JPH0932853A - Linear guide device and planar guide device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ball circulation type linear guide device which smoothly operates with high load and a planar guide device which utilizes the linear guide device. SOLUTION: A mobile base 2 linearly moves on a base 1. Ball line 4 each composed of a number of balls 3 along a moving direction are arranged between the base 1 and the mobile base 2. A plurality of parallel base ball rolling grooves 5 are formed on the base 1 in which the balls roll. A plurality of parallel mobile base ball grooves 6 are formed on the mobile base 2 for sandwiching the balls 3 with respect to the base ball rolling grooves 5. A plurality of load ball passages 7 are formed by the base ball rolling grooves 5 and the mobile base ball rolling grooves 6. A plurality of loadless ball passages 8 are formed on the mobile base 2 while being communicated with the load ball passages 7. A plurality of endless circulation passages 9 are formed by the load ball passages 7 and the loadless ball passages 8. A planar guide device is prepared by combining the linear guide device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear guide device and a flat guide device, and more particularly, to a base, a moving base moving on the base, and the interposition between the base and the moving base. The present invention relates to a linear guide device composed of a large number of balls and a plane guide device using the device.

[0002]

2. Description of the Related Art As an example of such a plane guide device,
There is a configuration in which two sets of linear guide devices each including a rail and a block guided on the rail are combined in a right-angled direction, and blocks of both linear guide devices are integrated.

Examples of the above-mentioned plane guide device are shown in FIGS. 11 and 12. In this example, the plane guiding device 301 is, for example, a substrate 302 as shown in FIG.
Provided between the base 302 and the stage 303 so that the stage 303 can be freely moved in the orthogonal direction (the X direction and the Y direction orthogonal to the X direction: indicated by arrows X and Y in FIG. 11). It is a thing.

As shown in FIGS. 11 and 12, the plane guide device 301 includes a base rail 305 fixed to the base 302 and extending in the Y direction, and a base rail 305 fitted to the base rail 305. Intermediate block 3 that can move up in the Y direction
06, and a movable table rail 305 which is fitted to the intermediate block 306 and extends in the X direction, is provided so as to be movable in the X direction, and has the stage 303 attached thereto.

Therefore, in this plane guide device 301, the moving base rail 307 combines the movement of the moving rail 307 with respect to the intermediate block 306 in the X direction and the movement of the intermediate block 306 with respect to the base rail 305 in the Y direction. The moving rail 307 can be freely moved on the XY plane with respect to the base rail 305. In FIG. 11, reference numeral 108 is a bolt for fixing the base, 109 is a bolt for fixing the base 302 and the moving base rail, 1
Reference numeral 10 denotes a bolt for fixing the movable table rail 307 and the stage 303.

Here, the guide structure between the intermediate block 306 and the base rail 305, and the intermediate block 306.
And the guide rail 307 have a common guide structure. That is, in this guide structure, as shown in FIG. 12, a lower rail fitting groove portion (not shown) is formed in the lower portion of the intermediate block 306, and the base rail 305 is fitted into the lower rail fitting groove portion. , Intermediate block 306
An upper rail fitting groove portion 311 is formed in the upper part of the above, and the movable table rail 307 is fitted in the upper rail fitting groove portion 311. Here, the cross-sectional shape of the lower rail fitting groove portion has the same cross-sectional shape as the upper rail fitting groove portion 311 shown in FIG.

The rails 305 and 307 have the same cross-sectional shape. Four rail-side ball rolling surfaces 312 and 313 are formed on the rails 305 and 307, and the lower and upper rails are fitted together. On the inner surface of the groove, four rows of block side ball rolling surfaces 316 (on the base rail side) are arranged so that a large number of balls 314 and 415 are rollably arranged between the rail side ball rolling surfaces 312 and 313. The block ball rolling surface (not shown) forms the load ball passages 317, 31 together with the rail side ball rolling surfaces 312, 313.
8 and the balls 314, 315 arranged in the load ball passages 317, 318 roll to form the intermediate block 3
The rails 305 and 307 are guided with low resistance in the rail fitting groove portion of 06.

In the intermediate block 305, the unloaded ball passage 31 connecting both ends of the loaded ball passage is connected.
9,320 to form the load ball passages 317,318
And the unloaded ball passages 319 and 320 form an endless circulation path of balls, and the balls 314 and 315 rolling to the inside of the loaded ball passages 317 and 318 and reaching one end of the loaded ball passages 317 and 318 are not formed. Load ball passage 319, 3
It is configured to return to the opposite ends of the load ball passages 317 and 318 via 20.

In this example, as shown in FIG. 12, end plates 321 and 322 are provided at the ends of the intermediate block 306, and the end plates 321 are part of the unloaded ball passage and the balls are A ball direction changing passage 323 for changing the moving direction to the opposite side (the ball changing passage on the moving rail side is not shown in the drawing) is formed.

[0010]

By the way, in recent years, there have been demands for such a linear guide device and a plane guide device that are larger than conventional ones and can withstand a high load.

However, in the above-described linear guide device and flat guide device, since the guide is performed by a large number of balls, when a large load is applied, the balls and the ball rolling groove are repeatedly moved. Since the load acts, those surface parts become fatigued and peeling occurs, and when an impact load is applied, an indentation occurs and the ball rolls on the ball rolling surface. Therefore, there is a problem that the smooth operation cannot be performed.

Therefore, an object of the present invention is to provide a ball circulation type linear guide device that can be used under high load and a plane guide device using this linear guide device.

[0013]

In the present invention, a means for solving the above-mentioned problems lies in a linear guide device, and as shown in FIG. 1, a base 1 and a line on the base 1 are linearly moved. Between the moving base 2 that moves and the base 1 and the moving base 2,
A plurality of ball rows 4 each of which is composed of a large number of balls 3 arranged along the moving direction are arranged, and the moving table 2 is attached to the base 1.
A plurality of rows of parallel base ball rolling grooves 5 on which the balls 3 roll along the moving direction of the base 3 are formed, and the balls 3 are sandwiched by the base ball rolling grooves 5 on the moving base 2. A plurality of rows of parallel moving base ball rolling grooves 6 are formed, and a plurality of load ball passages 7 are formed by the base ball rolling groove 5 and the moving base ball rolling groove 6, and at the same time, in the moving base 2. A plurality of unloaded ball passages 8 are formed in communication with the loaded ball passage 7, and the loaded ball passage 7 and the unloaded ball passage 8 are formed.
And a plurality of infinite circulation paths 9 for the ball are formed.

In the linear guide apparatus according to the present invention, the movable table 2 is composed of the movable table body 2a and the side lid 11 provided at the end of the movable table 2 in the moving direction, and the movable body body 2a is also provided. A straight ball passage 8a is formed in the side cover 11, and a ball direction change passage 12 that connects the load ball passage 7 and the straight ball passage 8a is formed in the side lid 11. The straight ball passage 8a and the ball direction change passage 12 are formed. With the above, the unloaded ball passage 8 can be configured.

