JPH09199836A - Method of manufacturing circuit board - Google Patents

Method of manufacturing circuit board

Info

Publication number
JPH09199836A
JPH09199836A JP400696A JP400696A JPH09199836A JP H09199836 A JPH09199836 A JP H09199836A JP 400696 A JP400696 A JP 400696A JP 400696 A JP400696 A JP 400696A JP H09199836 A JPH09199836 A JP H09199836A
Authority
JP
Japan
Prior art keywords
substrate
mask
conductor
flame
flame coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP400696A
Other languages
Japanese (ja)
Inventor
Takashi Kobayashi
隆志 小林
Takao Kobayashi
隆雄 小林
Hideyuki Fujinami
秀行 藤浪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP400696A priority Critical patent/JPH09199836A/en
Publication of JPH09199836A publication Critical patent/JPH09199836A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To augment the adherence, conductivity and current capacity of a circuit conductor formed on a substrate by flame coating the substrate simultane ously with metallic particles in different mean particle diameters. SOLUTION: A mask 3 undercut in the shape of a large current conductive circuit is bonded onto a substrate 2 so as to cover the whole body 2. Next, in order to augment the adherence of copper foil and flame coating metal comprising a circuit conductor 4, the surface of the circuit conductor 4 to be flame coated is roughened. Furthermore, after bonding the mask 3 in the same shape as that of the mask used for the roughening step onto the board 2, a flame coating unit 6 and the board 2 are relatively moved for the flame coating step so that the flame coating metal may be concentratively sprayed on the parts not covered with the mask 3 At this time, two each of flame coating units 6 are simultaneously actuated in the flame coating step so as to spray the conductor metallic particles in different mean particle diameters on the substrate 2 from respective flame coating units 6. For example, the metallic particles are simultaneously flame coated in the mean particle diameter of 50μm from one flame coating unit 6 while 20μm from the other unit 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、大電流を通電する
回路基板の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a circuit board that carries a large current.

【0002】[0002]

【従来の技術】電子回路の利用範囲が産業機械分野及び
自動車部品分野などへと急速に拡大しているなかで、イ
ンバーター回路や電源装置の信号回路及び電力系回路を
一体化して省力化及び省スペース化を実現できる手段と
して、大電流複合回路板が開発されてきた。このような
大電流複合回路基板を構成する回路導体としては従来、
35μmもしくは70μm銅箔が用いられてきたが、電
流容量の拡大と共に175μmもしくは210μm銅箔
を導体として用いたタイプの基板や、銅バーなどの厚肉
導体を貼り合わせたタイプの基板がすでに開発されてい
る。また、特開昭51−14140号公報に開示されて
いるように、金属溶射技術を用いて回路導体を形成する
方法があり、基板上にパターニング用マスクを重ね合わ
せ、そのマスク上に金属を溶射し、その後にマスクを基
板から離して回路基板を形成している。
2. Description of the Related Art As the range of use of electronic circuits is rapidly expanding into the fields of industrial machinery and automobile parts, the inverter circuit, the signal circuit of the power supply device, and the power system circuit are integrated to save labor and save energy. A high-current composite circuit board has been developed as a means for realizing space saving. As a circuit conductor that constitutes such a large-current composite circuit board,
35 μm or 70 μm copper foil has been used, but with the expansion of current capacity, a type of substrate using 175 μm or 210 μm copper foil as a conductor and a type of substrate to which a thick conductor such as a copper bar is attached have already been developed. ing. Further, as disclosed in Japanese Patent Laid-Open No. 51-14140, there is a method of forming a circuit conductor by using a metal spraying technique. A patterning mask is superposed on a substrate and a metal is sprayed on the mask. After that, the mask is separated from the substrate to form the circuit substrate.

