JPH09204654A - Magnetic disk and magnetic disk device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic disk capable of inhibiting the fluctuation in the quantity of floating of a head slider over the surface of the magnetic disk, and provide a magnetic disk device with the magnetic disk. SOLUTION: The load-bearing capacity of a floating type head slider 6 in a data recording region and that in a control-signal recording region are made same to a magnetic disk, 3 in which data, etc., are recorded and produced by a magnetic head loaded on the head slider 6 and which is partitioned radially into the data recording region and the control-signal recording region by irregular sections formed to a surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk in which data and programs are recorded and reproduced by a magnetic head mounted on a flying head slider, and a magnetic disk device equipped with the magnetic disk.

[0002]

2. Description of the Related Art For example, in a computer system, a hard disk device is used as a magnetic disk device. Magnetic films are formed on both surfaces of the magnetic disk built in the hard disk device, and data and the like are tracked on the magnetic film by a magnetic head mounted on a head slider floating above the surface of the magnetic disk. The data and the like recorded on the magnetic film in a track shape are reproduced. The mechanism for driving the flying head slider on which the magnetic head is mounted and the drive for driving the magnetic disk are pre-installed inside the housing, so that data and the like are recorded at a relatively high density. It is also possible to access recorded data and the like at high speed.

However, a magnetic disk built in a conventional hard disk drive has a magnetic film formed on the entire surfaces of both surfaces thereof, and in order to suppress crosstalk from adjacent tracks, data tracks and data tracks are formed. The guard band between them had to be relatively wide. As a result, there is a problem that the track pitch cannot be reduced, and it is difficult to realize a small hard disk device having a large recording capacity.

Furthermore, if the magnetic disk is incorporated in the housing after recording, for example, a clock signal constituting an encoder on the magnetic disk in advance, an attachment error such as eccentricity at the time of assembly occurs, and an accurate position is obtained. It becomes difficult to record data and so on. Therefore, conventionally, after the magnetic disk has been incorporated into the housing, the clock signal and the like forming the encoder are recorded. For this reason, there is a problem that it takes a long time to assemble the hard disk device and the cost is high.

As a magnetic disk device that solves the above problems, the applicant has proposed the following hard disk device (see Japanese Patent Laid-Open No. 6-259709). In the magnetic disk built in this hard disk device, a data recording area (hereinafter, referred to as a data zone) composed of an uneven portion and a control signal recording area (hereinafter,
Servo zones) and are formed radially. In other words, in the data zone, concentric circles are formed so that data tracks for recording data etc. are formed as convex portions, and guard bands for separating adjacent data tracks are formed as concave portions. Has been done. Further, in the servo zone, a gray code for specifying a data track, a clock mark for dividing one round at equal intervals, and a wobbled mark for tracking control of the magnetic head (hereinafter referred to as a servo track) are convex portions. And a space (hereinafter referred to as a servo pit) for partitioning the code and the like is formed as a recess.

At least one of the gray code, the clock mark and the wobbled mark is formed along the rotational trajectory of the magnetic head, and is obtained by reproducing the gray code, the clock mark or the wobbled mark. The operation of recording / reproducing data or the like by the magnetic head is controlled in accordance with the received signal. Also, the magnetic head measures the amount of change corresponding to the eccentricity of the magnetic disk from the signal obtained by reproducing the gray code, clock mark or wobbled mark, and in accordance with the measurement result, data by the magnetic head, etc. The recording / reproducing operation of is controlled.

According to the hard disk device incorporating the magnetic disk having such a structure, since the guard band is formed as a physical concave portion with respect to the data track, there is little possibility that data or the like is reproduced from the guard band. Become. Therefore, it is not necessary to increase the width of the guard band in order to reduce the crosstalk, so that it is possible to narrow the track pitch and increase the recording capacity.

Further, since the gray code, the clock mark or the wobbled mark is formed by the convex portion along the rotation locus of the magnetic head, it can be located at an extremely accurate position by using, for example, optical technology. It is possible to arrange these codes and the like, and it is possible to accurately record and reproduce the data and the like even if the track pitch is narrowed. Also, since the eccentricity of the magnetic disk is measured and the recording / reproducing operation of data etc. is controlled correspondingly, even if the eccentricity due to the mounting error occurs when the magnetic disk is installed in the housing. The magnetic head can be accurately accessed to the data track.

