JPH09223586A - Exhaust control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To light a light source stably by starting exhaust operation based on a temperature detection signal, and open an exhaust path opening and closing means corresponding to a light source unit reaching a stabilized temperature of a light source so as to hold the stabilized temperature. SOLUTION: Power is supplied to the light sources 12B to 14B of respective light source units 12 to 14 with several seconds interval so as to rise the temperatures of the light sources 12B to 14B. The stabilized temperatures of the light sources 12B to 14B are detected by temperature detection means 12A to 14A, and the respective temperature detection signals S12 to S14 of the respective light sources 12B to 14B are sent to a control unit 21 via a power supply 11. Based on the signals S12 to S14 an exhaust means 20 is operated, and simultaneously exhaust path opening and closing means 16 to 18, 42 to 44 of exhaust tubes 15, 41 corresponding to the light source units 12 to 14 reaching the stabilized temperatures of the light sources 12B to 14B are successively opened. Simultaneously, exhaust amount adjustment means 16 to 19, 21, 31, 32, 42A to 44A, 42 to 45 are controlled by the control means 21, 31, 45 so that the light source units 12 to 14 reaching the stabilized temperatures hold the stabilized temperatures.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust control device, and is particularly suitable for application to an exhaust control device for controlling exhaust gas in each light source unit of an exposure apparatus having a plurality of light source units each having a light source utilizing discharge. It is a thing.

[0002]

2. Description of the Related Art Conventionally, for example, in a projection exposure apparatus,
By irradiating the pattern surface of the mask with the exposure light emitted from the light source unit (hereinafter referred to as a lamp house) through the projection optical system, the pattern drawn on the mask is formed on the photoresist layer on the glass substrate. It is designed to be exposed. This light source unit has, for example, an ultra-high pressure mercury lamp as a light source, and an exhaust control device for controlling exhaust in the light source unit is provided to stably turn on the ultra-high pressure mercury lamp.

FIG. 4 shows a structural example of this type of exhaust control device. In the exhaust control device 1, when the power supply 2 for the ultra-high pressure mercury (Hg) lamp is turned on, a lamp house 3 having an ultra-high pressure mercury lamp (hereinafter, simply referred to as a mercury lamp) 3A in a housing is installed. The mercury lamp 3A gradually heats. After that, the temperature of the mercury lamp 3A gradually rises, and the temperature of the mercury lamp 3A rises.
When the temperature of the mercury lamp 3A reaches the stabilization temperature, the temperature sensor 4 provided in the mercury lamp 3A reaches the stabilization temperature when the temperature reaches a temperature at which mercury in the inside completely evaporates (hereinafter referred to as the stabilization temperature). Is detected and the temperature detection signal S1 is supplied to the power source 2
To the control unit 5 via.

Based on the temperature detection signal S1, the control unit 5 sends an exhaust amount adjustment signal S2 and an exhaust operation start signal S3 to the exhaust amount adjusting valve 6 and the exhaust fan 7, respectively. The exhaust amount adjusting valve 6 opens a valve (not shown) based on the exhaust amount adjusting signal S2, and the exhaust fan 7 rotates the fan based on the exhaust operation start signal S3 to start the exhaust operation. As a result, the inside of the lamp house 3 is exhausted through the exhaust pipe 8 to keep the mercury lamp 3A at the stabilizing temperature. Thus mercury lamp 3
A can be lit in a stable manner.

[0005]

By the way, recently, a liquid crystal display substrate has been widely used as a display element of a personal computer, a television, etc., and a large area of the liquid crystal display substrate has been demanded. In the projection exposure apparatus, it is desired to expand the exposure area. In order to meet such a demand, a projection exposure apparatus having a plurality of lamp houses has been proposed.