【0003】[0003]

【発明が解決しようとする課題】従来の技術を用いた溶
射方法では、導体回路の特性を決定する制御可能な溶射
条件として、溶射金属の種類、金属の溶射量及び基板と
溶射ノズル間の距離等が挙げられている。しかしなが
ら、これらの条件を十分うまく制御できたとしても、溶
射により基板上に付着した金属の凝固形態は多孔質的で
あり、個々の溶射金属粒の接触が点接触的な構造である
ため、基板上に形成された回路導体の密着力や導電率及
び電流容量の向上には限界が生じるという問題があっ
た。
In the conventional thermal spraying method, the controllable thermal spraying conditions that determine the characteristics of the conductor circuit include the type of thermal sprayed metal, the amount of sprayed metal, and the distance between the substrate and the spray nozzle. Etc. are listed. However, even if these conditions can be controlled sufficiently well, the solidification morphology of the metal deposited on the substrate by thermal spraying is porous, and the contact of individual sprayed metal particles is a point contact structure, so the substrate There is a problem that there is a limit to the improvement of the adhesion, conductivity and current capacity of the circuit conductor formed above.

【0004】[0004]

【課題を解決するための手段】本発明は上記問題点を解
決すべくなされたもので、導体金属を基板上に溶射して
回路導体を形成する回路基板の製造方法において、平均
粒径の異なる金属粒を基板上に同時に溶射することを特
徴とするものである。
The present invention has been made to solve the above problems, and in a method of manufacturing a circuit board in which a conductor metal is sprayed on the board to form a circuit conductor, the average particle diameter is different. It is characterized in that metal particles are simultaneously sprayed on the substrate.

【0005】上述のように、平均粒径の異なる金属粒を
基板上に同時に溶射すると、大粒径の金属粒を溶射する
ことで単位時間当たりの金属溶射量を確保するととも
に、小粒径の金属粒も同時に溶射することで、溶射で形
成された回路導体の導体金属の充填率を増大させること
ができる。その結果、溶射金属粒同士の接触面積が大き
くなるので、基板との密着性が向上するとともに、導体
抵抗が低減するので、許容電流密度も増加する。
As described above, when the metal particles having different average particle diameters are simultaneously sprayed onto the substrate, the metal particle having a large particle diameter is sprayed to secure the amount of metal sprayed per unit time, and the metal particles having a small particle diameter are also sprayed. By spraying the metal particles at the same time, the filling rate of the conductive metal of the circuit conductor formed by the spraying can be increased. As a result, the contact area between the sprayed metal particles is increased, so that the adhesion to the substrate is improved and the conductor resistance is reduced, so that the allowable current density is also increased.

【0006】なお、平均粒径の異なる金属粒は、大きい
平均粒径が小さい平均粒径の1.5〜12倍である2種
類の金属粒からなることが望ましい。ここで、大きい平
均粒径が小さい平均粒径の1.5倍以上である理由は以
下の通りである。即ち、立方体に内接する直径DA の球
体Aと、前記立方体の各頂点を中心として前記球体Aに
接する直径DB の球体Bを考える。そうすると、DA
B ≒1.4の関係がある。従って、大きい平均粒径が
小さい平均粒径の1.5倍以上であれば、平均粒径が大
きい金属粒が互いに直交する3つの軸上に接して配置し
た場合に、小さい平均粒径の金属粒は大きい平均粒径の
金属粒間の空隙に入り込み、空隙を充填する。また、正
三角錐の各頂点に中心を有し、相互に接する4個の直径
A の球体Aと、これらの球体Aに接して前記正三角形
の内部の隙間に稠密に配置された直径DB の球体Bを考
える。そうすると、DA /DB ≒11.3の関係があ
る。従って、大きい平均粒径が小さい平均粒径の12倍
であれば、正三角錐の各頂点に平均粒径が大きい金属粒
が接して配置した場合に、小さい平均粒径の金属粒は大
きい平均粒径の金属粒間の空隙に入り込み、空隙を充填
する。この場合、大きい平均粒径が小さい平均粒径の1
2倍を越えると、空隙を充填する小さい平均粒径の金属
粒の数が多くなり、点接触が増加するので、電気抵抗を
考慮すると好ましくない。
The metal particles having different average particle diameters are preferably composed of two kinds of metal particles having a large average particle diameter which is 1.5 to 12 times as large as the small average particle diameter. Here, the reason why the large average particle size is 1.5 times or more the small average particle size is as follows. That is, consider a sphere A having a diameter D A inscribed in the cube and a sphere B having a diameter D B in contact with the sphere A with each vertex of the cube as the center. Then D A /
There is a relationship of D B ≈1.4. Therefore, if the large average particle size is 1.5 times or more as large as the small average particle size, when the metal particles having the large average particle size are arranged in contact with each other on three axes orthogonal to each other, the metal having the small average particle size is The grains enter into the voids between the metal grains having a large average particle size and fill the voids. Also it has a center at each vertex of the equilateral pyramid, a sphere A of the four diameter D A which is in contact with each other, densely deployed diameter D B in the interior of the gap of the equilateral triangle in contact with these spheres A Consider sphere B. Then, there is a relationship of D A / D B ≈11.3. Therefore, if the large average particle size is 12 times as large as the small average particle size, when the metal particles having the large average particle size are arranged in contact with the respective vertices of the regular triangular pyramid, the metal particles having the small average particle size have the large average particle size. Enter into the voids between the metal particles of a diameter and fill the voids. In this case, the large average particle size is smaller than the small average particle size 1
When it exceeds 2 times, the number of metal particles having a small average particle size for filling the voids increases and point contact increases, which is not preferable in consideration of electric resistance.