[0009]

According to the latter magnetic disk described above, the servo tracks can be accurately arranged with respect to the data tracks. Therefore, it is possible to easily realize high-density recording, particularly high track pitch density, as compared with the former magnetic disk of the servo signal write system.
The flying-type head slider used for such a magnetic disk for high-density recording needs to be floated at a flying height as small as possible, for example, 50 nm, in order to suppress spacing loss. In addition, the amount of floating fluctuation at that time also needs to be reduced because it causes output fluctuation.

However, the ratio of the convex portion to the concave portion is different between the servo zone and the data zone. The height of the pit is equal to or higher than the height of the texture, and the size of the pit is about several μm, which can be said to be equal to the texture. Thus, since the pattern shape of the servo zone and the pattern shape of the data zone are different, the flying height of the head slider is different between the servo zone and the data zone. Therefore, there is a problem in that the difference in the flying height causes fluctuations in the flying height, making it impossible to stably record and reproduce data and the like by the magnetic head.

In view of the above points, it is an object of the present invention to provide a magnetic disk capable of suppressing the fluctuation of the flying height of the head slider on the surface of the magnetic disk, and a magnetic disk device equipped with the magnetic disk. I am trying.

[0012]

According to the present invention, the above object is a magnetic disk on which data and the like are recorded and reproduced by a magnetic head mounted on a flying type head slider, and the magnetic disk is formed on the surface. In a magnetic disk that is radially divided into a data recording area and a control signal recording area by a concavo-convex portion, this is achieved by making the load capacity of the head slider the same in the data recording area and the control signal recording area.

According to the above structure, since the load capacity directly related to the flying height of the head slider is made uniform over the entire surface of the magnetic disk, the head slider moves from the data zone to the servo zone or from the servo zone to the data zone. In doing so, it is possible to suppress the fluctuation of the flying height.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. The embodiments described below are preferred specific examples of the present invention, and therefore, various technically preferable limitations are added. However, the scope of the present invention is not limited to the following description. It is not limited to these forms unless otherwise stated.

FIG. 1 is a perspective view showing a configuration example of a hard disk drive which is an embodiment of the magnetic disk drive of the present invention. The hard disk drive 1 is provided with a spindle motor 9 disposed behind a plane portion of a housing 2 formed of an aluminum alloy or the like, and a magnetic disk 3 driven to rotate at a constant angular velocity by the spindle motor 9. Have been. Further, an arm 4 is attached to the housing 2 so as to be swingable around a vertical axis 4a. A voice coil 5 is attached to one end of the arm 4, and a head slider 6 is attached to the other end of the arm 4. Magnets 7a and 7b are mounted on the housing 2 so as to sandwich the voice coil 5. Voice coil 5 and magnets 7a and 7b
Thus, a voice coil motor 7 is formed.

In such a configuration, the voice coil 5
When an electric current is supplied from the outside to the arm 4, the arm 4 rotates around the vertical axis 4a based on the force generated by the magnetic fields of the magnets 7a and 7b and the electric current flowing through the voice coil 5. Thereby, the head slider 6 attached to the other end of the arm 4 moves as shown by an arrow X in FIG.
The magnetic disk 3 moves substantially in the radial direction. Therefore, the magnetic head 8 mounted on the head slider 6
(See FIG. 3) performs a seek operation on the magnetic disk 3 to record and reproduce data and the like on predetermined data tracks and the like of the magnetic disk 3.

Here, as shown in FIG. 3, the head slider 6 has rails 6a and 6b acting as air bearing surfaces on both sides of its lower surface, and the rails 6a and 6b have air inflow end sides. Tapered portions 6c and 6d are formed in the. Thus, when the head slider 6 approaches the surface of the rotating magnetic disk 3, the levitation force is increased by the airflow flowing between the rails 6 a and 6 b and the surface of the magnetic disk 3 with the rotation of the magnetic disk 3. receive. The head slider 6
Also, as shown in FIG. 4, the magnetic head 8 floats and runs from the surface of the magnetic disk 3 with a minute distance (flying height) d.

