JPH09178635A - Cross-sectional-shape detector for material-hardness measuring and evaluating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a cross-sectional-shape detector by which the shape of a cross section can be detected precisely and efficiently by detecting relative displacements of respective probes which are rocked independently with reference to a support which is fed and moved to a direction along the surface of an object to be measured. SOLUTION: A cross-sectional-shape detector 5 detects the shape of the outline of a cross section 2 whenever a probe 4 is passed in such a way that tip contact parts which are mounted on, and attached to, tips of probes 4a, 4b and which are composed of a rigid material such as a diamond or the like are brought into sliding contact with an object 1 to be measured and that they are moved so as to be overlapped. In this case, the support 12 of the detector 5 is fed and moved to a direction (a) along the average surface of the object 1 to be measured. In addition, arms 14a, 14b are supported by shaft support parts via respective rocking bodies 13a, 13b so as to be rockable independently of each other, the respective probes 4a, 4b are supported at their tip parts, a springy force is given by load springs 16a, 16b, and the probes 4a, 4b are brought into contact with the surface of the object 1 to be measured. Then, relative displacements of the arms 14a, 14b, i.e., the probes 4a, 4b, with reference to the support 12 are detected 18a, 18b at the respective arms. Thereby, by one feed operation by means of one detector 5, the shape of the cross section can be measured efficiently without an irregularity in a measured value.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a state of surface roughness which is detected every time a stylus passes according to the hardness of a material by causing a stylus to slide and move along the surface of an object to be measured. The present invention relates to a cross-sectional shape detector suitable for use in a material hardness measurement / evaluation apparatus that determines and evaluates the hardness of a material by utilizing the fact that the degree of change of the above is different.

[0002]

2. Description of the Related Art Generally, the surface of a material differs in roughness and hardness depending on the properties of the material, the processing condition of the surface of the material, the degree of oxidation, and the like. When expressing the roughness among them, for example, in a roughness meter, a tip contact portion made of a hard material such as diamond attached to the tip of a stylus called a stylus is brought into contact with the surface of the measurement object, While applying a certain load as the measurement pressure to the tip contact part, measure the surface shape of the measurement object along the measurement line on the surface of the measurement object, and express the surface roughness by various expression methods. I was doing. On the other hand, when expressing hardness,
For example, a hard tip consisting of diamond etc. of the indenter of the hardness tester, a constant test load is applied, the resistance of the material surface at that time, the indentation depth, the size of the depression of the plastically deformed material, The amount of repulsion of the material was measured and the hardness was expressed by various expressions.

[0003]

By the way, when measuring the hardness of a material, the contact state between the indenter and the material differs depending on the roughness of the material, and the load distribution when the indenter is pushed in due to the roughness of the material. The hardness of the material to be measured is greatly affected by the roughness of the surface of the material to be measured because the minute deformation state on the surface of the material is different. In addition, even for the same material, the composition distribution and crystal distribution differ depending on the position of the material, and the hardness of the material also differs if the composition and crystal state differ, so the measured position, that is, the position where the indenter is pushed in differs. For example, the measured values of material hardness are not generally the same. Moreover, when material hardness is measured in duplicate at the same position on the same material, the part whose hardness has been measured once is deformed by work load and causes work hardening, and when measuring the second hardness. The same measurement value as the first measurement value cannot be obtained. This can be said similarly when the surface roughness is measured repeatedly using the above-mentioned stylus. That is, the tip contact part made of a hard material such as diamond attached to the tip of a stylus called a stylus is brought into contact with the surface of the object to be measured, and a certain load as a measurement pressure is applied to the tip contact part for measurement. If the shape of the surface of the object to be measured is duplicated along the measurement line on the surface of the object, the stylus will give the measured value for the second and third measurements. Each time the surface of the object to be measured is slidably contacted, the surface is processed by the stylus, and therefore the measured value obtained by the previous measurement is not the same. The magnitude of the difference between the measurement data between the first and second measurements, the second and third measurements, etc. that overlap with each other depends on the hardness of the material, and the material hardness shows a high value. As the degree of processing by the stylus decreases, the magnitude of the difference between the measurement data of the duplicated measurements decreases.

