JPH0933497A - Ultrasonic probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an ultrasonic probe which can enhance the accuracy of measurement by generating an acoustic field suitable for the lens plane. SOLUTION: An ultrasonic wave oscillated from a piezoelectric membrane 3 upon application of a voltage between electrodes 2, 4 is converged through a lens plane 7a formed on the lower surface of an acoustic lens 7 and directed through a medium to a specimen. The ultrasonic wave is reflected on the surface of specimen or on a part in the specimen having different acoustic impedance and received by a piezoelectric membrane 5 through the medium, the lens plane 7a and the body of acoustic lens 7. A corresponding output voltage is then amplified by a receiver through the electrodes 4, 6 to provide the information of specimen. The measurement is repeated several times while turning the specimen by means of an ultrasonic probe 100 and when the output value fluctuates at some angle, it means that some peculiar mechanical properties different from those of other angular directions are present in that angular direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic probe, and more particularly to an ultrasonic probe for measuring the physical properties of a sample material.

[0002]

2. Description of the Related Art Known examples of an ultrasonic probe in which a transducer composed of a piezoelectric element such as a piezoelectric film or an electrode is provided at a plurality of positions by dividing it into an oscillating piezoelectric element and a receiving piezoelectric element are as follows. is there. JP, 63-308557, A The upper surface figure showing the schematic structure of the ultrasonic probe by this publicly known art is shown in Drawing 12 (a), and the ultrasonic wave route figure is shown in Drawing 12 (b). 12A and 12B, the ultrasonic beam oscillation transducers 101a and 101b and the reception transducers 102a and 102b are arranged in a fan shape on the upper end portion of the acoustic lens 103, and the oscillation transducer 101 is provided.
The ultrasonic beam emitted from a and b is transmitted by the acoustic lens 10.
After passing through 3, the light is focused on the spherical lens surface 103 a formed on the lower surface of the acoustic lens 103 and is emitted to the subject 104. Then, the ultrasonic beam reflected from the subject 104 again has the lens surface 103 a and the acoustic lens 1 again.
The signal is received by the receiving transducers 102a and 102b via 03, and the state of the subject is detected. With such a configuration, it is possible to independently detect, among the ultrasonic beams reflected from the objects 102a and 102b, the ultrasonic beams orthogonal to each other.

[0003]

However, the above-mentioned known technique has the following problems. That is, when the ultrasonic beam propagates in the acoustic lens 103, since the oscillation transducers 101a and 101b each have a ¼ circular shape, the horizontal cross-sectional shape of the sound field formed by the radiated ultrasonic beam is also: Each becomes a quarter circle shape and reaches the lens surface 103a mainly while maintaining such a shape. However, since the lens surface 103a is spherical and has a circular horizontal cross-sectional shape, it does not match the horizontal cross-sectional shape of the sound field. Also, when viewed in a vertical section,
Oscillation center axis 11 of oscillation transducers 101a and 101b
Since 1a and 1b do not coincide with the axis 113 of the lens surface 103a, for example, as shown in FIG. 12B, the peak of the strongest beam waveform among the ultrasonic beam waveforms from the oscillation transducer 101a is displayed. The formed surface 114 is not parallel to the passing position 103a _o in the lens surface 103a through which the ultrasonic beam passes. As described above, in the above-mentioned known technique, the oscillation transducer 101a,
Regarding the shape and arrangement of b, no consideration is given to generating a sound field suitable for the lens surface 103a. Therefore, many of the ultrasonic beams emitted interfere with each other and attenuate, which hinders improvement of measurement accuracy.

An object of the present invention is to provide an ultrasonic probe capable of generating a sound field suitable for a lens surface and improving measurement accuracy.

[0005]

