JPH09197320A - Laser exposure device - Google Patents

Laser exposure device

Info

Publication number
JPH09197320A
JPH09197320A JP397396A JP397396A JPH09197320A JP H09197320 A JPH09197320 A JP H09197320A JP 397396 A JP397396 A JP 397396A JP 397396 A JP397396 A JP 397396A JP H09197320 A JPH09197320 A JP H09197320A
Authority
JP
Japan
Prior art keywords
vibration
frame
laser
laser exposure
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP397396A
Other languages
Japanese (ja)
Inventor
Satoru Sakurai
哲 桜井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP397396A priority Critical patent/JPH09197320A/en
Publication of JPH09197320A publication Critical patent/JPH09197320A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To reduce the vibration of a frame and an optical element without increasing the rigidity or weight of components by providing a vibration reduction member nearby a vibration position in a laser exposure device which is excited by an optical deflecting means. SOLUTION: A rib 10b for reinforcement is provided in the outer edge part of the frame and the vibration reduction member 21 formed in a plate shape on the top surface of the corner of the rib is fitted tightly to the plate-shaped corner part through a fitting member 21a by using an adhesive, etc. A resin material which is close in rigidity to an object position is used for the vibration reduction member 21 and the length, width, and thickness of the plate shape are so set that primary and secondary natural vibration frequencies are close to that at the object position. For operation, plural plate-shaped vibration reduction members 21 which are different in size are prepared, the corner parts are fitted to specific places through the fitting member 21a, and an observed member which has the largest vibration at operation time is selected and determined. This vibration reduction member 21 is thus provided to reduce the vibration at the position A of the frame 10.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はレーザビームプリン
タやレーザファクシミリ等の画像記録装置に用いられる
レーザ露光装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser exposure device used in an image recording device such as a laser beam printer or a laser facsimile.

【0002】[0002]

【従来の技術】従来、この種のレーザ露光装置は、画像
信号によって変調されたレーザ光を、高速回転するポリ
ゴンミラー又は高速で往復振動するガルバノミラー等の
機械的な光偏向手段によって偏向走査を行い被走査体で
ある感光体に照射するよう構成されている。かかる走査
記録を行うレーザ露光装置の問題の一つに走査線の間隔
が不揃いで起こる濃淡(いわゆるピッチむら)がある。
この原因の一つにレーザ露光装置の振動がある。この振
動源は光偏向装置で、ポリゴンミラーの場合はモータの
回転数の周波数で、ガルバノミラーの場合は走査周波数
での振動が発生する。この振動は偏向装置が取り付けら
れている露光装置フレームを介して各光学要素に伝わ
る。露光装置のフレームや光学要素の固有振動数がこの
加振周波数に近いと、共振して振動を発生しレーザビー
ムも一緒に振動させることとなる。
2. Description of the Related Art Conventionally, a laser exposure apparatus of this type deflects and scans laser light modulated by an image signal by a mechanical optical deflecting means such as a polygon mirror rotating at high speed or a galvano mirror reciprocating at high speed. It is configured to irradiate a photosensitive member, which is a scanning target. One of the problems of a laser exposure apparatus that performs such scan recording is light and shade (so-called pitch unevenness) that occurs due to irregular intervals between scanning lines.
Vibration of the laser exposure apparatus is one of the causes. This vibration source is an optical deflector, and in the case of a polygon mirror, vibration occurs at the frequency of the rotation speed of the motor, and in the case of a galvanometer mirror, vibration occurs at the scanning frequency. This vibration is transmitted to each optical element via the exposure device frame to which the deflecting device is attached. When the natural frequency of the frame or the optical element of the exposure apparatus is close to this excitation frequency, it resonates to generate vibration and the laser beam also vibrates together.

【0003】レーザ露光装置のフレームが樹脂の場合に
は金属に比べて剛性が低くなりがちなので振動を発生し
やすい。また偏向走査したレーザビームの向きを変える
場合には縦横比の大きなミラーいわゆる長尺ミラーを使
用するが、長尺ミラーは振動を発生しやすい。また被走
査体近傍に設けた倒れ角補正用の円筒レンズも縦横比が
大きく振動しやすい部材である。
When the frame of the laser exposure apparatus is made of resin, its rigidity tends to be lower than that of metal, so that vibration is likely to occur. Further, when changing the direction of the deflected and scanned laser beam, a mirror having a large aspect ratio, that is, a so-called long mirror is used, but the long mirror easily causes vibration. Further, the cylindrical lens for tilt angle correction provided near the object to be scanned is also a member having a large aspect ratio and easily vibrating.

