JPH09231934A - Scanning electron microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable an operation of a pointing device to be carried through its minimum motion with keeping the eye constantly on a microscope by a method wherein a switching function of the pointing device is changed in response to the position of a pointer. SOLUTION: When a pointer 17 on a display screen of a microscope is positioned within an image displaying an image of a specimen, each of switches 20, 21 and 22 of a pointing device 19 has each of the following functions: (1) moving an image of a position specified by a pointer to a center of a field of view; (2) increasing an image magnification rate at a determined step; and (3) decreasing an image magnification rate at a determined step, thereby it becomes possible to set a field of view and a magnification while seeing a microscope image under a state in which a pointer 17 is always set in a microscope image displaying area 12 (the state in which the pointer 17 is always aligned with a target), resulting in that an easiness in operation and operating characteristic can be improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning electron microscope having a visual field display operating device.

[0002]

2. Description of the Related Art A cross cursor is displayed at a position designated by a pointer on an electron microscope image, and a GUI (graphical user interface) switch for moving the position to the center of the visual field and a GUI for increasing the image magnification of the electron microscope.
I switch and GU that lowers the image magnification of the electron microscope
There is an I button, and the operator performs the following work in order to observe the target at a desired magnification.

[0003] 1. Search for the target with the electron microscope image magnification reduced.

[0004] 2. To move the target to the center of the field of view, move the pointer and move the cross cursor to the target.

3. To move the electron microscope image at the cross cursor position to the center of the visual field, move the pointer to the GUI switch for moving to the center of the visual field, and click the switch of the pointing device.

[0006] 4. To obtain the desired magnification, move the pointer to the GUI button for increasing the image magnification of the electron microscope, and click the switch of the pointing device.

5. If the target goes out of the electron microscope image display area before the target magnification is reached (this occurs due to the error between the center of the magnification and the center of the field of view), the image magnification of the electron microscope is reduced in order to lower the magnification. Move the pointer to the GUI switch and click the switch on the pointing device.

By repeating 6.2 to 5, the target is displayed at the target magnification.

[0009]

The viewpoint of the operator operating the electron microscope is an electron microscope image in most cases, but in order to move the field of view and change the image magnification of the electron microscope, Use the pointing device to move the pointer to the GUI button of the function of
You have to click the switch on your pointing device. The operation of pointing the pointer to each GUI button with the pointing device is not an easy task for the operator because it takes a considerable number of times to observe the target at the target magnification. Also, the pointer is set to each GUI switch with the pointing device. Therefore, the viewpoint will be separated from the target. An object of the present invention is to improve the operability and operability by keeping the operator's eye on the target of the electron microscope image and minimizing the movement of the pointing device.

[0010]

In order to achieve the above object, in the present invention, the deflection means for changing the irradiation area of the electron beam with the enlargement or reduction of the electron microscope image, or the electron microscope image is displayed. A pointing device is displayed when a point is displayed on the display screen of a scanning electron microscope equipped with a sample moving mechanism that moves the sample along with the movement of the sample image, and the point is located in the electron microscope image displaying the sample image. As the processing when the switch of is pressed,
This is achieved by giving each switch of the pointing device the following functions.

1. The electron microscope image at the position designated by the pointer is moved to the center of the visual field.

2. Raise the image magnification of the electron microscope at a fixed step.

3. Decrease the image magnification of the electron microscope at a fixed step.

According to the conventional technique, the operator moves the field of view of the electron microscope, increases the magnification, or lowers the magnification each time the operator puts the pointer on the GUI switch of each function on the GUI and clicks. The operation of designating the position of the target in the electron microscope image must be repeated, resulting in extremely poor operability. However, by using the above means, it becomes possible to set the field of view and the magnification while observing the electron microscope image with the pointer always placed in the electron microscope image display area (the pointer is always aligned with the target). The ease and operability can be dramatically improved.

Further, in the present invention, when the pointer is positioned on the electron microscope image arranged on the display image, each switch of the pointing device is provided with the above-mentioned function, and in the other display image areas, conversely. A function as a general pointing device such as an icon selection function is provided.

By changing the function of the switch according to the position of the pointer in this way, the operation of the display condition of the electron microscope image can be performed according to the operator's intention. That is, when the pointer exists outside the electron microscope image, the GUI switch can be used for enlarging, reducing, or moving the visual field by the same means as before, and when the point exists within the electron microscope image, the pointing is performed as described above. Since it is possible to enlarge, reduce, or move the field of view with a switch of the device, it is possible to selectively use the two depending on the ease of use of the operator and the use situation. Then, the switching can be performed only by changing the position of the pointer with the pointing device.

In the present invention, an enlarged display is performed on the electron microscope image based on the rectangular area designated on the electron microscope image, and in order to perform this enlarged display, the sample image is enlarged by the deflecting means and the sample moving mechanism is used. The sample image is being moved. With such a configuration, it becomes possible to easily obtain a desired image as compared with the prior art in which the movement and enlargement of the sample image had to be repeated a plurality of times until the desired image was obtained.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. An example using a three-button mouse is used as the pointing device.

