JPH09274866A - Device for detecting disconnection of filament - Google Patents
Device for detecting disconnection of filamentInfo
- Publication number
- JPH09274866A JPH09274866A JP8106226A JP10622696A JPH09274866A JP H09274866 A JPH09274866 A JP H09274866A JP 8106226 A JP8106226 A JP 8106226A JP 10622696 A JP10622696 A JP 10622696A JP H09274866 A JPH09274866 A JP H09274866A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- filament
- disconnection
- hot filament
- thermo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、薄膜形成装置，イ
オン注入装置等に設けられたイオン源の電子放出用の熱
フィラメントの断線を検出するフィラメント断線検出装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filament breakage detecting device for detecting a breakage of a hot filament for electron emission of an ion source provided in a thin film forming apparatus, an ion implantation apparatus or the like.
【０００２】[0002]
【従来の技術】従来、この種熱フィラメントを電子放出
源とするイオン源においては、使用により熱フィラメン
トが消耗する。2. Description of the Related Art Conventionally, in an ion source using this kind of hot filament as an electron emission source, the hot filament is consumed by use.
【０００３】この消耗により薄膜形成，イオン注入等の
基体の処理中に熱フィラメントが突然断線すると、例え
ば成膜中の製品が不良品になるのは勿論、生産が停止す
る等の重大な障害を生じる。Sudden disconnection of the hot filament during processing of the substrate such as thin film formation and ion implantation due to this consumption causes serious problems such as production stoppage as well as product failure during film formation. Occurs.
【０００４】そこで、従来は熱フィラメントに給電する
フィラメント電源の電圧，電流を測定し、その測定結果
を定期的に作業員がフィラメント断線情報として読取
り、この情報を基に作業員の勘や経験によって熱フィラ
メントの断線を事前に予見し、必要に応じて熱フィラメ
ントの交換等を行っている。Therefore, conventionally, the voltage and current of the filament power supply for supplying power to the hot filament are measured, and the measurement result is periodically read by the worker as filament disconnection information, and based on this information, the worker's intuition and experience are used. The breakage of the hot filament is foreseen in advance, and the hot filament is replaced if necessary.
【０００５】[0005]
【発明が解決しようとする課題】前記従来のように作業
員の勘や経験によってイオン源の熱フィラメントの断線
を予見する場合は、いわゆる熟練者でなければ適確に断
線を予見することができず、専任の作業員が必要にな
る。When predicting the disconnection of the hot filament of the ion source based on the intuition and experience of the worker as in the prior art, only a so-called expert can properly predict the disconnection. Instead, a dedicated worker is required.
【０００６】しかも、フィラメント電源の現在の電圧，
電流のみでは熱フィラメントの消耗状態を正確に把握す
ることが困難であり、予見ミスも生じ易い。Moreover, the current voltage of the filament power supply,
It is difficult to accurately grasp the consumption state of the hot filament only with the electric current, and a prediction error is likely to occur.
【０００７】したがって、経験のない者や経験の浅い者
は熱フィラメントの断線を正確に予見できず、省人化等
を図って確実に熱フィラメントの断線を事前に予見する
ことができない問題点がある。Therefore, an inexperienced person or an inexperienced person cannot accurately predict the disconnection of the hot filament, and thus the labor disconnection or the like cannot reliably predict the disconnection of the hot filament in advance. is there.
【０００８】本発明は、この種イオン源の熱フィラメン
トの断線を熟練者の勘や経験によらず、自動的に事前検
出することを課題とする。An object of the present invention is to automatically detect the breakage of the hot filament of this kind of ion source in advance without depending on the expert's intuition or experience.
【０００９】[0009]
【課題を解決するための手段】前記の課題を解決するた
めに、本発明のフィラメント断線検出装置においては、
熱フィラメントに給電するフィラメント電源の電源電圧
又は熱フィラメントの端子間電圧を計測する電圧計と、
この電圧計の計測電圧のデータを周期的に取込み，取込
んだデータと直前のデータとの電圧差を求めて熱フィラ
メントの電圧変化を監視する電圧監視手段と、前記電圧
差が設定した許容範囲をこえたときに熱フィラメントの
断線を事前検知する断線検知手段と、前記事前検知に基
づき熱フィラメントの断線を予報して警告する断線報知
手段とを備える。In order to solve the above-mentioned problems, in the filament disconnection detecting device of the present invention,
A voltmeter that measures the power supply voltage of the filament power supply that supplies power to the hot filament or the voltage between terminals of the hot filament,
Voltage monitoring means for periodically capturing the data of the measured voltage of the voltmeter, for obtaining a voltage difference between the captured data and the immediately preceding data, and for monitoring a voltage change of the hot filament, and an allowable range set by the voltage difference. If a breakage of the hot filament is exceeded, a breakage detecting means for detecting the breakage of the hot filament in advance, and a breakage notifying means for predicting and warning the breakage of the hot filament based on the preliminary detection are provided.