In order to achieve the above object, according to the present invention, an acoustic lens; a first piezoelectric element provided at an upper end portion of the acoustic lens and oscillating an ultrasonic wave; A lens surface formed on the lower surface of the acoustic lens for focusing the ultrasonic waves oscillated from the first piezoelectric element and irradiating the subject; and a lens surface provided on the upper end of the acoustic lens for irradiating the subject. In an ultrasonic probe having a second piezoelectric element that receives a reflected wave of the ultrasonic wave reflected by the subject, an oscillation center axis of the first piezoelectric element is substantially coincident with an axis of the lens surface. In addition, the substantial shape of the substantially functioning portion of the first piezoelectric element is substantially similar to the horizontal cross-sectional shape of the lens surface, and the substantially functioning portion of the second piezoelectric element. The actual shape of the It has a shape corresponding to the type, the first to form a first piezoelectric element and the layered structure
An ultrasonic probe is provided which is placed on the upper part of the piezoelectric element. That is, the ultrasonic waves oscillated from the first piezoelectric element are focused on the lens surface formed on the lower surface of the acoustic lens and applied to the subject. The reflected wave from the subject among the irradiated ultrasonic waves is received by the second piezoelectric element mounted in a layered structure on the first piezoelectric element via the lens surface and the acoustic lens body. It At this time, the substantial shape of the second piezoelectric element (= the shape of the smallest one of the piezoelectric film and the upper and lower electrodes) is a shape corresponding to the information to be obtained from the subject such as the physical properties of the subject. The required reflected wave can be extracted. That is, for example, in the case where the two opposite chord portions are removed from the disk, the output of the reflected wave is measured while rotating the probe or the subject,
It can be seen that when the output value fluctuates at a certain angle, some peculiar mechanical property different from other angle directions exists in that angle direction (= anisotropy). In the above configuration, since the oscillation center axis of the first piezoelectric element is substantially aligned with the axis of the lens surface, the strongest ultrasonic beam waveform oscillated from the first piezoelectric element and propagating in the acoustic lens is obtained. The surface formed by the peaks of the beam waveform and the passing position of the lens surface through which the ultrasonic beam passes are substantially parallel to each other, so that the strongest ultrasonic beam can pass through the lens surface substantially vertically. Further, the substantial shape of the first piezoelectric element is substantially similar to the horizontal cross-sectional shape of the lens surface, so that the strongest beams from the first piezoelectric element can be smoothly incident on the lens surface with little mutual interference. Has become. Thus, the first
The sound field generated by the ultrasonic beam generated from the piezoelectric element is suitable for the lens surface, and interference and attenuation of the ultrasonic beam emitted can be reduced to improve the measurement accuracy.

[0006] Preferably, in the ultrasonic probe,
The shape of the lens surface is a substantially spherical shape, the substantial shape of the first piezoelectric element is a substantially disc shape, and the substantial shape of the second piezoelectric element is a shape obtained by removing two opposing chord portions from the disc. An ultrasonic probe is provided.

Further, preferably, in the ultrasonic probe, the shape of the lens surface is substantially spherical.
An ultrasonic probe is provided in which the substantial shape of the piezoelectric element is substantially a disk shape, and the substantial shape of the second piezoelectric element is a shape obtained by dividing the disk into a plurality of pieces in the circumferential direction. . Accordingly, the distribution of the physical properties of the material of the subject in the disc circumferential direction can be detected without rotating the probe or the subject.

In the ultrasonic probe, preferably, the lens surface has a substantially cylindrical surface shape, the first piezoelectric element has a substantially rectangular flat plate shape, and the second piezoelectric element has a substantially rectangular flat plate shape. There is provided an ultrasonic probe, wherein the substantial shape of the element is a shape obtained by dividing a rectangular flat plate into a plurality of strip-shaped portions. This makes it possible to detect the distribution of the physical properties of the specimen material in the direction perpendicular to the strip without rotating the probe or the specimen.

Further preferably, in the ultrasonic probe, the first piezoelectric element is configured to be able to receive the ultrasonic wave reflected by the subject, and the first and second piezoelectric elements are also provided. The piezoelectric element is connected to a switching unit that selectively switches a reception path so that the reflected wave reflected by the subject is received by one of the first and second piezoelectric elements. An ultrasonic probe is provided. Thereby, it is possible to perform both physical property detection and image evaluation with a single ultrasonic probe. That is, for example, when the shape of the lens surface is a substantially spherical shape, the substantial shape of the first piezoelectric element is a disk shape, and the substantial shape of the second piezoelectric element is a shape obtained by dividing the disk into a plurality of pieces in the circumferential direction, When the switching means is switched so that the second piezoelectric element receives the reflected wave, the ultrasonic waves transmitted from the disk-shaped first piezoelectric element are focused on the lens surface having a substantially spherical shape and are irradiated to the subject. ,
The reflected wave is received by the second piezoelectric element having a disk-divided shape. Accordingly, the distribution of the physical properties of the material of the subject in the circumferential direction can be detected based on the magnitude of the output for each angle. Then, the anisotropy can be detected by rotating the probe or the subject to detect the circumferential distribution more finely. On the other hand, when the switching means is switched so that the first piezoelectric element receives the reflected wave, the ultrasonic waves transmitted from the disk-shaped first piezoelectric element are focused on the substantially spherical lens surface and radiated to the subject. The reflected wave is received again by the substantially disk-shaped first piezoelectric element. As a result, image evaluation can be performed based on the magnitude of the received output.

