JPH09236406A - Device and apparatus for detecting position - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small sized position detecting device, a position detecting apparatus and a position variation detecting device. SOLUTION: In a position detecting device, a photoelectric transducer consisting of a lower electrode 2, a photoelectric conversion semiconductor layer 3 and an upper transparent electrode 4 is placed on a position where a part of a light is blocked by a thin film light-shading layer 6 corresponding to a position of a light source (not shown in the figure). The lower electrode 2, the rectangular-shaped photoelectric conversion semiconductor layer 3 and the upper transparent electrode 4 are laminated on a substrate 1. A first transparent layer 5 is further laminated thereon including the upper transparent electrode 4 in a plane and the rectangular shaped thin film light-shading layer 6 is partially laminated on the first transparent layer 5. A second transparent layer 7 is laminated on a region of the rest of the first transparent layer 5 and the thin film light-shading layer 6 in a plane and lastly a film layer 8 is laminated thereon.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detecting device, a manufacturing method thereof, a position detecting device, and a position change detecting device. For example, it is generally widely used in motion analysis of mechanical parts and body parts, assembling process, and the like, and is particularly suitable for detecting three-dimensional absolute position and relative position with respect to a minute object.

[0002]

2. Description of the Related Art In the conventional object position detecting technology, parts and devices that require excessive performance and cost for position detection or that require strict fine adjustment are used. is the current situation. For example, conventionally, Japanese Patent Laid-Open No. Sho 60
As described in Japanese Patent Laid-Open No. -60502 and Japanese Patent Laid-Open No. 63-238510, there are some which use a plurality of cameras. However, although the camera is originally a device for inputting all the images, it is used only for detecting the light emitting area, so that not only extra cost is required but also the image processing A complicated image processing process of extracting the light emitting area is also required.

As described in Japanese Patent Laid-Open No. 3-196326, there is a device using a lens and a two-divided pin photodiode. Since the lens has a focal point due to its structure, it is difficult to detect an accurate three-dimensional position in a light emitting region that is away from the focal point, and a correction circuit or a bit for correcting aberration is required. Maps, etc. will be indispensable. If an accurate three-dimensional position is to be known using a zoom lens, a component for focusing and a process of focusing are required at the time of position detection.

As described in Japanese Patent Laid-Open No. 3-150623, there is a device which detects a position or measures a shape in a three-dimensional space by using a plurality of two-dimensional PSDs and pinholes. The pinhole is positioned as an optical component with good straightness, but the absolute amount of light that passes through is small, so in principle it is not possible to obtain a sufficient amount of light and it is burdened with amplification at the output of the light source or the output of the photoelectric conversion element. Takes.

As described in Japanese Unexamined Patent Publication No. 54-116258, there is one in which a plurality of one-dimensional CCDs are opposed to each other in a direction orthogonal to each other, but the positions where the one-dimensional CCDs are arranged are limited. It is difficult to reduce the size and cost of the detection device.

As described in JP-A-6-42919, there is one using a PSD and a light shielding means. PS
D is suitable for light emitting region detection, but it is necessary to obtain a thin film having high uniformity in order to obtain an accurate current value without error from each of the 2 to 4 terminals. Therefore, the yield in the manufacturing process is low and the cost increase is greatly affected. Therefore, replacement with a simple device is required. Further, in order to obtain an accurate current value, it is necessary to increase the amount of light to be emitted, which is extremely disadvantageous especially when combined with a pinhole that cannot obtain a large amount of light.

In recent years, as fine processing technology has developed,
Development of moving technology and transportation technology for minute parts is actively underway. As the movable part and the transport part become smaller, it becomes more important and more difficult to solve the problem of improving the accuracy of these three-dimensional alignments. In particular, since the development of a highly accurate and small three-dimensional position detection sensor and the technology for attaching it to a minute component are insufficient, in the past, alignment was performed only by machine precision or a minute component was used. The current situation is to use a sensor that only knows whether or not the position is present, or to visually confirm the position using a microscope. Therefore, there is a demand for a position detection device and a position detection device that can measure an accurate three-dimensional position in real time and can feed it back to a movable part.

For example, when the probe is brought into contact with a specific position on the silicon wafer, the coordinates of the point to be brought into contact are input in advance, or a positioning mark located away from the probe is set by the camera. The current situation is that the probe and the electrode are brought into contact with each other without feedback such as actual position information of the probe and the electrode for image analysis. For this reason, the finer the device to be fabricated, the smaller the electrode area to be brought into contact, which makes alignment at the time of contact difficult, and apparently due to alignment on the plane and displacement of the contact depth. In addition to the decrease in yield, the device itself is damaged, and the decrease in yield becomes remarkable. In order to prevent this, at present, the operator has no choice but to confirm the position with a microscope and input an alignment error as an offset amount.

Further, in the case of performing a three-dimensional minute movement, a method of combining three micrometers is generally used, but it is difficult to confirm the movement amount by other means, and Since there is also backlash, the true amount of movement cannot be calculated.

Further, regarding the three-dimensional motion analysis of a minute portion of the body as an application technique of position detection, conventionally, there is no small three-dimensional position detecting device,
A method is to attach a rod with an LED to a part of the human body as an object, magnify a minute movement, and then image and analyze the position of this light spot using two or more CCD cameras. Since it is taken, it is difficult to reproduce the original motion when the device is not worn, and the size of the device is inevitable.

For example, Horita, "Ergonomics", 31
(2), pp. In the analysis during treatment of three-dimensional movement of the hand, etc. and mandibular movement as described in 105, it is possible to mark various parts of the human body, record this movement with a camera, and analyze it later. , Hayashi, "Video Information" (M), 1
994-11, pp. 1317 and JP-A-54-
There is a need for a large-scale device as described in Japanese Patent No. 116258, in which a rod called Faith Bow and several LEDs are bonded to teeth and six cameras detect this movement.

On the other hand, as a three-dimensional position detecting technique, a product name "FASTRAK" (Nissho Electronics), a product name "3D MOUSE" (Asahi Electronics) and the like are on sale. Product name "FASTRAK"
Uses a magnetic field, and the measurement range is as wide as about 3 m. However, when a magnetic substance exists within the measurement range and a distance about twice the measurement range, the magnetic field is distorted and an uncorrectable error occurs. Remains, the measurement conditions are limited. The product name "3D MOUSE" uses ultrasonic waves, but a lot of noise is generated due to the reflection of ultrasonic waves from surrounding objects, and the measurement conditions are also limited.

[0013]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a small position detecting device, a manufacturing method thereof, a position detecting device, and a position change detecting device. It is a thing. In particular, it is suitable for detection of a three-dimensional absolute position, relative position, etc. with respect to a minute object requiring high accuracy.

[0014]

According to a first aspect of the present invention, in a position detection device, at least one thin film light-shielding layer that shields light from a light source, and at least one thin film light-shielding layer.
One first photoelectric conversion element is provided, and the first photoelectric conversion element is arranged at a position where a part of the light is shielded by the thin film light shielding layer according to the position of the light source. It is a thing.

According to a second aspect of the present invention, in the position detecting device according to the first aspect, at least one light transmitting layer is provided, and the thin film light shielding layer is laminated on the light transmitting layer. It is a feature.

According to a third aspect of the invention, in the position detecting device according to the first aspect, at least one substrate is provided, and the first photoelectric conversion element and the first light transmitting layer are provided on the substrate. The thin film light-shielding layers are sequentially stacked, and the thin film light-shielding layers are partially stacked.
In the invention according to claim 4, in the position detecting device according to claim 1, at least one first
A transparent layer and at least one second transparent layer,
The thin film light-shielding layer, the first light-transmitting layer, and the first photoelectric conversion element are sequentially stacked on the second light-transmitting layer, and the thin-film light-shielding layer is partially stacked.

Further, the invention according to claim 5 is characterized in that the position detecting device according to any one of claims 1 to 4 has at least one filter layer for transmitting a specific wavelength region. To do.

According to a sixth aspect of the present invention, in the position detection device according to any one of the first to fifth aspects, at least one second photoelectric conversion element is provided,
The second photoelectric conversion element is arranged at a position where the light is not shielded by the thin film light shielding layer.

According to a ninth aspect of the present invention, a position detecting apparatus has at least one position detecting device according to any one of the first to sixth aspects, and based on the output of the position detecting device. It is characterized by having a position calculation means for calculating the position of the light source.
Furthermore, in the invention described in claim 10,
In the position detecting device described in (1), the position calculating means is
It is characterized in that the position is corrected based on the refractive index of the medium in the optical path from the light source to the light reception by the first photoelectric conversion element.

According to an eleventh aspect of the invention, in the position detecting device, a light source provided on at least a part of the object whose position is to be detected, and any one of the first to sixth aspects.
It has at least one position detection device described in the paragraph. Further, the invention according to claim 12 is the position detecting device according to claim 11, wherein the position detecting device has a light emitting body, and the light source is a reflection region for reflecting light from the light emitting body. It is a thing.

According to a thirteenth aspect of the present invention, in the position detecting device according to the eleventh or twelfth aspect, the object is a photoconductor and is a position detecting device in an electrophotographic recording mechanism. It is a thing. Moreover, in the invention described in claim 14, claim 11 or 1
In the position detecting device according to the second aspect, the object is a lens or a lens support, and is a position detecting device in a lens moving mechanism.