【００１０】したがって、熱フィラメントが消耗し、そ
の抵抗が増大して電圧計の計測電圧が大きくなると、こ
の電圧変化が電圧監視手段により検出される。Therefore, when the hot filament is consumed and its resistance increases to increase the measurement voltage of the voltmeter, this voltage change is detected by the voltage monitoring means.
【００１１】そして、前記電圧変化が測定誤差等を考慮
した一定の許容範囲をこえ、熱フィラメントに断線の兆
が現れると、断線検知手段により断線が事前に検出さ
れ、この検出に基づき、断線報知手段が断線を警告す
る。When the voltage change exceeds a certain allowable range in consideration of measurement error and the like and a sign of disconnection appears in the hot filament, the disconnection detection means detects the disconnection in advance, and based on this detection, the disconnection notification is given. Means warn of disconnection.
【００１２】そのため、この種イオン源の熱フィラメン
トの断線が熟練者の勘や経験によらず、自動的に確実に
事前検知できるようになる。Therefore, the disconnection of the hot filament of this kind of ion source can be automatically and reliably detected in advance without depending on the intuition or experience of a skilled person.
【００１３】[0013]
【発明の実施の形態】本発明の実施の１形態につき、図
１ないし図３を参照して説明する。図１は装置構成を示
し、１は電圧計、２は電圧計２の計測電圧のデータを周
期的に取込む検出処理装置であり、シーケンサ及びマイ
クロコンピュータからなり、電圧監視手段及び断線検知
手段を構成する。３は検出処理装置２に接続された断線
警告用の表示器であり、例えばランプ等からなり、断線
報知手段を構成する。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. FIG. 1 shows an apparatus configuration, 1 is a voltmeter, 2 is a detection processing device for periodically taking in the data of the measured voltage of the voltmeter 2, and it is composed of a sequencer and a microcomputer, and has a voltage monitoring means and a disconnection detecting means. Configure. Reference numeral 3 is a disconnection warning indicator connected to the detection processing device 2, and is composed of, for example, a lamp or the like, and constitutes disconnection notification means.
【００１４】そして、この種イオン源の熱フィラメント
（図示せず）に給電するフィラメント電源は、一般に電
流源構成の直流電源であり、その電源電圧は熱フィラメ
ントの端子間電圧と同様、熱フィラメントの抵抗に依存
して変化する。A filament power supply for supplying power to a hot filament (not shown) of this kind of ion source is generally a DC power supply having a current source configuration, and its power supply voltage is the same as the terminal voltage of the hot filament. It changes depending on the resistance.
【００１５】したがって、電圧計１によりフィラメント
電源の電源電圧又は熱フィラメントの端子間電圧を計測
して熱フィラメントの電圧を測定する。Therefore, the voltmeter 1 measures the power supply voltage of the filament power supply or the terminal voltage of the hot filament to measure the voltage of the hot filament.
【００１６】さらに、検出処理装置２のシーケンサによ
り予め設定した適当な単位時間毎に電圧計１の計測電圧
のデータを検出処理装置２に取込み、そのマイクロコン
ピュータによる断線検出手段により例えば図２に示すよ
うにして熱フィラメントの断線を事前に検出する。Further, the data of the measured voltage of the voltmeter 1 is taken into the detection processing device 2 at every suitable unit time preset by the sequencer of the detection processing device 2, and the disconnection detecting means by the microcomputer thereof is shown in FIG. 2, for example. In this way, the breakage of the hot filament is detected in advance.
【００１７】すなわち、電圧計１の計測電圧のデータが
取込まれると、ステップＳ1 からステップＳ2 に移行
し、取込んだデータとメモリ，レジスタ等に保持した直
前（前回）の計測電圧のデータとを比較し、両計測電圧
の差電圧を求め、熱フィラメントの電圧変化を検出す
る。That is, when the data of the measured voltage of the voltmeter 1 is fetched, the process proceeds from step S 1 to step S 2 , and the fetched data and the immediately preceding (previous) measured voltage held in the memory, register, etc. By comparing with the data, the difference voltage between both measured voltages is obtained, and the voltage change of the hot filament is detected.
