JPH09328390A - Metal wire rope for pulling up single crystal, terminal-attached metal wire rope for pulling up single crystal, and their production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a metal wire rope for pulling up a single crystal, capable of preventing the swinging of a hanging tool on the pulling of the signal crystal and further improving the yield of the single crystal ingot in stead of a conven tional round bar for hanging a single crystal-pulling device, and to provide a terminal-attached metal wire rope for pulling up a single crystal. SOLUTION: This metal wire rope for pulling up a single crystal is formed by twisting plural heat-resistance element wires 10 produced from either of W, Mo and their alloy, respectively, is provided with three or more primary twisted wires, and has an elongation of <=5% at 900 deg.C. The terminal-attached metal wire rope for pulling up a single crystal is formed by fitting a heat- resistant terminal having a pair of pressing parts for nipping one end of the metal wire rope comprising a heat-resistant material and used for pulling up the single crystal to the end of the metal wire rope. The pressing parts have V- or U-shaped grooves on their outsides and projections corresponding to the grooves on their insides. The projections are formed, when the grooves are press-formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single-crystal pulling metal wire rope used in a single-crystal pulling device, and more particularly, to a single-crystal pulling device used in a single-crystal pulling device for metals such as Si and Sb. The present invention relates to a metal wire rope and a metal wire rope with a terminal for pulling a single crystal.

[0002]

2. Description of the Related Art FIG. 28 is a schematic configuration diagram of a pulling apparatus for a single crystal of a metal such as Si and Sb generally used for semiconductors and the like. Referring to FIG. 28, the single crystal pulling apparatus includes a quartz crucible 51 and a heater 52 such as carbon arranged around the quartz crucible 51.

The mounting jig 53 is provided for mounting a solid metal, called a seed crystal 54, for growing a single crystal from a molten metal for a single crystal. The mounting jig 53 is attached to one end of a support rod 55 with a screw. And so on. The quartz crucible 51, the heater 52, the mounting jig 53, and the support rod 55 are
It is arranged in the manufacturing container 60, and only the other end of the support rod 55 is exposed to the outside of the manufacturing container 60.

Next, a method for producing a single crystal using a conventional metal single crystal pulling apparatus will be described. First, a metal such as Si or Sb is put in the quartz crucible 51, the outside of the quartz crucible 51 is heated by a heater 52 such as carbon to melt the metal, and the seed crystal 54 is attached to the attachment jig 53 and melted. Immerse in the metal, pull the crystal while slowly rotating it through the support rod 55, and cool it.
Make a 6 ingot.

Conventionally, a heat-resistant and high-strength alloy round bar of special steel or the like has been used as the support bar 55. That is, as shown by arrows 57 and 58 in FIG. 28, the support rod 55 is slowly rotated and raised upward to manufacture a round (or spindle-shaped) single crystal.

[0006]

However, one of the drawbacks of the above-mentioned method for producing a single crystal is that the outer diameter of the single crystal ingot that can be rotated unless the strut bar is perpendicular to the surface of the molten metal. Distortion It was difficult to make a large diameter single crystal ingot.

More specifically, the state shown in FIG. 29 (a) is sufficient, but in the state shown in FIG. 29 (b), only a single crystal having a small diameter can be formed. In other words, a single crystal with a large diameter cannot be formed, and the yield becomes very poor.

Therefore, the conventional strut bar requires a great deal of labor to check the verticality with respect to the horizontal plane when it is set.

Further, for example, the melting temperature for producing a single crystal of Si needs to be at least a melting point of 1420 ° C. or higher, and its radiant heat and conductive heat are at least 900 ° C.
As described above, it was necessary that the support rod was not softened.

Therefore, although the attachment jig and the round bar were connected by a screw or the like, if a metal wire rope made of a heat-resistant metal such as W or Mo is used instead of the round bar, the above-mentioned drawbacks will occur. It is thought that this can be solved.

However, when W and Mo are welded, recrystallization occurs, the tensile strength rapidly decreases, and the weight of the single crystal ingot cannot be withstood.

Therefore, the present inventors have devised a round (ball) type terminal as shown in FIG.

FIG. 30 is a sectional view showing the jig. The jig is composed of a jig body 64 and screw parts 63a and 64a respectively.
And a ball terminal support portion 63 mounted via the. The ball terminal supporting portion 63 has a shape in which a cylinder is vertically divided into two, and has a housing hole 65 into which the ball terminal is inserted. Ball terminal 61 is W rope 55
It is housed in the housing hole by inserting one end of ´ into the inside and pressing it.