FIG. 5 is a block diagram showing a configuration example of the control unit of the hard disk device shown in FIG. This control unit 1
The 0 clock signal generation unit 11 generates a clock signal from the signal reproduced by the reproduction head 8b of the magnetic head 8, and outputs the clock signal to the tracking servo unit 12 and the reproduction unit 13. The tracking servo unit 12 refers to the clock signal from the clock signal generation unit 11 to generate a tracking error signal by a signal from the reproducing head 8b, and drives the arm 4 in response to the tracking error signal. As a result, the recording head 8a and the reproducing head 8b are tracking-controlled to a predetermined radial position on the magnetic disk 3. The recording unit 14 modulates a recording signal supplied from a circuit (not shown) and records the modulated signal on the magnetic disk 3 via the recording head 8a. Playback unit 13
, Demodulates the recording signal from the reproducing head 8b and outputs it to the above circuit. The tracking servo unit 12 monitors the tracking error signal and controls the recording unit 14 to stop the recording operation when a large shock or the like is applied to the magnetic disk device and the recording head 8a is separated from the data track.

FIG. 6 is a plan view showing an embodiment of the magnetic disk of the present invention, and FIG. 7A is a sectional view in the radial direction.
FIG. 2B is a sectional structural view in the circumferential direction. A data recording area (data zone) and a control signal recording area (servo zone) each having an uneven portion are formed radially on a substrate 31 of the magnetic disk 3 made of synthetic resin, glass, aluminum, or the like. A magnetic film 32 is formed. That is, the data zone is concentric,
For recording data and the like (the data track DT is formed to have a convex portion, and the guard band GB for separating adjacent data tracks DT is formed to have a concave portion. Further, in the servo zone. Is a servo track S such as a gray code for specifying the data track DT, a clock mark for dividing one round at equal intervals, and a wobbled mark for tracking control of the magnetic head.
T is formed so as to be a convex portion, and servo pits SP, which are spaces for partitioning the above-mentioned codes, are formed so as to be a concave portion.

According to such a magnetic disk 3, since the servo zone and the data zone are formed along the movement trajectory when the magnetic head 8 moves in the inner peripheral side direction or the outer peripheral side direction, the seek operation is performed. It is possible to maintain the isochronous property during operation, and to generate a PL for clock generation.
The lock release of the L circuit can be suppressed. In addition, azimuth loss can be suppressed.

FIG. 8 is a sectional structural view showing further details of the magnetic disk shown in FIG. A step of 200 nm, for example, is formed on both surfaces of the substrate 31.
When is made of glass, its thickness is 0.65 mm, and when it is made of synthetic resin, its thickness is 1.2 m.
m. Further, the magnetic film 32 is formed on both surfaces of the substrate 31.
When the substrate 31 is formed of a synthetic resin and the substrate 31 is made of synthetic resin, first, particles of SiO2 (spherical silica), for example, of 0.5 to 100 per μm, preferably about 10 are formed on the substrate 31. Particle layer 32 with particle density of
1 is formed. It is possible to secure rigidity and durability to some extent when the substrate 31 is made of glass or aluminum, but it is necessary to ensure sufficient rigidity and durability when the substrate 31 is made of synthetic resin. Because you can't. Further, when the substrate 31 is made of synthetic resin, the surface of the substrate 31 is rough, so that it is difficult to dispose the magnetic head 8 close to the magnetic film 32 without coming into contact with the magnetic film 32.

As a method of forming the spherical silica particle layer 321, a dipping method is used. The average diameter of the particles at this time is 50 nm or less, preferably 8 nm to 10 nm. When the average diameter is 8 nm, the standard deviation of the particle diameter distribution is 4.3 nm. Since the particle density is determined by the concentration and the pulling rate, it is possible to control the unevenness by controlling this. For example, spherical silica is dispersed in isopropyl alcohol to a concentration of 0.01% by weight, and this is applied to the surface of the substrate at a pulling rate of 125 mm / min. A chrome layer 322 having a thickness of about 80 nm is formed on the particle layer 321. The chromium layer 322 functions as an exchange coupling film, has an effect of improving magnetic characteristics, and can particularly increase coercive force. Further, a cobalt platinum layer 323 having a thickness of about 40 nm is formed on the chromium layer 322. On the cobalt platinum layer 323, a protective film 3 made of SiO 2 having a thickness of about 10 nm is formed.
24 is formed by spin coating or coating. Then, a lubricant 325 is applied on the protective film 324.

