JPH09280203A - Piezoelectric actuator for droplet radiator - Google Patents

Piezoelectric actuator for droplet radiator

Info

Publication number
JPH09280203A
JPH09280203A JP8089374A JP8937496A JPH09280203A JP H09280203 A JPH09280203 A JP H09280203A JP 8089374 A JP8089374 A JP 8089374A JP 8937496 A JP8937496 A JP 8937496A JP H09280203 A JPH09280203 A JP H09280203A
Authority
JP
Japan
Prior art keywords
emitter
case
pressure
piezoelectric element
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP8089374A
Other languages
Japanese (ja)
Inventor
Naotaka Komatsu
直隆 小松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP8089374A priority Critical patent/JPH09280203A/en
Publication of JPH09280203A publication Critical patent/JPH09280203A/en
Withdrawn legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a device which is free from any loss in converting the expansion/ contraction of a piezoelectric element into the vibration in the thickness direction, and in which the dripping condition is not disturbed by the differential pressure between an emitter and a pressure chamber. SOLUTION: The pressure fluctuation in an emitter 11 can be directly generated by the expansion/contraction of a piezoelectric element 1 to efficiently emit the drip 17 by providing an emitter 11 which is provided with an orifice plate 15 on a lower part and whose inside is hollow, a case 3 which is arranged on an upper part in the emitter 11 and provided with a downward recessed part, a clamp member 2 arranged at a lower end of the case 3, and the flat-plate shaped piezoelectric element 1 whose end part is held between two seal sliding members 2b of the clamp member 2 to form a pressure chamber in the recessed part of the case 3, and which is expanded/ contracted by a driving power source 10. Since an air intake flow rate regulating valve provided on an intake pipe to be communicated with the pressure chamber, and a control device to control the air intake flow rate regulating valve are provided, the pressure in the pressure chamber is adjusted so as to be always equal to the pressure in the emitter, and expansion/contraction of the piezoelectric element becomes smooth to enable excellent emission of the drip.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、宇宙ステーション
の放熱システム等に適用される液滴ラジエータ用圧電ア
クチュエータに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a droplet radiator piezoelectric actuator applied to a heat dissipation system of a space station.

【0002】[0002]

【従来の技術】従来の宇宙ステーションの放熱システム
に適用され微小流量ポンプを形成する液滴ラジエータ用
圧電アクチュエータとしては、文献(日本航空宇宙学会
誌第39巻第453号552ページ)に掲載された図4
(a)に示すものがあった。
2. Description of the Related Art A piezoelectric actuator for a droplet radiator that is applied to a conventional heat dissipation system of a space station and forms a minute flow rate pump has been published in the literature (Journal of the Aerospace Society, Vol. 39, No. 453, page 552). Figure 4
There was one shown in (a).

【0003】図4(a)に示す従来の装置は、上部に接
続された吸引管33と下部に設けられたオリフィス板3
4を備えたエミッタ32、同エミッタ32内に配設され
内部に圧力室36が設けられたケース35、および同ケ
ース35の下部に設けられエミッタ32内部と圧力室3
6の間を仕切る円板型圧電素子31により形成されてい
た。
The conventional apparatus shown in FIG. 4 (a) has a suction pipe 33 connected to the upper part and an orifice plate 3 provided in the lower part.
4, a case 35 provided inside the emitter 32 and provided with a pressure chamber 36 therein, and an inside of the emitter 32 provided under the case 35 and the pressure chamber 3
It was formed by the disk-type piezoelectric element 31 partitioning between the six.

【0004】上記において、円板型圧電素子31は、交
番電圧が印加されると半径方向に伸縮力を発生するが、
円周部分が固定されているために図4(b)に示すよう
にその中心で振幅が最大となる振動を発生する。
In the above, the disk-type piezoelectric element 31 generates an expansion / contraction force in the radial direction when an alternating voltage is applied,
Since the circumferential portion is fixed, the vibration having the maximum amplitude is generated at the center thereof as shown in FIG. 4 (b).