FIG. 31 is a view showing a ball shank used in the ball terminal 61 of FIG. 30. One end of the ball shank is made of SUS-304 and is formed into a spherical shape having a radius of 11 mm. 61a is provided.

However, with the increase in size of Si single crystals, ingots have recently come to weigh about 50 to 200 kg. Considering safety, the holding force between the terminal and the W and Mo ropes needs to be 350 kg or more.

That is, one technical problem of the present invention is to prevent the swinging of a hanging jig when pulling a single crystal instead of the hanging column bar of the single crystal pulling apparatus and to improve the yield of the single crystal ingot. It is intended to provide a metal wire rope for a single crystal pulling device that can be improved.

Further, another technical object of the present invention is to provide a metal wire rope with a terminal for pulling a single crystal capable of increasing the connection strength of the connection terminal portion.

[0018]

According to the present invention, there is provided a single crystal pulling metal wire rope having a terminal made of heat resistant steel at one end of a single crystal pulling metal wire rope made of a heat resistant material, The terminal includes a pair of pressure contact portions sandwiching the one end, at least three V or U-shaped grooves are provided outside the pressure contact portion, and the V or U-shaped groove is provided inside the pressure contact portion. A metal wire rope with a terminal for pulling a single crystal is obtained, which is provided with a corresponding convex portion, and the convex portion is formed at the time of forming the V or U-shaped groove under pressure.

Further, according to the present invention, in the metal wire rope with a terminal for pulling a single crystal, the convex portion has a groove similar to the V or U-shaped groove formed as an indentation at the one end. A characteristic metal wire rope with a terminal for pulling a single crystal can be obtained.

According to the present invention, in any one of the metal wire ropes with a terminal for pulling a single crystal, the metal wire rope is any one of W, Mo, alloy wires thereof, and heat resistant steel wire. A metal wire rope with a terminal for pulling a single crystal characterized by comprising

Further, according to the present invention, a pressure contact portion of a terminal made of heat resistant steel is attached to one end of a metal wire rope for pulling a single crystal made of a heat resistant material, and the pressure contact portion is provided with a convex portion on the opposite surface from the outside. By pressing with a die, at least three V or U-shaped grooves composed of indentations are formed on the outside of the pressure contact portion, and the inside of the pressure contact portion corresponds to the V or U-shaped groove. A method for manufacturing a metal wire rope with a terminal for pulling a single crystal, characterized in that a convex portion is formed and the one end is pressed against the convex portion.

Further, according to the present invention, in the method for manufacturing a metal wire rope with a terminal for pulling a single crystal, the convex portion has a groove similar to the V or U-shaped groove formed as an indentation at the one end. A method for producing a metal wire rope with a terminal for pulling a single crystal, which is characterized in that

Further, according to the present invention, in any one of the above methods for producing a metal wire rope with a terminal for pulling a single crystal,
The method for producing a metal wire rope with a terminal for pulling a single crystal is characterized in that the metal wire rope is made of any one of W, Mo, alloy wires thereof, and heat resistant steel wire.

Further, according to the present invention, there is provided a metal wire rope formed by twisting a plurality of heat-resistant element wires, each of the heat-resistant element wires being one of W, Mo and alloys thereof. The metal wire rope for pulling a single crystal is characterized in that the metal wire rope has an elongation of at most 5% at a temperature of 900 ° C.

Further, according to the present invention, in the above-mentioned metal wire rope for pulling a single crystal, the metal wire rope includes a primary stranded wire having at least three heat-resistant element wires and at least three primary stranded wires. A metal wire rope for pulling a single crystal is obtained, which is equipped with each of the secondary twisted wires.

Further, according to the present invention, in the metal wire rope for pulling a single crystal, the metal wire for pulling a single crystal further characterized by further comprising a third twisted wire provided with at least three of the second twisted wires. A line rope is obtained.

Further, according to the present invention, in the metal wire rope for pulling a single crystal, the metal wire rope is a primary wire,
A metal wire rope for pulling a single crystal, characterized in that it comprises secondary, ..., N-th twisted wires (where n is a natural number) and is twisted in the same Z or S twisting direction. Is obtained.

Further, according to the present invention, in any one of the above-mentioned metal wire ropes for pulling a single crystal, a metal wire rope for pulling a single crystal characterized by having a twisted core wire in a central portion can be obtained.

