JPH09317999A - Mixed gas supplying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate fluctuation of kinds of supplied gas and its flow rate adjusting range by connecting a receiving piping, a connection piping and a feeding-out piping to each flow rate adjusting unit or a gas supply main unit through detachable pipe joints. SOLUTION: A receiving piping 27 which supplies gas to each flow rate adjusting unit 1, a connection piping 28 which connects across the flow rate adjusting unit 1 and a gas supply main unit 2, and a feeding-out piping 29 which supplies gas from the gas supply main unit 2 to the external consumption equipment are connected to the flow rate adjusting unit 1 and the gas supply main unit 2 through detachable pipe joints 16, 17, 21, 29. Gas is supplied from the external gas source to each flow rate adjusting unit 1 through the receiving piping 27 and the pipe joint 16. After adjusting its flow rate, the gas is fed to the gas supply main unit 2 through the pipe joint 17, the connection piping 28 and the pipe joint 21. It is mixed in a manifold 22, and fed to plural external consumption arrangements through a stopping valve 23, a check valve 24, and the pipe joint 29.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mixed gas supply device which mixes and supplies a plurality of types of gas.

[0002]

2. Description of the Related Art In the case of mixing and supplying a plurality of kinds of gas, a conventional mixed gas supply apparatus is constructed by incorporating a flow rate regulator for each individual gas type into one supply apparatus main body. It is carried out.

In the conventional mixed gas supply apparatus, it is not easy to replace or expand the gas piping equipment such as the flow rate adjusting valve, and generally, the flow rate adjusting valve is different depending on the kind of the supplied gas, so the apparatus It was difficult to change the type of gas to be handled after the completion or to change the flow rate adjustment range.

In particular, when handling corrosive gases, it is necessary to replace the flow rate adjusting valve and other gas piping equipment at the time of maintenance. It was necessary to configure the system separately from the mixing and supplying device for the volatile gas.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a mixed gas supply device for mixing and supplying a plurality of kinds of gases. (EN) It is intended to provide a mixed gas supply device capable of easily changing the type or the flow rate adjustment range.

[0006]

A mixed gas supply apparatus of the present invention is provided for each type of gas and has a built-in flow rate adjusting valve,
A flow rate adjustment unit that adjusts the supply amount for each type of gas, a gas supply main unit that mixes each type of gas supplied through each of the flow rate adjustment units, and supplies the gas to an external consumer facility, Each of the flow rate adjusting units and the gas supply main unit is provided with a connection pipe connecting between the flow rate adjusting unit and the gas supply main unit, and a main frame that houses the flow rate adjusting unit and the gas supply main unit. The unit is removably attached to the main frame, and receives gas from each of the flow rate adjusting units, the connection pipe, and the gas supply main unit to supply gas to an external consumption facility. The pipe is a pipe joint that can be attached to and detached from each of the flow rate adjustment units or the gas supply main unit. Characterized in that it is connected via a.

It is desirable to use, for example, a quick joint as the removable pipe joint. Further, when an electrically controlled flow control valve is used as the flow control valve of the flow control unit, the power supply wiring and control signal wiring of the electric control flow control valve are connected to the connector provided on the main frame. It is desirable to connect to the flow rate adjusting unit via the.

When a solenoid valve is used as a stop valve of the flow rate adjusting unit, the power source wiring and control signal wiring of the solenoid valve are connected to the flow rate adjusting unit via a connector provided on the main frame. It is desirable to connect to.

It is desirable that the electric control signal wirings for the flow rate adjusting unit and the gas pipes for the flow rate adjusting unit are connected on different surfaces of the main frame.

When a pneumatic valve is used as a stop valve for the flow rate adjusting unit, the air for driving the pneumatic pressure valve is supplied to the flow rate adjusting unit through a quick fluid coupling provided on the main frame. It is desirable to supply.

It is desirable that the drive air pipes are connected to the flow rate adjusting unit and the gas pipes are connected to the flow rate adjusting unit from different surfaces of the main frame.

Further, in each of the above configurations, it is possible to incorporate a plurality of flow rate adjusting valves in the flow rate adjusting unit. When a solenoid valve is used as a stop valve of the gas supply main unit, the power supply wiring and control signal wiring of the solenoid valve are connected to the gas supply main unit via a connector provided on the main frame. It is desirable to connect.

It is desirable that the electrical control signal wiring for the gas supply main unit and the connection of each gas pipe for the gas supply main unit be made on different surfaces of the main frame.

