JPH09280485A - Supporting method and supporting mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce influence exerted on a supported member on a pedestal in the case that the pedestal is deformed by action of external force and change of circumferential temperature in a supporting method for reducing the distortion of the supported member, by bringing the supported member into contact with the end surface of at least more than one rod-like elastic supporting member. SOLUTION: Three surfaces 11a-11c are formed on a pedestal 11, three of columned elastic supporting members 13a-13f are arranged on a surface 11a for supporting the bottom surface of a square supported member 12, two thereof are arranged on a surface 11b for supporting a longitudinal side surface, and one thereof is arranged on a surface 11c for supporting an end surface. The abutment of the elastic supporting members 13d-13f is retained by a preload mechanism comprising a plate spring 14 arranged in a position opposed to the elastic supporting members 13d-13f. in the case that the pedestal 11 is deformed by external force, frictional force is worked to a contact part between the pedestal 11 and the supported member 12 by relative displacement generated between the pedestal 11 and the supported member 12, however, the elastic supporting members 13a-13f are deflected, thereby frictional force is loosed, and the supported member 12 can be prevented from being deformed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a supporting method and a supporting mechanism for reducing distortion of a supported member.

[0002]

2. Description of the Related Art When a supported member, for example, a straight edge (straight edge) used as a straight line reference is supported on a pedestal, the pedestal may be deformed by an external force or thermal stress to deform the straight edge. . In order to prevent the deformation of the straight edge due to such deformation of the pedestal, a method of abutting and supporting only a part of the straight edge has been used conventionally. FIG. 8 shows a conventionally used supporting method. A support member, that is, a land portion 3 that abuts the supported member 2 is formed on the pedestal 1 at three locations. This land part 3
Normally, the size is a few mm to a dozen mm square, and the height is 0 comma a few mm
It is about 1 mm. The supported member 2 is in contact with only the land portion 3 and is supported by the base 1. The supported member 2 is constrained so as not to move in the horizontal direction only by the frictional force acting on the contact portion with the land portion 3. FIG. 9 is a diagram showing a conventional technique for securely supporting a supported member so as not to move in the horizontal direction. As shown in FIG. 9, the pedestal 1 is provided with a support portion 1a extending in the vertical direction, and the support portion 1a is provided with a support member, that is, a land portion 4 in contact with the supported member 2. Further, in order to ensure the contact between the land portion 4 and the supported member 2, a preload mechanism such as a leaf spring 5 is provided at a position facing the land portion 4. With this configuration,
The movement of the supported member 2 in the horizontal direction can be prevented more reliably.

In order to reduce the contact area between the supporting member and the supported member, balls 6 may be used instead of the lands 3 and 4, as shown in FIG.

Further, in the method of supporting a slender supported member such as a straight edge, the position of the supporting member that supports the bottom surface of the supported member in order to support the weight of the supported member is determined by the length of the supported member. It has been theoretically proved that the deformation of the supported member due to its own weight can be minimized by setting the position to about (2/9) * L (L is the length of the supported member) from the end face of the supported member in the direction. There is.

[0005]

However, in the conventional supporting method, since the frictional force acting on the contact portion between the supporting member such as the land portion and the ball and the supported member acts as an excessive restraining force, the action of external force or There is a problem that the influence of the deformation of the pedestal due to the change of the ambient temperature is transmitted to the supported member, and the supported member is deformed or distorted. For example, when the pedestal is twisted and deformed by an external force or the like, the frictional force of the contact portion between the supporting member and the supported member acts in the same twisting direction as the pedestal, and the supporting member also twists. Deformation may occur. Such a deformation of the supported member becomes a non-negligible size when accuracy of the order of nanometers is required. An object of the present invention is to provide a supporting method and a supporting mechanism in which a supported member on a pedestal is not affected by the deformation of the pedestal even when the pedestal is deformed due to an external force or a change in ambient temperature.

[0006]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a supporting method for reducing the distortion of a supported member, in which at least one rod-shaped elastic supporting member is provided on the end surface of the supported member. There is provided a supporting method for abutting and supporting. Further, it is desirable that at least one cutout portion is provided in the elastic support member and an appropriate preload is applied by a preload mechanism using a spring.

According to the present invention, a rod-shaped elastic support member is used, and by utilizing the deflection thereof, rigidity in the support direction is increased as compared with a support member such as a land portion or a ball used in a conventional support method. It is easy to reduce the rigidity in the direction perpendicular to it to less than one-hundredth without dropping it. Therefore, even if a frictional force acts between the pedestal and the elastic supporting member, the elastic supporting member is easily bent, and a large frictional force may directly act on the supported member as seen in the conventional supporting method. Disappear. Further, each elastic support member is provided with at least one or more cutout portions, and by applying an appropriate preload by a preloading mechanism using a spring, a larger deflection is generated in the cutout portions, and the end faces of the elastic support members are removed. It is possible to make contact with the support member without making one-sided contact, and it is possible to maintain a stable support state.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION According to the present invention, in order to reduce the strain of a supported member, a supporting member is supported by abutting the supported member on the end surface of at least one rod-shaped elastic supporting member. It was a method.

