JPH09178462A - Multi-dimensional coordinate measuring machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measuring machine which can be operated simply, prevents erroneous recognition of shape due to erroneous operation, and can recognize many kinds of shapes automatically by determining calculation procedures which correspond to a shape to be measured of measurement item in accordance with the number of measuring points which are counted. SOLUTION: A measurement value take-in part 21 takes in a measured value at each measuring point of an object to be measured detected by a detecting probe, and a measuring point counting part 22 counts the number of measuring points. Measurement item which corresponds to the number of measurement point and shows a shape to be measured and calculation procedures which correspond to the shape to be measured of the measurement item are stored in a storage means 23. A measurement item determining part 24 determines the calculation procedures which correspond to the shape to be measured of the measurement item in accordance with the number of measurement points counted by the measuring point counting part 22. A shape calculation part 25 calculates the shape of an object to be measured based on the calculation procedures determined by the measurement item determining part 24 and a measured value taken in by the measurement value take-in part 21.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-dimensional coordinate measuring machine such as a two-dimensional coordinate measuring machine or a three-dimensional coordinate measuring machine which measures the shape of a measured object by relatively moving the measured object and a detector. .

[0002]

2. Description of the Related Art Conventionally, as a multi-dimensional coordinate measuring machine of this kind, for example, a measurement item of an object to be measured is selected from a plurality of measurement items "for example, a point, a straight line, a circle, a rectangle, etc." and keyed. After that, a two-dimensional coordinate measuring machine that measures the object to be measured at a plurality of measuring points is known.

Further, as a conventional multidimensional coordinate measuring machine, based on a measurement value obtained by bringing a contact type probe into contact with each measurement point of an object to be measured and a measurement direction at each measurement point,
The shape of the object to be measured is a predetermined geometrical shape "point, straight line,
A three-dimensional coordinate measuring machine that automatically recognizes a circle, an ellipse, a sphere, a plane, a cylinder, and a cone is known.

[0004]

However, in the former prior art described above, since it is necessary to select a measurement item of the measured object from a plurality of measured items and key-in it, an input error causes the measured object to be measured. There was a risk of erroneously recognizing the shape.

Further, in the latter prior art, (1) the recognizable shape is limited to a basic geometrical shape, for example, "a straight line, a plane, a circle, an ellipse, a sphere, a cylinder, a cone", and is generally measured. Frequently used geometric shapes such as "square shape, two-stage cylinder", "distance between straight line and point", "distance between plane and point",
There is a problem that it is not possible to measure a complex shape such as "the line of intersection of circles". (2) When measuring a shape that cannot be automatically recognized, it is necessary to switch to a measurement method in which a measurement item is key-inputted as in the former conventional technique, which easily causes confusion in operation and makes the measurement operation complicated. There was a problem of becoming. (3) Further, since the shape of the object to be measured is automatically recognized based on the measuring direction, it is necessary to move the contact probe in the normal direction of the object to be measured at each measuring point. There was a risk of erroneously recognizing. Therefore, it is necessary to check for each measurement whether or not the shape of the object to be measured is correctly recognized, which causes a problem of poor work efficiency.

The present invention has been made in view of the above circumstances, and its problems are that the measurement operation is simple, erroneous recognition of shapes due to erroneous operation is prevented, and various types of shapes can be automatically recognized, and measurement items can be measured. Is to provide a multi-dimensional coordinate measuring machine to which can be added arbitrarily.

[0007]

In order to solve the above-mentioned problems, a multidimensional coordinate measuring machine according to the invention of claim 1 measures the shape of an object to be measured by relatively moving the object to be measured and a detector. In the multi-dimensional coordinate measuring machine, which corresponds to the measurement point, a measurement value capturing section that captures the measurement value of each measurement point of the DUT detected by the detector, a measurement point counting section that counts the measurement point, and the measurement point However, a measurement item indicating a measurement shape, a storage unit that stores a calculation procedure corresponding to the measurement shape of the measurement item, and a measurement shape of the measurement item according to the number of measurement points counted by the measurement point counting unit. Determination unit for determining a calculation procedure corresponding to the above, a calculation procedure determined by the determination unit, and a shape calculation unit for calculating the shape of the object to be measured based on the measurement value captured by the measurement value capturing unit. Equipped with It is characterized in.

