JPH09281318A - Production of color filter - Google Patents

Production of color filter

Info

Publication number
JPH09281318A
JPH09281318A JP9806796A JP9806796A JPH09281318A JP H09281318 A JPH09281318 A JP H09281318A JP 9806796 A JP9806796 A JP 9806796A JP 9806796 A JP9806796 A JP 9806796A JP H09281318 A JPH09281318 A JP H09281318A
Authority
JP
Japan
Prior art keywords
color filter
photosensitive resin
ozone
producing
filter according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9806796A
Other languages
Japanese (ja)
Inventor
Naoki Sako
迫  直樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP9806796A priority Critical patent/JPH09281318A/en
Publication of JPH09281318A publication Critical patent/JPH09281318A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To suppress and control the residue of a photosensitive resin remaining after development and to improve the production yield of a color filter. SOLUTION: In this production method, a black matrix is formed on a transparent supporting body, and then color pixels are formed by photolithography using a photosensitive resin in which red, green and blue pigments are dispersed on the supporting body. Before the photosensitive resin is applied, the surface to be coated is treated with ozone to control the contact angle with water to between >=12 deg. and <=40 deg. in the area where no pixel is formed. The ozone treatment is carried out in an atmosphere of >=1ppm ozone concn, at >=30 deg.C and for >=30sec. Further, the treatment is carried out in such an environment containing <=1000 particles per 1 cubic foot of particles having >=0.5μm particle size.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、液晶ディスプレイ
装置、その他、精密電子機器の電気光学表示装置用カラ
ーフィルターの製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and a method of manufacturing a color filter for an electro-optical display device of precision electronic equipment.

【0002】[0002]

【従来の技術】液晶ディスプレイ装置などに用いられる
カラーフィルターの製造方法には、顔料分散法、染色
法、電着法、印刷法等があるが、分光特性、耐久性、パ
ターン形状及び精度等の点で平均的に優れた特性を有す
る顔料分散法が最も広範に用いられている。
2. Description of the Related Art There are pigment dispersion method, dyeing method, electrodeposition method, printing method and the like as a method of manufacturing a color filter used in a liquid crystal display device, etc., but there are spectral characteristics, durability, pattern shape and accuracy. The most widely used method is a pigment dispersion method, which has excellent properties on average in terms of points.

【0003】以下に顔料分散法の概要を説明する。通
常、最初にクロムや酸化クロム等の金属遮光膜によりガ
ラス基板等の透明支持体上にブラックマトリックスを形
成し、次いで例えば赤の顔料を分散させた感光性樹脂を
スピンコートで全面に塗布し、マスクを介して露光す
る。露光後に現像を行うと赤の画素が得られる。これと
同様の工程をを緑、青の画素についても行うと3色の画
素が形成される。各画素間はブラックマトリックス部が
凹部となるので、平滑化のためエポキシ樹脂、アクリル
樹脂等の透明樹脂のオーバーコート膜で被覆する。オー
バーコート膜は設けない場合もある。更に、オーバーコ
ート膜上にスパッタリングや真空蒸着等でITO膜等の
透明導電膜を形成する。
The outline of the pigment dispersion method will be described below. Usually, a black matrix is first formed on a transparent support such as a glass substrate by a metal light-shielding film such as chromium or chromium oxide, and then, for example, a photosensitive resin in which a red pigment is dispersed is spin-coated on the entire surface, Exposing through a mask. When the image is developed after exposure, red pixels are obtained. When the same process is performed for green and blue pixels, three color pixels are formed. Since the black matrix portion becomes a recess between each pixel, it is covered with an overcoat film of a transparent resin such as an epoxy resin or an acrylic resin for smoothing. The overcoat film may not be provided in some cases. Further, a transparent conductive film such as an ITO film is formed on the overcoat film by sputtering or vacuum deposition.