According to a fifteenth aspect of the present invention, in the position change detecting device, the position detecting device according to any one of the ninth to fourteenth aspects and the object based on the output of the position detecting device. It is characterized by having a position change calculation means for calculating a position change amount such as velocity, acceleration, angular velocity and the like.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION The applicant of the present invention discloses a position detecting device and a position detecting device in Japanese Patent Application No. 07-288794.
No. has been filed. In the present invention, the invention according to this application is used as a prior art, and the principle of position detection is used to make the position detection device a structure particularly suitable for downsizing.

FIG. 1 shows a first position detecting device according to the present invention.
FIG. 3 is a structural diagram of the embodiment. In the figure, 1 is a substrate, 2 is a lower electrode, 3 is a photoelectric conversion semiconductor layer, 4 is an upper transparent electrode, 5
Is a first light transmitting layer, 6 is a thin film light shielding layer, 7 is a second light transmitting layer,
8 is a filter layer. In this embodiment, a photoelectric conversion element including a lower electrode 2, a photoelectric conversion semiconductor layer 3, and an upper transparent electrode 4 is provided on the substrate 1 and a thin film light-shielding layer 6 is used to emit light depending on the position of a light source (not shown). It is a position detection device installed at a position where a part is shielded from light.

A lower electrode 2, a rectangular photoelectric conversion semiconductor layer 3 and an upper transparent electrode 4 are laminated on the substrate 1, and the first transparent layer 5 including the upper transparent electrode 4 is flattened. The rectangular thin film light-shielding layer 6 is partially laminated on the first light-transmitting layer 5 and the second light-transmitting layer 6 and the thin film light-shielding layer 6 are formed on the remaining region of the first light-transmitting layer 5 and the second light-transmitting layer 6. Layer 7 is laminated flat and finally filter layer 8 is laminated. Lower electrode 2
Extends on the substrate 1 and also serves as a wiring line. A wiring line to the upper transparent electrode 4 is also necessary, but it is not shown because it can be appropriately provided. It is preferable to position the right end of the thin film light-shielding layer 6 on the central portion of the photoelectric conversion semiconductor layer 3, and the left end and the front end (not shown) and the end on the other side of the paper are sufficiently separated from the corresponding end of the photoelectric conversion semiconductor layer 3. Located in a remote location.

The manufacturing method will be described later with reference to FIG. Here, a specific example of each component will be given. The substrate 1 is glass, the photoelectric conversion semiconductor layer 3 is a silicon photodiode, the lower electrode 2 is Ta, Ti, Cr, or the like.
The upper transparent electrode 4 is ITO. The thin film light-shielding layer 6 is T
Although it is a metal thin film layer of a, Ti, Cr, etc., it may be an Al thin film. The first and second translucent layers 5 are both interlayer films that transmit light, and are made of an organic film such as polyimide or Si.
It is an inorganic film such as O ₂ or SiN. The filter layer 8 is, for example, a colored plastic film, and transmits the wavelength region of light for position detection and blocks ambient light. The second light transmissive layer 7 and the filter layer 8 have a function as protective films, but are not always necessary. Further, at least one of the first light transmitting layer 5 and the second light transmitting layer 7 may be colored to have a filter function.

FIG. 2 shows a second position detecting device according to the present invention.
FIG. 3 is a structural diagram of the embodiment. In the figure, the same parts as those in FIG. In this embodiment, the lower electrode 2, the photoelectric conversion semiconductor layer 3, the upper transparent electrode 4 are used.
A photoelectric conversion element consisting of is on the first light-transmitting layer 5,
The position detecting device is installed at a position where a part of light is shielded by the thin film light shielding layer 6 according to the position of a light source (not shown), but the substrate 1 is not provided.

A rectangular thin film light-shielding layer 6 is partially laminated on the lower surface of the second light transmitting layer 7, and the first light transmitting layer 5 is laminated including the remaining region of the second light transmitting layer 7. Then, the upper transparent electrode 4, the rectangular photoelectric conversion semiconductor layer 3, and the lower electrode 2 are laminated underneath. The filter layer 8 is laminated on the upper surface of the second light transmissive layer 7. The upper transparent electrode 4 extends rightward from the lower surface of the first light transmitting layer 5 and also serves as a wiring line. The wiring line to the lower electrode 2 is not shown. It is preferable to position the right end of the thin film light-shielding layer 6 on the central portion of the photoelectric conversion semiconductor layer 3.
The right end and the front and back edges of the paper, which are not shown, are sufficiently distant from the corresponding edges of the photoelectric conversion semiconductor layer 3.

Although the thin film light-shielding layer 6 is arranged on the right side in the drawing, it may be arranged on the left side as in FIG. The manufacturing method will be described later with reference to FIG. Similarly to the first embodiment, the second light transmissive layer 7 may be omitted,
In this case, the thin film light shielding layer 6 is partially laminated on the first light transmitting layer 5. The filter layer 8 is not always necessary, and at least one of the first light transmitting layer 5 and the second light transmitting layer 7 may be colored to have the function of the filter layer.

One-dimensional position detection is possible even if only one of the first and second position detection devices described above is used.
The position detection principle will be described with respect to a device which is used as a three-dimensional position detection device by further using the second photoelectric conversion element.

FIG. 3 is a plan view of the position detecting device according to the first and second embodiments of the present invention. 4 and 5 are explanatory diagrams of the operation principle of the configuration shown in FIG. FIG. 4 (A)
Is a cross-sectional view taken along the xy plane of FIG. 3, and FIG.
It is explanatory drawing which shows the light source in (A) and the positional relationship of each part. 5A is a cross-sectional view of the xz plane of FIG.
FIG. 5B is an explanatory diagram showing the positional relationship between the light source and each part in FIG. In the figure, 11 to 13 are first photoelectric conversion elements, 14 is a second photoelectric conversion element, 15 to 17 are light shielding plates, 18 is a light source, and 19 is an origin.

First, the correspondence relationship with the configuration shown in FIGS. 1 and 2 will be described. The position detection device shown in FIG. 3 is a set of the first photoelectric conversion elements 11 to 13 and one light shielding plate 15 to 17 adjacent to the first photoelectric conversion elements 11 to 13, and the position detection device shown in FIGS. It will be realized. Therefore, the photoelectric conversion element including the lower electrode 2, the photoelectric conversion semiconductor layer 3, and the upper transparent electrode 4 shown in FIGS. 1 and 2 is used for each of the first photoelectric conversion elements 11 to 13, and the thin film light shielding is performed. The layer 6 is used for each of the light shielding plates 15 to 17. The first light-transmitting layer 5 shown in FIGS. 1 and 2 serves as a support that holds a predetermined distance, the second light-transmitting layer 7 serves as a support or a protective layer, and the filter layer 8 removes ambient light. However, none of them directly relates to the principle of position detection, and therefore is not shown in FIGS. 3 to 5.

Alternatively, the three first photoelectric conversion elements 11
13 to 13 and the second photoelectric conversion element 14 may be collectively stacked on one substrate 1 or the first transparent electrode 5. At that time, the number of the first light-transmitting layer 5 and the second light-transmitting layer is also one, and the light shielding plates 15 to 17 collectively include the first light-transmitting layer 5 shown in FIG.
Alternatively, it is laminated on the second transparent layer 7 shown in FIG. As for the filter layer 8, one film can be entirely laminated. Although the first and second embodiments have different laminated structures, the operating principles are the same, and hence the following description will be made without distinguishing between the two.

The position detecting device shown in FIGS. 3 to 5 has a first position at a position where a part of the light is blocked by the light blocking plates 15 to 17 for blocking the light from the light source 18 according to the position of the light source 18. This is a three-dimensional position detection device in which the photoelectric conversion elements 11 to 13 are installed. In addition, the light shield plates 15 to 17 are provided at the second position at a position where the light from the light source 18 is not shielded.
The photoelectric conversion element 14 is installed.

As shown in FIG. 3, in order to simplify the explanation, three first photoelectric conversion elements 11 to 13 and one second photoelectric conversion element 11 are used.
The photoelectric conversion elements 14 are installed on the same yz plane, and these are the same rectangle having an end in the y-axis or z-axis direction. Light-shielding plates 15 to 17 are installed corresponding to the respective first photoelectric conversion elements 11 to 13 on a plane separated from the plane by a predetermined distance h in the x direction, and these are shielded in the y-axis or z-axis direction. Are the same rectangle with.

First photoelectric conversion element 11 and light shield plate 15
Of the first photoelectric conversion element 12 and the light shielding plate 16 are opposed to each other in the y-axis direction and are orthogonal to the second set in the z-axis direction.
The photoelectric conversion element 14 and the set of the first photoelectric conversion element 13 and the light shielding plate 17 are installed to face each other. The second photoelectric conversion element 14 has the same rectangular shape as the first photoelectric conversion elements 11 to 13.

As shown in FIGS. 4A and 5A, omnidirectional light from the light source 18 is received by the first photoelectric conversion elements 11 to 13 via the light shielding plates 15 to 17. , Light shield 1
The light is received on the entire surface of the second photoelectric conversion element 14 without passing through 5 to 17. At this time, in the first photoelectric conversion elements 11 to 13, depending on the incident direction of light, in other words, depending on the solid angle when the light source 18 is viewed from each position of the first photoelectric conversion elements 11 to 13, The area of the light receiving area changes due to the change of the light shielding area that is shaded by the light shielding plates 15 to 17. In the figure, the light shielding regions of the first photoelectric conversion elements 11 to 13 are filled with black.

