JPH0925490A - Solid lubricant for ultrahigh-vacuum - Google Patents
Solid lubricant for ultrahigh-vacuumInfo
- Publication number
- JPH0925490A JPH0925490A JP17309095A JP17309095A JPH0925490A JP H0925490 A JPH0925490 A JP H0925490A JP 17309095 A JP17309095 A JP 17309095A JP 17309095 A JP17309095 A JP 17309095A JP H0925490 A JPH0925490 A JP H0925490A
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- Prior art keywords
- solid lubricant
- carbon
- vacuum
- fluorinated
- ultrahigh
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、超高真空用固体潤
滑材に関する。TECHNICAL FIELD The present invention relates to a solid lubricant for ultra-high vacuum.
【０００２】[0002]
【従来の技術】従来、固体潤滑材としては、二硫化モリ
ブデン、グラファイト等が用いられており、通常の大気
圧下での使用においては、良好な潤滑特性を示すことが
知られている。しかしながら、これらの固体潤滑材は、
吸着性が高く、通常、大気中に存在する各種の気体等の
不純物成分を多量に吸着しており、例えば、１０-6トー
ルを下回る様な超高真空下において固体潤滑材として使
用する場合には、吸着されている成分を雰囲気中に放出
して使用環境を汚染するという問題点がある。2. Description of the Related Art Conventionally, molybdenum disulfide, graphite and the like have been used as solid lubricants, and it is known that they exhibit good lubricating characteristics when used under normal atmospheric pressure. However, these solid lubricants
It has high adsorptivity and usually adsorbs a large amount of impurity components such as various gases existing in the atmosphere. For example, when it is used as a solid lubricant under ultra-high vacuum of less than 10 -6 Torr. Has a problem that it releases the adsorbed components into the atmosphere and pollutes the use environment.
【０００３】これらの固体潤滑材を減圧下にベーキング
し処理することによって、吸着物を分離、放出させるこ
とも考えられるが、吸着量が非常に多いために、通常の
ベーキング条件では、吸着物を完全に放出させることは
困難であり、また、高温で長時間ベーキングすると材料
の変質を生じて、固体潤滑材として充分な機能を発揮で
きないという問題点がある。It is possible to separate and release the adsorbate by baking and treating these solid lubricants under reduced pressure. However, since the adsorbed amount is very large, the adsorbate is removed under normal baking conditions. It is difficult to completely release it, and there is a problem that if it is baked at a high temperature for a long time, the quality of the material is changed and the solid lubricant cannot sufficiently exhibit its function.
【０００４】[0004]
【発明が解決しようとする課題】本発明の主な目的は、
超高真空下においても有効に使用し得る固体潤滑材を提
供することである。SUMMARY OF THE INVENTION The main object of the present invention is to:
It is to provide a solid lubricant that can be effectively used even under an ultrahigh vacuum.
【０００５】[0005]
【課題を解決するための手段】本発明者は、上記した如
き従来技術の課題を解決すべく、鋭意研究を重ねてき
た。その結果、フラーレン類として知られている高次炭
素同素体の内で、特定の組成のものをフッ素化して得ら
れるフッ素化炭素は、摩擦係数が小さく、固体潤滑材と
して良好な特性を有するものであり、特に、このフッ素
化炭素は、ベーキング処理を行なうことによって、変質
を生じることなく、容易に吸着物を分離、放出させるこ
とが出来、得られる処理物は、超高真空下において有効
に使用し得る固体潤滑材となることを見出し、ここに本
発明を完成するに至った。The inventor of the present invention has conducted extensive studies in order to solve the problems of the prior art as described above. As a result, among higher carbon allotropes known as fullerenes, fluorinated carbon obtained by fluorinating a specific composition has a small friction coefficient and has good properties as a solid lubricant. In particular, this fluorinated carbon can easily separate and release the adsorbate without being altered by baking, and the obtained treated product can be used effectively under ultrahigh vacuum. It was found that the solid lubricant can be used, and the present invention has been completed here.