When an air pressure valve is used as a stop valve for the gas supply main unit, the air for driving the air pressure valve is supplied to the gas supply main unit through a quick fluid coupling provided on the main frame. It is desirable to supply the unit.

It is desirable that the drive air pipes are connected to the gas supply main unit and the gas pipes are connected to the gas supply main unit on different surfaces of the main frame.

In each of the above constructions, the gas supply main unit may be constructed so as to distribute and supply a mixed gas having the same composition to a plurality of supply destinations. In the mixed gas supply device of the present invention, each flow rate adjusting valve for each type of gas, and means for mixing each type of gas and supplying the mixture to the outside are unitized and built in the main frame. Therefore, each unit can be attached to and detached from the main frame, and the type of supply gas or the flow rate adjustment range can be easily changed.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a block diagram showing an example of the configuration of a flow rate adjusting unit used in the mixed gas supply device of the present invention. This flow rate adjusting unit has a function of adjusting the supply amount for each type of gas.

FIG. 1A shows the basic structure of the flow rate adjusting unit. A filter 11 for removing impurities contained in the supply gas, a stop valve 12, a flow rate adjusting valve 13 for adjusting the flow rate of the supply gas, and a stop valve 14 are arranged in order from the upstream side in a frame 10 that houses each component. A check valve 15 for preventing backflow of the supply gas is incorporated. Further, on the outer surface of the frame 10, a pipe joint 16 that connects a receiving pipe 27 that connects the flow rate adjusting unit 1 and a gas supply source (not shown), and the flow rate adjusting unit 1 and a gas supply main described later. A pipe joint 17 that connects a connection pipe 28 that connects the unit 2 is arranged.

FIG. 1 (b) shows the stop valves 12 and 14 described above.
The structure in which the pneumatic valves 32 and 34 are used as is shown. In this case, in addition to the above-mentioned supply gas piping system, pneumatic control valves 42 and 44 for controlling the working air of the pneumatic valves 32 and 34 are incorporated in the frame 10. Further, a control device 30 that electrically controls the flow rate adjusting valve 13 and the air pressure control valves 42 and 44 is provided outside the flow rate adjusting unit 1, and the control from the control device 30 is performed on the outer surface of the frame 10. Connector 5 for sending signals to the flow rate adjusting valve 13 and the pneumatic control valves 42 and 44, respectively.
Place 3, 52 and 54.

FIG. 1 (c) shows the stop valves 12 and 14 described above.
The structure in which the solenoid valves 62 and 64 are used is shown. Also in this case, the flow rate adjusting valve 13 and the solenoid valve 6
A control device 30 for electrically controlling 2 and 64 is provided outside the flow rate adjusting unit 1, and a control signal from the control device 30 is provided on the outer surface of the frame 10 for the flow rate adjusting valve 13 and the empty space, respectively. The connectors 53, 52 and 54 are arranged to feed the pressure control valves 62 and 64.

In the configuration of FIG. 1B or 1C, a pneumatic joint (not shown) for supplying driving air for control, or connectors 52, 5 for control signal wiring.
By disposing 3, 54, etc. on the outer surface of the frame 10 that houses the flow rate adjusting unit 1 other than the surface to which the supply gas pipe is connected, the connection of the gas pipe, the drive air pipe, the electric wiring, etc. Work becomes easy.

FIG. 2 is a gas system diagram showing another example of the configuration of the flow rate adjusting unit 1. In this example, in the frame 10, two systems of flow rate adjusting valves 13 (including stop valves 12 and 14) having different flow rate setting ranges are provided in parallel. Here, by selecting either or both of the two systems of flow rate adjusting valves 13, the range in which the flow rate of the supply gas can be set can be expanded.

That is, generally, the flow rate regulator has an adjustable flow rate range. Specifically, with respect to the settable flow rate, the range (minimum flow rate: maximum flow rate) is about 1:10 for the float type and about 1: 100 for the electronic type.
Therefore, when the flow rate to be set exceeds the range of the flow rate regulator, it is necessary to selectively use a plurality of flow rate regulators having different flow rate ranges. For example, the maximum flow rate is 1 liter
The minimum flow rate is 10cc / min with the electric flow regulator
However, when the flow rate regulators of 1 l / min and 10 cc / min are arranged in parallel and selectively used, the maximum settable flow rate is the same as 1 l / min, but the minimum settable flow rate is 10
Change from cc / min to 0.1cc / min, range is 1:10
The range of settable flow rates can be expanded from 0 to 1: 10000.