In this projection exposure apparatus, a plurality of lamp houses are provided, and each exposure light emitted from each lamp house is applied to a different area on the mask, and an image of the different area is applied to each lamp house. Projection is performed on the projection area on the glass substrate through the corresponding projection exposure system. However, in order to control the exhaust in each lamp house of such a projection exposure apparatus, the exhaust control device 1 as described above must be provided for each lamp house, and as a result, the overall configuration of the projection exposure apparatus is configured. May become larger and more complicated, and the cost may increase.

As one method for solving such a problem, the exhaust control device 1 is provided with a plurality of lamp houses 3 and each lamp house 3 is provided with an exhaust pipe, and each lamp house 3 is connected via each exhaust pipe. It is conceivable to connect it to the displacement control valve 6. However, since the time required for each mercury lamp 3A to reach the stabilization temperature differs depending on the number of Watts etc., when the mercury lamp 3A reaches the stabilization temperature, the valve of the flow rate adjusting valve 6 is opened and the exhaust fan 7 is turned on. If the mercury lamp 3A that has not reached the stabilization temperature is cooled when it is operated and exhaust is started, the lighting of the mercury lamp 3A may become unstable because the mercury lamp 3A is cooled before the stabilization temperature is reached.

When all the mercury lamps 3A reach the stabilization temperature, when the flow rate adjusting valve 6 is opened and the exhaust fan 7 is operated to start the exhaust, the mercury lamp 3A which reaches the stabilization temperature quickly. May be damaged due to overheating, or even if avoiding the damage, the life of the mercury lamp 3A may be shortened.

The present invention has been made in consideration of the above points. Even when a plurality of light source units having a light source utilizing discharge are used, each light source can be stably turned on with a simple structure. An exhaust control device that can be used is proposed.

[0010]

In order to solve such a problem, the present invention uses a light source (12B, 1B) utilizing discharge.
3B, 14B) having a light source unit (12,
In an exhaust control device (10, 30, 40) for controlling exhaust in each light source unit (12, 13, 14) in an exposure apparatus having a plurality of (13, 14), each light source unit (12, 13, 14) Exhaust pipes (15, 4,
1), and the exhaust paths (15A, 15B, 15C, 41A, 41B) of the exhaust pipes (15, 41), respectively.
41C) exhaust path opening / closing means (16, 17, 1)
8, 42, 43, 44) and each exhaust path (15A, 15)
B, 15C, 41A, 41B, 41C), and an exhaust means (20) for exhausting the inside of each light source unit (12, 13, 14), and an exhaust for adjusting the exhaust amount exhausted from the exhaust means (20). Quantity adjusting means (16, 17, 18, 19,
21, 31, 32, 42A, 43A, 44A, 42, 4
3, 44, 45) and each light source (12B, 13B, 14)
The temperature of each of the light sources (12B, 13B) is detected.
B, 14B) for each temperature detection signal (S12, S13, S1)
4) sending out temperature detecting means (12A, 12B, 12)
C) and the temperature detection signals (S12, S13, S14) based on the exhaust means (20) to start the exhaust operation,
In addition, the exhaust path opening / closing means (16, 17,) of the exhaust pipe (15, 41) corresponding to the light source unit (12, 13, 14) that has reached the stabilization temperature of the light source (12B, 13B, 14B).
18, 42, 43, 44) are sequentially opened, and the light source (12B, 13B, 14B) that has reached the stabilization temperature keeps the stabilization temperature.
7, 18, 19, 21, 31, 32, 42A, 43A,
44A, 42, 43, 44, 45) and control means (21, 31, 45).

Temperature detection signal (S12, S13, S14)
Based on the above, the exhaust passage opening / closing means (16, 17, 18, 42, 4) corresponding to the light source unit (12, 13, 14) that has reached the stabilization temperature of the light source (12B, 13B, 14B).
3 and 44) are sequentially opened, and the light sources (12B, 13B, 14B) reaching the stabilization temperature maintain the stabilization temperature according to the number of the light sources (12B, 13B, 14B) reaching the stabilization temperature. By adjusting the amount of exhaust gas exhausted from the exhaust means (20) so that each light source (12B, 13B
(B, 14B) can be individually reached to the stabilization temperature without being overheated, and the light sources (12B, 13B, 14B) already held at the stabilization temperature are newly stabilized without being overcooled. Light source reaching temperature (12B, 13
B, 14B) can be kept at the stabilization temperature.

