JPH09306404A - Retainer of sample for analysis - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate gathering of a sample, eliminate a stain in an analytic surface of the sample, make capable highly accurate analysis also improve work efficiency thereof. SOLUTION: In this retainer, a conductive viscous object is provided in a surface of a sample holding base 7, a tip end of a bar 8 is inserted to a hole 702, in a condition that the sample holding base 7 is fixed to the tip end of the bar 8, the bar 8 is protruded from a holding part, a sample is gathered by viscously sticking to the conductive viscous object, so that a specific sample can be easily gathered from in a sample group. The bar 8 is moved in a direction pressing in the holding part 9, its sample holding part 7 is fixed to a holder 6, the sample is substantially fixed to the holder 6. In this way, a surface sticking by the conductive viscous object is placed in a lower side. an analytic surface is placed in an upper side, the analytic surface of the sample is prevented from being stained by the viscous object. The bar 8 is extracted from the hole 702, the holder 6 is only required to be separated from the holding part 9, so as to eliminate necessity for retransfer of the sample to the holder 6, workability is improved, high accurate analysis can be performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for holding a sample for analysis for collecting a fine particle sample and setting it on a microscope stand for performing analysis with a scanning electron microscope or the like.

[0002]

2. Description of the Related Art A sample is analyzed by a scanning electron microscope or an electron beam microanalyzer, and the surface of the sample is observed. In order to improve the accuracy of analysis or observation of this sample, the analysis surface of the sample must be kept clean. This sample is fine particles with a diameter of 1 mm or less. Pick up specific fine particles from the fine particle group collected as a sample, or collect fine particles adhering to the surface of mechanical parts, Place on a holder for observation and analysis. Further, a scanning electron microscope or an electron beam microanalyzer needs to give conductivity to the sample during analysis or observation, and in order to hold the sample in a stable state, a conductive tape or a pen is placed on the holder. -Strikes are attached.

Conventionally, as means for collecting the sample and mounting the sample on the holder, the sample is picked up with tweezers and mounted on the holder, or a double-sided adhesive tape is attached to the tip of the wire. Then, a specific sample was picked up with this adhesive tape and placed on the holder.

[0004]

When tweezers are used in the above conventional sample collection and sample placement on the holder, there are the following problems. That is, since the sample is a fine particle, when a specific fine particle is missed by tweezers, the fine particle flies somewhere and is lost, or even if found, impurities are attached to the surface of the sample. There is a possibility that it is not preferable as a sample
Further, if the sample is strongly pinched, an indentation may be formed on the sample and scratch the analysis surface or the observation surface of the sample. Therefore, it may not be possible to carry out highly accurate analysis or observation, and there is a problem in the reliability of the analysis and observation results. Further, it takes skill to pick up the sample with tweezers and place it on the holder so as not to fly the sample and not to make an indentation, and there is a problem in work efficiency.

Next, when a collecting tool having a double-sided adhesive tape on the tip of a wire is used, there are the following problems. That is, there is no problem in collecting a specific fine particle from the fine particle group, but as shown in FIG. 11, the fine particle 1 is placed on the holder 5 with the analysis surface or observation surface 2 facing upward. Double-sided adhesive tape 3 provided on the tip of the wire 4 when placing
Since the conductive adhesive tape or paste adhered on the holder 5 and the holder 5 adhere to each other and the fine sample 1 adheres to the double-sided adhesive tape 3, the analysis surface of the sample 1 or It is extremely difficult to place it on the holder 5 with the observation surface 2 facing upward, and there is a problem in terms of work efficiency.

Further, as shown in FIG. 12, after the sample 1 is once transferred to the holder 5 with the analysis surface or observation surface 2 of the sample 1 facing downward, tweezers or the like without an adhesive substance attached thereto, Although it may be considered that the analytical surface or the observation surface 2 of the sample 1 is turned upside down, a conductive adhesive tape or paste attached to the surface of the holder 5 on the analytical surface or the observation surface 2 of the sample 1 is used. It is not preferable as a sample because it adheres, and when it is directly analyzed or observed, there is a problem that a highly accurate value cannot be obtained and the reliability of the result of the analysis or observation is low. I have a problem with.