Therefore, according to the present invention, every time the surface roughness continuously detected by the stylus over a predetermined measurement length on the surface of the material is detected redundantly for the same measurement site,
Focusing on showing different measurement values depending on the hardness of the material, continuous measurement over a wider range without being based on the measurement value information that tends to vary for point-like measurement points on the surface of the material Used in a material hardness measurement and evaluation device that can more accurately determine and evaluate the material hardness by a simple method and device based on the measurement value information with much smaller variation about the part. It is an object of the present invention to provide a cross-sectional shape detector that is suitable for the purpose.

[0005]

In order to achieve the above-mentioned object, a cross-sectional shape detector for a material hardness measuring and evaluating apparatus of the present invention comprises a stylus which is in sliding contact with the surface of an object to be measured, and an average of the objects to be measured. Are repeatedly moved along a specific surface, the contour shape of the cross section of the measurement object is detected as a cross-section curve each time the stylus passes, and the material hardness of the measurement object is determined based on each cross-section curve. A cross-sectional shape detector for use in a material hardness measurement / evaluation apparatus, wherein the cross-sectional shape detector is a support body that is fed and moved in a direction along an average surface of the measurement object, and the support body. On the other hand, a plurality of stylus capable of swinging independently of each other and a displacement detecting means for detecting a relative displacement of each stylus with respect to the support body are provided. Further, the cross-sectional shape detector for the material hardness measurement and evaluation device of the present invention, the stylus that is in sliding contact with the surface of the measurement object is moved in duplicate along the average surface of the measurement object, and the stylus passes. A cross-sectional shape detector for use in a material hardness measurement / evaluation apparatus that detects the contour shape of the cross section of the measurement object for each as a cross-section curve and determines the material hardness of the measurement object based on each cross-section curve The cross-section shape detector includes a support body which is fed and moved in a direction along an average surface of the measurement object, and swingably supported independently of each other with respect to the support body. A plurality of arms that respectively support the stylus at intervals with respect to each other in the feeding direction,
A plurality of displacement detecting means for detecting the displacement of each arm with respect to the support body are provided for each arm. Furthermore, the cross-sectional shape detector for material hardness measurement and evaluation device of the present invention, a stylus that is in sliding contact with the surface of the measurement object, is moved repeatedly along the average surface of the measurement object,
For use in a material hardness measurement and evaluation device that detects the contour shape of the cross section of the measured object each time the stylus passes as a sectional curve, and determines the material hardness of the measured object based on each sectional curve The cross-sectional shape detector, wherein the cross-sectional shape detector is a support that is driven to move in a direction along an average surface of the measurement object, and the measurement object with respect to the support. A plurality of arms that are swingably supported independently of each other in a plane including a cross section orthogonal to an average surface and that support the stylus at the distal end with a space therebetween in the feed direction, A plurality of load springs that individually apply a spring force to each arm so that the needles contact the surface of the object to be measured with a constant measurement pressure, and displacement of each arm with respect to the support body. Multiple changes detected for each arm It is characterized in that it comprises a detection coil.

[0006]

Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the cross-sectional shape detector 5 is a touch device called a stylus that slides on the surface of the measurement object 1 so as to follow the contour 3 of the cross section 2 orthogonal to the average surface of the measurement object 1. The needles 4a and 4b are provided. As shown in FIG. 7, the stylus 4a, 4b specifically includes a plurality of, for example, two stylus 4a, 4b which are arranged in series in the feed direction and can move independently of each other. The cross-sectional shape detector 5 causes a tip contact portion made of a hard material such as diamond, sapphire, or cemented carbide attached to the tips of the stylus 4a, 4b to contact the surface of the object to be measured 1,
While applying a certain load as a measurement pressure to the tip contact portion, the stylus 4a, 4b is moved in the direction a along the average surface of the object 1 to be measured, for example, at a constant feed speed Vmm / sec for T seconds. By overlappingly moving over the measurement length of VT mm, the shape of the contour 3 of the cross section 2 is detected each time the stylus 4 passes, as shown in FIG. 2, for example.