In the present invention, each light source (12B,
13B, 14B) has a power source (11) connected thereto, and the power source of each light source (12B, 13B, 14B) is sequentially turned on at intervals of several seconds, so that the required power source (1
Since the power of 1) can be suppressed and the rising current at power-on can be suppressed, an increase in power consumption can be avoided.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings.

(1) First Embodiment Referring to FIG. 1, in an exhaust control device 10 according to a first embodiment of the present invention, lamp houses 12, 13 and 14 respectively connected to a power supply 11 are respectively provided in a housing and temperature. Sensor 1
3.5A with 2A, 13A and 14A respectively
W] mercury lamps 12B, 13B and 14B are installed and configured.

Further, in each of the lamp houses 12, 13 and 14, the exhaust passages 15A, 15B and 15C of the exhaust pipe 15 branched into three exhaust passages 15A, 15B and 15C selected to have the same length and diameter are provided. Each is installed. Motor dampers 16, 17 and 18 having opening / closing valves 16A, 17A and 18A are provided inside the exhaust passages 15A, 15B and 15C, respectively. By opening / closing the opening / closing valves 16A, 17A and 18A, the exhaust passages 15A are respectively formed. , 15B and 15C can be opened and closed.

The exhaust pipe 15 has an exhaust amount adjusting valve 19
The exhaust amount adjusting valve 19 is adapted to adjust the amount of exhaust of the exhaust fan 20 by adjusting the opening degree of the valve.
The exhaust fan 20 is attached to the exhaust amount adjusting valve 19, and the fan is rotated at a constant rotation speed to perform the exhaust operation. Thus, in this exhaust control device 10, by operating the exhaust fan 20, each lamp house 1 is passed through each exhaust path 15A, 15B and 15C of the exhaust pipe 15.
The interior of 2, 13 and 14 may be evacuated.

The temperature sensors 12A, 13A and 14A detect the temperatures of the mercury lamps 12B, 13B and 14B, respectively, and when the temperatures of the mercury lamps 12B, 13B and 14B reach the stabilization temperature, a control unit is supplied via the power source 11. 21 are temperature detection signals S12, S13 and S1 respectively.
4 is sent.

The control unit 21 has a temperature detection signal S12,
When receiving S13 or S14, an exhaust operation start signal S15 is sent to the exhaust fan 20. Further, based on the received temperature detection signal S12, S13 or S14, the temperature sensor 12 that has sent the temperature detection signal S12, S13 or S14.
Lamphouse 12, 13 having A, 13A or 14A
Alternatively, the valve opening signal S16, S17 or S18 is sent to the motor dampers 16, 17 or 18 in the exhaust paths 15A, 15B or 15C corresponding to 14 or 14, respectively. The control unit 21 receives the temperature detection signal S12, S13 or S14 from each of the temperature sensors 12A, 13A or 14A.
An exhaust amount adjustment signal S19 for adjusting the opening degree of the exhaust amount adjusting valve 19 is sent according to the number of mercury lamps that have reached the stabilization temperature.

The exhaust fan 20 has an exhaust operation start signal S15.
The exhaust operation is started based on. Motor damper 16, 1
7 and 18 are valve opening signals S16, S17 and S, respectively.
18 receives the on-off valves 16A, 17A and 1 respectively.
Open 8A. The exhaust gas amount adjusting valve 19 receives the exhaust gas amount adjusting signal S19 from the control unit 21 (that is, the number of mercury lamps that have reached the stabilization temperature), and the mercury lamps 12B and / or 13B that have reached the stabilization temperature. Alternatively, the opening degree of the valve is adjusted so that 14B can maintain the stabilized temperature, and the amount of exhaust gas exhausted from the exhaust fan 20 is adjusted.