【0005】上記圧電素子31が振動すると、エミッタ
32内部に圧力変動を生じ、駆動条件がある条件を満た
すと、吸引管33からエミッタ32内を通過し、オリフ
ィス板34に設けられたオリフィスを通過する流体は、
液滴となってオリフィスから吐出される。
When the piezoelectric element 31 vibrates, a pressure variation occurs inside the emitter 32, and when a driving condition satisfies a certain condition, it passes from the suction pipe 33 into the emitter 32 and passes through an orifice provided in an orifice plate 34. The fluid to
The droplets are discharged from the orifice.

【0006】[0006]

【発明が解決しようとする課題】従来の液滴ラジエータ
用圧電アクチュエータにおいては、前記のように交番電
圧の印加による円板型圧電素子の伸縮をその中心で最大
振幅となる振動に変換してエミッタ内部の圧力変動を発
生させているため、この変換のための損失があった。
In the conventional piezoelectric actuator for a droplet radiator, as described above, the expansion and contraction of the disk-shaped piezoelectric element due to the application of the alternating voltage is converted into the vibration having the maximum amplitude at the center of the piezoelectric actuator. There was a loss for this conversion as it generated internal pressure fluctuations.

【0007】また、圧力室内の圧力を調整する手段がな
いため、圧電素子を駆動した場合に生じるエミッタ内の
圧力と圧力室内の圧力との差が圧電素子に作用し、圧電
素子は差圧に抗して動作させるため、圧電素子の変形が
差圧による弾性変形に吸収されてエミッタ内部での圧力
変動が小さくなり、液滴を生成させることができなくな
ることがあった。
Further, since there is no means for adjusting the pressure in the pressure chamber, the difference between the pressure in the emitter and the pressure in the pressure chamber, which occurs when the piezoelectric element is driven, acts on the piezoelectric element, and the piezoelectric element produces a differential pressure. Since the piezoelectric elements are operated against each other, the deformation of the piezoelectric element is absorbed by the elastic deformation due to the differential pressure, and the pressure fluctuation inside the emitter becomes small, which may make it impossible to generate droplets.

【0008】更に、これらの結果、液滴ラジエータの液
滴生成条件を満足するアクチュエータの駆動範囲が制約
を受けるという課題があった。本発明は上記の課題を解
決しようとするものである。
Further, as a result of these, there is a problem that the driving range of the actuator that satisfies the droplet generation condition of the droplet radiator is restricted. The present invention seeks to solve the above problems.

【0009】[0009]

【課題を解決するための手段】[Means for Solving the Problems]

(1)請求項1に記載の発明に係る液滴ラジエータ用圧
電アクチュエータは、流入管が上部に接続され下部にオ
リフィス板が設けられ内部が空洞のエミッタ、同エミッ
タ内の上部に配設され下向きの凹部を有するケース、同
ケースの下端に固定されたクランプ板及び同クランプ板
と上記ケースの下端の間に配設された2枚のシール摺動
部材により形成されたクランプ部材、および同クランプ
部材の2枚のシール摺動部材の間にその端部が挟装され
て上記ケースの凹部に圧力室を形成し駆動電源より交番
電圧が印加されて伸縮する平板状の圧電素子を備えたこ
とを特徴としている。
(1) In the piezoelectric actuator for a droplet radiator according to the first aspect of the invention, the inflow pipe is connected to the upper part, the orifice plate is provided in the lower part, the inside is a hollow emitter, and the inside is arranged in the upper part of the emitter and faces downward. Having a concave portion, a clamp plate fixed to the lower end of the case, a clamp member formed by two seal sliding members arranged between the clamp plate and the lower end of the case, and the clamp member And a plate-shaped piezoelectric element whose end is sandwiched between the two seal sliding members to form a pressure chamber in the recess of the case and which expands and contracts when an alternating voltage is applied from the driving power source. It has a feature.

【0010】上記において、駆動電源より平板状の圧電
素子に交番電圧を印加すると、圧電素子が伸縮して圧電
素子のシール摺動部材よりはみ出した部分の体積が増減
し、圧力室内及びエミッタ内の容積を変化させ、それぞ
れの内部の圧力を変化させ、エミッタは流入管から流体
を吸入し、オリフィス板より液滴として放出する。
In the above, when an alternating voltage is applied from the drive power source to the flat piezoelectric element, the piezoelectric element expands and contracts, and the volume of the portion of the piezoelectric element protruding from the seal sliding member increases or decreases, and the pressure chamber and the emitter The volume is changed, the pressure inside each is changed, and the emitter sucks the fluid from the inflow pipe and discharges it as droplets from the orifice plate.