【0004】又、上記ブラックマトリックスの形成方法
としては、上記金属遮光膜による方法以外に、カーボン
ブラック等の黒色顔料を分散させた感光性樹脂を用いる
方法が提案されている。この方法によれば、スパッタリ
ング等の設備、電力の削減、クロム含有廃液処理が不要
である等、大幅なコスト低減が実現でき且つ環境保全面
での利点が大である。
As a method of forming the black matrix, a method of using a photosensitive resin in which a black pigment such as carbon black is dispersed has been proposed in addition to the method of using the metal light shielding film. According to this method, it is possible to realize a significant cost reduction such as equipment such as sputtering, reduction of electric power, and treatment of waste liquid containing chromium, and there are great advantages in environmental protection.

【0005】[0005]

【発明が解決しようとする課題】カラーフィルターの製
造プロセスにおける問題点として、欠陥と感光性樹脂膜
の残渣が挙げられる。欠陥の一種である白欠陥のうち画
素の欠け、剥がれについては通常感光性樹脂と透明支持
体との密着性を上げることにより改善される。一方、感
光性樹脂膜の残渣については逆に通常感光性樹脂と透明
支持体の密着性を下げることによって改善される。即
ち、画素の欠け、剥がれと感光性樹脂膜の残渣はいわゆ
るトレードオフ(二者択一)の関係にある。
Problems in the manufacturing process of the color filter include defects and residues of the photosensitive resin film. Among the white defects, which is one type of defects, the chipping and peeling of pixels are usually improved by increasing the adhesion between the photosensitive resin and the transparent support. On the other hand, the residue of the photosensitive resin film is generally improved by lowering the adhesion between the photosensitive resin and the transparent support. That is, there is a so-called trade-off (alternate choice) between the chipping and peeling of the pixel and the residue of the photosensitive resin film.

【0006】感光性樹脂と透明支持体の密着性について
は、通常、樹脂の組成改良等によって最適化され、画素
の欠け、剥がれと樹脂膜残渣の双方が最適となるような
条件で管理される。しかし、特に1色以上の画素が形成
された後に次の画素を形成する場合、前の色の樹脂膜残
渣が次の画素と支持体との間に強い接着作用を示すた
め、次の色の感光性樹脂と透明支持体の密着性が非常に
高くなり、次の色の樹脂膜残渣が大きく増加し、樹脂の
組成改良だけではコントロールが困難なレベルに達す
る。又、ブラックマトリックスに感光性樹脂を用いる際
には、塗布から露光、現像のプロセスが一工程増えるこ
とにより、残渣がより一層増幅され、最終的には目視で
はっきり確認できる程度の樹脂膜残渣が残留するという
問題点が生じる。
The adhesion between the photosensitive resin and the transparent support is usually optimized by improving the composition of the resin and the like, and is controlled under the condition that both chipping and peeling of pixels and resin film residue are optimized. . However, particularly when the next pixel is formed after the pixels of one or more colors are formed, the resin film residue of the previous color has a strong adhesive action between the next pixel and the support, and therefore The adhesion between the photosensitive resin and the transparent support becomes very high, the resin film residue of the next color increases greatly, and it becomes difficult to control the resin composition only by improving the composition. In addition, when a photosensitive resin is used for the black matrix, the process of coating, exposure, and development is increased by one step, so that the residue is further amplified, and finally there is a resin film residue that can be clearly confirmed visually. The problem of remaining remains.

