JPH09268019A - Conveyance member for optical material - Google Patents
Conveyance member for optical materialInfo
- Publication number
- JPH09268019A JPH09268019A JP8117396A JP8117396A JPH09268019A JP H09268019 A JPH09268019 A JP H09268019A JP 8117396 A JP8117396 A JP 8117396A JP 8117396 A JP8117396 A JP 8117396A JP H09268019 A JPH09268019 A JP H09268019A
- Authority
- JP
- Japan
- Prior art keywords
- optical material
- optical
- optical element
- conveying member
- molding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、加熱軟化した光学
素材を押圧成形して光学素子を製造する際に、光学素材
を載置して成形装置内に搬送するための光学素材搬送部
材に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical material carrying member for placing an optical material and carrying it into a molding apparatus when an optical element is manufactured by press-molding a heat-softened optical material.
【０００２】[0002]
【従来の技術】従来、ガラス製の光学素子を得る方法の
１つとして、ガラス材を所望する光学素子に近似した形
状に研削、研磨加工して光学素材とし、この光学素材を
光学素材搬送部材（以下、搬送部材と称する。）によっ
て支持しつつ成形装置内へ搬送し、搬送部材とともに光
学素材を加熱し、光学素材が成形可能な程度に軟化した
後、高精度に加工された一対の成形金型により所望の形
状に押圧成形する方法がある。2. Description of the Related Art Conventionally, as one of methods for obtaining an optical element made of glass, a glass material is ground and polished into a shape similar to a desired optical element to form an optical material, and this optical material is an optical material conveying member. While being supported by a (conveying member), it is conveyed into the molding apparatus, the optical material is heated together with the conveying member, the optical material is softened to a moldable degree, and then a pair of moldings are processed with high precision. There is a method of press molding into a desired shape using a mold.
【０００３】このような方法において、搬送部材は、光
学素材と共に加熱されるため、耐熱性が高く、光学素材
との濡れ性が悪い材料により構成することが望ましい。
このような搬送部材としては、例えば特開平４−１３９
０３１号公報記載のものがある。この公報に記載された
搬送部材は、筒状で、その内側面には、光学素材を載置
するための段状の載置部を有している。In such a method, since the conveying member is heated together with the optical material, it is desirable that the conveying member is made of a material having high heat resistance and poor wettability with the optical material.
As such a conveying member, for example, JP-A-4-139 is available.
There is one described in Japanese Patent No. 031. The conveying member described in this publication is cylindrical and has a stepped mounting portion for mounting an optical material on the inner surface thereof.
【０００４】この搬送部材はタングステン（以下Ｗと称
する。）を主成分とした合金より構成されており、搬送
部材の表面であって、光学素材とは接触しない部位に、
炭化物、窒化物、酸化物などの耐熱性被膜層を施してい
る。上記公報に記載された搬送部材によると、構成材料
としてＷを主成分としているため、搬送部材と成形した
光学素子とが焼き付くことを防ぐことができるととも
に、耐熱性被膜層を施したことにより、高温における耐
酸化性が高くなる。The transport member is made of an alloy containing tungsten (hereinafter referred to as W) as a main component, and is provided on the surface of the transport member, which is not in contact with the optical material.
A heat resistant coating layer of carbide, nitride, oxide or the like is applied. According to the transport member described in the above publication, since W is the main component as a constituent material, it is possible to prevent the transport member and the molded optical element from being seized, and by applying the heat resistant coating layer, Higher oxidation resistance at high temperatures.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記公
報に記載された搬送部材の構成材料の主成分はＷである
が、添加剤としてモリブデン（以下、Ｍｏと称する。）
を含んでいる。Ｍｏは、７５０℃付近以上の加熱により
酸化物となって昇華して光学素材表面に付着するので、
成形された光学素子は、表面が荒れたり、曇りを生じた
りする等の問題があった。However, although the main component of the constituent material of the conveying member described in the above publication is W, molybdenum (hereinafter referred to as Mo) is used as an additive.
Contains. Since Mo sublimes into an oxide by heating above 750 ° C and adheres to the surface of the optical material,
The molded optical element has problems such as roughened surface and cloudiness.