The first photoelectric conversion elements 11 to 13 convert the total amount of light corresponding to the light receiving area into a current or a voltage and output it. The photocurrents of the first photoelectric conversion elements 11 to 13 may be converted into voltages through the current / voltage conversion unit. By calculating the current value or the voltage value obtained from each of the first photoelectric conversion elements 11 to 13, the one-dimensional position, the two-dimensional position, or the three-dimensional position of the light source 18 can be detected. First
The number of photoelectric conversion elements is 1 when detecting the one-dimensional position of the light source 18, two when detecting the two-dimensional position, and two when detecting the three-dimensional position. Three is enough.

Since the present invention, including other embodiments described later, does not use a lens, there is no need for a design considering the focal length and aberrations, and there is no difficulty in adjustment during assembly. Further, unlike the pinholes and slits, since the method of simply shielding light from one end of the first photoelectric conversion elements 11 to 13 is adopted, a large light receiving area can be taken. As a result, the amount of light is large, and it becomes possible to perform position detection in a wide range including a distant place.

It should be noted that FIGS. 4A and 4B show xy
Since it is a cross-sectional view of a plane, it only represents one cross section where z = 0, but in other cross sections parallel to the xy plane, the first photoelectric conversion elements 11 and 12 and the light shielding plate 15, 1
6 and the light source 18 have the same position and angle relationship on the cross section. The coordinates of the position of the light source 18 are (x,
y, z), but on such a cross section,
Since the position and the angular relationship are determined irrespective of the z coordinate of the position of the light source 18, in FIG. 4A and FIG.
The coordinates of the position 8 are shown as (x, y).

Similarly, in FIG. 5 (A) and FIG. 5 (B), y =
It is a cross-sectional view of the xz plane which is 0, but in the other cross section parallel to the xz plane, the first photoelectric conversion element 13 and
The cross-sectional position and angular relationship with the light-shielding plate 17 and the light source 18 are the same. On such a cross section, the position and angular relationship of the position of the light source 18 is determined irrespective of the y coordinate. Therefore, in FIGS. 5A and 5B, the position coordinate of the light source 18 is (x, z).

However, in the light receiving surface of each of the first photoelectric conversion elements 11 to 13, even in the light receiving region, the unit depends on the distance from the light source 18, the incident direction of the light, the intensity of the irradiation light of the light source 18, and the like. Since the amount of light per area changes,
This change also appears in the outputs of the first photoelectric conversion elements 11 to 13. As a result, an error occurs when detecting the position of the light source 18 based on the relationship between the incident direction of light and the light receiving area. Therefore, the second photoelectric conversion element 14 that receives the light from the light source 18 over the entire surface is provided, and by using this output,
Distance from the light source 18 and direction of incidence of light, light source 18
It is possible to compensate a change in the amount of light per unit area depending on the intensity of the irradiation light.

Incidentally, the first and second photoelectric conversion elements 11 to 1
Since the positions of 4 are slightly different, the amount of light per unit area differs depending on the difference in the distance from the light source 18 on each light receiving surface, but this is slight. In this embodiment, the position is detected by utilizing the fact that the area ratio of the light-receiving region and the light-shielding region changes depending on the difference in the light incident direction on each light-receiving surface. However, this area ratio greatly changes depending on the difference in the incident direction of light on each light receiving surface due to the existence of the distance h,
The influence of the change in the amount of light per unit area due to the difference in the incident direction of light is relatively small.

As shown in FIG. 3, the first photoelectric conversion element 1
Originally, if the ends of 1 to 13 on the origin 19 side are made coincident with the origin 19, the calculation becomes easier, but the first photoelectric conversion element 11
Since ~ 13 has a certain area, the origin 1
It is assumed that they are installed at a distance of a ₁ , a ₂ , and a ₃ from 9. In addition, the origin 1 of the first photoelectric conversion elements 11 to 13
The distance between the end on the 9 side and the end facing the end is L.
The second photoelectric conversion element 14 also has the same rectangular shape,
This is not always necessary as described later. There is no strict restriction on the distance from the origin 19 to the end on the side of the origin 19, and the distance does not have to be on the same plane as the first photoelectric conversion elements 11 to 13 and may be installed in the vicinity thereof.

As shown in FIGS. 4 (A) and 5 (A), the light shielding plates 15 to 17 are arranged on a plane at a constant distance h in the x-axis direction from the first photoelectric conversion elements 11 to 13. As shown in FIG. 3, they are the same rectangle having the ends in the y-axis or z-axis direction, and the ends of the light shields 15 and 16 on the origin 19 side are distance A ₁ from the origin 19 in the y-axis direction. , A ₂ , and are separated from each other by h in the x-axis direction, and the end of the shading plate 17 on the origin 19 side is separated from the origin by a distance A _{3 in} the z-axis direction and h in the x-axis direction. It is desirable that the light-shielding plates 15 to 17 be made sufficiently thin, or at least their ends on the side of the origin 19 are formed into sharp edges. Since the thin film light shielding plate 6 shown in FIGS. 1 and 2 is used, the light shielding plates 15 to 17 can be made sufficiently thin.

In the first photoelectric conversion element 11,
It is assumed that the boundary line between the light receiving area and the light shielding area is at a distance of d ₁ from the origin. Similarly, the boundary line in the first photoelectric conversion element 12 is at a distance of d ₂ , and the boundary line in the first photoelectric conversion element 13 is at a distance of d ₃ . Thus, for example, the light source 1 is such that light is incident normal to the yz plane.
8 is sufficiently far on the axis passing through the origin 19 and perpendicular to the y-z plane, the light receiving surfaces of the photoelectric conversion elements 11 to 13 are d ₁ = A ₁ and d ₂ respectively from the origin 19. = A ₂ ,
With the position of d ₃ = A ₃ as a boundary line, the light receiving region and the light shielding region are divided.

Next, the relationship between the position of each part and the position of the light source 18 will be described using mathematical expressions with reference to FIGS. 4B and 5B. Based on the optical path from the light source 18 to the first photoelectric conversion elements 11 to 13, the distances d _{1 to} d ₃ from the origin of the boundary line are obtained by utilizing the similarity of the triangle. First, in FIG. 4B, the following equation is established.

(D ₁ −y) / x = (d ₁ −A ₁ ) / h (d ₂ + y) / x = (d ₂ −A ₂ ) / h From this, x = −h · y / (d _{1 -A 1) + h · d} 1 / (d 1 -A 1) ... (1) y = (d 2 -A 2) · x / h-d 2 ... (2) (2) equation (1) Substituting into x = h · (d ₁ + d ₂ ) / (d ₁ + d ₂ −A ₁ −A ₂ ) ... (3) Substituting equation (3) into equation (2) yields y = (A ₁ · _{d 2 -A 2 · d 1)} / (d 1 + d 2 -A 1 -A 2) ... (4) is obtained. As described above, by obtaining the coordinates of x and y, first, the position can be detected in two dimensions on the xy plane.

Similarly, in FIG. 5B, the following equation holds. (D ₃ + z) / x = (d ₃ −A ₃ ) / h From this, z = (d ₃ −A ₃ ) · x / h−d ₃ (5) _{substituting, z = ((A 1 +} A 2) · d 3 -A 3 · (d 1 + d 2)) / (d 1 + d 2 -A 1 -A 2) ... (6) is obtained.

The outputs of the _first photoelectric conversion elements 11 to 13 are V _{1 to} V _3, and the output of the second photoelectric conversion element 14 is V ₀ . Since the outputs of the first and second photoelectric conversion elements 11 to 14 are proportional to the areas of the respective light receiving regions, the following equation is established. _{(D 1 -a 1) / L} = V 1 / V 0 (d 2 -a 2) / L = V 2 / V 0 (d 3 -a 3) / L = V 3 / V 0 From this, d ₁ = V ₁ · (L / V ₀ ) + a ₁ (7) d ₂ = V ₂ · (L / V ₀ ) + a ₂ (8) d ₃ = V ₃ · (L / V ₀ ) + a ₃ … ( 9)

Substituting the expressions (7) to (9) into the expressions (3) to (6), x = h · (V ₁ + V ₂ + (a ₁ + a ₂ ) · V ₀ / L) / (V _{1 + V 2 + (a 1 +} a 2 -A 1 -A 2) · V 0 / L) ... (10) y = (A 1 · V 2 -A 2 · V 1 + (a 2 · A 1 -a 1 · _{A 2) · V 0 / L} ) / (V 1 + V 2 + (a 1 + a 2 -A 1 -A 2) · V 0 / L) ... (11) z = ((A 1 + A 2) · V 3 _{-A 3 · (V 1 + V} 2) + (a 3 · (A 1 + A 2) - (a 1 + a 2) · A 3) · V 0 / L) / (V 1 + V 2 + (a 1 + a 2 −A ₁ −A ₂ ) · V ₀ / L) (12), the coordinates of x, y, z are obtained.

Actually, the first and second photoelectric conversion elements 11 to 11 are
In the case of realizing an arithmetic circuit for obtaining x, y, z coordinates by using the outputs V _{1 to} V ₄ of 14, the first photoelectric conversion elements 11 to 13 of the first photoelectric conversion elements 11 to 13 are used in order to reduce an arithmetic error. The end portions on the origin side are all arranged at positions at a constant distance a from the origin in the xz plane, and the end portions on the origin side of the light shielding plates 15 to 17, that is, the first photoelectric conversion elements 11 to 13 are arranged. The part projecting the boundary line above is arranged so that it is arranged at a position at a constant distance A in the y-axis or z-axis direction in the plane from the origin, and at a position h in the x-axis direction perpendicular to this plane. To do.