Further, according to the present invention, in any one of the metal wire ropes with a terminal for pulling a single crystal, the metal wire rope for pulling a single crystal is a metal formed by twisting a plurality of heat-resistant wires. The wire rope, wherein each of the heat-resistant wires is made of any one of W, Mo and alloys thereof, and the metal wire rope has an elongation of at most 5% at a temperature of 900 ° C. A characteristic metal wire rope with a terminal for pulling a single crystal can be obtained.

According to the invention, in the metal wire rope with terminals for pulling a single crystal, the metal wire rope is
A metal wire rope with a terminal for pulling a single crystal, comprising: a primary stranded wire having at least three heat-resistant strands and a secondary stranded wire having at least three primary stranded wires, respectively. can get.

According to the invention, in the metal wire rope with a terminal for pulling a single crystal, the metal wire rope is
Further, there is obtained a metal wire rope with a terminal for pulling a single crystal, which has a tertiary stranded wire having at least three secondary stranded wires.

According to the invention, in the metal wire rope with terminals for pulling a single crystal, the metal wire rope is
A terminal for pulling a single crystal, which is provided with primary, secondary, ..., N-th twisted wires (where n is a natural number), and is twisted in the same Z or S twisting direction. An attached metal wire rope can be obtained.

Further, according to the present invention, in any one of the metal wire ropes with a terminal for pulling a single crystal, the metal wire rope for pulling a single crystal has a twisted core wire in a central portion. A metal wire rope with a terminal for pulling up can be obtained.

[0034]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view showing a schematic structure of a single crystal pulling apparatus using a metal wire rope for a single crystal pulling apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the single crystal pulling apparatus is
A quartz crucible 51 and a heater 52 such as carbon provided around the quartz crucible 51 are provided. A metal for growing a single crystal is dissolved in the quartz crucible 51. The seed crystal 54 is suspended by a mounting jig 53, and the mounting jig 53 is suspended by a rope (hereinafter, referred to as W rope) 1 made of a tungsten wire rod as a metal wire rope. The W rope 1 is rotated upward as shown by arrow 6 and as shown by arrow 7 by the operation of the drive mechanism 3 by the motor 2 provided above the device as shown by arrows 4 and 5.

Here, the difference between the single crystal pulling apparatus according to the embodiment of the present invention and the single crystal pulling apparatus according to the prior art is that the columnar rod used in the prior art is
The point is that a high temperature resistant metal wire rope consisting of W rope 1 is used. A problem with the conventional support rod using a round bar is the verticality with respect to the single crystal metal block.

However, in the embodiment of the present invention,
Uses a metal wire rope. Since this metal wire rope is flexible, carpenters generally use the same principle to check the verticality of the pillars of a building by attaching a weight to the tacho thread and hanging it down. ， The growing metal single crystal plays the same role as the weight of the octopus thread, and can always keep vertical to the horizontal plane.

Here, how to make the metal wire rope is shown in FIG.
There are a first twisting method (from Z) shown in (a) and FIG. 3 (a) and a second twisting method (from S) shown in FIGS. 2 (b) and 3 (b). The first twisting method and the second twisting method are
It is roughly classified into two types, a normal twist shown in FIG. 2 and a rung twist shown in FIG.

As shown in FIG. 2, the normal twist means that the twisting direction of the strand and the twisting direction of the rope are opposite to each other, and the strands are substantially parallel to the axis of the rope on the outside of the rope. This twisting method has the advantage that the contact surface between the wire and the outside is short and there are many effects due to wear, but it is easy to handle because it does not cause kinks.

The rung twist shown in FIG. 3 means that the strand and the rope have the same twist direction, the contact surface between the wire and the outside is long, the damage due to partial wear is small, and the flexibility is excellent. The advantage is that it has a longer life. However, in the embodiment of the present invention, either normal twist or rank twist may be used. The twisting direction is also shown in Fig. 2.
As shown in FIGS. 3 (a) and 3 (a), the Z twist direction, FIG.
Although there are S twisting directions as shown in (a) and FIG. 3 (b), the ropes used in the device according to the embodiment of the present invention show that the first twisted wire and the second twisted wire are the same. The fact that the direction is different depending on the direction was effective against the phenomenon of disparity. In other words, if the primary twist is in the Z direction, it is important that the secondary twist direction is also in the Z direction. This is because, as shown in FIG. 18, since the single crystal suspension rod is pulled up while rotating in a certain direction, if the twisting direction is different, the twist of the rope will be distorted. ，
If the primary stranded wire is in the Z direction and the secondary stranded wire is in the S direction, it is natural that one strand will be distorted if the single crystal is suspended and turned in one direction. Stranded wires (if there are up to nth order, all from the first to nth order)
It is important to be in one direction.