The exhaust fan 20 has at least each of the mercury lamps 12B, 13B and 14B when the mercury lamps 12B, 13B and 14B reach the stabilization temperature.
The exhaust amount is designed to be such that the temperature can be maintained at the stabilized temperature.

Thus, the exhaust control device 10 opens and closes the on-off valves 16A, 17A and 18A of the motor dampers 16, 17 and 18 to open the lamp houses 12 and 1 respectively.
The exhaust in 3 and 14 can be managed separately. Also, depending on the number of mercury lamps that have reached the stabilization temperature, the exhaust fan 20
The amount of exhaust discharged from the exhaust gas can be adjusted by the exhaust amount adjusting valve 19 so that the mercury lamps 12B and / or 13B and / or 14B that have reached the stabilization temperature can maintain the stabilization temperature.

In the above configuration, the exhaust control device 1
At 0, the mercury lamps 12B, 13B, and 14B are turned on in this order at intervals of several seconds. As a result, the mercury lamp 12B,
The temperature of 13B and 14B gradually rises, and the mercury lamp 1
When 2B reaches the stabilized temperature (about 5 minutes after the power is turned on), the temperature detection signal S12 is sent to the control unit 21 via the power supply 11.

The control unit 21 receives the temperature detection signal S1.
2 receives motor damper 16, displacement control valve 1
The valve opening signal S16, the exhaust amount adjustment signal S19, and the exhaust operation start signal S15 are sent to the exhaust gas 9 and the exhaust fan 20, respectively. As a result, the on-off valve 16A of the motor damper 16 is opened and the exhaust fan 20 starts the exhaust operation, and the interior of the lamp house 12 is exhausted via the exhaust path 15A. In this case, the control unit 21 adjusts the opening degree of the exhaust amount adjusting valve 19 so that the temperature of the mercury lamp 12B of the lamp house 12 can maintain the stabilization temperature.

Accordingly, the mercury lamp 1 which has reached the stabilization temperature
Exhaust path 15 corresponding to the lamp house 12 having 2B
Only the opening valve 16A of the motor damper 16 of A is opened, and the exhaust amount exhausted from the exhaust fan 20 is adjusted by the exhaust amount adjusting valve 19 so that the mercury lamp 12B can maintain the stabilizing temperature. The mercury lamp 12B can reach the stabilization temperature without overheating the lamp 12B.

Subsequently, the mercury lamp 1 in the lamp house 13
When 3B reaches the stabilized temperature, the temperature sensor 13A sends a temperature detection signal S13 to the control unit 2 via the power supply 11.
Sent to 1. Upon receiving the temperature detection signal S13, the control unit 21 sends a valve opening signal S17 and an exhaust amount adjustment signal S19 to the motor damper 17 and the exhaust amount adjusting valve 19, respectively. As a result, the opening / closing valve 17B of the motor damper 17 is opened, and the interior of the lamp house 13 is exhausted through the exhaust passage 15B. In this case, the control unit 21 is the mercury lamp 1 in the lamp houses 12 and 13.
The valve opening degree of the exhaust amount adjusting valve 19 is adjusted so that 2B and 13B can each hold the stabilization temperature.

Accordingly, the mercury lamp 1 which has reached the stabilization temperature
Exhaust path 15 for lamp house 13 with 3B
Since the opening valve 17A of the motor damper 17 of B is opened and the exhaust amount exhausted from the exhaust fan 20 is adjusted by the exhaust amount adjusting valve 19 so that the mercury lamps 12B and 13B can maintain the stabilizing temperature, Mercury lamp 1
It is possible to reach the stabilization temperature of the mercury lamp 13B without overheating the 3B, and to keep the mercury lamp 13B at the stabilization temperature without overcooling the mercury lamp 12B already held at the stabilization temperature. Can be made.

