JPH09248617A - Apparatus for locally treating vacuum arc descaling - Google Patents

Apparatus for locally treating vacuum arc descaling

Info

Publication number
JPH09248617A
JPH09248617A JP5876296A JP5876296A JPH09248617A JP H09248617 A JPH09248617 A JP H09248617A JP 5876296 A JP5876296 A JP 5876296A JP 5876296 A JP5876296 A JP 5876296A JP H09248617 A JPH09248617 A JP H09248617A
Authority
JP
Japan
Prior art keywords
vacuum
descaling
electrode
container
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5876296A
Other languages
Japanese (ja)
Other versions
JP3340017B2 (en
Inventor
Koichi Takeda
紘一 武田
Tsuneshi Suzuki
鈴木  常司
Toshiji Kikuchi
利治 菊池
Motonori Tamura
元紀 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP05876296A priority Critical patent/JP3340017B2/en
Publication of JPH09248617A publication Critical patent/JPH09248617A/en
Application granted granted Critical
Publication of JP3340017B2 publication Critical patent/JP3340017B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PROBLEM TO BE SOLVED: To efficiently execute the descaling only to a part of the surface of a large scaled member in a short time by arranging a cupped vacuum vessel imcorporating an electrode and having a sealing material for holding the stickiness to the member to be treated at the foot part. SOLUTION: The cupped vessel 2 is formed so as to be possible to stick to the member 1 to be treated through the vacuum sealing material 7. The cupped vessel 2 is connected with an evacuating device through an evacuating part 3. After sticking the cupped vessel 2 to the member 1 to be treated, the pressure in the vessel is reduced with the evacuating device and then, the cupped vessel 2 is intensely held pressed to the member 1 to be treated to automatically strengthen the sealing effect, and the vacuum degree in the cupped vessel is made to high and held.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、真空中で陽極と陰
極との間に直流アーク放電を起こさせて金属部材表面の
酸化膜や汚れを除去する表面処理分野に属する技術であ
って、特に真空アークデスケーリング局所処理装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment field for removing an oxide film and dirt on a surface of a metal member by causing a DC arc discharge between an anode and a cathode in a vacuum, The present invention relates to a vacuum arc descaling local processing device.

【0002】[0002]

【従来の技術】真空アークデスケーリングでは、通常1
4 Paから1Paの雰囲気中でのアーク放電が行われる。
真空アークデスケーリングといわれているが厳密な意味
での真空状態の中での技術ではなく、減圧雰囲気で作ら
れるアークを利用したスケール除去技術である。減圧雰
囲気中で形成されるアークを本発明においても、慣習に
したがい真空アークという。スケール除去あるいは薄い
酸化膜除去を含め、以下デスケーリングという。真空ア
ークデスケーリング処理をすると表面に微細な凹凸がで
きるので、表面を粗面化するための方法として用いられ
ることもある。真空アークを利用したスケール除去ある
いは粗面化処理をまとめて本発明では真空アークデスケ
ーリングという。真空アークデスケーリングにおいて
は、スケール除去をしようとする処理対象部材を電源の
負極性に接続し、陰極として作用させ、別途設置される
陽極との間にアークを発生させる。陰極となる処理対象
物表面に形成されるアーク陰極点の作用により、陰極表
面にある酸化膜が除去される。
In vacuum arc descaling, usually 1
Arc discharge is performed in an atmosphere of 0 4 Pa to 1 Pa.
It is called vacuum arc descaling, but it is not a technology in a strict sense in a vacuum state, but a scale removal technology using an arc created in a reduced pressure atmosphere. In the present invention, an arc formed in a reduced pressure atmosphere is also called a vacuum arc according to the customary practice. Including scale removal or thin oxide film removal is called descaling below. Since the vacuum arc descaling process produces fine irregularities on the surface, it may be used as a method for roughening the surface. The scale removal or surface roughening processing using a vacuum arc is collectively referred to as vacuum arc descaling in the present invention. In the vacuum arc descaling, a processing target member for which scale is to be removed is connected to a negative polarity of a power source to act as a cathode and generate an arc between a separately installed anode. The oxide film on the surface of the cathode is removed by the action of the arc cathode spots formed on the surface of the object to be treated which becomes the cathode.