Further, when a plurality of flow rate regulators are arranged in parallel and gas is flowed at the same time, the maximum settable flow rate can be increased. FIG. 3 is a gas system diagram showing an example of the configuration of the gas supply main unit 2 used in the mixed gas supply device of the present invention. The gas supply main unit 2 has a function of selecting each kind of gas supplied through the flow rate adjusting unit 1 and mixing the gases, and then supplying the mixed gas to an external consumption facility.

In the frame 20 for accommodating each component, a manifold 22, a stop valve 23, and a check valve 24 for preventing backflow are incorporated in order from the upstream side to mix the supply gas sent from the flow rate adjusting unit 1. Has been. Frame 20
On the outer surface of the pipe, a pipe joint 21 that connects a connection pipe 28 that connects the gas supply main unit 2 and the flow rate adjusting unit 1 and between the gas supply main unit 2 and a gas supply destination (not shown). A pipe joint 25 that connects the delivery pipe 29 that connects This example shows a configuration in which two types of gas are mixed and supplied to two consumption facilities (not shown). For one manifold 22,
A two-system receiving system (pipe joint 21) and a two-system sending system (combination of the stop valve 23, the check valve 24, and the pipe joint 25) are provided in parallel.

The gas supplied to each flow rate adjusting unit 1 from an external gas supply source (not shown) via the receiving pipe 27 and the pipe joint 16 is flow-adjusted there, and then connected to the pipe joint 17. After entering the gas supply main unit 2 through the pipe 28 and the pipe joint 21 and being mixed in the built-in manifold 22, the stop valve 23, the check valve 24, the pipe joint 25, and the delivery pipe 29 are passed. , To multiple external consumer facilities (not shown).

In the structure shown in FIG. 3, quick fittings that can be attached and detached with one touch are used as the pipe joints 16, 17, 21 and 25 for connecting the gas pipes to the flow rate adjusting unit 1 or the gas supply main unit 2. By using a flexible pipe for connecting the units, the connection work of the pipes between the units can be facilitated.

The rapid joint is usually constructed by a pair of male and female sides. When separated, the flow paths are closed on both the male side and the female side, and when connected, the flow paths are open on both sides, allowing the passage of gas.

FIG. 4A shows a front view of the mixed gas supply device of the present invention. In FIG. 4 (a), 1 is a flow rate adjusting unit, 2 is a gas supply main unit, and 3 is a main frame that houses the above units. In this example, the flow rate adjusting unit 1 and the gas supply main unit 2 have the same outer dimensions and are housed side by side in the main frame 3.

FIG. 4B shows a state where the flow rate adjusting unit 1 and the gas supply main unit 2 are removed from the main frame 3 in FIG. 4A. What is shown in the figure is the inner wall portion of the back of the main frame 3. The arrow shown in FIG. 4 (b) indicates the flow direction of the supply gas. Further, FIG. 4C shows a cross-sectional view taken along the line AA of FIG. 4B, that is, a cross-sectional view of the back surface portion of the main frame 3.

As shown in FIGS. 4 (b) and 4 (c), the gas from an external gas supply source (not shown) is provided on the inner inner wall portion of the main frame 3 corresponding to the back surface of the flow rate adjusting unit 1. To the flow rate adjusting unit 1, a pipe joint 77 for sending the gas whose flow rate is adjusted by the flow rate adjusting unit 1 to the gas supply main unit 2, and a pneumatic joint 78 for supplying driving air to the flow rate adjusting unit 1. , And an electrical connector 79 for supplying drive power and control signals to the flow rate adjusting unit 1.

On the inner rear wall portion of the main frame 3 corresponding to the back surface of the gas supply main unit 2, a pipe joint 81 for introducing the gas whose flow rate is adjusted by the flow rate adjusting unit 1 into the gas supply main unit 2, Main unit 2
A pipe joint 85 for sending the gas mixed in 1. to an external consumer facility (not shown) is attached.

FIG. 4D shows a side view of the rear surface portion of the flow rate adjusting unit 1. A gas supply source (not shown) is connected to the pipe joint 76 on the rear surface of the flow rate adjusting unit 1.
Fitting 1 for introducing gas from the pipe into the flow rate adjustment unit 1
6, a pipe joint 17 that is connected to the pipe joint 77 and sends the gas whose flow rate is adjusted in the flow rate adjusting unit 1 to the gas supply main unit 2; and a pneumatic joint 78 that is connected to the pneumatic joint 78 and introduces drive air into the flow rate adjusting unit 1. Pneumatic fitting 18,
Also, an electrical connector 19 connected to the electrical connector 79 for supplying a drive power source and a control signal to the flow rate adjusting unit 1 is arranged.