【0011】本発明においては、圧電素子の伸縮より直
接エミッタ内の圧力変動を発生させるため、従来の装置
における圧電素子の伸縮をその厚み方向の振動に変換す
ることによる損失を回避することが可能となる。
In the present invention, since the pressure fluctuation in the emitter is directly generated by the expansion and contraction of the piezoelectric element, it is possible to avoid the loss caused by converting the expansion and contraction of the piezoelectric element in the conventional device into the vibration in the thickness direction. Becomes

【0012】(2)請求項2に記載の発明は、上記発明
(1)に記載の液滴ラジエータ用圧電アクチュエータに
おいて、上記エミッタとケースを貫通してケースの凹部
に連通する排気管に設けられた排気弁、上記エミッタと
ケースを貫通してケースの凹部に連通する吸気管に設け
られた吸気流量調整弁、上記エミッタに設けられた第1
の圧力計、上記圧力室に設けられた第2の圧力計、およ
び上記第1と第2の圧力計より圧力信号を入力して吸気
流量調整弁を制御する制御装置を備えたことを特徴とし
ている。
(2) According to a second aspect of the invention, in the piezoelectric actuator for a liquid drop radiator according to the first aspect of the invention, the exhaust pipe is provided which penetrates the emitter and the case and communicates with a recess of the case. An exhaust valve, an intake flow rate adjusting valve provided in an intake pipe penetrating the emitter and the case to communicate with a recess of the case, and a first provided in the emitter.
Pressure gauge, a second pressure gauge provided in the pressure chamber, and a control device for inputting a pressure signal from the first and second pressure gauges to control the intake flow rate adjusting valve. There is.

【0013】本発明においては、圧電素子が伸縮して圧
力室内及びエミッタ内の圧力が変動すると、その圧力変
動が第1と第2の圧力計により測定されて制御装置に入
力され、制御装置は圧力室内の圧力がエミッタ内の圧力
と等しくなるように吸気流量調整弁を制御する。
In the present invention, when the piezoelectric element expands and contracts and the pressures in the pressure chamber and the emitter fluctuate, the pressure fluctuations are measured by the first and second pressure gauges and input to the control device. The intake flow rate control valve is controlled so that the pressure in the pressure chamber becomes equal to the pressure in the emitter.

【0014】そのため、圧電素子のシール摺動部材との
接触部における摩擦力は軽減され、圧電素子の伸縮は上
記発明(1)に比べてよりスムーズとなり、更に良好な
液滴の放出が可能となる。
Therefore, the frictional force at the contact portion of the piezoelectric element with the seal sliding member is reduced, the expansion and contraction of the piezoelectric element becomes smoother than that of the above-mentioned invention (1), and a better droplet can be discharged. Become.

【0015】[0015]

【発明の実施の形態】本発明の実施の第1形態に係る液
滴ラジエータ用圧電アクチュエータについて、図1によ
り説明する。
BEST MODE FOR CARRYING OUT THE INVENTION A piezoelectric actuator for a droplet radiator according to a first embodiment of the present invention will be described with reference to FIG.