Preferably, in the ultrasonic probe, each of the first and second piezoelectric elements includes a piezoelectric film and electrodes arranged above and below the piezoelectric film. An ultrasonic probe is provided.

More preferably, in the ultrasonic probe, the substantial shape of the first piezoelectric element is the shape of the piezoelectric film and the electrode provided in the first piezoelectric element, which has the smallest area. An ultrasonic probe characterized by the above is provided.

Further preferably, in the ultrasonic probe, the substantial shape of the second piezoelectric element is the shape of the piezoelectric film and the electrode provided in the second piezoelectric element, which has the smallest area. An ultrasonic probe characterized by the above is provided.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a first embodiment of the present invention.
This will be described with reference to FIG. This embodiment is an embodiment of an ultrasonic probe for an ultrasonic microscope. FIG. 1 is a vertical sectional view showing the configuration of the ultrasonic probe according to the present embodiment, and FIG.
FIG. 2A is a bottom view, FIG. 2B is a side view showing a mode in use, and FIG. 1 to 3, an ultrasonic probe 100 according to the present embodiment is provided with an acoustic lens 7; a piezoelectric film 3 provided at an upper end portion of the acoustic lens 7, and a piezoelectric film 3 for oscillating ultrasonic waves. Electrodes 2, provided on the top and bottom
4; and a lens surface 7 that is formed on the lower surface of the acoustic lens 7 and focuses ultrasonic waves oscillated from the piezoelectric film 3 and irradiates the subject 8 with the ultrasonic waves.
a; a matching layer 1 provided on the lens surface 7a; and a matching layer 1 provided on the upper end of the acoustic lens 7 for receiving reflected waves reflected by the subject 8 among the ultrasonic waves applied to the subject 8. The piezoelectric film 5 and the electrode 6 provided on the piezoelectric film 5.

Each of the electrodes 2 and 4 is connected to an oscillator that generates a pulse-wave or burst-wave voltage (see FIG. 3), and a voltage is applied to the piezoelectric film 3 sandwiched between these electrodes 2 and 4. Is applied to vibrate to generate ultrasonic waves. At this time, the oscillation center axis line 9 of the electrode 2, the piezoelectric film 3, and the electrode 4 is substantially aligned with the axis of the lens surface 7a (see FIG. 1), and the shapes of the electrode 4, the piezoelectric film 3, and the electrode 2 are discs. It is a state. Also, these electrodes 4 and piezoelectric film 3
The shape of the electrode 4 having the smallest area among the electrodes 2 is similar to (or substantially the same as) the horizontal cross-sectional shape of the lens surface 7a. The electrode 4 is also connected to the receiver together with the electrode 6 (see FIG. 3), and the reflected wave (described later) detected by the piezoelectric film 5 sandwiched between the electrodes 4 and 6 is used as an output voltage for the receiver. It is designed to be sent to.
At this time, the shapes of the piezoelectric film 5 and the electrode 6 having the smallest area among the electrode 4, the piezoelectric film 5, and the electrode 6 correspond to the purpose of detecting the anisotropy of the subject 8, and the two shapes facing each other from the disk. It has a shape with the strings removed (see Fig. 2). The electrode 2, the piezoelectric film 3, the electrode 4, the piezoelectric film 5, and the electrode 6 are laminated on the upper end portion of the acoustic lens 7 in this order from bottom to top to form a layered structure.

The electrode 2, the piezoelectric film 3 and the electrode 4 constitute a first piezoelectric element which oscillates ultrasonic waves, and the size of the electrode 4 which is the minimum area among them is substantially the same as that of the first piezoelectric element. Since the size of the portion functioning as is defined, the shape of the electrode 4 becomes the substantial shape of the first piezoelectric element. Further, the electrode 4, the piezoelectric film 5 and the electrode 6 constitute a second piezoelectric element for receiving a reflected wave, and the size of the piezoelectric film 5 and the electrode 6 which are the minimum area among them is substantially the same as that of the second piezoelectric element. Since the size of the portion functioning as is defined, the shapes of the piezoelectric film 5 and the electrode 6 become the substantial shape of the second piezoelectric element.