In the example shown in FIGS. 4 (b) to 4 (d), the supply gas, the driving air, the power supply, the control signal, and the like are connected to the rear surface of the main frame 3 for connection. ,
The pipe joints 76, 77, 81, 85, the pneumatic joint 78, and the electrical connector 79 are provided, and the flow rate adjusting unit 1 and the gas supply main unit 2 are connected to them, but instead of this, Thus, holes are formed in the back surface of the frame 3 through which the above-mentioned pipe joints and electrical connectors pass, and the pipe joints 16, 17 on the rear face of each flow rate adjusting unit 1, the pneumatic joint 18, and the electrical connector 19, Alternatively, directly on the pipe joints 21, 25, etc. on the rear surface of the gas supply main unit 2,
You may connect piping or wiring.

5 (a) to 5 (c) show various examples of a method for fixing the flow rate adjusting unit 1 to the main frame 3. In the example shown in FIG. 5A, a mounting collar 91 is provided along the side surface of the flow rate adjusting unit 1, and a mounting groove 95 is provided in the bottom plate and the top plate (not shown) of the main frame 3 to mount the mounting collar 95. The flow rate adjusting unit 1 is fixed to the main frame 3 by inserting 91 into the mounting groove 95. FIG.
In the example shown in (b), mounting flanges 92 are provided on the front surface of the flow rate adjusting unit 1, these mounting flanges 92 are fixed to the main frame 3 with screws 93, and the flow rate adjusting unit 1 is fixed to the main frame 3. Fix it. Also, FIG.
In the example shown in (c), a mounting collar 94 is provided along at least the lower side on the rear surface side of the main frame 3, and the lower portion on the rear surface side of the flow rate adjusting unit 1 is fixed to the mounting collar 94.

The gas supply main unit 2 can also be fixed to the main frame 3 by the same method.
FIG. 6 shows a front view of another example of the mixed gas supply device.
In this example, the gas supply main unit 2 is housed in the lower stage of the main frame 3, and the flow rate adjustment unit 1
Are stored side by side on the upper stage of the main frame 3.

The flow rate adjusting valve is unitized for each type of gas to be supplied and independent, and the units are unified in the same shape, so that the type of gas to be supplied or the flow rate adjusting range can be changed. Therefore, the efficiency of the work can be improved.

The connection of the supply gas pipes to the flow rate adjusting unit 1 and the gas supply main unit 2 is concentrated on one surface side (for example, the rear surface side) of the main frame 3 and the other surface of the main frame 3. By arranging flow rate setting parts, display parts, or connection members for piping / wiring for utilities on the side (for example, front side),
Flow rate adjustment unit 1 or gas supply main unit 2
The operability of is improved, and the work of connecting the gas pipes to those units is facilitated.

[0039]

In the mixed gas supply apparatus of the present invention, each flow rate adjusting valve and mixing means are unitized,
As a result of easy attachment / detachment to / from the main frame, the following effects are obtained.

A. The type of supply gas or the flow rate adjustment range can be easily changed. b. Maintenance work is easy. In particular, it is suitable for handling corrosive gas, which is frequently replaced during maintenance.

C. By unifying the external dimensions of the flow rate adjustment unit, a gas supply system for electrical control, a gas supply system for pneumatic control, and a gas supply system for manual control can be mixed in the same mainframe. It can be stored and has excellent operability.

[Brief description of drawings]

FIG. 1 is a block diagram showing an example of the configuration of a flow rate adjusting unit used in a mixed gas supply device of the present invention. (A) shows a basic structure, (b) shows a structure when an air pressure valve is used as a stop valve, and (c) shows a structure when an electromagnetic valve is used as a stop valve.

FIG. 2 is a gas system diagram showing another example of the configuration of the flow rate adjusting unit 1 used in the mixed gas supply apparatus of the present invention.

FIG. 3 is a gas system diagram showing an example of a configuration of a gas supply main unit used in the mixed gas supply device of the present invention.

FIG. 4 is a view showing a mixed gas supply device of the present invention, (a) is a front view of the mixed gas supply device, and (b) is a main frame 3
2C is a front view showing the inner wall portion of the back side, FIG. 6C is a cross-sectional view of the back surface of the main frame, and FIG.