【0003】従来、この種の真空アークデスケーリング
を行うためには、例えば特開平4−110084号公報
に示されるごとく、デスケーリング処理すべき部材全体
を収納する真空容器を設け、この中で処理すべき部材を
陰極として別途真空容器内に設置された陽極との間に真
空アークを発生させて部材の表面全体のスケールの除去
を行ってきた。部材の表面の特定部分のみのスケール除
去を行う場合には、処理すべき表面のみを残してマスキ
ングをして処理を行ってきた。
Conventionally, in order to carry out this kind of vacuum arc descaling, a vacuum container for accommodating all the members to be subjected to the descaling is provided as shown in, for example, Japanese Unexamined Patent Publication No. 4-110084. A vacuum arc is generated between a member to be used as a cathode and an anode separately installed in a vacuum container to remove the scale on the entire surface of the member. In the case of removing the scale of only a specific part of the surface of the member, the masking process has been performed leaving only the surface to be treated.

【0004】[0004]

【発明が解決しようとする課題】従来の真空アークデス
ケーリングにおいては、部材全体を真空容器に入れて真
空アーク処理するため、大きな部材に対しては大きな真
空容器が必要となり、設備に多大のコストがかかるこ
と、あるいは大きな容器を減圧にするために長い時間が
かかり操業コストも多大になる等の問題がある。部材自
身は長大でもデスケーリング処理を必要とする表面はそ
の一部でよい場合が多くあり、この場合は過大な設備
で、無駄の多い操業をしていることになる。
In the conventional vacuum arc descaling, a large vacuum container is required for a large member because the whole member is put in a vacuum container and subjected to a vacuum arc treatment. However, there is a problem that it takes a long time to reduce the pressure of a large container and the operating cost becomes large. In many cases, even if the member itself is long, only a part of the surface that requires descaling is sufficient. In this case, excessive equipment is used and wasteful operation is performed.

【0005】また、一部分のみを処理するためのマスキ
ングも手間のかかる作業であり、さらにマスキング材料
からガスが放出され、真空雰囲気を作ることを困難にす
る場合もある。このため、マスキングをせず、不必要な
表面までデスケーリング処理してしまう場合も多い。こ
の場合には、余分なエネルギーが部材に投入されるた
め、エネルギーの無駄が生じているだけでなく、部材全
体が過度に昇温してしまい、部材形状が変形するとか、
特性が変わってしまうという問題も生じる。
Further, masking for treating only a part is a troublesome work, and gas is released from the masking material, which sometimes makes it difficult to create a vacuum atmosphere. Therefore, in many cases, descaling processing is performed on unnecessary surfaces without masking. In this case, since excess energy is input to the member, not only is energy wasted, but the temperature of the entire member excessively rises, causing the member shape to deform,
There is also the problem that the characteristics will change.

【0006】本発明の目的はこれらの問題点を解決する
ため、局所的に真空雰囲気を作り、局所的に真空アーク
処理を行うことができる装置を提供することにある。
In order to solve these problems, an object of the present invention is to provide an apparatus capable of locally forming a vacuum atmosphere and locally performing a vacuum arc treatment.

【0007】[0007]

【課題を解決するための手段】本発明は局所真空をつく
り、局部のみを真空アーク処理をすることにより、上記
課題を解決する発明であり、電極、真空容器、直流電源
及び排気装置からなる真空アークデスケーリング装置に
おいて、真空容器が電極を組み込み、被処理部材との密
着性を持たせるためのシール材を裾部に有したカップ状
の真空容器であることを特徴とする真空アークデスケー
リング装置である。
The present invention is an invention which solves the above-mentioned problems by creating a local vacuum and subjecting only a local portion to a vacuum arc treatment. A vacuum consisting of an electrode, a vacuum container, a DC power supply and an exhaust device. In the arc descaling device, the vacuum arc descaling device is characterized in that the vacuum container is a cup-shaped vacuum container having an electrode incorporated therein and a sealing material at the hem for providing adhesiveness with a member to be processed. Is.

【0008】本発明の概念を図により説明する。図1は
本発明の基本原理を示す構成図である。局所真空雰囲気
を作り出すために、カップ状容器2が真空シール材7を
介して処理すべき部材1に密着できるようになってい
る。当該カップ状容器2は真空排気ポート3を介し、真
空排気装置に接続される。当該カップ状容器を被処理部
材に密着させた後真空排気装置により容器内に減圧する
と、容器外部との圧力差によりカップ状容器は被処理部
材に強く押しつけられシール効果が自動的に高まり、カ
ップ内真空度が高まり、保持される。カップ状容器内部
には電極4が設置されている。
The concept of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing the basic principle of the present invention. In order to create a local vacuum atmosphere, the cup-shaped container 2 can be brought into close contact with the member 1 to be processed via the vacuum sealing material 7. The cup-shaped container 2 is connected to a vacuum exhaust device via a vacuum exhaust port 3. When the cup-shaped container is brought into close contact with the member to be treated and then depressurized into the container by the vacuum exhaust device, the cup-shaped container is strongly pressed against the member to be treated due to the pressure difference between the outside of the container and the sealing effect is automatically increased. The degree of internal vacuum is increased and maintained. An electrode 4 is installed inside the cup-shaped container.