That is, it is desirable to simplify equations (10) to (12) as follows, assuming that A ₁ = A ₂ = A ₃ = A a ₁ = a ₂ = a ₃ = a. _{x = h · (V 1 +} V 2 + 2a · V 0 / L) / (V 1 + V 2 - (2A-2a) · V 0 / L) ... (13) y = A · (V 2 -V 1) / _{(V 1 + V 2 - (} 2A-2a) · V 0 / L) ... (14) z = A · (2V 3 - (V 1 + V 2)) / (V 1 + V 2 - (2A-2a) · V It can be expressed as ₀ / L) (15). Thus, by devising the arrangement of each element, the three-dimensional position of the light source can be detected using a simple circuit.

Further, the first and second photoelectric conversion elements 11 to 1
It is desirable that the output of 4 be amplified and offset removed by an operational amplifier in order to reduce a calculation error.
The calculation is performed by converting the current or voltage into a digital amount by A / D conversion and then performing digital calculation, or
You may perform an analog calculation with an electric current or voltage using an operational amplifier.

In the above description, in order to simplify the calculation, the first and second photoelectric conversion elements 11 to 14 are regularly installed on the same plane, and on a plane separated from the plane by a predetermined distance. Although the description has been given of the case where the light shielding plates 15 to 17 are regularly arranged, the first and second photoelectric conversion elements 11
No. 14 to No. 14 do not necessarily need to be regularly arranged on the same plane, and the same applies to the light shielding plates 15 to 17.
However, the light shielding plates 15 to 17 and the first photoelectric conversion elements 11 to 11
13 is installed at a position where a part of the light is shielded according to the incident direction of the light from the light source 18, for example, at a position where the areas of the light receiving region and the light shielding region on the first photoelectric conversion element change. However, it is necessary to change the above-mentioned formula according to the arrangement.

The first photoelectric conversion elements 11 to 13 do not necessarily have to have the same rectangular shape. The same applies to the light shielding plates 15 to 17. Even if the respective shapes and sizes are different from each other, the boundary line between the light receiving area and the light shielding area is regularly moved according to the incident direction of light from the position of the light source 18, so the position coordinates of the light source 18 are calculated. Can be asked. When the boundary line between the light receiving area and the light blocking area moves on the light receiving surface according to the incident direction of the light from the light source 18, the shape of the boundary line is always constant without depending on the incident direction of the light,
For example, the light-shielding plates 15 to 17 should be straight lines of a certain length.
If the shapes and installation positions of the first photoelectric conversion elements 11 to 13 are determined, the position coordinates of the light source 18 can be obtained by directly modifying the above equation or by slightly modifying it.

The second photoelectric conversion element 14 compensates for a change in the amount of light per unit area depending on the incident direction of light in the light receiving region, and therefore may have any shape. In the above equations (13) to (15) and the like, it is only necessary to change the value of the coefficient (V ₀ / L) according to the area of the light receiving surface of the second photoelectric conversion element 14.

In the above description, the second photoelectric conversion element 1
The case where 4 is used has been described. The second photoelectric conversion element 14 is required for highly accurate position detection. But,
In some cases, there is no problem in practical use without using the second photoelectric conversion element 14. When the amount of light per unit area is known in advance, for example, the position to be detected by the light source 18 is limited to a narrow range, or when a slight relative position change from the reference position of the light source 18 is detected. is there. On the contrary, when the position of the light source 18 to be detected is limited to several places which are sufficiently distant and the position detection accuracy may be low, the output change of the first photoelectric conversion elements 11 to 13 is large and the unit area is large. The change in the amount of light per hit is only an error.

In addition, the first photoelectric conversion element 11 and the light shield plate 1
The group of 5 and the group of the first photoelectric conversion element 12 and the light shielding plate 16 are arranged line-symmetrically. In this case, when the light source 18 is located far away and the x-coordinate value is large, the incident angle of light seen from the first photoelectric conversion element 11 and the first photoelectric conversion element 12 are considered.
Since the incident angles of light viewed from the same are the same, the area of the light receiving portion on the first photoelectric conversion element 11 and the second photoelectric conversion element 12 are
The sum of the areas of the light receiving portions of is constant regardless of the incident direction, and is equal to the area of the light receiving portions of the second photoelectric conversion element 14. Therefore, in such a case, instead of the output V ₀ of the second photoelectric conversion element 14, the output V 1 of the first photoelectric conversion element 11 and the output V ₁ of the second photoelectric conversion element 12 are used.
It is also possible to use the sum of _two . In reality, since the light source 18 is not sufficiently far away, an error occurs, but this method can also be used for applications where the position detection accuracy may be low.

It is preferable to use an infrared light emitting diode as the light source. Infrared light has a relatively small wavelength in a general work environment such as an office. Ambient light other than infrared light can be efficiently removed by providing an infrared transmission filter before the photoelectric conversion element. When the light source is pulse-lighted and the light intensity is modulated so that the light pulse is generated at a predetermined cycle, the disturbance light that appears as an offset component from the output of the photoelectric conversion element can be removed.
Taking in the output of the photoelectric conversion element in synchronization with the pulse from the light source is more suitable for removing ambient light. The light from the light source is preferably non-directional, but even if it has directivity, if the directivity does not change so much due to the difference in the positions of the first and second photoelectric conversion elements 11 to 14, it is slight. Only error will occur.

As the first photoelectric conversion elements 11 to 13,
For example, a photodiode is used, but this output can obtain a resolution capability of at least 10 ³ or more by current reading, capacitive coupling reading, or the like. Particularly, the shape of the photodiode is about 30 μm square × 1 μm
Even a minute shape such as thickness has a resolution of about 10 ³ , and a 1 mm square photoelectric conversion element has a resolution of about 10 ⁶ and a 10 mm square photoelectric conversion element has a resolution of about 10 ⁸ and can have an arbitrary resolution depending on its area. Since this is possible, highly accurate three-dimensional position detection can be realized.

Although the basic structure of the position detecting device has been described with reference to FIGS. 3 to 5, various structures obtained by slightly modifying the structure will be described below.

FIG. 6 is a plan view illustrating a first modification of the embodiment shown in FIGS. 3 to 5. In the figure, FIG.
The same parts as those in FIG. 2
1 is a light shielding plate. This modified example is a position detection device in which the shading plates 15 to 17 shown in FIG. 3 are moved to the origin 19 side, and these are replaced by one shading plate 21.

In this case, the light-receiving region and the light-shielding region are only opposite to those in FIGS. 3 to 5, and therefore the coordinates of the three-dimensional position of the light source 18 can be obtained by the same calculation. It should be noted that, also in FIG. 3, the light shielding plates 15 to 17 may be connected to replace one light shielding plate. For example, the second photoelectric conversion element 14 is replaced with a frame-shaped light-shielding plate having a rectangular center hole and below the center hole, the light from the light source 18 is not blocked by the light-shielding plate. Set up.

Further, in FIG. 6, the light shielding plate 21 and the second photoelectric conversion element 14 shown in FIG. 6 are not used, but the second photoelectric conversion element 14 having the same shape as the light shielding plate 21 shown in FIG. By stacking and installing, the light-shielding plate 21 and the second photoelectric conversion element 14 can be used together. Alternatively, the second photoelectric conversion element 14 having a size smaller than this may be stacked and installed on the illustrated light shielding plate 21. In this case, the size can be further reduced. It should be noted that such a method is also possible in FIG.
It is possible to select an appropriate light-shielding plate in 17 and replace it with the second photoelectric conversion element 14 to be stacked, or to stack the second photoelectric conversion element 14 on this. Further, when the number of the first photoelectric conversion elements shielded from light is two, the two-dimensional position of the light source can be detected.

FIG. 7 is a plan view illustrating a second modification of the embodiment shown in FIGS. 3 to 5. In the figure, FIG.
The same parts as those in FIG. This modification is the same as the first photoelectric conversion elements 11 to 1 shown in FIG.
3 and one corresponding one of the light shielding plates 15 to 17 are set as one set, and the plurality of sets are installed apart from each other, and further, one set of the second photoelectric conversion element 14 is placed close to each set. Are individually installed and use a total of three second photoelectric conversion elements 14, which are position detecting devices.

By arranging the first photoelectric conversion elements 11 to 13 apart from each other, the incident directions of the light from the light source 18 are relatively different between the photoelectric conversion elements 11 to 13, so that the position detection is performed. The accuracy of is improved. However, if one second photoelectric conversion element 14 is left as it is, the distance from the light source 18 and the amount of light emitted from the light source 18 are reduced even between the first photoelectric conversion elements 11 to 13 and the second photoelectric conversion element 14. The incident direction, the intensity distribution of the irradiation light of the light source 18, etc. are greatly different.

In the embodiment described with reference to FIGS. 3 to 5, the output of the second photoelectric conversion element 14 is used to determine the amount of light per unit area depending on the distance from the light source 18 and the like. I was compensating for the change. That is, the position of the light source is detected by utilizing the fact that the ratio of the outputs of the first photoelectric conversion elements 11 to 13 and the second photoelectric conversion element 14 corresponds to the ratio of the respective irradiation areas or lengths. Therefore, if they are separated from each other, the accuracy of position detection may be deteriorated due to a difference in distance from the light source 18 or the like.