Subsequently, the mercury lamp 1 in the lamp house 14
4B reaches the stabilized temperature, the temperature sensor 14A sends a temperature detection signal S14 to the control unit 2 via the power supply 11.
Sent to 1. Upon receiving the temperature detection signal S14, the control unit 21 sends a valve opening signal S18 and an exhaust amount adjustment signal S19 to the motor damper 18 and the exhaust amount adjusting valve 19, respectively. As a result, the opening / closing valve 18B of the motor damper 18 is opened, and the interior of the lamp house 14 is exhausted via the exhaust passage 15C. In this case, the control unit 21 adjusts the opening degree of the exhaust amount adjusting valve 19 so that the mercury lamps 12B, 13B and 14B in the lamp houses 12, 13 and 14 can maintain the stabilizing temperatures, respectively.

Accordingly, the mercury lamp 1 which has reached the stabilization temperature
Exhaust path 15 corresponding to the lamp house 14 with 4B
The exhaust valve 18A of the C motor damper 18 is opened, and the exhaust amount of the exhaust fan 20 is adjusted by the exhaust amount adjusting valve 19 so that the mercury lamps 12B, 13B and 14B can maintain the stabilizing temperature. . For this reason, the mercury lamp 14B is not overheated.
B can reach the stabilization temperature. In addition, the mercury lamps 12B and 13 already held at the stabilization temperature
The mercury lamp 14B can be maintained at the stabilization temperature without supercooling B.

Thus, in the exhaust control device 10, the mercury lamps 12B, 13B, and 14B can be individually brought to the stabilization temperature without being overheated with a simple structure, and are already kept at the stabilization temperature. The mercury lamp that has newly reached the stabilization temperature can be maintained at the stabilization temperature without supercooling the mercury lamp. Further, in the exhaust control device 10, the mercury lamps 12B, 13B and 1
By sequentially turning on the power source of 4B at intervals of several seconds, the required power of the power source 11 can be suppressed and the rising current at the time of turning on the power source can be suppressed, so that an increase in power consumption can be avoided.

According to the above configuration, each lamp house 1
Motor dampers 16, 17 and 18 having open valves 16A, 17A and 18A, respectively, are provided in the exhaust passages 15A, 15B and 15C corresponding to Nos. 2, 13 and 14 and, depending on the number of mercury lamps that have reached the stabilization temperature. The amount of exhaust gas exhausted from the exhaust fan 20 is adjusted to the exhaust amount control valve 1
It was adjusted according to 9. As a result, each of the mercury lamps 12B, 13B, and 14B can be individually brought to the stabilization temperature without being overheated, and the mercury lamps already held at the stabilization temperature can be newly cooled without being overcooled. The mercury lamp that has reached the stabilization temperature can be kept at the stabilization temperature. Thus, even when a plurality of lamp houses 12, 13 and 14 are used, it is possible to realize an exhaust control device that can stably turn on each of the mercury lamps 12B, 13B and 14B with a simple configuration.

(2) Second Embodiment In FIG. 2 in which parts corresponding to those in FIG. 1 are assigned the same reference numerals, in an exhaust control device 30 according to the second embodiment, an exhaust fan 20 is directly connected to an exhaust pipe 15. Has been done,
An inverter 32 is connected between the control unit 31 and the exhaust fan 20 to control the rotation speed of the fan of the exhaust fan 20.

The control unit 31 is a lamp house 12, 1
Each time the temperature detection signal S12, S13 or S14 is received from the temperature sensor 12A, 13A or 14A of 3 or 14,
A frequency control signal S31 for controlling the frequency of the inverter 32 is sent to the inverter 32 so that the fan rotation speed of the exhaust fan 20 is set in accordance with the number of mercury lamps that have reached the stabilization temperature. The inverter 32 sends a rotation speed control signal S32 corresponding to the frequency control signal S31 to the exhaust fan 20, and the exhaust fan 20 rotates the fan at a rotation speed corresponding to the rotation speed control signal S32 to perform an exhaust operation. Has been done.