【０００６】本発明は上記問題点に鑑み、光学素材を加
熱軟化する際に、構成材料が昇華して光学素材に付着物
を生じることなく、光学素子の表面が荒れたり、曇りを
生じたりすることない光学素材搬送部材を提供すること
を目的とする。In view of the above-mentioned problems, the present invention, when softening an optical material by heating, does not sublimate the constituent material to form an adhered matter on the optical material, and the surface of the optical element is roughened or clouded. It is an object of the present invention to provide an optical material conveying member that does not have such a material.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、請求項１の発明は、加熱軟化した光学素材を成形装
置内の成形金型にて押圧成形することにより光学素子を
製造する際に用いるものであって、光学素材を載置して
上記成形装置内に搬送するための光学素材搬送部材にお
いて、基材としてタングステン（以下、Ｗと称する。）
を８０〜９８ｍａｓｓ％含有し、残りは鉄−ニッケル合
金（以下、Ｆｅ−Ｎｉ合金と称する。）をバインダ（結
合材）として焼結したことを特徴とする。In order to achieve the above object, the invention of claim 1 is to manufacture an optical element by press-molding a heat-softened optical material with a molding die in a molding apparatus. In the optical material transporting member for mounting the optical material and transporting the optical material into the molding apparatus, tungsten (hereinafter, referred to as W) is used as a base material.
Is contained in an amount of 80 to 98 mass% and the rest is sintered using an iron-nickel alloy (hereinafter referred to as Fe-Ni alloy) as a binder.
【０００８】また、請求項２の発明は、請求項１の搬送
部材において、光学素材と接触する部分以外の全表面
に、炭化物、窒化物、酸化物、またはこれらの複合層か
らなる耐熱性被膜を施したことを特徴とする。請求項１
の発明における搬送部材に光学素材を載置して加熱する
と、搬送部材表面では、加熱によって搬送部材基材中に
含まれる成分の酸化が進行し、Ｎｉ、Ｗ、Ｆｅの酸化物
は粒状となって表面に析出する。According to a second aspect of the present invention, in the carrying member according to the first aspect, a heat-resistant coating film made of a carbide, a nitride, an oxide, or a composite layer thereof is formed on the entire surface except the portion in contact with the optical material. It is characterized by having been given. Claim 1
When the optical material is placed on the transport member in the invention of claim 1 and heated, the components contained in the transport member base material are oxidized by heating on the surface of the transport member, and the oxides of Ni, W and Fe become granular. Are deposited on the surface.
【０００９】このとき、Ｎｉが優先的に酸化される。Ｎ
ｉ、Ｗ、Ｆｅの各酸化物が昇華する温度は、Ｎｉが１８
００℃以上、Ｗが１８００℃以上、Ｎｉが１３５０℃以
上であるため、Ｎｉ、Ｗ、Ｆｅの各酸化物は、ガラス材
からなる光学素材を押圧成形可能となる程度の温度（７
００℃〜８００℃位）では昇華しない。At this time, Ni is preferentially oxidized. N
The temperature at which each oxide of i, W, and Fe sublimes is 18 Ni.
Since the temperature is 00 ° C. or higher, W is 1800 ° C. or higher, and Ni is 1350 ° C. or higher, each oxide of Ni, W, and Fe has a temperature (7
It does not sublime at 00 ° C to 800 ° C).
【００１０】また、Ｎｉ、Ｗ、Ｆｅの酸化物の粉末は、
光学素材を成形して光学素子とした後、光学素子を搬送
部材から取り出す際に、離型材として働くとともに、光
学素子に付着して搬送部材と光学素子との焼き付きを防
止している。尚、Ｗを全体の８０〜９８ｍａｓｓ％とし
たのは、Ｗが全体の８０ｍａｓｓ％未満であると高温下
の材料の強度に難があり、Ｗが全体の９８ｍａｓｓ％を
ｑ越えると、バインダとしてのＦｅ、Ｎｉが少なくな
り、温度に関わらず機械的強度に難があるためである。The oxide powders of Ni, W and Fe are
After the optical material is molded into an optical element, when the optical element is taken out of the conveying member, it acts as a release material, and adheres to the optical element to prevent seizure between the conveying member and the optical element. Incidentally, the reason why W is set to 80 to 98 mass% is that when W is less than 80 mass% of the whole, the strength of the material at high temperature is difficult, and when W exceeds 98 mass% of q, the content of W as a binder is high. This is because Fe and Ni are reduced and mechanical strength is difficult regardless of temperature.
