JPH09303823A - Cooling apparatus for clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cooling apparatus for clean room in which even when a water leakage trouble is caused owing to a heat exchanger and a cold water piping, damage is prevented. SOLUTION: In the cooling apparatus for clean room, a clean room 1 where an IC tester 6 is disposed and a body air conditioner 2 are connected with each other through ducts 3a, 3b for circulation of air conditioning air. In the cooling apparatus, an individual cooling apparatus 8 is disposed for the IC tester 6, and an interruption valve is disposed on a cold water piping connected with a heat exchanger provided in the cooling apparatus 8, which valve is operable with a leakage water detection sensor disposed in the heat exchanger.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling device for a clean room, and in particular, the waste heat released from an IC tester installed in the clean room causes the temperature of the air in the clean room to rise abnormally or become uneven. The present invention relates to a cooling device for a clean room that prevents the above.

[0002]

2. Description of the Related Art Conventionally, in a clean room 1 in which an IC tester 6 is installed, a main air conditioner 2 for air conditioning in the clean room 1 is disposed adjacent to the clean room 1 as shown in FIG. The main body air conditioner 2 is connected through the discharge side duct 3a and the suction side duct 3b, and the air conditioned by the main body air conditioner 2 is purified by passing it from the discharge side duct 3a through an air cleaning device 4 such as a HEPA filter. And release it into the clean room 1,
The air in the clean room 1 is sucked from the suction side duct 3b connected to the space below the access floor 5 to circulate the air in the clean room 1 to perform air conditioning and cleaning. The main room air conditioner 2 for air conditioning in the clean room 1 has a clean room 1 in advance.
Assuming the number of IC testers 6 to be installed in the air conditioner, an air conditioner having a cooling capacity corresponding to the total amount of waste heat released from the plurality of IC testers 6 is adopted. Therefore, when the number of IC testers 6 installed in the clean room 1 becomes larger than the number expected in advance due to the addition of the IC testers 6 or the like, the total amount of waste heat released from the IC testers 6 reduces the cooling capacity of the main air conditioner 2. The temperature of the air in the clean room 1 exceeds the reference value (for example, 25 ° C., 50% RH) and rises abnormally, which causes the measurement conditions of the IC tester 6 to fluctuate and affect the reliability of the IC. I had a problem. In order to deal with this, the cooling device installed in the clean room is equipped with a heat exchanger and a blower, and some or all of the high temperature air discharged from a specific IC tester is sucked in and cooled. The cooled air is discharged into the clean room, and the cooled air is discharged into the space below the access floor to which the intake duct of the main air conditioner of the clean room is connected. As a result, the air discharged from the IC tester (however, the temperature of the air has dropped to the reference value of the temperature of the air in the clean room) is sucked into the main air conditioner from the suction side duct and passed through the air cleaning device. By doing so, it can be cleaned and discharged into the clean room. In addition, as another cooling method of the cooling device for the clean room, preferably, the temperature of the air discharged from the IC tester is a reference value of the temperature of the air in the clean room (for example, 25 ° C.,
After the air in the clean room (for example, 25 ° C. 50% RH) is cooled to 50% RH), the cooled air is supplied to the IC tester.

[0003]

In the above conventional cooling device for a clean room, when cold water is used as a medium for cooling the air, a heat exchanger and a cold water pipe are installed inside the clean room. In the unlikely event that cold water leaks, not only the specific IC tester but also surrounding equipment will be seriously damaged. The present invention solves the problems of the conventional clean room cooling device described above, and even if a water leakage accident from a heat exchanger or cold water piping occurs in the clean room, the damage can be prevented. The purpose is to provide.

[0004]

In order to achieve the above object, the clean room cooling device of the present invention circulates the air for air conditioning by connecting the clean room in which the IC tester is arranged and the main air conditioner by a duct. In such a cooling device for a clean room, an individual cooling device is arranged in the IC tester, and a cutoff valve is arranged in the cold water pipe connected to the heat exchanger provided in the cooling device, and the cutoff valve is arranged in the heat exchanger. It is characterized in that it is operated by a water leakage detection sensor.

The cooling device for a clean room according to the present invention having the above-mentioned structure can offset the heat load due to the waste heat released from each IC tester installed in the clean room and cool the cooling air for the clean room. By using cold water as a medium, it is possible to prevent damage to the IC tester and peripheral devices even if a water leakage accident should occur.