【０００６】即ち、本発明は、一般式：（Ｃ60)1-Y（Ｃ
70）YＦX（式中、Ｙは、０〜０．１５の範囲の値、Ｘ
は、２０〜４６の範囲の値を示す。）で表されるフッ素
化炭素からなる超高真空用固体潤滑材に係る。That is, the present invention has the general formula: (C 60 ) 1-Y (C
70) in Y F X (wherein, Y is a value in the range of 0 to 0.15, X
Indicates a value in the range of 20 to 46. ) Related to a solid lubricant for fluorinated carbon for ultra-high vacuum.
【０００７】[0007]
【発明の実施の形態】本発明の固体潤滑材は、フラーレ
ン類として知られている高次炭素同素体の内で、
（Ｃ60)1-Y（Ｃ70）Y（式中、Ｙ及びＸは、前記に同
じ。）で表される炭素同素体をフッ素化することによっ
て得られるものである。ここで、（Ｃ60)1-Y（Ｃ70）Y
で表される炭素同素体は、炭素数６０のＣ60フラーレン
単独、又は炭素数７０のＣ70フラーレンを１５モル％以
下含有するＣ60フラーレンとＣ70フラーレンの混合物で
あり、公知の方法に従って得ることができる。例えば、
カーボン電極アーク法、レーザー蒸着法、抵抗加熱法等
の公知の方法に従って得られた炭素ススから、湿式法又
は乾式法でフラーレンを抽出するか、或いはフラーレン
を蒸発させることによって得ることができる。BEST MODE FOR CARRYING OUT THE INVENTION The solid lubricant of the present invention is one of the higher carbon allotropes known as fullerenes,
It is obtained by fluorinating a carbon allotrope represented by (C 60 ) 1-Y (C 70 ) Y (wherein Y and X are the same as defined above). Where (C 60 ) 1-Y (C 70 ) Y
The carbon allotrope represented by is a C 60 fullerene having 60 carbon atoms or a mixture of C 60 fullerene and C 70 fullerene containing 15 mol% or less of C 70 fullerene having 70 carbon atoms, and can be obtained by a known method. You can For example,
It can be obtained by extracting fullerene by a wet method or a dry method or evaporating fullerene from carbon soot obtained by a known method such as a carbon electrode arc method, a laser deposition method, a resistance heating method and the like.
【０００８】この様にして得られる（Ｃ60)1-Y（Ｃ70）
Y（式中、Ｙ及びＸは、前記に同じ）で表される炭素同
素体をフッ素化する方法は、特に限定的では無いが、例
えば、フッ素を５〜２０モル％程度含有するフッ素と不
活性ガスの混合ガス中で、室温〜２５０℃程度の温度範
囲で、上記炭素同素体とフッ素ガスとを０．５〜１０時
間程度反応させることによって、目的とする一般式：
（Ｃ60)1-Y（Ｃ70）YＦX（式中、Ｙは、０〜０．１５の
範囲の値、Ｘは、２０〜４６の範囲の値を示す。）で表
されるフッ素化炭素を得ることができる。上記フッ素化
反応に用いる不活性ガスとしては、窒素、Ａｒ、Ｈｅ、
Ｎｅ等を挙げることができる。また、上記フッ素と不活
性ガスの混合ガス中には、フッ素化を容易にするため
に、フッ化水素を０．５〜１０体積％程度存在させるこ
とができる。(C 60 ) 1-Y (C 70 ) thus obtained
The method for fluorinating the carbon allotrope represented by Y (wherein Y and X are the same as above) is not particularly limited, but is, for example, inert with fluorine containing about 5 to 20 mol% of fluorine. By reacting the carbon allotrope with fluorine gas in a mixed gas of gases at a temperature range of about room temperature to about 250 ° C. for about 0.5 to 10 hours, a target general formula:
Fluorine (C 60) 1-Y ( C 70) ( in the formula, Y is a value in the range of 0 to 0.15, X is shown. The values in the range of 20 to 46) Y F X represented by Carbonized carbon can be obtained. As the inert gas used in the fluorination reaction, nitrogen, Ar, He,
Ne etc. can be mentioned. Further, in the mixed gas of fluorine and an inert gas, hydrogen fluoride can be present in an amount of about 0.5 to 10% by volume in order to facilitate fluorination.