【0009】本発明におけるカップ状容器内に設置され
た電極とは図1に示すように、カップ状容器とは独立し
た部品である必要は必ずしもなく、例えば図4に示すご
とくカップ状容器の一部分である場合も含む。いずれに
しろ、電極やカップ状容器は水冷構造であることが望ま
しい。また、電極部は他の容器部分とは電気的に絶縁さ
れていなければならない。図1における5および6は冷
却水の給排水ポートを示す。
The electrode installed in the cup-shaped container according to the present invention does not necessarily have to be a component independent of the cup-shaped container as shown in FIG. 1, and for example, a part of the cup-shaped container as shown in FIG. Including the case of In any case, it is desirable that the electrodes and the cup-shaped container have a water cooling structure. Further, the electrode part must be electrically insulated from other container parts. Reference numerals 5 and 6 in FIG. 1 denote cooling water supply / drain ports.

【0010】電極4および部材1はアーク発生用直流電
源に接続されている。アークのスタートは高周波高電圧
を印加する方法や陽極を陰極に瞬時接触させる方法や補
助電極を用いる方法など公知の技術として種々の方法が
確立されており、いずれの方法を採用しても良い。又、
アーク電源および電極とアーク電源、アークスタート回
路、それらの電気設備との電極の接合方法についても同
様、本発明の根幹ではないので詳細な説明を省いてい
る。
The electrode 4 and the member 1 are connected to a DC power source for arc generation. For starting the arc, various methods have been established as known techniques such as a method of applying a high frequency high voltage, a method of instantaneously contacting an anode with a cathode, and a method of using an auxiliary electrode, and any method may be adopted. or,
Similarly, the arc power supply, the electrode and the arc power supply, the arc start circuit, and the method of joining the electrodes with the electric equipment are not the basis of the present invention, and thus detailed description thereof is omitted.

【0011】図2における部品8は脱着可能であり、部
材形状や処理面積が変わった場合に対応するための補助
容器であり、被処理部材の処理形状に合わせたシール部
を有し、前記カップ状容器に接する側は、カップ形状に
あわせた面を有する補助容器をさらに有することを特徴
としている。
The component 8 shown in FIG. 2 is a detachable container which is an auxiliary container for coping with the case where the shape of the member or the processing area is changed, and has a sealing portion adapted to the processing shape of the member to be processed. The side in contact with the container is characterized by further including an auxiliary container having a surface conforming to the cup shape.

【0012】図3における9は電極の極性を変えるため
の電気回路切り替え機構で、直流電源10と部材、電極
間に配置される。発明の原理のみを説明しているので図
では真空排気設備、アーク電源回路、冷却水給排水設備
等の全体あるいは一部の図示を省略している。
Reference numeral 9 in FIG. 3 denotes an electric circuit switching mechanism for changing the polarity of the electrodes, which is arranged between the DC power source 10 and the members and the electrodes. Since only the principle of the invention is described, the whole or a part of the vacuum exhaust equipment, the arc power supply circuit, the cooling water supply / drainage equipment and the like are omitted in the drawing.

【0013】[0013]

【発明の実施の形態】前述の課題を解決するための、本
発明手段の作用を図に基づいて説明する。真空アーク処
理すべき部材(例えば、鋼材)1の表面でデスケーリン
グが必要な領域を局所的に真空雰囲気にできるように、
カップ状の容器2がある。カップ状容器2は部材1と接
する面に、例えばO−リングのような真空シールが可能
なシール材7が取り付けられている。当該カップ状容器
2は真空排気ポート3から真空排気装置に接続されてい
る。局所真空を可能にするカップ状容器2に真空アーク
発生のための電極4が設置されている。容器2は電極4
およびデスケール処理される部材1とは電気的には絶縁
されている。真空アークは部材1と電極4との間で発生
するよう直流アーク電源に接続されている。部材1の表
面デスケーリングを行うためには、部材1は負の極性、
電極4は正の極性になるよう接続される。真空アークの
発生により高温になるので、カップ状容器2および電極
4は水冷構造であることが望ましい。図1中の5および
6はそれぞれカップ状容器および電極への冷却水の給排
水口を示す。
BEST MODE FOR CARRYING OUT THE INVENTION The operation of the means of the present invention for solving the above problems will be described with reference to the drawings. In order to locally create a vacuum atmosphere in a region that requires descaling on the surface of a member (for example, a steel material) 1 to be vacuum-arced,
There is a cup-shaped container 2. The cup-shaped container 2 is provided with a sealing material 7 such as an O-ring capable of vacuum sealing on the surface in contact with the member 1. The cup-shaped container 2 is connected to a vacuum exhaust device through a vacuum exhaust port 3. An electrode 4 for generating a vacuum arc is installed in a cup-shaped container 2 that enables a local vacuum. Container 2 is electrode 4
Also, it is electrically insulated from the member 1 to be descaled. The vacuum arc is connected to a DC arc power supply so as to occur between the member 1 and the electrode 4. In order to perform surface descaling of member 1, member 1 has a negative polarity,
The electrode 4 is connected so as to have a positive polarity. It is desirable that the cup-shaped container 2 and the electrode 4 have a water-cooled structure because the temperature becomes high due to the generation of a vacuum arc. Reference numerals 5 and 6 in FIG. 1 denote water supply / drainage ports for cooling water to the cup-shaped container and the electrode, respectively.

