JPH09300146A - Positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a configuration in which a traveling body can move not only in a direction along one straight line but also in the other direction which is orthogonal to the straight line and the direction in which it rotates without using a multi-step configuration easily. SOLUTION: A plurality of permanent magnets 4A, 4C are fixed at an equal interval in a region RA and a region RC of a top face 2A of a bed 2 so that S-pole and N-pole are arranged alternately along the X direction, and a plurality of permanent magnets 4B, 4D are fixed at an equal interval in a region RB and a region RD so that S-pole and N-pole are arranged alternately along the Y direction. Coil units 5A, 5B, 5C, and 5D are fixed at four corners of a top face of a table 3, respectively. Each coil unit 5A to 5D is provided to constitute a direct-acting motor by combining with the permanent magnets 4A to 4D fixed on a bed 2 side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device for positioning a movable body, which is movable relative to a fixed body, at a predetermined position, and more particularly, to an improvement in a structure for generating thrust for moving the movable body. Even if it is not a multi-stage configuration, not only the direction along a straight line,
It is possible to easily realize a configuration in which the moving body can be moved in another direction orthogonal to the straight line, a rotating direction, or the like.

[0002]

2. Description of the Related Art In a conventional positioning apparatus such as an XY positioning table, a bed as a fixed body is
A sub-table as a movable body that can move in the X direction and a first actuator that linearly moves the sub-table in the X-direction are provided, and an upper surface of the sub-table is provided.
A main table, which is a movable body that can move in the Y direction orthogonal to the X direction, and a second actuator that directly moves the main table in the Y direction are arranged. By driving the first actuator, both the sub table and the main table are moved to the X-axis.
The main table is moved in the Y direction by driving the second actuator according to the target movement amount in the Y direction, and the main table in the uppermost stage is moved in a plane including the X direction and the Y direction. It was arranged to be positioned at any position along the.

If there is a demand to rotate the main table not only in the X and Y directions but also by an arbitrary angle θ around an axis orthogonal to a plane including the X and Y directions, the sub table is required. A second sub-table is arranged on the upper side instead of the main table, and on the second sub-table, a rotary drive device including an air spindle, a rotary motor, a rotary encoder, and the like is provided.
There was a main table.

That is, in the conventional positioning device,
According to each request of XY movement or XYθ movement, the movable body is appropriately stacked through a linear motion device or a rotation device to position the uppermost main table at an arbitrary position or an arbitrary angle. The reason is that in the conventional positioning device as described above, for example, the sub-table that moves in the X direction is completely prevented from moving in a direction other than the X direction (Y direction or θ direction). Specifically, between the lower surface of the sub table for moving in the X direction and the upper surface of the bed, a linear motor that generates direct power in the X direction and the movement of the sub table in the X direction are guided. This is because a linear guide is generally provided, and two linear guides are provided in parallel in a Y direction that is orthogonal to the X direction and are separated from each other. That is, X
Since movement of the directional movement subtable in a direction other than the X direction is blocked, the subtable can move in the X direction without tilting due to the direct power generated by one linear motor. On the other hand, in order to move the uppermost table in the Y direction or the θ direction, the multi-stage configuration as described above was unavoidable.

[0005]

Certainly, by stacking a plurality of actuators and tables as described above, it is possible to position the uppermost main table at a predetermined position, and the rotary drive device may be appropriately arranged. It is possible to displace the main table in the rotation direction by interposing it, but in this case, for example, in the X direction (linear motion direction), the Y direction (X direction).
Proportional to the number of directions you want to move, that is, three stages of stacking are required to enable movement in three directions, the linear motion direction orthogonal to the direction) and the θ direction (rotational direction). There is a problem that the apparatus becomes large and heavy, and further, the accuracy is lowered.

The increase in the size of the device poses a problem especially when the space for installation is largely restricted, and the increase in the weight of the device leads to an increase in the load on the lowermost table. Will end up.

The present invention has been made by paying attention to the unsolved problems of the prior art as described above, and even if the movement in a plurality of directions is realized, the size of the device is greatly increased. It is an object of the present invention to provide a positioning device that does not require the above.