The determining unit determines the calculation procedure corresponding to the measurement shape of the measurement item according to the number of measurement points, and the shape calculating section calculates the shape of the object to be measured based on the determined calculation procedure and the measured value. , The risk of erroneous recognition of the shape due to the measurement operation has disappeared. Therefore, it is not necessary to confirm whether or not the shape of the object to be measured is correctly recognized for each measurement, and the operator can concentrate on the measurement work. Further, by additionally storing in the storage means the arbitrary measurement item corresponding to the number of measurement points and the calculation procedure corresponding to the measurement item, the necessary measurement items can be increased. In addition, the operation of selecting a measurement item and inputting a key is not required, and an erroneous recognition of the shape due to an input error does not occur. Therefore, the measurement operation is easy,
It is possible to prevent erroneous recognition of shapes due to erroneous operation, to automatically recognize many types of shapes, and to add measurement items arbitrarily.

In the multidimensional coordinate measuring machine according to the second aspect of the present invention, the calculation procedure is a calculation formula created according to the measurement procedure of the corresponding measurement item, and is stored in the storage means for each measurement item. It is characterized by being.

By storing the calculation procedure in the storage means for each measurement item, it is possible to automatically recognize a complicated geometric shape or a complex shape.

In the multidimensional coordinate measuring machine according to a third aspect of the present invention, the storage means has a measurement item correspondence table showing a plurality of combinations of measurement items and a plurality of the measurement items having different combinations of the measurement items. At least one of the correspondence table is stored.

It is possible to prepare a plurality of measurement item correspondence tables that meet the requirements of the operator and select an optimum one of the measurement item correspondence tables including the measurement items from these.

A multidimensional coordinate measuring machine according to a fourth aspect of the present invention further includes a measurement end command section for instructing measurement end, and the measurement item determining section issues a measurement end command from the measurement end command section. When received, a measurement item corresponding to the counted number of measurement points is determined based on the measurement item correspondence table.

In the multidimensional coordinate measuring machine according to a fifth aspect of the present invention, the measurement end command section is composed of a touch sensor provided at a position where an operator's hand touches at the time of measurement, and the worker finishes at the time of measurement. When is released from the touch sensor, the measurement end command is output to the measurement item determination unit.

At the end of the measurement, the operator can generate a command to end the measurement simply by releasing the hand from the touch sensor,
It is not necessary to be aware of the command to end the measurement every time the measurement is completed, and the operator can concentrate on the measurement.

A multidimensional coordinate measuring machine according to a sixth aspect of the present invention is characterized by further comprising a display unit for displaying the measurement item determined by the determination unit.

The determined measurement item can be easily confirmed by looking at the display section.

[0018]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram showing a schematic structure of a three-dimensional coordinate measuring machine according to a first embodiment of the present invention, and FIG. 3 is a perspective view showing a schematic structure of the measuring machine. As shown in FIGS. 1 and 3, the three-dimensional coordinate measuring machine includes a measuring machine body 1A,
The console 2A and the control unit 3A are provided.

At the tip of the Z-axis spindle 4 of the measuring machine main body 1A, a contact type probe (detector) 6 which outputs a trigger signal when the object to be measured placed on the base 5 is contacted is mounted. . As a result, the contact-type probe 6 becomes X
It is movable in the axis, Y-axis, and Z-axis directions. Measuring machine 1
A is a coordinate value of each measurement point (stylus of the contact type probe 6) when the contact type probe 6 outputs a trigger signal by moving the contact type probe 6 to contact each measurement point of the object to be measured. Data representing the center coordinates of the sphere 6a) is output to the control unit 3A as a measurement value.

As shown in FIGS. 1, 3 and 4, the console 2A is provided with an operating section (joystick) 7 for operating the movement of the contact type probe 6 and a display section 8.

The display unit (CRT screen) 8 is provided with three soft keys: a measurement mode selection key 9, a table selection key 10 and a measurement end key 11.

The measurement mode selection key 9 is a soft key for selecting one of a plurality of measurement modes. When the measurement item automatic recognition mode (the mode for measuring the shape of the object to be measured without designating the measurement item) is selected by the selection key 9, a selection command indicating the selected measurement mode is issued from the console 2A to the control unit. It is designed to be output to 3A.

The table selection key 10 is a soft key for selecting one of a plurality of measurement item correspondence tables shown in Tables 1 to 4. When one of the plurality of measurement item correspondence tables is selected by the table selection key 10, a selection command representing the selected measurement item correspondence table is output from the console 2A to the control unit 3A.