【００１８】そしてステップＳ3 により、差電圧が測定
誤差等を考慮して設定された許容範囲をこえたか否かを
判定する。Then, in step S 3 , it is determined whether or not the differential voltage exceeds an allowable range set in consideration of measurement error and the like.
【００１９】ところで、熱フィラメントは一定時間以上
使用すると、使用によって消耗し、その抵抗が増加して
端子間の電圧が上昇する。By the way, when the hot filament is used for a certain period of time or more, it is consumed by use, its resistance increases, and the voltage between terminals rises.
【００２０】そして、使用時間に対する熱フィラメント
の電圧の変化特性はほぼ図３の（ａ）に示すようにな
り、図の横軸Ｔは使用時間、ｔｘは断線のタイミングで
ある。The change characteristic of the voltage of the hot filament with respect to the use time is as shown in FIG. 3 (a), where the horizontal axis T is the use time and tx is the timing of disconnection.
【００２１】このとき、熱フィラメントの電圧の傾き
（微分値）は図３の（ｂ）に示すようになり、消耗の兆
が現れると急増する。At this time, the gradient (differential value) of the voltage of the hot filament becomes as shown in FIG. 3B, and it rapidly increases when the sign of consumption appears.
【００２２】そして、前記差電圧は熱フィラメントの電
圧の傾きに応じて変化し、消耗の兆が現れると、前記許
容範囲をこえる。The differential voltage changes depending on the gradient of the voltage of the hot filament, and exceeds the allowable range when a sign of consumption appears.
【００２３】したがって、許容範囲の設定に基づき、例
えば熱フィラメントが断線する数時間程度前に、断線検
知手段は熱フィラメントの断線を事前に検出し、ステッ
プＳ3 からステップＳ4 に移行して断線の予報を表示器
３に出力する。Therefore, based on the setting of the allowable range, for example, several hours before the hot filament is broken, the break detecting means detects the break of the hot filament in advance, and the process moves from step S 3 to step S 4 to break the wire. Is output to the display unit 3.
【００２４】そして、この予報の出力によって表示器３
が点灯し、熱フィラメントの断線が近づいたことを警告
表示する。Then, according to the output of this forecast, the display 3
Lights up and warns that the hot filament is about to break.
【００２５】したがって、熱フィラメントの断線が事前
に確実に警告され、この警告に基づき、従来のような熟
練者の勘や経験によらず、熱フィラメントの交換時期を
適確に把握して熱フィラメントを交換でき、使用中の熱
フィラメントの突然の断線を防止することができる。Therefore, the breakage of the hot filament is surely warned in advance, and based on this warning, the hot filament replacement time can be accurately grasped without depending on the intuition and experience of a skilled person as in the past. Can be replaced, and sudden breakage of the hot filament during use can be prevented.
【００２６】なお、断線報知手段によりブザ音等で断線
を警告してもよいのは勿論である。It is needless to say that the disconnection notification means may warn the disconnection by a buzzing sound or the like.
【００２７】また、フィラメント電源が電圧源構成の場
合も、熱フィラメントの端子間電圧を電圧計１により計
測することにより、前記と同様の断線の事前検出が行え
る。Also in the case where the filament power source has a voltage source configuration, by measuring the terminal voltage of the hot filament with the voltmeter 1, the same prior disconnection detection as described above can be performed.
【００２８】[0028]
【発明の効果】本発明は、以下に記載する効果を奏す
る。熱フィラメントが消耗し、その抵抗が増大して電圧
計１の計測電圧が大きくなると、この電圧変化が電圧監
視手段により検出され、前記電圧変化が測定誤差等を考
慮した一定の許容範囲をこえ、熱フィラメントに断線の
兆が現れると、断線検知手段により断線が事前に自動的
に検出され、この検出に基づき、断線報知手段が断線を
警告する。The present invention has the following effects. When the hot filament is consumed and its resistance increases and the measurement voltage of the voltmeter 1 increases, this voltage change is detected by the voltage monitoring means, and the voltage change exceeds a certain allowable range in consideration of measurement error and the like. When a sign of disconnection appears on the hot filament, the disconnection detection unit automatically detects the disconnection in advance, and the disconnection notification unit warns the disconnection based on this detection.
