JPH09320121A - Two disks transfer method in disk sticking, disk sticking device and transfer mechanism in its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve efficiency in an entire disk sticking device by providing a mechanical shuck means, movably arranged together with a sucking means, moving in the radiative direction and chucking inner radial ends of a disk. SOLUTION: By a control means, an upper side sick DS2 is stuck to the sucking means 10, and the upper side disk DS2 is moved to a position parting from a lower side disk DS1 by a prescribed interval by a vertical movement means 30. Then, by the mechanical chuck means 20, pawl parts N1, N2 are expanded, and the interval between the lower side disk DS1 and the upper side disk DS2 is controlled by chucking the inner radial ends IE1 by the pawl parts N1, N2. Thus, the time for adhesive to spread sufficiently to a required range is shortened.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk bonding method and apparatus for manufacturing one disk by bonding a first disk and a second disk with an adhesive.

[0002]

2. Description of the Related Art When a lower disk and an upper disk are attached to each other to make one disk, conventionally, the lower disk is first placed on a rotating device (spin coater) and the rotating device is rotated at a low speed. However, after supplying the adhesive to the lower disk, the rotating device is stopped again, the upper disk is placed on the lower disk, and the rotating device is rotated at a high speed for a predetermined time in this state. Spread the adhesive enough. After that, the rotation is stopped again, and the upper and lower disks that are in close contact with each other via the adhesive are sent to the ultraviolet irradiation device and irradiated with ultraviolet rays to cure the adhesive, thus completing the bonded disk.

As described above, by rotating the rotating device at a high speed, it is possible to form an adhesive layer having a uniform thickness and obtain a bonded disk having good flatness.

[0004]

In the above-mentioned conventional example, after the rotating device is stopped, the period from when the lower disc is placed on the rotating device to when the upper disc is placed thereon. However, the high-speed rotation processing, which is the original function of the rotating device, cannot be performed. Therefore, in the above-mentioned conventional example, the time during which the rotating device cannot rotate at high speed becomes long,
There is a problem that the ratio of the rotating device functioning in the operating time of the entire device decreases, and the efficiency of the entire disk bonding device decreases.

Further, when the viscosity of the adhesive supplied on the lower disk is low, when the lower disk and the upper disk are brought into close contact with each other, the adhesive also spreads in the direction of the central hole, and the adhesive penetrates from the central hole of the disk. There is a problem that may flow out. On the other hand, when the viscosity of the adhesive supplied on the lower disk is high, the lower disk supplied with the adhesive is placed on the rotating device, and then the upper disk is placed on the lower disk. From that, when you rotate the rotating device,
Since the adhesive has a high viscosity, there is a problem that it takes a long time for the adhesive to sufficiently spread to the required coating area in the center of the disk.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a disc bonding method and device in which the efficiency of the rotation device is improved by shortening the time during which the rotation device does not rotate at high speed, and the efficiency of the entire disk bonding device is improved. It is what

Further, according to the present invention, even when the viscosity of the adhesive supplied on the lower disk is low, the adhesive does not flow out from the central hole of the disk, and the adhesive supplied on the lower disk is not affected. A disk that can shorten the time until the adhesive spreads sufficiently within the required range when the rotating device is rotated with the upper disk placed on the lower disk even if the viscosity of the agent is high. An object is to provide a bonding method and device.

[0008]

According to the present invention, a first disc and a second disc are bonded together by an adhesive to
When manufacturing one disk, a suction means for sucking the second disk, and a plurality of claw portions movably arranged together with the suction means and moving in the radial direction to chuck the inner diameter end of the first disk. And a mechanical chucking means including.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 6 is a plan view showing a disk bonding apparatus 100 to which a transfer mechanism R1 according to an embodiment of the present invention is applied.