One round of the magnetic disk 3 is divided into 60 sectors, and each sector is composed of 14 segments. Therefore, one round is 840 segments. Each segment is divided into a servo zone and a data zone. In the servo zone, as shown in FIG. 9, a gray code GC, a clock mark CM and a wobbled mark WM are formed. A unique pattern UP is further added to the head segment of each sector. However, in one of the 60 sectors, a home index having a function as a PG is recorded instead of the unique pattern UP.

When the width of the clock mark CM in the track direction is 1, the width of the gray code GC is 20, and the width of the unique pattern UP is 16. Gray code GC
Is a code representing an absolute address (data track number) that identifies the data track DT. The clock mark CM is a mark for generating a clock serving as a recording / reproducing reference, and when the reproducing head 8b reproduces the clock mark CM, it outputs a timing signal corresponding to the edge thereof. As shown in FIG. 9, the clock marks CM are radially and continuously formed in the radial direction of the magnetic disk 3.

The wobbled marks WM are arranged so as to deviate between the inner peripheral side and the outer peripheral side with the center line L1 of the data track DT sandwiched therebetween, and are also formed so as to be separated from each other by a predetermined distance in the track direction. When the reproducing head 8b reproduces the wobbled mark WM, it outputs a position pulse corresponding to the edge thereof. By applying the tracking servo so that the level of the position pulse becomes equal, the reproducing head 8b can be arranged on the center line L1 of the data track DT.

At the beginning of the data zone, an ID recording area I
This Z is formed, and the data originally recorded and reproduced is the ID
The data is recorded in the data recording area DZ following the recording area IZ.
The ID recording area IZ is divided into a sector number recording area SZ and a track number recording area TZ. Of these, at least the sector number recording area SZ has a clock mark C
Similar to M, the magnetic disk 3 is continuously formed radially in the radial direction. In the sector number recording area SZ, an 8-bit sector number that specifies a sector is recorded, and in the track number recording area TZ, two 16-bit track numbers that specify the data track DT are recorded. The 40-bit ID data is PR (partial response) (-1, 0, 1) modulated and recorded in the ID recording area IZ. The reproducing head 8b outputs a pulse train by reproducing the ID data recorded in the ID recording area IZ.

The track number recording area TZ is divided into a reproducing operation track number recording area TZa and a recording operation track number recording area TZb. The reproduction operation track number recording area TZa is formed so that the center in the width direction is located on the center line L1 of the data track DT, but the recording operation track number recording area TZb is
The center line L2 is formed so as to be separated from the center line L1 of the data track DT by a distance d in the direction perpendicular to the data track DT (radial direction of the magnetic disk 3). This distance d is set to a smaller value toward the inner circumference side,
The larger the value toward the outer circumference, the larger the value. The same track number is recorded in the reproduction operation track number recording area TZa and the recording operation track number recording area TZb.

A wobbled mark WM for positioning the reproducing head 8b with respect to the center line L1 of the data track DT and a track number recording area TZ for recording operation.
A wobbled mark WM for positioning when the center line L2 of b is traced by the reproducing head 8b is formed in the servo zone. Therefore, in the playback mode,
By tracking-controlling the reproducing head 8b based on the wobbled mark WM, the reproducing head 8b can be scanned along the center line L1 of the data track DT. On the other hand, in the recording mode, the reproducing head 8b is subjected to tracking control in accordance with the tracking error signal obtained by reproducing the wobbled mark WM by the reproducing head 8b, so that the reproducing head 8b is subjected to the recording operation track number recording area TZb. Can be scanned along the center line L2. At this time, the recording head 8a runs along the center line L1 of the data track DT. In this way, the area for recording the sector number or track number is formed in advance,
Since the sector number or track number is recorded there, regardless of the positioning state of the reproducing head 8b,
It is possible to reliably reproduce the sector number or track number.