The present invention also provides a supporting mechanism for supporting a supported member by providing at least one rod-shaped elastic supporting member and bringing the supported member into contact with the end surface of the elastic supporting member.

Further, it is preferable to provide at least one notch in the elastic support member.

Further, it is preferable to have a preload mechanism using a spring.

Further, according to the present invention, in the support member arranged between the pedestal and the supported member supported by the pedestal, a first surface contacting the pedestal and a second surface contacting the supported member,
By absorbing the displacement of the first surface caused by the deformation of the pedestal,
Displacement absorbing means for maintaining the surface in the same position is provided.

The support member may have a pillar shape, the first surface and the second surface may be provided at both ends of the pillar-shaped support member, and the displacement absorbing means may include: The pillar-shaped support member may be configured to absorb the displacement of the first surface in a direction perpendicular to the longitudinal axis.

The displacement absorbing member may be a groove formed on the outer periphery of the supporting member.

The displacement absorbing member may be a columnar elastic member.

[0016]

FIG. 1 shows a first embodiment of the present invention. The supported member 12 is a rectangular ruler having a length L, a width B, and a height H.
A part of the upper surface (a portion having a width B in the central portion) serves as a reference surface. The pedestal 11 is formed with three surfaces 11a, 11b, 11c, and these surfaces are substantially orthogonal to each other.
Cylindrical elastic support members 13a to 13f having a length 1 and a diameter d
Are three (13a, 13b, 13) on the surface 11a that supports the bottom surface of the supported member 12 and receives the weight of the supported member 12.
c), a surface 11 for supporting the longitudinal side surface of the supported member 12
Two (13d, 13e) are arranged in b, and one (13f) is arranged in the surface 11c that supports the end surface of the supported member 12. The leaf spring 14 is provided at a position facing the elastic support members 13d to 13f.
The elastic support member 1 is provided on the side surface and end surface of the supported member by applying an appropriate preload.
The contact of 3d to 13f is maintained. The contact between the bottom surface of the supported member 12 and the elastic supporting members 13a to 13c is maintained by the weight of the supported member 12 itself.

FIG. 2 shows the positional relationship between the elastic support members 13a to 13f and the preload action points p1 to p3. 2A is a plan view, FIG. 2B is a front view, and FIG. 2C is a right side view. The elastic support members 13a to 13c that support the bottom surface of the supported member 12 are symmetrical with respect to the longitudinal center line of the supported member 12, and the bottom side and one vertex are about (2/9) from the end surface of the supported member. It is located at the apex of the isosceles triangle located at * L. Elastic support member 13 for supporting the side surface of the supported member 12
d, 13e and preload action points p1 and p opposite to them
Similarly, 2 is arranged so as to be located at (2/9) * L from the end surface of the supported member 12. Supported member 1
The elastic support member 13f that supports the end face of No. 2 and the preload action point p3 that faces the elastic support member 13f are arranged so as to be located at the center of the width B of the supported member 12. Further, the elastic supporting members 13d to 13f and the point of action p of the preload facing the elastic supporting members 13d to 13f
1 to p3 are arranged so as to be located at the same height from the bottom surface of the supported member 12.

FIG. 3 shows the elastic support member 13a shown in FIG.
13 is an enlarged view of one of 13 f. Notches 15 are provided at two locations on each of the elastic support members 13a to 13f. The cutout portion 15 is an annular groove formed on the outer periphery of the columnar elastic support members 13a to 13f, but the shape of the cutout portion 15 is not limited to this and may be any shape. .

When the pedestal 11 is deformed due to an external force or the like, relative displacement occurs between the pedestal 11 and the supported member 12, and friction occurs at the contact portion between the pedestal 11 and the elastic supporting members 13a to 13f. Power works. At this time, in the present invention, as shown in FIG. 4, it is possible to prevent the elastic support members 13a to 13f from flexing so that the frictional force is alleviated and the supported member 12 is deformed. Furthermore, in the present embodiment, the two notches 15 provided in the elastic support members 13a to 13f cause a larger deflection, and the elastic support members 13a are formed.
The end surface 16 of 13 f can be brought into contact with the supported member 12 without a single contact. The cutout portion 15 may be plastically deformed.

In this embodiment, the area of the end surface 17 of the elastic support members 13a to 13f contacting the pedestal 11 is equal to the area of the end surface 16 of the elastic support members 13a to 13f contacting the supported member 12.
Is larger than the area.

Further, in this embodiment, a coil spring may be used in the preload mechanism instead of the leaf spring 14, the notch 15 of the elastic support members 13a to 13f may not be provided, and one or three places may be provided. The above may be provided.