[0008]

In order to achieve the above object, a positioning device according to the present invention includes a fixed body and a movable body, which are in contact with each other or are not in contact with each other, in a plane orthogonal to the opposing direction. The direction along one straight line and the direction of rotation around any axis parallel to the opposite direction,
At least relative displacement is possible, and a plurality of magnets are fixed to one of the moving body and the solid body so that S poles and N poles are alternately arranged in a direction along the straight line, and And, in the other of the fixed bodies, at each of at least two positions that are separated in the other direction along the plane that is a direction intersecting with the one straight line, in the one straight line with the magnet. The coil that produces the direct force along the direction was fixed.

Here, in the present invention, direct power is generated by a plurality of magnets fixed to one of the moving body and the fixed body and a coil fixed to the other of the moving body and the fixed body. However, since the coil is disposed in at least two positions separated in the direction intersecting the straight line in which the moving body and the fixed body can be relatively displaced, the direct power between the moving body and the fixed body is It occurs along a plurality of parallel straight lines. The plurality of magnets fixed to one of the moving body and the fixed body may be provided in a row in the direction along the straight line, but the distance between the coils is wider than the width of the magnets. In this case, two or more rows may be provided in the direction along the straight line.

If the plurality of linear powers are all in the same direction and have the same magnitude, the moving body will move in a direction along a straight line. And the magnitude of other direct power, or by reversing the direction of one direct power and the direction of another direct power,
The force in the rotation direction due to the imbalance of each direct power is input to the moving body, and the force in the rotating direction causes the moving body to rotate around the arbitrary axis.

Further, according to the present invention, since the direct power is generated separately along the plurality of parallel straight lines as described above, the tilt of the moving body can be prevented by appropriately adjusting the direct power. Therefore, unlike the conventional positioning device, it is not necessary to provide a linear guide. That is,
It is not necessary to completely prevent the movement in the direction intersecting the straight line.

Therefore, in addition to the direction along the one straight line, the moving body and the fixed body are relatively opposed to each other in the direction intersecting the one straight line and along the other straight line included in the plane. It is displaceable and S in the direction along a straight line.
In addition to the first magnet row in which the poles and the N poles are alternately arranged, a second magnet row in which the S poles and the N poles are alternately arranged in the direction along the other straight line is provided on one of the moving body and the fixed body. If a second coil that generates a direct power in the direction along the other straight line with the second magnet array is provided on the other of the moving body and the fixed body, the moving body is It is also possible to move in a direction along a straight line.

Further, a second coil that generates a direct power between the second magnet array in which the S poles and the N poles are alternately arranged in the direction along the other straight line is provided in a direction intersecting the other straight line. If provided at least at two positions separated in the direction along the plane, the second coil can move the moving body in the rotation direction.

Further, it is preferable that the direction along the one straight line and the direction along the other straight line are directions orthogonal to each other. That is, if the direction along one straight line is the X direction, the direction along the other straight line is the Y direction orthogonal to the X direction, whereby the positioning control of the moving body is performed.
This can be performed on the XY orthogonal coordinate system and in the θ direction around the axis orthogonal to the XY plane.

Further, it is desirable to provide a position detecting means for detecting the current position of the moving body. For example, if the movable body and the fixed body are capable of relative displacement in the direction along the one straight line and the rotation direction around the arbitrary axis, the position for detecting the position in the direction along the one straight line A detection means may be provided, but more desirably, a means for detecting a rotational position around an arbitrary axis may be provided. As the former,
For example, a laser-type length measuring device or the like that is fixed to the fixed body side and measures the distance from the end surface of the moving body can be applied, and the latter is fixed to the fixed body side in a direction along a straight line. The distance between any two points on the side surface of the moving body that extends in the direction along the straight line is measured by the two laser-based length measuring devices, and the two measured values are calculated by signal processing, etc. A device or the like can be applied.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 6 show the first embodiment of the present invention.
Is a diagram showing an embodiment of the present invention, in which the present invention is applied to a positioning apparatus 1 suitable for a wafer exposure apparatus or the like in a semiconductor manufacturing apparatus.