【0007】[0007]

【発明の実施の形態】以下、図面に基づいて本発明にか
かる回路基板の製造方法の一実施の形態を詳細に説明す
る。図1(a)、(b)はそれぞれ、本実施の形態の製
造方法で用いたマスクの斜視図と、該マスクを用いて製
作された回路基板の斜視図である。また、図2は本実施
の形態の製造方法の説明図である。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a method for manufacturing a circuit board according to the present invention will be described in detail below with reference to the drawings. 1A and 1B are a perspective view of a mask used in the manufacturing method of the present embodiment and a perspective view of a circuit board manufactured using the mask, respectively. Further, FIG. 2 is an explanatory diagram of the manufacturing method of the present embodiment.

【0008】本実施の形態の製造方法の工程は以下の通
りである。即ち、 1)先ず、基板2上に用途に応じて、18μmから21
0μm程度の厚さの電解銅箔または銅板で回路導体4を
形成する。この回路導体4は、通常の回路基板の製造方
法で形成される。なお、基板2は、ガラスエポキシ材、
コンポジット材、紙フェノール材、紙エポキシ材等の絶
縁体で形成されている。
The steps of the manufacturing method of this embodiment are as follows. That is, 1) First, on the substrate 2, from 18 μm to 21 μm depending on the application.
The circuit conductor 4 is formed of an electrolytic copper foil or a copper plate having a thickness of about 0 μm. The circuit conductor 4 is formed by an ordinary method for manufacturing a circuit board. The substrate 2 is a glass epoxy material,
It is made of insulating material such as composite material, paper phenolic material, paper epoxy material.

【0009】2)次いで、図1(a)に示す大電流通電
回路の形状にくり抜いたマスク3を、基板2全体を覆う
ように基板2と密着させる。このマスク3は、ステンレ
スやその他の耐衝撃性及び耐熱性の高い材料にNC加
工、打ち抜き加工、加圧成形などを施して作製する。
2) Next, a mask 3 cut out in the shape of the large current conducting circuit shown in FIG. 1A is brought into close contact with the substrate 2 so as to cover the entire substrate 2. The mask 3 is manufactured by subjecting stainless steel or another material having high impact resistance and heat resistance to NC processing, punching processing, pressure molding and the like.