Therefore, in this modification, the second photoelectric conversion element 14 is individually adjacent to each of the first photoelectric conversion elements 11 to 13, and the outputs of the first photoelectric conversion elements 11 to 13 are respectively arranged. By combining with the output of the second photoelectric conversion element 14 close to, the output of the first photoelectric conversion elements 11 to 13 can be accurately associated with the irradiation area or length. In this case, V ₀ used in the equations (7) to (9) described above is not a value common to the first photoelectric conversion elements 11 to 13, but an individual second photoelectric conversion element at each location. Will represent 14 outputs. Therefore, the arithmetic expressions after this expression will be modified.

Also in this modification, the second photoelectric conversion element 14 can also be used as the light shielding plates 15 to 17 or can be further miniaturized by stacking it on the light shielding plates 15 to 17. When there are two sets of the first photoelectric conversion element, the light shielding plate, and the second photoelectric conversion element that receives light over the entire surface, the two-dimensional position of the light source can be detected.

FIG. 8 is an explanatory view when the distance between the first photoelectric conversion element and the light shielding plate is changed in the embodiment shown in FIGS. 3 to 5, and FIG. 8A shows the distance. FIG. 8B is a partial cross-sectional view when the distance is shortened when the distance is increased. In the figure, the same parts as those in FIG. In each case, the case where the light from the light source 18 is applied to the entire light receiving surface of the first photoelectric conversion element 11 via the light shielding plate 15 is illustrated.

At this time, the light source 18 is at the limit position for position detection, and when the light source 18 is further approached in the x-axis direction,
Light is leaked from the end of the first photoelectric conversion element 11 on the side of the light shield plate 15, and the position cannot be detected. However, the detection sensitivity is higher when the distance h between the first photoelectric conversion element 11 and the light shielding plate 15 is increased. Therefore, as shown in FIG.
When the distance h ₁ between the first photoelectric conversion element 11 and the light shielding plate 15 is increased, it is suitable to detect a long distance of x ₁ or more. When the distance h ₂ is decreased as shown in FIG. 8B, , X ₂ or more is suitable for detecting a short distance.

Therefore, a group in which the distance between the first photoelectric conversion element 11 and the light shielding plate 15 is h ₁ and a group in which the distance between the first photoelectric conversion element 11 and the light shielding plate 15 are h ₂ shorter than h ₁ are installed close to each other in the same arrangement, and the output of each group is set manually or By using a position detection device that automatically switches, it becomes possible to cope with both the near and far position detection. Or,
Even if the set of the first photoelectric conversion element 11 and the light shielding plate 15 is one, the value of the distance h may be made variable by moving the light shielding plate 15 by a motor, a plunger or the like. Similarly, the other sets of the first photoelectric conversion element and the light shielding plate can be used for both the near and far position detection. When the position of the light source 18 to be detected is limited in advance, the light-shielding plate 1 corresponding to each of the first photoelectric conversion elements 11 to 13 according to the extent of the distance from the light source 18 to the light source 18.
The length h of 5 to 17 may be set individually.

FIG. 9 is a plan view illustrating a third modification of the embodiment shown in FIGS. 3 to 5. In the figure, FIG.
The same parts as those in FIG. In this modified example, the manufacturing process of the position detection device is improved, and three first photoelectric conversion elements 11 to 13 are arranged in close proximity to each other on one substrate, and a shown in FIGS. ₁ , a
It is possible to set the values of ₂ and a ₃ to approximately 0,
This is a simplified version of the arithmetic expressions shown in Expressions (7) to (15).

If patterning is performed on a single substrate in the thin film process, a ₁ , a ₂ and a ₃ can be suppressed to about several μm and can be approximated to 0, so that the formula is simplified. It If a ₁ , a ₂ , and a ₃ are about 5 μm and the size of the photoelectric conversion element is about 5 mm square, then 1/10
Only the error of 00 remains. Alternatively, as is known in the technical field of image sensors, it is also possible to realize a plurality of photoelectric conversion elements by individually forming only electrodes on one photoelectric conversion semiconductor layer.

When a ₁ , a ₂ and a ₃ are 0, the equations (13), (14) and (15) are simplified as follows. x = h · (V ₁ + V ₂ ) / (V ₁ + V ₂ −2A · V ₀ / L) (16) y = A · (V ₂ −V ₁ ) / (V ₁ + V ₂ −2A · V ₀ / L) (17) z = A · (2V ₃ − (V ₁ + V ₂ )) / (V ₁ + V ₂ −2A · V ₀ / L) (18)

FIG. 10 is an explanatory view showing an example of a method of manufacturing the position detecting device of the first embodiment shown in FIG. 1, and FIGS. 10 (A) to 10 (D) show each manufacturing process. It is explanatory drawing which shows a step. In the figure, the same parts as those in FIG. First, as shown in FIG. 10A, a rectangular photodiode as a first photoelectric conversion element is manufactured on a substrate 1 such as glass. Ta, Ti, Cr or the like is used for the lower electrode 2, Si or the like is used for the photoelectric conversion semiconductor layer 3, and ITO or the like that transmits light is used for the upper transparent electrode 4.

Next, as shown in FIG. 10B, the first light-transmitting layer 5 as an interlayer film for transmitting light is formed of, for example, an organic film such as polyimide or an inorganic film such as SiO ₂ or SiN. It is made of a film. The organic film is formed, for example, by covering the substrate 1 and the photodiode with a liquid synthetic resin and solidifying the same. Then, as shown in FIG. 10C, a metal layer of, for example, Ta, Ti, Cr or the like is provided as the thin film light-shielding layer 6 on the first light-transmitting layer 5 to about half that of the first photoelectric conversion element. It is made in a position to cover. The first light transmitting layer 5 and the thin film light shielding layer 6 are formed on another substrate, and then the substrate 1
It is also possible to attach to.

When infrared light is selectively transmitted and applied to the photoelectric conversion element, as shown in FIG. 10 (D), it is formed on the first light-transmitting layer 5 or the thin film light-shielding layer 6. Further, a second light-transmitting layer 7 which is a light-transmitting film similar to the first light-transmitting layer 5 is formed as an interlayer film which transmits light, and a filter layer 8 is formed thereon. The second transparent layer 7 can be omitted. Second
The light-transmitting layer 7 and the filter layer 8 can also be formed on another substrate and then bonded.

FIG. 11 is an explanatory view showing an example of a method of manufacturing the position detecting device of the second embodiment shown in FIG. 2, and FIGS. 11 (A) to 11 (D) show each manufacturing process. It is explanatory drawing which shows a step. In the figure, the same parts as those in FIG. FIG. 9 is a diagram illustrating a method of manufacturing the position detection device shown in FIG. 2. This manufacturing method is an example manufactured by a process reverse to that of FIG.

First, as shown in FIG. 11A, the substrate 1
The filter layer 8 and the second light transmitting layer 7 are formed on the top. Next, as shown in FIG. 11B, the thin film light shielding layer 6 is formed on the second light transmitting layer 7. Then, as shown in FIG. 11C, a light-transmitting layer similar to the second light-transmitting layer 7 is formed on the thin film light-shielding layer 6 and the second light-transmitting layer 7 as an interlayer film for transmitting light. A first light-transmitting layer 5 which is a film is prepared, and the structure shown in FIG.
As shown in (D), the upper transparent electrode 4, the photoelectric conversion semiconductor layer 3, and the lower electrode 2 are produced. Also in the manufacturing method of the position detecting device of the second embodiment, it is possible to manufacture each layer on another substrate and then bond them together.

10 and 11, in particular, a plurality of first photoelectric conversion elements 11 to 13 and, in addition, a second photoelectric conversion element 14 are arranged on the same substrate 1 or the same first light transmitting layer 5. In addition to simplifying the calculation formula, the position detecting device can be miniaturized by patterning on a single flat plate. Further, as described with reference to FIG. 9, it is possible to manufacture a structure having a high position detection accuracy. The thin film light-shielding layer 6, the filter layer 8 and the like can all be collectively manufactured by a thin film process. As will be described later with reference to FIG. 14, when the reflective region is used as a substantial light source,
It is also possible to fabricate on a single plane plate including the infrared light emitting diode used as a light emitting source. in this way,
The position detection device of the present invention is also effective in simplifying the process and reducing the cost.

12 and 13 are explanatory views related to the correction of the measured value of the position detecting device of the present invention. The set of the first photoelectric conversion element 11 and the light shielding plate 15 shown in FIG. 3 will be described, but the same applies to the other sets of the first photoelectric conversion elements 12 and 13 and the light shielding plates 16 and 17. Reference numeral 31 denotes a transparent layer, which corresponds to the first transparent layer 5 shown in FIGS.
In the embodiment of the present invention described with reference to FIGS. 3 to 5, as described with reference to FIGS. 1 and 2, the light passing through the light transmissive layer such as polyimide is converted into the first photoelectric conversion. Since the light is incident upon the element to obtain the output, it is necessary to correct the measured value due to the influence of the light-transmitting layer having a large refractive index. Alternatively, correction is also required when the position detection device receives light through the glass measurement window.

The refractive index of the transparent layer 31 is n, and the refractive index of the space above this is 1. When the entire surface of the first photoelectric conversion element 11 is irradiated, the irradiation length is set to L as in FIGS. 3 to 5, the actual irradiation length on the first photoelectric conversion element 11 is d ₀ , and the light transmission is The irradiation length on the first photoelectric conversion element 11 when assuming that the refractive index is 1 in all the spaces without the layer 31 is d. This d is (d ₁ −a ₁ ), (d ₂ −a ₂ ), (d ₃ −) in the three expressions immediately before the expressions (7) to (9).
a ₃ ). For simplification, consider a case where a perpendicular line passing through the center of the first photoelectric conversion element 11 contacts the right end surface of the light shielding plate 15.

