JPH09210692A - Supporting structure for circular vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simplified and compact supporting structure which supports a circular vibrator without blocking its vibration. SOLUTION: A circular vibrator 1 whose both ends are open in a Z axis direction vibrates in both X and Y axis directions, and it is supported on a supporting substrate by connecting a leg part 3a with a plurality of supporting wires 3 connecting to the substrate 4. On one end face 1a of the vibrator 1, a bent arm part 3b like L shape of at least one wire 3 is connected on a virtual segment forming an desired angle of θ against the X axis, and the arm part 3a is extended in a direction of excluding an angle of about -θ deg. and (180-θ) deg. against the virtual segment.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a simple and small-sized support structure for supporting an annular vibrator in a vibration gyro or the like applied to detection of angular velocity without disturbing its vibration.

[0002]

2. Description of the Related Art For example, as shown in FIG.
A ring-shaped vibrator 10 which is provided with piezoelectric elements 201, 202, 203 for driving, returning, and detecting on the outer peripheral surface of a ring-shaped body made of metal, glass, or the like and open at both ends in the Z-axis direction.
In principle, 1 is alternated so that its cross-sectional shape becomes a flat elliptical shape in each of the X-axis direction and the Y-axis direction, as shown by the phantom line in FIG. 7 (b). Is vibrated.

By the way, since there is no node in the vibration of such a ring-shaped vibrator 101 whose both ends in the Z-axis direction are opened, the free vibration of the ring-shaped vibrator 101 is ensured, and the ring-shaped vibrator 101 is still kept.
It is extremely difficult to support 101 on a support base or the like. Therefore, conventionally, as shown in FIG. 7 (c), one open end of the ring-shaped oscillator 101 is closed to form a cup, and the closed end wall is The circular vibrator 101 is supported by connecting the lower end of one connected support rod 300 to the support base 400.

[0004]

However, in such a support structure, since one end of the ring-shaped vibrator 101 is closed, the vibration of the ring-shaped vibrator 101 is suppressed on the closed side, and the vibration is suppressed. It becomes difficult to provide stable vibration of the child 101. Therefore, in such a case, it is necessary to increase the size of the ring-shaped vibrator 101 in the Z-axis direction in order to reduce the influence of closing one end, and this is also compatible with the existence of the support rod 300 extending in the Z-axis direction. Moreover, the occupied space in the Z-axis direction becomes large, and it is substantially impossible to downsize the device including the support structure.

An object of the present invention is to provide a simple and compact support structure capable of supporting an annular oscillator without disturbing its vibration, and to provide a device including the support structure in a sufficiently small size. If it is feasible, it will be.

[0006]

A support structure for a ring-shaped vibrator according to the present invention has a ring-shaped vibration that opens at both ends in the Z-axis direction of a three-dimensional orthogonal coordinate system and vibrates in both the X-axis direction and the Y-axis direction. The child is supported by a plurality of supporting filaments in which the upright legs are connected to a supporting substrate,
At one end face located in the XY plane or in the vicinity thereof, an arm portion of at least one supporting wire that bends at a substantially right angle from the upright leg is viewed at the center of the annular vibrator, and On the other hand, connect them on a virtual line segment that forms an arbitrary angle θ °,
The arm portion extends substantially in the directions other than the angle −θ ° and the angle (180 −θ) ° with respect to the virtual line segment. Here, preferably, the arm portion is substantially on the virtual line segment at an angle (−θ + 90) ° or an angle (−θ−90).
Extend in the direction of °.

[0007]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of the present invention. In the figure, reference numeral 1 denotes a ring-shaped vibrator having a substantially annular shape. The ring-shaped vibrator 1 is made of, for example, a metal material such as Fe-Ni alloy, Cu-Be alloy, Al, fused silica, glass, ceramics or the like. The pair of piezoelectric elements 2a and 2b are provided on the outer peripheral surface of the annular body that is open at both ends in the Z-axis direction by bonding or the like.

Reference numeral 3 shows each of four supporting wires in the drawing. Each of the supporting wires 3 functioning to connect the ring-shaped vibrator 1 to the supporting substrate 4 has a leg portion 3a and a portion from the leg portion 3a. It has a substantially L-shape with a right-angled arm portion 3b. The supporting wire 3 has the leg portions 3a in an upright posture and the leg ends are welded,
The arm 3b is fixed to the support substrate 4 by soldering, bonding, or the like, and the arm 3b is also welded or soldered to one end surface of the annular vibrator 1 located here in the XY plane, here the upper end surface 1a.
The ring-shaped vibrator 1 is supported on the support substrate by being fixed by adhesion or the like.