Further, in the linear guide device according to the present invention,
A guide mechanism 14 that guides the movable table 2 only in the moving direction associated with the rolling of the balls 3 of the movable table 2 may be arranged between the base 1 and the movable table 2.

Further, in the linear guide device according to the present invention, the guide mechanism 14 is provided with a pair of inward faces 15 and 15 on one of the base 1 and the moving base 2 and on the other of the base 1 and the moving base 2. Outward facing surfaces 16,1 close to the inward facing surfaces 15,15
6 is provided, and the inward surface 15 and the outward surface 16 close to each other are set as one set, and the inward surface 15 and the outward surface 16 forming each set are
Linear grooves 17 and 1 along the moving direction of the moving table 2
8 and the openings of these grooves 17 and 18 are opposed to each other so that a plurality of guide mechanism balls 2 are provided between the grooves 17 and 18.
2 are arranged and their inner surfaces are guided by the guide mechanism load ball passage 1
9 and 19, the guide mechanism unloaded ball passage 20 is formed on the base 1 or the movable base by communicating with the loaded ball passage, and the guide mechanism unloaded ball passage 19 and the guide mechanism unloaded ball passage 20 are formed. The guide mechanism infinite circulation passage 21 is formed by and the plurality of guide mechanism balls 22 are circulated in the infinite circulation passage 21.

Further, according to the linear guide device of the present invention, the unloaded ball passages 8 provided in the moving base 2 are parallel to each other on the side opposite to the side where the moving base ball rolling groove 6 is formed. A ball rolling groove 24 formed under the surface of the moving base 2 and having a depth dimension larger than the diameter of the ball 3, and a cover for covering the ball rolling groove 24. It can be formed between the plates 25.

According to the linear guide device of the present invention, the unloaded ball passage 7 of the infinite circulation passage 9 is provided.
A rod-shaped member 27 is loosely fitted to the end of the rod-shaped member, and a large number of balls 3 are filled at both ends of the rod-shaped member, and the rod-shaped member is provided in the unloaded ball passage 8 between two balls located at both ends of the rod-shaped member. The moving force of the ball can be transmitted.

Further, the means for solving the above-mentioned problems in the present invention relates to the plane guide device, and includes the base 51 and
An intermediate member 52 that linearly moves on the base 51, a moving base 53 that linearly moves on the intermediate member 52 in a moving direction different from the moving direction of the intermediate member 52, and the base 5
1 and the intermediate member 52, a plurality of rows of balls 55 composed of a large number of balls 54 arranged along the moving direction of the intermediate member 53 are arranged, and the intermediate member 52 and the moving table 53 are arranged. In between, a plurality of rows of balls 57 composed of a large number of balls 56 arranged along the moving direction of the moving table 53 are arranged, and the balls 54 roll on the base 51 along the moving direction of the intermediate member 52. A plurality of rows of parallel base member ball rolling grooves 58 that move are formed, and a plurality of rows of parallel intermediate member base-side ball rollers that sandwich the ball 54 with the base ball rolling groove 58 are formed in the intermediate member 52. A moving groove 59 is formed, a plurality of base side load ball passages 60 are formed by the base ball rolling groove 58 and the intermediate member base side ball rolling groove 59, and the base member is formed on the intermediate member 53. In communication with the table side load ball passage 60 To form a base side unloaded ball passage 61 having, base side of the ball and the base-side loaded ball passage 60 and the base-side unloaded ball passage 61 endless circulation path 6
2, a plurality of rows of parallel moving table ball rolling grooves 63 on which the balls 56 roll along the moving direction of the moving table 53 are formed on the moving table 53. The moving base ball rolling groove 63 and the ball 5
A plurality of rows of parallel intermediate member moving base side ball rolling grooves 64 sandwiching 6 are formed, and a plurality of moving base side loads are formed by the moving base ball rolling grooves 63 and the intermediate member moving base side ball rolling grooves 64. A ball passage 65 is formed, and a plurality of pedestal-side unloaded ball passages 66 are formed in the intermediate member 53 so as to communicate with the pedestal-side loaded ball passage 65. Mobile stand side unloaded ball passage 66
And a plurality of inward circulation paths 67 for the moving base of the ball are formed.

According to the plane guide apparatus of the present invention, the intermediate member 52 is provided with the intermediate member body 52a, the base side lid 71 and the movable table side lid 7 provided at the end of the intermediate member body.
2, the intermediate member body 52a is formed with a straight ball passage 61a of the base-side unloaded ball passage 61 and a straight ball passage 66a of the movable table-side unloaded ball passage 66, and the base side The side lid 71 includes the base-side loaded ball passage 60 and the base-side unloaded ball passage 61.
Forming a base side ball direction changing passage communicating with the base side unloaded ball passage 61a. The base side unloaded ball passage is formed by the straight side ball passage 61a of the base side unloaded ball passage 61 and the ball direction changing passage. 61, and the movable base side lid 72 has a linear ball passage 66a of the movable base side load ball passage 65 and the movable base side unloaded ball passage 66.
And a straight ball passage 60 of the unloaded ball passage 66 on the moving base side, which forms a moving-direction ball-direction changing passage communicating with
The base-side unloaded ball passage 66 can be configured by a and the moving-base-side ball direction changing passage 74.

According to the plane guide device of the present invention, when the movable table 2 moves with respect to the base 1, the ball row 4 consisting of a large number of balls 3 has a plurality of rows of base ball rolling grooves and movable table balls. The rolling table guides the movable base by rolling while receiving a load in a load ball passage constituted by a rolling groove.

Therefore, when the movable table is moved, the balls circulate while rolling between the movable table and the base, and the movable table 2 moves smoothly on the base 1. At this time, since the load is distributed and applied to a large number of balls in other rows, a large load does not act on each ball, each ball 3 bears the load sufficiently, and the linear guide device receives a large load. Can be responsible for Since the ball 3 circulates in the infinite circulation path 9, the length of the base 1 and the moving distance of the moving table 2 are not limited.

Further, according to the plane guide device of the present invention, the present plane guide device can be considered as one in which the linear guide devices of the above-mentioned first means are vertically stacked, and the lower linear guide device side is provided. Is between the base 21 and the intermediate member 22, and on the upper linear guide device side, the intermediate member 22 and the moving base 31.
And the same operation as the linear guide device of the first means. This makes it possible to configure a plane guide device in which the movable table can freely move in the XY directions on a plane with respect to the base.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION The configurations of a linear guide device and a plane guide device according to an embodiment of the present invention will be described in detail below.

1 (1), (2), (3) and FIG. 2 show a first embodiment of a linear guide device according to the present invention. This embodiment corresponds to claims 1, 2, 3, 4, and 5.