First, the structure will be described. This positioning device 1 is a plan view of FIG. 1 (a) and a side view of FIG.
As shown in (b), it is a device in which a table 3 as a moving body moves on the upper surface of a bed 2 as a fixed body in a horizontal direction and a rotating direction. Here, FIG.
(A) The horizontal direction is the X direction (right is positive), and the vertical direction is the Y direction (up is positive). That is, bed 2 and table 3
Are opposed to each other in the vertical direction, and the table 3 is placed on the bed 2 in the XY plane which is a horizontal plane orthogonal to the vertical direction.
It moves relative to. The beds 2 and the main body of the table 3 are made of a non-magnetic material such as plastic.

The bed 2 is provided with a large number of permanent magnets 4A, ..., 4A, 4B ,.
, 4C, ..., 4C, 4D, ..., 4D are fixed. Each of the permanent magnets 4A to 4D is a permanent magnet formed in a substantially square shape, and the S pole and the N pole are located in the thickness direction (vertical direction) thereof.

Here, the upper surface 2A of the bed 2 is a rectangle having sides parallel to the X and Y directions, and two phantom lines extending from the center C in the X and Y directions are shown by dashed lines. The four regions R _A , R _B , R _C and R _D
Are divided into

In FIG. 1A, a plurality of permanent magnets are arranged in the area R _A located at the upper left and the area R _C located at the lower right so that the S poles and the N poles are alternately arranged along the X direction. 4A,
4C are fixed at equal intervals. In contrast, FIG.
In the area R _B located at the lower left and the area R _D located at the upper right in (a), a plurality of permanent magnets 4B and 4D are fixed at equal intervals so that the S poles and the N poles are alternately arranged along the Y direction. Has been done.

On the other hand, the table 3 is formed in a rectangular parallelepiped shape which is smaller than the bed 2 in the X and Y directions and is thin. In addition, in the state where the center position of the table 3 coincides with that of the bed 2, the positions slightly inside the corners (the positions where the coil units 5A to 5D to be described later are fixed) are located in the respective regions _{RA to} R of the bed 2. It is dimensioned so that it is located approximately at the center of _D. The table 3 and the bed 2 are mechanically completely separated in this embodiment.

The coil units 5A, 5B, 5C and 5D are provided at the four corners of the upper surface 3A of the table 3, respectively.
Has been fixed. The coil units 5A to 5D are provided to form a linear motion motor by being combined with the permanent magnets 4A to 4D fixed to the bed 2 side. Specifically, the coil unit located on the region R _A 5A is a permanent magnet 4 fixed in the region R _A
A, ..., 4A and a direction along the X direction (see FIG. 1).
( _A ) It has a built-in coil for generating the direct power F _A in the left-right direction. The coil unit located on region R _B 5B is a permanent magnet 4 fixed to the region R _B
, B, ..., 4B along the Y direction (see FIG. 1).
(A) It has a built-in coil for generating the direct power F _B in the left-right direction. Then, the coil unit 5C located on the region R _C has a direction along the X direction with the permanent magnets 4C, ..., 4C fixed in the region R _C (see FIG. 1).
(A) It has a built-in coil for generating the direct power F _C in the left-right direction. Further, the coil unit 5D located on the region R _D is in the direction along the Y direction between the permanent magnets 4D, ..., 4D fixed in the region R _D (see FIG. 1).
(A) It has a built-in coil for generating the direct power F _D in the left-right direction.

The coil units 5A to 5D have the same structure except for the fixing position and orientation of the table 3. For example, the coil unit 5A has a structure as shown in plan view in FIG. U phase, V phase,
It incorporates three-phase coils 5a to 5c called W phase. That is, the coils 5a to 5c are arranged in a positional relationship such that a known armature coil for a brushless DC motor is expanded, and specifically, the permanent magnets in which the S poles and the N poles are alternately turned up. 4A, ..., 12 for electrical angle depending on 4A
Three coils 5a to 5c of U phase, V phase, and W phase are wound so as to have a phase difference of 0 degree, and each coil 5a to 5c is wound.
2 by the action of the magnetic force generated by appropriately controlling the armature current to c and the magnetic force generated by the permanent magnet 4A.
As shown in (b), the direct power F _A along the X direction is generated. Here, it is assumed that a straight force F _A toward the positive direction of the X-axis positive linear power F _A, the straight moving force F _A toward the negative direction of the X-axis is referred to as a negative linear power F _A.