The disc bonding apparatus 100 is basically a device in which the discs flow from the first stacker ST1 and the second stacker ST2 toward the rotary table T3. That is, the lower disk DS1 placed on the first stacker ST1 is sent to the ejection table T1 and the liquid adhesive FL is applied thereto, while the second stacker ST2 is applied.
After the upper disc DS2 placed on the discharge table T2 is sent to the switching table T2, the lower disc DS1 is placed on the lower disc DS1 placed on the discharge table T1.
The adhesive FL is spread across the discs DS1 and DS2 to be an adhesive disc DS3 by being held on the rotary device (spin coater) in the coater house CH1 or CH2. That is, the adhesive disc DS
In the case of No. 3, the lower disk DS1 and the upper disk DS2 sandwich the liquid adhesive FL, and a single disk is configured by these as a whole. The adhesive disc DS3 is carried to the end face processing house EH, and after the end face processing of the adhesive disc DS3 is completed, it is transferred to the turntable T3.

Eight quartz pedestals (a pedestal made of quartz, which is omitted in FIG. 4) are fixed to the rotating portion of the turntable T3 at equal intervals, and one of these eight quartz pedestals is fixed. The adhesive disk DS3 is placed, and the quartz plate QU is placed on the adhesive disk DS3, that is, the adhesive disk DS3 is sandwiched between the quartz table and the quartz plate QU, and the ultraviolet irradiation device is provided. Passed UV1 and adhered disk D
The quartz plate QU placed on S3 is removed, and the adhesive disk DS3 is stacked on the ejection stacker ST3.

Next, the disk laminating apparatus 100 will be described more specifically.

First, a large number of lower disks DS1 are stacked on the first stacker ST1, and the disk DS1 of the first stacker ST1 located at the position P1 is the first one.
Disc lifter DL1 of the highest disc D
S1 is raised so as to be located at the set level, and in this state, the uppermost disc DS1 existing at the position P1 is moved to the position P by the disc supply arm DSA1.
2 is placed. Disc DS1 placed at position P2
The position of the upper surface and the lower surface is reversed by the desk reversing unit DI, and is placed at the position P3 of the discharge table T1. It should be noted that the recording surface of the disc DS1 is housed in the stacker ST1 with the recording surface facing downward in order to reduce the adhesion of dust, and is reversed so that the recording surface of the disk DS1 faces upward during bonding. Depending on the configuration of the disc manufacturing process, it may be convenient to store the disc with the recording surface facing upward. In this case, the disc reversing unit DI is installed between positions P11 and P12 described later.

The disc DS1 placed on the position P3 of the discharge table T1 is rotated 120 degrees counterclockwise by the discharge table T1 and reaches the position P4. This position P4
At, the liquid adhesive FL is annularly ejected from the adhesive ejection nozzle N near the center of the disc DS1.

That is, in the nozzle N, the member that supports the nozzle N slides independently in the X-axis direction and the Y-axis direction, and the discharge tip of the nozzle N makes a circular motion by this independent slide. In the process of this circular movement, the liquid adhesive FL is ejected from the nozzle N and applied in an annular shape on the disc DS1. In this case, the nozzle N starts the circular motion before the lower disk DS1 reaches the position P4. Thus, by starting the circular motion of the nozzle N before the disc DS1 reaches the position P4, it is possible to eliminate the waiting time until the nozzle N circularly moves at a constant speed.

After the liquid adhesive FL is applied in an annular shape on the disk DS1, the disk DS1 rotates 120 degrees counterclockwise and stands by at the position P5.

On the other hand, a large number of upper disks DS2 are stacked on the second stacker ST2, of which the position P11
Disc DS2 present in the second disc lifter DL
As in the case of the first stacker ST1, it is lifted to the uppermost position of the stacker ST2 by the second stacker ST1, and in this state, it is placed at the position P12 of the switching table T2 by the second disk supply arm DSA2. Position P1
The disc DS2 mounted on the second disc has a switching table T
When 2 rotates 180 degrees and reaches the position P13, the position P
The disc DS2 on 13 is held by the transfer mechanism R1 and moves above the position P5. At this time, position P5
The disc DS1 placed on the disc is held by the transfer mechanism R1 below the disc DS2 with a predetermined gap. The predetermined interval mentioned here is an interval at which the adhesive FL on the disk DS1 contacts the disk DS2, or an interval at which the adhesive FL on the disk DS1 does not contact the disk DS2. Whether or not the interval is selected is selected according to the conditions described later.