On the other hand, even if the primary and secondary stranded wires are twisted in the same direction, depending on whether the hanging rope is rotated clockwise or counterclockwise as viewed from above, the rope twisting direction is the Z or S direction. And the direction where the rope does not come apart, that is,
In the embodiment of the present invention, the rope is closed so that the rope is closed.

Further, there are various types of cross-section models of the twisting method of the primary twisted wire, as shown in FIGS. 4 to 16, and the twisted methods without twist of the twisted wire are secondary to the outside with the stranded wire as the core wire (center). The yield of the single crystal ingot was good because the twisted wire (rope) with the stranded wire as the cross section did not fluctuate. That is, rope without core, symbols Q, R, S, T, U, V, W, X, Y,
AA, AC, AE, AF, AH, AJ, AL, AN, A
The yields of O and AP were poor. On the other hand, as a material with heat resistance as the material of this rope, 900 ° C
If W or Mo and its alloys are used as materials with high temperature creep at the above temperatures, ropes using thin original wires can be manufactured, and ropes with excellent load resistance and flexibility are also manufactured. You can do it. The method of using the W or Mo wire will be described in detail later, and the metal wire rope for pulling a single crystal according to the embodiment of the present invention will be described in more detail.

As described above, by using a rope-shaped stranded wire for the pulling column of the single crystal pulling apparatus, the upper surface of the single crystal material pulled up while rotating the rope becomes perpendicular to the metal wire rope. ， It has become possible to manufacture single crystal bodies with the maximum diameter without distortion.

However, depending on the cross-sectional shape of the metal wire rope, the maximum diameter of the single crystal ingot is distorted (because the rope does not rotate vertically), the ingot becomes decodeco, and the ingot of a predetermined size can be manufactured. It became impossible. The cross section of the metal wire rope is (a) a rope twisted with at least a primary stranded wire and a secondary stranded wire, (a)
Moreover, it has been found that unless the core of the metal wire rope has a core wire, the metal wire rope is largely shaken or shaken, and as described above, an ingot of a predetermined size cannot be formed. (C) Moreover, as mentioned above, the fact that the twisting directions of the primary twisted wire and the secondary twisted wire are the same direction (S direction, Z direction or the same direction) is to prevent the wire rope from swaying or swinging. I understood.

Next, a single crystal was manufactured using the metal wire rope according to the embodiment of the present invention. First, W wires having different strands were prepared for the single crystal pulling apparatus shown in FIG. 1, and various ropes shown in FIGS. 4 to 16 were prepared. Especially, the metal wire rope with and without the core wire was always prepared for comparison. In the embodiment of the present invention, Si is used as the single crystal metal to be produced, and the ingot pulling conditions are as follows: melting temperature of silicon (Si) temperature of 1450 ° C., furnace pressure of 1
3 Torr, heating carbon heater temperature 1600-18
The Si single crystal ingot was pulled at 00 ° C., a pulling speed of 0.01 mm / min, and a rope rotation number of 0.5 rpm. The outer diameter of the ingot was 10 inches (254 m / m) × l, and the weight of the ingot was 60 kg. The strands used for each metal wire rope were selected so that the total sum of the rope cross-sectional areas would be constant in order to keep the tensile strength of the total rope constant. The area was taken as the area of the wire from the outer diameter of the wire of 0.2 mm × 7 × 7 × 7 (= π × (0.1) ² × 7 × 7 × 7 = 1
0.7702 mm ² ).

For example, the strand in the case of "O" (1 × 3) in FIGS. 4 to 16 is as shown in the following formula 1 and has an outer diameter D2.
A rope was made from three strands using 139 mm strands. Similarly, for the rope in Fig. 7, the metal wire rope was made so that the total cross-sectional area was constant by changing the outer diameter of the wire.

[0048]

[Equation 1]

As a result of the experiment, the theoretical value of the single crystal yield of the Si single crystal ingot having an outer diameter of 10 inches is 100%.
Although it was described as a comparison in case of, 80% as a guide
If it is above, it passed. The results are shown in Table 1 below.