Then, the other coil units 5B to 5D
Also have the same configuration as the coil unit 5A, it is adapted to generate the same linear power F _B to F _D. However, direct power F _B toward the positive direction of the Y axis, F _D positive linear power F _B, F _D, negative direction toward the straight power F _B of the Y axis, F _D
Straight moving force of negative F _B, referred to as F _D, straight power straight power F _C toward the positive direction the positive X-axis F _C, the negative direction toward the straight moving force F _C having a negative linear power of the X-axis F _C Shall be called.

Further, on the upper surface 2A of the bed 2, a partially enlarged plan view of FIG. 3 (a) and a side view of FIG. 3 (b) are shown.
As shown in FIG. 6, a large number of air outlets 6, ..., 6 arranged in a matrix face each of the air outlets 6 ,.
From 6, the compressed air supplied through the passage in the bed 2 is blown upward. As a result, an air bearing is formed between the upper surface 2A of the bed 2 and the table 3, and the gap between the bed 2 and the table 3 is maintained at a predetermined distance so that they are not in contact with each other.

Returning to FIG. 1A, this positioning device 1
Has a position sensor 7A for detecting the X-direction position of the table 3 and a position sensor 7B for detecting the Y-direction position of the table 3. These position sensors 7
A laser-type length measuring device can be applied as A and 7B. Then, the position sensor 7A is fixed so as not to be displaced relative to the bed 2 so as to face the end surface of the table 3 in the X direction, and the position sensor 7A irradiates a laser along the X direction to position itself and the position of the table 3. The position of the table 3 in the X direction is measured by measuring the distance from the end face in the X direction. Similarly, the position sensor 7B is installed on the table 3
Is fixed so as not to be displaced relative to the bed 2 so as to face the Y-direction end surface of the table 3, and the laser is irradiated along the Y-direction to adjust the distance between the self-arrangement position and the Y-direction end surface of the table 3. By measuring, the position of the table 3 in the Y direction is measured.

FIG. 4 is a block diagram showing a circuit configuration according to the present embodiment, which has a controller 10 including a microcomputer and the like. The controller 10 has position sensors 7A, The detection signals D _X and D _Y are supplied from 7B. Also,
The controller 10 receives X-direction commands S ₁ , Y from a process computer (not shown) for semiconductor manufacturing equipment, for example.
The direction command S ₂ and the θ direction command S ₃ are supplied respectively. The controllers 10 are connected to the drivers 8A to 8D for the coil units 5A to 5D, and the commands S _{1 to} S ₃ and the detection signals D _X and D _{Y are connected.}
Drive signals I _{A to} I _D based on
Are supplied to D. The θ direction is
The rotation direction is about a vertical line passing through the center of the table 3 in the horizontal plane. Then, in the present embodiment, as shown in FIG. 5, the counterclockwise direction is a positive θ direction in plan view.

The controller 10 then controls each command S ₁
The target displacements in the X direction, the Y direction and the θ direction are recognized based on S ₃ and the table 3 is displaced in the X direction, the Y direction and the θ direction by the displacements corresponding to the target displacements.
While confirming the detection signals D _X and D _Y , each drive signal I _A ~
I _D is output to the driver circuits 8A to 8D.

Here, the displacement of the table 3 in each direction,
Relationship between the ratio of the drive signal I _A ~I _D is, for example, as in Table 1. It should be noted that when each of the drive signals I _{A to} I _D in Table 1 is positive, it means that positive direct power F _{A to} F _D is generated, and conversely, each drive signal I _{A to} I _D is negative. In the case, it means that negative direct powers F _{A to} F _D are generated.