【0004】レーザ露光装置のフレームの剛性を上げる
ためには、フレームの補強用リブの高さを高くする対策
がとられるが、高くするほど材料を多く使うのでコスト
がかかる。又フレーム自身が大きくなってしまい、記録
装置全体の形状を大きくしてしまう。
In order to increase the rigidity of the frame of the laser exposure apparatus, a measure to increase the height of the reinforcing ribs of the frame is taken, but the higher the height, the more material is used, which is costly. In addition, the frame itself becomes large and the shape of the entire recording apparatus becomes large.

【0005】またミラーや円筒レンズの長尺部品の剛性
を上げるためには部品を厚くする対策がとられる。これ
も厚くするほどコスト高となる。又厚み方向に補強部材
を設けてもよいが、十分や効果を上げるためにはコスト
高となる。
Further, in order to increase the rigidity of long components such as mirrors and cylindrical lenses, measures to make the components thicker are taken. The thicker this also becomes, the higher the cost becomes. Further, a reinforcing member may be provided in the thickness direction, but it is costly to sufficiently improve the effect.

【0006】[0006]

【発明が解決しようとする課題】本発明は、光偏向器に
よって励振されたレーザ露光装置のフレームや光学要素
の振動を、当該部品の剛性や重さを上げずに低減するよ
うにしたレーザ露光装置を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention is a laser exposure in which vibration of a frame or an optical element of a laser exposure apparatus excited by an optical deflector is reduced without increasing the rigidity or weight of the component. The purpose is to provide a device.

【0007】[0007]

【課題を解決するための手段】上記目的は、光偏向手段
を用いてレーザ光の偏向走査を行うレーザ露光装置にお
いて、前記光偏向手段によって励振されて起こるレーザ
露光装置内の振動部位近傍に設けて、それ自身が振動す
ることにより、前記振動部位の振動を低減する振動低減
部材を設けたことを特徴とするレーザ露光装置により達
成される。
SUMMARY OF THE INVENTION The above object is to provide a laser exposure apparatus for deflecting and scanning a laser beam by using a light deflecting means, which is provided in the vicinity of a vibrating portion in the laser exposure apparatus which is excited by the light deflecting means. And a vibration reducing member that reduces vibration of the vibrating portion by vibrating itself is provided.

【0008】なお、上記の光偏向手段は、ポリゴンミラ
ー又はガルバノミラーを用いたレーザ光の偏光手段であ
って、前記振動低減部材の一つの固定点は、当該振動部
位の振動の振幅の最も大きい部位の近傍であることが好
ましい実施態様である。
The above-mentioned light deflecting means is a laser light polarizing means using a polygon mirror or a galvano mirror, and one fixed point of the vibration reducing member has the largest vibration amplitude of the vibrating portion. The preferred embodiment is near the site.

【0009】[0009]

【発明の実施の形態】以下、図面を用いて本発明の実施
例について説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】図1に示す実施例は、カラー画像記録を行
うレーザ露光装置であって、図1(a)は平面図、図1
(b)は断面図を示している。図において11はC(シ
アン)、M(マゼンタ)、Y(イエロー)の各色のレー
ザ光を発光する半導体レーザLD(レーザダイオード)
であって、各LD11から射出されるレーザ光は、その
前面に設けたコリメータレンズ12によって平行光に整
形され、更にシリンドリカルレンズ13を経て反射鏡1
4で反射したのち、光偏向器であるポリゴンミラー15
に入射して主走査方向に一次元的に偏向され、fθレン
ズ16によって所定の位置に所定のタイミングで結像す
るよう調整され、長尺ミラー17,18によって走査光
の反射がなされ、シリンドリカルレンズ19によって面
倒れ補正がなされたのち、矢示した副走査方向に移動す
る記録媒体P上に主走査がなされて、2次元の画像露光
が行われる。
The embodiment shown in FIG. 1 is a laser exposure apparatus for recording a color image, wherein FIG. 1 (a) is a plan view and FIG.
(B) shows a sectional view. In the figure, 11 is a semiconductor laser LD (laser diode) that emits laser light of each color of C (cyan), M (magenta), and Y (yellow).
The laser light emitted from each LD 11 is shaped into parallel light by a collimator lens 12 provided on the front surface thereof, and further passes through a cylindrical lens 13 to form a reflection mirror 1.
After being reflected at 4, the polygon mirror 15 which is an optical deflector
And is deflected one-dimensionally in the main scanning direction, and is adjusted by the fθ lens 16 so as to form an image at a predetermined position at a predetermined timing. The elongated mirrors 17 and 18 reflect the scanning light to form a cylindrical lens. After the surface tilt correction is performed by 19, the main scanning is performed on the recording medium P moving in the sub-scanning direction indicated by the arrow, and two-dimensional image exposure is performed.