The present invention has been made in view of the above points, and facilitates the collection of a sample from a fine particle group, and mounts it on a holder without contaminating the analysis surface or the observation surface of the sample. The present invention provides a sample holding device for analysis which can be easily carried out, enables highly accurate analysis or observation, and has improved working efficiency.

[0008]

Means for solving the above problems are as follows from the description of claim 1 according to the present invention.
A sample holder is detachably attached to the holder, a conductive adhesive for holding the sample is provided on the surface of the holder, the holder is detachably attached to the tip of the grip, and the holder is inserted and removed. It is possible to attach and detach the sample holder to the holder by removably inserting the tip of the rod that can be provided into the hole provided on the back surface of the sample holder and inserting and removing the rod from the grip portion. Characterize.

Next, the means grasped from the second aspect is that the tip of the rod inserted into the hole provided on the back surface of the sample holder is covered with rubber so that the sample holder and the rod can be attached and detached. It is characterized by

Next, the means grasped from the third aspect is characterized in that a spring for applying an elastic force in the direction in which the rod is always pulled out from the gripping portion is provided.

Next, how the invention can be solved by the invention grasped from the above means will be described. First, in the present invention as understood from the description of claim 1, since the sample holding base is detachably provided on the holder, the holder and the sample holding base can be separated or integrated. it can. By detachably attaching the holder to the tip of the grip, the holder can be separated from the grip while the sample holder is integrated with the holder, and the grip and the holder can be integrated. You can

Further, since the tip of the rod which is detachably attached to the grip portion is detachably inserted into the hole provided on the back surface of the sample holder, the tip of the rod can be pulled out from the hole of the sample holder. With this, the holder can be separated from the gripper in a state where the holder and the sample holder are integrated. In addition, the sample holder can be attached to and detached from the holder by inserting and removing the rod from the grip. Therefore, by inserting the rod into the grip, the sample holder can be held with the sample holder fixed at the tip of the rod. It is possible to separate the table from the holder, and by moving the rod in the direction of pulling it out of the grip portion, the sample holding table fixed to the tip of the rod can be integrated with the holder.

Since the conductive adhesive for holding the sample is provided on the surface of the sample holder, the rod is inserted into the hole provided on the back surface of the sample holder, and the sample holder is attached to the tip of the rod. The sample can be collected by adhering the sample to the conductive adhesive with the stick protruding from the grip while it is fixed to the grip, and then move the stick in the direction to pull it out from the grip, and hold the sample holder. To the holder, and the sample is substantially fixed to the holder through the conductive adhesive and the sample holder, and then the rod is pulled out from the hole on the back surface of the sample holder to separate the holder from the grip. , The sample can be carried as it is with the holder. Further, since it is a conductive adhesive, it can be directly used as a holder for a scanning electron microscope or an electron beam microanalyzer.

Next, in the present invention grasped from the second aspect, the tip of the rod inserted into the hole provided on the back surface of the sample holder is covered with rubber so that the sample holder and the rod can be attached and detached. Because of the frictional force between the rubber and the hole, the sample holder can be fixed to the tip of the stick protruding from the grip by simply inserting the stick into the grip, and the direction in which the stick is pulled out from the grip , The sample holder can be fixed to the holder, and the rod can be pulled out from the hole.