[0025]

[Table 1]

[0026]

[Table 2]

[0027]

[Table 3]

[0028]

[Table 4] The measurement end key 11 is a soft key for instructing the end of measurement and constitutes a measurement end command section. When the measurement end key 11 is pressed, a measurement end command is output from the console 2A to the control unit 3A.

As shown in FIG. 2, the display section 8 constantly displays the characters "measurement points" and "measurement items" and the icon display section 8a. A number indicating the number of measurement points is displayed in the display section 8 at a position corresponding to the character "number of measurement points".
Characters representing the measurement item are displayed at locations corresponding to the characters "measurement item" (the circle character is displayed in FIG. 2). An icon representing the determined measurement item is displayed on the icon display portion 8a (a circular icon is displayed in the figure). Further, the display section 8 displays the measurement item correspondence table selected by the table selection key 10 (Table 1 is displayed in the figure), and displays one of the combinations of the number of measurement points and the measurement items. A surrounding dotted line 8b is displayed (in the figure, 3 and a circle are surrounded by the dotted line 8b).

The control unit 3A, as shown in FIG.
A measurement value capturing unit 21 that captures the measurement value of each measurement point that is detected by the contact type probe 6 and that is output from the measuring instrument body 1A; and a measurement point counting unit 22 that counts the number of measurement points.
A memory (storage unit) 23 in which a plurality of measurement item correspondence tables of different types shown in Tables 1 to 4 are stored, and a measurement item determination unit 2
4 and a shape calculation unit 25.

The measurement value fetching section 21 is a measuring machine main body 1A.
It is configured to capture and store the measurement value of each measurement point output from the.

The measurement point counting section 22 is a counter configured to count up by one each time a measurement value is input from the measuring machine body 1A.

Each measurement item correspondence table stored in the memory 23 shows a plurality of combinations of the number of measurement points and the measurement items corresponding to the number of measurement points. Each combination shown in each measurement item correspondence table is made so that one measurement item corresponds to one measurement point.

For example, in the measurement item correspondence table shown in Table 1, the number of measurement points is 1 (hereinafter, the number of measurement points is represented only by numbers), 2 is a straight line, 3 is a circle, and 4 is a circle. "ball"
However, 5 is a “quadrangle”, 6 is a “cylindrical”, 7 is a “circle of plane and sphere”, 8 is a “work coordinate system (1)”, and 9 is a “3 plane intersection”. 11 "Work coordinate system B (2)"
Are correspondingly registered as measurement items. Here, "work coordinate system (1)" is a measurement item that sets a work coordinate system whose origin is the center of a circle, and "work coordinate system (2)" is a work coordinate system whose origin is the intersection of three planes. Is a measurement item for setting.

The measurement item correspondence table shown in Table 2 is suitable for mainly measuring "distance between plane and point", "two-stage cylinder", "cone (4, 4 points)" and the like. Here, "cone (4,
“4 points)” is a measurement item (cone) assuming a procedure of measuring a circle at 4 points and 4 points respectively. The measurement item correspondence table shown in Table 3 is "distance between straight line and point", "distance between plane and point",
It is suitable for mainly measuring "the intersection of a circle and a straight line", "the intersection of a circle and a circle", etc. Then, the measurement item correspondence table shown in Table 4 is suitable when the “circle” is measured at three or more points.

In the memory 23, the calculation procedure corresponding to each of all the measurement items registered in each measurement item correspondence table is created and stored in accordance with the previously assumed measurement procedure.

FIGS. 5A to 5J show each measurement item registered in the measurement item correspondence table shown in Table 1, that is, “point”,
"Straight line", "Circle", "Sphere", "Square", "Cylinder",
"Circle of plane and sphere", "Work coordinate system (1)" and "3"
The number of measurement points and the measurement procedure corresponding to "the intersection of planes" are shown.