In the present embodiment, the linear guide device 10
As shown in FIGS. 1 (1) and 1 (2), a base portion 1a that is an attachment portion to a base (not shown) and a guide direction (left-right direction in FIG. 1 (1)) on the base portion 1a A base 1 having a substantially convex cross section in which the provided convex portion 1b is formed.
And a concave portion 2a having an opening facing downward is formed, and a cross-section is formed in a substantially reverse concave shape. The concave portion 2a is arranged on the base 1 so as to cover the convex portion 1b and can move along the guide direction. It is composed of a moving base 2, a ball row 4 of nine rows composed of a large number of balls 3 arranged along the guide direction between the upper surface of the convex portion 1b and the lower surface of the concave portion 1b. .

In this embodiment, nine rows of base ball rolling grooves 5 are provided on the upper surface of the convex portion 1b of the base 1 at equal intervals in parallel along the guide direction of the moving base 2 and the convex portions are formed. It is formed from one end to the other end of 1b. The cross-sectional shape of the base ball rolling groove 5 is an arc having a radius dimension slightly larger than the radius of the ball 3, and the ball 3 makes contact with the rolling groove of the base ball 5 at one place to roll. To do.

On the lower surface of the recess 2a of the moving table 2, nine rows of moving table ball rolling grooves 6 are formed at equal intervals in parallel so as to correspond to the base ball rolling groove 5. The cross-sectional shape of the moving base ball rolling groove 6 is the same as the cross-sectional shape of the base ball rolling groove 5.

In the state where the moving base 2 is arranged on the base 1, the corresponding base ball rolling groove 5 and the corresponding moving base ball rolling groove 6 are in contact with each other at the above-mentioned ball portions. Row 4
Becomes the load ball passage 7 between which Base 1 and moving base 2
A total of 9 rows of load ball passages 7 are formed between and.

In the nine rows of loaded ball passages 7, the balls 3 forming each ball row 4 roll along with the movement of the moving base 2 and guide the moving base 2. The balls 3 forming each ball row 4 roll along with the movement of the moving table 2 and guide the moving table 2. It is distributed and loaded and transmitted to the base 1.

Further, in this embodiment, the movable base 2 is formed with nine unloaded ball passages 8 connecting both ends of each load ball passage 7 formed between the base 1 and the movable base 2. Then, the loaded ball passages 7 and the unloaded ball passages form a substantially elliptical infinite circulation passage 9. The infinite circulation path 9 is composed of 9 sets, and each of the infinite circulation paths 9 is filled with a large number of balls forming the ball row.

In the present embodiment, the unloaded ball passage 8
Are formed on the moving table 2 as follows. That is, in this embodiment, as shown in FIG. 1A, the moving table 2 is composed of the moving table body 2a and the side lids 11 provided at both ends of the moving table 2 in the moving direction. And this moving body 2
A straight ball passage 8a is formed from one end to the other end of a, which is a portion in which the ball moves linearly without changing its rolling direction in the unloaded state.

On the other hand, the side lid 11 is formed with a ball direction changing passage 12 for connecting the loaded ball passage 7 and the straight ball passage 8a of the unloaded ball passage 8 to each other, and the straight ball passage 8a and the ball direction are formed. The unloaded ball passage 8 is configured with the conversion passage 12.

This ball direction changing passage 12 is shown in FIG.
As shown in (3), the ball 3 is a passage in which a semicircular arc-shaped trajectory is drawn and the movement direction is reversed, and the ball 3 has a semicircular shape.

Further, in the present embodiment, the straight ball passage 8a of the unloaded ball passage 8 provided in the moving body 2a.
Is formed as follows. That is, in the present embodiment, the straight ball passage 8a of the unloaded ball passage 8 provided in the moving table 2 has the moving table ball rolling groove 6 of the moving table 2 as shown in FIGS. 1 (1) and (2). A ball rolling groove 24 is formed on the opposite side of the formed side, that is, from the upper surface of the moving base body 2a, and the upper side of the ball rolling groove 24 is covered with a cover plate 25 to form a closed cross section. The space is the straight ball passage 8a.

The cross-sectional shape of the ball rolling groove 24 is shown in FIG.
As shown in (2), the ball 3 has a substantially rectangular shape with a depth dimension slightly larger than the diameter dimension of the ball 3, and the bottom surface of the ball rolling surface 24 has 9 rows of balls. 9 rows of ball guide grooves 29 are formed corresponding to the above, and when the ball rolling grooves 24 are covered with the cover plate 25 while the balls are in the ball guide grooves 29, the balls 3 are It is assumed that the ball 3 is guided by the ball guide groove 29 to roll, and the ball 3 cannot move to another adjacent ball guide groove 29.

When the moving base 2 moves on the base 1, the balls 3 roll in the load ball passage 7 while distributing and carrying the load applied to the moving base 2 as described above.
Guide the moving table 2 on the base 1.

In the present embodiment, the balls 3 rolling in the load ball passage 7 and reaching one end of the load ball passage 7 in accordance with the movement of the moving table 2 are in the ball direction of the side lid 11. It can be circulated so as to return to the end on the opposite side of the load ball passage 7 through the unloaded ball passage 8 composed of the conversion passage 12 and the straight ball passage 8a of the movable table main body 2a, and it can be circulated without the load ball passage 7. The movable table 2 is guided by freely moving back and forth between the load ball passage 8 and the load ball passage 8.

In the figure, reference numeral 35 is a bolt through hole for fixing the base 1, 36 is a bolt hole for fixing the member to the moving base 2, and 3
Reference numeral 7 denotes a bolt for fixing the cover plate 25 to the moving base. Further, in the present embodiment, the ball 3 of the moving base 2 rolls between the base 1 and the moving base 2. The guide mechanism 14 for guiding the moving table 2 is arranged only in the moving direction associated with.

In this embodiment, as shown in FIG. 2, the guide mechanism 14 is provided with a pair of inward faces 15 and 15 on the moving base 2 and an outward face close to the inward faces 15 and 15 on the base 1. 16 and 16 are provided, and the inward surface 15 and the outward surface 16 which are close to each other are set as a set, and the inward surface 15 and the outward surface 16 forming each set are provided with a linear groove along the moving direction of the movable table 2. 17 and 18, the openings of these grooves 17 and 18 are opposed to each other, and a plurality of guide mechanism balls 22 are arranged between the grooves 17 and 18, and the inner surfaces thereof are guided to the guide mechanism load ball passages 19. It is set as 19.

A guide mechanism unloaded ball passage 20 is formed on the movable table 2 so as to communicate with the guide mechanism loaded ball passage 19, and the guide mechanism unloaded ball passage 19 and the guide mechanism unloaded ball passage 20 are formed. Guide mechanism infinite circuit 2
1 is formed, and the plurality of guide mechanism balls 22 are circulated in the infinite circulation path 21. In the present embodiment, the guide mechanism unloaded ball passage 20 forms a straight ball passage by forming a through hole in the moving base body 2a, and forms a direction change passage of the guide mechanism ball 22 in the side lid 11. It is supposed to be configured.