FIG. 5 shows a second embodiment of the present invention. The supported member 22 is a plano-convex lens-shaped member having a diameter D and a height H. The pedestal 21 is formed with three surfaces 21a, 21b, 21c, which are substantially orthogonal to each other. The cylindrical elastic support members 23a to 23e having a length 1 and a diameter d are
Three pieces (23a, 23b, 23c) are provided on the surface 21a that supports the bottom surface of the supported member 22 and receives the weight of the supported member 22.
One piece (23d, 23e) is arranged on each of the surfaces 21b, 21c that support the side surface of the supported member 22. Elastic support members 23d, 2 for supporting the side surface of the supported member 22.
A preload mechanism including a leaf spring 24 is provided at a position facing 3e, and an appropriate preload is applied. The elastic support members 23a to 23c that support the bottom surface of the supported member 22 are arranged in a substantially equilateral triangle shape, and elastic support members 23d and 23e that support the side surfaces of the supported member 22 and the preload point p.
1 and p2 are arranged so as to be at the same height from the bottom surface of the supported member 22.

FIG. 6 shows the elastic support member 23a shown in FIG.
23 to 23e are enlarged views. Each elastic support member 23a-23e is provided with a notch 25 at one location.

Also in this embodiment, even if the pedestal 21 is deformed by the action of external force or the like, as shown in FIG.
The pedestal 21 and the supported member 22 due to the bending of 3a to 23e.
The frictional force acting between and is relaxed, and it becomes possible to prevent the supported member 22 from being deformed. Further, the elastic support members 23a-2
A larger deflection is generated in the cutout portion 25 of 3e, so that the end faces 26 of the elastic support members 23a to 23e can be brought into contact with the supported member 22 without uneven contact. In addition,
The notch 25 may be plastically deformed.

Further, in the present embodiment, a coil spring may be used in the preload mechanism instead of the leaf spring 24, the notch portion 25 of the elastic support members 23a-23e may not be provided, or two or more may be provided. Good.

[0026]

The present invention is carried out in the form as described above, and has the following effects.

According to the present invention, a supported member such as a straight edge can be supported with high accuracy without being affected by the deformation of the pedestal caused by an external force or thermal deformation. This enables high-precision measurement and processing on the order of nanometers, which was difficult in the past.

[Brief description of drawings]

FIG. 1 is a conceptual diagram showing a first embodiment of the present invention.

FIG. 2 is a conceptual diagram showing a positional relationship between an elastic support member and a preload action point.

FIG. 3 is an enlarged view showing one of the elastic supporting members shown in FIG. 1 in an enlarged manner.

FIG. 4 is a conceptual diagram showing the bending of the elastic support member when the pedestal is deformed.

FIG. 5 is a conceptual diagram showing a second embodiment of the present invention.

FIG. 6 is an enlarged view showing one of the elastic support members shown in FIG. 5 in an enlarged manner.

FIG. 7 is a conceptual diagram showing the deflection of the elastic support member when the pedestal is deformed.

FIG. 8 is a conceptual diagram showing a conventional technique.

FIG. 9 is a conceptual diagram showing a conventional technique.

FIG. 10 is a conceptual diagram showing a conventional technique.

[Explanation of symbols]

 11, 21 ... Pedestal 12, 22 ... Supported members 13a to 13f, 23a to 23e ... Elastic support members 14, 24 ... Leaf springs 15, 25 ... Notch parts p1 to p3. ..Points of preload

Claims (8)

[Claims] 1. A supporting method for reducing distortion of a supported member, which comprises contacting and supporting the supported member with an end surface of at least one rod-shaped elastic supporting member. 2. A mechanism for supporting a supported member, wherein at least one rod-shaped elastic supporting member is provided, and the supported member is brought into contact with an end surface of the elastic supporting member. 3. The support mechanism according to claim 2, wherein the elastic support member is provided with at least one cutout portion. 4. The support mechanism according to claim 2, further comprising a preload mechanism using a spring. 5. A support member disposed between a pedestal and a supported member supported by the pedestal, the first surface contacting the pedestal, the second surface contacting the supported member, and the pedestal of the pedestal. By absorbing the displacement of the first surface caused by the deformation,
A support member comprising: a displacement absorbing means for maintaining the second surface in the same position. 6. The support member has a pillar shape, and the first surface and the second surface are respectively provided at both ends of the pillar-shaped support member, and the displacement absorbing means is The support member according to claim 5, wherein the support member absorbs a displacement of the first surface in a direction perpendicular to a longitudinal axis of the support member having the pillar shape. 7. The support member according to claim 5, wherein the displacement absorbing member is a groove formed on the outer periphery of the support member. 8. The support member according to claim 5, wherein the displacement absorbing member is a columnar elastic member.