[0030]

[Table 1]

However, in Table 1 above, * 1 ... 45 ° upper right direction in FIG. 1 (a) * 2 ... 45 ° lower right direction in FIG. 1 (a) * 3 ... Upper right 30 in FIG. 1 (a) It means the direction of degrees.

Next, the operation of this embodiment will be described. That is, the table 3 is moved to a distance L in the X direction from the current position, for example.
_When displacing by ₁ (> 0), the X direction command S ₁ corresponding to the distance L ₁ is supplied to the controller 10. In this case, the Y direction command S ₂ and the θ direction command S ₃ are both 0.
And

Then, the controller 10 causes the driver 8
Since the drive signal I _{A of} +1 is supplied to _A and the drive signal I _{C of} +1 is also supplied to the driver 8C, positive linear powers F _A and F _C are generated in the coil units 5A and 5C. However, these direct powers F _A and F _C
Are facing + X direction (positive direction of X axis),
Moreover, since the frictional resistance between the table 3 and the bed 2 is minimized by the air bearing, the table 3 is displaced in the + X direction by the direct powers F _A and F _C. Then, when the table 3 is displaced in the + X direction, the detection signal D _X which is the output of the position sensor 7A gradually decreases. Therefore, when the reduced amount matches the distance L ₁ , the drive signals I _A and I _C are changed. When stopped, the table 3 has moved from the initial position in the + X direction by the distance L ₁ . Even when the table 3 is displaced in the -X direction, the + Y direction, and the -X direction, the drive signals I _A to ~ in the directions according to Table 1 above are monitored while monitoring the detection signals D _X and D _Y of the position sensors 7A and 7B. I _D
Should be output.

When the table 3 is displaced in an oblique direction, the table 3 is moved in parallel in the X direction (or Y direction) and then
May be moved parallel to the Y direction (or X-direction), or, each of the driving signals I _A ~I _D may be output appropriately to displace the table 3 obliquely in accordance with the above Table 1. For example, when the table 3 is displaced diagonally to the upper right 45 degrees in FIG. 1A, if all the drive signals I _{A to} I _D are output in the same magnitude and in the positive direction, the magnitude is the same. Direct power F _A
It to F _D occurs, moreover straight power F _A, F _C is the + X direction, linear force F _B, F _D is + since Y is the direction, the table 3 + X direction and the + Y direction vector of the same size input As a result, the table 3 is displaced diagonally to the upper right 45 degrees in FIG. 1 (a).

When the table 3 is displaced in the θ direction, for example, when the table 3 is rotated in the θ direction by an angle of 3 degrees, the controller 10 is operated by the position sensor 7A,
While monitoring the output of 7B, each of the driving signals I _A ~I _D may be output as appropriate in accordance with Table 1 above. That is, if the −1 drive signals I _A and I _B and the +1 drive signals I _C and I _D are output, the negative direct powers F _A and F _B and the positive direct powers F _C and F _B are output.
_{Although D} and _D occur, the respective direct powers F _{A to} F _D face the same tangential direction with respect to the circle centered on the center point of the table 3, so that the table 3 rotates around the vertical line passing through its own center point. It can be rotationally displaced.

However, when the table 3 is rotationally displaced in the θ direction, the position sensors 7A and 7D cannot directly detect the rotational displacement, so the detection signals D _X and D _Y.
It is necessary to calculate the rotation angle from That is, FIG.
As shown in, the distance from the straight line passing through the center point of the table 3 on the XY plane and parallel to the X axis to the measurement line of the position sensor 7A before the rotational displacement of the table 3 by the angle θ is a, When the distance from the straight line passing through the center point on the XY plane and parallel to the Y axis to the measurement line of the position sensor 7B is b, the X direction displacement Xθ and the Y direction when the table 3 is rotationally displaced by the angle θ The displacement Yθ becomes Xθ = a · sin (θ) Yθ = b · sin (−θ), so that the detection signals D _X of the position sensors 7A and 7B are
The change in D _{Y is} the displacement X in the X direction obtained by the above equations.
Each drive signal I _A until it coincides with θ and Y direction displacement Yθ
It suffices to output ~ _ID .