FIG. 1 is a front view showing a transfer mechanism R1 which is an embodiment of the present invention, and is a view showing an upper disk DS2 and a lower disk DS1. FIG. 2 is an enlarged view of a main part of the transfer mechanism R1.

The transfer mechanism R1 has a suction means 10 for sucking the upper disc DS2 and an inner diameter end I of the lower disc DS1.
A claw portion N1 that expands in the radial direction to chuck E1,
Mechanical chuck means 20 including N2 and suction means 10
And a vertical movement means 30 for integrally moving the mechanical chuck means 20 and a control means (not shown) for controlling the suction means 10, the mechanical chuck means 20, and the vertical movement means 30.

The suction means 10 is provided on the casing 11, the suction pipe 12, and a lower portion of the casing 11, and is connected to the suction pipe 12 to suck the upper disk DS2 by a suction pad 13.
14 and. Actually, in addition to the suction pads 13 and 14, a third or fourth suction pad is provided.

The mechanical chuck means 20 has a casing 21 fixed to the casing 11 and a claw portion N hanging from the casing 21.
1 and N2. The claw portions N1 and N2 are suction means 10
The inner diameter end IE1 of the lower disk DS1 is chucked by moving radially outward. 1 and 2, two claws N1 and N2 are shown as claws for convenience of description, but actually, as shown in FIG. 5, three claws N11 are shown as claws. , N12, N13 are provided, and the claw portions N11, N are provided.
The reference numerals 12 and N13 are movable together with the suction means 10 and are arranged at intervals of about 120 degrees, and chuck the inner diameter end IE1 of the lower disk DS1 by spreading in the radial direction. Further, four or more claw portions may be provided.

The control means causes the suction means 10 to suck the upper disk DS2, the vertical movement means 30 to move the upper disk DS2 to a position separated from the lower disk DS1 by a predetermined distance, and the mechanical chuck means 20 to move the claws. By expanding the portions N1 and N2 and chucking the inner diameter end IE1 of the lower disk DS1 by the claw portions N1 and N2,
The distance between the lower disc DS1 and the upper disc DS2 is controlled.

The control means positions the claw portions N1 and N2 in the central hole H2 of the upper disc DS2 before the suction means 10 attracts the upper disc DS2, and the mechanical chuck means 20 causes the claw portions N1 and N2 to move. By expanding N2, the upper disk DS2 is centered,
After that, the suction mechanism 10 controls the suction of the upper disk DS2. Next, the operation of the transfer mechanism R1 will be described.

FIG. 3 is a diagram showing the operation of the transfer mechanism R1.

First, from the state of FIG. 3 (1), the suction means 1
0 contacts the upper disc DS2, and then the suction means 1
0 attracts the upper disc DS2 (FIG. 3 (2)), and the mechanical chuck means 20 spreads the claw portions N1 and N2 to align the centers of the upper disc DS2 (FIG. 3).
(3)) By driving the vertical movement means 30, the upper disk DS2 is placed on the lower disk DS1 at a predetermined interval (FIG. 3 (4)). Then, the mechanical chuck means 20 expands the claw portions N1 and N2 to center the lower disk DS1 and to move the lower disk DS1.
The inner diameter end IE1 of 1 is chucked by the claw portions N1 and N2 (FIG. 3 (5)). In this way, the distance between the lower disc DS1 and the upper disc DS2 is controlled.