【００２９】そのため、この種イオン源の熱フィラメン
トの断線を熟練者の勘や経験によらず、自動的に確実に
事前に検出することができ、熱フィラメントを適確に交
換して使用中の突然の断線を防止することができる。Therefore, the disconnection of the hot filament of this kind of ion source can be detected automatically and reliably in advance without relying on the intuition or experience of a skilled person, and the hot filament can be replaced properly before being used. It is possible to prevent sudden disconnection.
【図１】本発明の実施の１形態のブロック図である。FIG. 1 is a block diagram of one embodiment of the present invention.
【図２】図１の一部の動作説明用のフローチャートであ
る。FIG. 2 is a flowchart for explaining a part of the operation of FIG.
【図３】（ａ），（ｂ）は熱フィラメントの電圧特性，
電圧変化特性の説明図である。3 (a) and 3 (b) are voltage characteristics of a hot filament,
It is explanatory drawing of a voltage change characteristic.
１ 電圧計 ２ 電圧監視手段，断線検知手段を形成する検出処理装
置 ３ 断線報知手段を形成する表示器1 voltmeter 2 detection processing device forming voltage monitoring means and disconnection detection means 3 indicator forming disconnection notification means
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｊ 37/08 Ｈ０１Ｊ 37/08 37/317 37/317 Ｚ Ｈ０１Ｌ 21/265 Ｈ０１Ｌ 21/265 Ｄ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location H01J 37/08 H01J 37/08 37/317 37/317 Z H01L 21/265 H01L 21/265 D
Claims (1)
られ熱フィラメントを電子放出源とするイオン源のフィ
ラメント断線検出装置において、 前記熱フィラメントに給電するフィラメント電源の電源
電圧又は前記熱フィラメントの端子間電圧を計測する電
圧計と、 前記電圧計の計測電圧のデータを周期的に取込み，取込
んだデータと直前のデータとの電圧差を求めて前記熱フ
ィラメントの電圧変化を監視する電圧監視手段と、 前記電圧差が設定した許容範囲をこえたときに前記熱フ
ィラメントの断線を事前検知する断線検知手段と、 前記事前検知に基づき前記熱フィラメントの断線を予報
して警告する断線報知手段とを備えたことを特徴とする
フィラメント断線検出装置。1. A filament disconnection detection device for an ion source, which is provided in a thin film forming apparatus, an ion implantation apparatus, or the like, and uses a hot filament as an electron emission source, wherein a power supply voltage of a filament power supply for feeding the hot filament or a terminal of the hot filament. A voltmeter for measuring the voltage between the voltmeter and a voltage monitoring means for periodically taking in the data of the voltage measured by the voltmeter and obtaining the voltage difference between the taken-in data and the immediately preceding data to monitor the voltage change of the hot filament. And a disconnection detection unit that detects in advance the disconnection of the hot filament when the voltage difference exceeds the set allowable range, and a disconnection notification unit that predicts and warns the disconnection of the hot filament based on the advance detection. A filament breakage detecting device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8106226A JPH09274866A (en) | 1996-04-02 | 1996-04-02 | Device for detecting disconnection of filament |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8106226A JPH09274866A (en) | 1996-04-02 | 1996-04-02 | Device for detecting disconnection of filament |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09274866A true JPH09274866A (en) | 1997-10-21 |
Family
ID=14428228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8106226A Pending JPH09274866A (en) | 1996-04-02 | 1996-04-02 | Device for detecting disconnection of filament |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09274866A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040042882A (en) * | 2002-11-14 | 2004-05-20 | 닛신덴키 가부시키 가이샤 | Method of predicting a lifetime of filament in ion source and ino source device |
| JP2008027824A (en) * | 2006-07-25 | 2008-02-07 | Shimadzu Corp | Monitoring method of electron gun filament, and control method |
| KR100877825B1 (en) * | 2007-05-30 | 2009-01-08 | 한국원자력연구원 | Circuits for detecting short of filament |
-
1996
- 1996-04-02 JP JP8106226A patent/JPH09274866A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040042882A (en) * | 2002-11-14 | 2004-05-20 | 닛신덴키 가부시키 가이샤 | Method of predicting a lifetime of filament in ion source and ino source device |
| US7034543B2 (en) | 2002-11-14 | 2006-04-25 | Nissin Electric Co., Ltd. | Method of predicting a lifetime of filament in ion source and ion source device |
| JP2008027824A (en) * | 2006-07-25 | 2008-02-07 | Shimadzu Corp | Monitoring method of electron gun filament, and control method |
| KR100877825B1 (en) * | 2007-05-30 | 2009-01-08 | 한국원자력연구원 | Circuits for detecting short of filament |
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