【0014】局所的に処理すべき面積形状は一定ではな
いので、面積形状の変化にたいしては、カップ状容器で
カバーできる範囲であればカップ状容器内で余分な領域
をシールドして対処することができる。カップ状容器で
カバーできる範囲を超えた領域を処理するときには、図
2で示すように、カップ状容器の裾部(裾治具)8を着
脱可能な機構にして、この裾部8を取り替えることによ
り形状変化に対応する。脱着交換後真空雰囲気を保持で
きることが必要であるが、このようなシール機構は公知
の技術であるので説明は省略する。
Since the area shape to be locally processed is not constant, it is possible to deal with the change of the area shape by shielding an extra area in the cup-shaped container as long as it can be covered by the cup-shaped container. it can. When processing an area beyond the range that can be covered by the cup-shaped container, as shown in FIG. 2, a hem portion (hem jig) 8 of the cup-shaped container is made a detachable mechanism and the hem portion 8 is replaced. Corresponds to changes in shape. It is necessary to be able to maintain a vacuum atmosphere after the attachment / detachment and replacement, but such a sealing mechanism is a known technique, and therefore its explanation is omitted.

【0015】図3は、極性切り替え機構を有する局所的
な真空アークデスケーリング処理装置を示す。上述のよ
うに、本来、真空アークデスケーリングは処理物を陰極
として別途設置された電極を陽極として行われる。この
極性を切り替える目的は多様である。その一つは、電極
のクリーニングである。真空アークデスケーリングで、
陽極として使用している電極が汚れて、真空アークデス
ケーリング作用が正常に行われなくなった時に、当該極
性切り替え機構9を用い、極性を反転させると、従来陽
極として動作してきた電極が、陰極となり、陰極点のク
リーニング作用により当該電極の表面が清浄化される。
清浄化処理を行った後に再度極性切り替え機構9を用い
再度極性を反転させると、本来のデスケーリング処理が
行える様になる。なお、図3においては極性切り替え機
構を強調しているため、本来必要な水冷構造、真空排気
構造については図示は省略している。10は直流電源を
示している。
FIG. 3 shows a local vacuum arc descaling processor having a polarity switching mechanism. As described above, originally, the vacuum arc descaling is performed by using the processed material as the cathode and the separately installed electrode as the anode. There are various purposes for switching the polarity. One of them is electrode cleaning. With vacuum arc descaling,
When the electrode used as the anode becomes dirty and the vacuum arc descaling action is no longer performed normally, the polarity switching mechanism 9 is used to reverse the polarity, and the electrode that has conventionally operated as the anode becomes the cathode. The surface of the electrode is cleaned by the cleaning action of the cathode spot.
If the polarity switching mechanism 9 is used again to reverse the polarity after performing the cleaning process, the original descaling process can be performed. Since the polarity switching mechanism is emphasized in FIG. 3, the originally required water cooling structure and vacuum exhaust structure are not shown. Reference numeral 10 indicates a DC power supply.

【0016】図3に示す様な装置において、極性切り替
えの第二の使用目的は、極性を切り替えることにより、
真空アーク蒸着を行うことである。デスケール処理によ
り部材1の表面を清浄化した後に、真空雰囲気を破るこ
となしに、極性切り替えを行うと、従来陽極4が、陰極
動作をすることになり、電極4表面から電極4を構成し
ている元素が蒸発してくる。雰囲気が真空であるので、
蒸発元素は部材1の表面に堆積し蒸着膜を形成する。部
材表面の清浄化処理と真空蒸着成膜が同一装置で、途中
で真空を破ることなく実施できるので、経済的効果も大
きく、かつ、皮膜性能も向上する。
In the device as shown in FIG. 3, the second purpose of switching the polarities is to switch the polarities.
It is to perform vacuum arc vapor deposition. After the surface of the member 1 is cleaned by the descaling process, when the polarity is switched without breaking the vacuum atmosphere, the conventional anode 4 operates as a cathode, and the electrode 4 is formed from the surface of the electrode 4. The existing elements evaporate. Because the atmosphere is a vacuum,
The evaporation element is deposited on the surface of the member 1 to form a vapor deposition film. Since the cleaning treatment of the member surface and the vacuum vapor deposition film formation can be carried out in the same apparatus without breaking the vacuum, the economical effect is large and the film performance is improved.