In this way, with the gap between the lower disk DS1 and the upper disk DS2 set to a predetermined value, the lower disk is placed on the rotating device pedestal (spin coater pedestal) 40 in the coater house CH1 or CH2. The DS1 and the upper disc DS2 are moved (FIG. 3 (6)). Then, the central hole H1 of the lower disk DS1 and the central hole H2 of the upper disk DS2 are guided to the alignment projection 41 of the rotating device support 40. Further, a concave portion 42 is provided on the upper portion of the alignment projection 41, and the claw portion N1 is formed in the concave portion 42.
The tip of N2 is recessed so that the protrusion 41 can easily enter the central hole H1 of the lower disk DS1 and the central hole H2 of the upper disk DS2. Further, instead of providing the concave portion 42 on the upper portion of the alignment protrusion 41, the upper portion of the protrusion 41 may be flat (flat).

In the above description of the operation, the claw portions N1 and N2 are provided before the upper disc DS2 is attracted to the attraction means 10.
Is expanded to align the center of the upper disc DS2,
Upper disk D by expanding the claws N1 and N2
The center of S2 may be aligned and the operation may be omitted.
In this case, before the upper disc DS2 is sucked by the suction means 10, when the upper disc DS2 is placed at the position P12, centering of the upper disc DS2 is performed by a method different from the use of the claw portions N1 and N2. It may be executed.

In the transfer mechanism R1, projections are not provided on the claws N1 and N2, respectively, and when the lower disk DS1 and the upper disk DS2 face each other, the inner diameter end IE1 of the lower disk DS1 is The claw portion N1 is in contact with the inner diameter end IE2 of the upper disc DS2, and the claw portion N2 is in contact with the inner diameter end IE1 of the lower disc DS1 and the inner diameter end IE2 of the upper disc DS2. Thus, the lower disk DS1 and the upper disk DS2 can be chucked. Therefore, the claw portions N1 and N2
After chucking the disks DS1 and DS2 by the method, the suction operation by the suction means 10 can be stopped. In this case, the disc DS in the claw portions N1 and N2
If a member having a high coefficient of friction such as rubber is used in a portion that comes into contact with the inner diameter ends of 1 and DS2, slippage during movement of the disks DS1 and DS2 is reduced.

In the above embodiment, the lower disk DS1
While holding a slight gap such that the adhesive FL applied to the upper surface does not contact the upper disk DS2,
Carry S1 and DS2 to coater houses CH1 and CH2,
Both disks D in this coater house CH1 and CH2
If S1 and DS2 are brought into close contact with each other, the time is almost the same as when they are carried after the close contact.

Further, a first disk pedestal (not shown) is installed at a position P5 where the lower disk DS1 is picked up by the claw portions N1 and N2, and the first disk pedestal is vertically movable. Moreover, the vertical position and the vertical movement speed of the first disk support can be set arbitrarily.
If the height of the upper disc DS2 is adjusted to a constant value when the upper disc DS2 moves to the first disc pedestal, the vertical position of the first disc pedestal is desired. It is possible to control the distance between the lower disc DS1 and the upper disc DS2 by setting the height of the disc.

That is, the first disk pedestal is provided with a lifting drive device using a servo motor or the like (not shown), and the lower side for gripping the lower disk DS1 according to the level set value of this lifting drive device. The level of the disc DS1 is determined, and by doing so, the lower disc D
The distance between S1 and the upper disc DS2 is controlled. Further, the speed at which the lower disk DS1 is gripped is determined according to the speed setting value of the lifting drive device.

FIG. 4 is an enlarged view showing a main part of a transfer mechanism R12 which is another embodiment of the present invention.

The transfer mechanism R12 has claws N3 and N4 instead of the claws N1 and N2 of the transfer mechanism R1. The claw portion N3 is provided with a protrusion 51 at its lower end portion, and an upper portion thereof than the protrusion 51 constitutes a small diameter portion 53. Similarly, the claw portion N4 has a protrusion 5 at its lower end portion.
2 is provided, and the portion above the protrusion 52 constitutes the small diameter portion 54. That is, steps are provided at the ends of the claws N3 and N4. In this case, the protrusions 51 and 52 are
The claw portions N3 and N4 are projected in a direction in which they are expanded from each other.