【0007】こうした残渣が残留した場合、TFTアレ
イとの貼り付け時の接着性を低下させ、シールが悪化す
るという問題が生じる。又、残渣上に他の色の画素を重
ねることになるので、画素の色調が変わる恐れがある。
カラーフィルターの製造方法において、感光性樹脂の塗
布前に被塗布面にUV光を照射し表面改質を行った後、
塗布に供する方法が特開平2−294602に提案され
ている。しかしながら、この方法では基板上の有機物汚
染を除去することに主眼が置かれているため、UV照射
時間が長く、感光性樹脂の密着性が低下して、欠け、剥
がれ等の白欠陥が逆に増加してしまい好ましくなかっ
た。
[0007] When such a residue remains, there arises a problem that the adhesiveness at the time of attachment to the TFT array is deteriorated and the sealing is deteriorated. In addition, since pixels of other colors are superimposed on the residue, the color tone of the pixels may change.
In the method of manufacturing a color filter, the surface to be coated is irradiated with UV light before being coated with the photosensitive resin to modify the surface,
A method for coating is proposed in JP-A-2-294602. However, since this method focuses on removing organic contaminants on the substrate, the UV irradiation time is long, the adhesiveness of the photosensitive resin is reduced, and white defects such as chipping and peeling are reversed. It increased, which was not preferable.

【0008】又、カラーフィルターをUV照射により洗
浄し、表面改質を行う方法が特開昭63−16203
8、特開平5−134397及び特開平5−22416
7に提案されている。これらの方法によれば、UV照射
処理後の「ぬれ性」が改善されるため、微粒子、有機物
等の汚染物質の洗浄効果は向上するが、逆に後工程にお
ける感光性樹脂の密着性については先述同様低下するた
め、欠け、剥がれ等の白欠陥が増加する傾向にある。
Further, there is a method of cleaning the color filter by UV irradiation to modify the surface thereof, as disclosed in JP-A-63-16203.
8, JP-A-5-134397 and JP-A-5-22416
Proposed in 7. According to these methods, the “wettability” after UV irradiation treatment is improved, so the cleaning effect of contaminants such as fine particles and organic substances is improved, but conversely, regarding the adhesion of the photosensitive resin in the subsequent step, Since it decreases as described above, white defects such as chipping and peeling tend to increase.

【0009】本発明の目的は、前記の問題点に鑑み、前
の色の樹脂膜残渣の接着作用を制御し、次の色と支持体
の間の密着性を最適化することにより、画素の欠け、剥
がれと樹脂膜残渣とのコントロールを可能にし、ひいて
は全色形成後の画素の欠け、剥がれ及び樹脂膜残渣をも
最も好ましい状態に制御することができるカラーフィル
ターの製造方法を提供することにある。
In view of the above problems, an object of the present invention is to control the adhesive action of the resin film residue of the previous color and optimize the adhesion between the next color and the support, thereby To provide a method for manufacturing a color filter that enables control of chipping, peeling, and resin film residue, and can control pixel chipping, separation, and resin film residue after forming all colors to the most preferable state. is there.

【0010】[0010]

【問題点を解決するための手段】本発明者らは、上述の
如き問題点を解決するために種々検討を重ねた結果、感
光性樹脂の塗布前に被塗布面に対して特定状態をもたら
す如くオゾン処理を施すことにより、該感光性樹脂と被
塗布面との密着性が低下し、ひいては樹脂膜残渣量を制
御できることを見いだし本発明に到達した。
As a result of various studies to solve the above-mentioned problems, the inventors of the present invention bring a specific state to the surface to be coated before coating the photosensitive resin. By carrying out such ozone treatment, it was found that the adhesion between the photosensitive resin and the surface to be coated is lowered, and consequently the amount of resin film residue can be controlled, and the present invention was reached.

【0011】即ち、本発明の要旨は、透明支持体上にブ
ラックマトリックスを形成した後、該支持体上に、赤、
緑、青の顔料を分散させた感光性樹脂を用いてフォトリ
ソグラフィーによりカラー画素を形成させカラーフィル
ターを製造する方法において、感光性樹脂の塗布前に被
塗布面をオゾン処理し、被塗布面の画素のない部分に対
する水の接触角を下限は12°以上好ましくは15°以
上、上限は40°以下好ましくは30°以下にすること
を特徴とするカラーフィルターの製造方法に存する。
That is, the gist of the present invention is that after a black matrix is formed on a transparent support, a red matrix is formed on the support.
In a method for producing a color filter by forming color pixels by photolithography using a photosensitive resin in which green and blue pigments are dispersed, in a method for producing a color filter, the surface to be coated is treated with ozone before coating the photosensitive resin, A method for producing a color filter is characterized in that a contact angle of water with respect to a portion without pixels is set to a lower limit of 12 ° or more, preferably 15 ° or more, and an upper limit of 40 ° or less, preferably 30 ° or less.