【0011】かかるレーザ光源である。LD11をはじ
め総ての走査光学系は、フレーム10に固設され、更に
フレーム10はその外方3箇所に設けた取付部10aに
よって装置本体に強固に取り付けられている。光偏光器
であるポリゴンミラー15はレーザ露光時には多面鏡は
3000rpm〜7500rpmの回転数をもって回転
する。多面鏡をはじめ駆動モータは何れもバランスに注
意をはらって作製されているが、50Hz〜125Hz
の加振周波数をもった振動源となり、フレーム10が振
動し、またフレーム10を介して各光学要素に伝わる。
フレームや光学要素の固有振動数がこの加振周波数に近
いと共振し、光ビームも共振してピッチむらが生じるこ
ととなる。
It is such a laser light source. All the scanning optical systems including the LD 11 are fixed to the frame 10, and the frame 10 is firmly attached to the main body of the apparatus by the attachment portions 10a provided at three positions outside the frame. The polygon mirror 15, which is an optical deflector, rotates the polygon mirror at a rotation speed of 3000 rpm to 7500 rpm during laser exposure. Drive motors such as polygon mirrors are manufactured with careful attention to balance, but 50Hz to 125Hz
As a vibration source having a vibration frequency of, the frame 10 vibrates and is transmitted to each optical element via the frame 10.
When the natural frequency of the frame or the optical element is close to this excitation frequency, the light beam resonates, and the light beam also resonates, causing uneven pitch.

【0012】本発明は光偏向されて起こるレーザ露光装
置内の振動部位近傍に振動低減部材を設けて、それ自身
が振動することによって前記の振動部位の振動を低減す
る構成とするもので、図2及び図3にその実施例を示し
ている。
According to the present invention, a vibration reducing member is provided in the vicinity of a vibrating portion in a laser exposure apparatus which is deflected by light so as to reduce the vibration of the vibrating portion by vibrating itself. An example is shown in FIGS.

【0013】図2に示した実施例は、フレーム10の外
端部(図1(a)でAをもって示した箇所)での振動を
低減する目的で振動低減部材21を設けた実施例で、図
2(a)は斜視図を、図2(b)は側面図を示してい
る。図1(a)においてAで示したフレーム10の外端
部は、材料力学的には自由端の形状をなしていて、外縁
をなす外端部では作動時に他の箇所に較べて最大の振幅
の振動が認められる。A点での振動は、振動源であるポ
リゴンミラーを取り付けたフレーム部分の振動となり、
走査光のゆれや振動となりピッチむらとなる。本実施例
のフレーム10は樹脂材を用いているため剛性が低くな
り振動が発生しやすい。本実施例ではフレームの外縁部
に補強用のリブ10bを設け、その隅部上面に板状をな
した振動低減部材21を、その板状の隅部との間で取付
部21aを介して接着剤等を用いて強固に取り付けてい
る。振動低減部材21の材質は対象部位の剛性と近似し
た樹脂材を用い、板状の縦横及び厚さ寸法は1次又は2
次の固有振動数が対象部位の振動数に近いように設定す
る。作業としては大きさの異なる複数枚の板状の振動低
減部材21を用意し、これの隅部を取付部21aを介し
て所定の箇所に取り付け、作動時に最も振動の大きく観
測される部材を選択決定することによってもなされる。
かかる振動低減部材21を設けることによって、作動時
には振動低減部材21は可なりの振動が認められる一
方、これを取り付けることによってフレーム10のA位
置における振動は明らかに低減し、記録画像についても
フレーム部分の振動に基づくピッチむら等の現象は認め
られないようになる。
The embodiment shown in FIG. 2 is an embodiment in which a vibration reducing member 21 is provided for the purpose of reducing the vibration at the outer end of the frame 10 (the portion indicated by A in FIG. 1A). 2A shows a perspective view and FIG. 2B shows a side view. The outer end portion of the frame 10 shown by A in FIG. 1A has a free end shape in terms of material mechanics, and the outer end portion forming the outer edge has the maximum amplitude in comparison with other portions during operation. Vibration is observed. The vibration at point A is the vibration of the frame part where the polygon mirror that is the vibration source is attached,
Fluctuations or vibrations of the scanning light cause uneven pitch. Since the frame 10 of this embodiment uses a resin material, its rigidity is low and vibration is likely to occur. In this embodiment, reinforcing ribs 10b are provided on the outer edge of the frame, and plate-shaped vibration reducing members 21 are attached to the upper surfaces of the corners of the frame through the mounting portions 21a. It is firmly attached using an agent. The vibration-reducing member 21 is made of a resin material having a rigidity close to that of the target portion.
The next natural frequency is set to be close to the frequency of the target part. For the work, a plurality of plate-shaped vibration reducing members 21 having different sizes are prepared, the corners of the members are attached to predetermined positions via the attachment portions 21a, and the member in which the largest vibration is observed during operation is selected. It is also done by making a decision.
By providing such a vibration reduction member 21, while the vibration reduction member 21 is allowed to have a considerable vibration during operation, the vibration at the position A of the frame 10 is obviously reduced by mounting the vibration reduction member 21. Phenomenon such as pitch unevenness due to the vibration of the can no longer be recognized.