As described above, when the protrusions 51 and 52 are provided at the ends of the claw portions N3 and N4, respectively, the claw portion N3 and
When N4 is expanded, the inner diameter end IE1 of the lower disc DS1 is chucked by the projections 51 and 52 of the claw portions N3 and N4. When the lower disc DS1 is chucked in this manner, the small diameter portion 53 is formed. , 54 does not contact the inner diameter end IE2 of the upper disc DS2. By doing so, there is an advantage that the lower disk DS1 can be stably held even if the hole diameters of the lower disk DS1 and the upper disk DS2 are relatively large. Also, the lower disk D
It is also possible to control the height position of the upper disc DS2 independently of the height position of S1. That is, while the lower disk DS1 and the upper disk DS2 are moved while facing each other, the distance between the lower disk DS1 and the upper disk DS2 can be freely controlled, and the processing speed can be further improved. it can. Specifically, if the drive mechanism for driving the mechanical chuck means 20 is built in the transfer mechanism R12, the two disks DS1 and DS2 are transferred while facing each other while the disks DS1 and DS2 are being transferred. The interval can be adjusted.

Further, in the transfer mechanism R12, even if two discs are held, the two upper and lower discs DS
Since the distance between 1 and DS2 can be freely set, even in the process of moving the up-and-down moving means 30 by the arm, the liquid contact operation for bringing the adhesive applied to the disk DS1 into contact with the disk DS2 can be executed. As a result, it is possible to shorten the processing time at the stage of superposing the upper and lower two disks DS1 and DS2.

Next, in each of the above embodiments, the disk D
The operation after S1 and DS2 are placed at the position P14 of the pedestal 40 of the rotating device of the coater house CH1 by the transfer mechanism R1 will be described.

Immediately before the disks DS1 and DS2 are placed on the position P14 of the pedestal 40 of the rotating device, the rotating device has completely stopped. Then, when the disks DS1 and DS2 are placed on the position P14 of the pedestal 40 of the rotating device with the disks DS1 and DS2 facing each other, the rotating device immediately starts rotating. Therefore, in the above embodiment, the time during which the rotating device stops rotating is extremely short, which improves the efficiency of the rotating device and improves the overall efficiency of the disc bonding device 100.

By the rotation of the rotating device, the disc DS1
And a means for collecting the excess liquid adhesive FL scattered from the DS2 are provided in the coater house CH1.
Disk D by rotation in coater house CH1
When the predetermined time required for the liquid adhesive FL to fully spread between S1 and DS2 has elapsed, the rotating device stops. At this time, the disks DS1 and DS2 are one adhesive disk DS3. After that, the transfer mechanism R2
But the end surface treatment house EH for the disk DS3 at position P14
Is transferred to position P15.

In this end surface processing house EH, the liquid adhesive FL adhering to the end surface of the adhesive disk DS3 is wiped or scraped off to remove the liquid adhesive FL from the end surface of the adhesive disk DS3. After that, the transfer arm A1 places the adhesive disk DS3 existing at the position P15 at the position P21 on the rotary table T3.

While the excess liquid adhesive FL is being removed from the disc DS3 by the coater house CH1, the transfer mechanism R1 is provided with a new upper disc placed at the position P13 of the switching table T2. DS2
On the new lower disk DS1 placed at the position P3 of the discharge table T1 so as to face each other,
The discs DS1 and DS2 arranged to face each other are placed at the position P16 of the pedestal of the rotating device of the coater house CH2 when the transfer mechanism R1 rotates counterclockwise (reverse rotation). . Immediately before the disks DS1 and DS2 are placed at the position P16 of the pedestal 40 of the rotating device, the rotating device completes the stop, and the disks DS1 and DS2 are placed at the position P16 of the pedestal of the rotating device. Once placed,
Immediately, the rotating device starts to rotate.

