JPH09233869A - Vibrating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect the behavior of the elliptic motion of a vibrating body accurately and to obtains the excellent driving performance by detecting the amplitudes of the bending vibration and the vertical vibration of the vibrating body formed by forming a stack of an electromechanical energy converting element ands an elastic body. SOLUTION: At electrode parts 1g and 1h of an electrode layer provided at both surface of a vibrating body, sensor electrode parts 1h-1 and 1h-1, which becomes the signal output parts for mechanical-electrical energy conversion, and insulating parts 1g-2 and 1h-2 are formed. The sensor electrode parts 1g-1 and 1h-1 and the electrode parts 1g and 1h are not conducted, respectively. When alternating voltages are applied to the electrode parts 1e and 1f and the electrode parts 1f and 1g, the output voltages of the sensor electrode parts 1h-1 and and the sensor electrode 1g-1 and the amplitudes of the bending vibration and the vertical vibration are detected. Thus, the behavior of the elliptic motion of the vibrating body can be accurately detected, and the excellent driving performance can be obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration device utilizing vibration.

[0002]

2. Description of the Related Art Conventionally, as a motor of this type, for example, Japanese Patent Laid-Open Nos. 61-251490 and 61-3517.
6, there is one disclosed in JP-A-6-133568. According to these publications, a traveling wave type ultrasonic motor detects a vibration amplitude of an elastic body by providing a sensor phase or the like, and a stable drive characteristic is obtained by changing an input frequency or controlling an input voltage. It was a device to obtain.

[0003]

However, these devices can detect the amplitude of the elliptical motion actually performed by the vibrating body, but cannot detect the shape of the ellipse. For example, if the frequency is changed, it cannot be determined whether the amplitude of the ellipse has decreased or the shape of the ellipse has changed. Further, although the input frequency is changed in order to control the speed of the ultrasonic motor, unstable factors such as sudden acceleration and stop may be considered depending on the frequency.

Also in the standing wave type ultrasonic motor, it is difficult to control the speed with stable drive characteristics by detecting only the amplitude of the vibration of the vibrator which is displaced in the vertical direction.

[0005]

According to a first aspect of the present invention, a vibrating body formed by laminating an electro-mechanical energy conversion element and an elastic body, and alternating signals having different phases are applied to a plurality of signal input portions of the conversion element. In the vibrating device, which supplies the vibrating body, causes the vibrating body to longitudinally vibrate, and causes the action portion to make an elliptical motion by combining the two vibrations, and makes the contact body in contact with the vibrating body and the vibrating body relatively movable. The vibrating device is provided with a detection means for detecting the amplitudes of the bending vibration and the longitudinal vibration of the vibrating body.

According to a second aspect of the present invention, a vibrating body formed by laminating an electro-mechanical energy conversion element and an elastic body, and alternating signals having different phases are supplied to a plurality of signal input portions of the conversion element, and the vibrating body is provided. A bending vibration of the vibrating body and a longitudinal vibration of the vibrating body to cause an elliptical motion of the action part by combining the two vibrations, thereby allowing the contact body in contact with the vibrating body and the vibrating body to move relative to each other. And a detecting device for detecting the amplitude of the longitudinal vibration, and a vibrating device provided with a control device for changing the balance of the strengths of the signals supplied to the plurality of signal input parts of the conversion element based on the output of the detecting device. To do.

According to a third aspect of the present invention, a vibrating body formed by laminating an electro-mechanical energy converting element and an elastic body, and alternating signals having different phases are supplied to a plurality of signal input portions of the converting element, and the vibrating body is provided. A bending vibration of the vibrating body and a longitudinal vibration of the vibrating body to cause an elliptical motion of the action part by combining the two vibrations, thereby allowing the contact body in contact with the vibrating body and the vibrating body to move relative to each other. And a detecting device for detecting the amplitude of the vertical vibration, and a vibrating device provided with control means for changing the phases of the signals supplied to the plurality of signal input parts of the conversion element based on the output of the detecting device.