As shown in FIG. 12, the shading plate 1 is more than the vertical line.
When the light source 18 is on the 5 side, that is, when the output of the first photoelectric conversion element 11 is smaller than 1/2 of the output when the entire surface is irradiated, d + n · (L / 2−d ₀ ) = L / 2 (19) d obtained from this is: d = L / 2−n · (L / 2−d ₀ ) (20)

As shown in FIG. 13, when the light source 18 is located on the side opposite to the light-shielding plate 15 side with respect to the above-described vertical line, that is,
When the output of the first photoelectric conversion element 11 is larger than 1/2 of the output when the entire surface is irradiated, d−n · (d ₀ −L / 2) = L / 2 (21) The obtained d is d = L / 2 + n · (d ₀ −L / 2) (22).

It should be noted that 1/2 of the output when the output of the first photoelectric conversion element 11 is applied to the entire surface is the same area as that of the first photoelectric conversion element 11 and is always applied to the entire surface. It is equal to 1/2 of the output of the second photoelectric conversion element 14 shown in FIG. The formulas (20) and (22) are the same formulas when arranged, and the same formula is used regardless of which side of the perpendicular line the light source 18 is on. Therefore, equation (20)
Alternatively, the value of d ₀ obtained by calculating from the light quantity of the first photoelectric conversion element 11 can be corrected using Equation (22) to obtain the value of d, and this value of d can be further calculated. Light source 18
The position coordinates of can be obtained.

The correlation between the actual irradiation length d ₀ and the irradiation length d when the refractive index is 1 in all spaces is determined by the direction of the light from the light source 18, so d ₀
It is also possible to store a conversion table for inputting the value of and output the value of d, and use this conversion table for correction. In the above description, the second shown in FIGS.
Although the influence of the refractive index of the transparent layer 7 and the measurement window made of glass described above are not corrected, the second transparent layer 7 can be made sufficiently thin and can be removed. In such a case, the effect is small even without correction. The method using the conversion table described above can also correct the influence of the refractive index of the second transparent layer 7.

When the thickness of the light transmitting layer is small, or the refractive index is close to 1, when the optical path is little affected, the above-mentioned correction of the measured value is practically used depending on the required position detection accuracy. In some cases, it becomes unnecessary.

Next, with reference to FIG. 14 to FIG. 20, a specific embodiment of the position detecting device using the position detecting device of the present invention will be described.

FIG. 14 is an explanatory diagram of the first embodiment of the position detecting device of the present invention, and FIG. 14 (A) is a diagram explaining an application example to a shock sensor and an acceleration sensor. 1
FIG. 4B is a diagram illustrating a conventional example of an impact sensor and an acceleration sensor. In the figure, 41 is a position detection device, 42 is a light source, 43 is a rod-shaped body, 44 is an impact sensor or acceleration sensor, and 45 is a piezoelectric element. This embodiment is an example in which a sensor using a cantilever beam represented by an impact sensor or an acceleration sensor is further improved in accuracy by the position detection device of the present invention. The impact sensor is used as a batch that is attached to the article and detects whether or not an impact is applied during the transportation of the article after the transportation.

As shown in FIG. 14B, since the conventional impact sensor or acceleration sensor uses a cantilever beam having a laminated structure such as the piezoelectric element 45, its detection characteristic is a cantilever material. It depends on the characteristics of bonding and bonding, and it is essential to select a material that does not affect the detection characteristics as much as possible or to correct the output. Furthermore, in the case of the laminated structure of the piezoelectric element 45, only a one-dimensional impact or acceleration was obtained.

However, as shown in FIG. 14A, the light source 42 is supported by the support rod 43 made of a free material without using a piezoelectric element or the like, and its position is detected by the position detection device 41.
To detect. By accommodating the position detection device 41 and the support rod 43 having the light source 42 at a small end portion thereof in a case, an impact sensor or an acceleration sensor 44 is formed.
The time change of the position of the light source 42 is calculated by a calculation by a CPU or the like. However, such a calculation means may be built in the case, or it may be calculated by an external personal computer or a dedicated information processing device. it can.
There are few restrictions on the material of the support rod 43, and it is possible to detect impact and acceleration not only in one dimension but also in two dimensions.

Since the position detecting device 41 can be formed small, the position detecting device 41 and the light source 42 can be arranged in reverse and the position detecting device 41 can be attached to the movable side. Such a configuration is also possible in any of the embodiments described later. The light source 42 is not limited to the light emitting source that emits light by itself, and may be a reflecting plate that reflects light from another light emitting source (not shown). Alternatively, the tip itself of the support rod 43 may have a surface that reflects light. These reflection areas become substantial light sources.
In particular, when it is difficult to attach the light source 42 or the position detection device 41 to an object whose position is to be detected, the three-dimensional position detection of the reflective area can be performed by providing the reflective area on the object. It is desirable that the portion other than the reflection area should not reflect the measurement light as much as possible.

At this time, the light emitting source and the position detecting device 41 may be housed in one package, and further, external mounting pins similar to those of a conventional IC may be provided for mounting on a printed circuit board or the like. If a light source such as a light emitting diode is produced and integrated together with the first and second photoelectric conversion elements on the same substrate, the size can be further reduced.

A light source 42 is provided at the tip of the piezoelectric element 45 shown in FIG.
The piezoelectric element 45 may be used together with the element 1 to form the impact sensor or the acceleration sensor 44. In this case, impact and acceleration can be detected by two different methods, both can be used complementarily, and the other can be calibrated.

FIG. 15 is an explanatory view of the second embodiment of the position detecting device of the present invention. FIG. 15 (A) shows a light source provided on the outer peripheral surface of the photosensitive drum, and FIG. 15 (B) shows FIG. 15C is an explanatory diagram of the light source provided on the side surface of the photosensitive drum, and FIG. 15C is an illustration of the light source provided on the rotary shaft of the photosensitive drum. In the figure,
The same parts as those in FIG. 14 are designated by the same reference numerals and the description thereof will be omitted. Reference numeral 51 is a photosensitive drum, and 52 is a rotating shaft. This embodiment is an application example to an electrophotographic recording mechanism such as a copying machine, a facsimile, a printer, etc., and is used for measuring the operation of a photosensitive drum.

In FIG. 15A, the photosensitive drum 51
The light source 42 is provided in a small portion on the photosensitive surface of the
The position detecting device 41 is installed at a position close to the position detecting device 41 without being in contact with 1, and when the photosensitive drum 51 rotates and the light source 42 approaches the position detecting device 41, the position of the light source 42 is changed by the light from the light source 42. Three-dimensional position change information such as angular velocity, eccentricity, and axial deviation of the photosensitive drum 51 can be calculated and measured from the detected value.

The position of the light source 42 is a part of the side surface of the photosensitive drum 51 as shown in FIG.
As shown in FIG. 5C, the rotation shaft 52 of the photosensitive drum 51
Can be installed on a part of the outer peripheral surface of the. When the light source 42 is installed at one location, the angular velocity, eccentricity, axial deviation, etc. can be measured at that one location. However, when the light source 42 is installed at multiple locations, the photosensitive drum 51 By constantly measuring the speed in the rotation direction, the eccentricity, and the deviation in the axial direction as a whole, more detailed measurement becomes possible. When it is necessary to distinguish a plurality of light sources 42, each light source 42
The pulse frequencies may be made different, and the pulse frequencies may be discriminated on the position detecting device side.

As described in the first embodiment of the position detecting device with reference to FIG. 14, when the light source 42 is used as a reflection area for reflecting the light of another light emitting source, no reflector is used. Also the photosensitive drum 51 or the rotary shaft 5 in the reflection area
2 itself may have a surface that reflects light. The reflector can be replaced by a phosphor. In the process of exposing the entire surface of the photosensitive drum 51, the fluorescent light emitted by the fluorescent material upon irradiation with the exposure light source is used as reflected light.

FIG. 16 is an explanatory view of the third embodiment of the position detecting device of the invention. In the figure, the same parts as those in FIG. Reference numeral 61 is a substrate as an object, 62 is a PAD, and 63 is an inspection probe. This embodiment is an application example to the inspection probe 63, in which the substrate 61 as an object and the inspection probe 63 are objects.
The relative positional relationship of is detected and aligned.
A semiconductor chip or wafer can be used as the target substrate 61.

A metal PAD 62 and a light source 42 for wire bonding and the like are provided at predetermined positions on a substrate 61 which is an object. The light source 42 may be placed at the time of position detection, but may be attached in advance on the substrate 61 which is an object. Power may be supplied to the light source 42 on the substrate 61, which is an object, by a flexible lead wire, but the object may be supplied by a means capable of non-contact energy supply by electromagnetic waves, electromagnetic induction, or the like. May be supplied to the substrate 61 side. Alternatively, a small battery may be mounted on the target substrate 61.

The position of the light source 42 is set to the inspection probe 63.
The position is detected by the position detecting device 41 provided at the tip or in the vicinity thereof, and the relative position between the PAD 62 and the inspection probe 63, that is, the position on the horizontal plane and the vertical height are measured. At the same time, while feeding back the measured value, the relative position can be changed by a driving device (not shown) to perform accurate probing, and the tip of the inspection probe 63 does not cut the PAD 62.