Although the coater house takes a relatively longer processing time than the other parts, by providing two coater houses as described above, the coater house is prevented from becoming a bottleneck of a smooth flow. . When the rotation of the coater house CH2 is stopped, the transfer mechanism R
2 sends the adhesive disk DS3 existing at the position P16 to the end surface processing house EH.

FIG. 5 is a view showing another embodiment of the present invention. FIG. 5 (1) shows a disk DS1 and claws N11, N1.
It is a figure which shows the relationship with 2 and N13. FIG. 5B is a diagram showing a positioning protrusion 60 which is a modified example of the positioning protrusion 41 on the rotary device support 40.

The projection 60 for alignment is the coater house C.
The disc DS is placed on the pedestal 40 of H1 or CH2.
1 and DS2 are respectively fitted in the central holes H1 and H2, and the standing pieces 61, 62 and 63 and the spaces 61S and 6 are fitted.
It has 2S, 63S and a shaft 64. Standing piece 6
Nos. 1, 62, 63 have a fan-shaped cross section, and their outer circumferences are slightly smaller than the central holes H1, H2. Further, a space 62S is formed between the upright pieces 61 and 62, a space 63S is formed between the upright pieces 62 and 63, and the upright piece 63 is formed.
A space 61S is formed between and 61. Space 61
S, 62S and 63S are claw portions N11 and N1 respectively.
2 and N13 are arranged to be inserted.

In other words, the spin coater has a pedestal 40 on which the first disk DS1 and the second disk DS2 are placed and which rotates, and the positioning projection 60 is provided at the center of the pedestal 40.
Is provided, and the alignment protrusion 60 has a central hole H of each of the first disk DS1 and the second disk DS2.
1, a plurality of upright pieces 61, 62, 63 fitted with H2,
And a space 61S, 62S, 63S sandwiched by two standing pieces of the plurality of standing pieces 61, 62, 63,
Each of the plurality of claw portions N11, N12, N13 has a space 6
Each of the first disc DS1 and the second disc DS2 is fitted into the alignment protrusion 60 by being immersed in each of the 1S, 62S, and 63S.

In the above-mentioned embodiment, the lower disk DS1 and the upper disk DS2 are transferred to the coater houses CH1 and CH2 in a state of being opposed to each other, but the interval can be selected as required. That is, the lower disc DS
1 and the upper disc DS2, the disc D is placed on top of the adhesive FL on the disc DS1.
It is also possible to keep S2 in contact with the disc DS
It is also possible that 2 does not contact the adhesive FL of the disc DS1.

When the adhesive FL has a high viscosity, after the adhesive FL on the lower disc DS1 is brought into contact with the upper disc DS2, the adhesive FL spreads to the inner peripheral side of the disc to be applied. Since it takes a long time, if the disk DS2 is brought into contact with the adhesive FL here, the time for the rotation process can be shortened. That is, disk D
At the moment when S1 and DS2 are superposed, the shape of the layer of the adhesive FL is disturbed, and when rotating at a high speed in this state, it becomes easy for air bubbles to be entrapped, so it is necessary to expand the layer of the adhesive FL to some extent. Therefore, since the adhesive FL must be supplied to the outside of the position to be applied, the adhesive is applied from the discs DS1 and DS2 to the position on the inner peripheral side of the disc to be applied. This is because high-speed rotation cannot be performed until the FL spreads.

On the other hand, when the adhesive FL has a low viscosity, the adhesive F supplied on the lower disk DS1 is used.
L may be opposed so as not to contact the upper disc DS2, and may be transferred to the rotating device while maintaining this opposing state. Within 1 second after the discs DS1 and DS2 are stacked on the rotating device. Since the high speed is possible in a certain degree, the waiting time before the high speed rotation as described above does not matter.

In the above embodiment, when a first disk and a second disk are bonded together by an adhesive to manufacture one disk, a suction step of sucking the second disk DS2, and a first disk Second disc moving step in which the second disc is moved to a position away from the disc DS1 by a predetermined distance, and the plurality of claw portions are moved in the radial direction, so that the plurality of claw portions are formed at the inner diameter end of the first disc DS1. By abutting, it can be understood as a method of transferring two discs in a disc bonding process, which has a gap control step for controlling the gap between the first disc DS1 and the second disc DS2.

