JPH09297094A - Material tester with high magnification microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To observe a test piece with a high magnification in a material tester having a high magnification microscope, by eliminating influences of vibrations of an oil pressure source, etc., while maintaining a state in which a load is impressed to the test piece. SOLUTION: A pressure oil from an oil pressure source 11 is supplied to a servo valve 10 driving an actuator 1, and a load is impressed to a test piece T. An accumulator 13 is connected to a conduit between the oil pressure source 11 and servo valve 10. The pressure is accumulated in the accumulator 13 while the pressure oil is supplied to the servo valve 10. Even if the oil pressure source is stopped driving when the test piece T is observed, the pressure is supplied to the servo valve 10 from the accumulator 13, so that the loaded state is maintained. An image of the test piece can be observed by a scanning electron microscope 7 without non-sharpness due to vibrations.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a material testing machine with a high-power microscope such as an SEM (scanning electron microscope) or an AFM (atomic force microscope), and particularly to a test piece under a load. The present invention relates to a material testing machine equipped with a high-power microscope suitable for observation.

[0002]

2. Description of the Related Art For example, a servo actuator is driven by pressure oil supplied from a hydraulic power source, a load is applied to a test piece by this actuator, a surface of the test piece is captured by a high-power microscope, and a display device such as a CRT is displayed. There is known a material testing machine with a high-power microscope that displays a magnified image of the surface of a test piece. In such a material testing machine, when observing the surface of the test piece while controlling the displacement of the test piece, the actuator is mechanically fixed at a predetermined position so that the test piece does not displace and the test is performed with a high-power microscope. Observe one surface. If the hydraulic power source is driven during this observation, the material testing machine itself will also vibrate due to vibration of the hydraulic power source and piping equipment. In this case, the magnification of the electron microscope is 10
There is no problem if it is about 0 to 1000 times, but if observation is performed at a magnification of several thousand times or more, an image obtained by a high magnification microscope will be blurred. Therefore, at the time of observing the test piece, the drive of the hydraulic pressure source may be stopped to remove the vibration.

[0003]

However, when observing the surface of the test piece while holding the load applied to the test piece, it is necessary to always keep the load applied to the test piece. You can't stop the source.
If the hydraulic power source cannot be stopped in this way, the vibration of the hydraulic power source vibrates the tester and also the test piece, and the image observed by the electron microscope is blurred. On the other hand, in order to obtain an observation image without blurring, the magnification of the electron microscope had to be reduced, and the test piece could not be observed at high magnification.

It is an object of the present invention to provide a material testing machine with a high-power microscope, which enables observation of a test piece at high magnification even when a load is applied to the test piece.

[0005]

FIG. 1 shows an embodiment of the present invention.
2 will be described with reference to FIG.
An actuator 1 that loads a pressure oil, a hydraulic pressure source 11 that supplies pressure oil to the actuator 1, and a control valve 8 that controls the pressure oil supplied from the hydraulic pressure source 11 to the actuator 1 to control the load applied to the test piece T. And a high-magnification microscope 7 for observing the surface of the test piece T.
The pressure oil is accumulated when the pressure oil is supplied to the
The above object is achieved by including an accumulator 13 that supplies pressure oil to the actuator 1 via the control valve.

According to the present invention, the pressure oil is supplied from the accumulator 13 to the actuator 1 even when the supply of the pressure oil from the hydraulic power source 11 to the actuator is stopped, so that the load is applied to the test piece T. Is maintained.