In the above structure, the ultrasonic wave oscillated from the piezoelectric film 3 vibrated by the voltage from the electrodes 2 and 4 is focused on the lens surface 7a formed on the lower surface of the acoustic lens 7 and is focused on the medium 10.
The subject 8 is irradiated via the The irradiated ultrasonic waves
The reflected wave is reflected by the surface of the subject 8 or a portion inside the subject 8 having a different acoustic impedance, and the reflected wave is reflected by the medium 1.
0, the lens surface 7a, and the acoustic lens 7 main body to receive the piezoelectric film 5. The output voltage corresponding to this is applied to the electrode 4
The information of the subject 8 is obtained by being amplified by the receiver via the electrode 6 and the electrode 6. Such measurement of the reflected wave output is performed several times while rotating the ultrasonic probe 100 or the subject 8, and when the output value fluctuates at a certain angle, the angular direction is different from other angular directions. It can be seen that some peculiar mechanical property exists (= anisotropy). In this measurement, since the oscillation center axis line 9 of the piezoelectric film 3 substantially coincides with the axis of the lens surface 7a, the strongest beam waveform among the ultrasonic beam waveforms oscillated from the piezoelectric film 3 and propagating in the acoustic lens 7. The surface formed by the ridge and the passing position of the lens surface 7a through which the ultrasonic beam passes are substantially parallel, and the strongest ultrasonic beam can pass through the lens surface 7a almost vertically. Further, since the shape of the electrode 4 which is substantially the shape of the first piezoelectric element is a disk shape and is similar to the horizontal cross-sectional shape of the lens surface 7a, the strongest beams from the piezoelectric film 3 do not interfere with each other. It can enter the lens surface 7a smoothly with a small amount. As described above, since the sound field generated by the ultrasonic beam generated from the piezoelectric film 3 is suitable for the lens surface 7a, interference / attenuation of the ultrasonic beam emitted can be reduced and the measurement accuracy can be improved. it can.

In the above embodiment, the substantial shape of the first piezoelectric element is defined by the shape of the electrode 4, but the present invention is not limited to this, and when the piezoelectric film 3 and the electrode 2 have the smallest area, The shape of will define the substantial shape. Further, in the above embodiment, the substantial shape of the second piezoelectric element is defined by the shapes of the piezoelectric film 5 and the electrode 6, but the present invention is not limited to this, and when the electrode 4 has the smallest area, the shape is substantially the same. Will be prescribed.

A second embodiment of the present invention will be described with reference to FIGS. This embodiment is an embodiment in which the shapes of the piezoelectric film for reception and the electrodes are different. The same members as those in the first embodiment are designated by the same reference numerals. FIG. 4 is a vertical sectional view showing the configuration of the ultrasonic probe according to the present embodiment, and FIG.
A bottom view is shown in FIG. These are respectively shown in FIG. 1, FIG. 2A, and FIG. 2 in the first embodiment.
It is a figure corresponding to (b). 4 and 5 (a) (b)
In the first embodiment, the ultrasonic probe 200 according to the present embodiment is
The main points different from the ultrasonic probe 100 of the embodiment of
The piezoelectric film 5 having the same shape as that of the electrode 4 is arranged on the disk-shaped electrode 4, and the electrode 206 having a disk shape divided into approximately eight is provided on the piezoelectric film 5. That is. That is, the electrode 206 is divided into eight electrode elements 206a to 206h arranged in the disk-shaped circumferential direction, which are connected to eight independent input terminals of the receiver (or It may be connected to one input terminal via an input switching means capable of sequentially switching and inputting individual signals). It should be noted that this receiver has an electrode 4
Needless to say that they are also connected.

The other structure is almost the same as that of the ultrasonic probe 100 of the first embodiment, and therefore its explanation is omitted.

Also according to this embodiment, the same effect as that of the first embodiment can be obtained. In addition to this, since the electrode 206 is divided into eight, the reflected wave output at these eight locations can be obtained by one measurement. Therefore, it is possible to detect the distribution of the physical properties of the material of the subject 8 in the circumferential direction without rotating the ultrasonic probe 200 or the subject 8. The ultrasonic probe 200 and the subject 8
It is needless to say that the anisotropy can be detected by further finely detecting the circumferential distribution by rotating the.