【００１１】また、請求項２の発明における搬送部材に
光学素材を載置して加熱すると、耐熱性被膜を施してい
ない箇所については、上記請求項１の場合と同様の作用
があり、耐熱性被膜を施した箇所については、耐熱性被
膜の酸化進行速度が遅いため、搬送部材を構成するＮ
ｉ、Ｗ、Ｆｅへの酸化が進行しない。Further, when the optical material is placed on the conveying member in the invention of claim 2 and heated, the portion having no heat-resistant coating has the same action as in the case of the above-mentioned claim 1, and the heat resistance is improved. In the area where the coating is applied, since the oxidation-promoting rate of the heat resistant coating is slow, N constituting the transport member is formed.
Oxidation to i, W, Fe does not proceed.
【００１２】[0012]
（実施の形態１）本実施の形態について、図１を用いて
説明する。図１は本実施の形態における搬送部材の断面
図である。図１に示す通り、搬送部材１は筒状で、その
外側面１ａの上方につば部１ｂを有するとともに、その
内側面１ｃに段状の載置部１ｄを有する。(Embodiment 1) This embodiment will be described with reference to FIG. FIG. 1 is a sectional view of a carrying member according to the present embodiment. As shown in FIG. 1, the transport member 1 is cylindrical and has a flange portion 1b above the outer surface 1a and a stepped mounting portion 1d on the inner surface 1c.
【００１３】つば部１ｂは、加熱炉（図示省略）を含む
成形装置（図示省略）内に搬送部材１を搬送する際に、
搬送装置（図示省略）の支持部とする部位であり、載置
部１ｄは光学素材２を載置する部位である。尚、内側面
１ｃの内径は光学素材２の外径より大径であるととも
に、載置部１ｄの内径は光学素材２の外径より小径とし
ている。The collar portion 1b is provided when the carrying member 1 is carried into a molding apparatus (not shown) including a heating furnace (not shown).
The mounting portion 1d is a portion that serves as a support portion of the transport device (not shown), and the mounting portion 1d is a portion on which the optical material 2 is mounted. The inner diameter of the inner side surface 1c is larger than the outer diameter of the optical material 2, and the inner diameter of the mounting portion 1d is smaller than the outer diameter of the optical material 2.
【００１４】上記形状の搬送部材１は、Ｗ粉末と、Ｆ
ｅ：Ｎｉ＝１００ｍａｓｓ％：１７．５ｍａｓｓ％の組
成であるＦｅ−Ｎｉ合金とを質量比９６：４で混合し、
ＨＩＰ法（熱間等方圧成形）にて焼結したものであり、
最終的には、９６ｍａｓｓ％Ｗ，３．４ｍａｓｓ％Ｆ
ｅ，０．６ｍａｓｓ％Ｎｉの組成である合金としてい
る。次に、上記構成からなる搬送部材１に光学素材２を
載置して光学素材２を成形する工程について説明する。The conveying member 1 having the above-mentioned shape is composed of W powder, F powder, and F powder.
e: Ni = 100 mass%: 17.5 mass% and a Fe-Ni alloy having a composition of 96: 4 by mass ratio,
Sintered by HIP method (hot isostatic pressing),
Finally, 96 mass% W, 3.4 mass% F
e, an alloy having a composition of 0.6 mass% Ni. Next, a step of placing the optical material 2 on the conveying member 1 having the above-described structure and molding the optical material 2 will be described.
【００１５】まず、ガラス材を所望の光学素子の形状に
近似した形状に研削、研磨加工して光学素材２とする。
次に、この光学素材２を上記搬送部材１の載置部１ｄに
載せ、搬送装置によって外側面１ａの上方のつば部１ｂ
を支持しつつ加熱炉に搬送し、搬送部材１とともに光学
素材２を加熱する。First, a glass material is ground and polished into a shape similar to the shape of a desired optical element to obtain an optical material 2.
Next, the optical material 2 is placed on the mounting portion 1d of the conveying member 1, and the collar portion 1b above the outer surface 1a is conveyed by the conveying device.
The optical material 2 is heated together with the conveying member 1 while being conveyed to a heating furnace.