【０００９】本発明の固体潤滑材は、上記した様な方法
によって得られるフッ素化炭素からなるものであり、通
常は、固体潤滑材層を形成すべき各種の被処理物に、フ
ッ素化炭素の被覆層を形成することによって、固体潤滑
材として用いられる。フッ素化炭素の被覆層を形成する
方法は、特に限定的では無く、例えば、予め、上記した
方法で（Ｃ60)1-Y（Ｃ70）YＦXで表されるフッ素化炭素
を製造した後、真空蒸着法等によって、目的物に該フッ
素化炭素を被覆する方法、又は真空蒸着法、スピンコー
ト法、溶剤に溶解して塗布する方法等によって、被処理
物に（Ｃ60)1-Y（Ｃ70）Y（式中、Ｙ及びＸは、前記に
同じ）で表される炭素同素体の皮膜を形成した後、上記
した方法でこの炭素同素体の皮膜をフッ素化する方法な
どを挙げることができる。The solid lubricant of the present invention is made of fluorinated carbon obtained by the above-mentioned method. Usually, various kinds of objects to be treated for forming a solid lubricant layer are treated with fluorinated carbon. By forming a coating layer, it is used as a solid lubricant. The method of forming the coating layer of fluorinated carbon is not particularly limited, and for example, the fluorinated carbon represented by (C 60 ) 1-Y (C 70 ) Y F X was previously produced by the above-mentioned method. Then, by a method such as coating the target with the fluorinated carbon by a vacuum vapor deposition method, a vacuum vapor deposition method, a spin coating method, a method of dissolving in a solvent and coating (C 60 ) 1- A method of forming a carbon allotrope film represented by Y (C 70 ) Y (wherein Y and X are the same as above) and then fluorinating the carbon allotrope film by the above-mentioned method You can
【００１０】この様にして形成されるフッ素化炭素皮膜
の厚さは特に限定はされないが、通常、０．５〜５μｍ
程度とすればよい。The thickness of the fluorinated carbon film thus formed is not particularly limited, but usually 0.5 to 5 μm.
It should be about the degree.
【００１１】上記した方法で形成される本発明の固体潤
滑材は、摩擦係数が小さく、固体潤滑材として良好な特
性を有し、しかも不純物成分の吸着量が少ないものであ
り、そのままでも超高真空用固体潤滑材として有効に使
用することができるが、超高真空下での使用に先だっ
て、吸着された気体などの各種不純物成分を分離、放出
するために、ベーキング処理を施すことが好ましい。ベ
ーキング処理の方法としては、減圧下又は常圧下におい
て、１００〜３００℃程度の温度で１〜２４時間程度加
熱すればよい。この様なベーキング処理によって、フッ
素化炭素自体には何ら変質が生じることなく、該フッ素
化炭素に吸着された各種不純物成分が分離放出され、１
０-6トールを下回る超高真空下で使用した場合にも、使
用環境を汚染することなく、固体潤滑材として良好な特
性を発揮することができる。The solid lubricant of the present invention formed by the above method has a small coefficient of friction, has good characteristics as a solid lubricant, and has a small amount of adsorbed impurity components. Although it can be effectively used as a solid lubricant for vacuum, it is preferably subjected to baking treatment in order to separate and release various impurity components such as adsorbed gas prior to use under ultrahigh vacuum. As a method of baking treatment, heating may be performed under reduced pressure or normal pressure at a temperature of about 100 to 300 ° C. for about 1 to 24 hours. By such a baking treatment, various impurity components adsorbed on the fluorinated carbon are separated and released without causing any alteration in the fluorinated carbon itself.
Even when used in an ultra-high vacuum of less than 0 -6 Torr, good properties as a solid lubricant can be exhibited without contaminating the use environment.
【００１２】本発明の固体潤滑材は、摩擦係数が小さ
く、固体潤滑材として良好な特性を有すると共に、従来
の固体潤滑材である、グラファイト、二硫化モリブデン
等と比べて、不純物成分の吸着量が少なく、超高真空用
固体潤滑材として有効に使用し得るものであり、しかも
ベーキング処理を行なうことにより、変質を生じること
なく吸着物をほぼ完全に分離放出することができる。よ
って、１０-6トールを下回る超高真空下で使用した場合
にも、使用環境を汚染することなく、固体潤滑材として
良好な特性を発揮することができる。The solid lubricant of the present invention has a small coefficient of friction and has good characteristics as a solid lubricant, and in comparison with conventional solid lubricants such as graphite and molybdenum disulfide, the amount of adsorbed impurity components is large. However, it is possible to effectively use it as a solid lubricant for ultra-high vacuum, and by performing baking treatment, the adsorbate can be separated and released almost completely without causing deterioration. Therefore, even when used under an ultra-high vacuum of less than 10 −6 Torr, good characteristics as a solid lubricant can be exhibited without contaminating the use environment.