A third embodiment of the present invention will be described with reference to FIGS. 6 and 7. The present embodiment is an embodiment in which a so-called cylindrical lens is used as the lens surface.
Members corresponding to the respective members of the ultrasonic probe 100 of the first embodiment are shown by adding 300 to the reference numerals.

FIG. 6 is a vertical sectional view showing the structure of the ultrasonic probe according to the present embodiment, FIG. 7A is a top view and FIG. 7B is a bottom view. 6 and 7A and 7B, a lens surface 307 formed on the lower surface of the acoustic lens 300.
Reference character a constitutes a so-called cylindrical lens, which has a substantially cylindrical shape. The oscillation center axis surface 309 of the electrode 302, the piezoelectric film 303, and the electrode 304 is substantially coincident with the axis surface of the lens surface 307a. In addition, the electrode 302 and the piezoelectric film 30
3. The shape of the electrode 304 is a substantially rectangular flat plate shape, and the shape of the electrode 304 having the smallest area is a shape similar to (or a shape that substantially matches) the horizontal cross-sectional shape of the lens surface 307a. . The electrode 306 is
It has a shape obtained by dividing a rectangular flat plate into a plurality of pieces. That is, the electrode 306 having the smallest area among the electrode 304, the piezoelectric film 305, and the electrode 306 is divided into strip-shaped electrode elements 306a to 306f arranged in a direction perpendicular to the oscillation center axis surface 309. It is connected to each of the six independent input terminals of one receiver (or may be six independent receivers). The electrode 304 is also connected to each of the six input terminals together with the electrode elements 306a to 306f (or is connected to one input terminal via an input switching means capable of sequentially switching and inputting six signals). However, the reflected wave detected by the piezoelectric film 305 sandwiched between the electrodes 304 and 306 is sent as an output voltage.

The electrode 302, the piezoelectric film 303, and the electrode 3
04 constitutes the first piezoelectric element, and the size of the electrode 304, which is the minimum area of the first piezoelectric element, defines the size of the substantially functioning portion of the first piezoelectric element. The piezoelectric element 1 has a substantial shape. Also the electrode 304
Since the piezoelectric film 305 and the electrode 306 form the second piezoelectric element, and the size of the electrode 306 having the smallest area among them defines the size of the substantially functioning portion of the second piezoelectric element, The shape of the electrode 306 becomes the substantial shape of the second piezoelectric element.

Also in this embodiment, the same effect as in the first embodiment can be obtained. In addition to this, since the electrode 306 is divided into six pieces in the direction perpendicular to the oscillation center axis surface 309, the reflected wave outputs at these six points can be obtained by one measurement. Therefore, there is an effect that the distribution of the physical properties of the material of the subject in the direction of the oscillation center axis 309 can be detected without rotating the ultrasonic probe 300 or the subject.

A fourth embodiment of the present invention will be described with reference to FIGS. The present embodiment is an embodiment capable of both material physical property detection and image evaluation. The same code | symbol is attached | subjected to the member equivalent to 1st and 2nd embodiment. FIG. 8 is a vertical cross-sectional view showing the configuration of the ultrasonic probe according to the present embodiment, FIG. 9 is a top view thereof, and FIG. 10 is a side view showing a mode during use.
These are respectively shown in FIGS. 1 and 2 in the first embodiment.
(A), It is a figure corresponding to FIG. 8 to 10, an ultrasonic probe 400 according to the present embodiment is different from the ultrasonic probe 100 according to the first embodiment mainly in that a disc shape is almost formed on the disc-shaped electrode 4. The piezoelectric film 405 having a four-divided shape is disposed, the electrode 406 having the same shape as the piezoelectric film 405 is provided on the piezoelectric film 405, and the electrodes 406, the electrodes 2, and the electrodes 4 are provided. Is selectively connected to the receiver via a switch that switches the reception path of the reflected wave. That is, the piezoelectric film 405
Is the four piezoelectric film elements 4 arranged in the disk-shaped circumferential direction.
The electrode 406 is also divided into four electrode elements 406a to 406d arranged in the disk-shaped circumferential direction. In addition, as the piezoelectric element for oscillation, the electrode 2
Only the first piezoelectric element composed of the piezoelectric film 3 and the electrode 4 is used, but as the receiving piezoelectric element, the electrode 4 and the piezoelectric film 4 are used.
05. second piezoelectric element composed of electrode 406 and first
One of the piezoelectric elements is used by switching with a switch.