In the above configuration, the exhaust control device 3
At 0, when the mercury lamp 12B reaches the stabilization temperature after the power source 11 is turned on at intervals of several seconds in the order of the mercury lamps 12B, 13B, and 14B, the control unit 31 causes the motor damper 16 to detect the temperature based on the temperature detection signal S12. Valve open signal S
16 is transmitted. Then, since the frequency control signal S31 for controlling the frequency of the inverter 32 is sent to the inverter 32 so as to rotate the fan of the exhaust fan 20 at a rotation speed such that the temperature of the mercury lamp 12B can maintain the stabilized temperature, The inside of the lamp house 12 is a mercury lamp 12B.
Is exhausted by the exhaust fan 20 so that the stabilization temperature can be maintained.

Subsequently, when the mercury lamp 13B reaches the stabilization temperature, the control unit 31 sends a valve opening signal S17 to the motor damper 17 based on the temperature detection signal S13, and the mercury lamps 12B and 13B are stabilized. The frequency control signal S31 for controlling the frequency of the inverter 32 is sent to the inverter 32 so as to rotate the fan of the exhaust fan 20 at a rotation speed capable of holding Therefore, the interiors of the lamp houses 12 and 13 are exhausted by the exhaust fan 20 so that the mercury lamps 12B and 13B can maintain the stabilization temperature.

Similarly, when the mercury lamp 14B reaches the stabilization temperature, the control unit 31 sends a valve opening signal S18 to the motor damper 18 based on the temperature detection signal S14 and stabilizes the mercury lamps 12B, 13B and 14B. A frequency control signal S31 for controlling the frequency of the inverter 32 is sent to the inverter 32 so as to rotate the fan of the exhaust fan 20 at a rotation speed capable of holding the liquefied temperature. Therefore, the interiors of the lamp houses 12, 13 and 14 are exhausted by the exhaust fan 20 so that the mercury lamps 12B, 13B and 14B can maintain the stabilization temperature.

Therefore, in the exhaust control device 30, the temperatures of the mercury lamps 12B, 13B and 14B can be individually reached to the stabilization temperature without being overheated.
A mercury lamp that has newly reached the stabilization temperature can be maintained at the stabilization temperature without supercooling the mercury lamp that is already maintained at the stabilization temperature.

According to the above configuration, each lamp house 1
Motor dampers 16, 17 and 18 having open valves 16A, 17A and 18A, respectively, are provided in the exhaust passages 15A, 15B and 15C corresponding to Nos. 2, 13 and 14 and, depending on the number of mercury lamps that have reached the stabilization temperature. The amount of exhaust gas exhausted from the exhaust fan 20 is adjusted by adjusting the rotation frequency of the exhaust fan 20. As a result, each of the mercury lamps 12B, 13B, and 14B can be individually brought to the stabilization temperature without being overheated, and the mercury lamps already held at the stabilization temperature can be newly cooled without being overcooled. The mercury lamp that has reached the stabilization temperature can be kept at the stabilization temperature. Thus, even when using a plurality of lamp houses 12, 13 and 14,
The mercury lamps 12B, 13B and 14B have a simple structure.
It is possible to realize an exhaust control device capable of stably lighting each of the above.

(3) Other Embodiments In the above-mentioned first and second embodiments, the exhaust amount adjusting valve 19 and the inverter 32 are used as the exhaust amount adjusting means for adjusting the exhaust amount exhausted from the exhaust means. Although the case has been described, the present invention is not limited to this, and the same effects as those of the above-described embodiment can be obtained by configuring the exhaust control device 40 shown in FIG. Can be obtained.

