JPH09225673A - Laser machining method and laser machining head used therefor - Google Patents

Laser machining method and laser machining head used therefor

Info

Publication number
JPH09225673A
JPH09225673A JP8035145A JP3514596A JPH09225673A JP H09225673 A JPH09225673 A JP H09225673A JP 8035145 A JP8035145 A JP 8035145A JP 3514596 A JP3514596 A JP 3514596A JP H09225673 A JPH09225673 A JP H09225673A
Authority
JP
Japan
Prior art keywords
assist gas
work
nozzle
laser processing
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8035145A
Other languages
Japanese (ja)
Inventor
Naoto Miyazawa
直人 宮澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amada Co Ltd
Original Assignee
Amada Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amada Co Ltd filed Critical Amada Co Ltd
Priority to JP8035145A priority Critical patent/JPH09225673A/en
Publication of JPH09225673A publication Critical patent/JPH09225673A/en
Pending legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

PROBLEM TO BE SOLVED: To physically treat and remove an oxide film, burning, edge at a cut part by jetting toward a work with mixing grinding powder in assist gas after laser machining is executed with using oxygen as assist gas. SOLUTION: By using a laser machining head 1 consisting of a machining head main body 3 arranged with an assist gas jetting hole 9 and a nozzle 5, by condensing a laser beam LB with a condensing lens 7, jetting assist gas and irradiating a work W on a work table 13 with laser beam, cutting is executed. Thereafter, assist gas is jetted at the same route with mixing a grinding powder in assist gas. At this time, the inner face of the nozzle 5 is preferably coated with a wear resistant material. Fired carbon is preferable as this wear resistant material.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、ワークにレーザ
加工を行うレーザ加工方法およびその方法に用いるレー
ザ加工ヘッドに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing method for laser processing a work and a laser processing head used in the method.

【0002】[0002]

【従来の技術】従来、ワークに自由形状の切断加工がで
きるレーザ加工機は、熱エネルギー加工であると共に、
アシストガスに酸素を用いると、酸化熱利用の加工とな
る。しかも、切断経路のレーザビームにより除去される
ワークの幅は狭く、0.1〜0.3mm程度である。
2. Description of the Related Art Conventionally, a laser processing machine capable of performing free-form cutting on a work is heat energy processing and
When oxygen is used as the assist gas, the process uses oxidation heat. Moreover, the width of the work removed by the laser beam in the cutting path is narrow, and is about 0.1 to 0.3 mm.

【0003】[0003]

【発明が解決しようとする課題】ところで、上述したア
シストガスに酸素を用いて行うレーザ加工方法では、切
断したワークを装飾用に用いる場合に切断部側面につい
た酸化皮膜または焦げを除去しなければならず、これら
の除去が非常に難しい。
By the way, in the above-described laser processing method using oxygen as the assist gas, when the cut work is used for decoration, the oxide film or the scorching on the side surface of the cut portion must be removed. And it is very difficult to remove them.

【0004】酸化皮膜はアシストガスとして不活性ガス
を用いることで防ぐことができるが、酸化熱を利用でき
ないことで、切断可能板厚が大きな制限を受け、厚板加
工ができないという問題があり、かつ前記焦げの対応は
やはり困難である。
The oxide film can be prevented by using an inert gas as an assist gas, but since the heat of oxidation cannot be used, there is a problem that the plate thickness that can be cut is greatly restricted, and the thick plate cannot be processed. In addition, it is difficult to deal with the burn.

【0005】この発明の目的は、ワークの切断部に発生
する酸化皮膜や焦げまたはエッジを物理的に処理して除
去できるようにしたレーザ加工方法およびその方法に用
いるレーザ加工ヘッドを提供することにある。
An object of the present invention is to provide a laser processing method and a laser processing head used in the method, which can physically remove an oxide film, a burnt or an edge generated in a cut portion of a workpiece by physical processing. is there.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に請求項1によるこの発明のレーザ加工方法は、レーザ
加工ヘッドからレーザビームを加工すべきワークへ向け
て照射してレーザ加工を行った後、同一経路にアシスト
ガス中に研摩材を混ぜてワークへ向けて噴射せしめるこ
とを特徴とするものである。
In order to achieve the above object, the laser processing method of the present invention according to claim 1 performs laser processing by irradiating a workpiece to be processed with a laser beam from a laser processing head. After that, it is characterized in that the abrasive is mixed in the assist gas in the same path and is sprayed toward the work.