【0012】以下、本発明を詳細に説明する。本発明に
おけるカラーフィルターは、顔料分散法によって製造さ
れるものであり、用いられる感光性樹脂としては、通
常、アクリル系樹脂もしくはポリイミド系樹脂等をバイ
ンダー成分とし、着色顔料、顔料分散剤、光照射により
重合反応を開始させる光重合開始剤、及び、希釈溶媒等
を混合してなるものである。透明支持体としては、通
常、ガラスが用いられ、好ましくは無アルカリガラスが
用いられる。又、ブラックマトリックスは、通常、クロ
ム等の金属遮光膜やカーボンブラック等の黒色成分を含
有した樹脂膜から形成され、好ましくは、黒色顔料を分
散させた感光性樹脂を用いて形成される。
Hereinafter, the present invention will be described in detail. The color filter in the present invention is manufactured by a pigment dispersion method, and the photosensitive resin used is usually an acrylic resin or a polyimide resin as a binder component, a coloring pigment, a pigment dispersant, and light irradiation. Is a mixture of a photopolymerization initiator for initiating the polymerization reaction, a diluting solvent and the like. As the transparent support, glass is usually used, and preferably alkali-free glass is used. The black matrix is usually formed of a metal light-shielding film such as chromium or a resin film containing a black component such as carbon black, and is preferably formed using a photosensitive resin in which a black pigment is dispersed.

【0013】本発明における水の接触角とは、直径1〜
2mmの水滴を直近で滴下し、30秒後に直視法によっ
て読みとった接触角である。ここで用いられる水とは、
比抵抗18MΩ以上の純水が用いられる。又、本発明の
オゾン処理は、基本的には感光性樹脂の塗布前に行えば
良く、より具体的にはブラックマトリックスもしくはカ
ラー画素を有する表面に対して、次のカラー画素を形成
する前に行われる。従って、最も完全には、ブラックマ
トリックス形成後、第1色画素形成後及び第2色画素形
成後の3回行っても良く、又前回の工程で形成された非
着色領域の汚れが問題にならなければその時点での処理
は省略しても良い。なお、ブラックマトリックス形成前
の支持体に対する本発明の処理は通常不要であるが、本
発明はこれを排除するものでもない。オゾン処理に際し
ては、通常、室温に近い温度環境下にて行われるが、本
発明においては好ましくは30℃以上の温度環境下でな
される。オゾン濃度については、本発明の目的が達成さ
れる限り、場合に応じて適当な濃度を選択して良いが、
通常は1ppm以上、より好ましくは3ppm以上の濃
度条件下で処理がなされる。又、処理時間についても、
適当な時間が設定されるが、好ましくは、30秒以上、
より好ましくは1分以上の処理がなされる。又、欠陥等
の主原因であるパーティクルの付着を防止するために、
通常、該オゾン処理はクリーンな環境下で行われ、好ま
しくは、0.5μmのパーティクル存在量が1立方フィ
ート内に1000個以下(クラス1000)の雰囲気下
で、より好ましくは100個以下(クラス100)の雰
囲気下でなされる。又、被処理基板のオゾン処理槽への
導入は、通常、1枚ずつ移送できる移送手段によって順
次槽内へ導入する枚葉搬送によってなされ、且つ、該移
送手段上に載せて順次移送、退出させながら連続でオゾ
ン処理を行う方法が工業的には好ましく用いられるが、
これに限定されるものではない。
The contact angle of water in the present invention means a diameter of 1 to
It is the contact angle read by a direct-viewing method after a water drop of 2 mm was dropped most recently and 30 seconds later. The water used here is
Pure water having a specific resistance of 18 MΩ or more is used. The ozone treatment of the present invention may be basically performed before the application of the photosensitive resin, and more specifically, before forming the next color pixel on the surface having the black matrix or the color pixel. Done. Therefore, most completely, the black matrix formation, the first color pixel formation and the second color pixel formation may be performed three times, and if the stain in the non-colored area formed in the previous step is not a problem. If not, the processing at that point may be omitted. The treatment of the present invention on the support before the formation of the black matrix is usually unnecessary, but the present invention does not exclude it. The ozone treatment is usually carried out in a temperature environment close to room temperature, but in the present invention, it is preferably carried out in a temperature environment of 30 ° C. or higher. Regarding the ozone concentration, an appropriate concentration may be selected depending on the case as long as the object of the present invention is achieved,
The treatment is usually performed under a concentration condition of 1 ppm or more, more preferably 3 ppm or more. Also, regarding the processing time,
An appropriate time is set, but preferably 30 seconds or more,
More preferably, the treatment is performed for 1 minute or more. In order to prevent the adhesion of particles, which is the main cause of defects,
Usually, the ozone treatment is performed in a clean environment, preferably in an atmosphere in which the amount of particles of 0.5 μm is 1000 or less (class 1000) within 1 cubic foot, and more preferably 100 or less (class). 100) under the atmosphere. Further, the substrate to be processed is introduced into the ozone treatment tank by a single-wafer conveyance in which the substrate is sequentially introduced into the tank by a transfer means capable of transferring one by one, and the substrate is placed on the transfer means and sequentially transferred and withdrawn. While a method of continuously performing ozone treatment is preferably used industrially,
It is not limited to this.

