JPH09202981A - Device for evaporating highly corrosive liquid containing acid component - Google Patents
Device for evaporating highly corrosive liquid containing acid componentInfo
- Publication number
- JPH09202981A JPH09202981A JP8173184A JP17318496A JPH09202981A JP H09202981 A JPH09202981 A JP H09202981A JP 8173184 A JP8173184 A JP 8173184A JP 17318496 A JP17318496 A JP 17318496A JP H09202981 A JPH09202981 A JP H09202981A
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- gas
- liquid
- vapor
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
- C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
- C02F1/048—Purification of waste water by evaporation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/04—Evaporators with horizontal tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明はエッチング(etchi
ng)加工等に使用された後の塩酸等の強酸性を持つ酸
成分を含んだ腐食性廃液を、蒸発濃縮させ、金属、薬
品、塩酸等の有用成分を回収するようにした蒸発装置に
関するものである。FIELD OF THE INVENTION The present invention relates to etching.
ng) Evaporation device for recovering useful components such as metals, chemicals and hydrochloric acid by evaporating and concentrating a corrosive waste liquid containing an acid component having strong acidity such as hydrochloric acid after being used for processing Is.
【0002】[0002]
【従来の技術】従来の蒸発装置は、処理液の蒸発に必要
な熱を供給する熱交換器と、この熱交換器によって蒸発
した蒸気中の気液を分離する気液分離器と、熱交換器に
よって蒸発した蒸気を上と横方向に移動させて気液分離
器側へ送るようにした通路とが蒸発缶内に一体に収容さ
れている。2. Description of the Related Art A conventional evaporation apparatus includes a heat exchanger for supplying heat necessary for evaporating a processing liquid, a gas-liquid separator for separating gas-liquid in vapor evaporated by the heat exchanger, and a heat-exchanger. The vaporizer is integrally accommodated in the evaporator with a passage for moving the vapor evaporated by the vessel in the upward and lateral directions to send it to the gas-liquid separator side.
【0003】しかし、このような蒸発装置を用いて、エ
ッチング(etching)加工等に使用された後の塩
酸等の強酸性を持つ酸成分を含んだ腐食性廃液を処理し
ようとすれば、弱腐食性処理液の場合と異なり、強腐食
性液に接する部分に高価な高耐食性材料を使用しなけれ
ばならず、装置自体の製造コストを上げると言う問題が
ある。However, if it is attempted to treat a corrosive waste liquid containing an acid component having a strong acidity such as hydrochloric acid after it has been used for an etching process, etc., using such an evaporator, a weak corrosion will occur. Unlike the case of the acid treatment liquid, an expensive high-corrosion resistant material must be used in the portion in contact with the strongly corrosive liquid, which raises a problem of increasing the manufacturing cost of the device itself.
【0004】[0004]
【発明が解決しようとする課題】本発明は、このような
事情に鑑みて、装置自体の製造コストを下げることがで
きる酸成分を含む強腐食性液の蒸発装置を提供すること
を目的としている。SUMMARY OF THE INVENTION In view of such circumstances, an object of the present invention is to provide an evaporation device for a strongly corrosive liquid containing an acid component, which can reduce the manufacturing cost of the device itself. .
【0005】[0005]
【課題を解決するための手段】本発明にかかる酸成分を
含む強腐食性液の蒸発装置は、このような目的を達成す
るために、平行に設けられた複数の伝熱管およびこれら
伝熱管の上方に配置され伝熱管に処理液を散布する処理
液散布管を内部に有する蒸発缶と、この蒸気管路を介し
て蒸発缶と連通し、前記蒸気管路を介して蒸発缶で発生
した蒸気中の気液を分離し、気体のみを後工程へ送るよ
うになっている気液分離器とを備え、前記蒸発缶と気液
分離器とが前記蒸気管路部分で分離自在に一体化されて
いるようにした。In order to achieve such an object, an apparatus for vaporizing a strongly corrosive liquid containing an acid component according to the present invention has a plurality of heat transfer tubes arranged in parallel and a heat transfer tube for these heat transfer tubes. Vapor generated in the evaporation can, which is disposed in the upper part and has a processing liquid spraying pipe for spraying the processing liquid to the heat transfer pipe, and which communicates with the evaporation can via this steam pipeline. A vapor-liquid separator configured to separate the gas-liquid inside and to send only the gas to the subsequent step, and the evaporator and the gas-liquid separator are separably integrated in the vapor line portion. I was doing it.
