is equipped with a pressure chamber to be pressed, and the fluid pressure is input to the pressure chamber of the forward step unit and the brake chamber of the forward step unit during the forward step, and the pressure chamber and the brake of the backward step unit during the backward step. A swollen-worm insect type actuator characterized in that a fluid supply means for inputting a fluid pressure is provided in the pressure chamber of the unit. 2. A pair of brake units are arranged such that lock directions of lock members of the respective brake units face outward in a longitudinal direction of the casing, respectively, and both brake pistons are arranged between the brake pistons of the both brake units. The common worm type actuator according to claim 1, further comprising: a common urging unit that urges the levers in a locking direction. 3. A pair of stepping units for forward and backward movement are arranged such that the forward direction of each stepping unit faces outward in the longitudinal direction of the casing, and a receiving member for both stepping units. The worm-type insect actuator according to claim 1 or 2, wherein the urging means is urged in the forward direction by a common urging means provided between both receiving members. 4. The lock member receives a pressing force in the lock direction from the brake piston, which is interposed between a receiving portion fixed to a casing facing the brake piston in the lock direction and a brake piston. 2. A disc spring-shaped member whose inner diameter is reduced.
4. The shingled insect type actuator according to any one of items 1 to 3. 5. The disc spring-shaped member, wherein the clamp member is interposed between the stepping piston and the reaction force receiving member, and whose inner diameter is reduced by receiving a pressing force in the opposite direction from the stepping piston. 5. The method according to claim 1, wherein
An actuator of the shakudo insect type according to the item. 6. The lock member and the clamp member,
6. The device according to claim 1, wherein the guide member is provided with a collet chuck that is externally inserted.
An actuator of the shakudo insect type according to the item.