In the section of the means for solving the above-mentioned problems, which explains the configuration of the present invention, the drawings of the embodiments of the present invention are used to make the present invention easy to understand. However, the present invention is not limited to this.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a partial sectional view showing the configuration of an embodiment of a material testing machine with a high magnification microscope according to the present invention. As shown in FIG. 1, a material testing machine with a high-power microscope has an actuator 1 that applies a load to a test piece T.
And a load / displacement sensor 2 such as a load cell for measuring the load applied to the test piece T and the displacement of the test piece T, a test piece holding mechanism 3 for holding the test piece T, an actuator 1, and a load / displacement sensor 2. , And the mounting table 4 for holding the test piece holding mechanism 3 and the mounting table 4 via the spring 5 for vibration isolation.
And a scanning electron microscope 7 for observing the surface of the test piece T on which a load is applied. The actuator 1 is connected to the hydraulic circuit 8, and the load / displacement sensor 2 is connected to the measurement / control device 9 together with the hydraulic circuit 8. At least the observation site of the test piece T is housed in the vacuum chamber 20.

FIG. 2 is a circuit diagram showing details of the hydraulic circuit 8. As shown in FIG. 2, the hydraulic circuit 8 includes a servo valve 10 that controls pressure oil for driving the actuator 1, a hydraulic pressure source 11 that supplies pressure oil to the servo valve 10, and a hydraulic pressure source 11
Stop valve 12 for adjusting the amount of pressure oil supplied to the servo valve 10, the accumulator 13 connected to the downstream side of the stop valve 12, and the pressure sensor 14 for detecting the pressure of the pressure oil upstream of the stop valve 12. And a pressure sensor 15 for detecting the pressure of the pressure oil on the downstream side of the stop valve 12. The hydraulic power source 11 includes a hydraulic pump 11a, a motor 11b that drives the pump 11a, and a relief valve 11c that defines the maximum value of the circuit pressure. Under load control, the servo valve 10
Controls the pressure oil so that the detected load reaches the target value.

The opening / closing of the stop valve 12 is controlled by the measuring / controlling device 9, whereby the flow rate of the pressure oil supplied to the servo valve 10 is controlled. Then, the actuator 1 applies a load to the test piece T according to the pressure of the supplied pressure oil. Further, the accumulator 13 has a stop valve 12
The pressure oil accumulated when the stop valve 12 is opened is supplied to the servo valve 10 when the stop valve 12 is closed. In addition, the capacity of the accumulator 13 is such that the servo valve 10 is closed even when the stop valve 12 is closed.
It is necessary to supply a predetermined pressure to the actuator 1 via the, to accumulate a sufficiently high pressure so that the load applied to the test piece T is retained, and to determine the leak of the servo valve 10 in consideration.

Next, the operation of this embodiment will be described. First, the test piece T is held in the test piece holding mechanism 3.
After that, the stop valve 12 is opened by the measurement / control device 9, and the pressure oil from the hydraulic pressure source 11 is supplied to the servo valve 10. As a result, the actuator 1 is driven, and a load corresponding to the pressure of the pressure oil controlled by the servo valve 10 is applied to the test piece T. Then, the load / displacement sensor 2 measures the load applied to the test piece T and the displacement of the test piece T. At this time, the pressure oil is also supplied to the accumulator 13, whereby the accumulator 13 accumulates pressure.

When observing the surface of the test piece T with the scanning electron microscope 7, the measurement / control device 9 performs the processing shown in the flowchart of FIG. First, in step S1, the observation mode is selected, for example, by an operation button (not shown). In step S2, the stop valve 12 is closed to stop the supply of pressure oil to the servo valve 10, and in step S3, the drive of the motor 11b that drives the hydraulic pump 11a is stopped to suppress the vibration of the hydraulic source 11 or the piping. Eliminate the effects. Then, in step S4, the target load value at that time is held. As described above, in the state in which the supply of the pressure oil to the servo valve 10 is stopped, sufficient pressure oil is applied to the servo valve 10 from the accumulator 13 to the actuator 1 to load the test piece T with the target load. Will be supplied through. Therefore, even if the supply of pressure oil from the hydraulic pressure source 11 to the servo valve 10 is stopped, the actuator 1 is substantially in the same state as being driven, and the target load is applied to the test piece T. You can call. In this state, the servo valve 10 is controlled in step S5 so that the load value detected by the load / displacement sensor 2 becomes the target value.