The above-mentioned magnetic disk 3 can be manufactured by utilizing the optical technique, and a manufacturing method thereof will be described with reference to FIGS. 10 and 11. First, the surface of the glass master 41 is coated with, for example, a photoresist 42. The glass master 41 coated with the photoresist 42 is mounted on a turntable 43 and rotated. For example, only a portion of the photoresist 42 which forms a concave portion is irradiated with a laser beam 44 to perform pattern cutting. After irradiating the laser beam 44, the photoresist 42 is developed to remove the exposed portion of the photoresist 42. Nickel 4 is applied to the surface of the glass master 41 from which the exposed portions of the photoresist 42 have been removed.
5 is plated. The nickel 45 is peeled off from the glass master 41 to form a stamper 46.

Next, the substrate 31 is molded using the stamper 46. Then, a magnetic film 32 is formed on the surface of the substrate 31 by sputtering or the like to form the magnetic disk 3. Then, the magnetic disk 3 is magnetized by the following method.
The magnetic disk 3 is set in the magnetizing device 48, and is rotated and run in the direction indicated by arrow a in FIG. And FIG.
As shown in (A), while applying the first DC current to the magnetizing magnetic head 49, the magnetizing magnetic head 49 is moved in the radial direction on the magnetic disk 3 at the track pitch, and All the magnetic films 32 of the convex portions and the concave portions are once magnetized in the same direction. Then, as shown in FIG.
While applying a second DC current having a polarity opposite to that of the first DC current and having a smaller current value than the first DC current to the magnetizing magnetic head 49, the magnetizing magnetic head 49 is moved to the magnetic disk 3
Only the magnetic film 32 on the convex portion of the magnetic disk 3 is magnetized in the opposite direction by moving it in the upper radial direction at a track pitch, and a positioning signal (wobbled mark, clock mark, etc.) is written. Thus, one magnetizing magnetic head 49
Since the positioning signal can be written by, the exchange work of the magnetizing magnetic head 49 can be omitted, and the productivity of the magnetic disk 3 can be improved.

The magnetic disk 3 having the structure described above.
In designing the flying height of the head slider 6 in the magnetic disk device 1 including the above, variations in the flying height of the head slider 6 due to various mechanical precision when the head slider 6 is incorporated into the magnetic disk device 1 are taken into consideration. There is a need. For example, when the flying height of the head slider 6 is set to 50 nm, the permissible value of the flying fluctuation amount of the head slider 6 for each item is generally specified as follows. That is, ± 10% for variations in processing accuracy of the head slider 6, ± 20% for variations in the load of the head slider 6, ± 10% for variations in Z-height, and the waviness of the substrate 31. ± 10% for
± 10% for warp of substrate 31, ± 10 for seek
%, ± 10% for atmospheric pressure variations, ± 10% for servo zones, -5% for margins, and 35 nm for glide heights.

By the way, of the above items, the load of the head slider 6 is sensitive to the amount of fluctuation in the flying height, and therefore its allowable value is defined to be larger than the other values. However, in recent years, since the processing technique of the suspension for applying a load to the head slider 6 has been improved, the allowable value of the flying variation of the head slider 6 with respect to the variation of the load of the head slider 6 has been corrected to ± 10%. With this modification, the head slider 6 for the servo zone
The permissible value of the floating fluctuation amount can be corrected to ± 20%. Therefore, when the flying height of the head slider 6 is 50 nm, the flying variation of the head slider 6 with respect to the servo zone is 20 nm p-p, preferably 10 nm p-p.
Would be good.

In order to evaluate the fluctuation of the flying height of the head slider 6, it is preferable to directly obtain the flying fluctuation amount. However, since it is necessary to use the convergence calculation in order to obtain the floating fluctuation amount, it is difficult. Therefore, as a parameter for evaluating the fluctuation of the flying height of the head slider 6, the head slider 6 is fixed to an arbitrary flying height and an arbitrary posture, and a load capacity obtained by calculating the pressure received by the head slider 6 at that time is used. Conceivable. Since the load capacitance of the head slider 6 does not use the convergence calculation, it can be calculated more easily than directly calculating the flying fluctuation amount of the head slider 6. However, since the load capacity of the head slider 6 is derived by static numerical analysis, it may be unsuitable as a parameter for analyzing dynamic characteristics such as fluctuation of the flying height of the head slider 6 when passing through the servo zone. There is.