The other structure is almost the same as that of the ultrasonic probe 100 of the first embodiment, and therefore its explanation is omitted.

In the ultrasonic probe 400 of the present embodiment configured as described above, one ultrasonic probe 400 is used.
Thus, both physical property detection and image evaluation can be performed. That is, when the switch is switched so that the electrode 406 and the electrode 4 are connected to the receiver, the second piezoelectric element composed of the electrode 4, the piezoelectric film 405, and the electrode 406 functions as a receiving piezoelectric element. . Therefore, the ultrasonic waves transmitted from the piezoelectric film 3 vibrating with the voltage from the electrodes 2 and 4 are focused on the lens surface 7a having a substantially spherical shape and irradiated to the subject 8, and the reflected wave thereof is a substantially disk-shaped piezoelectric material. The output voltage received by the membrane 405 and the corresponding output voltage is transmitted via the electrodes 4 and 406 to the four independent input terminals (or 4) of the receiver.
Individual signals may be sequentially switched and sent to an input terminal via an input switching means capable of inputting). Accordingly, the distribution of the physical properties of the material of the subject 8 in the circumferential direction can be detected based on the magnitudes of the four outputs. Then, if the ultrasonic probe 400 or the subject 8 is rotated, the circumferential distribution can be detected more finely and the anisotropy can be detected. On the other hand, when the switch is switched so that the electrodes 2 and 4 are connected to the receiver, the first piezoelectric element composed of the electrode 2, the piezoelectric film 3, and the electrode 4 functions as a receiving piezoelectric element. . Therefore, the reflected wave from the subject 8 is received by the substantially disk-shaped piezoelectric film 3, and the output voltage corresponding thereto is transmitted via the electrodes 2 and 4 to four independent input terminals (or four output terminals) of the receiver. Signal may be sequentially switched and input via an input switching means that may be connected to one input terminal). As a result, image evaluation can be performed based on the magnitude of the received output. Therefore,
Both the physical properties of the material and the image evaluation can be performed with the exact same transmitted wave without replacing the probe, and when detecting the physical properties of the material, the detection position can be specified by image evaluation. Therefore, the measurement time can be shortened.

In the above embodiment, the piezoelectric film 4
The shape of the electrode 05 and the electrode 406 is a disk shape divided into approximately four, but the shape is not limited to this. That is, for example, as shown in the top view of FIG. 11, the piezoelectric film 405 and the electrode 40
6 may be further finely divided into eight piezoelectric film elements 455a-h and electrode elements 456a-h. Also in this case, the same effect is obtained.

[0029]

According to the present invention, the oscillation center axis of the first piezoelectric element is substantially aligned with the axis of the lens surface, and the substantial shape of the first piezoelectric element is substantially the same as the horizontal sectional shape of the lens surface. Since the shapes are similar, the sound field generated by the ultrasonic beam generated from the first piezoelectric element is suitable for the lens surface, and interference and attenuation of the ultrasonic beam emitted can be reduced to improve measurement accuracy. it can. In addition, the first and second piezoelectric elements,
Since it is connected to the switching means that selectively switches the reception path so that the reflected wave reflected by the subject is received by either the first or second piezoelectric element, it is possible to replace the probe without exchanging it. , It is possible to detect both physical properties of materials and evaluate images by using exactly the same transmitted waves. Therefore, when the physical properties of the material are being detected, the detection position can be image-identified and specified, so that the measurement time can be shortened.

[Brief description of the drawings]

FIG. 1 is a vertical cross-sectional view showing the configuration of an ultrasonic probe according to a first embodiment of the present invention.

FIG. 2 is a top view and a bottom view of the ultrasonic probe shown in FIG.

FIG. 3 is a side view showing a mode of using the ultrasonic probe shown in FIG.

FIG. 4 is a vertical sectional view showing the configuration of an ultrasonic probe according to a second embodiment of the present invention.

5A and 5B are a top view and a bottom view of the ultrasonic probe shown in FIG.

FIG. 6 is a vertical sectional view showing the configuration of an ultrasonic probe according to a third embodiment of the present invention.

7A and 7B are a top view and a bottom view of the ultrasonic probe shown in FIG.

FIG. 8 is a vertical cross-sectional view showing the configuration of an ultrasonic probe according to a fourth embodiment of the present invention.

9 is a top view of the ultrasonic probe shown in FIG.

FIG. 10 is a side view showing a mode of using the ultrasonic probe shown in FIG.