【0014】本発明におけるオゾンの供給法について
は、通常、254nm及び185nm、もしくは172
nmを主波長とするUV照射によって空気中の酸素を分
解することにより発生させるが、他の波長のUVを用い
てもよく、又、アーク放電等の他の方法により供給を行
っても何ら差し支えない。又、本発明におけるオゾン処
理は、他の処理法と併用させてもよく、その結果、接触
角が上記条件を満たしていればよい。尚、他の処理法と
しては、例えば水、酸、アルカリ、洗剤等の湿式洗浄や
超音波洗浄、メガソニック洗浄、ブラシスクラブ洗浄、
キャビテーションジェット等の物理力洗浄、及び熱風乾
燥、遠赤外線乾燥等が挙げられるが、これらに限定され
るものではない。又、該処理はオゾン処理の前後どちら
で行ってもよい。
Regarding the method of supplying ozone in the present invention, it is usually 254 nm and 185 nm, or 172 nm.
It is generated by decomposing oxygen in the air by UV irradiation having a wavelength of nm as the main wavelength, but UV of other wavelength may be used, and it may be supplied by another method such as arc discharge. Absent. Further, the ozone treatment in the present invention may be used in combination with other treatment methods, and as a result, the contact angle may satisfy the above conditions. Other treatment methods include, for example, wet cleaning with water, acid, alkali, detergent, etc., ultrasonic cleaning, megasonic cleaning, brush scrub cleaning,
Examples of the method include, but are not limited to, physical force cleaning such as cavitation jet, hot air drying, and far infrared ray drying. The treatment may be performed before or after the ozone treatment.

【0015】本発明におけるオゾン処理によって、感光
性樹脂と被塗布面の密着性が低下する理由については未
だ明らかではないが、オゾン処理によって被塗布面が親
水化され、疎水性である感光性樹脂の密着が悪くなると
同時に、水系現像液の浸透が促進されるため、剥がれ易
さが向上したものと推定される。一方、水の接触角は、
表面の親水性を表す指標であるから、これを制御するこ
とによって表面状態即ち密着性のコントロールがなされ
るものと推察される。
Although the reason why the adhesion between the photosensitive resin and the surface to be coated is lowered by the ozone treatment in the present invention is not clear yet, the surface of the coating is made hydrophilic by the ozone treatment and the photosensitive resin is hydrophobic. It is presumed that the ease of peeling is improved because the adhesion of the aqueous solution is deteriorated and, at the same time, the penetration of the aqueous developer is promoted. On the other hand, the contact angle of water is
Since it is an index showing the hydrophilicity of the surface, it is presumed that the surface condition, that is, the adhesion is controlled by controlling this.

