JPH09260456A - Monitor of interface signal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a monitor wherein an operator can monitor easily interface signals transmitted and received among a plurality of devices, when the acceptance and delivery of a sample are performed among the plurality of devices controlled by the different control systems from each other. SOLUTION: In the present monitor 110, there are provided a first display means 126a for displaying a first information in response to the calling of a first interface signal showing that a reception side device 104 for receiving a sample L is brought into a first state, a second display means 120a for displaying a second information in response to the calling of a second interface signal showing that a transmission side device 102 for transmitting the sample L is brought into a second state, and centralized monitoring means 114, 116 provided to make the simultaneous visiblenesses of the first and second informations possible. As a result an operator can confirm visiually and easily the transmission and reception states of the interface signals.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an interface signal monitoring apparatus, and more particularly, to a sample (for example, a semiconductor wafer or a glass substrate) between a plurality of apparatuses (for example, a coating apparatus and an exposure apparatus) controlled by different control systems. The present invention relates to a monitoring device for an interface signal transmitted / received between the devices at the time of delivery.

[0002]

2. Description of the Related Art In a process of manufacturing a semiconductor wafer or an LCD substrate, each individual process is performed by different processing devices controlled by different control systems, and a sample such as a semiconductor wafer or a glass substrate is transferred by a transfer device such as a transfer arm. It is passed between each processing device. For example,
Taking a case where a glass substrate is transferred between the coating device and the exposure device as an example, in the coating device, the glass substrate coated with a predetermined developing solution is transferred to the exposure device by the transfer arm, and the exposure device is exposed. After the exposure process in
It is again paid out from the exposure device by the transfer arm. By the way, since the time required for the process performed in each processing device is different, information is exchanged between the devices by communication by parallel input / output so that the glass substrate is not sent from the coating device to the exposure device being processed, for example. Control.

As described above, even in the conventional device, the devices communicate with each other by parallel input / output, but the operator does not have a means for visually confirming the transmission / reception state of the interface signal used for the communication. It was not possible to intuitively check the transmission / reception status. Or,
In the conventional device, when the operator dares to visually check the transmission / reception state of signals between the devices, the operator has to confirm by lighting the LED or the like provided on the signal processing board of each device. However, it is a very complicated work for the operator, and it is difficult to visually check the signal processing boards of different devices at the same time. As described above, in the conventional device, it is difficult or difficult to visually confirm the signal transmission / reception state. Therefore, when a trouble occurs due to communication, it often takes time to investigate the cause of the trouble. It was a problem.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems of the conventional device, and when transferring a sample between a plurality of devices controlled by different control systems, Interface signals that can be easily and swiftly taken in the event of a communication-related trouble by taking measures to easily and visually check the status of the interface signals transmitted and received between the devices. It is to provide a monitoring device.

[0005]

In order to solve the above-mentioned problems, according to claim 1, when a sample (L) is transferred between a plurality of devices (102, 104) controlled by different control systems. To the monitoring device (110) for the interface signal transmitted and received between the devices in response to the transmission of the first interface signal indicating that the receiving side device (104) receiving the sample (L) enters the first state. The second information is displayed in response to the transmission of the second interface signal indicating that the first display means (126a) for displaying information and the sender side device (102) for sending out the sample (L) enter the second state. The second display means (120a) and the centralized monitoring means (114, 11) arranged so that the first and second information can be viewed at the same time.
6) and are provided. Therefore, the operator can easily and intuitively grasp the transmission / reception state of the interface signal only by observing the centralized monitoring means (114, 116).

Further, as described in claim 2, by providing the device with a timing controller for controlling the display time of the first and second information, the transmission / reception state of the interface signal can be grasped more accurately. Can be done.
At this time, it is preferable that the display of the second information related to the sender device is continued at least until the display of the first information related to the receiver device is completed. Furthermore, in the above apparatus, as in claim 4, forced transmission means for forcibly transmitting the first or second interface signal to the other apparatus regardless of the state of the receiving side apparatus or the sending side apparatus. (120b-12
8b), or as described in claim 5, a check terminal (120c-) for outputting the first or second interface signal to the centralized monitoring device to an external device.
By providing 128c), when a trouble occurs, the cause of the trouble can be investigated quickly and easily.