The angular displacement θ that can be applied to the table 3 is within a range in which the relationship of the linear motor constituted by the permanent magnets 4A to 4D and the coils 5a to 5c in the coil units 5A to 5D is not broken. Limited to within, usually ± 5
However, the positioning apparatus 1 for the wafer exposure apparatus in the semiconductor manufacturing apparatus as in the present embodiment is sufficient if the angle can be adjusted within a range of several degrees. Absent.

As described above, in the present embodiment, the table 3 is displaced in each of the X direction, the Y direction, and the θ direction and positioned at an arbitrary position at a predetermined angle without the multi-stage configuration. Therefore, there is an advantage that the size and weight of the device are not significantly increased. Moreover, since a linear guide or the like is not necessary, the entire device is simplified, which is extremely advantageous for further miniaturization.

Here, in the present embodiment, the X direction corresponds to the direction along a straight line. FIG. 7 is a diagram showing a second embodiment of the present invention, and this embodiment also applies the present invention to a positioning apparatus 1 suitable for a wafer exposure apparatus or the like in a semiconductor manufacturing apparatus. The same components as those in the first embodiment are designated by the same reference numerals,
The overlapping description is omitted.

That is, in this embodiment, the upper surface 2A of the bed 2 is divided into two regions in the Y direction, and a plurality of S poles and N poles are alternately arranged in the X direction in each region. The permanent magnets 4A, ..., 4A, 4C, ..., 4C are fixed. The coil units 5A and 5C are fixed to the upper surface of the table 3 at two positions in the X-direction central portion, which are close to the Y-direction end surfaces. These coil units 5A and 5C generate linear powers F _A and F _C along the X direction, as in the first embodiment.

In addition to the position sensors 7A and 7B, a position sensor 7C is provided in parallel with the position sensor 7B for measuring the distance in the Y direction, and the output of the position sensor 7C is also supplied to the controller. There is. Other configurations are
It is similar to the first embodiment.

Even with such a structure, the direct power F _A ,
The table 3 can be displaced in the + X direction, the −X direction, the + θ direction, and the −θ direction by appropriately selecting the direction and size of F _C. The central axis of the θ-direction displacement (arbitrary axis in the present invention) is a vertical line passing through the midpoint between the coil units 5A and 5C.

In this embodiment, the position sensors 7B and 7C for measuring the distance in the Y direction are provided, and the positions in the X direction are made different. Therefore, the outputs of the two position sensors 7B and 7C are provided. Based on Y of Table 3
Not only the directional position but also the rotation angle of the table 3 can be detected. Therefore, for example, when the table 3 is linearly moved along the X direction, the position sensors 7B and 7 are checked while confirming the X direction position based on the output of the position sensor 7A.
The Y direction position and the tilt angle with respect to the X axis may be confirmed based on the output of C, and the feedback control may be appropriately executed so that the tilt angle becomes zero.

Even in the present embodiment, the table 3 can be displaced in each of the X direction and the θ direction and positioned at an arbitrary position at a predetermined angle without using a multi-stage structure. It has the advantage of not significantly increasing the size and weight and eliminating the need for a linear guide or the like, which is extremely advantageous in simplifying the entire apparatus and further reducing the size.

In the present embodiment, the permanent magnets 4A and 4C can be shared. FIG. 8 is a diagram showing a third embodiment of the present invention, and this embodiment also applies the present invention to a positioning apparatus 1 suitable for a wafer exposure apparatus or the like in a semiconductor manufacturing apparatus. The same components as those in the above-described respective embodiments are designated by the same reference numerals, and the duplicated description will be omitted.

That is, the present embodiment is an improvement of the second embodiment described above. Specifically, a groove 2B extending in the X direction is formed at the center of the upper surface 2A of the bed 2 in the Y direction. At the same time, the round bar 3 is inserted into the groove 2B with a slight margin at the central position on the back surface of the table 3 in the horizontal plane.
A is fixed vertically. Therefore, in the present embodiment, the central axis of the round bar 3A corresponds to an arbitrary axis in the present invention. Other configurations are similar to those of the second embodiment.