As shown in FIG. 7, the cross-section shape detector 5
Is a support 5 that is driven to move in a direction a along the average surface of the object to be measured 1, and FIG.
In the above, the oscillating body is provided so as to be swingable independently of each other in the plane included in the cross section 2 orthogonal to the average surface of the measured object 1 at the pivotal portion provided at a position hidden behind the projection 17 and not visible. 13a and 13b, and a pair of stylus needles 4 are spaced apart from each other in the feed direction at the tips.
Each arm 14a of each rocking body 13a, 13b is arranged so that the plurality of arms 14a, 14b supporting a, 4b and each stylus 4a, 4b are brought into contact with the surface of the object to be measured 1 at a constant measurement pressure. , 14b so as to press the pressure receiving springs 15a, 15b that are in contact with the support body 12 on the opposite side.
Each arm 1 is supported by the base end of which is elastically ejected.
A plurality of load springs 16a and 16b that individually apply spring force to the arms 4a and 14b, and a plurality of displacement detection coils that detect the displacement of the arms 14a and 14b with respect to the support 5 for each arm 14a and 14b. 18a and 18b.

In general, the profile of the cross section 2 of the object to be measured 1 has such a shape that once the stylus 4a, 4b passes while slidingly contacting it under a constant measurement pressure, the surface of the object to be measured 1, particularly the profile 3 of the cross section 2.
The tip of the protruding portion that protrudes upwards of the needle is scraped by the stylus 4a, 4b, or is plastically deformed when the material of the measured object is soft, and is processed by the stylus 4a, 4b. For example, as shown in FIG. 5, the stylus 4a,
Each time 4b are sequentially pass, the shape of the contour 3 of section 2 _{c a, c b, c c} , slide into changes as .... The degree of change of the contour 3 of the cross section 2 with each passage of the stylus 4a, 4b depends on the hardness of the material of the measuring object 1, and the stiffer the material of the measuring object 1, the more the stylus 4a, 4b passes. The degree of change in the contour 3 of the cross-section 2 that occurs each time is performed is small.

The cross-section shape detector 5 sends the detection signal as an output signal to the cross-section curve reader 6, and the cross-section curve reader 6
On the basis of the detection signal sent from the cross-section shape detector 5, the shape of the contour 3 of the cross-section 2 is changed every time the stylus 4a, 4b passes, for example, a cross-section curve as shown by the cross-section curve c in FIG. Read in the form of. As shown in FIG. 2, the cross-section curve reader 6 which operates in response to the detection signal from the cross-section shape detector 5 moves in the direction along the average surface of the measurement object 1 in the plane included in the cross-section 2. By setting the time axis t and making the distance from the base point O on the time axis t correspond to the size of the time t, each cross-sectional curve every time the stylus 4a, 4b passes,
It can also be read as a function of time t, for example the cross-section curve c.

Each cross-section curve such as the cross-section curve c read by the cross-section curve reader 6 at each passage of the stylus 4a, 4b is converted into a signal and sent to the Fourier analyzer 7, which then analyzes the signal. 7, the stylus 4a, 4
For each passage of b, the Fourier transform of the function in which each sectional curve is a function curve is calculated, and the spectrum of each Fourier transform as shown by the spectrum s in FIG. 3 is calculated, for example. FIG. 4 shows some typical examples of the spectrum of the Fourier transform obtained by the calculation of the Fourier analyzer 7. In FIG. 4, the spectrum s ₁
Shows the case where the surface roughness of the measured object is large and rough, the spectrum s ₂ shows the case where the surface roughness of the measured object is small and rough, and the spectrum s ₃ shows the surface of the measured object. Shows the case where the roughness is large and dense, and the spectrum s ₄
Indicates a case where the surface roughness of the measured object is small and dense,
The spectrum s ₅ shows the case where the unevenness of the surface of the measured object is repeated at regular intervals. in this way,
The spectrum s accurately contains the information about the phase information of the waveform of the sectional curve c.

As shown in FIG. 5, the first stylus 4a
When the spectrum of the Fourier transform of a function of the profile curve and function curve contour c _a detected by passing, and the spectrum had s _a in FIG. 6, for example, is detected by the passage of the second probe 4b The contour becomes like the contour c _{b in} FIG. 5, and the spectrum of the Fourier transform of the function having the sectional curve of the contour c _b as the function curve becomes like the spectrum s _{b in} FIG. The contour detected by the passage of the third stylus when the second stylus is provided, or by the second passage of the stylus 4a when the stylus 4a, 4b reciprocates a plurality of times. Becomes the contour c _{c in} FIG. 5, and the spectrum of the Fourier transform of the function having the sectional curve of the contour c _c as the function curve becomes the spectrum s _{c in} FIG.