[0007]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
A preferred embodiment of the interface signal monitoring device according to the present invention will be described in detail by taking as an example a case where a glass substrate is transported between a coating device and an exposure device. In FIG. 1, an apparatus 102 is a developing solution coating apparatus, which cleans a glass substrate L (La, Lb, Ld) and then coats a predetermined developing solution on the surface thereof. Also, the coating device 1
An apparatus 104 installed adjacent to 02 is an exposure apparatus, which prints a mask pattern on the glass substrate L coated with the developing solution with exposure light. In general,
These devices 102 and 104 are controlled by different control systems (indicated by control panels 102a and 104b in the figure) and have different processing speeds. For example, the coating device 102 is different from the exposure device 104 during the exposure process. From the devices 102 and 104, a physical interference state in which the glass substrate L coated with the developing solution is sent from the device does not occur.
Exchange information about the processing status with each other, and the coating device 10
2 is controlled so as to send out the glass substrate L after confirming the vacancy of the exposure device 104. For such information exchange, the control panels 102a and 104a of the respective devices are connected to each other by an interface cable 106. In the illustrated system, 108a and 108b are carriers for housing the glass substrates L to be processed.

In the above-described device configuration, when there is no means for visually observing the interface signals transmitted and received via the interface cable 106 in the related art, a malfunction occurs in the communication system. In addition, it is difficult to find out the cause of the malfunction and it takes a lot of time. In this respect, according to the present embodiment, a centralized monitoring device (interface monitor panel) 110 is provided on the side of the exposure apparatus 104 so that the operator can easily and simultaneously perform the transmission / reception of interface signals between the coating apparatus 102 and the exposure apparatus 104. It is configured to be visible. In the illustrated example, the centralized monitoring apparatus 110 is installed in the exposure apparatus 104, but of course the coating apparatus 102
It may be installed on the side. Further, the centralized monitoring device 110 may be configured separately from the above devices 102 and 104.

FIG. 2 shows an embodiment of the centralized monitoring device 110 applied to the system shown in FIG.
As shown, the centralized monitoring device 110 includes a panel 11
2, a first area 114 for displaying and operating information about the sender-side device 102 and a receiver-side device 104.
And a second area for performing operations.

First, the first area 114 relating to the sender side device 102 will be described. The first area 114 includes a “SEND” area 120 for displaying and operating information related to transmission of an interface signal for notifying the delivery of the glass substrate L from the sender side apparatus 102, and the sender side apparatus 1
A “LOT END” area 122 for displaying and operating information related to transmission of an interface signal for notifying the end of feeding of one lot of glass substrates L from 20;
An “ERROR” area 124 is provided for displaying and operating information related to transmission of an interface signal that informs the sender-side device 102 of a trouble that has occurred. Each area has a light emitting device 120a, 122 such as an LED, which informs the operator of the transmission of each interface signal.
a, 124a and the switch 120 for forcibly turning on / off each interface signal regardless of the states of the sender-side device 102 and the receiver-side device 104.
b, 122b, 124b and check terminals 120c, 122c, 122c for drawing out the interface signal transmitted from the sender side device 102 to an external inspection device, respectively.

Next, the second area 116 relating to the receiver side device 104 will be described. The first area 114 is generated in the receiving side apparatus 104 and the “READY” area 126 for displaying and operating the information regarding the transmission of the interface signal indicating that the receiving side apparatus 104 is ready to receive the glass substrate L. An “ERROR” area 128 is provided for displaying and operating information related to transmission of an interface signal for reporting a trouble. Each area includes a light emitting device 126a, such as an LED, which notifies the operator of the transmission of each interface signal.
128a, sender side device 102 and receiver side device 1
Switch 126b, 1 for forcibly turning on / off each interface signal regardless of the state of 04.
28b and check terminals 126c and 128c for drawing out the interface signal transmitted from the receiver side device 102 to an external inspection device, respectively.

Next, the function of the centralized monitoring device 110 configured as described above will be described. (1) Interface Signal Display Function First, the interface signal display function of the centralized monitoring device 110 according to the present embodiment will be described. First, in the case of an interface involving physical transfer of a glass substrate (hence, an interface that requires a certain amount of time), first, as shown in the timing chart of FIG. After confirming that the receiver device 104 is ready to be received, the sender device 102 displays the “SEND” area 120.
The LED 120a of the receiver is turned on (t11), and the receiving device 1
The glass substrate L is transferred to 04. After that, sender device 1
02 is a “READY” area 12 on the side of the receiver device 104.
After confirming that the LED 126a of No. 6 is turned off, "SEN
The LED 120a in the "D" area 120 is turned off. At this time, the time interval | t11 required for the physical transfer of the glass substrate.
-T12 | is usually at least 5 seconds or more, and during this period, the LED in the "SEND" area 120 on the panel 112 is
Since 124a is lit, the operator can visually recognize the transmission / reception state of the interface signal with a sufficient margin.