According to a fourth aspect of the present invention, the conversion element is arranged in the vibrating body so that a plurality of positions of the bending vibration can be provided, and mechanical-electrical energy conversion is performed at the plurality of nodes. And a plurality of signal output sections are arranged, and the amplitude of the bending vibration and the longitudinal vibration is detected based on the output from the signal output section.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment) In FIG. 1, reference numeral 1 is a vibrating body, and a pair of plate-shaped piezoelectric elements 1a and 1b as energy conversion elements are provided on both main surfaces of an elastic body 1c formed of phosphor bronze, brass or the like in a plate shape. Pressure bonded. Further, a conductive material such as nickel or copper is vapor-deposited on both main surfaces of the vibrating body 1 to form electrode layers. The electrode layer is formed by insulation division at a position that divides the longitudinal direction of the vibrating body 1 into two parts, and is composed of four electrode portions 1e to 1h which are signal input portions for electric-vaporization energy conversion. Further, as shown in FIG. 2, the electrode portions 1g and 1h have sensor electrode portions 1g-1 and 1h-1 and insulating portions 1g- which serve as signal output portions for mechanical-electrical energy conversion.
2, 1h-2 are formed and the sensor electrode portions 1g-1, 1h are formed.
-1 and the electrode portions 1g and 1h are not electrically connected to each other. The positions of the main parts of the sensor electrode portions 1g-1 and 1h-1 are formed directly on the back surface of the attachment position of the driver, which will be described later. Further, the sensor electrode portions 1g-1 and 1h-1 are led from a part of the main portion to the vicinity of the node of the vibration mode of the vibrating body 1 (near the center of the vibrating body 1 in the longitudinal direction). The elastic body 1c has projecting portions 1c-1 and 1c-2, and engaging holes 1c-3 and 1c-4 are provided at the center of the projecting portions.
The position of the overhanging portion is in the vicinity of the node of the vibration mode of the vibrating body 1 to avoid adverse effects on the vibration mode. Further, the electrode portions 1e to 1h and the sensor electrodes 1g-1 and 1h
-1 and the elastic body 1c are attached with a total of seven terminal portions 1d by soldering or the like. The positions are near the nodes for the same reason as described above.

Reference numerals 2a and 2d are a pair of driver elements made of a phenol resin, an epoxy resin or the like, and are attached by adhesion or the like to the position of the antinode of the vibration mode of the vibrating body in order to obtain a higher driving force.

Reference numeral 3 is a pressure spring made of phosphor bronze or the like,
Overhangs 3a and 3b are formed, and the overhangs are provided with engagement holes 3a-1 and 3b-1, respectively.
The pressure spring 3 has bent portions 3c-at both ends in the longitudinal direction.
1, 3c-2 are provided. Further, a convex portion 3d is formed in the center of the pressing spring 3 in the width direction.

Reference numeral 4 is a guide rail as a contact body made of stainless steel or the like.

Reference numeral 5 denotes a roller, which is a support rod 5 for supporting the roller.
a is attached by a known method such as press fitting.

Reference numeral 6 denotes a case molded by plastic molding, in which engaging shaft portions 6a and 6b are provided, and stoppers 6c and 6d are provided at the bases thereof. Case 6
Grooves 6g and 6h having a width slightly larger than that of the guide rail 4 are provided at upper ends of both ends in the longitudinal direction. A groove 6i is provided in a part of the case 6. Further, grooves 6e and 6f are provided at both ends in the width direction of the case 6.

Reference numeral 7 denotes a plastic-molded cap, which is provided with a bearing groove (not shown) that axially supports the support rod 5a and a hole (not shown) into which the engaging shaft portions 6a and 6b are inserted. Further, at both ends of the cap 7 in the width direction, holding pieces 7a and 7b having locking claws are provided.

Next, the mutual relation of each component will be described.

Engaging shafts 6a, 6b provided on the case 6
The engagement holes 3a-1, 3 provided in the pressure spring 3 respectively.
b-1 Engage (insert). At this time, the protruding portions 3a and 3b of the pressure spring 3 are bent in the engagement axis direction to some extent, thereby eliminating the fitting backlash between the engagement shaft portions 6a and 6b and the engagement holes 3a-1 and 3b-1. . And the bent portion 3c-
Pressing spring 6 until 1, 3c-2 contacts the bottom of the case
Slides and stops. The maximum amount of deflection of the pressure spring 6 is such that the projecting portions 3a and 3b are the stoppers 6c and 6d of the case 6.
It bends until it hits.

