JPH09199071A - High voltage terminal for ion injection apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high voltage terminal in which attachment and detachment of electric power sources to and from a rack is carried out easily and maintenance of the front faces and the rear faces of respective electric power sources housed in steps is also carried out easily and moreover of which the high voltage box does not need to be enlarged. SOLUTION: A plurality of electric power sources 21-27 are housed in steps in a movable, rack 40 and the whole body of the movable rack 40 is so supported by a rotation axis 42 installed upstandingly in a high voltage box 4 as to be rotatable in a manner in which the situation that respective electric power sources 21-27 are set to face sideways and the situation that the front face parts of respective electric power sources 21-27 come out of the high voltage box 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention constitutes an ion implanter adopting a post-acceleration system, in which an ion source, an analysis magnet, various power supplies for these are housed in a high voltage box. The present invention relates to a high-voltage terminal, and more specifically to a means for facilitating maintenance work of the power supply.

[0002]

2. Description of the Related Art FIG. 3 is a plan view showing an example of a conventional high voltage terminal. FIG. 4 is a P view in FIG.
The door in front of the rack is shown open.

The high voltage terminal 2 mass-separates an ion source 8 for generating an ion beam 10, a gas box 16 for supplying an ion source gas to the ion source 8 and an ion beam 10 extracted from the ion source 8 ( That is, an analysis magnet 12 for selecting a desired ion species), an analysis slit portion 14 cooperating with the analysis magnet 12, various power supplies for supplying electricity to these, a turbo molecular pump 18 and 19 for evacuating a beam line, and the like, It is housed in a box-shaped high voltage box 4.

An ion beam 10 extracted from an ion source 8 and mass-separated by an analysis magnet 12 or the like.
Are accelerated by an accelerating tube 32 provided between the high voltage box 4 and the ground potential portion. This is why it is called the latter-stage acceleration method. Due to this acceleration, the high voltage box 4 has a high voltage (for example, several tens k) from the ground potential portion.
V to several hundred kV) is applied. This high voltage box 4
Are insulated and supported from the ground potential portion by a plurality of support insulators (not shown).

Electric power is supplied to the equipment in the high voltage terminal 2 from the ground potential portion through the insulating transformer 34.

The various power sources include, for example, a filter power source that is provided near the analysis slit portion 14 and supplies electricity to a filter electrode or a filter magnet that removes undesired charge-converted ions, and a backflow secondary of the ion source 8. A suppression power supply for applying a negative suppression voltage to the suppression electrode for electron suppression, a source magnet power supply for supplying an excitation current to the source magnet for confining the plasma of the ion source 8, and a positive electrode for extracting the ion beam of the ion source 8. Extraction power supply for applying the extraction voltage of the, analysis magnet 1
2 is an analysis magnet power supply that supplies an exciting current.

Of these, the filter power supply 21 and the suppression power supply 2
2, source magnet power supply 23 and pull-out power supply 24
Is a fixed rack 30 fixed to a region in the high voltage box 4 between the analysis magnet 12, the analysis slit portion 14 and the insertion portion of the insulating transformer 34, for example, as shown in FIG. It is inserted and fixed from the front. Arrow C indicates the insertion direction. A door 4a is provided in front of the fixed rack 30. In this example, the analysis magnet power supply is housed and fixed in a place different from the fixed rack 30.

Such a high voltage terminal 2 is usually surrounded by a shield cabinet (not shown) which also serves as an electric shield and an X-ray shield, and these are usually a clean room as a part of an ion implantation apparatus. It is installed inside. For effective use of this clean room, downsizing of the high voltage terminal 2 is required, and in order to realize it, the power sources 21 to 24 are used.
Are stacked on the fixed rack 30 as described above to effectively utilize the space.

[0009]

In the high voltage terminal 2, when the power sources 21 to 24 are fixed to the fixed rack 30, the rear surface B of them is located behind them, so that the input terminals and the output on the rear surface B are located. There is a problem that it is very difficult to attach and detach the terminals and inspect the terminal board. For example, conventionally, the head of the high voltage box 4 is turned upside down to perform work or inspection of the rear surface B of each of the power supplies 21 to 24.

Although such a problem can be solved relatively easily by increasing the size of the high voltage box 4 and, by extension, the entire high voltage terminal 2 and changing the arrangement of the fixed rack 30 to a place where it can be easily handled, the problem can be solved. This would violate the above-mentioned demand for miniaturization.