[0050]

[Table 1]

As can be seen from comparison with FIGS. 4 to 16, the rope without the core wire has cleared the target yield ratio of 80% or more, but it was found that the yield ratio with the core wire is better. .

On the other hand, different twisting directions were prepared for the primary and secondary twisted wires, and the difference in the way of shaking, that is, this effect is shown in Table 2 below as the yield of the ingot. In addition, Table 2 below also describes examples when the twisting direction is different. In 7 × 7 × 7 of the symbol C, the rope is formed by twisting directions of seven primary coils, seven secondary coils, and seven tertiary coils in different twist directions.

[0053]

[Table 2]

The direction of rotation of the metal wire rope during pulling was the Z direction. In FIG. 17 (7 × 7 × 7), the groups of wire rods denoted by reference numerals 11, 12, and 13 of the metal wire 10 are referred to as primary, secondary, and tertiary coils, respectively.

Similarly, the case where the rope rotation direction is S is shown in Table 3 below.

[0056]

[Table 3]

As shown in Tables 2 and 3 above, it was found that the twisting direction should be the same as the rotation direction for pulling the single crystal in the primary, secondary and tertiary directions. If the twisting directions are not the same, the metal wire rope will loosen and fall apart, resulting in
This is because the yield of the ingot deteriorates because the rope sways or shakes to increase the area where the diameter of 10 inches cannot be obtained. As for "twisting method", "normal twisting" and "rung twisting" were tested as shown in Table 2 above, but the yields were all the same and there was no difference, and either "twisting method" was acceptable. I understand.

A conventional lifting rod made of heat-resistant steel (diameter 3.704 m / m) and W are used so that the total cross-sectional area is the same.
A metal wire rope having a wire diameter (outer diameter) of 0.2 m / m and 7 × 7 × 7 all in the Z twist direction was prepared. The conditions for pulling the Si single crystal were in accordance with the conditions required in Table 1 above. The pulling rotation direction was the Z direction. The effective pulling length (the length of the pulling device from the upper surface of the furnace in Fig. 1 and Fig. 18 (b ') from the upper surface of the mounting jig) was about 3 m, and the test was performed with the rope and the round bar having exactly the same length. It started. The effect is that the Si single crystal pulling is repeated 50 times under the same conditions and the theoretical value is 10
The average single crystal yield value when 0 was shown in Table 4 below.

[0059]

[Table 4]

As shown in Table 4 above, the strut rod made of a round rod used in the past has a poor yield of a single crystal even at an average value, and the number of failures is higher than that of a rod made of a metal wire. But it turns out to be inferior.

The reason why the round bar having an outer diameter of 3,704 m / m was used was to make it have the same cross-sectional area as the W rope. By the way, the round bar with the same cross-sectional area as 7 × 7 × 7 of D0.2 wire is given by the following formula 2 and the outer diameter is 3.704 m / m.
The average number of yields was 84% and the number of defective yields of 80% or less was 18 times.

[0062]

[Equation 2]

Next, various W and Mo wires having a diameter of 0.2 were prepared and a metal wire rope of 7 × 7 × 7 was prepared.
A pulling test of a 60 kg ingot having a diameter of 0 inch was conducted. As the wires, wires having different elongations at 900 ° C. were prepared and the yield was examined. By the way, the twist direction is
In all of the primary, secondary, and tertiary directions, the pulling direction is Z and the pulling direction is Z. Other conditions are the same as those described above, Si is used, and the ingot pulling condition is the melting temperature of silicon (Si) temperature of 1450 ° C. and the furnace. Si at an internal pressure of 13 Torr, a heating carbon heater temperature of 1700 to 1800 ° C., a pulling speed of 0.01 mm / min, and a rope rotation speed of 0.5 rpm.
A single crystal ingot was pulled up. The outer diameter of the ingot was 10 inches (254 m / m) × l, and the weight of the ingot was 60 kg.

The results are shown in Tables 5 and 6 below.

[0065]

[Table 5]

[0066]

[Table 6]

As shown in Tables 5 and 6 above, the yield of Si single crystal differs depending on the elongation percentage of the wire, and if the elongation exceeds 5%, the sway of the rope becomes large and the single crystal is distorted. The yield has deteriorated.

FIG. 18 is a view showing the appearance of a metal wire rope with a terminal for pulling a single crystal according to an embodiment of the present invention. FIG. 19 is a view showing a state before mounting the ball terminal which constitutes the ball shank portion of FIG.