【0006】[0006]
【発明の実施の形態】以下に、本発明の実施の形態を、
図面を参照しつつ詳しく説明する。図1図は本発明の蒸
発装置を概略的に説明した説明図である。図1に示すよ
うに、この蒸発装置100は、横円筒形をした蒸発缶1
と、蒸発缶1の上方に配置され、蒸発管路(蒸気出口
管)5,5を介して蒸発缶1と接続された太い管状の気
液分離器6とを備えている。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.
This will be described in detail with reference to the drawings. FIG. 1 is an explanatory view schematically illustrating the evaporation device of the present invention. As shown in FIG. 1, this evaporation apparatus 100 has a horizontal cylindrical evaporation can 1
And a thick tubular gas-liquid separator 6 arranged above the evaporator 1 and connected to the evaporator 1 via evaporation conduits (steam outlet pipes) 5 and 5.
【0007】蒸発缶1は、蒸発管路5,5の一部を構成
するフランジ管1a,1aが上方に延出しているととも
に、内部に複数の伝熱管2と、処理液散布管3とを備え
ている。蒸発缶1、伝熱管2、処理液散布管3は、その
塩酸等の酸成分を含む強腐食性処理液に接する部分がそ
れぞれ酸成分に対して耐蝕性を充分に備えたチタン,チ
タン合金、FRP等の材質で形成されている。The evaporator can 1 has flange pipes 1a, 1a forming part of the evaporation pipes 5, 5 extending upward, and a plurality of heat transfer pipes 2 and a treatment liquid spray pipe 3 inside. I have it. Each of the evaporator 1, the heat transfer tube 2, and the treatment liquid spray pipe 3 has titanium or titanium alloy whose portions in contact with the strongly corrosive treatment liquid containing an acid component such as hydrochloric acid have sufficient corrosion resistance against the acid component, It is made of a material such as FRP.
【0008】各伝熱管2は、蒸発缶1の端の管板21に
より構成された空洞である端室20および小さな管板2
2により構成された空洞である小端室23がそれぞれ両
端で連通していて、端室20を介して内部に加熱蒸気等
の熱媒体が通されて、蒸発缶1内の処理液を加熱するよ
うになっていて、蒸発缶1の軸と同一方向に、水平に装
設されている。Each heat transfer tube 2 is an end chamber 20 which is a cavity formed by a tube plate 21 at the end of the evaporator 1 and a small tube plate 2
Small end chambers 23, which are cavities constituted by 2, are communicated with each other at both ends, and a heat medium such as heating steam is passed through the end chambers 20 to heat the processing liquid in the evaporation can 1. It is arranged horizontally in the same direction as the axis of the evaporator 1.
【0009】すなわち、管板21および管板22には、
図2に示すように、伝熱管2が挿入できるような複数の
孔2´が開けられ、孔2´に伝熱管2の一端を挿入し
て、拡管方式等にて相互固定されている。That is, the tube sheet 21 and the tube sheet 22 are
As shown in FIG. 2, a plurality of holes 2 ′ into which the heat transfer tubes 2 can be inserted are opened, and one end of the heat transfer tubes 2 is inserted into the holes 2 ′ and they are mutually fixed by a pipe expanding method or the like.
【0010】処理液散布管3は、伝熱管2の上に架設さ
れていて、処理液循環ポンプ4より移送された処理液
を、伝熱管2の外面に散布するようになっている。すな
わち、循環ポンプ4は、原液流入管8を通じて蒸発缶1
内に流入し、蒸発缶1の下部に溜まった液を蒸発缶1の
下部に設けられた吸入管から吸い上げ、処理液散布管3
に送るようになっている。The processing liquid spraying pipe 3 is laid over the heat transfer pipe 2 and sprays the processing liquid transferred from the processing liquid circulating pump 4 to the outer surface of the heat transfer pipe 2. That is, the circulation pump 4 uses the stock solution inflow pipe 8 to pass through the evaporator 1
The liquid flowing into the inside of the evaporator 1 and sucked up in the lower part of the evaporator 1 is sucked up from the suction pipe provided in the lower part of the evaporator 1, and the treatment liquid spray pipe 3
To be sent to
【0011】気液分離器6は、太い管状をしていて、内
部が一種のフィルターで、気体だけが通過するようにな
っている気液分離網7によって上下に分割されていると
ともに、下部に蒸気管路5の一部を構成する気液分離器
6より小径のフランジ管6a,6aが延出し、このフラ
ンジ管6aと、蒸発缶1のフランジ管1aとを接続する
ことによって、蒸発缶1と分離自在に一体化されてい
る。The gas-liquid separator 6 has a thick tubular shape, the inside of which is a kind of filter and is divided into an upper part and a lower part by a gas-liquid separating mesh 7 through which only gas passes, and at the bottom thereof. Flange pipes 6a, 6a having a smaller diameter extend from the gas-liquid separator 6 that constitutes a part of the steam pipe 5, and the flange pipe 6a and the flange pipe 1a of the evaporator can 1 are connected to each other to form the evaporator can 1 And is separably integrated with.