【0007】したがって、ワークにレーザ加工を行う際
にはレーザ加工ヘッドからワークへ向けてレーザビーム
を照射してレーザ加工が行われる。レーザ加工終了後に
同一経路にアシストガス中に研摩材を混ぜて噴射せしめ
ることにより、ワークの切断面に発生した酸化皮膜や焦
げが研摩材によって物理的に処理されて除去される。
Therefore, when performing laser processing on a work, laser processing is performed by irradiating a laser beam from the laser processing head toward the work. After the laser processing is completed, the abrasive is mixed and injected into the assist gas in the same path, so that the oxide film and scorching generated on the cut surface of the workpiece are physically processed and removed by the abrasive.

【0008】請求項2によるこの発明のレーザ加工ヘッ
ドは、レーザビームを加工すべきワークへ向けて照射せ
しめる先端にノズルを備えたレーザ加工ヘッドであっ
て、前記ノズルの内面を耐摩耗性素材で覆ってなること
を特徴とするものである。
The laser processing head of the present invention according to claim 2 is a laser processing head having a nozzle at the tip for irradiating a work to be processed with a laser beam, and the inner surface of the nozzle is made of a wear resistant material. It is characterized by being covered.

【0009】したがって、レーザ加工ヘッドの先端に備
えられたノズルの内面は耐摩耗性素材で覆われているか
ら、ノズルの内面は噴射される研摩材に耐えられて摩耗
による変形が防がれる。
Therefore, since the inner surface of the nozzle provided at the tip of the laser processing head is covered with the wear resistant material, the inner surface of the nozzle can withstand the sprayed abrasive material and prevent deformation due to wear.

【0010】請求項3によるこの発明のレーザ加工ヘッ
ドは、請求項2のレーザ加工ヘッドにおいて、前記耐摩
耗性素材が焼成カーボンであることを特徴とするもので
ある。
According to a third aspect of the present invention, there is provided a laser processing head according to the second aspect, wherein the wear-resistant material is calcined carbon.

【0011】したがって、耐摩耗性素材を焼成カーボン
とすることにより、ノズル内面の摩耗による変形がより
一層防がれる。
Therefore, by using calcined carbon as the abrasion resistant material, the deformation due to abrasion of the inner surface of the nozzle can be further prevented.

【0012】[0012]

【発明の実施の形態】以下、この発明の実施の形態の例
を図面に基いて詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

【0013】図1を参照するに、レーザ加工ヘッド1は
上下方向へ移動自在な加工ヘッド本体3を備えており、
この加工ヘッド本体3の先端にはノズル5が着脱可能に
装着されている。前記加工ヘッド本体3の内部には図示
省略のレーザ発振器から発振されたレーザビームLBが
複数のベンドミラーを経て集光される集光レンズ7が備
えられている。
Referring to FIG. 1, the laser processing head 1 is provided with a processing head main body 3 which is vertically movable.
A nozzle 5 is detachably attached to the tip of the processing head body 3. Inside the processing head body 3, there is provided a condenser lens 7 for condensing a laser beam LB oscillated from a laser oscillator (not shown) through a plurality of bend mirrors.

【0014】また、前記加工ヘッド本体3の一部に研摩
材を混ぜた例えば酸素などのアシストガスを噴射せしめ
る噴出孔9が形成されている。前記ノズル5の内面には
例えば焼成カーボンなどの耐高熱、耐摩耗性素材11が
覆われている。
A jet hole 9 for jetting an assist gas such as oxygen mixed with an abrasive is formed in a part of the processing head body 3. The inner surface of the nozzle 5 is covered with a high heat and wear resistant material 11 such as calcined carbon.