FIG. 11 is a top view showing a modified example of the piezoelectric film and electrodes of the ultrasonic probe shown in FIG.

FIG. 12 is a top view and an ultrasonic path diagram showing a schematic structure of an ultrasonic probe according to a conventional technique.

[Explanation of symbols]

2 electrode (first piezoelectric element) 3 piezoelectric film (first piezoelectric element) 4 electrode (first piezoelectric element, second piezoelectric element) 5 piezoelectric film (second piezoelectric element) 6 electrode (second piezoelectric element) Piezoelectric element 7 Acoustic lens 7a Lens surface 9 Oscillation center axis 100 Ultrasonic probe 200 Ultrasonic probe 206a-h Electrode (second piezoelectric element) 300 Ultrasonic probe 302 Electrode (first piezoelectric element) ) 303 piezoelectric film (first piezoelectric element) 304 electrode (first piezoelectric element, second piezoelectric element) 305 piezoelectric film (second piezoelectric element) 306a to f electrode (second piezoelectric element) 307 acoustic lens 307a Lens surface 309 Oscillation center axis surface 400 Ultrasonic probe 405a-d Piezoelectric film (second piezoelectric element) 406a-d Electrodes (second piezoelectric element) 455a-h Piezoelectric film (second piezoelectric element) 456a ~ H electrode (second piezoelectric element)

Claims (8)

[Claims] 1. An acoustic lens; a first piezoelectric element provided on an upper end portion of the acoustic lens and oscillating an ultrasonic wave; formed on a lower surface of the acoustic lens and oscillated from the first piezoelectric element. A lens surface that focuses ultrasonic waves and irradiates the subject; a second surface that is provided on an upper end portion of the acoustic lens and that receives reflected waves reflected by the subject among the ultrasonic waves radiated to the subject In the ultrasonic probe having the piezoelectric element of, the oscillation center axis of the first piezoelectric element is substantially coincident with the axis of the lens surface, and the portion of the first piezoelectric element that substantially functions is The substantial shape is substantially similar to the horizontal cross-sectional shape of the lens surface, and the substantial shape of the substantially functioning portion of the second piezoelectric element depends on the type of information to be obtained from the subject. The first piezoelectric element and the layer. Ultrasonic probe is characterized in that it is placed on top of the piezoelectric elements of the first to form a structure. 2. The ultrasonic probe according to claim 1, wherein:
The shape of the lens surface is a substantially spherical shape, the substantial shape of the first piezoelectric element is a substantially disc shape, and the substantial shape of the second piezoelectric element is a shape obtained by removing two opposing chord portions from the disc. An ultrasonic probe characterized in that 3. The ultrasonic probe according to claim 1, wherein:
The shape of the lens surface is a substantially spherical shape, the substantial shape of the first piezoelectric element is a substantially disk shape, and the substantial shape of the second piezoelectric element is a shape obtained by dividing a disk into a plurality of pieces in the circumferential direction. An ultrasonic probe characterized by being present. 4. The ultrasonic probe according to claim 1, wherein:
The shape of the lens surface is a substantially cylindrical surface shape, the substantial shape of the first piezoelectric element is a substantially rectangular flat plate shape, and the substantial shape of the second piezoelectric element is a rectangular flat plate into a plurality of strip-shaped portions. An ultrasonic probe having a divided shape. 5. The ultrasonic probe according to claim 1, wherein:
The first piezoelectric element is configured to be able to receive the ultrasonic wave reflected by the subject, and the first and second piezoelectric elements.
Of the piezoelectric element of the first reflected wave reflected by the subject.
An ultrasonic probe characterized in that the ultrasonic probe is connected to a switching means for selectively switching the reception path so that either one of the second piezoelectric element and the second piezoelectric element is received. 6. The ultrasonic probe according to claim 1, wherein:
Each of the first and second piezoelectric elements includes a piezoelectric film,
An ultrasonic probe comprising electrodes arranged above and below this piezoelectric film. 7. The ultrasonic probe according to claim 6, wherein:
The ultrasonic probe, wherein the substantial shape of the first piezoelectric element is a shape of a piezoelectric film and an electrode provided in the first piezoelectric element, which has a minimum area. 8. The ultrasonic probe according to claim 6,
An ultrasonic probe, wherein the substantial shape of the second piezoelectric element is a shape of a piezoelectric film and an electrode included in the second piezoelectric element, which has a minimum area.