Next, the engaging shaft portions 6a and 6b of the case 6 are inserted into the engaging holes 1c-3 and 1c-4 provided in the elastic body 1c of the vibrating body 1, respectively. At that time, overhanging part 1c-1
Is slightly bent in the direction of the engaging shaft, and the engaging shaft 6a,
The fitting backlash between 6b and the engaging holes 1c-3 and 1c-4 is eliminated. Then, the vibrating body 1 is slid until the piezoelectric element 1b of the vibrating body 1 contacts the convex portion 3d of the pressure spring 3.

Both ends of the support rod 5a attached to the roller 5 by a method such as press fitting are attached and fixed to bearing portions (not shown) provided on the cap 7.

A case 6 to which the pressure spring 3 and the vibrating body 1 are attached and a case 7 to which the roller 5 is attached are attached so that the guide rail 4 is sandwiched between the surface of the roller 5 and the surfaces of the drivers 2a and 2b. To be At this time, the holding pieces 7a, 7b having the locking claws provided on the cap 7 are guided by the grooves 6e, 6f of the case 6 and attached by snap fitting. At that time, the engagement shafts 6a and 6b of the case 6 are engaged with the holes (not shown) provided in the cap 7, and the cap 7 is positioned with respect to the case 6.
Further, movement of the guide rail 4 in the width direction is restricted by the grooves 6g and 6h of the case 6.

Electrode portions 1e to 1h, sensor electrode portion 1g-
1, 1h-1 and the terminal portion 1d provided on the elastic body 1c are soldered to a lead wire or a flexible printed board, and the lead wire or the flexible printed board is pulled out of the case 6 from a groove 6i provided in the case 6. By connecting the lead wire or the flexible printed circuit board to an external drive circuit, power supply and sensing can be performed.

The driving principle of the vibration device according to the present embodiment will be described.

FIG. 3 is a diagram showing the piezoelectric effect of the piezoelectric element. In the figure, reference numeral 10 denotes a piezoelectric element, which is subjected to a polarization process from above to below in the figure (in the direction of the arrow in the figure). Electrodes 10a and 10b are provided on both surfaces of the piezoelectric element by vapor deposition.

FIG. 3A is a diagram showing a state when a + potential is applied to the electrode portion 10a and a − potential is applied to the electrode portion 10b. In this case, since an electric field is applied to the piezoelectric element in the direction from the electrode portion 10a to the electrode portion 10b, that is, in the forward direction with respect to the polarization direction, the piezoelectric element extends in the direction perpendicular to the polarization direction.
An amount of expansion is generated according to the magnitude of the electric field.

FIG. 3 (b) is a diagram showing a state when a negative potential is applied to the electrode portion 10a and a positive potential is applied to the electrode portion 10b. In this case, the piezoelectric element includes electrodes 10b to 1
Since the electric field is applied in the direction of 0a, that is, in the direction opposite to the polarization direction, the piezoelectric element contracts in the direction perpendicular to the polarization direction, and a contraction amount corresponding to the magnitude of the electric field occurs.

FIG. 3C is a diagram showing a state where the piezoelectric element is extended by an external force in a direction perpendicular to the polarization direction. In this case, a positive potential is applied to the electrode portion 10a,
A negative potential is generated at b, and a potential difference corresponding to the amount of elongation is generated.

FIG. 3 (d) is a view showing a state in which the piezoelectric element is contracted in the direction perpendicular to the polarization direction by an external force. In this case, a negative potential is applied to the electrode portion 10a, and the electrode portion 10b
, A positive potential is generated, and a potential difference corresponding to the amount of shrinkage is generated.

The vibrating body of the vibrating device according to the present embodiment is intended to excite a standing wave by using these piezoelectric phenomena so that an elliptic motion is generated in the driver.