【0014】図3に示した実施例は長尺ミラー18の中
央位置近傍(図1(a)でBをもって示した箇所)に振
動を低減する目的で振動低減部材22を設けた実施例
で、図3(a)は斜視図を、図3(b)は側面図を示し
ている。長尺ミラー18は表面反射コーティングを施し
た棒状のガラス部材で、両端は支持部材18aによって
支持されている。従って長尺ミラー18は両端支持の形
で、作動時には中央部をハラとして最大振幅をもって振
動する。ミラーは光梃の作用でその振動は拡大されるの
で、微細な振動も記録画像には大きく影響する。本実施
例は長尺ミラー18の背面中央部に振動低減部材22を
設けるようにしたもので、アルミニウム等を材料とする
短冊状の振動低減部材22を、中央部付近を支持した取
付部22aによって固設している。この短冊状の振動低
減部材22の1次又は2次の固有振動数は作動時の長尺
ミラー18の振動数に近いように設定する。作業として
は大きさの異なる複数の短冊状の振動低減部材22を用
意し、これの中央部を取付部22aを介して長尺ミラー
18の背面中央部に貼付け、作動時に最も振動の大きく
観測される部材を選択決定することによってなされる。
かかる振動低減部材22を設けることによって、作動時
には振動低減部材22には若干の振動が認められる一
方、これを取り付けることによって長尺ミラー18の振
動は殆ど認められず、記録画像についても長尺ミラー1
8の振動に基づくピッチむら等の現象は全く認められな
いようになる。
The embodiment shown in FIG. 3 is an embodiment in which a vibration reducing member 22 is provided in the vicinity of the central position of the elongated mirror 18 (the portion indicated by B in FIG. 1A) for the purpose of reducing vibration. 3A is a perspective view and FIG. 3B is a side view. The elongated mirror 18 is a rod-shaped glass member having a surface reflection coating, and both ends thereof are supported by supporting members 18a. Therefore, the elongated mirror 18 is supported at both ends, and when actuated, vibrates with the maximum amplitude with the central portion as a hara. Since the vibration of the mirror is magnified by the action of the optical lever, even a minute vibration greatly affects the recorded image. In this embodiment, the vibration reducing member 22 is provided at the center of the rear surface of the elongated mirror 18, and the vibration reducing member 22 in the form of a strip made of aluminum or the like is attached to the mounting portion 22a which supports the vicinity of the center. It is fixed. The primary or secondary natural frequency of the strip-shaped vibration reducing member 22 is set to be close to the frequency of the long mirror 18 during operation. For the work, a plurality of strip-shaped vibration reducing members 22 having different sizes are prepared, and the central portion thereof is attached to the central portion of the rear surface of the long mirror 18 via the mounting portion 22a. This is done by selecting and determining the members to be used.
By providing such a vibration reducing member 22, some vibration is recognized in the vibration reducing member 22 at the time of operation, but the vibration of the long mirror 18 is hardly recognized by mounting the vibration reducing member 22, and the long image is recorded in the long mirror. 1
The phenomenon such as pitch unevenness due to the vibration of No. 8 is not recognized at all.

【0015】以上、2つの実施例について説明したが、
本発明はレーザ露光装置内での共振に基づく振動箇所に
振動低減部材を設けることによって効果が得られる。ま
た本実施例では光偏向手段としてポリゴンミラーを用い
た例について説明したが、本発明はガルバノミラーを用
いた機械的な光偏向手段をもったレーザ露光装置にも適
用される。
The two embodiments have been described above.
The present invention is effective when a vibration reducing member is provided at a vibration portion due to resonance in the laser exposure apparatus. Further, although the example in which the polygon mirror is used as the light deflecting means has been described in the present embodiment, the present invention is also applied to a laser exposure apparatus having a mechanical light deflecting means using a galvano mirror.