With such a configuration, the table 3 has X
The round bar 3A moves in the groove 2B when moving along the direction, and when the table 3 is rotationally displaced in the θ direction,
The round bar 3A rotates in the groove 2B. That is, the groove 2B and the round bar 3A do not restrict the displacement of the table 3 in the X direction and the θ direction. However, with respect to the displacement of the table 3 in the Y direction, the regulation by the groove 2B and the round bar 3A is effective, so that the configuration is more stable with respect to the displacement in the Y direction. Other functions and effects are similar to those of the second embodiment.

FIG. 9 is a diagram showing a fourth embodiment of the present invention, and this embodiment also applies the present invention to a positioning apparatus 1 suitable for a wafer exposure apparatus or the like in a semiconductor manufacturing apparatus. is there. The same components as those in the above-described respective embodiments are designated by the same reference numerals, and the duplicated description will be omitted.

That is, this embodiment is also an improvement of the above-mentioned second embodiment. Specifically, the bed 2 is Y-shaped.
A plurality of permanent magnets 4B, ..., 4B are fixed to the center so that the S poles and the N poles are alternately arranged in the Y direction. A coil unit 5B that generates a direct power F _B along the Y direction is fixed to the center of the upper surface of the table 3. Other configurations are similar to those of the second embodiment.

[0050] With such a configuration, the coil unit 5B and a plurality of permanent magnets 4B, ..., since the linear power F _B is oriented in the Y direction caused by 4B, the straight moving force F _B
Thus, the table 3 can be displaced in the Y direction.
And it is possible to displace in the X direction and the θ direction that the second
Since it is the same as the embodiment described above, according to this embodiment, the table 3 can be displaced in the X direction, the Y direction, and the θ direction.

Further, in the positioning device 1 or the like in which the displacement of the table 3 is mainly in the X direction as in the second embodiment, the coil unit 5B and the plurality of permanent magnets 4B,
The direct power F _B generated by 4B is transferred to the position sensor 7
The position of the table 3 in the Y direction may be stabilized by appropriately generating the feedback control according to the outputs of B and 7C. Other effects are
This is the same as the second embodiment.

FIG. 10 is a diagram showing a fifth embodiment of the present invention, and this embodiment also applies the present invention to a positioning apparatus 1 suitable for a wafer exposure apparatus or the like in a semiconductor manufacturing apparatus. is there. The same components as those in the above-described respective embodiments are designated by the same reference numerals, and the duplicated description will be omitted.

That is, in this embodiment, the permanent magnets 4A to 4A are used.
D is the same as the first embodiment except that the arrangement positions of the coil units 5A to 5D are different and the position sensor 7C is provided. Therefore, even with such a configuration, the same operational effect as that of the first embodiment can be obtained.

In the structure of the first embodiment, another position sensor is provided as in the second to fifth embodiments so as to be in parallel with the position sensor 7A or 7B, and the table is provided. Alternatively, the inclination angles of 3 with respect to the X axis and the Y axis may be directly recognized.

In each of the above embodiments, the air bearing is provided so that the upper surface 2A of the bed 2 and the table 3 are not in contact with each other, and the displacement of the table 3 is smoother. This is because it is not necessary to consider the constraint of the table 3 in the Z-axis direction (vertical direction) in each of the above-described embodiments. That is, it goes without saying that the weight of the table 3, the weight of the wafer or the like placed on it, and the lift of the air bearing can be easily balanced by appropriately adjusting the compressed air pressure of the air bearing. This is because the flying height can also be adjusted.

However, instead of the air bearing, for example, the supporting permanent magnets are fixed to the upper surface 2A of the bed 2 and the lower surface of the table 3 so as to repel each other, and the magnetic force generated by the permanent magnets for supporting is fixed. The table 3 may be floated above the bed 2. Alternatively, for example, the upper surface 2A of the bed 2 and the lower surface of the table 3 may be finished into smooth planes to form a slide bearing, and the table 3 may be smoothly displaced by bringing them into contact with each other. Alternatively, an oil film may be formed between the upper surface 2A of the bed 2 and the lower surface of the table 3 to reduce frictional resistance and to smoothly displace the table 3.