【0012】また、気液分離器6は、気液分離網7の上
方空間が後工程(この実施の形態では、第2の蒸発装置
100´の蒸発缶11の端室20に接続されている)と
接続される連絡管30が連通し、下方空間が蒸気管路5
を介して蒸発缶1と連通している。Further, in the gas-liquid separator 6, the upper space of the gas-liquid separation network 7 is connected to the subsequent step (in this embodiment, it is connected to the end chamber 20 of the evaporator 11 of the second evaporator 100 '). ) Is connected to the connecting pipe 30, and the lower space is the steam pipe 5
And communicates with the evaporator 1 via.
【0013】この蒸発装置100は、以上のように、蒸
発缶1と気液分離器6とを2本の蒸気管路5によって接
続し、蒸気に包まれて上昇した液適は気水分離網7にて
下流に行かないようにし、強酸性原液のスプレイ過程に
て四方に散らばった液適を蒸発缶1内にとどめるように
なっているので、強酸性に耐える高価な耐酸材料をこの
蒸発缶1内においてのみを使用すればよくなり、耐食性
材料の使用量が節約できる。As described above, in the evaporator 100, the evaporator 1 and the gas-liquid separator 6 are connected to each other by the two steam pipes 5, and the liquid which is wrapped in the steam and rises is separated into a water-water separation network. Since it is designed not to go downstream at 7, the liquid solution scattered in all directions in the spraying process of the strong acid stock solution is retained in the evaporator 1, so an expensive acid resistant material that can withstand strong acid is used in this evaporator. It is sufficient to use only one inside, and the amount of the corrosion resistant material used can be saved.
【0014】しかも、蒸発缶1と気液分離器6とが蒸発
管路5部分で分離自在になっているので、損耗部分の解
体修理が容易である。耐食性材料の使用量が節約でき
る。Moreover, since the evaporator 1 and the gas-liquid separator 6 are separable at the evaporation conduit 5, the damaged portion can be easily disassembled and repaired. The amount of corrosion resistant material used can be saved.
【0015】また、上記の蒸発装置100は、蒸発缶1
が横円筒管状をしているが、蒸発缶1内に伝熱管2が挿
入されているだけだから、その直径を小径化できるとと
もに、小径化することによって耐圧力設計上、薄い円筒
板材料を使用することができ、より製造コストが低減で
きる。さらに、気液分離器6も小さい径の樹脂製管を使
用することもでき、一層簡便で軽量化しうる利点があ
る。Further, the evaporation device 100 described above is used in the evaporation can 1
Has a horizontal cylindrical shape, but since the heat transfer tube 2 is only inserted in the evaporator 1, the diameter can be reduced, and by using a small diameter, a thin cylindrical plate material is used for pressure resistance design. Therefore, the manufacturing cost can be further reduced. Further, the gas-liquid separator 6 can also use a resin tube having a small diameter, which is advantageous in that it is simpler and more lightweight.
【0016】なお、この蒸発装置100は、たとえば、
図3に示すような濃縮システムに組み込まれ使用される
ようになっている。すなわち、図3中、32は加熱媒体
により加えた熱を蒸発装置100,100´より排出さ
せる凝縮器(CONDENSER)、33は凝縮器32
の冷却水入り口、34は、凝縮器32の冷却水出口、3
5は蒸留水ポンプ、40は真空ポンプ、36は最高の濃
度の溶液を循環させる管路、37は管路36中の濃度を
検出する濃度検出器、38は自動制御弁、39は濃縮液
を排出する管である。The evaporator 100 is, for example,
It is designed to be used by incorporating it into a concentration system as shown in FIG. That is, in FIG. 3, reference numeral 32 denotes a condenser (CONDENSER) for discharging the heat added by the heating medium from the evaporators 100 and 100 ′, and 33 denotes the condenser 32.