Further, in the Fourier analyzer 7, the spectrum of the Fourier transform of the function in which the cross-sectional curve after passing the previous stylus 4a is a function curve and the cross-sectional curve after passing the next stylus 4b is the functional curve. the difference between the spectrum of the Fourier transform of a function which, for example, the difference between the spectrum s _a spectrum s _b, likewise the spectrum s _b and spectral s _c
Is calculated, and the difference between the spectra calculated each time the stylus 4a, 4b passes through the measurement site is sent to the spectrum difference display device 8 in the form of a signal and to the material hardness determination device 10. . In the spectrum difference display device 8, the difference of each spectrum is visualized and displayed on a screen or printed. At that time, the difference of each spectrum is converted into material hardness or displayed on a scale of material hardness. You can also do it.

The evaluation pattern storage 9 stores in advance patternized evaluations of various material hardnesses corresponding to the magnitudes of various spectral differences calculated by the Fourier analyzer 7, as evaluation data. Then, when the spectrum difference signal for an arbitrary material is sent from the Fourier analyzer 7 to the material hardness determination device 10, the material hardness determination device 10 selects from among the evaluation patterns stored in the evaluation pattern storage device 9. , One or a plurality of matching evaluation patterns are selected, and the selected evaluation pattern is sent to the evaluation pattern display device 11 in the form of a signal. The evaluation pattern display device 11 visualizes the evaluation pattern based on the evaluation pattern signal sent from the material hardness determiner 10 and displays it on, for example, a display screen or a printing paper surface. The material hardness determiner 10 may be connected to the Fourier analyzer 7 together with the spectrum difference display device 8, or
When the spectrum difference display device 8 is configured to convert the difference of each spectrum into material hardness or display the material hardness scale, the evaluation pattern storage device 9, the material hardness determination device 10 And evaluation pattern display device 1
1 can also be omitted.

[0013]

As described above, according to the cross-section shape detector for material hardness measuring and evaluating apparatus of the present invention, the following effects can be obtained. (1) The stylus that is in sliding contact with the surface of the object to be measured is moved in an overlapping manner along the average surface of the object to be measured, and the contour shape of the cross section of the object to be measured is set as a cross-sectional curve each time the probe is passed. A cross-sectional shape detector for use in a material hardness measurement / evaluation device for detecting and measuring the material hardness of the measurement object based on each cross-section curve, wherein the cross-section shape detector is the measurement object. Supports that are moved in the direction along the average surface, a plurality of stylus that can swing independently of each other, and relative displacement of each stylus with respect to the support is detected. Since the displacement detecting means is provided, the cross-sectional shape of the measured object can be detected accurately and efficiently by one feeding operation by one cross-sectional shape detector without variation in measured values ( Claim 1). (2) The stylus that is in sliding contact with the surface of the object to be measured is moved along the average surface of the object to be overlapped, and the contour shape of the cross section of the object to be measured is set as a cross-sectional curve each time the probe is passed. A cross-sectional shape detector for use in a material hardness measurement / evaluation device for detecting and measuring the material hardness of the measurement object based on each cross-section curve, wherein the cross-section shape detector is the measurement object. A support body that is fed and moved in a direction along an average surface and a support body that is swingably supported independently of the support body. Since there are provided a plurality of arms for supporting each arm and a plurality of displacement detection means for detecting the displacement of each arm with respect to the support body, one feeding operation by one sectional shape detector is performed. As a result, the measured values are Moreover, the cross-sectional shape of the object to be measured can be detected efficiently, and since each stylus is supported by the tip of the arm that swings independently of each other, the measurement pressure applied to each stylus is finely controlled. It is possible to detect the cross-sectional shape of the measurement object followed by each stylus with high accuracy (claim 2). (3) The stylus that is in sliding contact with the surface of the object to be measured is moved in duplicate along the average surface of the object to be measured, and the contour shape of the cross section of the object to be measured is taken as a cross-sectional curve each time the probe is passed. A cross-sectional shape detector for use in a material hardness measurement / evaluation device for detecting and measuring the material hardness of the measurement object based on each cross-section curve, wherein the cross-section shape detector is the measurement object. Supports that are driven to move in the direction along the average surface, and can swing independently of each other in the plane including the cross section orthogonal to the average surface of the measurement object with respect to the support. And a plurality of arms that support the stylus and that are spaced apart from each other in the feed direction at the tip end,
A plurality of load springs that individually apply spring force to the arms so that the stylus abuts on the surface of the object to be measured with a constant measurement pressure, and the support of the arms. Since it is equipped with a plurality of displacement detection coils that detect the displacement with respect to each arm, there is no variation in the measured values by one feed operation by one cross-sectional shape detector, and accurate and efficient measurement is possible. Since the sectional shape of an object can be detected and a load spring that applies a spring force individually to each arm is provided, each arm can be individually maintained under the optimum measurement pressure, and the dispersion of measured values And the measurement accuracy can be maintained high (Claim 3).