FIG. 4 is a side view of the vibrating body of the vibrating device.
The piezoelectric element 1a is polarized from the bottom to the top in the figure,
The piezoelectric element 1b is polarized from the upper side to the lower side in the figure. The elastic body 1c is connected to the ground. As shown in FIG. 5, an alternating voltage V _A having the same phase and the same amplitude is applied to the electrode portions 1e and 1h, and the alternating voltage V _A having the same phase and the same amplitude is applied to the electrode portions 1f and 1g. When the voltage V _B is applied (however, the phase is different from the alternating voltage applied to the electrode portions 1e and 1h), the vibrating body develops various behaviors due to the piezoelectric effect. For example, the behavior of the piezoelectric vibrator at time t ₁ in FIG.
Since the voltage is applied, contraction occurs as shown in FIG. The behavior of the piezoelectric vibrator at time t ₂ in FIG. 5 is that a positive voltage is applied to the electrode portions 1e and 1h and a negative voltage is applied to the electrode portions 1f and 1g, and the voltage applied to the electrode portions 1e and 1h is absolute. Since the voltage having the same value is applied, FIG.
Bend as shown.

The behavior of the piezoelectric vibrator at the time t ₃ in FIG. 5 is that the same negative voltage is applied to the electrode portions 1e to 1h, so that the extension occurs as shown in FIG. 6 (a). The behavior of the vibrating body at time t ₄ in FIG. 5 is as follows: a negative voltage is applied to the electrode portions 1e and 1h, and a positive voltage is applied to the electrode portions 1f and 1g, and the absolute value and the applied voltage to the electrode portions 1e and 1h. Since a voltage of the same value is applied, the wire bends as shown in FIG.

From the above, when observing the behavior in continuous time, the vibrating body has a stretching motion (longitudinal vibration) and a bending motion (lateral vibration).
Shows the combined behavior, and the driver elements 2a and 2b draw an elliptical orbit. The rotation directions of the elliptical orbits of the driver elements 2a and 2b are the same. Further, when reversing the phase of the alternating voltage V _A and V _B the direction of rotation of the elliptical orbit becomes the direction opposite to the direction.

The driver 2 that makes an elliptic motion as described above.
When a sliding member such as a guide rail is pressed against a and 2b, a driving force is generated, and the sliding member such as the guide rail and the driver can be relatively moved. If you fix the guide rail,
Of course, the vibrating body will move. The reverse is also possible.

A method of detecting lateral vibration and longitudinal vibration of the vibration device of the present invention will be described.

As described above, when the piezoelectric element is deformed by the piezoelectric effect, the piezoelectric element is generated according to the amount of deformation. Therefore, a method of detecting a lateral vibration and a longitudinal vibration by providing a sensor electrode portion capable of monitoring the deformation amount of the piezoelectric element separately from the driving electrode on the vibrating body of the vibrating device was considered. The magnitude of lateral vibration (flexural vibration) at any time is the amount of expansion (or contraction) of the piezoelectric element due to the voltage applied to the electrode portions 1e and 1h at any time.
And the amount of contraction (or expansion) of the piezoelectric element due to the voltage applied to the electrode portions 1f and 1g. That is, the sensor electrode unit 1
It can be expressed by the difference between the h-1 of the output voltage S _A and output voltage S _B of the sensor electrode 1 g-1.

The magnitude of the longitudinal vibration at any time is determined by the amount of expansion (or contraction) of the piezoelectric element due to the voltage applied to the electrodes 1e and 1h and the amount of application to the electrodes 1f and 1g at any time. The amount of contraction (or expansion) of the piezoelectric element due to voltage
Is determined by That is, the output voltage S _{A of the} sensor electrode portion 1h-1
And the output voltage S _B of the sensor electrode 1g-1.

FIG. 7 shows the electrode portions 1e and 1h of the vibrating body 1 as shown in FIG.
5 is applied to the electrode portions 1f and 1g by applying the alternating voltage V _A shown in FIG.
The sensor electrode unit 1 when the alternating voltage V _B shown in FIG.
g-1 output voltage S _B , sensor electrode portion 1 g-1 output voltage S _A, lateral vibration S _A −S _B, and vertical vibration S _A +
The voltage waveform of S _B is shown.