【0015】上記構成により、ワークテーブル13上に
載置固定されたワークWにレーザ加工を行う際には、レ
ーザ発振器で発振されたレーザビームLBは複数のベン
ドミラーを経て加工ヘッド本体3内に備えられた集光レ
ンズ7で集光された後、ノズル5からワークWへ向けて
照射される。このレーザビームLBの照射と共に図示省
略のアシストガス供給装置から酸素からなるアシストガ
スを加工ヘッド本体3に形成された噴出孔9からノズル
5内に噴出せしめると、ノズル5からワークWへ向けて
噴射され、レーザビームLBとアシストガスとによって
良好なレーザ加工(レーザ切断)が行われることにな
る。
With the above configuration, when performing laser processing on the work W placed and fixed on the work table 13, the laser beam LB oscillated by the laser oscillator passes through the plurality of bend mirrors and enters the processing head main body 3. After being condensed by the condensing lens 7 provided, it is irradiated from the nozzle 5 toward the work W. When the assist gas supply device (not shown) ejects an assist gas composed of oxygen from the ejection holes 9 formed in the processing head body 3 into the nozzle 5 together with the irradiation of the laser beam LB, the nozzle 5 ejects the workpiece W toward the workpiece W. Then, favorable laser processing (laser cutting) is performed by the laser beam LB and the assist gas.

【0016】加工終了後に、研摩材を混ぜたアシストガ
スを切断された同一経路に噴出孔9を経てノズル5から
噴射せしめると、切断面に発生した狭い隙間の酸化皮膜
や焦げを除去することができる。また、加工終了後のエ
ッジを取ることもできる。
After the processing is completed, when the assist gas mixed with the abrasive is sprayed from the nozzle 5 through the jetting hole 9 to the same cut path, the oxide film and the scorching in the narrow gap generated on the cut surface can be removed. it can. It is also possible to take an edge after finishing the processing.

【0017】ノズル5の内面には焼成カーボンなどの高
摩耗性素材11が覆われているから、研摩材を混ぜたア
シストガスをノズル5中を噴出せしめてもノズル5の内
面を摩耗による変形を防ぐことができる。
Since the inner surface of the nozzle 5 is covered with a highly abrasive material 11 such as calcined carbon, even if the assist gas mixed with an abrasive is ejected into the nozzle 5, the inner surface of the nozzle 5 is not deformed due to wear. Can be prevented.

【0018】したがって、切断加工されたワークWは酸
化皮膜や焦げまたはエッジが除去できて装飾部品加工に
販路を開くなどクリーンカット加工と同様にインパクト
を市場に与えることができる。
Therefore, the cut work W can have the same impact on the market as the clean cut work such that the oxide film, the burnt or the edge can be removed to open a sales channel for the processing of decorative parts.

【0019】なお、この発明は、前述した実施の形態の
例に限定されることなく、適宜な変更を行うことによ
り、その他の態様で実施し得るものである。本実施の形
態の例ではノズル5の内面に耐摩耗性素材として焼成カ
ーボンを覆う好ましい例で説明したが、それ以外の耐摩
耗性素材であっても構わない。
The present invention is not limited to the above-described embodiment, but can be embodied in other forms by making appropriate changes. In the example of the present embodiment, a preferable example in which the inner surface of the nozzle 5 is covered with fired carbon as a wear resistant material has been described, but other wear resistant materials may be used.