Further, in each of the above embodiments, the bed 2
The permanent magnets 4A to 4D are fixed to the side and the coil units 5A to 5D are fixed to the side of the table 3. However, these fixed relationships may be reversed, or the bed 2 may be fixed.
You may fix the coil unit of an electromagnet to both the side and the table 3 side.

In each of the above embodiments, the present invention is applied to the positioning apparatus 1 for a wafer exposure apparatus in a semiconductor manufacturing apparatus, but the application of the present invention is not limited to this. However, in the configurations of the above embodiments, the range of angular displacement in the θ direction is ± 5 degrees to ± 1.
Since it is about 0 degree, the positioning device 1 for a wafer exposure apparatus in a semiconductor manufacturing apparatus is suitable as an application target.

In each of the above-mentioned embodiments, the laser type length measuring device is applied as the position sensor, but the present invention is not limited to this, and another type of position sensor may be used. However, one table 3 has X direction and Y
When moving in the direction, the laser-type length measuring device in each of the above-described embodiments is optimal.

Further, in the above-mentioned respective embodiments, the X direction and the Y direction which are orthogonal to each other are set as the moving directions of the table 3. However, since the table 3 is displaced to an arbitrary position in the horizontal plane, these X direction and The Y directions do not necessarily need to be orthogonal to each other, and it is sufficient that the two intersect in the horizontal plane.

Further, in each of the above embodiments, the present invention is applied to the positioning device 1 for the table 3 that moves in the horizontal plane, but the present invention is also applicable to the table 3 that moves in a plane other than the horizontal plane.

[0062]

As described above, according to the present invention,
At least one of a moving body and a solid body that can be relatively displaced in a direction along a straight line included in a plane orthogonal to the facing direction and in a rotation direction around an arbitrary axis parallel to the facing direction. Fixes a plurality of magnets so that the S poles and the N poles are alternately arranged in a direction along one straight line, and the other one of the moving body and the solid body in a direction intersecting with the one straight line. Since the coils that generate the direct power in the direction along the straight line with the magnet are fixed to each of the at least two positions separated in the other direction along the plane, it is not necessary to form a multi-stage configuration. Since the moving body can be displaced and positioned in a plurality of directions, the size and weight of the device will not be significantly increased, and the linear guide and the like will not be required, and the entire device will be simplified. For further miniaturization There is an effect that is advantageous Te order.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a first exemplary embodiment of the present invention.

FIG. 2 is a diagram illustrating a relationship between a permanent magnet and a coil.

FIG. 3 is a diagram illustrating a configuration of an air bearing.

FIG. 4 is a block diagram showing a circuit configuration.

FIG. 5 is a diagram illustrating a displacement direction.

FIG. 6 is a diagram illustrating a conversion relationship between angular displacement and linear displacement.

FIG. 7 is a diagram showing a configuration of a second exemplary embodiment of the present invention.

FIG. 8 is a diagram showing a configuration of a third exemplary embodiment of the present invention.

FIG. 9 is a diagram showing a configuration of a fourth exemplary embodiment of the present invention.

FIG. 10 is a diagram showing a configuration of a fifth exemplary embodiment of the present invention.

[Explanation of symbols]

 1 Positioning device 2 Bed (fixed body) 3 Table (moving body) 4A to 4D Permanent magnet 5A to 5D Coil unit 5a to 5c Coil 7A to 7C Position sensor 10 Controller

Claims (1)

[Claims] 1. A fixed body and a movable body which are in contact with each other or are not in contact with each other and which are opposed to each other, and an arbitrary axis parallel to a direction along a straight line included in a plane orthogonal to the opposed direction. At least relative displacement is possible with respect to the rotational direction of rotation, and a plurality of magnets are arranged on one of the moving body and the solid body so that S poles and N poles are alternately arranged in a direction along the straight line. And the other of the movable body and the fixed body, at the at least two positions separated in the other direction along the plane which is a direction intersecting with the one straight line, the magnet and A positioning device, wherein a coil for generating a linear force in a direction along the straight line is fixed between the coils.