Further, in the present embodiment, the cross-sectional shape of the concave grooves 17, 18 forming the guide mechanism load ball passage 19 has a radius R slightly larger than the radius dimension of the guide mechanism ball 22, as shown in FIG. The guide mechanism balls 22 are in contact with each other at two points in a shape in which one arc is combined with its center position displaced.

Therefore, according to the linear guide device 10 of this embodiment, when the movable table 2 moves with respect to the base 1, the row of balls 4 consisting of a large number of balls 3 rolls in 9 rows of base balls. The rolling table guides the movable table by rolling while receiving a load in the load ball passage constituted by the groove and the moving table ball rolling groove.

Therefore, when the movable table is moved, only rolling friction of the balls acts between the movable table and the base, and the movable table 2 moves smoothly on the base 1. At this time,
Since the load is distributed and applied to a large number of balls in other rows, a large load does not act on each ball, each ball 3 bears the load sufficiently, and the linear guide device bears a large load. You can

At this time, according to the present embodiment, the guide mechanism 1
4 are formed in the concave grooves 17 and 18 provided on the inward surface 15 of the movable table 2 and the outward surface 16 of the base 1, and these concave grooves 17 and 18 are formed.
Since the guide mechanism load ball passage 19 is formed by and a plurality of guide mechanism balls 22 are arranged in the guide mechanism load ball passage 19, the guide operation is performed between the rolling surfaces of the guide mechanism ball 22. The resistance in the moving direction of the moving table caused by rolling can be minimized due to the guide mechanism 14, and other than the vertical direction of the base 1 and the moving table 2 or the direction in which the ball 3 is guided and moved. Relative movement in the horizontal direction is reliably prevented, and the moving table can respond to the rotational force with the moving direction of the moving table as the axis of rotation, and it also prevents rattling and wobbling of the moving table. Operates smoothly only in one direction.

According to this embodiment, the unloaded ball passages 8 provided in the moving table 2 are formed in parallel with each other on the opposite side of the moving table from the side where the moving table ball rolling groove 6 is formed. Ball rolling groove 24 having a depth dimension larger than the diameter of 3 and an unloaded ball 3 located below the surface of the carriage.
And the cover plate 25 that covers the ball rolling groove 24, the ball rolling groove 24 is formed from the surface of the moving table when the unloaded ball passage is formed. Since it suffices to cover the rolling groove 24 with the cover 25, the production and processing are facilitated when forming the unloaded ball passage, and the productivity is improved.

Next, a second embodiment of the linear guide device according to the present invention will be described. 3 (1) and 3 (2) show a second embodiment of the linear guide device according to the present invention. In this embodiment, the above-mentioned claims 1, 2,
Equivalent to 3, 4. Straight guide device 1 according to the present embodiment
00 changes the configuration of the movable table body 102a of the movable table 102 to change the configuration of the straight ball passage 108a of the unloaded ball passage 108 provided in the movable body 102a to the movable body 1
Since it is the same as the linear guide device 10 shown in the first embodiment except that it is a through hole formed in 02a, the same portions are denoted by the same reference numerals and detailed description thereof is omitted.

Next, a third embodiment of the linear guide device according to the present invention will be described. 4 (1) and 4 (2) show a third embodiment of the linear guide device according to the present invention.

In this embodiment, the above-mentioned claims 1, 2 and
Equivalent to 3, 4. Straight guide device 1 according to the present embodiment
Reference numeral 10 denotes a shape of the base 111, a shape of the moving base 112, and a ball row 1 provided between the base 111 and the moving base 112.
The difference from the second embodiment is that the number of columns of 14 is 4.

That is, in this embodiment, the base 111 has a substantially rectangular cross section, and a bolt through hole 122 for fixing the base 111 is formed in the central portion of the base 111. The base ball rolling groove 11 is formed on both sides of the through hole 122.
5 are formed in two rows each, for a total of four rows.

The movable base 112 has the base 111.
The moving base 112 is arranged on the base 111 so as to cover the base 111 and can move along the guide direction.

Four rows of moving base ball rolling grooves 116 are provided on the upper surface of the recess 112a corresponding to the base ball rolling grooves 115, and the base ball rolling groove 115 and the moving base balls are formed. A load ball passage 117 is formed with the rolling groove 116.

The moving table 112 is the moving table body 1
12a and the side lid 121, and the moving body main body 112a
A through hole is bored in the through hole to form a straight ball passage 118a of the unloaded ball passage 118, and a side cover 121 is provided with a ball direction changing passage (not shown) to form the unloaded ball passage. The passage and the unloaded ball passage form an infinite circulation passage.

Further, from the upper surface of the movable table 112, as shown in FIGS. 4 (1) and 4 (2), there are three edge portions and a central portion.
Bolt holes for member attachment are formed at a total of 9 locations in the row.

Next, a fourth embodiment of the linear guide device according to the present invention will be described. 5 (1) and 5 (2) show a second embodiment of the linear guide device according to the present invention.

This embodiment is characterized by claims 1, 2, 3, 4,
It corresponds to the means of 5. In the linear guide device 130 according to the present embodiment, each of the above points is that the shape of the base 131, the shape of the moving base 112, and the number of ball rows 134 provided between the base 131 and the moving base 132 are six rows. Different from the embodiment.

That is, in the present embodiment, the base 131 has a substantially rectangular cross section, and a bolt through hole 147 for fixing the base 131 is formed in the central portion of the base 131. On both sides of the through hole 147, the base ball rolling groove 13 is formed.
5 rows are formed in 3 rows each, for a total of 6 rows.

The movable base 132 has a base 131.
Is provided on the base 131 so as to cover the base 131, and the movable base 132 is movable along the guide direction.

On the upper surface of the recess 132a, corresponding to the base ball rolling grooves 135, six rows of movable table ball rolling grooves 116 are provided, three rows on each side, and the base ball rolling grooves 135 are provided. The movable base ball rolling groove 136 and the movable base ball rolling groove 136 form a load ball passage 137.

The moving table 132 is the moving table body 13
The movable body main body 132a is provided with a linear ball passage 137a. The linear ball passages are provided on both sides of the central bolt hole 148 among the nine member attachment bolt holes 148 provided in the movable base 132 in three rows, and three linear ball passages 1 are provided on one side.
37a is provided. This straight ball passage 1
As shown in FIGS. 5 (1) and 5 (2), 37a has two rows of ball rolling grooves 142 formed from the upper surface of the moving base body 137a, and the upper side of each ball rolling groove 142 is covered with a cover plate 143. It covers and forms a closed cross section.

The sectional shape of the ball rolling groove 143 is, as shown in FIG. 5B, a substantially rectangular shape having a depth dimension slightly larger than the dimension substantially the same as the diameter dimension of the ball 133. Three rows of ball guide grooves 144 are formed on one side of the bottom surface of the ball rolling surface 142 corresponding to the three rows of balls on one side, and the balls 133 are inserted in the ball guide grooves 144. When the upper part of the ball rolling groove 24 is covered with the cover plate 25, the ball 133 is guided by the ball guide groove 144 and rolls, so that the ball 133 cannot move to another adjacent ball guide groove 144. There is. Then, a ball direction changing passage (not shown) is provided in the side lid 141 to form an unloaded ball passage together with the straight ball passage, and an infinite circulation passage is formed by the loaded ball passage and the unloaded ball passage. are doing.