FIG. 17 is an explanatory diagram of the fourth embodiment of the position detecting device of the invention. 14, those parts that are the same as those corresponding parts in FIGS. 14 and 16 are designated by the same reference numerals, and a description thereof will be omitted. Reference numeral 64 is a wire bonding probe, and 65 is a wire.
In this embodiment, the wire bonding probe 64 is used.
This is an application example to, and detects the relative positional relationship between the substrate 61, which is the object, and the wire bonding probe 64, and performs the alignment during wire bonding.

The position detecting device 41 is provided at or near the tip of the wire bonding probe 64 from which the wire 65 is pulled out, and the PAD 62 and the light source 42 are provided at predetermined positions on the substrate 61 which is the object. The position detecting device 41 can measure the relative position between the PAD 62 and the wire bonding probe 64, and can change the relative position by a driving device (not shown) while feeding back the measured value to perform accurate wire bonding.

Also in FIG. 16 or FIG. 17, the light source 42
May be provided at a plurality of locations. In this case, the twist of the substrate 61 that is the object can be detected. Light source 4
When 2 is used as the reflection area, it is possible to set the portion such as the PAD 62 on the substrate 61, which is the object, which is relatively easy to reflect light, as the reflection area.

As a similar application example, if the inspection probe 63 is replaced with a movable arm of a work robot which is also used in a general manufacturing line, it can be used for position detection and position control of the movable arm.

FIG. 18 is an explanatory view of the fifth embodiment of the position detecting device of the invention. In the figure, the same parts as those in FIG. 72 and 74 are lenses, and 71 and 73 are lens supports. This embodiment is an application example to a lens mechanism in a copying machine, a fax machine, a printer, a camera, a telescope, an optical disk drive, etc., and is used for measuring the operation of the lenses 72, 74 or the lens supports 71, 73. It is a thing.

The two lenses 72 and 74 are attached to the lens supports 71 and 73, respectively, and are arranged at a predetermined interval in the horizontal direction. The respective lenses 72 and 74 are horizontally moved by the lens moving mechanism to change their relative positions. Lens support 71, 7
The light source 42 is installed in a small portion of the position 3, and the position detection devices 41 are installed in positions close to these.
The light source 42 may be provided at the ends of the lenses 72 and 74. In this case, it is preferable to use the light source 42 as the reflection area.

Lenses 72 and 74 and lens support 7
When 1 and 73 move, the positions of the lens supports 71 and 73 are detected by the reflected light from each light source 42, and the positions of the lenses 72 and 74 or the lens supports 71 and 73 are measured from the values. Further, by calculating the time change of the position, three-dimensional information on the position change such as the speed and the acceleration can be measured. By these, lens 7
Since the positions of 2,74 can be analyzed quantitatively,
Trouble such as misalignment can be found in advance,
It is possible to eliminate the positional deviation by feeding back the deviation amount.

The lens position can be detected in the zoom lens mechanism. In the lens moving mechanism that moves the lenses 72 and 74 in the vertical plane, the central axes of the lenses 72 and 74 can be detected and the central axes can be aligned. It should be noted that the lens moving mechanism may be attached to only one side, and in this case, the present invention is used to provide a space between the lenses 72 and 74 or between the lens supports 71 and 73.
The relative distance between can be detected.

FIG. 19 is an explanatory diagram of the sixth embodiment of the position detecting device of the invention. In the figure, the same parts as those in FIG. Reference numeral 81 is a ring-shaped pipe, 82 is a column, and 83 is a sensor for detecting a rotation angle and the like. This embodiment is an application example to a small rotating object, and measures the position of the rotating object, the rotation angle such as the Euler angle, the angular velocity, the angular acceleration, and the like.

A liquid or gas is sealed in a transparent hollow ring-shaped pipe 81, and a weight or a float having a light emitting source as a light source 42 is put therein, and this rotating motion is carried out by the column 8
The position detection device 41 attached to the position 2 detects the position. If the weight or the float, which is the light source 42 other than the float or the float, rotates, if the weight or the float is kept stationary, when these members are housed, the sensor 83 for detecting the rotation angle or the like is provided. The rotation angle of the object can be detected.

When the light source 42 is used as a reflection area, a light emitting source may be provided outside the sensor 83 for detecting the rotation angle and the like, and light may be radiated therein. Further, the weight or the float itself may be a light-reflecting object.

Conventionally, since the Euler angle or the like was measured by a magnetic sensor, it was common knowledge that the magnetic field was distorted by the magnetic substance existing in the measurement range and an uncorrectable error remained. Therefore, such an error does not exist, and the measurement can be easily performed. However, the inertial force is included in the motion of the object that is the light source 42 depending on the characteristics of the liquid or gas enclosed in the ring-shaped pipe 81. Therefore, for example, several ring-shaped pipes 81 having different radii are prepared. , Light source 4 in each
It is also possible to correct the amount of movement due to inertia by changing the resistance of the object that becomes 2 and sequentially detecting the positions of the plurality of light sources 42.

FIG. 20 is an explanatory diagram of the seventh embodiment of the position detecting device of the invention. In the figure, the same parts as those in FIG. 91 is paper. This embodiment is an example of application to a paper feeding mechanism in a copying machine, a facsimile, a printer, etc., and performs position detection and operation measurement of paper or a paper feeding mechanism.

Considering the vicinity of an edge such as an edge or a corner of the paper surface of the paper 91 as a reflection area, the light source 42 and the position detection device 41 are installed at positions close to the edges of the paper surface, and the paper 91 moves to move the paper surface. When the edge approaches the position detection device 41, the position of the edge of the paper is detected by the reflected light from the paper 91, and three-dimensional information about the position, speed, acceleration, etc. of the paper 91 is measured from the value. In this example, the light from the light source 42 is in the form of a spot, and the area of the reflection region that reflects this light changes with the movement of the paper 91, but this can be treated as an error.

If the paper 91 is supplied by the paper feeding mechanism, the operation of the paper feeding mechanism can be measured from the position information of the paper 91 and the like. Further, if the paper feed mechanism itself is provided with a reflection area, the position of the paper feed mechanism can be detected similarly to the substrate 61 which is the object in FIG.

With these, not only the trouble of not being able to feed the paper can be detected, but also the direction of deviation of the paper 91, its size, and the amount of floating of the paper can be known. It is also possible to provide the information and to know the danger of occurrence before the trouble occurs. Of course, it can also be used for detecting the position of the paper 91 or the paper feed mechanism when controlling the paper feed mechanism.

Finally, measures for improving the position detection accuracy will be described. In order to perform highly accurate three-dimensional position detection in a wide range, it is desirable to provide a plurality of units of the position detection device 41 of the present invention. Then, a unit that is closest to the light source 42 and can detect the position with high accuracy is selected.
Therefore, for example, from the output of the second photoelectric conversion element 14 shown in FIG.
It is possible to detect the three-dimensional position by selecting the unit that maximizes the output. The number of units to be selected is not limited to one, and for example, two to three may be selected from the one having the largest output, and the average value of the three-dimensional positions obtained therefrom may be obtained.

In addition, in the light receiving surface near the respective end portions of the first and second photoelectric conversion elements 11 to 14 shown in FIG. 3 and the like, the photoelectric conversion output is higher than that in other portions such as the central portion of the element. May have a factor of deterioration in accuracy such as poor linearity. In such a case, a light-shielding plate may be provided in contact with the light-receiving surface from the end portion to the portion having the accuracy deterioration factor, or a light-shielding paint may be applied to the light-receiving surface having the accuracy deterioration factor. It is possible to detect the position without using the part.

In the position detecting device of the present invention, the object is provided with a reflection region which serves as a light source or a substantial light source.
A general one-dimensional to three-dimensional position detecting device, and further,
It becomes a position change detection device. Although illustration is omitted, a light source may be provided on a ball-point pen that is normally used or a pen having a shape similar to this, or an indicator rod. For example, the light source is provided at or near the tip of the pen housing or the indicator rod.

In particular, it is suitable for downsizing, and it becomes possible to detect minute three-dimensional position and movement amount. Therefore, performing highly precise positioning between the parts that have been subjected to microfabrication, the parts and the probe while performing feedback in real time, and in the motion analysis of the object, without disturbing the original motion of the object, It becomes possible to detect the position and movement speed and direction more accurately. In addition, even with a three-dimensional position detection device that is used by being worn on the human body or living organisms in general, the accurate position can be detected with high accuracy without disturbing the original natural movement. Can also be applied.

[0124]

According to the first aspect of the invention, the first photoelectric conversion element has at least one thin film light shielding layer for shielding light from the light source and at least one first photoelectric conversion element. Is installed in a position where a part of the light is shielded by the thin-film light shielding layer according to the position of the light source, and therefore strict fine adjustment is not required, and position detection can be performed using a simple device. The effect is that you can do it. In particular, since the thin film light-shielding layer is used, the position detecting device can be downsized, and the position detection error is less likely to occur because the position of the end of the light shielding plate is accurate.

According to the second aspect of the present invention, since at least one light transmitting layer is provided and the thin film light shielding layer is laminated on the light transmitting layer, the thin film light shielding layer can be easily supported. There is.

According to the invention described in claim 3, at least one substrate is provided, and the first photoelectric conversion element, the first light transmitting layer, and the thin film light shielding layer are sequentially laminated on the substrate, and the thin film light shielding is performed. Since the layers are partially stacked, the thin-film light-shielding layer can be easily supported, and the distance between the first photoelectric conversion element and the thin-film light-shielding layer can be kept constant, so that a position detection error hardly occurs. There is.