For example, when the measurement item is “cylindrical”, FIG.
As shown in (f), it is assumed that a circle is measured at 3 points in the order of measurement points 1 → 3, and then a circle is measured at 3 points in the order of measurement points 4 → 6. According to this measurement procedure, the measurement point coordinate sequence (measurement value of each measurement point) is arranged in the measurement order (input order), and the measurement points 1 to 3
The calculation procedure made to calculate the circle at the three points, and then to calculate the circle at the three measurement points 4 to 6 is the "cylinder".
It is stored corresponding to. Similarly, when the measurement item is “a circle intersecting a plane and a sphere”, as shown in FIG. 5 (g), the sphere is measured at four points in the order of measurement points 1 → 4, and then measurement points 5 → 7. It is assumed that the procedure is to measure the plane at three points in sequence. According to this measurement procedure, the measurement point coordinate sequence is measured in the order of measurement points 4 of measurement points 1 to 4.
The calculation procedure created so that the sphere is calculated at the point and then the plane is calculated at the three measurement points 5 to 8 is stored in association with the "intersection circle of the plane and the sphere". Similarly, when the measurement item is “work coordinate system (1)”, as shown in FIG. 5H, the reference plane is measured at three points in the order of measurement points 1 → 3, and then measurement points 4 → 5. It is assumed that the straight line of the reference axis is measured at two points in this order, and then a circle (the center of which is the origin) is measured at three points in the order of measurement points 6 → 8. According to this measurement procedure, the measurement point coordinate sequence is calculated in order of measurement, and the reference plane is calculated at the three measurement points 1 to 3, then the straight line of the reference axis is calculated at the two measurement points 4 and 5, and next. The calculation procedure created to calculate the center position coordinates of the circle that is the origin (the origin of the work coordinate system) at the three measurement points 6 to 8 is stored in correspondence with the "work coordinate system (1)". Has been done. Similarly, when the measurement item is “work coordinate system (2)”, as shown in FIG. 5 (j), the reference plane is measured at three points in the order of measurement points 1 → 3, and then measurement points 4 → 5. Measure the straight line of the reference axis at two points in this order, then measure the second plane at three points in the order of measurement points 6 → 8, and then measure the third plane at three points in the order of measurement points 9 to 11. Assumes a procedure to measure. According to this measurement procedure, the measurement point coordinate sequence is calculated in order of measurement, and the reference plane is calculated at the three measurement points 1 to 3, then the straight line of the reference axis is calculated at the two measurement points 4 and 5, and next. Calculation of the second plane is performed at three points of measurement points 6 to 8, then calculation of a third plane is performed at three points of measurement points 9 to 11, and then three planes (reference plane, first plane). The calculation procedure created so as to calculate the intersection of the three planes serving as the origin of the work coordinate system from the plane and the second plane is stored in association with the "work coordinate system (2)".

FIG. 6 shows the number of measurement points and the measurement procedure corresponding to the “distance between plane and point” among the measurement items registered in the measurement item correspondence table shown in Table 2. The calculation procedure corresponding to each of all the measurement items registered in the measurement item correspondence table is created and stored in the memory 23 as in the case of the measurement item correspondence table shown in Table 1 described above.

7A to 7C show "distance between straight line and point", "intersection point of circle and straight line", "circle and circle" among the measurement items registered in the measurement item correspondence table shown in Table 3. The number of measurement points and the measurement procedure corresponding to the "intersection points of circles" are shown. The calculation procedure corresponding to each of all the measurement items registered in the measurement item correspondence table is created and stored in the memory 23 as in the case of the measurement item correspondence table shown in Table 1 described above.

Further, the calculation procedure corresponding to each of all the measurement items registered in the measurement item correspondence table shown in Table 4 is made in the same manner as in the case of the measurement item correspondence table shown in Table 1 described above, and is stored in the memory 23. Remembered in.

The measurement item deciding unit 24 gives the measurement point data counted by the measurement point counting unit 22, the selection command output from the table selection key 10, and the measurement end command output from the measurement end key 11. And are entered. The measurement item determination unit 24, based on the selection command output from the table selection key 10, outputs data representing the measurement item correspondence table selected by the table selection key 10 among the four measurement item correspondence tables stored in the memory 23. It is configured to output to the console 2A. The console 2A is configured to display the measurement item correspondence table on the display unit 8 based on the data representing the selected measurement item correspondence table output from the measurement item determination unit 24.

Further, the measurement item determination unit 24, every time the measurement point number data is input from the measurement point number counting unit 22, the measurement item correspondence table selected by the table selection key 10 is input. Is determined, and data representing the determined measurement item and the number of measurement points corresponding to this measurement item are output to the console 2A. The console 2A is configured to display a number representing the number of measurement points, a character representing the measurement item, and an icon based on the data of the measurement item and the number of measurement points output from the measurement item determining unit 24. For example, when the measurement item correspondence table shown in Table 1 is selected,
When the data of the number of measurement points 3 is output from the measurement point counting unit 22 to the measurement item determination unit 24, the measurement item determination unit 24 represents the data of the number of measurement points 3 and the “circle” as the measurement item corresponding to the number of measurement points 3. The data and is output to the console 2A. As a result, the console 2A displays the number (3) representing the number of measurement points, the characters representing the circle of the measurement item, and the icon. Next, when the data of the number of measurement points 4 is output from the measurement point number counting unit 22 to the measurement item determination unit 24, the measurement item determination unit 24 determines that the data of the number of measurement points 4 and the “ball as a measurement item corresponding to the number of measurement points 4”. And the data representing "" are output to the console 2A. As a result, the console 2A displays the number (4) indicating the number of measurement points, the character indicating the sphere of the measurement item, and the icon.