The ring-shaped vibrator 1 thus supported is flattened alternately in the X-axis direction and the Y-axis direction by the action of the piezoelectric elements 2a and 2b, as described in the prior art. It vibrates so that it exhibits an almost elliptical shape.

By the way, when such vibration of the ring-shaped vibrator 1 is performed, as shown in a partial plan view of FIG.
With the center of the ring-shaped oscillator 1 in the plane as the coordinate center 0, the ring-shaped oscillator 1 is located at an arbitrary angle θ ° from 0X.
Is a composite result of the displacements in the X-axis direction and the Y-axis direction, and as a result of the virtual line segment forming the angle θ °, as shown by the arrows A and B in the figure, the angle is approximately −θ ° and For example, at a position where an arbitrary angle θ ° is 0 °, the combined displacement occurs in the directions of 0 ° and 180 °, and the angle θ ° is 90 °.
At the position of ± 90 °, and the angle θ ° is 45 °
At the position of, the combined displacements occur in the directions of −45 ° and 135 °, respectively.

Therefore, here, the arm portion 3b of the supporting wire 3 is used.
At an arbitrary angle θ °, the upper end surface 1a of the annular vibrator 1
When connecting to the arm, as shown in FIG. 1 (c), the arm 3b
Of the synthetic displacement as described above, that is, a direction substantially other than the angle −θ ° and the angle (180 −θ) °.
The arm portion 3b is prevented from being subjected to compressive and tensile forces, and the leg portion 3a is prevented from being subjected to bending force, so that the vibration restraining force exerted by the supporting wire 3 on the annular vibrator 1 is sufficiently reduced.

In other words, the legs of the supporting wire 3
If the bending force as described above acts on 3a,
The bending reaction force of 3a acts on the annular vibrator 1 as a large vibration restraining force via the arm portion 3b, while the annular vibrator 1
As described above, when the extending direction of the arm portion 3b connected to is approximately a direction other than the angle −θ ° and the angle (180 −θ) °, that is, the combined displacement direction of the ring-shaped vibrator 1 matches. If not, a bending force acts on the arm 3b, and this bending force causes torsional deformation of the leg 3a, so that the vibration restraining force is much smaller than that in the above case, and Since the distance from the connection point P of the arm 3b to the ring-shaped vibrator 1 to the center of the leg 3a is much larger than the diameter of the supporting wire 3, the leg 3a exerts a twisting reaction on the connection point P. The force can be made even smaller, and therefore the ring oscillator 1
Both ends in the Z-axis direction can be freely vibrated and displaced.

More specifically, first, the resistance to bending is represented by the bending stiffness EI (E is the elastic modulus of elasticity, I is the second moment of area), and the resistance to twisting is the torsional stiffness GI (G Can be expressed as the shear elastic modulus), where G = E / {2 (1 + 1 /
m)} [m is a Poisson number, generally about 3 to 4], so G becomes about 0.4 times E, and therefore,
It can be said that the resistance to torsion is smaller,
Secondly, the position of the connection point P is necessarily the leg portion 3a.
It can be said that since it is located outside the diameter of the center of the, the reaction force acts less on the twist of the leg portion 3a corresponding to the smaller diameter side, like the force transmission by the wheel axle. .

This means that the extending direction of the arm portion 3b connected to the annular vibrating body 1 at a position of an arbitrary angle θ ° is a direction orthogonal to the synthetic displacement direction of the annular vibrator 1, that is, an arbitrary angle. The angle (−θ
This is especially noticeable when the direction is ± 90) °. For example, when the angle θ ° is set to 45 °, the extension angles of the arm portion 3b with respect to the virtual line are set to 45 ° and −135 °, so that the simple and simple configuration is achieved, and The vibration restraint force can be minimized. That is, when a force acts in a direction orthogonal to the extending direction of the arm portion 3b, only the torsional deformation occurs in the leg portion 3a. Therefore, when the leg portion 3a is also bent and deformed. In comparison, the deformation restraint force can be further reduced.

Therefore, here, the vibration of the annular vibrator 1 can be sufficiently stabilized without increasing the dimension in the Z-axis direction. When the annular vibrator 1 is used in a vibrating gyro, It is possible to exhibit stable and excellent sensitivity. In addition, here, it is completely unnecessary to project the supporting wire 3, particularly the leg portion 3a thereof, in the Z-axis direction beyond the end face of the annular vibrator 1, so that the supporting structure is also included. The miniaturization of the entire device can be sufficiently achieved.

FIG. 2 is a view showing another embodiment of the present invention, in which two arm portions 3b of each of the four supporting filaments 3 are connected to the annular vibrator 1 in the drawing. The upper and lower end faces 1a and 1b are connected to each other as described above, and the leg ends of the respective leg portions 3a are arranged substantially at the center of the annular vibrator 1 in the Z-axis direction. It is connected to the eggplant support substrate 4. According to this support structure, it is possible to realize the same function as that described above, and still further downsize the entire device based on the difference in the arrangement position of the support substrate 4.