In this case, after the liquid adhesive FL is applied to the first disk DS1, the second disk DS2 is brought into contact with the adhesive FL or the second disk DS2.
The first disk D without contacting the adhesive FL
You may make it move both disks by making S1 and 2nd disk DS2 face each other.

In the above embodiment, the ROM type DVD,
The present invention is applicable to both write-once DVDs and write-once DVDs.

In the above embodiment, the lower disk DS1
When gripping, the inner diameter end IE1 is brought into contact with a plurality of claws, but instead of this, the outer diameter end of the lower disk DS1 is gripped by a plurality of claws or the like. Alternatively, the inner diameter end I of the lower disk DS1 may be
You may make it respectively hold | grip E1 and an outer diameter end by a nail | claw part etc., respectively.

[0052]

According to the present invention, the time during which the rotating device does not rotate at a high speed is shortened, the efficiency of the rotating device is improved, and the efficiency of the entire disc laminating device is improved. Even if the viscosity of the adhesive supplied above is low, the adhesive does not flow out from the center hole of the disc, and even if the viscosity of the adhesive is high, the other disc is placed on top of the other disc. When the rotating device is rotated in this state, the time required for the adhesive to spread sufficiently can be shortened.

[Brief description of drawings]

FIG. 1 is a front view showing a transfer mechanism R1 which is an embodiment of the present invention, in which an upper disc DS2 and a lower disc DS1 are shown.
FIG.

FIG. 2 is an enlarged view of a main part of a transfer mechanism R1.

FIG. 3 is a diagram showing an operation of a transfer mechanism R1.

FIG. 4 is an enlarged view of a main part of a transfer mechanism R12 that is another embodiment of the present invention.

5 is a view showing another embodiment of the present invention, showing the relationship between the disc DS1 and the claws N11, N12, N13, and a modification of the alignment projection 41 of the rotary device support 40. FIG. Is.

FIG. 6 is a plan view showing a disk bonding apparatus 100 to which a transfer mechanism R1 according to an embodiment of the present invention is applied.

[Explanation of symbols]

R1, R12 ... Transfer mechanism, 100 ... Disc laminating device, DS1 ... Lower disc, DS2 ... Upper disc, DS3 ... Adhesive disc, CH1, CH2 ... Coater house, 10 ... Adsorption means, 13, 14 ... Adsorption Pads, 20 ... Mechanical chuck means, 30 ... Vertical movement means, N1, N2, N3, N4, N11, N12, N13 ... Claws, 51, 52 ... Protrusions, IE1, IE2 ... Inner diameter end, H1, H2 ... Central hole .

Continuation of front page (72) Inventor Hironobu Nishimura 1-1-18 Takada, Toshima-ku, Tokyo Origin Electric Co., Ltd.

Claims (13)