Here, the number of servo zones on the magnetic disk 3 is about 60 to 80, and the size of the servo zone is about 0.2 mm although it differs between the inner circumference and the outer circumference of the magnetic disk 3. Is. The cycle of the servo zones is about 2.5 mm when the number of servo zones is 60.
It is. Since the magnetic disk 3 generally rotates at 3600 rpm, it makes one revolution in 16.7 ms. The head slider 6 is supported by an air film between the rails 6 a and 6 b and the surface of the magnetic disk 3 and is flying. The pressure distribution of the rails 6a and 6b is
Since the area of about 0.2 mm at the rear ends of a and 6b is the largest, the head slider 6 is supported and floated by this area. Therefore, 0.2mm is 2.5mm
It can be considered that the vehicle is running on the uneven portion of 0.2 mm at intervals. From the above, it can be said that the load capacity of the head slider 6 is suitable as a parameter for evaluating the fluctuation of the flying height of the head slider 6.

Therefore, first, the relationship between the load capacity of the head slider 6 and the uneven portion was examined. 13 and 14 are views showing the relationship between the load capacity of the head slider 6 and the ratio of convex portions and concave portions parallel and perpendicular to the traveling direction of the head slider 6, and FIG. 6 is a diagram showing the relationship between the load capacity of the head slider 6 and the ratio of an arbitrary flying height of the head slider 6 to the depths of recesses parallel and perpendicular to the traveling direction of the head slider 6. FIG. 13 and 14
The solid line, chain line, and dotted line in the figure indicate the depth of the recess.

The calculation of the load capacity of the head slider 6 uses the average gap theory. That is, when the ratio of the convex portion and the concave portion parallel to the traveling direction of the head slider 6 and the depth of the concave portion are equal to the ratio of the convex portion and the concave portion perpendicular to the traveling direction of the head slider 6 and the depth of the concave portion. The flying height of the head slider 6 on the surface provided with the parallel uneven portions is larger than the flying height of the head slider 6 on the surface provided with the vertical uneven portions. Further, the head slider 6
The flying height of the head slider 6 on the surface provided by mixing the uneven portion parallel to the traveling direction of the head slider 6 and the vertical uneven portion is the flying amount of the head slider 6 on the surface provided with the parallel uneven portion. Is a value between the flying height of the head slider 6 on the surface provided with the uneven portion that is perpendicular to. The flying height of the head slider 6 decreases as the depth of the parallel recesses and the vertical recesses increases. ("Averaged Reynold
e Equation Extended to Ga
sLubrication Possessing S
surface Roughness in the S
lip Flow Regime: Approxima
te Method and Confirmatio
n Experiments "ASME Journal
l of Tribology, vol. 111, 19
89, pp. 495-503, Mitsuya et
c. reference).

As can be seen from FIGS. 13, 14 and 15, the load capacity of the head slider 6 may differ depending on the direction of the uneven portion and the depth of the concave portion even if the ratio of the convex portion and the concave portion is the same. I understand. Basically, the data track DT and the guard band GB of the data zone of the magnetic disk 3 are uneven portions parallel to the traveling direction of the head slider 6,
Servo track ST and servo pit S in the servo zone
P is an uneven portion perpendicular to the traveling direction of the head slider 6. It is difficult to change the depths of the guard band GB and the servo pits SP in one magnetic disk 3 because the manufacturing process of the magnetic disk 3 becomes complicated. Therefore, in one magnetic disk 3, the guard band G
It is preferable that the B and servo pits SP have the same depth. From the above, equalizing the load capacities of the head slider 6 in the data zone and the servo zone means equalizing the load capacities of the head slider 6 in the concavo-convex portion parallel to the traveling direction of the head slider 6 and the concavo-convex portion perpendicular to the traveling direction of the head slider 6. Nothing else.

As described above, it is easy to obtain the load capacity of the head slider 6, but the actual head slider 6
It is difficult to find the absolute value of the flying height of. Therefore, in order to know how much the difference between the load capacities of the head slider 6 and the actual flying height of the head slider 6 is, first, the difference between the load capacity difference of the head slider 6 and the flying height difference of the head slider 6 is calculated. I investigated the relationship. Here, the first measurement disk is made of glass, and a half-circumferential surface of the disk is provided with an area in which only the data zone pattern is cut, and the remaining half-circumferential surface is cut with any pattern. Not a flat area is provided. The data zone pattern for this glass disk was formed in the same manner as the actual magnetic disk 3. First, apply a resist on the glass disk surface,
The pattern of the data zone is exposed on this resist based on the cutting data. Then, after this exposure, development is performed by, for example, RIE (reactive ion etching) to form a data zone pattern.