In this state, since the hydraulic power source 11 is stopped, the influence of vibration disappears, and by observing the surface of the test piece T with the scanning electron microscope 7, the load is applied to the test piece T even at high magnification. It is possible to obtain a good observation image without blurring while maintaining the state of being loaded. During the observation of the test piece T, in step S6, the pressure sensor 1
It is determined whether or not the detected pressure of 5 is below a predetermined value,
If the load is below the predetermined value, the target load cannot be applied to the test piece T, so an alarm is issued in step S7 to warn the operator that the load under the predetermined value. If step S6 is denied, it is further determined in step S8 whether or not the observation mode has been completed. If it is determined that the observation mode has not been completed, the processing from step S5 to step S8 is repeated again.

After the observation of the test piece T is finished, in order to restart the load on the test piece T, the observation mode is canceled by an operation button (not shown). As a result, step S8 is affirmed, and the motor 11b is started in step S9. At this time, when the pressure of the accumulator 13 is reduced, the pressure supplied to the servo valve 10 is also reduced, and thus noise may be mixed into the load of the test piece T due to a rapid pressure change. There is. Therefore, in step S10, the stop valve 12 is gradually opened so that a sudden load does not act on the test piece T. Then, in step S11, it is determined whether or not the stop valve 12 is fully opened, and when it is determined that the stop valve 12 is fully opened, the processing ends.

In this case, the processing may be performed as shown in the flowchart of FIG. That is, in step S20 after step S9 in FIG.
The pressures of the pressure oils on the upstream side and the downstream side of the stop valve 12 are detected by 4 and 15, and it is determined whether or not the pressures of both are substantially the same. If it is determined that they are not the same, step S2
In step 1, the discharge pressure of the hydraulic pressure source 11 is lowered, and the determination in step S20 is performed again. When step S20 is affirmed, the stop valve 12 is opened in step S22, it is judged in step S23 whether the stop valve 12 is fully opened, and when it is fully opened, the processing is ended.

In the above embodiment, measurement / measurement
Although the hydraulic pressure source 11 and the stop valve 12 are automatically driven by the control device 9, the hydraulic pressure source 11 and the stop valve 1
It is also possible to drive 2 manually.

In the correspondence between the above embodiment and the claims, the servo valve 10 constitutes a control valve.

[0018]

As described in detail above, according to the present invention, even if the supply of pressure oil from the hydraulic source to the actuator is stopped, the pressure oil is supplied from the accumulator to the actuator via the control valve. Therefore, it is possible to observe the test piece while maintaining the state in which the load is applied to the test piece.
Therefore, it is possible to observe the test piece at a high magnification without eliminating the blurring of the observation image due to the vibration of the hydraulic power source and the piping equipment.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional view showing the configuration of a material testing machine with a high magnification microscope according to an embodiment of the present invention.

FIG. 2 is a circuit diagram showing a configuration of a hydraulic circuit.

FIG. 3 is a flowchart showing processing performed in the measurement / control device.

FIG. 4 is a flowchart showing another process performed by the measurement / control device.

[Explanation of symbols]

 1 Actuator 2 Load / displacement sensor 3 Test piece holding mechanism 4 Mounting table 5 Spring 7 Scanning electron microscope 8 Hydraulic circuit 9 Measurement / control device 10 Servo valve 11 Hydraulic power source 12 Stop valve 13 Accumulator 14, 15 Pressure sensor

Claims (1)

[Claims] 1. An actuator for loading a test piece, a hydraulic source for supplying pressure oil to the actuator, and a load applied to the test piece by controlling the pressure oil supplied from the hydraulic source to the actuator. In a material testing machine with a high-power microscope equipped with a control valve for controlling and a high-power microscope for observing the surface of the test piece, pressure oil is accumulated when pressure oil is supplied from the hydraulic pressure source to the actuator, A material testing machine with a high-magnification microscope, comprising an accumulator that supplies pressure oil to the actuator via the control valve when pressure oil supply is stopped.