【００１６】本実施の形態では、光学素材２にＢＳＬ−
７（Ｔｇ点５６５℃）を用い、７８０℃に加熱した。こ
の加熱により、搬送部材１を構成するＮｉ、Ｗ、Ｆｅは
酸化され、粉末状となって搬送部材１の表面に析出し、
酸化物層を形成する。このとき、Ｎｉ、Ｗ、Ｆｅのそれ
ぞれの酸化物の昇華温度は、順に１８００℃以上、１８
００℃以上、１３５０℃以上であるため、７８０℃程度
の温度では昇華しない。In this embodiment, the optical material 2 is made of BSL-.
7 (Tg point 565 ° C) was used and heated to 780 ° C. By this heating, Ni, W, and Fe that constitute the transport member 1 are oxidized and become powdery, and are deposited on the surface of the transport member 1,
Form an oxide layer. At this time, the sublimation temperatures of the oxides of Ni, W, and Fe are 1800 ° C. or higher and 18
Since it is 00 ° C or higher and 1350 ° C or higher, it does not sublime at a temperature of about 780 ° C.
【００１７】尚、Ｎｉ、Ｗ、Ｆｅの中ではＮｉが優先的
に酸化される。引き続き７８０℃で加熱を行い、光学素
材２が成形可能な程度まで軟化したら、成形装置内の成
形金型で所望形状の光学素子に押圧成形する。このと
き、光学素材２は、搬送部材１に載置されたまま、成形
金型によって上下の面を押圧成形される。Among Ni, W, and Fe, Ni is preferentially oxidized. Subsequently, heating is performed at 780 ° C., and when the optical material 2 is softened to such an extent that it can be molded, it is press-molded into an optical element having a desired shape with a molding die in a molding apparatus. At this time, the optical material 2 is press-molded on the upper and lower surfaces by the molding die while being placed on the conveying member 1.
【００１８】光学素材２を光学素子２に押圧成形した
後、搬送部材１から光学素子２を取り出すのであるが、
このとき、光学素子２と搬送部材１の内側面１ｃおよび
載置部１ｄとの間に析出したＮｉ、Ｗ、Ｆｅの酸化物の
粒子は、光学素子２に対して離型材として働く。以後、
上記手順を繰り返すことで、複数の光学素子２を製造す
る。After the optical material 2 is press-molded onto the optical element 2, the optical element 2 is taken out from the conveying member 1.
At this time, the particles of oxides of Ni, W, and Fe deposited between the optical element 2 and the inner surface 1c of the transport member 1 and the mounting portion 1d act as a release material for the optical element 2. Since then
By repeating the above procedure, a plurality of optical elements 2 are manufactured.
【００１９】尚、１度使用した搬送部材１を再び使用す
る場合でも、再び加熱されることで新たなＮｉ、Ｗ、Ｆ
ｅの酸化物層が形成される。これが繰り返されることに
より搬送部材１の離型性は確保される。本実施の形態に
よると、光学素材と共に搬送部材を高温に加熱しても、
光学素子の表面に搬送部材の構成材料の昇華物が付着す
るようなことはない。Even when the transport member 1 that has been used once is reused, it is heated again to generate new Ni, W, F.
An oxide layer of e is formed. By repeating this, the releasability of the transport member 1 is secured. According to the present embodiment, even if the conveying member is heated to a high temperature together with the optical material,
Sublimates of the constituent material of the conveying member do not adhere to the surface of the optical element.
【００２０】また、搬送部材の表面、特に内側面や載置
部といった光学素子と直接接する部分に析出した酸化物
の粉末が離型材の働きをするため、搬送部材から光学素
子を取り出すのが容易となる。また、これら酸化物の粉
末は、光学素材の加熱軟化時および成形時において、加
熱軟化した光学素材に付着するため、成形後、搬送部材
の内側面および載置部と光学素子とが焼き付くことがな
い。 （実施の形態２）本実施の形態について、図２、図３を
用いて説明する。Further, since the oxide powder deposited on the surface of the conveying member, particularly on the inner side surface or the mounting portion, which directly contacts the optical element, serves as a mold release material, it is easy to take out the optical element from the conveying member. Becomes Further, since powders of these oxides adhere to the heat-softened optical material during heat-softening and molding of the optical material, the inner surface of the conveying member, the mounting portion, and the optical element may be seized after molding. Absent. (Embodiment 2) This embodiment will be described with reference to FIGS.