Next, an embodiment of the plane guide device according to the present embodiment will be described. In the present embodiment, the above claim 7,
It corresponds to 8, 9, 10 and 12. In the present embodiment, the basic structure of the plane guide device 50 is two linear guide devices (shown in FIG. 4) according to the third embodiment described above, and the respective guide directions are XY directions orthogonal to each other. (X direction: left-right direction of FIG. 6 (1), Y direction: FIG. 6 (1)
Up and down). Then, the members corresponding to the moving bases of the two linear guide devices are respectively the lower intermediate member 68 and the upper intermediate member 69, and the cushioning elastic body 79 made of rubber is provided between the lower intermediate member 68 and the upper intermediate member 69. It is sandwiched and fastened with bolts 80 to form an intermediate member 52 of the plane guide device 50.

As described above, the plane guide device according to the present embodiment has a structure in which two linear guide devices are superposed, and the structure of the portion corresponding to the upper and lower two linear guide devices is as follows.
The configuration is the same except that the arrangement in the vertical direction is reversed. Therefore, the sectional view of the member corresponding to the lower linear guide device in FIG. 6B corresponds to the cross section of the center line of the member corresponding to the upper linear guide device.

Since the structure of the plane guide device according to the present embodiment is the same as that of the above-described embodiment of the linear guide device, the corresponding reference numerals will be described and detailed description thereof will be omitted. That is, the base 51 and the movable table 53 of the plane guide device 50 of the present embodiment are the linear guide device 110.
Corresponding to the base 111 of the upper intermediate member 68,
The lower intermediate member 69 corresponds to the moving table, the balls 54 and 56, and the ball rows 55 and 57 correspond to the balls 113 and 114. Further, the base ball rolling groove 58 and the moving base ball rolling groove 63 are provided in the base ball rolling groove 115, the intermediate member base side ball rolling groove 59, and the intermediate member moving base side ball rolling groove 64.
To the movable base ball rolling 116, the base side load ball passage 60, the movable base side load ball passage 65 to the load ball passage 117, the base side unloaded ball passage 51, and the movable base side unloaded ball passage 66. Indicates the unloaded ball passage 118, the base side lid 71, the movable table side lid 72 and the guide mechanism 76, respectively.

In the figure, reference numeral 62 is an endless circulation path on the base side, 67 is an endless circulation path on the moving base side, 66a is a straight line portion of the unloaded ball passage 66 on the moving base side, and 74 is a ball direction change. Shows the passage. Further, in the present embodiment, the base side guide mechanism 76, as shown in FIG.
The lower intermediate member of the intermediate members has a pair of inward faces 81, 81.
Is provided, and the base 51 is provided with outward facing surfaces 83, 83 close to the inward facing surfaces 81, 81. The inward facing surface 81 and the outward facing surface 83, which are close to each other, are set as one set, and each set of the inward facing surface 81 and the outward facing surface is formed. 83, linear recessed grooves 85, 87 are formed along the moving direction of the intermediate member 52, and these recessed grooves 85, 87 are formed.
A plurality of guide mechanism balls 89, 89 are arranged between the concave grooves 85, 87 with their openings facing each other, and their inner surfaces are used as guide mechanism load ball passages 91, 91.

The intermediate member 52 is communicated with the guide mechanism load ball passage 91 and the guide mechanism unloaded ball passage 9 is connected.
3, the guide mechanism loaded ball passage 91 and the guide mechanism unloaded ball passage 93 form a guide mechanism endless circulation path 95, and the plurality of guide mechanism balls 89 circulate in the endless circulation path 95. I will let you. In the present embodiment, the guide mechanism unloaded ball passage 93 forms a straight ball passage by forming a through hole in the lower moving base body 68a, and the direction of the guide mechanism ball 89 on the base body side lid 71. It is supposed to form a conversion passage.

In the present embodiment, the operation described for the linear guide device is similarly performed between the intermediate member 52 and the moving base 53, so that the flat guide device can be used under a high load and can be smoothly operated. It can be made to operate normally. Here, according to the present embodiment, since the cushioning elastic body 79 made of rubber is sandwiched between the lower intermediate member 68 and the upper intermediate member 69, the impact load acting on the flat guide device is caused by this elastic body. It is absorbed by 79 and can withstand a shocking load, and both unloaded ball passages 6
The formation of 1, 66 becomes easy.

Further, according to this embodiment, between the base 51 and the intermediate member 52, and between the intermediate member 52 and the movable table 52,
Since the guide mechanisms 76 and 77 are provided, the base 51 and the intermediate member 52, the intermediate member 52 and the movable table 52 are arranged in the vertical direction, or the balls 54 and 56 are arranged in the respective load ball passages 6.
Since relative movement in the horizontal direction other than the direction of being guided and moved within the 0, 65 is disabled, the flat guide device operates smoothly without rattling or rotation.

Next, a second embodiment of the plane guide device according to the present invention will be described. 7 (1), 8 (1),
(2) shows a second embodiment of the plane guide device according to the present invention. This embodiment is based on the above claims 7, 8, and 9.
It corresponds to.

In the present embodiment, the plane guide device 200
Is a base 201, an intermediate member 202 that linearly moves on the base 201, and the intermediate member 2 on the intermediate member 202.
It is composed of a moving table 203 which moves linearly in a moving direction different from the moving direction of 02. And the base 2
The ball 204 is arranged between 01 and the intermediate member 202, and the ball 206 is arranged between the intermediate member 202 and the moving base 203.

In this embodiment, the intermediate member 202 is used.
Is different from the intermediate member of the flat guide device according to the first embodiment in that the structure is integrated in the vertical direction. In the present embodiment, the base 201 and the moving base 203 are members having the same shape, and are fitted in concave portions formed in the lower portion and the upper portion of the intermediate member 202 and attached so as to be movable in directions orthogonal to each other. And in this embodiment, the said base 201
Structure between the intermediate member 202 and the moving member 20
The guide structure between 3 and the intermediate member 202 is the same in basic structure except that the vertical structure is reversed and the guide directions are different by 90 °. The guide structure between the base 201 and the intermediate member 202 will be described below.

In the linear guide device according to the present embodiment, the base 201 is shown in FIGS. 7 (1), 7 (2) and 8 (1).
As shown in FIG. 3, a rectangular parallelepiped member having a substantially rectangular cross section, on the lower surface of which a bolt hole 247 for fixing the base and a member locking recess 248 having a circular cross section and a bottom are formed. Two
On the upper surface of 01, 19 rows of base ball rolling grooves 208 are formed in parallel along the moving direction (Y direction) of the intermediate member 202. The cross-sectional shape of this base ball rolling groove 208 is
The ball 204 is an arc having a radius dimension slightly larger than the radius of the ball 204, and the ball 204 has the base ball rolling groove 20.
It comes into contact with 8 at one place and rolls.