【0010】3)次いで、回路導体4を構成する銅箔と
溶射金属の密着性をより高めるため、溶射をおこなう回
路導体4面に対して粗化処理を施す。この粗化処理とし
ては、例えばセラミックスなどの微粒子を吹き付けるサ
ンドブラスト処理や回転式研磨装置による制御された機
械的な研磨処理、及び化学的なエッチング処理や電気化
学的な処理が考えられる。この粗化処理過程では、上記
回路導体表面の平均粗さをおよそ5から20μm程度に
する。
3) Next, in order to improve the adhesion between the copper foil forming the circuit conductor 4 and the sprayed metal, the surface of the circuit conductor 4 to be sprayed is roughened. The roughening treatment may be, for example, a sandblasting treatment in which fine particles such as ceramics are sprayed, a controlled mechanical polishing treatment by a rotary polishing device, a chemical etching treatment, or an electrochemical treatment. In this roughening process, the average roughness of the surface of the circuit conductor is set to about 5 to 20 μm.

【0011】4)次いで、基板2へ導体金属を溶射し、
図1(b)に示すような部分厚肉導体5を有する回路基
板1を形成する。基板2への溶射にはアーク式溶射機6
を用いる。アーク式溶射法を用いることの利点として
は、ガス式やプラズマ式など他の方式に比べて溶射量に
対する消費電力が相対的に少ないこと、単位時間当たり
の溶射量がほかの方式に比べて多く製造効率上有利であ
ること、溶射時における基板の温度上昇が低く基板の特
性を低下させることがないこと、かつ溶射された金属と
下地の密着度が比較的よいことなどがあげられる。この
溶射処理では、図2に示すように、前記粗化処理で用い
たマスクと同じ形状を有するマスク3を基板2に密着さ
せた後、マスク3によって被覆されていない部分に溶射
金属が集中して吹き付けられるように、溶射機6と基板
2を相対的に移動させて溶射をおこなう。溶射時は2台
の溶射機6を同時に稼働させ、それぞれの溶射機6から
異なる平均粒子径の導体金属粒を基板2上に吹き付け
る。この際、一台の溶射機6からは、同時に稼働させる
もう一台の溶射機6で噴出する金属粒径の1.5以上、
12倍以下の粒径を有する金属粒を溶射する。例えば一
台の溶射機6からは平均粒径50μm、他方からは平均
20μmの金属粒を同時に溶射する。このような粒子径
の制御は、それぞれの溶射機6へ異なる送り速度で金属
線を供給すること、もしくはそれぞれの溶射機6で異な
る線径の金属線を使用すること、または送り速度と金属
線の線径の両方を同時に制御することで行うことができ
る。そのため、予め線径および送り速度と粒子径の関係
を実験的に求めておく。
4) Next, the conductor metal is sprayed onto the substrate 2,
A circuit board 1 having a partially thick conductor 5 as shown in FIG. 1B is formed. The arc type thermal sprayer 6 is used for thermal spraying onto the substrate 2.
Is used. The advantages of using the arc type thermal spraying method are that the power consumption is relatively low compared to other methods such as gas type and plasma type, and that the amount of thermal spraying per unit time is larger than other methods. It is advantageous in terms of manufacturing efficiency, that the temperature rise of the substrate during spraying is low and the characteristics of the substrate are not deteriorated, and the adhesion between the sprayed metal and the base is relatively good. In this thermal spraying process, as shown in FIG. 2, after a mask 3 having the same shape as the mask used in the roughening process is brought into close contact with the substrate 2, the sprayed metal is concentrated on a portion not covered by the mask 3. Spraying is performed by relatively moving the spraying machine 6 and the substrate 2 so as to be sprayed. At the time of thermal spraying, two thermal sprayers 6 are simultaneously operated, and conductive metal particles having different average particle diameters are sprayed onto the substrate 2 from the respective thermal sprayers 6. At this time, from one thermal spraying machine 6 to the other of the thermal spraying machines 6 operating at the same time, the particle size of the metal is 1.5 or more,
The metal particles having a particle size 12 times or less are sprayed. For example, one spraying machine 6 simultaneously sprays metal particles having an average particle size of 50 μm and an average particle size of 20 μm from the other. Such control of the particle size is performed by supplying metal wires to the respective thermal spraying machines 6 at different feed rates, or by using metal wires having different wire diameters at the respective thermal spraying machines 6, or at the feed rate and the metal wire. This can be done by controlling both wire diameters at the same time. Therefore, the relationship between the wire diameter and the feed rate and the particle diameter is experimentally obtained in advance.