【0016】図1に示す本実施形態に係る圧電アクチュ
エータは、流入管14が上部に接続されオリフィス16
を有するオリフィス板15が下部に設けられ内部が空洞
のエミッタ11、同エミッタ11内の上部に配設され同
エミッタ11を貫通した吸気管5と排気管6と連通する
下向きの凹部を有する円筒形状のケース3、同ケース3
の下端に設けられリング板状のクランプ板2aと2個の
リング状のゴム部材2bと複数個の締め付けボルト2c
により形成されたクランプ部材2、同クランプ部材2の
2個のゴム部材2bの間に端部が挟装され駆動電源10
が接続され上記ケース3の凹部に圧力室4を形成させる
円板状の圧電素子1を備えている。
In the piezoelectric actuator according to this embodiment shown in FIG. 1, the inflow pipe 14 is connected to the upper portion and the orifice 16 is provided.
A cylindrical shape having an orifice plate 15 having a lower part and a hollow inside, and a downward recess communicating with the intake pipe 5 passing through the emitter 11 and the exhaust pipe 6 disposed in the upper part of the emitter 11. Case 3, same case 3
A ring plate-shaped clamp plate 2a provided at the lower end of the ring, two ring-shaped rubber members 2b, and a plurality of tightening bolts 2c
The driving power source 10 has an end portion sandwiched between the clamp member 2 and two rubber members 2b of the clamp member 2
And a disk-shaped piezoelectric element 1 for forming a pressure chamber 4 in the concave portion of the case 3 connected to.

【0017】なお、上記排気管6には排気弁9が設けら
れ、吸気管5には吸気弁7と逆止弁8が設けられてい
る。吸気管5に設けられた逆止弁8は、圧力室4内の流
体の逆流を防ぐために設けられるものであり、図1にお
いては吸気管5の先端に取付けられているが、先端でな
くてもよい。
The exhaust pipe 6 is provided with an exhaust valve 9, and the intake pipe 5 is provided with an intake valve 7 and a check valve 8. The check valve 8 provided in the intake pipe 5 is provided to prevent the backflow of the fluid in the pressure chamber 4, and is attached to the tip of the intake pipe 5 in FIG. 1, but is not the tip. Good.

【0018】また、上記ゴム部材2bは、圧電素子1を
シールするものであるとともに、圧電素子1の伸縮時に
はこれを摺動させるものであり、圧電素子1のシール摺
動部材である。
The rubber member 2b seals the piezoelectric element 1 and slides the piezoelectric element 1 when the piezoelectric element 1 expands and contracts, and is a seal sliding member for the piezoelectric element 1.

【0019】次に、本実施形態に係る圧電アクチュエー
タの駆動要領について説明する。この圧電アクチュエー
タの駆動に当たっては、まず、変動する圧力室4内とエ
ミッタ11内の差圧が最小となるように圧力室4内を適
切な圧力とするが、圧力室4内圧力を上げる場合には排
気弁9を閉、吸気弁7を開とし、下げる場合には吸気弁
7を閉、排気弁9を開とする。
Next, the driving procedure of the piezoelectric actuator according to this embodiment will be described. In driving this piezoelectric actuator, first, the pressure chamber 4 is set to an appropriate pressure so that the fluctuating pressure difference between the pressure chamber 4 and the emitter 11 is minimized. Closes the exhaust valve 9 and opens the intake valve 7, and closes the intake valve 7 and opens the exhaust valve 9 when lowering.

【0020】上記圧力室4内の圧力が適切な圧力となっ
た後は、上記吸気弁7及び排気弁9をいずれも閉とし、
駆動電源10より供給される交番電圧を圧電素子1に印
加する。この交番電圧は図2(a)に示すものである。
After the pressure in the pressure chamber 4 reaches an appropriate pressure, both the intake valve 7 and the exhaust valve 9 are closed,
The alternating voltage supplied from the driving power supply 10 is applied to the piezoelectric element 1. This alternating voltage is shown in FIG.

【0021】上記圧電素子1に交番電圧が印加された場
合、圧電素子1はゴム部材2bにより緩やかにケース3
に固定されているため、図2(b)に示すように半径方
向に伸縮し、ゴム部材2bをはみ出した部分が増減して
圧力室4内及びエミッタ11内の容積を変化させ、それ
ぞれの内部の圧力を図2(c)に示すように変化させ
る。
When an alternating voltage is applied to the piezoelectric element 1, the piezoelectric element 1 is gently moved to the case 3 by the rubber member 2b.
2B, the rubber member 2b expands and contracts in the radial direction to increase or decrease the volume inside the pressure chamber 4 and the inside of the emitter 11 as shown in FIG. 2 is changed as shown in FIG.