FIG. 5 is an explanatory view of a method of fixing the flow rate adjusting unit to the main frame, and (a) to (c) show examples of various fixing methods.

FIG. 6 is a front view showing another example of the mixed gas supply device of the present invention.

[Explanation of symbols]

1 ... Flow rate adjusting unit, 2 ... Gas supply main unit, 3 ... Main frame, 10 ... Frame (for flow rate adjusting unit), 20 ... Frame (for gas supply main unit), 11 ... Filters, 12, 14 ... Stop valves, 13 ... Flow control valves, 15 ... Check valves, 16, 17, 21, 25, 76, 77, 81, 85, ...
..Pipe fittings, 18, 78 ... Pneumatic fittings, 19, 79 ... Electrical connectors, 22 ... Manifolds, 23 ... Stop valves, 24 ... Check valves, 27 ... Receiving piping, 28 ... Connection wiring, 29 ... Delivery piping, 32, 34 ... Pneumatic valve, 42, 44 ... Pneumatic control valve, 52, 53, 54 ... Connector, 62, 64 ... Solenoid valve, 91, 92, 94 ... Mounting collar, 95 ... Mounting rail.

Claims (13)

[Claims] 1. A flow rate adjusting unit which is provided for each type of gas and has a built-in flow rate adjusting valve to adjust the supply amount for each type of gas, and a flow rate adjusting unit for each type supplied through each of the flow rate adjusting units. A gas supply main unit that mixes the gas and supplies it to an external consumption facility, a connection pipe that connects between each of the flow rate adjusting units and the gas supply main unit, each of the flow rate adjusting units and the gas supply main A mixed gas supply device comprising: a main frame accommodating a unit, wherein each of the flow rate adjusting units and the gas supply main unit is detachably attached to the main frame, and to each of the flow rate adjusting units. A delivery pipe that supplies gas from the receiving pipe that supplies gas, the connection pipe, and the gas supply main unit to an external consumer facility. , The respective flow rate adjusting unit or the gas supply main unit, a gas supply apparatus characterized by being connected via a detachable pipe joint. 2. The mixed gas supply device according to claim 1, wherein the removable pipe joint is a quick joint. 3. The flow rate adjusting unit includes an electric control type flow rate adjusting valve, and power supply wiring and control signal wiring of the electric control type flow rate adjusting valve are the flow rate adjusting unit via a connector provided in the main frame. The mixed gas supply device according to claim 1, wherein the mixed gas supply device is connected to a unit. 4. The flow rate adjusting unit includes a solenoid valve as a stop valve, and a power source wiring and a control signal wiring of the solenoid valve are connected to the flow rate regulating unit via a connector provided on the main frame. The mixed gas supply device according to claim 1, wherein: 5. The electric control signal wiring to the flow rate adjusting unit and the connection of each gas pipe to the flow rate adjusting unit are performed on different surfaces of the main frame. Mixed gas supply device. 6. The flow rate adjusting unit includes a pneumatic valve as a stop valve, and air for driving the pneumatic valve is supplied to the flow rate adjusting unit via a quick fluid coupling provided in the main frame. The mixed gas supply device according to claim 1. 7. The mixing according to claim 6, wherein the connection of the driving air pipe to the flow rate adjusting unit and the connection of each gas pipe to the flow rate adjusting unit are performed on different surfaces of the main frame. Gas supply device. 8. The mixed gas supply device according to claim 1, wherein the flow rate adjusting unit has a plurality of flow rate adjusting valves built therein. 9. The gas supply main unit includes a solenoid valve as a stop valve, and a power supply wiring and a control signal wiring of the solenoid valve are connected to the gas supply main unit via a connector provided on the main frame. The mixed gas supply device according to claim 1, wherein the mixed gas supply device is provided. 10. The electrical control signal wiring to the gas supply main unit and the connection of each gas pipe to the gas supply main unit are performed on different surfaces of the main frame. Mixed gas supply device. 11. The gas supply main unit includes a pneumatic valve as a stop valve, and driving air for the pneumatic valve is supplied to the gas supply main unit via a rapid fluid coupling provided in the main frame. The mixed gas supply device according to claim 1, wherein: 12. The method according to claim 11, wherein the drive air pipes are connected to the gas supply main unit and the gas pipes are connected to the gas supply main unit on different surfaces of the main frame. Mixed gas supply device. 13. The mixed gas supply device according to claim 1, wherein the gas supply main unit distributes and supplies the mixed gas having the same composition to a plurality of supply destinations.