Therefore, the present invention provides a high-voltage terminal which facilitates attachment and detachment of a power source to and from a rack and maintenance and inspection of the front and rear surfaces of each power source housed in stages, and which does not require a large high-voltage box. The main purpose is to do.

[0012]

A high voltage terminal according to the present invention has a rotating rack in which a plurality of power sources as described above are housed in a movable rack in a stepwise manner and the entire movable rack is erected in a high voltage box. The shaft is rotatably supported between a state in which each power source is laid sideways in the high-voltage box and a front portion of each power source is out of the high-voltage box.

According to the above structure, the movable rack may be fixed by rotating the power sources such that the respective power sources are laid sideways in the high voltage box at all times. In this state, since each power supply is in the sideways state, by looking into the front side of the power supply, the instruments in front of each power supply can be easily viewed. Further, by looking into the rear surface side of each power source, the work of attaching and detaching the terminals on the rear surface of each power source and the inspection can be easily performed.

When attaching or detaching each power source, the movable rack may be rotated so that the front portion of each power source is outside the high voltage box. In this state, since the power source can be attached to and detached from the movable rack almost from the front, the power source can be attached to and detached from the movable rack easily.

[0015]

1 is a plan view showing an example of a high voltage terminal according to the present invention. 2 shows Q in FIG.
It is a figure which expands a perspective view and shows partially. 3 and 4
The same reference numerals are given to the same or corresponding parts as in the conventional example, and the differences from the conventional example will be mainly described below.

In the high voltage terminal 2a of this embodiment, the analysis magnet 12 in the high voltage box 4 is used.
A movable rack 40 accommodating each power source and the like in a stepped manner is provided in a space portion behind (in the direction in which the ion beam 10 is extracted). At the back of the analysis magnet 12, a liner for protecting the inner wall of the analysis tube of the analysis magnet 12 from the sputtering by the ion beam 10 is originally provided, for example, as described in Japanese Utility Model Laid-Open No. 61-87453.
For example, a space for inserting and removing in the directions indicated by arrows H and I is secured, and the movable rack 40 is provided in this space.

In the movable rack 40, as shown in FIG. 2, in this embodiment, in addition to the filter power supply 21, the suppression power supply 22, the source magnet power supply 23, and the extraction power supply 24, the turbo molecular pump 18 described above is used. And 19
Amplifies the output of a turbo molecular pump controller 25 for controlling the temperature, an electron lens power source 26 for supplying electricity to an electron lens provided in the vicinity of the analysis slit unit 14, and a Hall element for detecting the magnetic flux density in the analysis magnet 12. The hall amplifier units 27 for storing are housed in a stepped manner.
The arrow C indicates the direction of inserting these power supplies and the like.

A rotary shaft 42 is vertically provided upright in a portion behind the analysis magnet 12 in the high voltage box 4. Reference numerals 44 and 46 in FIG. 2 are bearing portions thereof. Then, the movable rack 40 is attached to the rotary shaft 42, and the movable rack 40 as a whole is horizontally oriented by the rotary shaft 42 in the high voltage box 4 as shown by the solid line in FIG. State and 2 in FIG.
As indicated by the dotted line, the front portions of the power sources 21 to 27 are rotatably supported as indicated by an arrow D between the front portions of the power sources 21 to 27 and the outside of the high voltage box 4. The fixing portion 48 in FIG.
It is a fixed portion that fixes the entire movable rack 40 in the high voltage box 4 in a sideways state.

The rotation angle of the movable rack 40 in the direction of the arrow D is set to about 90 degrees as in this embodiment, and when the front portions of the power sources 21 to 27 are brought out of the high voltage box 4, the It is preferable that the is directed to the front rather than diagonally. By doing so, it becomes easier to attach and detach the power supplies 21 to 27 to the movable rack 40.

The high voltage box 4 is provided near the outside of the movable rack 40 with at least doors 4b and 4c which allow the movable rack 40 to rotate as shown by the arrow D. However, this door may be one or more.