Cooling water inlet, 34 is the cooling water outlet of the condenser 32, 3
5 is a distilled water pump, 40 is a vacuum pump, 36 is a pipe for circulating a solution having the highest concentration, 37 is a concentration detector for detecting the concentration in the pipe 36, 38 is an automatic control valve, 39 is a concentrated liquid. It is a pipe to discharge.
【0017】すなわち、この濃縮システムは、真空ポン
プ40より、全体を密閉した真空システムを真空に維持
し、工場等で使用した各種廃液を処理するが、図1およ
び図3に示すように、塩酸等が含まれていて強酸性を帯
びた工場廃液または再回収処理用液の原液が原液流入管
8を通じ蒸発缶1に入れられ、この原液が循環ポンプ4
によりポンピングされ、原液散水装置である溶液散布管
3を経て、ノズルにより伝熱管2上に反復してスプレイ
される。That is, in this concentrating system, a vacuum system which is hermetically sealed by a vacuum pump 40 is maintained in vacuum and various waste liquids used in factories are treated, but as shown in FIGS. 1 and 3, hydrochloric acid is used. A stock solution of a strongly acidic factory waste solution or a solution for re-recovery treatment containing such substances is put into the evaporator 1 through the stock solution inflow pipe 8, and this stock solution is circulated.
And is sprayed repeatedly on the heat transfer tube 2 by the nozzle through the solution spraying tube 3 which is a stock solution sprayer.
【0018】そして、このスプレイ過程において原液か
ら蒸気が発生し、上に流れ、気液分離器6内に装設した
気水分離網7を抜け、連絡管30を経て排出され次に第
2の蒸発装置100´の蒸発缶11に移り、同じ要領に
て反復処理される。Then, in this spraying process, steam is generated from the undiluted solution, flows upward, passes through the gas-water separation network 7 installed in the gas-liquid separator 6, is discharged through the connecting pipe 30, and is then discharged. It moves to the evaporator 11 of the evaporator 100 'and is repeatedly processed in the same manner.
【0019】そして、図3に示すように、第1の蒸発装
置100、第2の蒸発装置100´を経て蒸発した蒸気
は凝縮器32に吸入され凝縮して蒸留水になり、ポンプ
35によって抜き出されるようになっている。一方、蒸
気の蒸発によって第1の蒸発装置100および第2の蒸
発装置100´の蒸発缶1,11内で濃縮され残った溶
液は、管36,39を通じ濃縮液再処理槽に移送され、
ここで酸、その他濃縮成分が再処理分離されて、再利用
するか廃棄処分されるようになっている。Then, as shown in FIG. 3, the vapor evaporated through the first evaporator 100 and the second evaporator 100 ′ is sucked into the condenser 32 and condensed into distilled water, which is extracted by the pump 35. It is supposed to be served. On the other hand, the solution remaining after being concentrated in the evaporators 1 and 11 of the first evaporator 100 and the second evaporator 100 ′ by vaporization of vapor is transferred to the concentrate reprocessing tank through the pipes 36 and 39,
Here, acid and other concentrated components are reprocessed and separated for reuse or disposal.
【0020】すなわち、この濃縮システムは、塩酸等強
酸を利用する化学、金属等の諸分野にて極めて経済的な
整備維持、管理が可能となる。In other words, this concentrating system enables extremely economical maintenance and management in various fields such as chemistry, metal, etc. using strong acid such as hydrochloric acid.
【0021】本発明にかかる蒸発装置は、上記の実施の
形態に限定されない。たとえば、上記の蒸発装置100
は、気液分離器6が蒸発缶1の直上に設けられていた
が、斜め上や側方でも構わない。また、上記の蒸発装置
100は、蒸発管路5が2本設けられていたが、3本以
上でも構わないし、1本でも構わない。また、上記の蒸
発装置100は、気液分離器6が網を用いて気液を分離
するようになっていたが、たとえば、多数の板を用いた
り、流速を遅くして比重差で分離する方法を用いるなど
他の方法でも構わない。The evaporation apparatus according to the present invention is not limited to the above embodiment. For example, the evaporation device 100 described above.
In the above, the gas-liquid separator 6 was provided right above the evaporator 1, but it may be obliquely above or to the side. Further, although the evaporation device 100 is provided with two evaporation pipes 5, three or more evaporation pipes or one evaporation pipe 5 may be provided. Further, in the above-described evaporation apparatus 100, the gas-liquid separator 6 is configured to separate the gas-liquid using a net, but, for example, a large number of plates are used, or the flow velocity is slowed to separate the liquids by specific gravity. Other methods such as using a method may be used.