According to the invention described in claim 4, at least one first light transmitting layer and at least one second light transmitting layer are provided, and the thin film light shielding layer and the first light transmitting layer are provided. Since the first photoelectric conversion element is sequentially laminated on the second light transmissive layer and the thin film light-shielding layer is partially laminated, the same effect as that of the invention according to claim 3 is obtained, and a substrate is required. There is also the effect of not doing it.

Further, according to the invention of claim 5,
Since it has at least one filter layer that transmits the specific wavelength region, there is an effect that the influence of ambient light can be removed.

According to the invention described in claim 6, at least one second photoelectric conversion element is provided, and the second photoelectric conversion element is located at a position where the thin film light shielding layer does not block the light. Since it is installed in the light source, there is an effect that it is possible to compensate a change in the light amount per unit area depending on the distance from the light source and the direction of the light, the intensity of the irradiation light of the light source, and the like.

According to the invention described in claim 7, the first photoelectric conversion element is on one flat plate surface, and a part of the light is shielded by the thin film light shielding layer according to the position of the light source. Since it is manufactured as described above, not only can the position detection device be downsized, but it is also effective in simplifying the manufacturing process and reducing the cost.

Further, according to the invention described in claim 8, the first photoelectric conversion element is on one flat plate surface, and a part of the light is shielded by the thin film light shielding layer according to the position of the light source. At a position where the second photoelectric conversion element is on the flat plate surface,
Since the thin film light shielding layer is formed at a position where light is not shielded, the same effect as that of the invention of claim 7 is obtained.

According to the invention of claim 9, claim 1
7. The position can be easily detected by including at least one position detecting device according to any one of 6 to 6 and having a position calculating means for calculating the position of the light source based on the output of the position detecting device. The effect is that you can. Further, according to the invention described in claim 10, the position calculation means corrects the position based on the refractive index of the medium in the optical path from the light source to the light reception by the first photoelectric conversion element. There is an effect that the position detection accuracy can be improved.

According to the eleventh aspect of the present invention, there is provided at least one light source provided on at least a part of an object whose position is to be detected, and at least one position detecting device according to any one of the first to sixth aspects. Because of this, there is an effect that the characteristics of the position detection device can be determined according to the characteristics such as the wavelength of the light source and the pulse period. Claim 12
According to the invention described in (1), since the light source has the light emitting element and the light source is the reflection area that reflects the light from the light emitting element, it is possible to detect the position of the object to which the light emitting element is difficult to attach. There is.

According to the thirteenth aspect of the invention, since the object is the photoconductor and the position detecting device in the electrophotographic recording mechanism, there is an effect that the rotational position of the photoconductor can be easily detected. According to the invention as set forth in claim 14, since the object is the lens or the lens support and the position detecting device in the lens moving mechanism, there is an effect that the position of the lens or the lens support can be easily detected. .

According to a fifteenth aspect of the present invention, the position detecting device according to any one of the ninth to fourteenth aspects,
Since it has a position change calculation means for calculating the amount of position change of the object such as velocity, acceleration, angular velocity based on the output of the position detecting device, it is possible to easily detect the amount of position change of the object. effective.

[Brief description of drawings]

FIG. 1 is a structural diagram of a first embodiment of a position detection device of the present invention.

FIG. 2 is a structural diagram of a second embodiment of the position detection device of the invention.

FIG. 3 is a plan view of the position detection device according to the first and second embodiments of the present invention.

4 is an explanatory diagram of an operation principle of the configuration shown in FIG. 3, and FIG. 4 (A) is a cross-sectional view taken along the xy plane of FIG.
FIG. 4B is an explanatory diagram showing a positional relationship between the light source and each part in FIG.

5 is an explanatory diagram of the operation principle of the configuration shown in FIG. 3, FIG. 5 (A) is a cross-sectional view of the xz plane of FIG. 3, and FIG. 5 (B) is in FIG. 5 (A). It is explanatory drawing which shows the positional relationship of a light source and each part.

6 is a plan view illustrating a first modification of the embodiment shown in FIGS. 3 to 5. FIG.

7 is a plan view illustrating a second modification of the embodiment shown in FIGS. 3 to 5. FIG.

FIG. 8 is an explanatory diagram in the case where the distance between the first photoelectric conversion element and the light shielding plate is changed in the embodiment shown in FIGS. 3 to 5, and FIG. 8A is a case where the distance is increased. ,
FIG. 8B is a partial cross-sectional view when the distance is shortened.

FIG. 9 is a plan view illustrating a third modification of the embodiment shown in FIGS. 3 to 5.

10 is an explanatory diagram showing an example of a method of manufacturing the position detection device according to the first embodiment shown in FIG.
10A to 10D are explanatory views showing each stage of the manufacturing process.

11 is an explanatory diagram of an example of a method of manufacturing the position detecting device according to the second embodiment shown in FIG.
11A to 11D are explanatory views showing each stage of the manufacturing process.

FIG. 12 is an explanatory diagram related to correction of measured values of the position detection device of the present invention.

FIG. 13 is an explanatory diagram related to correction of measured values of the position detection device of the present invention.

FIG. 14 is an explanatory diagram of the first embodiment of the position detecting device of the present invention.

FIG. 15 is an explanatory diagram of a second embodiment of the position detecting device of the invention.

FIG. 16 is an explanatory diagram of a third embodiment of the position detecting device of the invention.

FIG. 17 is an explanatory diagram of the fourth embodiment of the position detecting device of the invention.

FIG. 18 is an explanatory diagram of a fifth embodiment of the position detecting device of the invention.

FIG. 19 is an explanatory diagram of the sixth embodiment of the position detecting device of the present invention.

FIG. 20 is an explanatory diagram of a seventh embodiment of the position detecting device of the invention.

[Explanation of Codes] 1 ... Substrate, 2 ... Lower electrode, 3 ... Photoelectric conversion semiconductor layer, 4 ...
Upper transparent electrode, 5 ... First light-transmitting layer, 6 ... Thin film light-shielding layer, 7
... second translucent layer, 8 ... filter layer, 11-13 ... first photoelectric conversion element, 14 ... second photoelectric conversion element, 15-1
7, 21 ... Shading plate, 18, 42 ... Light source, 31 ... Translucent layer,
41 ... Position detecting device, 44 ... Impact sensor or acceleration sensor, 51 ... Photosensitive drum, 61 ... Target substrate, 62 ... PAD, 63 ... Inspection probe, 64 ... Wire bonding probe, 71, 73 ... Lens support Body, 81 ... Ring-shaped pipe, 83 ... Sensors for detecting rotation angle, 91 ... Paper.

Claims (15)

[Claims] 1. At least one thin film light-shielding layer that shields light from a light source, and at least one first photoelectric conversion element, wherein the first photoelectric conversion element is the position of the light source due to the thin film light-shielding layer. The position detecting device is installed at a position where a part of the light is shielded according to the above. 2. The position detection device according to claim 1, further comprising at least one light-transmitting layer, wherein the thin film light-shielding layer is laminated on the light-transmitting layer. 3. At least one substrate, on which a first photoelectric conversion element, a first light-transmitting layer, and the thin film light-shielding layer are sequentially laminated, and the thin film light-shielding layer is partially laminated. The position detection device according to claim 1, wherein: 4. At least one first light-transmitting layer and at least one second light-transmitting layer, wherein the thin-film light-shielding layer, the first light-transmitting layer, and the first photoelectric conversion element are second electrodes. The position detection device according to claim 1, wherein the position detection device is sequentially stacked on the light transmitting layer, and the thin film light shielding layer is partially stacked. 5. At least one which transmits a specific wavelength region
The position detection device according to claim 1, wherein the position detection device has one filter layer. 6. At least one second photoelectric conversion element is provided, and the second photoelectric conversion element is installed at a position where the light is not shielded by the thin film light shielding layer. The position detection device according to claim 1. 7. A method for manufacturing a position detection device having at least one thin film light-shielding layer for shielding light from a light source and a plurality of first photoelectric conversion elements, wherein the first photoelectric conversion element is on one flat plate surface. A method for manufacturing a position detecting device, wherein the thin film light shielding layer is formed at a position where a part of the light is shielded according to the position of the light source. 8. A method for manufacturing a position detection device having at least one thin film light-shielding layer for shielding light from a light source, a plurality of first photoelectric conversion elements and at least one second photoelectric conversion element, comprising: The photoelectric conversion element is on one flat plate surface, and the second photoelectric conversion element is on the flat plate surface at a position where a part of the light is blocked by the thin film light shielding layer according to the position of the light source. A method for manufacturing a position detecting device, characterized in that the thin film light-shielding layer is formed at a position where the light is not shielded. 9. A position calculating device having at least one position detecting device according to claim 1, and position calculating means for calculating a position of the light source based on an output of the position detecting device. A position detecting device characterized by. 10. The position calculation means corrects the position based on the refractive index of the medium in the optical path from the light source to the light reception by the first photoelectric conversion element. The position detection device according to. 11. A position detecting apparatus comprising a light source provided on at least a part of an object whose position is to be detected, and at least one position detecting device according to claim 1. Description: . 12. The position detecting device according to claim 11, wherein the position detecting device has a light emitting body, and the light source is a reflection region that reflects light from the light emitting body. 13. The position detecting device according to claim 11, wherein the object is a photoconductor and is a position detecting device in an electrophotographic recording mechanism. 14. The position detecting device according to claim 11, wherein the object is a lens or a lens support and is a position detecting device in a lens moving mechanism. 15. The position detecting device according to claim 9, and a position for calculating a position change amount such as speed, acceleration, or angular velocity of the object based on an output of the position detecting device. A position change detection device comprising a change calculation means.