Further, when the measurement item determining section 24 receives a measurement end command output from the measurement end key 11, the latest measurement point data (the last data output from the measurement point counting section 22 up to this point) is received. Data) of the shape calculation unit 2 based on the measurement item correspondence table selected by the table selection key 10.
It is configured to output to 5. For example, when the measurement item correspondence table shown in Table 1 is selected, after the measurement point number counting unit 22 outputs the data of the measurement point number 3 to the measurement item determining unit 24, the measurement end command is issued from the measurement end key 11. When output to the measurement item determination unit 24, the measurement item determination unit 2
4 determines the "circle" as the measurement item corresponding to the latest measurement point data 3 from the measurement item correspondence table shown in Table 1,
The data representing the determined “circle” is output to the shape calculator 25.

When the shape calculation unit 25 receives the data representing the measurement item output from the measurement item determination unit 24, the calculation procedure corresponding to the measurement item (the calculation procedure stored in the memory 23) and the measurement value The measurement item is configured to be calculated based on the measurement values of the respective measurement points stored in the capturing unit 21. For example, when the measurement item correspondence table shown in Table 1 is selected, the shape calculation unit 25 stores the data in the memory 23 when the measurement item determination unit 24 receives data representing “circle” as the measurement item. The “circle” is calculated based on the calculation procedure corresponding to the “circle” and the measurement values of the respective measurement points stored in the measurement value capturing unit 21.

Next, the operation of the coordinate measuring machine according to the first embodiment will be described with reference to the flow chart shown in FIG.

First, the case where the "circle" of the object to be measured is measured using the measurement item correspondence table of Table 1 will be described.

Before the measurement is started, the measurement item correspondence table of Table 1 is selected by operating the table selection key 10.

When the measurement is started, in step 100,
Initialize (reset the number of measurement points and measurement values stored in the previous measurement).

Next, in step 101, the initial screen of the display unit 8 is created. That is, a number indicating the number of measurement points on the display unit 8, characters and icons indicating measurement items,
Clear each display in the measurement item correspondence table used in the previous measurement. At the same time, the measurement item correspondence table of Table 1 selected before the start of measurement is displayed on the display unit 8 (see FIG. 2).

Next, in step 102, it is determined whether or not the measured value has been input (whether the measured value has been taken into the measured value taking section 21 from the measuring instrument body 1A).

When the measurement value of the first measurement point is input,
In step 103, the number of measurement points is incremented by 1 (the count value is set to 1), and the input measurement value is stored (for example, stored in the memory of the measurement value capturing unit 21).

Next, in step 104, a measurement item (point) is selected from the measurement item correspondence table according to the number of measurement points (1).

Next, in step 105, the display unit 8 displays a number indicating the number of measurement points (1) and characters and icons indicating measurement items (points). At this time, the selected measurement point number (1) and the measurement item (point) in the measurement item correspondence table shown on the display unit 8 are surrounded by a dotted line 8b.

Next, returning to step 102, it is determined whether or not the next measurement value (measurement value at the second measurement point) has been input.

If the next measured value is not input, step 1
In step 06, it is determined whether the measurement item correspondence table has been changed.

At this time, since the measurement item correspondence table is not changed, the process proceeds to step 108 and it is determined whether or not there is a measurement end command.

At this time, since there is no command to end the measurement, the process returns to step 102. Until the next measurement value (measurement value of the second measurement point) is input, steps 102, 106 and 1 are performed.
Repeat 08.

When the next measurement value (measurement value of the second measurement point) is input, the process proceeds to step 103, the number of measurement points is incremented by 1 (count value is set to 2), and the input measurement value is added. To store.

Next, in step 104, a measurement item (straight line) is selected from the measurement item correspondence table according to the number of measurement points (2).