As shown in FIGS. 18 and 19, the support portion 23 of the ball terminal (terminal ball) 22 of the ball shank portion 21 is formed.
In addition, by caulking the dents 24, it is possible to obtain a strength equal to the tensile strength of the wire rope 1.

The ball shank portion 21 shown in FIG. 18 is manufactured as follows.

A W wire having a diameter of 0.20 was prepared and 7 × 7 ×
The rope of No. 7 was made (all twist directions were the Z direction), and the stainless terminals shown in FIGS. 19 and 31 were prepared.
As shown in, when A is caulking, A + B, A +
Caulking such as B + C was performed with a press machine. Then, in order to investigate the pressure contact strength, the rope terminals were grasped by the upper and lower jaws of the tensile tester and the tensile strength was investigated.
The test method is as follows.

First, a wire having a W outer diameter of 0.2 mm of the sample of the present invention was prepared. The tensile strength of W at room temperature is 3000 N / mm ² (30.915 kgf / m
m ² ) strands were prepared. Using that strand, we made a 7x7x7 rope. Although the tensile strength of the entire rope is for reference, it is as shown in the following Equation 3.

[0073]

(Equation 3)

This 3294.7 kg is the tensile strength of the rope.

Next, a ball shank portion as shown in FIG. 22, FIG. 21, and FIG. 22 was prepared for reference. The ball terminal 22 is made of heat-resistant stainless steel of SUS304, similar to that shown in FIGS. 19 and 31. The W rope has a (7 × 7 × 7) rope outer diameter of about 6 m / m, and is inserted into the through hole 21 a of the ball terminal 22 from the end.
Then, as shown in FIGS. 20 and 21, V-shaped crimping was performed using a press die. V type crimping depth is SU
Until the thick part of the S304 shank comes into close contact with the W rope,
I pushed it in. The tensile strength of the pressure contact force was required to be 300 kgf at room temperature in consideration of safety.

In FIG. 20, as a V-shaped squeezing method for caulking, A, B, C, D, and E had the same vertical positional relationship, that is, the same positional relationship in the length direction.

In FIG. 21, as a V-shaped squeezing method for crimping, A ', B', C ', D', and E'are formed upside down, that is, the same pitch as the pitch of one V-shaped groove. The other V-shaped groove is formed so as to be offset by half the length of this pitch.

Table 7 below shows tensile strength values obtained by various caulking positions and shapes and other joining methods.

[0079]

[Table 7]

In Table 7, the tensile strength is 10
It is the average value of repeated times. The tensile strength is measured by a tensile tester, the tensile speed is 1 mm / min, and the load at break is shown.

From the results of Table 7 above, it was found that it is preferable that the V-groove caulking portion is provided on at least three points or more on the surface in one direction. Further, substantially no difference was observed between the V-groove caulking portion formed oppositely at the same position in the longitudinal direction in FIGS. 20 and 21, and the V-groove caulking portion formed at a different position. .

Further, as shown in FIG. 22, the one having the fixing portion formed on the flat plane for reference has three V-groove caulking portions according to the embodiment of the present invention shown in FIGS. 20 and 21. The joint strength was weaker than the one.

23 (a) to 27 (a) are perspective views,
JIS as shown in (b) plan view and (c) side view, respectively
As described in C 2805, a V-shaped crimping process was performed using a general conductor wire crimp terminal in the same manner as in the embodiment of the present invention. As a result, the same effect as that of the embodiment of the present invention using the ball terminal shown in FIG. 19 was obtained.

[0084]

As described above, in the present invention, a heat-resistant metal wire, particularly W, Mo wire and its alloy wire is effective for the suspension column of the single crystal pulling apparatus, and a special heat-resistant steel wire is used. However, by using a rope that uses this wire, the pulling and hanging jig does not shake,
It is possible to provide a metal wire rope for a single crystal pulling device capable of significantly improving the yield of a single crystal ingot.

Further, according to the present invention, it is possible to provide a metal wire rope with a terminal for pulling a single crystal, which is capable of considerably firmly connecting terminals by performing caulking groove processing at three points. Specifically, the metal wire rope with a terminal for pulling a single crystal of the present invention can withstand a load of 350 kgf or more as long as the caulking V groove is at least 3 points.