【0022】そのため、流入管14からエミッタ11内
を経てオリフィス板15に設けられたオリフィス16を
通過する流体は、液滴17となってエミッタ11外へ放
出される。
Therefore, the fluid passing from the inflow pipe 14 through the inside of the emitter 11 and the orifice 16 provided in the orifice plate 15 is discharged as droplets 17 to the outside of the emitter 11.

【0023】本実施形態においては、圧電素子1の伸縮
より直接エミッタ11内の圧力変動を発生させており、
従来の装置のように圧電素子1の伸縮をその厚み方向の
振動とするという力の方向の変換が不要のため、そのた
めの損失を回避することが可能となった。
In this embodiment, the expansion and contraction of the piezoelectric element 1 directly causes the pressure fluctuation in the emitter 11.
Since it is not necessary to change the direction of force such as the expansion and contraction of the piezoelectric element 1 to vibrate in the thickness direction as in the conventional device, it is possible to avoid the loss for that.

【0024】また、エミッタ11内の圧力との差圧が最
小となるように、吸気弁7と排気弁9により予め圧力室
4内の圧力が調整されているため、エミッタ11内の流
体が圧力室4に侵入しないようにシールするためのゴム
部材2bの締め付け力は小さく済み、ゴム部材2bから
圧電素子1に作用する摩擦力が小さくなる。その結果、
圧電素子1の伸縮はスムーズに行われ、液滴生成に有効
に利用される。
Since the pressure in the pressure chamber 4 is adjusted in advance by the intake valve 7 and the exhaust valve 9 so that the pressure difference between the pressure in the emitter 11 and the pressure in the emitter 11 is minimized, the fluid in the emitter 11 is pressurized. The tightening force of the rubber member 2b for sealing so as not to enter the chamber 4 is small, and the frictional force acting on the piezoelectric element 1 from the rubber member 2b is small. as a result,
The piezoelectric element 1 expands and contracts smoothly, and is effectively used for droplet generation.

【0025】本発明の実施の第2形態に係る液滴ラジエ
ータ用圧電アクチュエータについて、図3により説明す
る。図3に示す本実施形態に係る圧電アクチュエータ
は、上記第1実施形態における吸気弁7に替えて吸気流
量調整弁7aを用い、エミッタ11と圧力室10の内部
圧力の測定が可能な圧力計12a,12bをそれぞれ配
設し、同圧力計12a,12bより圧力信号を入力して
上記吸気流量調整弁7aの開閉制御が可能な制御装置1
3が設けられたものである。
A piezoelectric actuator for a droplet radiator according to the second embodiment of the present invention will be described with reference to FIG. In the piezoelectric actuator according to the present embodiment shown in FIG. 3, an intake flow rate adjusting valve 7a is used instead of the intake valve 7 in the first embodiment, and a pressure gauge 12a capable of measuring the internal pressures of the emitter 11 and the pressure chamber 10 is used. , 12b are provided, and a pressure signal is input from the pressure gauges 12a, 12b to control opening / closing of the intake flow rate adjusting valve 7a.
3 is provided.

【0026】本実施形態においては、エミッタ11内の
圧力と圧力室10内の圧力はそれぞれ常に圧力計12
a,12bにより測定されており、圧力計12a,12
bにより測定された圧力信号は制御装置13に入力さ
れ、制御装置13は圧力室10内の圧力が常にエミッタ
11内の圧力と等しくなるように吸気流量調整弁7aを
制御する。
In the present embodiment, the pressure inside the emitter 11 and the pressure inside the pressure chamber 10 are always the pressure gauge 12 respectively.
a, 12b, and pressure gauges 12a, 12
The pressure signal measured by b is input to the control device 13, and the control device 13 controls the intake flow rate adjusting valve 7a so that the pressure in the pressure chamber 10 is always equal to the pressure in the emitter 11.

【0027】そのため、圧電素子1には圧力室4内とエ
ミッタ11内の圧力差による板厚方向の力は作用せず、
圧電素子1のゴム部材2bにより締め付けられた部分に
ついては圧電素子1の伸縮時における摩擦力が第1実施
形態の場合に比べて更に軽減され、圧電素子1の伸縮は
更にスムーズとなる。
Therefore, a force in the plate thickness direction due to a pressure difference between the pressure chamber 4 and the emitter 11 does not act on the piezoelectric element 1,
In the portion of the piezoelectric element 1 clamped by the rubber member 2b, the frictional force when the piezoelectric element 1 expands and contracts is further reduced as compared with the case of the first embodiment, and the expansion and contraction of the piezoelectric element 1 becomes smoother.