FIG. 3 is a view showing still another embodiment, in which the arm portions 3b of the two supporting filaments 3 are arranged at the upper end surface 1a of the annular vibrator 1 in the same manner as described with reference to FIG. On the other hand, the other two upright supporting filaments 30 are directly connected to the lower end surface 1b thereof.

In this support structure, two upright supporting filaments are used.
No. 30 does not satisfy the condition described with reference to FIG. 1, but the other two supporting filaments 3 satisfy that condition, so that they are effective for generating stable vibration of the annular vibrating body 1. Can contribute to.

4, 5 and 6 are partial cross-sectional views showing another example of connecting the supporting wire 3 to the ring-shaped vibrator 1. In the example shown in FIG. It is located inside the child 1. Further, in the example shown in FIG. 5, the tip of the arm portion 3b is on the outer peripheral surface of the ring-shaped vibrator 1, and in the example shown in FIG. 6, the bent portion of the tip portion of the arm portion 3b is under the hook-shaped bend. Are respectively connected to the inner peripheral surface of the ring-shaped vibrator 1.

In any of these examples, the extending direction of the arm portion 3b in plan view is the same as that described with reference to FIG. Therefore, also by these connection examples, it is possible to bring about the same effects as those shown in FIG.

The present invention has been described above based on the illustrated example, but the shape of the ring-shaped vibrator may be a polygonal ring, a deformed ring, or the like. It is also possible to connect a plurality of supporting filaments to one point on the end face of the ring-shaped oscillator, and for example, approximately L
It is also possible to form a substantially U-shape by connecting two U-shaped supporting wires at a single point. Also, when the two supporting wires are integrally formed in a U shape in advance, the vibrator is formed. It can also be connected to the end face.

Here, the number of supporting filaments can be appropriately selected from three or more, and in this case, at least one supporting filament satisfies the required condition. I shall. Further, the number of piezoelectric elements, formation positions, etc. of the ring-shaped vibrator can be appropriately changed as required.

[0023]

As described above, according to the present invention, when the ring-shaped oscillator vibrates, a bending force is applied to the arm portion of the supporting wire and a leg portion is twisted. Since each force acts, the leg can sufficiently reduce the reaction force exerted on the arm connecting portion to the ring-shaped vibrator, and as a result, the free vibration of the ring-shaped vibrator is allowed. Will be.

Therefore, it is possible to stabilize the vibration posture of the ring-shaped vibrator without increasing the size of the ring-shaped vibrator in the Z-axis direction, and when it is applied to the vibration gyro,
It can provide stable and excellent sensitivity. Moreover, here, the supporting wire is moved across the end face of the ring-shaped vibrator by Z
Since it is not necessary to project the element in the axial direction for a long time, it is possible to sufficiently reduce the size of the entire device including the support structure in combination with the reduction in size of the vibrator.

[Brief description of drawings]

FIG. 1 is a diagram showing one embodiment of the present invention.

FIG. 2 is a diagram showing another embodiment of the present invention.

FIG. 3 is a diagram showing still another embodiment of the present invention.

FIG. 4 is a partial cross-sectional view showing another example of connection of the supporting wire.

FIG. 5 is a partial cross-sectional view showing another example of connection of supporting wires.

FIG. 6 is a partial cross-sectional view showing still another example of connection of the supporting wire.

FIG. 7 is a diagram showing a conventional support structure for an annular vibrator.

[Explanation of symbols]

 1 Annular vibrator 1a Upper end surface 1b Lower end surface 2a, 2b Piezoelectric element 3 Support wire 3a Leg 3b Arm 4 Support substrate

Claims (2)

[Claims] 1. A plurality of ring-shaped vibrators, each of which has a leg portion connected to a support substrate, for supporting an annular vibrator which is open at both ends in the Z-axis direction of a three-dimensional orthogonal coordinate system and vibrates in both the X-axis direction and the Y-axis direction. A supporting structure for supporting on a supporting substrate by a linear member, wherein at least one supporting linear member is formed substantially at least from a leg portion on one end face of the annular vibrator located in the XY plane or in the vicinity thereof. The arms bent at right angles are connected to a virtual line segment that forms an arbitrary angle θ ° with respect to the X axis when viewed at the center of the annular oscillator, and the arm is A support structure for an annular oscillator that extends in directions other than angles −θ ° and (180 −θ) °. 2. The arm portion on the virtual line segment,
A support structure for an annular oscillator that extends in the direction of angle (-θ + 90) ° or angle (-θ-90) °.