On the other hand, in the case of an interface that does not involve the physical transfer of the glass substrate (thus, in the case of an interface that does not require much time), the interface signal is displayed according to the timing chart shown in FIG. Is done. For example, the carriers 108a and 1 shown in FIG.
The “LOT END” signal issued when the transportation of one lot of glass substrates L stored in 08b is completed,
It corresponds to such an interface. Also in this case, FIG.
As in the case of the timing chart shown in FIG. 5, after confirming that the “REDY” LED 126a of the receiver side device 104 is lit, the “LOT END” L of the sender side device 102 is turned on.
The ED 122a lights up, and "RED" of the receiver side device 104
After confirming that the “Y” LED 126a is turned off, the “LOT END” LED 122a of the sender device 102 is turned off. However, the “LOT EN of the sender device 102 is
Lighting time of LED 122a for "D" | t21-t22 |
Is usually about several hundred milliseconds, so it is difficult for the operator to visually recognize the lighting of the “LOT END” LED 124a.

In such a case, according to the present embodiment,
The delay time DT is intentionally added before the “LOT END” LED 122a is turned off. This delay time DT is calculated by the operator using the LED 12 for “LOT END”.
Since it is set to a level that is sufficient for confirming whether the 2a is turned on or off, for example, about several seconds, the operator can confirm transmission / reception of the “LOT END” signal with a margin. In this case, since it is not necessary to delay the timing of transmitting the "LOT END" signal, the takt time of the entire device is hardly affected.

Further, the LED 12 for "LOT END"
Even when 2a is continuously turned on / off, there is usually no problem because the interval at which the “LOT END” LED 122a is turned on is sufficiently longer than the delay time DT. Of course, the delay time DT is "LOT
It is necessary to set in consideration of the interval at which the “END” LED 122a is turned on.

Further, when the "LOT END" signal is turned on, a signal having a pulse width similar to the delay time DT is generated on the centralized monitoring device 110 side, and the "LOT END" signal is used to generate the "LOT END" signal.
If the LED 122a for "TEND" is configured to be turned on, the LED 122a for "LOT END" can be turned on for a sufficient time for the operator to visually recognize it, without causing the delay time DT in the sender device 102. .

In the embodiment shown in FIG. 2,
Further, although an interface for generating an "ERROR" signal for notifying that the device is in a trouble state is set, regarding this "ERROR" signal,
As with the “LOT END” signal, no physical transfer time is required, so as with the timing chart shown in FIG.
By providing a predetermined delay time, the operator can easily understand the signal transmission / reception state. (2) Forced ON / OFF function of interface signal In each of the interface signal monitoring areas 120 to 128 of the centralized monitoring apparatus 110 according to the present embodiment, transmission / reception of an interface signal can be forcibly switched to an ON state or an OFF state. Switches 120b-128b
Is provided, it becomes possible to easily perform software debugging of the apparatus, and it is possible to arbitrarily set an abnormal state in communication.

An example of such a switching circuit is shown in FIG. As shown in FIG. 5, according to this switching circuit, during normal operation, the switch S is connected to the terminal SN, and the signal from the transmitting side is sent to the receiving side as it is. On the other hand, if the switch S is switched to the terminal SH side, it will always be + regardless of the signal from the transmission side.
A 5V high signal is sent to the receiver. On the other hand, if the switch S is switched to the terminal SL side, a 0V low-state signal is always sent to the receiving side regardless of the signal from the transmitting side. As described above, according to the present embodiment, it is possible to send an arbitrary signal (high signal / low signal) to the receiving side device regardless of the state of the transmitting side device. It is possible to easily debug the time. Further, even if a communication trouble occurs between the transmitting side device and the receiving side device, according to the present embodiment, it is possible to create an arbitrary abnormal state, so that the device causing the trouble can be identified. It is possible to easily investigate. (3) Signal Check Function Furthermore, the interface signal monitoring areas 120 to 128 of the centralized monitoring device 110 according to the present embodiment output the interface signals to an external inspection device or a storage device such as an oscilloscope or a memory hi-coder. Check terminals 120c to 128c are provided. Of course, even in the conventional device, the control panel 102a of each device,
The check terminal 104a was sometimes provided with the check terminal, but they were located apart from each other, and it was difficult for the operator to easily and almost simultaneously inspect and confirm the state of the interface signal. However, according to the present embodiment, the check terminals 120c to 128c are connected to the central monitoring device 1.
Since it is installed intensively in 10, the operator should be able to easily and swiftly carry out the investigation work not only by visual inspection but also by the equipment to record or record the signal status when a communication trouble occurs. You can