Further, according to the present invention, a metal wire with a terminal for pulling a single crystal which is easy to industrialize can be manufactured immediately by preparing a press die having a convex portion with a sharp tip at the facing portion. A rope and a method for manufacturing the rope can be provided.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an outline of a configuration of a single crystal pulling apparatus using a metal wire rope according to an embodiment of the present invention.

2 (a) and 2 (b) are views respectively showing a normal twisting method and a twisting direction (S, Z) of a metal wire rope.

3 (a) and 3 (b) are diagrams respectively showing a rung twisting direction and a twisting direction (S, Z) of a metal wire rope.

FIG. 4 is a diagram schematically showing how to twist a metal wire rope.

FIG. 5 is a diagram schematically showing how to twist a metal wire rope.

FIG. 6 is a diagram schematically showing how to twist a metal wire rope.

FIG. 7 is a diagram schematically showing how to twist a metal wire rope.

FIG. 8 is a diagram schematically showing how to twist a metal wire rope.

FIG. 9 is a diagram schematically showing how to twist a metal wire rope.

FIG. 10 is a diagram schematically showing how to twist a metal wire rope.

FIG. 11 is a diagram schematically showing how to twist a metal wire rope.

FIG. 12 is a diagram schematically showing how to twist a metal wire rope.

FIG. 13 is a diagram schematically showing how to twist a metal wire rope.

FIG. 14 is a diagram schematically showing how to twist a metal wire rope.

FIG. 15 is a diagram schematically showing how to twist a metal wire rope.

FIG. 16 is a diagram schematically showing how to twist a metal wire rope.

FIG. 17 is a diagram showing an example of a cross section of a metal wire rope.

FIG. 18 is a diagram schematically showing a metal wire rope with a terminal for pulling a single crystal according to an embodiment of the present invention.

19 is a view showing a ball terminal of the metal wire rope with a terminal for pulling a single crystal of FIG.

FIG. 20 is a diagram mainly showing an example of a ball shank portion of a metal wire rope with a terminal for pulling a single crystal according to an embodiment of the present invention.

FIG. 21 is a diagram mainly showing another example of the ball shank portion of the metal wire rope with a terminal for pulling a single crystal according to an embodiment of the present invention.

FIG. 22 is a cross-sectional view showing a metal wire rope with a terminal for pulling a single crystal in which a support portion of a ball terminal is formed in a flat plane for comparison.

FIG. 23 is a diagram showing a first example of a lead wire crimp terminal applicable instead of the ball terminal according to the embodiment of the present invention.

FIG. 24 is a diagram showing a second example of a lead wire crimp terminal applicable instead of the ball terminal according to the embodiment of the present invention.

FIG. 25 is a diagram showing a third example of a lead wire crimp terminal applicable instead of the ball terminal according to the embodiment of the present invention.

FIG. 26 is a diagram showing a fourth example of a lead wire crimp terminal applicable instead of the ball terminal according to the embodiment of the present invention.

FIG. 27 is a diagram showing a fifth example of a lead wire crimp terminal applicable instead of the ball terminal according to the embodiment of the present invention.

FIG. 28 is a diagram showing a schematic configuration of a conventional single crystal pulling apparatus.

29 (a) and 29 (b) are views showing defects of the single crystal pulling apparatus of FIG.

FIG. 30 is a view showing a connecting portion between the jig of FIG. 28 and the metal wire rope.

FIG. 31 is a view showing a ball shank portion which is a connection portion of FIG. 30.

[Explanation of symbols]

 1 W rope 2 motor 3 drive mechanism 11 primary coil 12 secondary coil 13 tertiary coil 21 ball shank portion 21a through hole 22 ball terminal (terminal ball) 23 support portion 24 recess 51 quartz crucible 52 heater 53 mounting jig 54 seed crystal 55 Post bar 55 'W rope 56 Single crystal 60 Manufacturing container 61 Ball terminal 61a Through hole 62 Mo bolt 63 Ball terminal support 63a Ball terminal screw 64 Jig body 64a Jig body screw 65 65 Storage hole

Claims (16)