S _A + S _B is the horizontal axis and S _A -S _B is the vertical axis,
FIG. 8 shows a curve drawn along time. This curve is correct and represents the elliptic orbit of the driver.

As described above, by detecting the output voltage S _A of the sensor electrode portion 1h-1 and the output voltage S _B of the sensor electrode portion 1g-1, the behaviors of the lateral vibration and the longitudinal vibration can be understood, and the driver It can be seen that an elliptical orbit can be expressed.

By the way, the tangential velocity of the wave front of the elliptic motion is
It depends on the shape of the elliptical orbit. For example, FIG. 9 (a)
9 (b) for the tangential velocity at the point P ₁ of the elliptical orbit of
The tangential velocity at point P ₂ of the elliptic orbit of becomes slower,
The tangential velocity at point P ₃ of the elliptical orbit of (c) becomes faster. Therefore, if the elliptical orbit of FIG. 9 is the movement of the driver, it is possible to change the relative speed with respect to the sliding member such as the guide rail by changing the shape of the elliptical orbit.

Therefore, by changing the phase difference and the amplitude ratio of the alternating voltage V _A applied to the electrode portions 1e and 1h and the alternating voltage V _B applied to the electrode portions 1f and 1g, the shape of the elliptical orbit of the driver is changed. It was considered to change it and to change the relative speed with the sliding member.

First, when the amplitudes of V _A and V _B are made constant (the amplitudes of S _A and S _B are also constant in principle) and an elliptical orbit is drawn when the phase difference is changed, FIGS. become that way.

The phase difference between V _A and V _B in FIG. 10 is α (S
_In principle, the phase difference between _A and S _B is α, 0 ° <α <180
), And the phase difference between V _A and V _B in FIG. 11 is β (S _A and S _B
In principle, the phase difference of β is 0, 0 ° <β <180 °), and FIG.
Let γ be the phase difference between V _A and V _B at γ (the phase difference between S _A and S _B is also γ, 0 ° <γ <180 ° in principle), by setting β> α, the shape of the elliptical orbit becomes It becomes vertically longer than when the phase difference is α. Also, by setting γ <α,
The shape of the elliptical orbit is longer than that when the phase difference is α.

From the above, when the amplitudes of V _A and V _B are kept constant and the phase difference is changed, the shape of the elliptical orbit changes and the tangential velocity of the wave front of the elliptical orbit changes. That is, the tangential velocity of the elliptical orbit of the driver can be changed to arbitrarily change the relative velocity with the sliding member such as the guide rail.

Next, when the phase difference between V _A and V _B is set to 90 ° and the amplitude ratio between V _A and V _B is changed, FIG. 13 and FIG.
4, as shown in FIG.

The amplitudes of the output voltages S _A and S _B of the sensor electrode portion according to the amplitude of the applied alternating voltage are a ₁ and b ₁ in FIG. 13, a ₂ and b ₂ in FIG. 14, and a in FIG. ₃ and b ₃ .

| A ₁ | = | a ₂ | = | a ₃ | = | b ₁ |> |
When the amplitude of the applied alternating voltage is adjusted so that b ₂ |> | b ₃ | and the respective elliptical orbits are compared, the shape of the elliptical orbit at b ₂ is slightly slender compared to that at b _1. Become.
Also, the more elongated shape in the case of b _3.

From the above, the phase difference between V _A and V _B is 90
When the angle is set to 0 and the amplitude ratio of V _A and V _B is changed, the shape of the elliptical orbit changes and the tangential velocity of the wave front of the elliptical orbit changes. In other words, by changing the tangential velocity of the elliptical orbit of the driver,
The relative speed with respect to a sliding member such as a guide rail can be arbitrarily changed.

Next, the configuration relating to control will be shown.

FIG. 16 is a circuit block diagram showing an embodiment of the present invention.