【0012】5)溶射による部分厚肉導体5の形成終了
後は、マスク3と基板2とを分離し、マスク3は次に処
理する基板2への溶射時に繰り返し使用する。
5) After the formation of the partially thick conductor 5 by thermal spraying, the mask 3 and the substrate 2 are separated, and the mask 3 is repeatedly used at the time of thermal spraying on the substrate 2 to be processed next.

【0013】6)このようにして形成された回路基板1
に、以下のような部分厚肉導体5の表面劣化防止処理を
行うこともある。即ち、半田コート処理もしくは電解金
属メッキ処理によって部分厚肉導体5表面を制御された
厚みでコート処理する。さらに必要に応じて上記コート
処理前または後に、機械的に溶射面を研磨して面粗さや
導体厚を調整する処理もおこなう。このようなコート処
理を施すと、溶射された部分厚肉導体5の表面の酸化防
止をはかることができる。また、導電率は、例えば平均
厚150μm の部分厚肉導体5に対して、平均50μm
の半田をコートした場合には約15から40%、平均1
50μmの銅メッキ処理を施した場合には50から80
%改善した。最終的に、部分厚肉導体5の回路パターン
を有する回路基板1は、表面のレジスト処理、シンボル
印刷の工程を経て完成品となる。
6) Circuit board 1 thus formed
In addition, the following surface deterioration preventing treatment of the partially thick conductor 5 may be performed. That is, the surface of the partially thick conductor 5 is coated with a controlled thickness by solder coating or electrolytic metal plating. Further, if necessary, before or after the above coating treatment, a treatment for mechanically polishing the sprayed surface to adjust the surface roughness and the conductor thickness is also performed. By applying such a coating treatment, it is possible to prevent oxidation of the surface of the partially thick conductor 5 that has been sprayed. The conductivity is, for example, 50 μm on average for a partially thick conductor 5 having an average thickness of 150 μm.
About 15 to 40% when soldered on, average 1
50 to 80 when plated with 50 μm copper
% Improvement. Finally, the circuit board 1 having the circuit pattern of the partially thick conductor 5 is a finished product through the steps of the surface resist treatment and the symbol printing.

【0014】なお、本発明は上記実施形態に限定される
ことはない。溶射法に関しては、同時に二台のアーク式
溶射機で粒径の異なる金属粒を溶射する技術を用いる代
わりに、二台のうち平均粒径の小さな粒を溶射する装置
を粉末金属を供給原料とする粉末溶射機を稼働させる
と、安定に微粉末を制御して吹き付けることが可能であ
る。また、基板として、ガラスエポキシ材に比較して融
点が高く、熱伝導性も高いアルミ基板を用いる場合に
は、溶射機として温度が高くなるプラズマ溶射機を用い
て、一台のプラズマ溶射機から混合粉末を吹きつけても
よい。なお、この場合には、電解銅箔からなる回路導体
を介さず、基板上に直接溶射して、厚肉導体を形成して
もよい。さらに、厚肉導体を形成するマスクは、パター
ン形状を印刷したドライフィルムや樹脂インク塗布等の
方法などで形成してもよい。なお、ドライフィルムでマ
スクする場合には、粗化処理で用いたマスクをそのまま
溶射処理のマスクに使用する。
The present invention is not limited to the above embodiment. Regarding the thermal spraying method, instead of using the technology of spraying metal particles having different particle diameters with two arc-type thermal sprayers at the same time, an apparatus for spraying particles with a small average particle diameter of the two is used as the feed material. When the powder spraying machine is operated, it is possible to stably control and spray the fine powder. In addition, when using an aluminum substrate having a higher melting point and higher thermal conductivity than the glass epoxy material as the substrate, a plasma spraying machine with a high temperature is used as the spraying machine, and a single plasma spraying machine is used. You may spray mixed powder. In this case, the thick conductor may be formed by directly spraying on the substrate without using the circuit conductor made of the electrolytic copper foil. Further, the mask for forming the thick conductor may be formed by a method such as a dry film on which a pattern shape is printed or resin ink application. When masking with a dry film, the mask used in the roughening treatment is used as it is as a mask for the thermal spraying treatment.