In the high voltage terminal 2a, the movable rack 40 may be normally fixed by rotating the power sources 21 to 27 in the high voltage box 4 in a lateral direction. In this state, each power source 21-27
Is in the sideways state, the front side A is indicated by the arrow E, for example.
Each power source etc. 2
The instruments in front of 1-27 can be easily visually observed. Also, by looking into the rear surface B side of each of the power supplies 21 to 27 through the path shown by the arrow F, for example, the work of attaching and detaching the terminals of the rear surface B of each of the power supplies 21 to 27, inspection, etc. can be easily performed. it can. Further, during maintenance and inspection of the rear surface B, if necessary, the entire movable rack 40 may be rotated to the outside, and by doing so, the rear surface B side of each of the power sources 21 to 27 is indicated by, for example, an arrow G. It is possible to more easily inspect and work on the route as shown.

When the power sources 21 to 27 are attached or detached, the movable rack 40 may be fixed by rotating it so that the front surface A of each power source 21 to 27 goes out of the high voltage box 4.
In this state, since the power sources 21 to 27 can be attached to and detached from the movable rack 40 almost from the front, the power sources 21 to 27 can be easily attached to and detached from the movable rack 40. In this case, as described above, the movable rack 40
If the front portions of the power sources 21 to 27 are exposed to the outside of the high-voltage box 4 and face substantially in the front direction by rotating the power sources 21 to 27 by 90 degrees, the power sources 21 to 27 can be easily attached and detached.

Moreover, the rotary movable rack 4 as described above
By adopting 0, the space in the high-voltage box 4 can be effectively used, so that the high-voltage box 4 and hence the entire high-voltage terminal 2a need not be enlarged.

Even if the movable rack 40 is provided, by rotating it outside the high voltage box 4 as described above, the portion behind the analysis magnet 12 and the ion source 8 are rotated.
Since a large space can be secured at the beam exit side of the above, maintenance and inspection work in the vicinity of the analysis magnet 12 and the exit of the ion source 8 can be easily performed. The insertion and removal of the liner of the analysis magnet 12 in the direction of the arrow H can be performed without any trouble. Insertion and removal of the liner of the analysis magnet 12 in the direction of arrow I is also possible through the gap behind the movable rack 40 rotated inside the high voltage box 4, or through the space behind the movable rack 40 rotated outside the high voltage box 4. Is.

In the movable rack 40, it suffices to store a plurality of power sources out of the power sources to be stored in the high-voltage box 4 in a stepwise manner. It is optional whether to store the table or to store other than the power source.

Further, the movable rack 40 is provided behind the analysis magnet 12 as in this embodiment, so that the originally empty space can be effectively utilized, and the movable rack 40 is mounted on the high voltage box 4. It is preferable because a large space for maintenance and inspection can be secured near the outlet of the analysis magnet 12 and the outlet of the ion source 8 when it is rotated outward, but of course it may be provided in a place other than this.

[0027]

As described above, according to the present invention, in a movable rack in which a plurality of power supplies are stored in a stepwise manner, each power supply is in a horizontal position in a high voltage box, and the front part of each power supply is at a high voltage. Since it is rotatable so that it can be moved out of the box, it is easy to attach / detach the power supply to / from the rack and perform maintenance and inspection of the front and rear surfaces of each power supply. Moreover, since the space inside the high voltage box can be effectively utilized, it is not necessary to increase the size of the high voltage box and hence the entire high voltage terminal.

[Brief description of drawings]

FIG. 1 is a plan view showing an example of a high voltage terminal according to the present invention.

FIG. 2 is an enlarged partial view of a Q view in FIG.

FIG. 3 is a plan view showing an example of a conventional high voltage terminal.

FIG. 4 is a P view in FIG. 3, showing a door in front of the rack opened.

[Explanation of symbols]

 2a High voltage terminal 4 High voltage box 8 Ion source 10 Ion beam 12 Analysis magnet 21 Filter power supply 22 Suppression power supply 23 Source magnet power supply 24 Extraction power supply 40 Movable rack 42 Rotating shaft

Claims (1)

[Claims] 1. A high voltage is applied from an earth potential part to an ion source for generating an ion beam, an analysis magnet for mass-separating an ion beam extracted from the ion source, and a plurality of power supplies for supplying electricity to these. In a high-voltage terminal that is housed in a high-voltage box, a plurality of power sources among the above-mentioned power sources are housed in a movable rack in stages, and the entire movable rack is erected by a rotating shaft that is erected in the high-voltage box. The high voltage of the ion implantation apparatus is rotatably supported between a state in which each power source is laid sideways in the high voltage box and a front portion of each power source is out of the high voltage box. Terminal.