【００２１】図２は本実施の形態における搬送部材の断
面図であり、図３は本実施の形態の作用を説明するため
の図である。本実施の形態における搬送部材３は、上記
実施の形態１にて用いた搬送部材３（図１参照）と同一
の形状であり、光学素材２と接触する内側面３ｃと光学
素材２を載置する載置部３ｄ以外の表面全面に、窒化物
からなる耐熱性被膜として、ＣＶＤ、スパッタリング等
の方法によりＴｉＮコーティング４を施してある。FIG. 2 is a cross-sectional view of the conveying member in this embodiment, and FIG. 3 is a view for explaining the operation of this embodiment. The carrying member 3 in the present embodiment has the same shape as the carrying member 3 (see FIG. 1) used in the first embodiment, and the inner surface 3c and the optical material 2 that come into contact with the optical material 2 are placed. A TiN coating 4 is applied as a heat-resistant coating made of a nitride by a method such as CVD or sputtering on the entire surface except the mounting portion 3d.
【００２２】次に、上記搬送部材３の作用について説明
する。光学素材２を上記搬送部材３の載置部３ｄに載
せ、搬送装置によって外側面３ａの上方のつば部３ｂを
支持しつつ加熱炉に搬送し、搬送部材３とともに光学素
材２を加熱するまでは、上記実施の形態１と同様であ
る。搬送部材３を加熱、軟化すると、ＴｉＮコーティン
グ４の施されていない内側面３ｃおよび載置部３ｄに
は、加熱による高温状態で、その表面に、Ｎｉ、Ｗ、Ｆ
ｅの酸化物が粉末となって析出する。Next, the operation of the transport member 3 will be described. Until the optical material 2 is placed on the mounting portion 3d of the above-mentioned conveying member 3 and is conveyed to the heating furnace while supporting the flange portion 3b above the outer side surface 3a by the conveying device, the optical material 2 is heated together with the conveying member 3. The same as in Embodiment 1 above. When the transport member 3 is heated and softened, the inner surface 3c not coated with the TiN coating 4 and the mounting portion 3d are heated to a high temperature, and Ni, W, F
The oxide of e is deposited as powder.
【００２３】これによって、図３に示す通り、搬送部材
３の内側面３ｃおよび載置部３ｄには、酸化物層５が形
成される。搬送部材３のその他の表面、すなわち、Ｔｉ
Ｎコーティング４の施されている表面は、加熱による高
温状態でも、その表面の酸化に留まる。従って、ＴｉＮ
コーティング４の施されている部位から内部、つまり、
Ｗ、Ｎｉ、Ｆｅからなる合金への酸化の進行は極めて遅
いので、搬送部材の構成材料（Ｗ、Ｎｉ、Ｆｅ）の消費
が防止される。As a result, as shown in FIG. 3, the oxide layer 5 is formed on the inner surface 3c and the mounting portion 3d of the carrying member 3. The other surface of the transport member 3, that is, Ti
The surface on which the N coating 4 is applied remains oxidized even at a high temperature due to heating. Therefore, TiN
From the part where the coating 4 is applied to the inside, that is,
Since the progress of oxidation into the alloy consisting of W, Ni, and Fe is extremely slow, consumption of the constituent materials (W, Ni, Fe) of the transport member is prevented.
【００２４】成形可能な温度まで加熱、軟化された光学
素材２は、上記実施の形態１と同様に、成形金型によっ
て押圧成形され、光学素子２となる。成形後、光学素子
２を搬送部材３から取り出す際、内側面３ｃおよび載置
部３ｄに析出したＮｉ、Ｗ、Ｆｅ酸化物の粉末が、搬送
部材３の内側面３ｃおよび載置部３ｄと軟化した光学素
子２との間で離型材として働く。The optical material 2 that has been heated and softened to a temperature at which it can be molded is pressed by a molding die to form the optical element 2 as in the first embodiment. When the optical element 2 is taken out from the conveying member 3 after molding, the powders of Ni, W, and Fe oxides deposited on the inner surface 3c and the mounting portion 3d are softened with the inner surface 3c of the conveying member 3 and the mounting portion 3d. It works as a mold release material with the formed optical element 2.