[Claims] 1. A metal wire rope with a terminal for pulling a single crystal, comprising a terminal made of heat-resistant steel at one end of a metal wire rope for pulling a single crystal made of a heat-resistant material, wherein the terminals are a pair of terminals sandwiching the one end. A press contact portion, at least three V or U-shaped grooves are provided outside the press contact portion, and a convex portion corresponding to the V or U groove is provided inside the press contact portion;
The metal wire rope with a terminal for pulling a single crystal, wherein the convex portion is formed when the V or U-shaped groove is formed under pressure. 2. The metal wire rope with a terminal for pulling a single crystal according to claim 1, wherein the convex portion has a groove similar to the V or U-shaped groove formed as an indentation at the one end. Metal wire rope with terminal for pulling single crystal. 3. The metal wire rope with terminals for pulling a single crystal according to claim 1, wherein the metal wire rope is W,
A metal wire rope with a terminal for pulling a single crystal, which is made of any one of Mo, alloy wires thereof, and heat resistant steel wire. 4. A pressure contact portion of a terminal made of heat resistant steel is attached to one end of a metal wire rope for pulling a single crystal made of a heat resistant material,
By pressing the pressure contact portion from the outside with a die having a convex portion on the opposite surface, at least three V- or U-shaped grooves made of indentations are formed on the outer side of the pressure contact portion, and the pressure contact portion of the pressure contact portion is formed. A method for manufacturing a metal wire rope with a terminal for pulling a single crystal, characterized in that a convex portion corresponding to the V or U-shaped groove is formed inside, and the one end is pressed against the convex portion. 5. The method for manufacturing a metal wire rope with a terminal for pulling a single crystal according to claim 4, wherein the convex portion has a groove similar to the V or U-shaped groove formed as an indentation at the one end. A method for producing a metal wire rope with a terminal for pulling a single crystal, characterized by: 6. The method for manufacturing a metal wire rope with a terminal for pulling a single crystal according to claim 4 or 5, wherein the metal wire rope is any of W, Mo, alloy wires thereof, and heat resistant steel wire. A method for manufacturing a metal wire rope with a terminal for pulling a single crystal, which comprises: 7. A metal wire rope formed by twisting a plurality of heat resistant wires, wherein each of the heat resistant wires is W,
A metal wire rope for pulling a single crystal, characterized in that the metal wire rope is made of Mo or an alloy thereof and has an elongation of at most 5% at a temperature of 900 ° C. 8. The metal wire rope for pulling a single crystal according to claim 7, wherein the metal wire rope includes a primary stranded wire including at least three of the heat-resistant element wires and at least three primary stranded wires. A metal wire rope for pulling a single crystal, characterized in that each of them has a secondary twisted wire. 9. The metal wire rope for pulling a single crystal according to claim 8, further comprising a tertiary stranded wire provided with at least three of the secondary stranded wires. . 10. The metal wire rope for pulling a single crystal according to claim 9, wherein the metal wire rope is a primary wire, a secondary wire,
... A metal wire rope for pulling a single crystal, wherein each of the n-th twisted wires (where n is a natural number) is twisted in the same Z or S twist direction. 11. The metal wire rope for pulling a single crystal according to claim 7, wherein the metal wire rope for pulling a single crystal has a twisted core wire in a central portion thereof. 12. The metal wire rope with a terminal for pulling a single crystal according to claim 1, wherein the metal wire rope for pulling a single crystal is obtained by twisting a plurality of heat-resistant strands. The formed metal wire rope, wherein each of the heat resistant wires is made of any one of W, Mo and alloys thereof, and the metal wire rope has an elongation of at most 5% at a temperature of 900 ° C. A metal wire rope with a terminal for pulling a single crystal, which is characterized by being present. 13. The metal wire rope with a terminal for pulling a single crystal according to claim 12, wherein the metal wire rope includes a primary twisted wire having at least three of the heat-resistant element wires and at least three of the primary twisted wires. A metal wire rope with a terminal for pulling a single crystal, characterized in that each of the ropes is provided with a secondary stranded wire. 14. The metal wire rope with a terminal for pulling a single crystal according to claim 13, wherein the metal wire rope further comprises:
A metal wire rope with a terminal for pulling a single crystal, comprising a tertiary stranded wire having at least three secondary stranded wires. 15. The metal wire rope with a terminal for pulling a single crystal according to claim 12, wherein the metal wire rope is a primary wire,
A metal with a terminal for pulling a single crystal characterized in that each of the secondary, ..., N-th twisted wires (where n is a natural number) is twisted in the same Z or S twist direction. Line rope. 16. The metal wire rope with a terminal for pulling a single crystal according to any one of claims 12 to 15, wherein the metal wire rope for pulling a single crystal has a twisted core wire in a central portion thereof. Metal wire rope with terminal for pulling single crystal.