【0017】図1、図2および図3においては、いずれ
も真空容器の中に別途電極を設置して、真空アークデス
ケーリング処理を行うことを特徴としているが、図4に
一例を示すごとく、真空容器2の一部を電極にすること
もできる。図4はカップ状容器の天井部分4′を電極と
した場合の図である。この場合も電極4′は5および6
で示されるポートより冷却水が給排水される。電極4′
は絶縁材料11を介して真空容器2′に固定されてい
る。電極4′を直接電源の正極に接続すれば、図1から
図3中に示されるような電極4は不要となる。
1, FIG. 2 and FIG. 3 are all characterized in that a separate electrode is installed in the vacuum container to perform the vacuum arc descaling process, but as shown in FIG. A part of the vacuum container 2 can be used as an electrode. FIG. 4 is a diagram when the ceiling portion 4'of the cup-shaped container is used as an electrode. Also in this case, the electrodes 4'are 5 and 6
Cooling water is supplied and drained from the port indicated by. Electrode 4 '
Is fixed to the vacuum container 2 ′ via an insulating material 11. If the electrode 4'is directly connected to the positive electrode of the power source, the electrode 4 as shown in FIGS. 1 to 3 becomes unnecessary.

【0018】[0018]

【実施例】【Example】

(実施例1)大きさ0.5m×1mで厚み8mmのスケー
ルに覆われた熱延鋼材の表面の中央部100mm直径の円
内領域にあるスケールを除去する作業を、従来真空アー
クデスケーリング法と本発明装置を用いて行った場合の
作業時間と所要電力の比較を表1に示す。従来真空アー
ク法として、熱延板の中央の50mm直径の円を残してガ
ラステープにてマスキングした後、当該熱延板を大型真
空容器に入れ、陰極となるよう電気回路結線をして、真
空容器に別途設置されている陽極との間にアークを発生
させデスケーリングを行った。参考までにマスキング処
理をせず全面をデスケーリングした場合の従来法につい
ての結果も示した。本発明による処理として、図1に示
すような内径50mmのカップ状の円筒容器による局所デ
スケーリングを行った。マスキング作業時間はガラステ
ープでデスケーリング不要領域を覆うための作業に要し
た時間であり、従来法での全面デスケーリングおよび本
発明での局所デスケーリングではこの作業は無いので0
である。排気時間は真空アークをスタートさせる50Pa
まで排気するのに要する時間である。
(Example 1) The conventional vacuum arc descaling method was used to remove the scale in a circle area of 100 mm in diameter at the center of the surface of a hot rolled steel material covered with a scale of 0.5 mm x 1 m and a thickness of 8 mm. Table 1 shows a comparison between the work time and the required power when the device of the present invention is used. As a conventional vacuum arc method, after masking with a glass tape leaving a circle with a diameter of 50 mm in the center of the hot rolled plate, put the hot rolled plate in a large vacuum container and connect the electric circuit so that it becomes a cathode, and vacuum. Descaling was performed by generating an arc with an anode separately installed in the container. For reference, the results of the conventional method when descaling the entire surface without masking treatment are also shown. As processing according to the present invention, local descaling was performed using a cup-shaped cylindrical container having an inner diameter of 50 mm as shown in FIG. The masking work time is the time required to cover the area where descaling is not necessary with the glass tape. Since there is no such work in the full-scale descaling in the conventional method and the local descaling in the present invention, it is 0.
It is. Exhaust time is 50Pa to start vacuum arc
Is the time it takes to exhaust.