【００１３】本発明の固体潤滑材は、この様な優れた性
質を有するものであり、ＬＳＩ製造ラインのなかの各種
露光装置、薄膜形成装置の真空槽中への運動導入機構や
搬送装置、Ｘ線管球用軸受、真空用モーターの軸受、マ
イクロマシンの歯車や軸受、宇宙用駆動機構部品等に用
いる超高真空用固体潤滑材として有用性が高いものであ
る。The solid lubricant of the present invention has such excellent properties, and is used in various exposure apparatuses in an LSI manufacturing line, a mechanism for introducing a motion into a vacuum chamber of a thin film forming apparatus, a transfer apparatus, and It is highly useful as a solid lubricant for ultra-high vacuum used for bearings for wire tubes, bearings for vacuum motors, gears and bearings for micromachines, drive mechanism parts for space, and the like.
【００１４】[0014]
【実施例】以下実施例を挙げて、本発明を更に詳細に説
明する。The present invention will be described in more detail with reference to the following examples.
【００１５】実施例１ アーク放電法で得た炭素ススから、トルエンで抽出分離
した炭素数６０の炭素同素体（Ｃ60フラーレン）を、黒
鉛製のるつぼに入れ、１０-6トールの圧力下に、６００
℃に加熱し、蒸発物をステンレス（ＳＵＳ３０４）製基
板に１μｍの厚さに堆積させることによって、Ｃ60フラ
ーレンの堆積層を形成した。Example 1 A carbon allotrope having 60 carbon atoms (C 60 fullerene) extracted with toluene from carbon soot obtained by an arc discharge method was placed in a crucible made of graphite, under a pressure of 10 -6 Torr. 600
A deposited layer of C 60 fullerene was formed by heating to 0 ° C. and depositing the evaporated material on a stainless (SUS304) substrate to a thickness of 1 μm.
【００１６】次いで、フッ素２０モル％及び窒素ガス８
０モル％からなる混合ガス中に、上記Ｃ60フラーレンの
堆積層を形成した基板を２００℃で、５時間又は１０時
間保持することによって、Ｃ60フラーレンのフッ素化を
行った。Next, 20 mol% of fluorine and 8 of nitrogen gas
The C 60 fullerene was fluorinated by holding the substrate on which the C 60 fullerene deposited layer was formed in a mixed gas of 0 mol% at 200 ° C. for 5 hours or 10 hours.
【００１７】この様にして処理された基板のうちで、フ
ッ素化を５時間行った試料についてＸ線回折を行った。
回折角（２θ）０〜６０度についての回折図を図１に示
し、回折角（２θ）５〜２０度についての回折図の拡大
図を図２に示す。この結果から、フッ素化を５時間行っ
た試料は結晶構造がｆｃｃであることが判る。また、Ｘ
線回折結果及び赤外線吸光分析結果から、組成はＣ60Ｆ
X（Ｘは３６〜４０）であることが確認された。フッ素
化を１０時間行った試料についても同様の結果であっ
た。Among the substrates thus treated, X-ray diffraction was carried out on a sample which had been fluorinated for 5 hours.
A diffractogram for diffraction angles (2θ) of 0 to 60 degrees is shown in FIG. 1, and an enlarged view of the diffraction diagram for diffraction angles (2θ) of 5 to 20 degrees is shown in FIG. From this result, it can be seen that the crystal structure of the sample subjected to fluorination for 5 hours is fcc. Also, X
From the results of line diffraction and infrared absorption analysis, the composition was C 60 F
It was confirmed to be X (X is 36 to 40). Similar results were obtained for the sample that had been fluorinated for 10 hours.