The switch groups 120b to 128b for forcibly turning on and off the interface signal and the check terminal group 120c to output the interface signal to the outside.
128c does not need to be used for normal device operation. Therefore, it is preferable that these terminal groups are covered with a panel or the like so as not to be operated unnecessarily during normal work.

The preferred embodiments of the interface signal monitoring apparatus according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to these examples. It is obvious to those skilled in the art that various modifications and changes can be conceived within the scope of the technical idea described in the claims, and of course, regarding the technical scope of the present invention. Be understood to belong to.

For example, in the above embodiment, the case where the interface signal monitoring device according to the present invention is applied to the system for transferring the glass substrate between the coating device and the exposure device has been described as an example. INDUSTRIAL APPLICABILITY The present invention is not limited to a glass substrate, and is not limited to a coating device and an exposure device, and can be applied to any system that transfers an arbitrary sample between a plurality of devices controlled by different control systems. It is possible. Furthermore, the interface signal monitoring device according to the present invention can be applied even within a device belonging to one unit as long as it is between devices controlled by different control systems. Further, in the above-described embodiment, an example in which the interface is performed by using the communication cable has been described, but the present invention is not limited to such an example, and the interface may be performed by optical transmission or wireless communication. It is possible to apply.

[0022]

As described above, according to the present invention,
Since the signal status during communication between the devices becomes clear at a glance, the operator can easily and quickly visually recognize the transmission / reception status of the interface signal. Therefore, when a trouble occurs due to communication between the devices or due to the trouble, the operator can easily and quickly investigate the state of the signal and investigate the cause of the trouble.

Regarding the information on the operation of the apparatus (for example, the lot end information used for identifying the production process and the production process) transmitted and received by the communication between the apparatuses without physically transferring the sample, It is possible to confirm in real time whether or not transmission / reception is reliably performed between the devices.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a schematic configuration of a system to which an interface signal monitoring device according to the present invention can be applied.

FIG. 2 is a schematic configuration diagram of a panel portion of an interface signal monitoring device according to the present invention.

FIG. 3 is a timing chart showing an operation of the interface signal monitoring device according to the present invention.

FIG. 4 is a timing chart showing an operation of the interface signal monitoring device according to the present invention.

FIG. 5 is a circuit diagram showing an example of an interface signal forced on / off control circuit of the interface signal monitoring device according to the present invention.

[Explanation of symbols]

 L glass substrate 102 sender side device 102a sender side device control panel 104 receiver side device 104a receiver side device control panel 106 communication cable 110 centralized monitoring device 120 "SEND" signal control area 122 "LOT END" signal control area 124 "ERROR" signal control area 126 "READY" signal control area 128 "ERROR" signal control area

Claims (5)

[Claims] 1. A monitoring device for an interface signal transmitted and received between a plurality of devices controlled by different control systems when the sample is transferred between the devices: a receiver side device for receiving the sample is a first device. 1st to enter the state
First display means for displaying first information in response to transmission of an interface signal; and second information for display in response to transmission of a second interface signal indicating that the sender side device for sending out the sample enters the second state Second display means for :; the first
And a centralized monitoring means arranged so that the second information can be visually recognized at the same time, and an interface signal monitoring device. 2. The interface signal monitoring device according to claim 1, further comprising a timing controller for controlling a display time of the first and second information. 3. The interface signal according to claim 2, wherein the display of the second information related to the sender device is continued at least until the display of the first information related to the receiver device is completed. Monitoring equipment. 4. A forced transmission means for forcibly transmitting the first or second interface signal to the partner device regardless of the state of the receiver device or the sender device. The interface signal monitoring device according to claim 1. 5. The interface signal monitoring device according to claim 1, wherein the centralized monitoring device includes a check terminal for outputting the first or second interface signal to an external device.