【0028】[0028]

【発明の効果】本発明の液滴ラジエータ用圧電アクチュ
エータは、下部にオリフィス板が設けられ内部が空洞の
エミッタと、同エミッタ内の上部に配設され下向きの凹
部を有するケースと、同ケースの下端に配設されたクラ
ンプ部材と、同部材の2枚のシール摺動部材の間にその
端部が挟装されて上記ケースの凹部に圧力室を形成し駆
動電源により伸縮する平板状の圧電素子を備えたことに
よって、圧電素子の伸縮より直接エミッタ内の圧力変動
を発生させることができるため、効率的な液滴の放出が
可能となり、また、圧力室に連通する吸気管に設けられ
た吸気流量調整弁と、圧力室内とエミッタ内の圧力を入
力して吸気流量調整弁を制御する制御装置を備えたこと
によって、圧力室内の圧力はエミッタ内の圧力と常に等
しくなるように調整されるため、圧電素子の伸縮はスム
ーズとなり、良好な液滴の放出が可能となる。
The piezoelectric actuator for a liquid drop radiator according to the present invention has an orifice plate provided in the lower part, a hollow emitter, and a case having a downward recessed part disposed in the upper part of the emitter, and a case of the same. A flat plate-shaped piezoelectric element which is sandwiched between a clamp member arranged at the lower end and two seal sliding members of the same member to form a pressure chamber in the recess of the case and which expands and contracts by a drive power source. By providing the element, the pressure fluctuation in the emitter can be directly generated by the expansion and contraction of the piezoelectric element, so that the droplets can be efficiently discharged, and the intake pipe connected to the pressure chamber is provided. Since the intake flow rate control valve and the control device that controls the intake flow rate control valve by inputting the pressures in the pressure chamber and the emitter are installed, the pressure in the pressure chamber is adjusted to be always equal to the pressure in the emitter. Since the expansion and contraction of the piezoelectric element becomes smooth, it becomes possible to release a good droplet.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の第1形態に係る液滴ラジエータ
用圧電アクチュエータの説明図である。
FIG. 1 is an explanatory diagram of a piezoelectric actuator for a droplet radiator according to a first embodiment of the present invention.

【図2】上記第1実施形態に係る圧電アクチュエータの
作用説明図で、(a)は圧電素子に印加される電圧、
(b)は圧電素子の伸縮、(c)は圧力室内とエミッタ
内の圧力変動の説明図である。
FIG. 2 is an operation explanatory view of the piezoelectric actuator according to the first embodiment, in which (a) is a voltage applied to the piezoelectric element,
(B) is expansion and contraction of a piezoelectric element, (c) is explanatory drawing of the pressure fluctuation in a pressure chamber and an emitter.

【図3】本発明の実施の第2形態に係る液滴ラジエータ
用圧電アクチュエータの説明図である。
FIG. 3 is an explanatory diagram of a droplet radiator piezoelectric actuator according to a second embodiment of the present invention.

【図4】従来の装置の説明図で、(a)は装置の構成、
(b)は装置の作用の説明図である。
FIG. 4 is an explanatory view of a conventional device, in which (a) is a configuration of the device,
(B) is an explanatory view of the operation of the device.