A high frequency signal having a frequency higher than the driving frequency output from the oscillator 21 is frequency-divided by the frequency dividers 22 and 23 into a predetermined frequency, converted into a driving frequency, and output to the driver A24 and the driver B25. The drivers A24 and B25 amplify the signal obtained from the frequency divider and apply it to the ultrasonic motor 1 (specifically, it is applied to the electrode portion of the piezoelectric element as described above). When a signal is applied to the ultrasonic motor, the coil 24a, the coil 25b, and the piezoelectric element resonate, and a voltage higher than the voltage input to the drivers A24 and B25 is applied to the piezoelectric element. The output voltage from the sensor electrode portion according to the behavior of the piezoelectric element at this time is detected, A + B is detected by the adder circuit 27 to detect longitudinal vibration, and AB is detected by the subtractor circuit 28 to detect bending (transverse) vibration. To do. The detected longitudinal vibration and bending (transverse) vibration are sent to the phase comparator 29 and the amplitude comparator 30, and the comparison results are output to the microcomputer 26. The microcomputer 26 determines the behavior of the ellipse from the input phase difference and amplitude difference, and outputs a signal to the phase shifter 31 and the driver B25 so as to adjust the behavior of the ellipse.

For example, the amplitude comparator 30 half-wave rectifies the signals A + B and A−B represented by the sine wave function as shown in FIG. 17A, converts them into DC components, and converts them into amplitude values. At 26, A / D conversion is performed and comparison is performed.

Therefore, the phase shifter 31 changes the phase difference between the input signals A and B based on the obtained amplitude ratio. For example, FIG.
As shown in 8, the clock from the oscillator 21 is supplied to the counter A22.
a, the counter B23a before input to the counter B23a
Is set to the initial value, and the phase difference from the counter A22a is set. After that, the clock is input to the counters A and B, compared with a predetermined comparison value, and when they match, the counters A and B are cleared. As a result, the phase always shifts by the initial value. The signals obtained from the comparators A, B 22b, 23b are frequency-divided by the frequency dividers 22c, 23c, converted into rectangular waves having a duty ratio of 50%, and output to the drivers A24, B25. Thereby, the phase difference of the drive signal can be arbitrarily changed.

Further, the phase comparator 29 compares A + B and A−B with a reference value by a hysteresis comparator as shown in FIG. 17B, and converts it into a rectangular wave. EXO converted square wave
A signal that is turned on for the phase difference time through R29c is generated, and the phase difference can be determined by the number of reference clocks in the microcomputer within that time.

From the obtained phase difference, the microcomputer 26
Adjusts the behavior of the ellipse by changing the voltage applied to the driver B25. For example, the power source of the driver B is DC / DC
It is determined by the converter 25a. In this case, D
In order to control the voltage output by the C / DC converter, the voltage output by the comparator 26b in FIG. 19 can be controlled by the voltage output by the microcomputer.

From the above description, the behavior (trajectory) of the ellipse can be actually adjusted, and the speed control of the ultrasonic motor can be stably performed.

[0056]

According to the first aspect of the present invention, the behavior of the elliptic motion of the vibrating body can be accurately detected, and the control for obtaining good driving performance can be realized.

According to the second aspect of the present invention, the behavior of the elliptic motion of the vibrating body can be accurately detected, and the speed can be controlled by changing the shape of the elliptical orbit of the elliptic motion according to the detection result. Become.

According to the third aspect of the present invention, the behavior of the elliptic motion of the vibrating body can be accurately detected, and the speed can be controlled by changing the shape of the elliptical orbit of the elliptic motion according to the detection result. Become.

According to the invention of claim 4, the bending vibration and the longitudinal vibration of the vibrating body can be accurately detected.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a configuration of a vibrating device according to an embodiment.

FIG. 2 is a diagram showing a sensor electrode portion of a vibrating body of the vibrating device of FIG.

FIG. 3 is an explanatory diagram showing a piezoelectric effect.

FIG. 4 is a side view of a vibrating body of the vibrating device of FIG.

5 is a diagram showing an alternating voltage waveform applied to a vibrating body of the vibration device of FIG.

FIG. 6 is a diagram showing the behavior of a vibrating body of the vibrating device of FIG. 1.

7 is a diagram showing an output voltage waveform of a sensor electrode portion of a vibrating body of the vibrating device of FIG. 1 and voltage waveforms representing lateral (flexural) vibration and longitudinal vibration.

FIG. 8 is a diagram in which voltage waveforms representing lateral (flexural) vibration and longitudinal vibration are combined.