In this case, the heat exchanger, the heat exchanger,
The heated air discharged from the IC tester can be sucked in, and after cooling, discharged into the space below the access floor of the clean room.

Since the clean room cooling device of the present invention having the above-mentioned configuration does not require a design change of a highly accurate and expensive IC tester, it can be easily applied to an existing IC tester.

Further, in this case, the heat exchanger can suck the heated air discharged from the IC tester, and after cooling, discharge the heated air into the clean room.

The cooling device for a clean room according to the present invention having the above-mentioned structure can surely cool the IC tester.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a cooling device for a clean room according to the present invention will be described below with reference to the drawings. In the figure, 1 is a clean room having a required internal volume and shape, 2 is a main air conditioner of the clean room 1 arranged adjacent to the clean room 1, and the clean room 1 and the main air conditioner 2 are a discharge side duct 3a and a suction side. It is connected to the duct 3b to circulate the air in the clean room 1 so that air conditioning can be performed, and the IC tester 6 and the IC tester 6 are provided on the access floor 5 in the lower part of the clean room 1 and close to the IC tester 6. The cooling device 8 is arranged from the side to the upper side of.

On the inner ceiling of the clean room 1, HE
After arranging an air purifying device 4 such as a PA filter and purifying the air from the main body air conditioner 2 through the discharge side duct 3a,
The air in the clean room is supplied to the main air conditioner 2 through the space 11 below the access floor 5 and the intake duct 3b.

The cooling device 8 is provided with a heat exchanger 81 for sucking and cooling the heated air from the IC tester 6 and a blower 82 for discharging the air after the heat exchange to the space 11 side. There is.

Therefore, the cooling device 8 arranged in the clean room 1 is provided with the heat exchanger 81 and the blower 82, and is installed from the upper side to the side of the IC tester 6 installed on the access floor 5 of the clean room 1. By arranging in this way, air having a high temperature emitted from the upper surface of the IC tester 6, for example, 32 ° C. and 35% RH is sucked in, and it is preferable that the reference value of the temperature of the air in the clean room 1, for example, 25. After cooling to 50 ° C. and 50% RH, the cooled air is discharged to the lower space 11 of the access floor 5 to which the suction side duct 3b of the main air conditioner 2 of the clean room 1 is connected. As the cooling device 8, a cooling device having a cooling capacity corresponding to the amount of waste heat released from the IC tester 6 as a reference is used.

In this case, the cooled air discharged from the IC tester 6 and discharged to the lower space 11 of the access floor 5 via the cooling device 8 is directly sucked together with the air in the lower space 11 of the access floor 5. The air is sucked into the main body air conditioner 2 from 3b to be air-conditioned, and after being cleaned by passing through a known air cleaning device 4 such as a HEPA filter from the discharge side duct 3a, it is discharged into the clean room 1.

The cooling water inlet pipe 12 for supplying cooling water and the cooling water outlet pipe 15 are connected to the heat exchanger 81 of the cooling device 8 and the space between the cooling water inlet pipe 12 and the heat exchanger 81 is A shutoff valve 13 is provided at the position, and a check valve 14 is provided at the cooling water outlet pipe 15.

A cold water system diagram of the cooling water supplied to the cooling device 8 is shown in FIG. The cooling water supplied to the cold water inlet pipe 12 of the heat exchanger 8 enters the heat exchanger 81 through the cutoff valve 13, passes through the check valve 14, and is discharged from the cold water outlet pipe 15. In addition, below the heat exchanger 81, an emergency drain pan 16 for collecting water leakage is provided, and a drain pipe 17 is provided in the drain pan 16. Further, a water leakage sensor 18 is installed in the cold water system and the emagen seed pan 16 as shown in FIG. 2, and the water leakage sensor 18 is installed in a control panel (not shown) of the clean room cooling device 8. Water leak detector 19
Is connected to From the water leak detector 19, the signal line 20
Are connected to the shutoff valve 13.