The track pitch of the data zone is 4.8μ
m, the track width is 3.2 μm, and the data track D
The ratio between T and the guard band GB, that is, the ratio L between the convex portion and the concave portion.
GR (Land-Groove Ratio) is 2.0
And the depth of the guard band GB, that is, the depth of the recess is 2
00 nm. At this time, from FIG. 15, assuming that the head slider 6 is flying with a flying height of 50 nm, the load capacity of the head slider 6 in the flat area is 3.5, and the load of the head slider 6 in the data zone is The capacity is 2.7. In addition, the reference light serving as the reference is used as the surface of the glass disk (radial width 0.4 mm, radial position 20 mm,
The head slider 6 floats in a flat area measured by using a laser vibrometer which irradiates a flat area provided in 25 mm and 30 mm) and irradiates the measurement light to the rear end of the head slider 6 to obtain a differential. The difference between the amount and the flying height of the head slider 6 in the data zone is 30 nm.
Therefore, the flying height difference of the head slider 6 is 37.5 nm with respect to the load capacity difference 1 of the head slider 6.

Next, by equalizing the load capacities of the head slider 6 in the data zone and the servo zone, it is possible to reduce whether or not the fluctuation of the flying height of the head slider 6 when the head slider 6 passes through the servo zone can be reduced. It was confirmed whether or not it is appropriate to use the load capacity of the head slider 6 as a parameter, which is a static analysis, with respect to the fluctuation of the flying height of the head slider 6 when the head slider 6 passes through the servo zone. The disk for the second measurement is made of glass and has a data zone and a servo zone on the entire circumferential surface of the disk. However, this servo zone is not a real servo track or servo pit, but a simple convex or concave portion. An area in which the repeating pattern is cut is provided. The data zone and servo zone patterns for this glass disk were also formed in the same manner as the actual magnetic disk 3.

The data zone is divided into seven areas in the circumferential direction of the glass disk with the servo zone interposed therebetween.
In each area, the ratio between the data track DT and the guard band GB, that is, the ratio LGR between the convex portion and the concave portion is different as follows. The track pitch of the data zone is 4.8 μm, and the depth of the guard band GB, that is, the depth of the recess is 20.
0 nm. Area No. LGR 1 1.0 2 1.5 3 2.0 4 2.3 5 3.2 6 3.8 3.8 5.5

Unlike the actual servo zone, the servo zones are not formed linearly from the inner circumference to the outer circumference, but are formed in 64 curved lines along the seek locus of the head slider 6. . The depth of the servo pit SP in the servo zone, that is, the depth of the recess is 200 nm, and the ratio of the servo track ST and the servo pit SP is
That is, the ratio LGR between the convex portion and the concave portion is 5.5. The head slider 6 is a general two-rail tapered flat 50% nano slider, and the slider length is 2.0 m.
m, slider width 1.6 mm, rail width 200 μm,
The load is 3.5 gf. Such a head slider 6
Is located at a radius of 29.3 mm of the glass disk, and the relative speed between the head slider 6 and the glass disk is 7 m / s when the glass disk is rotated at 4000 rpm, and the flying height of the head slider 6 is about 50 nm.

FIG. 16 is a diagram showing the relationship between the flying fluctuation amount of the head slider 6 and the ratio of the data track DT to the guard band GB, that is, the ratio LGR of the convex portions to the concave portions. The result of measurement using the laser vibrometer is as shown by the solid line in the figure, and the floating fluctuation amount calculated from the load capacity of the head slider 6 (error due to waviness of the substrate 31, etc. 3.
When compared with the point indicating 5 nm (amount simply added), the measurement result and the calculation result are almost the same. From this, it can be said that it is appropriate to use the load capacity of the head slider 6 as a parameter, which is a static analysis, with respect to the fluctuation of the flying height of the head slider 6 which is a dynamic behavior when passing through the servo zone. Further, when the ratio LGR between the servo track ST and the servo pit SP is 5.5, the load capacity of the head slider 6 is taken, and the ratio between the data band DT and the guard band GB is LGR 3.8, when the head slider 6 passes through the servo zone. The fluctuation of the flying height of is almost zero. From this, it can be said that it is useful to make the load capacities of the head slider 6 in the data zone and the servo zone uniform in order to reduce the fluctuation of the flying height when the head slider 6 passes through the servo zone.