The lower surface of the lower intermediate member 218 is parallel to the lower surface of the base ball rolling groove 208.
Nine rows of intermediate member base ball rolling grooves 209 are formed. The sectional shape of the intermediate member base ball rolling groove 209 is the same as the sectional shape of the base ball rolling groove 208.

The intermediate member 20 is mounted on the base 201.
In the state where 2 are arranged, each corresponding base ball rolling groove 2
08 and each intermediate member base-side ball rolling groove 209 are opposed to each other to form a base-side load ball passage 210 in which the ball row 205 including the large number of balls 204 is sandwiched.
A total of 19 rows of base-side load ball passages 210 are formed between the base 201 and the intermediate member 202.

This 19-row base-side load ball passage 210
The balls 204 that make up each ball row 205 in
Rolls as the intermediate member 202 moves, and the intermediate member 2
02, the load is dispersed and applied to each of a large number of balls 204 forming each ball row 205, and is transmitted to the base 201.

In the present embodiment, as shown in FIGS. 7 (2) and 8 (2), the intermediate member 202 has each base formed between the base 201 and the intermediate member 202. Nineteen unloaded ball passages 211 connecting both ends of the side loaded ball passage 210 are formed, and the base-side infinite circulation passage 212 is formed by the base-side loaded ball passages 210 and the base-side unloaded ball passages 211. Is formed. This base side infinite circulation path 212 is composed of 19 sets, and a plastic or metal rod-shaped member 97 is loosely fitted into the base side unloaded ball passage 211 of each base side infinite circulation path 212. Both ends of the rod-shaped member 97 are filled with a large number of balls 204. The rod-shaped member 97 transmits the moving force of the ball 204 in each unloaded ball passage 211 between the balls located at both ends of the rod-shaped member 97. The rod-shaped member 93 may have a tubular shape or a coil spring shape, does not deform in the compression direction, moves in the unloaded ball passage 211 with low resistance, and transmits the moving force of the ball 204. The material does not matter.

Here, as described above, the structure between the base 201 and the intermediate member 202 and the structure between the movable table 203 and the intermediate member 202 have the same structure, and FIG. As shown in 1), the moving base 203 and the intermediate member 202 have a base ball rolling groove 208, an intermediate member base side ball rolling groove 209, a base provided on the base 201 and the intermediate member 202. The base-side loaded ball passage 210, the base-side unloaded ball passage 211, and the base-side infinite circulation path 212, which correspond to the base-side ball rolling groove 213, the intermediate member base-side ball rolling groove 214, and the base-side load. Ball passage 215, moving base side unloaded ball passage 216, moving base side endless circulation passage 21
A row of balls 2 provided with a plurality of balls 206
07 and the rod-shaped member 98 are arranged.

Here, in this embodiment, as shown in FIG. 7B, the base-side unloaded ball passage 211 includes the movable-side loaded ball passage 225 and the movable-side unloaded ball passage 2.
16 and similarly, the movable table-side unloaded ball passage 216 is provided between the base-side loaded ball passage 210 and the base-side unloaded ball passage 211. The thickness is designed to be small.

In this embodiment, the base-side unloaded ball passage 211 and the movable table-side unloaded ball passage 216 are formed as follows. Here, the base-side unloaded ball passage 2
11 and the pedestal-side unloaded ball passage 217 are formed in the intermediate member 201 as described above, and their structures are the same. Therefore, the pedestal-side unloaded ball passage 216 will be described here.

In this embodiment, the intermediate member 202 is the same as that shown in FIG.
And, as shown in FIG. 8, an intermediate member main body 202a which is formed in a substantially square shape in a plane and in which concave grooves into which the base 202 and the movable table 203 are fitted are formed on the upper side and the lower side in the right angle direction, respectively. The intermediate member main body 202a is composed of two base-side lids 221 and two movable-side lids 222 provided at four end portions.

Here, as shown in FIGS. 7 and 8, both of the both side covers 221 and 222 are plate members having a concave shape adapted to the shape of each end surface of the intermediate member main body 202, and the bolts 22 are
In addition to being attached to the intermediate member main body 202a at 7, a cover plate 228 for preventing dust from entering the inside is attached. And, in the intermediate member main body 202a,
A straight ball passage 216a is formed as a through hole from the one end to the other end in the moving direction of the intermediate member movement 202, in which the ball moves linearly without changing its rolling direction in the unloaded state.

On the other hand, in each of the movable table side lids 222, there is formed a movable table side ball direction changing passage 224 which connects an end portion of the movable table side load ball passage 216 and an end portion of the linear ball passage 216a, respectively. The straight ball passage 216
The movable base side unloaded ball passage 216 is constituted by a and the movable base side ball direction changing passage 224.

This moving table side ball direction changing passage 224
As shown in FIG. 8 (2), is a passage in which the ball 204 draws a semi-circular locus and reverses its moving direction to move, and has a semi-ring shape. In the present embodiment,
The base side cover 221 has a base side ball direction change passage similar to the move base side ball direction change passage 224 formed in the move base side cover 222, and a linear ball passage provided in the intermediate member body 202a. The base-side unloaded ball passage 211 is formed together with the base 211a.
And the base-side load ball passage 210 form a base-side infinite circulation path 212.

Further, in this embodiment, the base 201 and the intermediate member 202, and the intermediate member 202 and the moving table 2 are used.
03 between the intermediate member 203 and the movable base 203, the base side guide mechanism 226 and the movable base side guide for guiding the intermediate member 203 and the movable base 203 only in the moving direction accompanying the rolling of the balls 204 and 206. A mechanism (not shown) is arranged.

Since both guide mechanisms have the same structure in this embodiment, the base guide mechanism 226 will be described. As shown in FIG. 7 (2), as in the linear guide device described above, A pair of inward faces 231, 231 and an outward face 2
33, 233 are provided to form concave grooves 235, 237 on the inward surface 231 and the outward surface 233 forming each set.
A plurality of guide mechanism balls 239 and 239 are arranged between the guide mechanism load ball passage 24 and the inner side thereof.
1 and 241.

Then, a guide mechanism unloaded ball passage 243 is formed in the intermediate member 202 so as to communicate with the guide mechanism loaded ball passage 241 to form a guide mechanism endless circulation passage 245, and a plurality of guide mechanism balls 239 are circulated. I will let you.

Further, in the present embodiment, the cross-sectional shape of the concave grooves 235, 237 forming the guide mechanism load ball passage 241 is such that two arcs having a radius R slightly larger than the radius dimension of the guide mechanism ball 239 are located at the center positions. The shapes are combined by shifting.

This will be described with reference to the lower part.
When the intermediate member 202 moves with respect to the base 201, a ball row 205 composed of a large number of balls 204 forms a plurality of rows of base ball rolling grooves 208 and intermediate member base side ball rolling grooves 20.
9 and guides the intermediate member 202 by rolling while receiving a load in the base-side load ball passage 210 constituted by 9 and 9.