【0016】[0016]

【実施例】次に実施例を用いて、本発明の具体的態様を
説明するが、本発明はその要旨を越えない限り以下の実
施例により何ら限定されるものではない。
EXAMPLES Next, specific embodiments of the present invention will be described with reference to examples, but the present invention is not limited to the following examples unless it exceeds the gist thereof.

【0017】(実施例−1、2及び比較例−1〜3)ア
クリル系樹脂を主成分とし、カーボンブラックを分散さ
せた感光性樹脂を370×470×0.7mmt(旭硝
子製AN−635)のガラス板に1.0μmの膜厚でス
ピンコートにより均一塗布した後、露光、現像を行いブ
ラックマトリックスを形成した。該ブラックマトリック
スを完全に硬化させる目的で200℃にて10分間熱風
乾燥を行った。この後、185nm及び254nmを主
波長とするUV照射により5ppmのオゾン雰囲気を作
り(UV光源とガラスの間の距離は10mm)、該ブラ
ックマトリックス付き基板を水平搬送ローラーに載せて
表−1の通りオゾン雰囲気中の通過時間を変化させて水
の接触角が異なる基板を作成した。
(Examples 1, 2 and Comparative Examples-1 to 3) A photosensitive resin containing acrylic resin as a main component and carbon black dispersed therein was 370 × 470 × 0.7 mmt (AN-635 manufactured by Asahi Glass). After uniformly coating the above glass plate with a film thickness of 1.0 μm by spin coating, exposure and development were performed to form a black matrix. Hot air drying was carried out at 200 ° C. for 10 minutes for the purpose of completely curing the black matrix. After this, an ozone atmosphere of 5 ppm was created by UV irradiation with the main wavelengths of 185 nm and 254 nm (the distance between the UV light source and the glass was 10 mm), and the substrate with the black matrix was placed on a horizontal transport roller as shown in Table-1. Substrates having different water contact angles were prepared by changing the passage time in the ozone atmosphere.

【0018】表−1にこれらの各場合に得られた基板表
面の接触角を示す。なお、接触角の測定は、ガラス面に
注射針先端を可及的に近づけ、ガラス面の露出領域広さ
が十分あるガラス板周縁部に直径約1mmの比抵抗18
MΩ以上の純水の水滴を滴下し、30秒後に直視法によ
って判定した。こうしてオゾン処理を施したブラックマ
トリックス付き基板(実施例−1及び2、比較例−2及
び3)及びオゾン処理を行わなかった基板(比較例−
1)に、アクリル系樹脂を主成分とし、赤の顔料を分散
させた感光性樹脂を1.5μmの膜厚でスピンコートに
より塗布し、露光、現像を行い赤色の画素を形成した。
表−2に赤色画素上の1000μm2 以上の面積を有す
る白欠け及び剥がれの個数と、感光性樹脂の残渣量を示
す。
Table 1 shows the contact angles of the substrate surface obtained in each of these cases. The contact angle was measured by bringing the tip of the injection needle as close as possible to the glass surface, and by applying a specific resistance of about 1 mm to the peripheral edge of the glass plate, which has a sufficient exposed area of the glass surface.
A water drop of pure water of MΩ or more was dropped, and 30 seconds later, it was judged by a direct visual method. Substrates with black matrix thus treated with ozone (Examples 1 and 2, Comparative Examples 2 and 3) and substrates not treated with ozone (Comparative Example-
In 1), a photosensitive resin containing an acrylic resin as a main component and a red pigment dispersed therein was applied by spin coating to a film thickness of 1.5 μm, exposed and developed to form red pixels.
Table 2 shows the number of white chips and peelings having an area of 1000 μm 2 or more on the red pixel and the amount of the residual photosensitive resin.