[0044]

As described above, according to the present invention,
Since it is possible to suppress fluctuations in the flying height of the magnetic head on the magnetic disk, it is possible to stably record and reproduce data and the like by the magnetic head.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration example of a hard disk drive which is an embodiment of a magnetic disk drive of the present invention.

FIG. 2 is an exemplary perspective view showing an operation example of a head slider of the hard disk device shown in FIG. 1;

FIG. 3 is an exemplary perspective view showing a detailed example of a head slider of the hard disk device shown in FIG. 1;

FIG. 4 is a side view showing an operation example of a head slider of the hard disk device shown in FIG.

5 is a block diagram showing a configuration example of a control unit of the hard disk device shown in FIG.

FIG. 6 is a plan view showing an embodiment of a magnetic disk of the present invention.

7A and 7B are a radial sectional view and a circumferential sectional view of the magnetic disk shown in FIG.

FIG. 8 is a sectional structural view showing further details of the magnetic disk shown in FIG.

9 is a plan view showing details of the surface of the magnetic disk shown in FIG.

FIG. 10 is a first diagram for explaining a method of manufacturing the magnetic disk shown in FIG.

FIG. 11 is a second diagram for explaining the method of manufacturing the magnetic disk shown in FIG.

FIG. 12 is a third view for explaining the method of manufacturing the magnetic disk shown in FIG.

13 is a diagram showing the relationship between the load capacity of the head slider of the hard disk device shown in FIG. 1 and the ratio of convex portions to concave portions parallel to the traveling direction of the head slider.

FIG. 14 is a diagram showing the relationship between the load capacity of the head slider of the hard disk device shown in FIG. 1 and the ratio of convex portions to concave portions perpendicular to the traveling direction of the head slider.

15 is a diagram showing the relationship between the load capacity of the head slider of the hard disk device shown in FIG. 1 and the ratio of the arbitrary flying height of the head slider to the depths of recesses parallel and perpendicular to the traveling direction of the head slider. .

16 is a diagram showing a relationship between a flying variation of the head slider of the hard disk device shown in FIG. 1 and a ratio of convex portions to concave portions.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Hard disk device, 2 ... Housing, 3 ...
Magnetic disk, 4 ... arm, 4a ... vertical axis, 5
... voice coil, 6 ... head slider, 6a
..Rail, 6b ... rail, 6c ... tapered part,
6d ... tapered portion, 7 ... voice coil motor, 7
a ... magnet, 7b ... magnet, 8 ...
Magnetic head, 9 ... motor, 10 ... control unit, 11
... Clock signal generation section, 12 ... Tracking servo section, 13 ... Playback section, 14 ... Recording section, 31 ...
..Substrate, 32 ... magnetic film, 41 ... glass master,
42 ... Photoresist, 43 ... Turntable, 44 ... Laser light, 45 ... Nickel, 46.
..Stampers, 47 ... Magnetizing device, 48 ... Magnetic heads for magnetizing

Claims (2)

[Claims] 1. A magnetic disk in which data and the like are recorded and reproduced by a magnetic head mounted on a flying type head slider, and a data recording area and a control signal recording area are radially formed by an uneven portion formed on the surface. In the divided magnetic disk, the load capacity of the head slider is the same in the data recording area and the control signal recording area. 2. A magnetic disk radially divided into a data recording area and a control signal recording area by an uneven portion formed on the surface, and floating on the surface of the magnetic disk and moving in the radial direction of the magnetic disk. In a magnetic disk device comprising: a head slider that is mounted on the head slider, and a magnetic head that is mounted on the head slider and records and reproduces data and the like on the magnetic disk, a load capacity of the head slider is a data recording area of the magnetic disk. And a control signal recording area are the same in the magnetic disk device.