【0015】[0015]

【発明の効果】以上説明したように本発明によれば、導
体金属を基板上に溶射して回路導体を形成する回路基板
の製造方法において、平均粒径の異なる金属粒を基板上
に同時に溶射するため、回路導体の導体金属の充填率を
増大させることができるので、回路導体の基板との密着
性が向上するとともに、導体抵抗が低減するという優れ
た効果がある。
As described above, according to the present invention, in a method of manufacturing a circuit board in which a conductor metal is sprayed onto a substrate to form a circuit conductor, metal particles having different average particle diameters are simultaneously sprayed onto the substrate. Therefore, since the filling rate of the conductor metal of the circuit conductor can be increased, there is an excellent effect that the adhesion of the circuit conductor to the substrate is improved and the conductor resistance is reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)、(b)はそれぞれ、本発明にかかる回
路基板の製造方法の一実施の形態で用いたマスクの斜視
図と、該マスクを用いて製作された回路基板の斜視図で
ある。
1A and 1B are respectively a perspective view of a mask used in an embodiment of a method of manufacturing a circuit board according to the present invention and a perspective view of a circuit board manufactured using the mask. Is.

【図2】上記実施の形態の製造方法の説明図である。FIG. 2 is an explanatory diagram of a manufacturing method according to the above embodiment.

【符号の説明】[Explanation of symbols]

1 回路基板 2 基板 3 マスク 4 回路導体 5 厚肉導体 6 溶射機 1 circuit board 2 board 3 mask 4 circuit conductor 5 thick conductor 6 thermal sprayer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 導体金属を基板上に溶射して回路導体を
形成する回路基板の製造方法において、平均粒径の異な
る金属粒を基板上に同時に溶射することを特徴とする回
路基板の製造方法。
1. A method of manufacturing a circuit board in which a conductor metal is sprayed onto a board to form a circuit conductor, wherein metal particles having different average particle sizes are simultaneously sprayed onto the board. .
【請求項2】 前記平均粒径の異なる金属粒は、大きい
平均粒径が小さい平均粒径の1.5〜12倍である2種
類の金属粒からなることを特徴とする回路基板の製造方
法。
2. The method of manufacturing a circuit board, wherein the metal particles having different average particle diameters are composed of two kinds of metal particles having a large average particle diameter which is 1.5 to 12 times as large as the small average particle diameter. .
JP400696A 1996-01-12 1996-01-12 Method of manufacturing circuit board Pending JPH09199836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP400696A JPH09199836A (en) 1996-01-12 1996-01-12 Method of manufacturing circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP400696A JPH09199836A (en) 1996-01-12 1996-01-12 Method of manufacturing circuit board

Publications (1)

Publication Number Publication Date
JPH09199836A true JPH09199836A (en) 1997-07-31

Family

ID=11572904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP400696A Pending JPH09199836A (en) 1996-01-12 1996-01-12 Method of manufacturing circuit board

Country Status (1)

Country Link
JP (1) JPH09199836A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4975174B1 (en) * 2011-04-14 2012-07-11 パナソニック株式会社 Magnetostrictive torque sensor manufacturing method and magnetostrictive torque sensor
JP5000022B1 (en) * 2012-03-13 2012-08-15 パナソニック株式会社 Magnetostrictive torque sensor manufacturing method and magnetostrictive torque sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4975174B1 (en) * 2011-04-14 2012-07-11 パナソニック株式会社 Magnetostrictive torque sensor manufacturing method and magnetostrictive torque sensor
WO2012140828A1 (en) * 2011-04-14 2012-10-18 パナソニック株式会社 Process for producing magnetostrictive torque sensor, and magnetostrictive torque sensor
JP5000022B1 (en) * 2012-03-13 2012-08-15 パナソニック株式会社 Magnetostrictive torque sensor manufacturing method and magnetostrictive torque sensor

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