【0019】微小な凹凸のあるスケール面を持つ熱延鋼
板が被処理部材であってもO−リングシールをシール材
としたカップ状容器で充分な減圧雰囲気が達成され、本
発明による真空アークデスケーリングが可能であった。
デスケーリング所要時間およびデスケーリング消費エネ
ルギーは真空アーク着火からデスケーリング終了までの
時間およびこの期間に投入された電力である。スケール
除去状況はデスケーリング終了後の表面性状を目視観察
して、スケールの取り残しが見られなければ良好とし
た。鋼材温度はデスケーリング終了直後の材料の裏面中
央での温度である。いずれの場合もアーク電流は100
A一定で行った。なお、従来法でマスキングなしで全面
デスケーリングを行った場合、鋼材の温度が上がり中央
部が赤熱してきたのでアークの着火後480秒の時点で
デスケーリング作業を中止している。
Even if the hot-rolled steel sheet having a scale surface with minute irregularities is a member to be treated, a sufficient decompressed atmosphere can be achieved in the cup-shaped container using the O-ring seal as a sealing material. It could be scaled.
The descaling required time and descaling energy consumption are the time from vacuum arc ignition to the end of descaling and the electric power input during this period. Regarding the scale removal condition, the surface texture after the descaling was visually observed, and if no scale residue was found, it was judged as good. The steel material temperature is the temperature at the center of the back surface of the material immediately after the end of descaling. In either case, the arc current is 100
A was performed at a constant rate. When the conventional method is used for full-scale descaling without masking, the temperature of the steel material rises and the central part becomes red hot, so the descaling work is stopped at 480 seconds after the ignition of the arc.

【0020】[0020]

【表1】 [Table 1]

【0021】(実施例2)図3に示す方法で基材の表面
清浄化とCu蒸着膜の形成を行った実施例を示す。ステ
ンレス鋼板を基材として用い、銅を材料とした円筒を、
ステンレスに対向する電極として用いた。始めに局所真
空容器内を2Paまで排気した後、ステンレス鋼板を陰極
とし銅を陽極とした真空アークデスケーリング処理を表
2に示す条件で行った後、真空アークを消し、極性切り
替え機構によりステンレス鋼材を陽極とし、銅電極を陰
極として同じく表3に示す蒸着条件で真空アークを発生
させた。この間、真空状態は破らないまま保持される。
銅表面にエネルギー密度の高い陰極点が形成され、銅の
蒸発が起こりステンレスの表面は金属銅の色相にかわり
銅膜の形成が確認された。このステンレス試料を取り出
し直角曲げ加工を行っても銅膜の剥離が観察されず、密
着性の高い銅膜がステンレス鋼材上に形成されているこ
とが確認された。
(Embodiment 2) An embodiment in which the surface of the substrate is cleaned and the Cu vapor deposition film is formed by the method shown in FIG. Using a stainless steel plate as a base material, a cylinder made of copper,
It was used as an electrode facing stainless steel. First, after exhausting the interior of the local vacuum container to 2 Pa, vacuum arc descaling with a stainless steel plate as the cathode and copper as the anode was performed under the conditions shown in Table 2, then the vacuum arc was extinguished, and the stainless steel material was switched by the polarity switching mechanism. Was used as an anode and a copper electrode was used as a cathode, and a vacuum arc was generated under the vapor deposition conditions shown in Table 3. During this time, the vacuum state is maintained without breaking.
It was confirmed that a cathode spot with high energy density was formed on the copper surface, copper was evaporated, and the surface of stainless steel was replaced with the hue of metallic copper to form a copper film. Even when this stainless steel sample was taken out and subjected to right-angle bending, peeling of the copper film was not observed, and it was confirmed that a copper film having high adhesion was formed on the stainless steel material.

【0022】[0022]

【表2】 [Table 2]

【表3】 [Table 3]

【0023】(実施例3)図2の符号8で示される裾治
具を二種類用意した。符号2で示されるカップ状容器と
して内径は50mmの水冷容器を用いている。裾治具で裾
が広がり、広がった端部の断面が内径直径60mmの円と
なっているものと、内径50mmの円から一辺が60mmの
正方形断面に広がっているものとを作成して、それぞれ
を、内径50mmの水冷カップ状容器に取り付け、真空ア
ークデスケーリングを行った。それぞれの場合で、部材
1の表面のデスケール形状を観察した結果、裾治具の端
部形状に応じて、60mm直径端部の場合は直径61mmの
デスケール面が得られ、60mm辺の正方形端部の裾治具
では、一辺が61mmの正方形のデスケール面が得られ
た。裾部の取り替えにより簡単に裾部の形状に応じた領
域をデスケールできることが確認された。
(Embodiment 3) Two kinds of hem jigs indicated by reference numeral 8 in FIG. 2 were prepared. As the cup-shaped container indicated by reference numeral 2, a water-cooled container having an inner diameter of 50 mm is used. The hem jig spreads the hem, and the cross section of the expanded end is a circle with an inner diameter of 60 mm and one with a 50 mm inner diameter and a square cross section with a side of 60 mm. Was attached to a water-cooled cup-shaped container having an inner diameter of 50 mm, and vacuum arc descaling was performed. In each case, as a result of observing the descaled shape of the surface of the member 1, depending on the shape of the end of the hem jig, a 60 mm diameter end has a descaled surface of 61 mm in diameter, and a 60 mm square end. With the hem jig, a square descale surface having a side of 61 mm was obtained. It was confirmed that the area corresponding to the shape of the hem can be easily descaled by replacing the hem.