In the case of this exhaust control device 40, an exhaust pipe 41
The exhaust passages 41A, 41B and 41C are provided with openings 42A, 43A and 44A having a predetermined size, respectively, and the exhaust passages 41A, 41B and 41C are connected to the mercury lamps 12B, 13B and 41C, respectively. 14B sequentially reach the stabilization temperature, the mercury lamps 12B, 13
The length and diameter are selected so that B and 14B can hold the stabilization temperature.

Further, the exhaust paths 41A, 41B and 41C are provided with motor dampers 42, 43 and 44 adapted to open or close the openings 42A, 43A and 44A, and these motor dampers 42, 43 and 44 are controlled. Control signals S42 and S43 sent from the unit 45
Opening and closing are controlled by S44 and S44. Further, the fan of the exhaust fan 20 is adapted to rotate at a constant rotational speed.

In practice, when the mercury lamp 12B reaches the stabilization temperature, the opening 42A is opened by the motor damper 42.
Is closed and the exhaust passage 41A is opened. At this time, the exhaust gas flow rate in the exhaust gas passage 41A becomes an exhaust gas flow rate capable of maintaining the mercury lamp 12B at the stabilization temperature due to its diameter and length. Then, when the mercury lamp 13B reaches the stabilization temperature, the opening 43A is closed by the motor damper 43 and the exhaust passage 41B is opened. At this time, the exhaust gas flow rate in the exhaust gas passages 41A and 41B is set to an exhaust gas flow rate capable of maintaining the mercury lamps 12B and 13B at the stabilization temperature due to the diameter and the length thereof. The same applies to the case where the mercury lamp 14B reaches the stabilization temperature.

Further, in the above-mentioned first and second embodiments, the degree of opening of the exhaust amount adjusting valve 19 and the inverter 3 are set according to the number of mercury lamps which have reached the stabilization temperature.
The case where the amount of exhaust gas exhausted from the exhaust fan 20 is adjusted by adjusting the frequency of 2 has been described, but the present invention is not limited to this, and the point is that each mercury lamp 12B, 13B.
And 14B are individually reached to the stabilization temperature without being overheated, and the mercury lamp newly reaching the stabilization temperature is brought to the stabilization temperature without supercooling the mercury lamp already held at the stabilization temperature. It suffices if the amount of exhaust gas exhausted from the exhaust fan 20 can be adjusted so that it can be held.

Further, in the above-mentioned first and second embodiments, the case where the lengths and diameters of the exhaust passages 15A, 15B and 15C are selected to be the same has been described, but the present invention is not limited to this, and the exhaust gas is not limited to this. The lengths and diameters of the paths 15A, 15B and 15C may be selected as different lengths and diameters.
Further, in the above-described embodiment, the case where the 3.5 [kW] mercury lamps 12B, 13B and 14B are used is described, but the present invention is not limited to this, and a 4.5 [kW] mercury lamp or the like may be used as needed. The number may be changed, and a mercury lamp having a different Watt number may be used as each of the mercury lamps 12B, 13B and 14B. In this case, it is desirable to select the length and diameter of the exhaust path according to the number of watts. Further, in the above-mentioned embodiment, the case where the three mercury lamps 12B, 13B and 14B are used has been described, but the present invention is not limited to this, and the above-mentioned embodiment can be performed by using two or four or more mercury lamps. The same effect as the example can be obtained.

Further, in the above-mentioned embodiment, when the mercury lamps 12B, 13B and 14B respectively reach the stabilization temperature, the temperature detection signals S12, S13 and S14 are respectively controlled by the temperature sensors 12A, 13A and 14A. The case of sending to the temperature sensors 12A, 31 and 45 has been described, but the present invention is not limited to this, and the temperature sensors 12A, 1A.
Control units 21, 31, 45 from 3A and 14A
Alternatively, the temperature detection signal may be sent. In this case, the control units 21, 31 and 45 determine whether or not the mercury lamp has reached the stabilization temperature based on the received temperature detection signal.