【0019】[0019]

【表1】 [Table 1]

【0020】[0020]

【表2】 [Table 2]

【0021】(実施例−3〜4及び比較例−4〜6)3
70×470×0.7mmtのガラス(旭硝子製AN−
635)に酸化クロム膜をスパッタリングにより成膜
し、ブラックマトリックスを形成した後、アクリル系樹
脂を主成分とし、赤色顔料を分散させた感光性樹脂を
1.0μmの膜厚でスピンコートにより均一塗布し、露
光、現像を行い赤色の画素を形成した。該赤色画素を硬
化させる目的で200℃にて10分間熱風乾燥を行っ
た。この後、185nm及び254nmを主波長とする
UV照射により5ppmのオゾン雰囲気を作り(UV光
源とガラスの間の距離は10mm)、該赤色画素付き基
板を水平搬送ローラーに載せて表−3の通りオゾン雰囲
気中の通過時間を変化させて処理した。
(Examples 3 to 4 and Comparative Examples 4 to 6) 3
70 x 470 x 0.7 mmt glass (AN- manufactured by Asahi Glass
635), a chromium oxide film is formed by sputtering to form a black matrix, and then a photosensitive resin containing an acrylic resin as a main component and a red pigment dispersed therein is uniformly applied by spin coating to a film thickness of 1.0 μm. Then, exposure and development were performed to form red pixels. Hot air drying was performed at 200 ° C. for 10 minutes for the purpose of curing the red pixels. After this, an ozone atmosphere of 5 ppm was created by UV irradiation with main wavelengths of 185 nm and 254 nm (the distance between the UV light source and the glass was 10 mm), and the substrate with red pixels was placed on a horizontal transport roller, as shown in Table-3. The treatment was performed by changing the passage time in the ozone atmosphere.

【0022】表−3にこれらの各場合に得られた基板表
面の接触角を示す。こうしてオゾン処理を施した赤色画
素付き基板(実施例−3及び4、比較例−5及び6)及
びオゾン処理を行わなかった基板(比較例−4)上に、
アクリル系樹脂を主成分とし、緑の顔料を分散させた感
光性樹脂を1.5μmの膜厚でスピンコートにより塗布
し、露光、現像を行い緑色画素を形成した。表−4に緑
色画素上の1000μm2 以上の面積を有する白欠け及
び剥がれの個数と、緑色画素形成後の感光性樹脂の残渣
量を示す。
Table 3 shows the contact angles of the substrate surface obtained in each of these cases. On the substrate with red pixels thus treated with ozone (Examples 3 and 4, Comparative Examples 5 and 6) and the substrate not treated with ozone (Comparative Example 4),
A photosensitive resin containing an acrylic resin as a main component and a green pigment dispersed therein was applied by spin coating to a film thickness of 1.5 μm, and exposed and developed to form a green pixel. Table 4 shows the number of white chips and peelings having an area of 1000 μm 2 or more on the green pixel and the amount of the residual photosensitive resin after forming the green pixel.

【0023】[0023]

【表3】 [Table 3]

【0024】[0024]

【表4】 [Table 4]

【0025】[0025]

【発明の効果】本発明によれば、オゾン処理において感
光性樹脂塗布面に対する水の接触角を制御することによ
り、現像後の感光性樹脂残渣の残留が抑制、且つ制御さ
れるため、カラーフィルターの製造歩留りの向上が可能
となり、工業生産上利するところ大である。
According to the present invention, by controlling the contact angle of water with respect to the surface coated with the photosensitive resin in the ozone treatment, the residual of the photosensitive resin residue after development is suppressed and controlled. It is possible to improve the manufacturing yield of the product, which is a great advantage for industrial production.