【0024】(実施例4)図4に示す原理構成にもとづ
き、内径50mmで裾にO−リングシール部を有する水冷
構造の銅製円筒2′とアルミナ製の絶縁リング11と水
冷銅製の陽極天井4′とからなるカップ状真空容器を用
い、水冷銅陽極4′を陽極とし、スケールのついたステ
ンレス熱延鋼材1を陰極として、ステンレス熱延材料の
表面一部を圧力20Paの減圧雰囲気として、真空アーク
デスケーリング処理を行った。アーク電流100Aの条
件で10秒間アークを維持した後アークを止め、表面の
デスケーリング状態を観察したところ、ステンレス鋼材
の表面は良好にデスケールされることが確認された。
(Embodiment 4) Based on the principle structure shown in FIG. 4, a water-cooled copper cylinder 2'having an inner diameter of 50 mm and an O-ring seal portion at the hem, an insulating ring 11 made of alumina, and an anode ceiling 4 made of water-cooled copper 4 are used. , A water-cooled copper anode 4'is used as an anode, the stainless hot-rolled steel material 1 with scale is used as a cathode, and a part of the surface of the stainless hot-rolled material is used as a depressurized atmosphere with a pressure of 20 Pa to produce a vacuum. Arc descaling processing was performed. After maintaining the arc for 10 seconds under the condition of an arc current of 100 A, the arc was stopped and the surface descaling state was observed. It was confirmed that the surface of the stainless steel material was satisfactorily descaled.

【0025】[0025]

【発明の効果】本発明により大型部材の局所デスケーリ
ング処理が可能になり、大型の真空容器および大型排気
設備が不要になる。必要な局部のみのデスケーリングが
マスキング無しであるいは、極簡便なマスキングにより
可能になり、真空雰囲気を作るための排気時間の短縮、
デスケーリング処理時間の短縮、およびデスケーリング
処理に要する電力の大幅節減が可能になる。局所表面蒸
着被覆作業が同一設備で表面予備処理と真空蒸着が可能
となり、しかも密着性の高い皮膜形成が可能となる。
As described above, according to the present invention, it is possible to perform a local descaling process on a large-sized member, and a large-sized vacuum container and large-sized exhaust equipment are unnecessary. Descaling of only the necessary local parts is possible without masking or with extremely simple masking, shortening the exhaust time to create a vacuum atmosphere,
It is possible to shorten the descaling processing time and significantly reduce the power required for the descaling processing. Local surface vapor deposition coating work enables surface pretreatment and vacuum vapor deposition with the same equipment, and enables formation of a film with high adhesion.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の真空アークデスケーリング局所処理装
置原理図。
FIG. 1 is a principle diagram of a vacuum arc descaling local processing apparatus of the present invention.

【図2】裾治具を有する本発明の真空アークデスケーリ
ング局所処理装置原理図。
FIG. 2 is a principle diagram of a vacuum arc descaling local processing apparatus of the present invention having a skirt jig.

【図3】極性切り替え機構を有する本発明の真空アーク
デスケーリング局所処理装置原理図。
FIG. 3 is a principle diagram of a vacuum arc descaling local processing apparatus of the present invention having a polarity switching mechanism.

【図4】真空容器の一部を電極とする本発明の真空アー
クデスケーリング局所処理装置原理図。
FIG. 4 is a principle diagram of a vacuum arc descaling local processing apparatus of the present invention in which a part of a vacuum container is used as an electrode.

【符号の説明】[Explanation of symbols]

1 部材(通常陰極) 2 真空容器 2′ 真空容器胴部分 3 真空排気ポート 4 電極(通常陽極) 4′ 天井電極(通常陽極) 5 給水ポート 6 排水ポート 7 シール材 8 裾部(裾治具) 9 極性切り替え機構 10 直流電源 11 絶縁材料 1 member (normal cathode) 2 vacuum container 2'vacuum container body part 3 vacuum exhaust port 4 electrode (normal anode) 4'ceiling electrode (normal anode) 5 water supply port 6 drainage port 7 sealing material 8 hem (hem jig) 9 Polarity switching mechanism 10 DC power supply 11 Insulation material