【0016】[0016]

【発明の効果】本発明によるときは、レーザ露光装置内
の長尺ミラーや露光装置フレーム等について、部材の剛
性を上げることなく振動を防ぐことができるので、従来
振動を防ぐために使用していた材料を少なくすることが
可能となり、振動によるピッチむらが発生することのな
い高画質のレーザ露光装置が安価に提供されることとな
った。
According to the present invention, vibration can be prevented in the long mirror in the laser exposure apparatus, the frame of the exposure apparatus, etc. without increasing the rigidity of the members, and thus it has been conventionally used to prevent the vibration. It is possible to reduce the amount of material, and it is possible to inexpensively provide a high-quality laser exposure apparatus that does not cause uneven pitch due to vibration.

【図面の簡単な説明】[Brief description of drawings]

【図1】レーザ露光装置の一実施例を示す平面図及び断
面図。
FIG. 1 is a plan view and a sectional view showing an embodiment of a laser exposure apparatus.

【図2】振動低減部材の一例を示す斜視図及び側面図。FIG. 2 is a perspective view and a side view showing an example of a vibration reducing member.

【図3】振動低減部材の他の一例を示す斜視図及び側面
図。
FIG. 3 is a perspective view and a side view showing another example of the vibration reducing member.

【符号の説明】[Explanation of symbols]

10 フレーム 11 LD 12 コリメータレンズ 13,19 シリンドリカルレンズ 15 ポリゴンミラー 16 fθレンズ 17,18 長尺ミラー 21,22 振動低減部材 21a,22a 取付部(振動低減部材) 10 frame 11 LD 12 collimator lens 13,19 cylindrical lens 15 polygon mirror 16 fθ lens 17,18 long mirror 21,22 vibration reducing member 21a, 22a mounting portion (vibration reducing member)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 光偏向手段を用いてレーザ光の偏向走査
を行うレーザ露光装置において、前記光偏向手段によっ
て励振されて起こるレーザ露光装置内の振動部位近傍に
設けて、それ自身が振動することにより、前記振動部位
の振動を低減する振動低減部材を設けたことを特徴とす
るレーザ露光装置。
1. A laser exposure apparatus for deflecting and scanning a laser beam using an optical deflecting means, wherein the laser exposing apparatus is provided near a vibrating portion in the laser exposing apparatus which is excited by the optical deflecting means and vibrates itself. Thus, a laser exposure apparatus is provided with a vibration reducing member for reducing the vibration of the vibrating portion.
【請求項2】 前記光偏向手段はポリゴンミラー又はガ
ルバノミラーのレーザ光の偏光手段であることを特徴と
する請求項1記載のレーザ露光装置。
2. The laser exposure apparatus according to claim 1, wherein the light deflection means is a laser light polarization means of a polygon mirror or a galvanometer mirror.
【請求項3】 前記振動低減部材の一つの固定点は、当
該振動部位の振動の振幅の最も大きい部位の近傍である
ことを特徴とする請求項1又は2記載のレーザ露光装
置。
3. The laser exposure apparatus according to claim 1, wherein one fixed point of the vibration reducing member is in the vicinity of a portion having the largest vibration amplitude of the vibrating portion.
JP397396A 1996-01-12 1996-01-12 Laser exposure device Pending JPH09197320A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP397396A JPH09197320A (en) 1996-01-12 1996-01-12 Laser exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP397396A JPH09197320A (en) 1996-01-12 1996-01-12 Laser exposure device

Publications (1)

Publication Number Publication Date
JPH09197320A true JPH09197320A (en) 1997-07-31

Family

ID=11572018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP397396A Pending JPH09197320A (en) 1996-01-12 1996-01-12 Laser exposure device

Country Status (1)

Country Link
JP (1) JPH09197320A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008178902A (en) * 2007-01-26 2008-08-07 Matsushita Electric Ind Co Ltd Laser beam machining apparatus
JP2020085984A (en) * 2018-11-19 2020-06-04 コニカミノルタ株式会社 Light writing device and image formation device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008178902A (en) * 2007-01-26 2008-08-07 Matsushita Electric Ind Co Ltd Laser beam machining apparatus
JP4687657B2 (en) * 2007-01-26 2011-05-25 パナソニック株式会社 Laser processing equipment
JP2020085984A (en) * 2018-11-19 2020-06-04 コニカミノルタ株式会社 Light writing device and image formation device

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