Therefore, when the intermediate member 202 is moved, the ball 2 is placed between the intermediate member 202 and the base 201.
Only the rolling friction of No. 04 acts, and the intermediate member 202 moves smoothly along the base 201. At this time, since the load is distributed and applied to a large number of balls 204 in other rows,
The load applied to each ball 204 is reduced, and each ball can sufficiently bear the load and bear a large load. This operation is similarly performed between the intermediate member 202 and the moving base 203, so that the flat guide device can be used with a high load and can operate smoothly.

Further, according to this embodiment, the rod-shaped member 9 is provided in the base-side and movable-base-side unloaded ball passages 211 and 216.
7, 98 are loosely fitted, and the unloaded ball passage 2 is provided between the two balls located at both ends of the rod-shaped members 97, 98.
Since the moving force of the balls inside the balls 11 and 216 is transmitted, even if the balls that are not actually located in the load ball passages 91 and 92 are eliminated, the balls are replaced by these balls 97, 98. Transmits the moving force of the balls in the loaded ball passage, so that the number of balls can be reduced.

9 and 10 show a third embodiment of this embodiment. The flat surface guiding apparatus 250 according to the embodiment includes a lower mounting plate 251 and an upper mounting plate 252, which are members corresponding to the base 201 and the moving base 203 of the flat surface guiding apparatus according to the second embodiment, and a rubber cushioning material 253. , 254 are respectively sandwiched and attached, and since the basic configuration thereof is the same as that of the flat guide device according to the second embodiment described above, the same numbers are given to the same members. The detailed description thereof will be omitted.

Here, the base 201 and the lower mounting plate 2
Structure of 51 and moving base 203 and upper mounting plate 252
Since the structure is the same, the base 201 and the lower mounting plate 251 will be described. In this embodiment, the base 201 is provided with a total of twelve 12 rows of member-locking recesses 247 having a circular cross section and a bottom, as in the flat guide device according to the second embodiment described above. In addition to that, 20
Individual bolt holes 248 are provided. In this embodiment, the lower mounting plate 251 is attached to the base 201.

As shown in FIGS. 9 and 10, the lower mounting plate 251 is a plate member having a substantially square shape and is used as the base 20.
In addition to the bolt through holes 255 corresponding to one bolt hole 248, a large number of bolt through holes 256 are formed. Here, the bolt head 259a of the bolt 258 is housed in the bolt through hole 255 corresponding to the bolt hole of the base 201 so that the bolt head 258a does not project to the surface of the lower mounting plate 251. The part accommodation hole 257 is formed.

In the present embodiment, when the lower mounting plate 251 is mounted on the base 201 with the bolts 248, the buffer member 253 is mounted in the member mounting recess 247 of the base 201, and the base 201 and the lower mounting are attached. Plate 2
It does not come into direct contact with 51.

The cushioning member 253 is a solid cylindrical rubber member fitted in the member locking recess 247 and has a height larger than the depth of the member locking recess 247. It is attached to 12 member locking recesses 247 formed on the base 201.

On the other hand, similarly to the base 201, the buffer 254 is attached to the member locking recess 248 on the movable table 203, and the bolt through holes 259 and 260 and the bolt head accommodation hole 261 are opened. The upper mounting plate 252 is attached with bolts 262.

Therefore, according to this embodiment, in addition to the action of the flat guide device of the second embodiment, a load is applied between the upper mounting plate 252 and the lower mounting plate 251 with the flat guide device 200 interposed therebetween. Is added,
Even if the load fluctuates in the up-down direction, the buffer members 253 and 254 buffer the load fluctuating, so that the flat guide device is not subjected to a shocking load.

In the above embodiment of the linear guide device,
Although an example using a rod-shaped member has not been described, the rod-shaped member can be loosely fitted in the unloaded ball passage as in the second embodiment of the flat guide device described above.

[0099]

As described above, according to the linear guide device of the present invention, when the movable table moves with respect to the base, the base ball rolling groove having a plurality of rows of balls composed of a large number of balls. Since the rolling table guides the rolling table by rolling while receiving a load in the load ball passage constituted by the moving table ball rolling groove and the moving table, when moving the moving table, between the moving table and the base, Only the rolling friction of the ball acts, and the moving table moves smoothly on the base. At this time, the load is distributed and applied to a large number of balls in other rows, so that a large load does not act on each ball, each ball bears the load sufficiently, and the linear guide device bears a large load. I can carry it.

Since each ball row is arranged in each infinite circulation path composed of a loaded ball passage and an unloaded ball passage, the length of the base is increased and the movement distance of the moving base is increased. However, since the ball circulates in the infinite circulation path, the ball is always arranged in the loaded ball path, and the length of the base and the moving distance of the moving base are not limited.

Further, according to the linear guide device of the present invention, the present means can be considered as one in which the linear guide devices of the above-mentioned first means are vertically stacked, and on the lower linear guide device side. The same operation as the linear guide device of the first means is performed between the base and the intermediate member, and on the upper linear guide device side, between the intermediate member and the movable base. This makes it possible to configure a plane guide device in which the movable table can freely move in the XY directions on a plane with respect to the base. Therefore, the flat guide device can be used with a high load, and can be operated smoothly.

Therefore, according to the linear guide device and the flat guide device of the present invention, it is possible to perform a smooth guide under a high load, and it is possible to use it in a field which has not been used conventionally.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of a linear guide device according to the present invention, (1) is a partial sectional view, and (2) is a ii- of (1).
A sectional view corresponding to line ii, and (3) is a sectional view corresponding to line iii-iii of (1).

2 is an enlarged view showing a II portion in FIG. 1 (2) showing a guide mechanism of the linear guide device shown in FIG.

3A and 3B are diagrams showing a second embodiment of the linear guide device according to the present invention, wherein (1) is a front view and (2) is ii of (1).
It is a sectional view corresponding to the line -ii.

FIG. 4 is a diagram showing a third embodiment of a linear guide device according to the present invention, (1) is a front view, and (2) is a ii of (1).
It is a sectional view corresponding to the line -ii.

5A and 5B are diagrams showing a fourth embodiment of a linear guide device according to the present invention, wherein (1) is a front view and (2) is ii of (1).
It is a sectional view corresponding to the line -ii.

6A and 6B are diagrams showing a first embodiment of a flat surface guiding device according to the present invention, in which FIG. 6A is a plan view and FIG. 6B is a side view.

7A and 7B are views showing a second embodiment of the plane guide device according to the present invention, in which (1) is a plan view and (2) is a front view.

8 is a side view showing the plane guide device shown in FIG. 7. FIG.

9A and 9B are views showing a third embodiment of the plane guide device according to the present invention, in which (1) is a plan view and (2) is a front view.
(3) is a cross-sectional view showing the arrangement of balls and rod-shaped members.