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 透明支持体上にブラックマトリックスを
形成した後、該支持体上に、赤、緑、青の顔料を分散さ
せた感光性樹脂を用いてフォトリソグラフィーによりカ
ラー画素を形成させカラーフィルターを製造する方法に
おいて、感光性樹脂の塗布前に被塗布面をオゾン処理
し、被塗布面のうち画素のない部分に対する水の接触角
を12°以上40°以下にすることを特徴とするカラー
フィルターの製造方法。
1. A color filter in which a black matrix is formed on a transparent support and color pixels are formed on the support by photolithography using a photosensitive resin in which red, green and blue pigments are dispersed. In the method for producing the above method, the surface to be coated is subjected to ozone treatment before the coating of the photosensitive resin, and the contact angle of water with respect to the non-pixel portion of the surface to be coated is 12 ° or more and 40 ° or less. Filter manufacturing method.
【請求項2】 上記ブラックマトリックスは黒色の着色
剤を含有した樹脂を用いて形成されることを特徴とする
請求項1記載のカラーフィルターの製造方法。
2. The method for producing a color filter according to claim 1, wherein the black matrix is formed by using a resin containing a black colorant.
【請求項3】 上記オゾン処理は1ppm以上のオゾン
濃度雰囲気下において30℃以上の温度環境下で30秒
以上なされることを特徴とする請求項1〜2記載のカラ
ーフィルターの製造方法。
3. The method for producing a color filter according to claim 1, wherein the ozone treatment is performed for 30 seconds or more in an atmosphere having an ozone concentration of 1 ppm or more and a temperature of 30 ° C. or more.
【請求項4】 上記オゾン処理は0.5μm以上のパー
ティクル存在量が1立方フィート中に1000個以下の
環境下においてなされることを特徴とする請求項1〜3
記載のカラーフィルターの製造方法。
4. The ozone treatment is performed in an environment in which the amount of particles of 0.5 μm or more is 1000 or less in 1 cubic foot.
A method for producing the described color filter.
【請求項5】 上記オゾン処理は、被処理基板を1枚ず
つ移送する移送手段によって順次オゾン雰囲気下へ導入
移送、退出させながら行うことを特徴とする請求項1〜
4記載のカラーフィルターの製造方法。
5. The ozone treatment is carried out while sequentially introducing and withdrawing the substrate to be treated into and out of an ozone atmosphere by a transport means for transporting the substrates one by one.
4. The method for producing a color filter according to 4.
【請求項6】 上記オゾンの供給は、254nm及び1
85nm、もしくは172nmを主波長とするUV照射
によってなされることを特徴とする請求項1〜5記載の
カラーフィルターの製造方法。
6. The ozone supply is 254 nm and 1
The method for producing a color filter according to any one of claims 1 to 5, which is performed by UV irradiation having a main wavelength of 85 nm or 172 nm.
【請求項7】 上記UV照射はUV光源から被照射面ま
での距離を30mm以下に設置してなされることを特徴
とする請求項6記載のカラーフィルターの製造方法。
7. The method of manufacturing a color filter according to claim 6, wherein the UV irradiation is performed by setting the distance from the UV light source to the surface to be irradiated to 30 mm or less.
【請求項8】 上記透明支持体はガラスであることを特
徴とする請求項1〜7記載のカラーフィルターの製造方
法。
8. The method for producing a color filter according to claim 1, wherein the transparent support is glass.
JP9806796A 1996-04-19 1996-04-19 Production of color filter Pending JPH09281318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9806796A JPH09281318A (en) 1996-04-19 1996-04-19 Production of color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9806796A JPH09281318A (en) 1996-04-19 1996-04-19 Production of color filter

Publications (1)

Publication Number Publication Date
JPH09281318A true JPH09281318A (en) 1997-10-31

Family

ID=14209998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9806796A Pending JPH09281318A (en) 1996-04-19 1996-04-19 Production of color filter

Country Status (1)

Country Link
JP (1) JPH09281318A (en)

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