[Claims] 1. An apparatus for manufacturing a single disk by adhering a first disk and a second disk with an adhesive, and an adsorbing means for adsorbing the second disk; movable together with the adsorbing means. A mechanical chucking unit having a plurality of claw portions arranged in a radial direction and chucking an inner diameter end of the first disk; and a transfer mechanism in a disk bonding apparatus. 2. The disk bonding apparatus according to claim 1, wherein the suction means and the mechanical chuck means are arranged such that the disks held by them are concentric and vertically face each other. Transfer mechanism. 3. The vertical movement means for integrally moving the suction means and the mechanical chuck means according to claim 1 or 2, and controlling the suction means, the mechanical chuck means, and the vertical movement means. And a control means for
The control means causes the suction means to suck the second disk, and the vertical movement means moves the second disk to a position separated from the first disk by a predetermined distance, and causes the mechanical chuck means to move the second disk. A means for controlling the distance between the first disc and the second disc by expanding the plurality of claw portions and chucking the inner diameter end of the first disc by the plurality of claw portions. A transfer mechanism in a disk bonding apparatus, which is characterized in that 4. The mechanical chuck according to claim 3, wherein the control means positions the plurality of claw portions in a central hole of the second disk while causing the suction means to suck the second disk. A transfer mechanism in a disk bonding apparatus, which is a means for centering the second disk by expanding the plurality of claw portions to the inner diameter end of the second disk by means. 5. The disk attachment according to claim 1, wherein the claw portion has a protrusion that moves in a radial direction and chucks an inner diameter end of the first disk. Transfer mechanism in the alignment device. 6. The first disk pedestal according to claim 1 or 2, wherein the first disk pedestal is installed at a position where the claw portion picks up the first disk. Further, the vertical position and the vertical movement speed of the first disk pedestal can be arbitrarily set, and by setting the vertical position of the first disk pedestal to the first disk A transfer mechanism in a disk bonding apparatus, characterized in that an interval with the second disk is set. 7. The transfer mechanism according to claim 1 or 2, wherein the first disk is a lower disk and the second disk is an upper disk. 8. A positioning protrusion having a gap for receiving a tip end portion of a claw portion of the mechanical chuck means according to claim 1, on a pedestal of a rotating device for rotating the first disk and the second disk. A transfer mechanism in a disk bonding device, which is provided. 9. An apparatus for manufacturing a single disk by adhering a first disk and a second disk with an adhesive, and an adsorbing means for adsorbing the second disk; movable together with the adsorbing means. Mechanical chuck means arranged and radially moving and provided with a plurality of pawls for chucking an inner diameter end of the first disk; and supplying to at least one of the first disk and the second disk. A spin coater that spreads the liquid adhesive by centrifugal force; the second disk attracted by the attraction means, and the first disk chucked by the mechanical chuck means in a state of facing each other. , Above first
Disc bonding means for moving the disc and the second disc to the spin coater. 10. The spin coater according to claim 9, wherein the spin coater has a pedestal on which the first disc and the second disc are placed and which rotates, and the pedestal has a central portion for alignment. A plurality of standing pieces that fit into the respective central holes of the first disk and the second disk, and two standing pieces of the plurality of standing pieces. And a space sandwiched by each of the plurality of claw portions, and each of the plurality of claw portions is recessed in each of the spaces, so that each of the first disc and the second disc is fitted to the alignment protrusion. A disk laminating device characterized by the following. 11. A method for manufacturing a single disk by bonding a first disk and a second disk with an adhesive, the step of adsorbing the second disk; A second disc moving step in which the second disc is moved to a position separated by a predetermined distance; a plurality of claw portions are moved in a radial direction to bring the plurality of claw portions into contact with the inner diameter end of the first disc. A gap control step for fixing the first disc and controlling the gap between the first disc and the second disc; How to put. 12. The method according to claim 11, wherein after applying the liquid adhesive to the first disc, the second disc is brought into contact with the top of the adhesive.
Alternatively, the two disks in the disk bonding, wherein the first disk and the second disk are opposed to each other and both disks are moved in a state where the second disk is not in contact with the adhesive. Transfer method. 13. A method for manufacturing a single disk by bonding a first disk and a second disk with an adhesive, wherein the second disk is formed before or after the second disk is adsorbed.
Second disc centering step in which a plurality of claw portions located in the central hole of the disc are radially expanded and once brought into contact with the inner diameter end of the second disc; and a bonding surface of the second disc. A second disc holding step of adsorbing a surface opposite to the first disc; and a second disc holding surface facing the first disc at a position separated from the first disc bonding surface by a predetermined distance. A second disc moving step of moving the second disc; a plurality of claw portions of the mechanical chuck means are spread in a radial direction, and the plurality of claw portions are provided at an inner diameter end of the first disc. By abutting,
A first disc holding step of holding the first disc and the second disc at a predetermined interval; a moving step of moving the first disc and the second disc together to a spin coater A method of transferring two discs in laminating the discs.