FIG. 9 is a diagram showing the shape of an elliptical orbit and the tangential velocity of a wave crest.

FIG. 10 is a diagram showing an output voltage waveform of a sensor electrode unit when changing a phase difference and an amplitude ratio of applied voltages and states of lateral vibration and longitudinal vibration.

FIG. 11 is a diagram showing an output voltage waveform of the sensor electrode unit when the phase difference and the amplitude ratio of the applied voltage are changed, and the states of horizontal vibration and vertical vibration.

FIG. 12 is a diagram showing an output voltage waveform of the sensor electrode unit when the phase difference and the amplitude ratio of the applied voltage are changed, and the states of horizontal vibration and vertical vibration.

FIG. 13 is a diagram showing an output voltage waveform of a sensor electrode unit when changing a phase difference and an amplitude ratio of applied voltages and states of lateral vibration and longitudinal vibration.

FIG. 14 is a diagram showing an output voltage waveform of a sensor electrode unit when changing a phase difference and an amplitude ratio of applied voltages and states of lateral vibration and longitudinal vibration.

FIG. 15 is a diagram showing an output voltage waveform of the sensor electrode unit when the phase difference and the amplitude ratio of the applied voltage are changed, and states of horizontal vibration and vertical vibration.

FIG. 16 is a diagram showing a control circuit of the vibration device according to the present embodiment.

17 is a circuit diagram showing a part of a control circuit of the vibration device of FIG.

18 is a circuit diagram and a time chart showing a part of a control circuit of the vibration device in FIG.

19 is a circuit diagram showing a part of a control circuit of the vibration device of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Vibrating body 2a, 2b Driver 4 Guide rail as a contact body 1e-1h Electrode part as a signal input part for electric-mechanical energy conversion 1g-1, 1h-1 Signal input for mechanical-electrical energy conversion Electrode section V _A , V _B applied alternating voltage S _A , S _B sensor electrode section output voltage 26 Microcomputer

Claims (4)

[Claims] 1. A vibrating body formed by laminating an electro-mechanical energy conversion element and an elastic body, and alternating signals having different phases are supplied to a plurality of signal input portions of the conversion element, thereby causing the vibrating body to undergo bending vibration and longitudinal vibration. In a vibrating device that vibrates to cause an elliptical motion of the action part by combining both vibrations and makes the contact body in contact with the vibrating body and the vibrating body relatively movable, the bending vibration and the longitudinal vibration of the vibrating body A vibrating device comprising a detection means for detecting an amplitude. 2. A vibrating body formed by laminating an electro-mechanical energy converting element and an elastic body, and alternating signals having different phases are supplied to a plurality of signal input portions of the converting element so that the vibrating body is subjected to bending vibration and longitudinal vibration. In a vibrating device that vibrates to cause an elliptical motion of the action part by combining both vibrations and makes the contact body in contact with the vibrating body and the vibrating body relatively movable, the bending vibration and the longitudinal vibration of the vibrating body A vibrating device comprising: a detection unit that detects an amplitude; and a control unit that changes a balance of strengths of signals supplied to a plurality of signal input units of the conversion element based on an output of the detection unit. 3. A vibrating body formed by laminating an electro-mechanical energy conversion element and an elastic body, and alternating signals having different phases are supplied to a plurality of signal input portions of the conversion element, so that the vibrating body is subjected to bending vibration and longitudinal vibration. In a vibrating device that vibrates to cause an elliptical motion of the action part by combining both vibrations and makes the contact body in contact with the vibrating body and the vibrating body relatively movable, the bending vibration and the longitudinal vibration of the vibrating body A vibrating device comprising: a detection unit that detects an amplitude; and a control unit that changes a phase of a signal supplied to a plurality of signal input units of the conversion element based on an output of the detection unit. 4. The transducer is arranged such that the vibrating body has a plurality of positions that serve as nodes of the flexural vibration, and the plurality of signals for mechanical-electrical energy conversion are provided at the positions of the plurality of nodes. 4. The vibrating device according to claim 1, wherein an output section is arranged and the amplitudes of the bending vibration and the longitudinal vibration are detected based on the output from the signal output section.