Next, in the present invention grasped from the third aspect, since the spring for providing the elastic force in the direction of always pulling out the rod from the holding portion is provided, the rod is pushed into the holding portion and the tip of the rod is inserted. The fixed sample holder is projected from the holder, a specific sample is selected from the sample group, the sample is adhered to the conductive adhesive provided on the surface of the sample holder, and then the stick is pushed. By gently loosening the force, it is possible to collect a specific sample from the sample group while reducing camera shake.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention as understood from the description of the above claims will be described. In the present invention as understood from the description of claim 1, as shown in FIG.
The female screw 601 (FIG. 2) of the holder 6 is attached to the male screw of the sample holder 7.
701 (FIG. 3) is screwed and the sample holder 7 is detachably provided on the holder 6. A conductive adhesive 14 for holding a sample as shown in FIG. 8 is attached to the surface of the sample holder 7. Further, as shown in FIG. 1, the female screw 602 (FIG. 2) of the holder 6 is screwed into a male screw provided at the tip of the grip portion 9 to detachably mount the holder 6 at the tip of the grip portion 9. Then, the tip of the rod 8 provided so that it can be inserted into and removed from the grip portion 9 is attached to the sample holder 7.
The sample holder 7 is fixed to the holder 6 or separated from the holder 6 by removably inserting it into the hole 702 (FIG. 3) provided on the back surface of the holder and rotating the rod 8 and pulling it out from the gripping portion 9. You can do it.

Next, in the present invention grasped from the description of claim 2, as shown in FIG. 3, the tip of the rod 8 inserted into the hole 702 provided on the back surface of the sample holder 7 is shown in FIG. As described above, the rubber 801 is covered and fixed, and the frictional force between the rubber 801 and the hole 702 makes the sample holder 7 and the rod 8 detachable.

Next, in the present invention grasped from the description of claim 3, as shown in FIG. 1, a spring 10 for applying an elastic force in the direction of always pulling out the rod 8 from the grip portion 9.
Is provided.

[0019]

EXAMPLE An example of the present invention will be described below. In FIG. 1, a female screw 601 (FIG. 2) of the holder 6 is screwed with a male screw 701 (FIG. 3) of the sample holder 7, and the holder 6 is detachably provided with the sample holder 7. Further, a conductive adhesive 14, 15, or 16 for holding a sample as shown in FIGS. 8 to 10 is attached to the surface of the sample holder 7.

The conductive adhesive 14, 15 or 16 is, for example, one prepared by molding an adhesive containing carbon black (a conductive adhesive tape commercially available as an example) or metal fine particles. It is formed by processing the contained sticky material as a raw material. Since the conical conductive adhesive 14 shown in FIG. 8 has a sharp tip, it is suitable for collecting and holding a fine sample, and the truncated cone electric adhesive 15 shown in FIG. Since the tip is flat, it is suitable for collecting and holding a slightly larger sample, and the cylindrical conductive adhesive 16 shown in FIG. 10 has a large surface for adhering the sample, so that a large sample Suitable for holding and collecting.

Further, as shown in FIG. 1, a female screw of the holder 6
602 (FIG. 2) is screwed onto a male screw 901 provided at the tip of the grip portion 9 so that the holder 6 can be detachably attached to the tip of the grip portion 9. Then, the tip of the rod 8 that is detachably attached to the gripping portion 9 can be detachably inserted into a hole 702 (FIG. 3) provided on the back surface of the sample holder 7, and the gripping portion 9 can be rotated while rotating the rod 8. The sample holder 7 can be fixed to the holder 6 or can be separated from the holder 6 by inserting and removing from the holder 6.

That is, as shown in FIG. 4, the end of the rod 8 is covered with rubber 801 and fixed with an adhesive or the like.
The frictional force between the rod and the hole 702 (FIG. 3) causes the sample holder 7 to be rotated when the rod 8 is rotated, and this frictional force is such that the rod 8 comes out of the hole 702. FIG.
As shown in FIG. 6, the holder 6 is provided with a recess 603, and the male screw 701 of the sample holder 7 is replaced with the female screw 601 of the holder 6.
When the sample holder 7 is fixed to a predetermined position of the holder 6 by being screwed into the flange 6 of the sample holder 7 shown in FIG.
Fit in the recess 603, and the surface of the holder 6 and the sample holder 7
The surfaces of are made to be on the same plane.