【0022】[0022]
【発明の効果】本発明にかかる蒸発装置は、以上のよう
に構成されているので、装置自体の製造コストを上げる
ことなく、維持管理が容易でしかも効率よく酸成分を含
む強腐食性液の濃縮処理を行うことができる。Since the evaporation apparatus according to the present invention is constructed as described above, it is easy to maintain and manage the strongly corrosive liquid containing the acid component without increasing the manufacturing cost of the apparatus itself. A concentration process can be performed.
【図1】本発明にかかる蒸発装置の概略説明図である。FIG. 1 is a schematic explanatory view of an evaporation device according to the present invention.
【図2】図1のA−A線断面図である。FIG. 2 is a sectional view taken along line AA of FIG.
【図3】図1の蒸発装置が使用されている濃縮システム
の工程処理流れ図である。3 is a process flow diagram of a concentration system in which the evaporator of FIG. 1 is used.
1 第1蒸発缶 21 管板 11 第2蒸発缶 23 小端室 2 伝熱管 30 連絡室 3 溶液散布管 32 凝縮器 5 蒸気出口管 33 冷却水入口 6、36、39 管 34 冷却水出口 35 蒸留水ポンプ 40 真空ポンプ 100 蒸発装置 100´ 蒸発装置 1 First Evaporating Can 21 Tube Plate 11 Second Evaporating Can 23 Small End Chamber 2 Heat Transfer Tube 30 Communication Room 3 Solution Dispersing Pipe 32 Condenser 5 Steam Outlet Pipe 33 Cooling Water Inlet 6, 36, 39 Pipe 34 Cooling Water Outlet 35 Distillation Water pump 40 Vacuum pump 100 Evaporator 100 'Evaporator
Claims (1)
ら伝熱管の上方に配置され伝熱管に処理液を散布する処
理液散布管を内部に有する蒸発缶と、この蒸気管路を介
して蒸発缶と連通し、前記蒸気管路を介して蒸発缶で発
生した蒸気中の気液を分離し、気体のみを後工程へ送る
ようになっている気液分離器とを備え、前記蒸発缶と気
液分離器とが前記蒸気管路部分で分離自在に一体化され
ている酸成分を含む強腐食性液の蒸発装置。1. An evaporation can having a plurality of heat transfer tubes provided in parallel and a processing liquid spraying pipe disposed above these heat transfer tubes and spraying a processing liquid to the heat transfer tubes, and via this steam pipeline. A vapor-liquid separator which communicates with the evaporator and separates the gas-liquid in the vapor generated in the evaporator through the vapor pipe, and sends only the gas to the subsequent step. An apparatus for vaporizing a strongly corrosive liquid containing an acid component, in which a vapor-liquid separator and a gas-liquid separator are separably integrated in the vapor line portion.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950025579A KR0151938B1 (en) | 1995-08-19 | 1995-08-19 | Evaporator for heavy corrosive waste water containing hcl |
KR1995-25579 | 1995-08-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09202981A true JPH09202981A (en) | 1997-08-05 |
Family
ID=19423826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8173184A Pending JPH09202981A (en) | 1995-08-19 | 1996-07-03 | Device for evaporating highly corrosive liquid containing acid component |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH09202981A (en) |
KR (1) | KR0151938B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11199203A (en) * | 1998-01-07 | 1999-07-27 | Osaka Gas Co Ltd | Treatment of waste hydrochloric acid |
CN103432756A (en) * | 2013-08-16 | 2013-12-11 | 江苏嘉泰蒸发结晶设备有限公司 | All-in-one evaporation and crystallization device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101308273B1 (en) * | 2007-05-17 | 2013-09-13 | 엘지디스플레이 주식회사 | Method of manufacturing recycled chemical solution and equipment for manufacturing the recycled chemical solution |
-
1995
- 1995-08-19 KR KR1019950025579A patent/KR0151938B1/en not_active IP Right Cessation
-
1996
- 1996-07-03 JP JP8173184A patent/JPH09202981A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11199203A (en) * | 1998-01-07 | 1999-07-27 | Osaka Gas Co Ltd | Treatment of waste hydrochloric acid |
CN103432756A (en) * | 2013-08-16 | 2013-12-11 | 江苏嘉泰蒸发结晶设备有限公司 | All-in-one evaporation and crystallization device |
Also Published As
Publication number | Publication date |
---|---|
KR0151938B1 (en) | 1998-10-01 |
KR970010653A (en) | 1997-03-27 |
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