[Brief description of the drawings]

FIG. 1 is an overall operation system diagram of a material hardness measurement / evaluation apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional curve diagram showing an example of a sectional curve detected by the material hardness measurement / evaluation apparatus of FIG.

FIG. 3 is a spectrum diagram showing an example of a Fourier transform spectrum calculated by the material hardness measurement / evaluation apparatus of FIG. 1.

FIG. 4 is a spectrum diagram showing a typical example of a Fourier transform spectrum calculated by the material hardness measurement / evaluation apparatus of FIG. 1.

FIG. 5 is a cross-sectional view showing a state in which a contour shape of a cross section of a measurement object changes due to overlapping sliding contact of stylus.

FIG. 6 is a spectrum diagram showing how the spectrum of Fourier transform changes due to overlapping sliding contact of stylus.

7 is an enlarged cross-sectional view of a main part of the cross-sectional shape detector of FIG.

[Explanation of symbols]

1 measurement object 2 cross section 3 cross section contour 4, 4a, 4b stylus 5 cross section shape detector 6 cross section curve reader 7 Fourier analyzer 8 spectrum difference display device 9 evaluation pattern memory 10 material hardness judgment machine 11 evaluation pattern display Device 12 Supports 13a, 13b Oscillators 14a, 14b Arms 15a, 15b Pressure receiving springs 16a, 16b Load springs 17 Protrusions 18a, 18b Displacement detection coils a Feeding direction c Sectional curves c _a , c _b , c _c After passing the stylus Cross-section contour shape t time O base point T measurement time

Claims (3)

[Claims] 1. A stylus, which is in sliding contact with the surface of a measurement object, is moved in an overlapping manner along the average surface of the measurement object, and each time the stylus passes, the contour shape of the cross section of the measurement object is cross-sectioned. A cross-sectional shape detector for use in a material hardness measurement / evaluation device that detects a curve and, based on each cross-sectional curve, determines the material hardness of the measurement object, wherein the cross-sectional shape detector is the measurement A support that is fed and moved in a direction along the average surface of an object, a plurality of stylus that can swing independently of each other with respect to the same, and relative displacement of each stylus with respect to the support. A cross-section shape detector for a material hardness measurement / evaluation apparatus, comprising: 2. A contact needle that slides on the surface of the object to be measured is moved in an overlapping manner along the average surface of the object to be measured, and the contour shape of the cross section of the object to be measured is crossed each time the pointer is passed. A cross-sectional shape detector for use in a material hardness measurement / evaluation device that detects a curve and, based on each cross-sectional curve, determines the material hardness of the measurement object, wherein the cross-sectional shape detector is the measurement A support body that is fed and moved in a direction along the average surface of the object, and is swingably supported independently of the support body, and the tip end portions thereof are spaced from each other in the feed direction. A material hardness measuring and evaluating device, comprising: a plurality of arms for supporting a stylus; and a plurality of displacement detecting means for detecting a displacement of each arm with respect to the support body, for each arm. Cross-section shape detector. 3. A contact probe that is in sliding contact with the surface of the object to be measured is moved in an overlapping manner along the average surface of the object to be measured, and the contour shape of the cross section of the object to be measured is crossed each time the probe is passed. A cross-sectional shape detector for use in a material hardness measurement / evaluation device that detects a curve and, based on each cross-sectional curve, determines the material hardness of the measurement object, wherein the cross-sectional shape detector is the measurement The support is driven so as to move in a direction along the average surface of the object, and the support is independently rocked in a plane including a cross section orthogonal to the average surface of the measurement object. A plurality of arms that are movably supported and that support the stylus at intervals at mutual intervals in the feed direction and the stylus are brought into contact with the surface of the measurement object at a constant measurement pressure. Spring force is applied to each arm individually. A plurality of load springs, and a plurality of displacement detection coils for detecting the displacement of each arm with respect to the support, for each arm. Detector.