In this way, by making the surface of the holder 6 and the surface of the sample holder 7 flush with each other, the holder 6 can be mounted on a scanning electron microscope or an electron beam microanalyzer.
With the same shape and size as the holder, it is possible to set the holder 6 directly on a scanning electron microscope or an electron beam microanalyzer, which improves working efficiency and eliminates the need for sample replacement. As a result, the accuracy of analysis and observation can be improved by eliminating the stain and deformation of the sample.

In FIG. 1, the grip 9 is provided with a spring receiver 13, and the other end of the rod 8 is provided with a knob 12.
Is fixed with adhesive or the like. A spring 10 for applying an elastic force in a direction in which the rod 8 is always pulled out from the grip portion 9.
Is provided between the knob 12 and the spring receiver 13. The knob 12 is provided with a flange 121. The flange 11 is attached to the cap 11 screwed to the end of the grip portion 9.
121 is to be locked. Also, the cap 11
The length L1 from the back surface of the sample holder to the surface of the flange 121 of the spring receiver 12 is the depth L2 of the hole 702 provided on the back surface of the sample holder 7.
Longer than that of the rod 8 so that the tip of the rod 8 can come out of the hole 702.

The knob 12 projects from the cap 11 to a length of L3 and is fixed and held at the tip of the rod 8 by pushing the knob 12 into the grip portion 9 against the elastic force of the spring 10. The existing sample holder 7 can be projected by a dimension L3. When the pushing force of the cap 12 is eliminated, the elastic force of the spring 10 causes the knob 12 to project. When the rod 8 is moved in and out of the grip portion 9, the outer peripheral surface of the flange 121 provided on the knob 12 is in sliding contact with the inner peripheral surface of the grip portion 9, and the rod 8 penetrates the spring receiver 13 through the through hole. Guided by 131. This through hole
131 is a hole having a diameter through which the rubber 801 can pass.

The operation of the present embodiment constructed as above will be described below. 5A to 5E are diagrams showing the operation of this embodiment. First, the state of (a) is shown in FIG.
As shown in, the male screw 701 of the sample holder 7 is screwed into the female screw 601 of the holder 6, and the two are integrated.
The male screw 901 of the grip portion 9 is screwed into the female screw 602 of the holder 6 to fix the holder 6 to the tip of the grip portion 9. Further, the flange 703 of the sample holder 7 is fitted in the recess 603 of the holder 6 so that the surface of the sample holder 7 and the surface of the holder 6 are flush with each other, and the surface of the sample holder 7 is made of a conductive material. Adhesive material 14 is attached.

Next, since the rubber 801 provided at the tip of the rod 8 is fitted into the hole 702 provided on the back surface of the sample holder 7, and the sample holder 7 is screwed into the holder 6, the knob is held. By turning 12 in the direction of the arrow in Fig. (A), the rod 8 is turned and the hole
Due to the frictional force between 702 and the rubber 801, the sample holder 7 is rotated and the sample holder 7 can be separated from the holder 6 as shown in FIG.

Next, since the rod 8 is provided so that it can be inserted into and removed from the grip portion 9, the knob 12 can be pushed in as shown by arrow A in FIG. In this way, by pushing the knob 12 in the direction of arrow A, the rod 8 can be projected from the holder 6 as shown in FIG. Then, the rod 8 is inserted into the hole 702 provided on the back surface of the sample holder 7.
Since the rubber 801 provided at the tip of the rod is fitted, the sample holder 7 can be fixedly supported on the tip of the protruding rod 8. Then, a conductive adhesive substance is applied to the surface of the sample holder 7.
Since 14 is attached, a specific sample 1 is selected from the sample group in a state where the pushing force of the knob 12 is maintained and the rod 8 is projected.
Can be easily collected by adhering to the conductive adhesive 14.

As described above, after the sample 1 is sampled, the pushing force of the knob 12 is gently relaxed so that the male screw 701 of the sample holder 7 comes into contact with the female screw 601 of the holder 6 until the rod 8 Can be pulled into the grip portion 9 by the elastic force of the spring 10, and the state shown in FIG. Then, the rod 8 is inserted into the hole 702 provided on the back surface of the sample holder 7.
Since the rubber 801 provided at the tip of the
When the knob 12 is turned in the direction of the arrow as shown in Fig. 3, the sample holder 7 is rotated by the frictional force between the hole 702 and the rubber 801, and the male screw 701 of the sample holder 7 is replaced with the female screw 601 of the holder 6.
Both can be integrated by screwing.