【００１８】上記した方法でフッ素化した試料につい
て、２０℃の大気中で、荷重０．４９Ｎ（直径３／８イ
ンチのステンレス（ＳＵＪ２）製ボールにより負荷）
で、移動距離：６ｍｍ、周波数：１Ｈｚの条件で摩擦係
数を測定した結果を図３のグラフに示す。この結果か
ら、本発明の固体潤滑材は、低い摩擦係数を有し、固体
潤滑材として有用なものであることが判る。With respect to the sample fluorinated by the above-mentioned method, a load of 0.49 N (load with a ball made of stainless steel (SUJ2) having a diameter of 3/8 inch) was carried out in the atmosphere at 20 ° C.
The graph of FIG. 3 shows the results of measuring the friction coefficient under the conditions of the moving distance: 6 mm and the frequency: 1 Hz. From these results, it is understood that the solid lubricant of the present invention has a low coefficient of friction and is useful as a solid lubricant.
【００１９】更に、フッ素化を１０時間行った試料を、
１０-6トールとなるように排気したチャンバー内に設置
し、温度上昇に伴って、試料重量の変化と圧力を測定す
ることによって、飽和蒸気圧曲線を求めた。結果を図４
に示す。この結果から、Ｃ60ＦX（Ｘは３６〜４０）で
表されるフッ素化炭素は、４００℃未満の温度では、飽
和蒸気圧が０ミリトールであり、この温度範囲では、分
解が生じることなくベーキング処理が可能であることが
判る。Further, a sample which has been fluorinated for 10 hours is
The saturated vapor pressure curve was obtained by installing the sample in a chamber evacuated to 10 -6 Torr and measuring the change in sample weight and the pressure as the temperature increased. Fig. 4 shows the results.
Shown in From this result, the fluorinated carbon represented by C 60 F X (X is 36 to 40) has a saturated vapor pressure of 0 mTorr at a temperature lower than 400 ° C., and decomposition does not occur in this temperature range. It turns out that a baking process is possible.
【００２０】また、フッ素化を１０時間行った試料につ
いて、１０-3トールの圧力下で２００℃で２時間ベーキ
ング処理を行なった後、１０-3トールの圧力下におい
て、温度２０℃で上記方法と同様にして摩擦係数を測定
した。結果を図５のグラフに示す。この結果から明らか
な様に、Ｃ60ＦX（Ｘは３６〜４０）で表されるフッ素
化炭素は、ベーキング処理を行った後にも、減圧下にお
いて低い摩擦係数を示すものであり、該フッ素化炭素
は、超高真空下において固体潤滑剤として有効に使用し
得るものと判断される。Further, fluorinated About 10 hours went samples, 10-3 after performing 2 hour baking treatment at 200 ° C. under a pressure of torr, at a pressure of 10 -3 torr, the method at a temperature 20 ° C. The friction coefficient was measured in the same manner as in. The results are shown in the graph of FIG. As is clear from this result, the fluorinated carbon represented by C 60 F X (X is 36 to 40) shows a low friction coefficient under reduced pressure even after the baking treatment. It is considered that carbon dioxide can be effectively used as a solid lubricant under ultrahigh vacuum.
【図１】フッ素化炭素のＸ線回折図。FIG. 1 is an X-ray diffraction pattern of fluorinated carbon.
【図２】フッ素化炭素のＸ線回折図の部分拡大図。FIG. 2 is a partially enlarged view of an X-ray diffraction diagram of fluorinated carbon.
【図３】フッ素化炭素の摩擦係数のグラフ。FIG. 3 is a graph of a friction coefficient of fluorinated carbon.
【図４】フッ素化炭素の飽和蒸気圧曲線。FIG. 4 is a saturated vapor pressure curve of fluorinated carbon.
【図５】フッ素化炭素のベーキング処理後の摩擦係数の
グラフ。FIG. 5 is a graph of a friction coefficient after baking treatment of fluorinated carbon.