【0020】[0020]

【発明の効果】以上のごとき実施の形態の例から理解さ
れるように、請求項1の発明によれば、ワークにレーザ
加工を行う際にはレーザ加工ヘッドからワークへ向けて
レーザビームを照射してレーザ加工が行われる。レーザ
加工終了後に同一経路にアシストガス中に研摩材を混ぜ
て噴射せしめることにより、ワークの切断面に発生した
酸化皮膜や焦げまたはエッジを研摩材によって物理的に
処理して除去することができる。
As can be understood from the examples of the embodiment as described above, according to the first aspect of the invention, when performing laser processing on a work, a laser beam is irradiated from the laser processing head toward the work. Then, laser processing is performed. By mixing and spraying the abrasive in the assist gas into the same path after the laser processing is completed, the oxide film, burnt or edge generated on the cut surface of the work can be physically treated and removed by the abrasive.

【0021】請求項2の発明によれば、レーザ加工ヘッ
ドの先端に備えられたノズルの内面は耐摩耗性素材で覆
われているから、ノズルの内面は噴射される研摩材に耐
えられて摩耗による変形を防ぐことができる。
According to the second aspect of the present invention, since the inner surface of the nozzle provided at the tip of the laser processing head is covered with the wear resistant material, the inner surface of the nozzle withstands the abrasive material to be sprayed and wears. It is possible to prevent deformation due to.

【0022】請求項3の発明によれば、耐摩耗性素材を
焼成カーボンとすることより、ノズル内面の摩耗による
変形をより一層防ぐことができる。
According to the third aspect of the present invention, since the wear-resistant material is calcined carbon, it is possible to further prevent deformation of the inner surface of the nozzle due to wear.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明を実施する一実施の形態の例のワーク
にレーザ加工を行うレーザ加工ヘッドの正面断面図であ
る。
FIG. 1 is a front cross-sectional view of a laser processing head that performs laser processing on a work according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 レーザ加工ヘッド 3 加工ヘッド本体 5 ノズル 7 集光レンズ 9 噴出孔 11 耐摩耗性素材 13 ワークテーブル LB レーザビーム 1 Laser Processing Head 3 Processing Head Main Body 5 Nozzle 7 Condenser Lens 9 Jet Hole 11 Wear Resistant Material 13 Work Table LB Laser Beam

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 レーザ加工ヘッドからレーザビームを加
工すべきワークへ向けて照射してレーザ加工を行った
後、同一経路にアシストガス中に研摩材を混ぜてワーク
へ向けて噴射せしめることを特徴とするレーザ加工方
法。
1. A laser processing head irradiates a laser beam onto a work to be processed for laser processing, and then an abrasive is mixed in an assist gas in the same path and jetted toward the work. And laser processing method.
【請求項2】 レーザビームを加工すべきワークへ向け
て照射せしめる先端にノズルを備えたレーザ加工ヘッド
であって、前記ノズルの内面を耐摩耗性素材で覆ってな
ることを特徴とするレーザ加工ヘッド。
2. A laser processing head having a nozzle at a tip for irradiating a work to be processed with a laser beam, wherein the inner surface of the nozzle is covered with a wear resistant material. head.
【請求項3】 前記耐摩耗性素材が焼成カーボンである
ことを特徴とする請求項2記載のレーザ加工ヘッド。
3. The laser processing head according to claim 2, wherein the wear resistant material is calcined carbon.
JP8035145A 1996-02-22 1996-02-22 Laser machining method and laser machining head used therefor Pending JPH09225673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8035145A JPH09225673A (en) 1996-02-22 1996-02-22 Laser machining method and laser machining head used therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8035145A JPH09225673A (en) 1996-02-22 1996-02-22 Laser machining method and laser machining head used therefor

Publications (1)

Publication Number Publication Date
JPH09225673A true JPH09225673A (en) 1997-09-02

Family

ID=12433748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8035145A Pending JPH09225673A (en) 1996-02-22 1996-02-22 Laser machining method and laser machining head used therefor

Country Status (1)

Country Link
JP (1) JPH09225673A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1083777A1 (en) * 1998-05-29 2001-03-14 Nikon Corporation Laser-excited plasma light source, exposure apparatus and its manufacturing method, and device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1083777A1 (en) * 1998-05-29 2001-03-14 Nikon Corporation Laser-excited plasma light source, exposure apparatus and its manufacturing method, and device manufacturing method

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