Then, the male screw 701 of the sample holder 7 is held until the flange 703 of the holder 6 is fitted in the recess 603 of the sample holder 7 and the surface of the sample holder 7 and the surface of the holder 6 are flush with each other. It is screwed into the female screw 601 of the holder 6 and brought into the state shown in FIG. Next, since the rubber 801 provided at the tip of the rod 8 is fitted in the hole 702 provided on the back surface of the sample holder 7, the hole 70
Rubber 801 can be removed from 2. And the holder 6
Since the female screw 602 of the above is screwed into the male screw 901 of the grip portion 9, the sample holder 7 and the holder 6 holding the sample 1 via the conductive adhesive 14 as shown in FIG. It can be separated from the gripper 9 in a state where they are integrated.

FIG. 6 is a view showing an actual working state, in which the gripping portion 9 is gripped by hand and the thumb grip 12 is pushed.
This state is just the state of (c) in FIG. 5 (the length of the knob 12 is increased). Then, the grip portion 9 is supported by a flexible support 17 such as a desk lamp,
I try to prevent camera shake. First, (a) in FIG.
After the operations of (b) and (b), as shown in FIG. 6, the gripping portion 9 is gripped and the thumb is pressed against the knob 12 to project the sample holder 7 with the tip of the rod fixed and to project the sample holder 1 '. Take a specific sample from.

At the time of collecting this sample, since the sample holder 7 is fixed to the tip of the rod 8 and protrudes, the sample group 1 '
A specific sample from among these can be easily adhered to the conductive adhesive 14. Further, since the spring 10 that constantly applies elastic force in the direction in which the rod 8 is pulled out from the grip portion 9 is provided, by gently loosening the pressing force of the thumb, another sample in the sample group 1'is Make sure that the conductive adhesive material 14 does not touch the conductive adhesive material 14 and that the specific sample adhered to the conductive adhesive material 14 does not fall, and gently sample group 1 '
A specific sample can be collected from among these.

Then, the state shown in FIG. 5D is set, and then the holder 6 is removed from the grip portion 9. FIG. 7 shows a state in which the holder 6 is removed from the grip portion 9, and the conductive adhesive 14
It is possible to fix the sample 1 to the holder 6 via the sample holding table 7 in a state where the sample 1 is adhesively fixed to. The sample 1 is fixed to the holder 6 with the adhesive fixing side of the sample 1 facing down and the analysis surface or the observation surface facing up.
The analysis surface or the observation surface of is not contaminated. Then, in this state, it can be set in a holder of a scanning electron microscope or an electron beam microanalyzer. Further, by setting the shape and size of the holder 6 to be the same as that of the holder of the scanning electron microscope or the electron beam microanalyzer, the setting work can be facilitated.

[0034]

According to the present invention, which is understood from the detailed description of the invention based on the description of claim 1 as described in detail above, the surface of the sample holder is provided with a conductive adhesive for holding the sample. Object, insert the rod into the hole provided on the back side of the sample holder, and with the sample holder fixed to the tip of the rod, stick the sample to the conductive adhesive by sticking the rod out of the grip Can be collected, so that a specific sample can be easily collected from the sample group.

Then, the rod is further moved in the direction of pulling out from the gripping portion to fix the sample holding base to the holder, and the sample is substantially fixed to the holder via the conductive adhesive and the sample holding base. The surface of the sample adhered with the adhesive adhesive is on the lower side, the analysis surface or observation surface of the sample is on the upper side, the analysis surface or observation surface of the sample is not contaminated, and the sample was collected As it is, there is no need to touch the sample, so the sample is not deformed or scratched. Further, since the conductive adhesive is used, it can be used as it is as a holder for a scanning electron microscope or an electron beam microanalyzer, and its workability can be improved.