FIG. 10 is a side view of the plane guide device shown in FIG.

FIG. 11 is a perspective view showing a conventional plane guide device.

12 is a partial cross-sectional view of the plane guide device shown in FIG.

[Explanation of symbols]

 1 Base 2 Mobile 3 Ball 4 Ball Row 5 Base Ball Rolling Groove 6 Mobile Ball Rolling Groove 7 Load Ball Passage 8 Unloaded Ball Passage 9 Infinite Circulation Route 11 Side Lid 12 Ball Direction Change Passage 14 Guide Mechanism 15 Inward surface 16 Outward surface 17 Recessed groove 18 Recessed groove 19 Guide mechanism Loaded ball passage 20 Guide mechanism Unloaded ball passage 21 Guide mechanism Infinite circulation passage 22 Guide mechanism ball 24 Ball rolling groove 25 Cover plate 27 Rod-shaped member 51 Base 52 Intermediate Member 53 Moving table 54 Ball 55 Ball row 56 Ball 57 Ball row 58 Base ball rolling groove 59 Intermediate member Base side ball rolling groove 60 Base side load ball passage 61 Base side unloaded ball passage 62 Base side Infinite circulation path 63 Moving base ball rolling groove 64 Intermediate member Moving base side ball rolling groove 65 Moving base side load ball passage 66 No moving base side Load ball passage 67 moves platform side endless circulation path 71 side cover 72 side cover 74 ball direction changing passages 76 guide mechanism 81 inwardly facing surface 83 outwardly facing surface 85 groove

Claims (8)

[Claims] 1. A base, a moving base that linearly moves on the base, and a row of balls arranged between the base and the moving base along the moving direction and including a plurality of balls. Are arranged in a plurality of rows, the base is formed with a plurality of rows of parallel base ball rolling grooves on which the balls roll along the moving direction of the moving base, and the base balls are formed on the moving base. A plurality of rows of parallel moving base ball rolling grooves sandwiching the ball with the rolling grooves are formed, and a plurality of load ball passages are formed by the base ball rolling groove and the moving base ball rolling groove, A straight guide device in which a plurality of unloaded ball passages are formed in communication with the load table to the movable table, and a plurality of infinite circulation paths for balls are formed by the loaded ball passages and the unloaded ball passages. 2. The moving table is composed of a moving table body and a side cover provided at an end of the moving table in the moving direction, and a linear ball passage is formed in the moving body so that the side cover is provided. A ball direction changing passage that connects the load ball passage and a straight ball passage of the unloaded ball passage, and the straight ball passage and the ball direction changing passage constitute the unloaded ball passage. The linear guide device described. 3. The guide mechanism according to claim 1, wherein a guide mechanism is arranged between the base and the movable base to guide the movable base only in a moving direction of the movable base as the balls roll. Straight guide device. 4. The guide mechanism is provided with a pair of inward faces on one of a base and a movable base, and an outward face close to the inward face on the other of the base and the movable base, and an inward face close to each other. With the outward surface as one set, linear concave grooves are formed on the inward surface and the outward surface forming each set along the moving direction of the moving table, and the openings of these concave grooves are made to face each other to form each concave surface. A plurality of guide mechanism balls are arranged between the grooves, and these inner surfaces are used as guide mechanism load ball passages, and a guide mechanism unloaded ball passage is formed by communicating with the guide mechanism load ball passages on a base or a moving base. 4. The straight line according to claim 3, wherein the guide mechanism loaded ball passage and the guide mechanism unloaded ball passage form a guide mechanism endless circulation path, and the plurality of guide mechanism balls are circulated in the endless circulation path. Guidance device. 5. A depth dimension larger than the diameter of the unloaded ball, wherein a plurality of unloaded ball passages provided in the movable table are formed in parallel with each other on the opposite side of the side of the movable table where the moving table ball rolling groove is formed. 1, 2, and 3, wherein the unloaded ball is formed between a ball rolling groove located below the surface of the moving base and a cover plate covering the ball rolling groove. Alternatively, the linear guide device according to claim 4. 6. A rod-shaped member is loosely fitted in the unloaded ball passage of the endless circulation passage, a large number of balls are filled in both ends of the rod-shaped member, and the rod-shaped member is attached to both ends of the rod-shaped member. The moving force of the ball in the unloaded ball passage is transmitted between the two positioned balls, claim 1, claim 2, claim 3, claim 4, or claim 5.
The linear guide device described. 7. A base, an intermediate member that linearly moves on the base, and a movable base that linearly moves on the intermediate member in a movement direction different from the movement direction of the intermediate member, Between the base and the intermediate member, a plurality of rows of balls composed of a large number of balls arranged along the moving direction of the intermediate member are arranged, and between the intermediate member and the movable table, the movement is performed. A plurality of rows of balls composed of a large number of balls arranged along the moving direction of the table are arranged, and a plurality of rows of parallel base balls rolling on the base along which the balls roll along the moving direction of the intermediate member. A plurality of rows of parallel intermediate member base side ball rolling grooves sandwiching the ball with the base ball rolling groove are formed in the intermediate member, and the base ball rolling groove and the base ball rolling groove are formed. Intermediate member Base side ball rolling groove forms multiple base side load ball passages In addition, a plurality of base-side unloaded ball passages are formed in the intermediate member by communicating with the base-side loaded ball passages, and the base-side unloaded ball passage and the base-side unloaded ball passage are formed. Forming a plurality of base-side infinite circulation paths of balls, further forming a plurality of rows of parallel moving table ball rolling grooves in which the balls roll along the moving direction of the moving table,
A plurality of rows of parallel intermediate member moving base side ball rolling grooves sandwiching the ball with the moving base ball rolling groove are formed in the intermediate member, and the moving base ball rolling groove and the intermediate member moving base side ball are formed. A plurality of moving table side load ball passages are formed with the rolling grooves, and a plurality of moving table side unloaded ball passages are formed in the intermediate member so as to communicate with the moving table side load ball passages, A plane guide device in which a plurality of endless circulation paths for the moving base of the ball are formed by the side-loading ball passage and the moving-base-side unloaded ball passage. 8. The intermediate member comprises an intermediate member body, a base side lid and a movable table side lid provided at an end of the intermediate member body, and the intermediate member body is provided with the base. A straight ball passage of the side unloaded ball passage and a straight ball passage of the movable table side unloaded ball passage, and the base side lid has the base side loaded ball passage and the base side unloaded ball passage. A base side ball direction changing passage communicating with the straight ball passage of the passage is formed, and the base side unloaded ball passage is constituted by the straight ball passage of the base side unloaded ball passage and the ball direction changing passage. The movable table side lid is provided with a movable table side ball direction changing passage that connects the movable table side loaded ball passage and the linear ball path of the movable table side unloaded ball passage. With straight ball passage of unloaded ball passage 8. The flat guide apparatus according to claim 7, wherein the base-side unloaded ball passage is configured with the moving-base-side ball direction changing passage.