【００２５】また、これら酸化物の粉末は、軟化した光
学素子２に付着するため、搬送部材３の内側面３ｃおよ
び載置部３ｄと光学素子２とが焼き付くことがない。本
実施の形態によれば、上記実施の形態１と同様の効果が
得られるとともに、ＴｉＮコーティングを施すことによ
り、搬送部材の全体的な高温酸化の進行を最小限に抑
え、構成材料の不必要な消費を防ぐことができるため、
実施の形態１の搬送部材よりも、搬送部材としての寿命
が長くなる。Further, since the oxide powder adheres to the softened optical element 2, the inner surface 3c of the conveying member 3 and the mounting portion 3d and the optical element 2 are not seized. According to the present embodiment, the same effects as those of the first embodiment can be obtained, and by applying the TiN coating, the progress of the high temperature oxidation of the entire conveying member can be minimized, and the constituent materials can be made unnecessary. Since it can prevent unnecessary consumption,
The life of the carrying member is longer than that of the carrying member of the first embodiment.
【００２６】尚、その他の窒化物としてＢＮを用いても
その作用、効果は本実施の形態と同様である。 （実施の形態３）本実施の形態は、上記実施の形態２に
おけるＴｉＮコーティング４（図２、３参照）に換え、
酸化物からなる耐熱性被膜としてＡｌ2 Ｏ3 コーティン
グを施した点以外は上記実施の形態２と同様である。Even if BN is used as the other nitride, its action and effect are the same as those of this embodiment. (Embodiment 3) In this embodiment, the TiN coating 4 (see FIGS. 2 and 3) in Embodiment 2 is replaced by
The second embodiment is the same as the second embodiment except that an Al 2 O 3 coating is applied as a heat resistant coating made of an oxide.
【００２７】Ａｌ2 Ｏ3 コーティングを施した場合であ
っても、その作用、効果は上記実施の形態２と同様であ
る。 （実施の形態４）本実施の形態は、上記実施の形態２に
おけるＴｉＮコーティング４（図２、３参照）に換え、
炭化物からなる耐熱性被膜としてＴｉＣコーティングを
施した点以外は上記実施の形態２と同様である。Even when an Al 2 O 3 coating is applied, its function and effect are similar to those of the second embodiment. (Embodiment 4) In this embodiment, the TiN coating 4 (see FIGS. 2 and 3) in Embodiment 2 is replaced by
The second embodiment is the same as the second embodiment except that a TiC coating is applied as the heat resistant coating made of carbide.
【００２８】ＴｉＣコーティングを施した場合であって
も、その作用、効果は上記実施の形態２と同様である。 （実施の形態５）本実施の形態では、上記実施の形態２
におけるＴｉＮコーティング４（図２、３参照）に換
え、耐熱性被膜を２層の被膜より構成した点以外は上記
実施の形態２と同様である。Even when the TiC coating is applied, the operation and effect are the same as those in the second embodiment. (Fifth Embodiment) In the present embodiment, the above-described second embodiment is used.
The second embodiment is the same as the second embodiment except that the heat resistant coating is composed of two layers instead of the TiN coating 4 (see FIGS. 2 and 3).
【００２９】本実施の形態における耐熱性被膜は、搬送
部材３の表面にＴｉＣコーティング、このＴｉＣコーテ
ィングの上にＴｉＮコーティングを施したものである。
本実施の形態によると、上記実施の形態２と同様の効果
を得ることができるとともに、耐熱性被膜を２層にした
ため、耐熱性被膜が厚くなりすぎず、膜厚の寸法設定を
行い易い。 （実施の形態６）本実施の形態における耐熱性被膜は、
上記実施の形態５における耐熱性被膜の上にＡｌ2 Ｏ3
コーティングを施し、３層の被膜より構成した点以外は
上記実施の形態５と同様である。The heat-resistant coating in the present embodiment is obtained by applying the TiC coating on the surface of the conveying member 3 and the TiN coating on the TiC coating.
According to the present embodiment, the same effect as in Embodiment 2 can be obtained, and since the heat-resistant coating has two layers, the heat-resistant coating does not become too thick and the film thickness can be easily set. (Embodiment 6) The heat-resistant coating in the present embodiment is
Al 2 O 3 is formed on the heat resistant coating in the fifth embodiment.
The third embodiment is the same as the fifth embodiment except that it is coated and is composed of three layers.
【００３０】本実施の形態によると、上記実施の形態５
と同様の効果を得られるとともに、最表層にＡｌ2 Ｏ3
コーティングを施したため、耐熱性がさらに向上する。According to the present embodiment, the above-mentioned fifth embodiment
The effect similar to that of Al 2 O 3 can be obtained on the outermost layer.
Since the coating is applied, the heat resistance is further improved.