FIG. 1 is a schematic diagram of an apparatus for carrying out the present invention. An electron beam 9 emitted from an electron gun 8 scans a sample 6 by a deflection coil 3. A scanning signal is supplied from a scanning signal generator 10 to the deflection coil 3 and the CRT of the workstation (personal computer) 1 used for displaying an electron microscope image. In addition, the secondary electrons 7 detected by the detector 4
Is supplied as a luminance signal to the CRT of the workstation (personal computer) 1, and the workstation (personal computer)
The electron microscope image is displayed on the CRT of No. 1. The electron microscope control CPU 2 supplies the scan signal data to the scan signal generator 10 to control the deflection coil 3 and set the electron microscope image magnification. Further, by controlling the sample stage 5, the field of view of the electron microscope image is moved. The operator can change the magnification and field of view of the electron microscope image by issuing various commands to the electron microscope control CPU 2 by operating the workstation (personal computer) 1.

The details of the workstation (personal computer) for operating the electron microscope are shown in FIG. 2 and the means for implementing the present invention will be described. The CRT display 11 which is a display image of the present invention is a G for an operator to operate.
Display UI and electron microscope images. CRT display 11
The configuration is as follows: electron microscope image display area 12, GUI button 13 for increasing the image magnification of the electron microscope, GUI button 14 for decreasing the image magnification of the electron microscope, cross cursor 18 indicating the position of the electron microscope image designated by the operator, cross cursor GUI button 15 for moving the target at position 18 to the center of the field of view, GUI for displaying the cross cursor
Button 16, pointer 17 for pointing device
Consists of The pointing device for operating the GUI of the CRT 11 is a three-button mouse 19, which includes a left button 20, a middle button 21, and a right button 22.

GUI for increasing the image magnification of the electron microscope
Button 13, GUI to lower the image magnification of the electron microscope
The button 14 is clicked with the left button 20 of the mouse 19. When moving the field of view, display the cross cursor G
The UI button 16 is clicked with the left button 20 of the mouse 19, the cross cursor 18 is displayed, the cross cursor position is specified with the pointer 17, and then the GUI button 15 is clicked with the left button 20 of the mouse 19.

In the present invention, the above functions are generated when the pointer 17 enters the electron microscope image display area 12.

By doing so, when the pointer exists outside the display area, each button of the mouse 19 has a normal function for the mouse such as icon selection.
When the pointer is present in the display area, it functions to control the display mode of the electron microscope for enlargement, reduction and visual field movement as described above.

That is, according to the present invention, the function of the button of the pointing device is changed according to the position where the pointer is present.

By adopting such a system, it becomes possible to provide an operating environment suitable for the recent multi-window display screen.

Specifically, the following means are taken.

The event processing shown in the flow chart of FIG. 3 is performed, and the pointer 17 moves the electron microscope image display area 12
When entering, each button of the mouse 19 and the left mouse button 20 are moved to the pointer 17 when the button is pressed.
The function of displaying the cross cursor 18 at the position indicated by, and the function equivalent to clicking the GUI button 15 in the event of releasing the button, the purpose is simply to click any position in the electron microscope image display area 12. With the ability to move the target of to the center of the field of view,
Press the middle mouse button 21 to increase the image magnification of the electron microscope G
With the function equivalent to clicking the UI button 13 and the function to easily change the magnification by giving the mouse right button 22 the same function as clicking the GUI button 14 for reducing the image magnification of the electron microscope. The target image can be displayed at any image magnification without moving the pointer 17 from the electron microscope image display area 12.

Even when the pointing device is a two-button mouse or a two-button trackball, it must have a function of moving the target of interest to the center of the field of view and a function of increasing the image magnification of the electron microscope. Is easily conceivable.

Another embodiment of the present invention will be described with reference to FIG. In the embodiment described above, the cross cursor 18 is displayed by the GUI button 16 for displaying the cross cursor in FIG. 2, but here, the rectangular cursor 23 in FIG. 4 is displayed. This rectangular cursor 23 is dragged by the pointing device. The size can be changed by the function of moving the pointer while pressing the button of the pointing device. When the button of the pointing device is released, the magnification is calculated back according to the size of the rectangular cursor 23, The enlarged image 24 of the electron microscope is displayed.

Still another embodiment of the present invention will be described with reference to FIG. In the above-described embodiment, the cross cursor 18 is displayed by the GUI button 16 for displaying the cross cursor in FIG. 2, but here, the grid cursor 25 in FIG. 5 is displayed, and the grid cursor 25 is divided into nine parts. Give the meaning of the moving direction to 8 areas except the central area of the area, and release the pointing device button.
Or when a pressing event occurs, the movement amount (1, 3/4, 2/3, 1/2, 1/4 screen, etc.) for which the electron microscope image in that direction is set depends on which area the pointer exists. , Or it can be arbitrarily set in dot units) in the direction of the center of the field of view, and the electron microscope image 26 (in this example, a one-fourth screen shift) is displayed.

With this configuration, the visual field of the sample image can be continuously moved in any direction. That is, when the visual field is moved by designating any area other than the central area, the designated position of the pointing device does not move with the sample image, but only the sample image moves based on the designation of the pointing device. The pointer remains in the same area unless the operator moves it.
If the same area is designated many times in this state, it is possible to continuously move in the same direction at the same pitch.