フロントページの続き (72)発明者 田村 元紀 神奈川県川崎市中原区井田1618番地 新日 本製鐵株式会社技術開発本部内Front page continuation (72) Inventor Motoki Tamura 1618 Ida, Nakahara-ku, Kawasaki-shi, Kanagawa Nippon Steel Corporation Technology Development Division

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 電極、真空容器、直流電源及び排気装置
からなる真空アークデスケーリング装置において、真空
容器が電極を組み込み、被処理部材との密着性を持たせ
るためのシール材を裾部に有したカップ状の真空容器で
あることを特徴とする真空アークデスケーリング装置。
1. A vacuum arc descaling device comprising an electrode, a vacuum container, a DC power supply, and an exhaust device, wherein the vacuum container incorporates an electrode and has a sealing material at the hem for providing adhesion to a member to be processed. Vacuum arc descaling device, which is a cup-shaped vacuum container.
【請求項2】 被処理部材の処理形状に合わせたシール
部を有し、前記カップ状容器に接する側は、カップ形状
にあわせた面を有する補助容器をさらに有することを特
徴とする請求項1記載の真空アークデスケーリング装
置。
2. The auxiliary container having a seal portion matching the processed shape of the member to be processed, and the side contacting the cup-shaped container further having an auxiliary container having a surface matched to the cup shape. The vacuum arc descaling device described.
【請求項3】 アーク直流電源と真空アーク電極とを接
続する回路途上に電極極性切り替え装置を具備すること
を特徴とする請求項1又は2記載の真空アークデスケー
リング装置。
3. The vacuum arc descaling device according to claim 1, further comprising an electrode polarity switching device on a circuit connecting the arc DC power supply and the vacuum arc electrode.
JP05876296A 1996-03-15 1996-03-15 Vacuum arc descaling local processing equipment Expired - Lifetime JP3340017B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05876296A JP3340017B2 (en) 1996-03-15 1996-03-15 Vacuum arc descaling local processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05876296A JP3340017B2 (en) 1996-03-15 1996-03-15 Vacuum arc descaling local processing equipment

Publications (2)

Publication Number Publication Date
JPH09248617A true JPH09248617A (en) 1997-09-22
JP3340017B2 JP3340017B2 (en) 2002-10-28

Family

ID=13093564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05876296A Expired - Lifetime JP3340017B2 (en) 1996-03-15 1996-03-15 Vacuum arc descaling local processing equipment

Country Status (1)

Country Link
JP (1) JP3340017B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3393215A1 (en) 2017-04-20 2018-10-24 Andrey Senokosov Arc plasmatron surface treatment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3393215A1 (en) 2017-04-20 2018-10-24 Andrey Senokosov Arc plasmatron surface treatment

Also Published As

Publication number Publication date
JP3340017B2 (en) 2002-10-28

Similar Documents

Publication Publication Date Title
JP2003174012A5 (en)
JP3340017B2 (en) Vacuum arc descaling local processing equipment
JPH07106307A (en) Plasma treatment equipment and plasma treatment method
EP2031085A1 (en) Arc evaporation source and vacuum evaporation system
JPH0822980A (en) Plasma processing equipment
JP2628795B2 (en) How to clean shields in physical vapor deposition chambers
JP3308871B2 (en) Metal surface local treatment equipment by vacuum arc
JP3895919B2 (en) Cleaning device
JP3328558B2 (en) Metal surface treatment equipment by vacuum arc
JPH0485825A (en) Pretreatment equipment of sputtering device
JPH09248618A (en) Vacuum arc descaling apparatus
JP3205204B2 (en) Method and apparatus for cleaning electrode for vacuum arc descaling
JPS6233761A (en) Cleaning device for inside wall of vacuum vessel
JPH07130704A (en) Apparatus and method of plasma treatment
JP4824091B2 (en) Method and apparatus for vacuum etching of metal strip by magnetron sputtering
JPH06280069A (en) Vacuum arc descaling device
JP3482298B2 (en) Masking method in vacuum arc descaling method
JPH06279982A (en) Method for ionically nitriding aluminum material and device therefor
JPS63254731A (en) Plasma processor
JPH05131270A (en) Vacuum arc treating device
JP2002043235A (en) Plasma treatment system
JP2008045916A (en) Surface treatment method of probe, and probe
JPH06280068A (en) Vacuum arc treating device
JPH04315797A (en) Plasme processing device and method of cleaning plasma source thereof
JPS58193370A (en) Surface treatment and application thereof

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20020716

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080816

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090816

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090816

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100816

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100816

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110816

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120816

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130816

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130816

Year of fee payment: 11

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130816

Year of fee payment: 11

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130816

Year of fee payment: 11

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130816

Year of fee payment: 11

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term