Further, in the above-mentioned embodiment, the mercury lamps 12B, 13B and 14B are used as the light source utilizing the discharge.
However, the present invention is not limited to this, and various other light sources can be applied as a light source utilizing discharge as long as it can be used as exposure light. Further, in the above-described embodiment, the motor dampers 16, 17 and 1 are provided between the exhausts provided in the respective light source units as exhaust passage opening / closing means for opening / closing the exhaust passages of the exhaust pipes.
8, the case where the motor dampers 42, 43 and 44 are used has been described, but the present invention is not limited to this, and various other exhaust path opening / closing means can be applied as the exhaust path opening / closing means.
Furthermore, in the above-described embodiment, the case where the power sources of the respective light sources are sequentially turned on at intervals of several seconds has been described, but the present invention is not limited to this, and the power sources of the respective light sources may be turned on at the same time.

[0046]

As described above, according to the present invention, based on the temperature detection signal sent from the temperature detection means, the light source unit which has started the exhaust operation by the exhaust means and has reached the stabilization temperature of the light source. By sequentially opening the corresponding exhaust path opening / closing means, and adjusting the exhaust volume exhausted from the exhaust means by the exhaust volume adjusting means so that the light sources that have reached the stabilization temperature maintain the stabilization temperature. , Each light source can be individually brought to the stabilization temperature without being overheated, and the stabilization temperature is newly reached without supercooling the light source already held at the stabilization temperature. The light source can be maintained at the stabilizing temperature, and thus even if a plurality of light source units having a light source using discharge are used, each light source can be stably turned on with a simple configuration. That it can achieve an exhaust control device.

[Brief description of drawings]

FIG. 1 is a block diagram showing the configuration of an exhaust control device according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing the configuration of an exhaust control device according to a second embodiment of the present invention.

FIG. 3 is a block diagram showing a configuration of an exhaust control device according to another embodiment.

FIG. 4 is a block diagram showing a configuration of a conventional exhaust control device.

[Explanation of symbols]

10, 30, 40 ... Exhaust control device, 11 ... Power supply, 1
2, 13, 14 ... Lamphouse, 12A, 13A, 1
4A ... Temperature sensor, 12B, 13B, 14B ... Mercury lamp, 15, 41 ... Exhaust pipe, 15A, 15B, 15
C, 41A, 41B, 41C ... Exhaust path, 16, 1
7, 18, 42, 43, 44 ... Motor damper, 19 ...
… Exhaust volume control valve, 20… Exhaust fan, 21, 3
1, 45 ... Control unit, 32 ... Inverter, 42
A, 43A, 44A ... Opening.

Claims (2)

[Claims] 1. An exhaust control device for controlling exhaust gas in each light source unit in an exposure apparatus having a plurality of light source units each having a light source utilizing a discharge in a housing, wherein each exhaust pipe is provided in each light source unit. An exhaust passage opening / closing means for opening / closing an exhaust passage of each exhaust pipe, an exhaust means for exhausting the inside of each light source unit via each exhaust passage, and an exhaust amount exhausted from the exhaust means. An exhaust amount adjusting means for adjusting, a temperature detecting means for detecting the temperature of each of the light sources and sending a temperature detection signal for each of the light sources, and an exhaust operation by the exhaust means based on the temperature detection signal. When the exhaust path opening / closing means of the exhaust pipe corresponding to the light source unit that has started and reached the stabilization temperature of the light source is sequentially opened, and the stabilization temperature is reached. Exhaust control device wherein the light source is characterized in that it comprises a control means for controlling the exhaust quantity adjusting means so as to retain the stabilization temperature. 2. The exhaust control device according to claim 1, further comprising a power source to which each of the light sources is connected, and the power source of each of the light sources is sequentially turned on at intervals of several seconds.