Still another embodiment of the present invention will be described with reference to FIG. FIG. 6 is a screen for registering a function in a 3-button mouse event, and the text set in the function item text box 27 is as in the previous embodiment. By allowing an existing function to be input to the text box 27, the function can be freely assigned to the button event of the pointing device.

Further, in the present invention, the rotation angle is increased / decreased, the sample stage tilt angle is increased / decreased, and the Z axis is moved up / down.
A function such as descending may be assigned to the pointing device.

[0034]

According to the present invention, the movement of the pointing device is minimized, and it is no longer necessary to position the pointer on the GUI button of each function, which is a GUI component, and keep an eye on the electron microscope image. Since it can be operated with, it is possible to improve the operability and the operability.

For example, in a scanning electron microscope for inspecting semiconductors, when an operator is observing an electron microscope image, it can be operated without taking his eyes off the electron microscope image. Effective effects can be expected, such as oversight of important information for the operator is reduced.

Further, according to the present invention, the above effects can be easily realized in an apparatus having a display form such that an electron microscope image is displayed on a multi-window.

Further, since the function of the button event of the pointing device can be changed, the method of moving the image can be freely selected according to the purpose, other functions for displaying the image can be assigned, and a left-handed person can be selected. Can provide an environment that is easy for the operator to use, such as left-right allocation.

[Brief description of drawings]

FIG. 1 is a block diagram of an apparatus for carrying out the present invention.

FIG. 2 is a display explanatory view of the embodiment of the present invention.

FIG. 3 is an explanatory diagram of event processing of the present invention.

FIG. 4 is an explanatory diagram of another embodiment of the present invention.

FIG. 5 is an explanatory view showing still another embodiment of the present invention.

FIG. 6 is an explanatory view showing still another embodiment of the present invention.

[Explanation of symbols]

1 ... work station (personal computer), 2 ... electron microscope control CPU, 3 ... deflecting coil, 4 ... detector, 5 ... sample stage, 6 ... sample, 7 ... secondary electron, 8 ... electron gun, 9 ... electron beam, 10 ... Scan signal generator, 11 ... CRT display,
12 ... Electron microscope image display area, 13 ... GUI button for increasing electron microscope image magnification, 14 ... GUI button for lowering electron microscope image magnification, 15 ... GUI button for moving the target at the cross cursor position to the center of the visual field, 16 ... Cross cursor GUI button for displaying, 17 ... Pointer, 18 ... Cross cursor, 19 ... Mouse, 20 ... Mouse left button, 21 ... Mouse middle button, 22 ... Mouse right button, 23 ... Rectangular cursor, 24 ... Electron microscope in rectangular cursor Enlarged image, 25 ... Grid cursor, 26 ... Electron microscope image in which the right image is moved toward the center of the 1/4 screen field of view, 27 ... Text box.

Claims (7)

[Claims] 1. A scanning electron microscope comprising a deflecting means for changing an irradiation area of an electron beam according to enlargement or reduction of the electron microscope image, wherein the electron microscope image is displayed on a display image including a part thereof. A function for displaying points and a pointing device for moving the points are provided, and when the points are located in the electron microscope image, at least two switches provided in the pointing device respectively include A scanning electron microscope characterized in that it functions to adjust the rise and fall of the image magnification. 2. The pointing device according to claim 1, wherein at least three switches are arranged on the pointing device, and one of the switches has a position of the point when the point is located in the electron microscope image. A scanning electron microscope, wherein the scanning electron microscope functions to control a sample moving mechanism so as to center the image on the electron microscope image. 3. A scanning electron microscope according to claim 1, further comprising means for assigning a function of each switch. 4. A scanning electron microscope equipped with a sample moving mechanism for moving a sample in accordance with the movement of the sample image displayed on the electron microscope image, wherein the scanning electron microscope includes the electron microscope image as a part thereof. Equipped with a function for displaying points on the screen and a pointing device for moving the points,
When the point is located in the electron microscope image,
The switch provided on the pointing device is
A scanning electron microscope, which functions to control a sample moving mechanism so that a position where the point is located is the center of the electron microscope image. 5. The electron microscope image according to claim 4, wherein the electron microscope images are separated by a boundary line forming a continuous rectangular shape,
A scanning electron microscope, wherein a sample moving mechanism is controlled so as to center the electron microscope image existing in a rectangular area where the point is located. 6. A deflection means for changing an irradiation area of an electron beam according to enlargement or reduction of an electron microscope image, and a sample moving mechanism for moving a sample according to movement of a sample image displayed on the electron microscope image. A scanning electron microscope equipped with,
A scanning electron microscope characterized by means for designating a rectangular area on the electron microscope image, and enlarging and moving the sample image so as to magnify and display the rectangular area in the electron microscope image. 7. The device according to claim 6, wherein the means for designating the rectangular area is a pointing device, and the rectangle is designed so that the two points designated in the electron microscope image by the pointing device are the vertices of a diagonal line. A scanning electron microscope characterized by being formed.