フロントページの続き (72)発明者 櫻井 芳昭 奈良県橿原市久米町473 (72)発明者 四谷 任 大阪府堺市赤坂台５丁９−６ (72)発明者 野坂 俊紀 大阪府堺市東浅香山町１丁37府職員宅舎１ −７ (72)発明者 久野 正人 奈良県橿原市白橿町５丁目１番１−308号 (72)発明者 早原 静治 兵庫県姫路市飾磨区中島3001番地 第一燃 料工業株式会社内 (72)発明者 後藤 繁雄 兵庫県姫路市飾磨区中島3001番地 第一燃 料工業株式会社内 (72)発明者 高木 厚 兵庫県姫路市飾磨区中島3001番地 第一燃 料工業株式会社内 (72)発明者 西田 勝美 兵庫県姫路市飾磨区中島3001番地 第一燃 料工業株式会社内 (72)発明者 木山 洋実 大阪府堺市築港新町２−６−40 大同ほく さん株式会社内 (72)発明者 大森 宣典 大阪府堺市築港新町２−６−40 大同ほく さん株式会社内 (72)発明者 森 京博 大阪府堺市築港新町２−６−40 大同ほく さん株式会社内Front Page Continuation (72) Inventor Yoshiaki Sakurai 473 Kume Town, Kashihara City, Nara Prefecture (72) In charge of Inventor Yotsuya 5-9 Akasakadai, Sakai City, Osaka Prefecture (72) Toshinori Nosaka 1 Higashiasakayama Town, Sakai City, Osaka Prefecture Ding 37 Prefecture Housing 1-7 (72) Inventor Masato Kuno 5 1-30-1 Shirakashi-cho, Kashihara-shi, Nara (72) Inventor Shizuharu Hayahara 3001, Nakajima, Shikama-ku, Himeji-shi, Hyogo 1st fuel (72) Inventor Shigeo Goto 3001 Nakajima, Shikoma-ku, Himeji-shi, Hyogo Prefecture No. 1 Fuel Industry Co., Ltd. (72) Inventor Atsushi Takagi 3001, Nakajima, Shikama-ku, Himeji-shi, Hyogo Dai-ichi Fuel Industry Incorporated (72) Inventor Katsumi Nishida 3001 Nakashima, Shikama-ku, Himeji-shi, Hyogo Daiichi Fuel Industry Co., Ltd. (72) Inventor Hiromi Kiyama 2-6-40 Shincho Shinmachi, Sakai City, Osaka Prefecture In-house (72) Inventor Noriyuki Omori 2-6-40 Chikko Shinmachi, Sakai-shi, Osaka Daido Hokusan Co., Ltd. (72) Inventor Keihiro Mori Osaka 2-6-40 Chikko Shinmachi, Sakai City Daido Hokusan Co., Ltd.
Claims (1)
Ｙは、０〜０．１５の範囲の値、Ｘは、２０〜４６の範
囲の値を示す。）で表されるフッ素化炭素からなる超高
真空用固体潤滑材。1. A general formula: (C 60) 1-Y (C 70) in Y F X (wherein,
Y represents a value in the range of 0 to 0.15, and X represents a value in the range of 20 to 46. ) A solid lubricant for ultra-high vacuum consisting of fluorinated carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17309095A JPH0925490A (en) | 1995-07-10 | 1995-07-10 | Solid lubricant for ultrahigh-vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17309095A JPH0925490A (en) | 1995-07-10 | 1995-07-10 | Solid lubricant for ultrahigh-vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0925490A true JPH0925490A (en) | 1997-01-28 |
Family
ID=15954018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17309095A Pending JPH0925490A (en) | 1995-07-10 | 1995-07-10 | Solid lubricant for ultrahigh-vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0925490A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006059391A1 (en) * | 2004-12-03 | 2006-06-08 | Seiko Instruments Inc. | Slide material, process for producing the same and apparatus utilizing the slide material |
| US9771539B2 (en) | 2013-02-06 | 2017-09-26 | Daikin Industries, Ltd. | Solid particle, solid lubricant, and metal member |
-
1995
- 1995-07-10 JP JP17309095A patent/JPH0925490A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006059391A1 (en) * | 2004-12-03 | 2006-06-08 | Seiko Instruments Inc. | Slide material, process for producing the same and apparatus utilizing the slide material |
| JP4785741B2 (en) * | 2004-12-03 | 2011-10-05 | セイコーインスツル株式会社 | Sliding material, manufacturing method thereof, and apparatus using the sliding material |
| US9771539B2 (en) | 2013-02-06 | 2017-09-26 | Daikin Industries, Ltd. | Solid particle, solid lubricant, and metal member |
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