【符号の説明】[Explanation of symbols]

1 圧電素子 2 クランプ部材 2a クランプ板 2b ゴム部材 2c 締め付けボルト 3 ケース 4 圧力室 5 吸気管 6 排気管 7 吸気弁 7a 吸気流量調整弁 8 逆止弁 9 排気弁 10 駆動電源 11 エミッタ 12a,12b 圧力計 13 制御装置 14 流入管 15 オリフィス板 16 オリフィス 17 液滴 1 Piezoelectric element 2 Clamp member 2a Clamp plate 2b Rubber member 2c Tightening bolt 3 Case 4 Pressure chamber 5 Intake pipe 6 Exhaust pipe 7 Intake valve 7a Intake flow control valve 8 Check valve 9 Exhaust valve 10 Drive power supply 11 Emitter 12a, 12b Pressure Total 13 Control device 14 Inflow pipe 15 Orifice plate 16 Orifice 17 Droplet

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 流入管が上部に接続され下部にオリフィ
ス板が設けられ内部が空洞のエミッタ、同エミッタ内の
上部に配設され下向きの凹部を有するケース、同ケース
の下端に固定されたクランプ板及び同クランプ板と上記
ケースの下端の間に配設された2枚のシール摺動部材に
より形成されたクランプ部材、および同クランプ部材の
2枚のシール摺動部材の間にその端部が挟装されて上記
ケースの凹部に圧力室を形成し駆動電源より交番電圧が
印加されて伸縮する平板状の圧電素子を備えたことを特
徴とする液滴ラジエータ用圧電アクチュエータ。
1. An inflow pipe is connected to an upper part, an orifice plate is provided in a lower part, a hollow emitter, a case having a downward recessed part disposed in the upper part of the emitter, and a clamp fixed to a lower end of the case. Plate and a clamp member formed by the clamp plate and the two seal sliding members disposed between the lower end of the case and the case, and an end portion of the clamp member between the two seal sliding members of the clamp member. A piezoelectric actuator for a droplet radiator, comprising a flat plate-shaped piezoelectric element which is sandwiched to form a pressure chamber in a recess of the case and which expands and contracts when an alternating voltage is applied from a driving power source.
【請求項2】 請求項1に記載の液滴ラジエータ用圧電
アクチュエータにおいて、上記エミッタとケースを貫通
してケースの凹部に連通する排気管に設けられた排気
弁、上記エミッタとケースを貫通してケースの凹部に連
通する吸気管に設けられた吸気流量調整弁、上記エミッ
タに設けられた第1の圧力計、上記圧力室に設けられた
第2の圧力計、および上記第1と第2の圧力計より圧力
信号を入力して吸気流量調整弁を制御する制御装置を備
えたことを特徴とする液滴ラジエータ用圧電アクチュエ
ータ。
2. The piezoelectric actuator for a droplet radiator according to claim 1, wherein an exhaust valve provided in an exhaust pipe penetrating the emitter and the case and communicating with a recess of the case, and penetrating the emitter and the case. An intake flow rate control valve provided in an intake pipe communicating with the recess of the case, a first pressure gauge provided in the emitter, a second pressure gauge provided in the pressure chamber, and the first and second A piezoelectric actuator for a droplet radiator, comprising a control device for controlling a suction flow control valve by inputting a pressure signal from a pressure gauge.
JP8089374A 1996-04-11 1996-04-11 Piezoelectric actuator for droplet radiator Withdrawn JPH09280203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8089374A JPH09280203A (en) 1996-04-11 1996-04-11 Piezoelectric actuator for droplet radiator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8089374A JPH09280203A (en) 1996-04-11 1996-04-11 Piezoelectric actuator for droplet radiator

Publications (1)

Publication Number Publication Date
JPH09280203A true JPH09280203A (en) 1997-10-28

Family

ID=13968923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8089374A Withdrawn JPH09280203A (en) 1996-04-11 1996-04-11 Piezoelectric actuator for droplet radiator

Country Status (1)

Country Link
JP (1) JPH09280203A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003082371A (en) * 2001-09-07 2003-03-19 Mitsubishi Heavy Ind Ltd Gas hydrate-forming container, apparatus and method for producing gas hydrate
CN113443175A (en) * 2021-05-31 2021-09-28 上海卫星工程研究所 Structure of space liquid drop radiator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003082371A (en) * 2001-09-07 2003-03-19 Mitsubishi Heavy Ind Ltd Gas hydrate-forming container, apparatus and method for producing gas hydrate
CN113443175A (en) * 2021-05-31 2021-09-28 上海卫星工程研究所 Structure of space liquid drop radiator
CN113443175B (en) * 2021-05-31 2022-08-12 上海卫星工程研究所 Structure of space liquid drop radiator

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