Further, since the rod can be pulled out from the hole provided on the back surface of the sample holder to separate the holder from the grip portion and the sample can be carried as it is together with the holder, it is not necessary to transfer the sample to the holder. It is possible to improve workability and perform highly accurate analysis or observation.

Next, according to the present invention understood from the detailed description of the invention based on the second aspect, the tip of the rod inserted into the hole provided on the back surface of the sample holder is covered with rubber, Since the sample holder and the rod can be attached and detached, and the friction force between the rubber and the hole allows the sample holder to be fixed to the tip of the rod protruding from the grip by simply inserting the rod into the grip. , It is possible to easily collect a specific sample from the sample group.

Then, the rod can be moved in the direction of pulling out from the gripping portion to fix the sample holder to the holder, and the sample can be substantially fixed to the holder via the conductive adhesive and the sample holder. Therefore, the surface of the sample adhered with the conductive adhesive is on the lower side, the analysis surface or observation surface of the sample is on the upper side, and the analysis surface or observation surface of the sample is not contaminated, and the sample Since it is not necessary to touch the sample as it is collected, it does not deform or scratch the sample.

Further, since the sample can be carried as it is together with the holder by pulling out the rod from the hole, it becomes unnecessary to transfer the sample to the holder, improving workability and performing analysis or observation with high accuracy. You can

Next, according to the present invention grasped from the detailed description of the invention based on the third aspect, a spring for applying an elastic force in the direction of always pulling out the rod from the gripping portion is provided, and the gripping portion is provided. Push the rod in to project the sample holder fixed at the tip of the rod from the holder, select a specific sample from the sample group, and place the sample on the conductive adhesive on the surface of the sample holder. By sticking and then gently loosening the force of pushing the rod, it is possible to collect a specific sample from the sample group with less shaking and improve the workability. You can

[Brief description of drawings]

FIG. 1 is a vertical sectional view of an embodiment of the present invention.

FIG. 2 is a vertical sectional view of the holder in FIG.

FIG. 3 is a vertical sectional view of the sample holder in FIG.

FIG. 4 is a plan view of the rod in FIG.

5 is a diagram showing an operation sequence of the embodiment shown in FIG.

FIG. 6 is a perspective view showing a state of actually working using the embodiment shown in FIG.

FIG. 7 is a perspective view showing a state in which a sample is taken in FIG. 6 and a holder is separated from a grip portion.

FIG. 8 is a perspective view of a conical conductive adhesive material.

FIG. 9 is a perspective view of a truncated cone type conductive adhesive.

FIG. 10 is a perspective view of a cylindrical conductive adhesive.

FIG. 11 is a perspective view of a conventional example.

FIG. 12 is a perspective view of a conventional example.

[Description of sign]

 6 Holder 601 Female screw 602 Female screw 603 Recessed part 7 Sample holder 701 Male screw 702 Hole 703 Flange part 8 Rod 9 Grip part 10 Spring 11 Cap 12 Knob 13 Spring receiver 14 Conical conductive adhesive 15 Mounted conical conductive Adhesive 16 Cylindrical conductive adhesive 17 Support

Claims (3)

[Claims] 1. A sample holder is detachably provided on the holder,
A conductive adhesive for holding a sample is provided on the surface of the sample holder, the holder is detachably attached to the tip of the grip portion, and the tip of a rod that can be inserted into and removed from the grip portion holds the sample holder. An apparatus for holding a sample for analysis, wherein the sample holder is attached to and detached from the holder by removably inserting it into a hole provided on the back surface of the table and inserting and removing the rod from a holding portion. 2. The analytical instrument according to claim 1, wherein the tip of the rod inserted into the hole provided on the back surface of the sample holder is covered with rubber so that the sample holder and the rod can be attached and detached. Sample holding device. 3. The analytical sample holding device according to claim 1, further comprising a spring that applies an elastic force in a direction in which the rod is always pulled out from the grip portion.