【００３１】[0031]
【発明の効果】請求項１の発明によると、搬送する光学
素材の成形温度において搬送部材の構成成分が昇華しな
いので、成形した光学素子の表面には昇華物が付着しな
い。従って、光学素子の表面が荒れたり、曇りを生じた
りすることがない。また、請求項２の発明によると、請
求項１の搬送部材の表面に耐熱性被膜を施すことによ
り、搬送部材の全体的な高温酸化の進行を最小限に抑え
て構成材料の不必要な消費を防ぎ、搬送部材としての寿
命を長くすることができる。According to the first aspect of the present invention, since the constituent components of the conveying member do not sublime at the forming temperature of the optical material to be conveyed, the sublimate does not adhere to the surface of the formed optical element. Therefore, the surface of the optical element is not roughened or clouded. Further, according to the invention of claim 2, by applying a heat resistant coating on the surface of the carrying member according to claim 1, the progress of the high temperature oxidation of the carrying member as a whole is minimized, and unnecessary consumption of the constituent materials is suppressed. Can be prevented and the life of the transport member can be extended.
【図１】本発明の実施の形態１における搬送部材の断面
図である。FIG. 1 is a sectional view of a carrying member according to a first embodiment of the present invention.
【図２】本発明の実施の形態２における搬送部材の断面
図である。FIG. 2 is a sectional view of a carrying member according to a second embodiment of the present invention.
【図３】本発明の実施の形態２における搬送部材の作用
を説明するための図である。FIG. 3 is a diagram for explaining an operation of a carrying member according to the second embodiment of the present invention.
１、３ 搬送部材 １ｃ、３ｃ 内側面 １ｄ、３ｄ 載置部 ２ 光学素材、光学素子 ４ ＴｉＮコーティング ５ 酸化物層 1, 3 Conveying members 1c, 3c Inner side surfaces 1d, 3d Mounting portion 2 Optical material, optical element 4 TiN coating 5 Oxide layer
Claims (2)
金型にて押圧成形することにより光学素子を製造する際
に用いるものであって、光学素材を載置して上記成形装
置内に搬送するための光学素材搬送部材において、 基材としてタングステンを８０〜９８ｍａｓｓ％含有
し、残りは鉄−ニッケル合金をバインダとして焼結した
ことを特徴とする光学素材搬送部材。1. A method for producing an optical element by press-molding a heat-softened optical material with a molding die in a molding apparatus, wherein the optical material is placed in the molding apparatus. An optical material transporting member for transporting, which comprises 80 to 98 mass% of tungsten as a base material and the rest is sintered using an iron-nickel alloy as a binder.
炭化物、窒化物、酸化物、またはこれらの複合層からな
る耐熱性被膜を施したことを特徴とする請求項１記載の
光学素材搬送部材。2. The entire surface other than the part that comes into contact with the optical material,
The optical material conveying member according to claim 1, wherein a heat resistant coating made of a carbide, a nitride, an oxide, or a composite layer thereof is applied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8117396A JPH09268019A (en) | 1996-04-03 | 1996-04-03 | Conveyance member for optical material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8117396A JPH09268019A (en) | 1996-04-03 | 1996-04-03 | Conveyance member for optical material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09268019A true JPH09268019A (en) | 1997-10-14 |
Family
ID=13739080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8117396A Pending JPH09268019A (en) | 1996-04-03 | 1996-04-03 | Conveyance member for optical material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09268019A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140137315A (en) * | 2013-05-22 | 2014-12-02 | 도시바 기카이 가부시키가이샤 | Mold set |
| US9943990B2 (en) | 2012-09-28 | 2018-04-17 | Toshiba Kikai Kabushiki Kaisha | Shape forming system and shape forming method |
-
1996
- 1996-04-03 JP JP8117396A patent/JPH09268019A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9943990B2 (en) | 2012-09-28 | 2018-04-17 | Toshiba Kikai Kabushiki Kaisha | Shape forming system and shape forming method |
| US10252446B2 (en) | 2012-09-28 | 2019-04-09 | Toshiba Kikai Kabushiki Kaisha | Shape forming system and shape forming method |
| KR20140137315A (en) * | 2013-05-22 | 2014-12-02 | 도시바 기카이 가부시키가이샤 | Mold set |
| US9505149B2 (en) | 2013-05-22 | 2016-11-29 | Toshiba Kikai Kabushiki Kaisha | Mold set |
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