Next, the operation of the apparatus configured as described above will be described. If the cooling water passing through the heat exchanger in the clean room leaks for some reason, the leak sensor 18 immediately detects the leak and the leak detector 19
The shut-off valve 13 is shut off by the signal from and the supply of cold water is stopped, and the check valve 14 is provided on the cold water outlet side. Therefore, this check valve can prevent water leakage from the pipe 15 in advance. The amount of water leakage can be suppressed to the amount of water held in the cold water system.

Further, the leaked cooling water is collected in the emergency seed pan 16 and discharged through the drain pipe 17, so that it does not leak to the periphery of the cooling device 8 and I
It is possible to prevent damage to the C tester and peripheral devices. Further, since the shutoff valve 13 can be shut off from the water leak detector 19 and an external signal for the occurrence of water leak can be output, it is possible to promptly deal with the restoration work of the water leak.

FIG. 3 shows a second embodiment of the cooling device for a clean room according to the present invention. The cooling device 8 includes a heat exchanger 81 and a blower 82, and by installing the cooling device 8 above the IC tester 6 installed on the access floor 5 of the clean room 1, high-temperature air discharged from the upper surface of the IC tester 6, For example, by inhaling 32 ° C. and 35% RH, preferably the reference value of the temperature of the air in the clean room 1, for example, 25
After cooling to 50 ° C. and 50% RH, the cooled air is discharged into the clean room 1.

The cold water system of the cooling device 8 shown in FIG. 3 also has the structure shown in FIG. 2 as in the first embodiment. By the way, in the clean room cooling device 8 of the first and second embodiments, the high temperature air discharged from the IC tester 6 is provided by providing the cooling device 8 on the air discharge side of the IC tester 6. , 32 ° C, 35
Inhaling part or all of% RH, preferably a reference value of the temperature of the air in the clean room 1, for example, 25 ° C.,
Although an example is shown in which the cooled air is discharged into the clean room 1 after cooling to 50% RH, a clean room cooling device equipped with a similar heat exchanger and a blower is installed in the IC tester. By providing the air on the air intake side, it is preferable that the temperature of the air discharged from the IC tester be the air in the clean room such that the reference value of the temperature of the air in the clean room is, for example, 25 ° C. and 50% RH. For example, after cooling at 25 ° C. and 50% RH, the cooled air can be supplied to the IC tester.

In the cooling device for a clean room constructed as above, the cold water system has the structure shown in FIG. 2 as in the first and second embodiments.

[0022]

According to the cooling device for a clean room of the present invention, the heat load due to the waste heat emitted from each IC tester installed in the clean room can be canceled and the air for cooling the clean room can be cooled. By using cold water as a medium, it is possible to prevent damage to the IC tester and peripheral devices even if a water leakage accident should occur.
Further, according to the cooling device for a clean room of the present invention, since it is not necessary to change the design of the highly accurate and expensive IC tester, it is possible to easily cope with the existing IC tester.

[Brief description of drawings]

FIG. 1 is a conceptual diagram showing a first embodiment of a clean room cooling device of the present invention.

FIG. 2 is a cold water system diagram of the cooling device of the present invention.

FIG. 3 is a conceptual diagram showing a second embodiment of the clean room cooling device of the present invention.

FIG. 4 is a conceptual diagram showing a conventional clean room facility.

[Explanation of symbols]

 1 Clean Room 11 Lower Space 2 Main Air Conditioner 3a Discharge Side Duct 3b Suction Side Duct 4 Air Purifier 5 Access Floor 6 IC Tester 8 Cooling Device 13 Shutoff Valve 14 Check Valve 16 Emergency Brempan 18 Water Leak Sensor 19 Water Leak Detector

Claims (3)

[Claims] 1. A cooling device for a clean room in which a clean room having an IC tester and a main air conditioner are connected by a duct to circulate air for air conditioning,
A separate cooling device was placed in the tester, and a shutoff valve was placed in the chilled water pipe connected to the heat exchanger provided in the cooling device, and the shutoff valve was operated in the heat exchanger by the leak detection sensor. A cooling device for a clean room, which is characterized in that 2. The cooling for a clean room according to claim 1, wherein the heat exchanger sucks heated air discharged from the IC tester, and after cooling, discharges the heated air to a space below an access floor of the clean room. apparatus. 3. The clean room cooling device according to claim 1, wherein the heat exchanger draws in the heated air discharged from the IC tester, and after cooling, discharges the heated air into the clean room.