Next, in step 105, the display unit 8 displays a number representing the number of measurement points (2) and characters and icons representing the measurement item (straight line). Also at this time, the selected number of measurement points (2) and the measurement item (straight line) are surrounded by the dotted line 8b.

Next, returning to step 102, steps 102, 106 and 108 are repeated until the next measurement value (measurement value at the third measurement point) is input.

When the next measurement value (measurement value of the third measurement point) is input, the process proceeds to step 103, the number of measurement points is incremented by 1 (the count value is set to 3), and the measurement value is stored. To do.

Next, in step 104, a measurement item (circle) is selected from the measurement item correspondence table according to the number of measurement points (3).

Next, in step 105, the number indicating the number of measurement points (3) and the characters and icons indicating the measurement item (circle) are displayed on the display section 8 (see FIG. 2). At this time, the operator can easily know from the display of the display unit 8 that the measurement of the target measurement item “circle” has been completed.

Next, returning to step 102, steps 102, 106 and 108 are repeated until the operator issues a measurement end command by pressing the measurement end key 11.

When a command to end the measurement is issued, step 108
The determination result of is Yes, and the process proceeds to step 109.

In this step 109, the shape of the measurement item "circle" is calculated based on the measurement value and the calculation procedure corresponding to the circle, and the calculation result is output (displayed on the display unit 8).
finish.

If the measurement item cannot be selected according to the number of measurement points in step 104, for example, if there is no measurement item corresponding to the number of measurement points 7 as in the measurement item correspondence table shown in Table 3, in step 105, The display of characters and icons indicating the measurement items on the display unit 8 is cleared.
This can prevent the operator from erroneously recognizing the measurement item.

When it is necessary to change the measurement item from "circle" to "intersection of a circle and a straight line" during measurement of "circle" using the measurement item correspondence table of Table 1, By operating the selection key 10, the measurement item correspondence table of Table 1 can be easily changed to the measurement item correspondence table of Table 3.

When the measurement item correspondence table is changed during measurement in this way, the determination result of the above step shown in FIG. 8 is Yes.
Therefore, the process proceeds to step 107. In step 107, the display on the display unit 8 is changed according to the change in the measurement item correspondence table. For example, in the display state shown in FIG. 2, when the measurement item correspondence table of Table 1 is changed to the measurement item correspondence table of Table 3,
In step 107, the number and the icon representing the measurement item are changed from “circle” to “distance between the straight line and the point” while the number representing the measurement point (3) remains unchanged, and the measurement item correspondence table is changed from Table 1 to Table 3. Change to the one. After this change, the process proceeds to step 102.

According to the first embodiment, the measurement item corresponding to the number of measurement points is determined from the selected measurement item correspondence table of Tables 1 to 4, and the determined measurement item is associated with this measurement item. Since the calculation is performed based on the calculation procedure and the measured value, the operation of keying the measurement item is not necessary, and the erroneous recognition of the shape due to an input error does not occur. Therefore, it is not necessary to check for each measurement whether or not the shape of the measured object is correctly recognized. Further, by adding an arbitrary measurement item corresponding to the number of measurement points to the measurement item correspondence table stored in the memory 23, the required measurement items can be increased. Therefore, the measurement operation is simple, erroneous recognition of the shape due to erroneous operation can be prevented, various kinds of shapes can be automatically recognized, and measurement items can be arbitrarily added.

More specifically, various types of shapes will be described. According to the first embodiment, measurement items which cannot be automatically recognized by the conventional technique, for example, “planar” registered in the measurement item correspondence table of Table 1 are used. And sphere intersection circle "," work coordinate system (1) "," intersection of 3 planes "," work coordinate system B "
(2) "," distance between plane and point "registered in the measurement item correspondence table of Table 2," two-stage cylinder "," cone (4, 4 points) ", and registration in the measurement item correspondence table of Table 3 It is possible to automatically perform the distance calculation and the complex shape recognition such as the “distance between straight line and point”, “intersection point between circle and straight line”, “intersection point between circle and circle”. Also, when measuring the same measurement item at different measurement points depending on the measurement accuracy, for example, when measuring a “circle” at multiple points of 3 or more, as in the measurement item correspondence table of Table 4, The same measurement item (circle in Table 4) corresponding to each measurement point can be automatically recognized.

According to the first embodiment, in the measurement item correspondence tables of Tables 1 to 4, the number of measurement points and the measurement item are 1
Since there is a one-to-one correspondence, there is no need for a process of selecting and recognizing a measurement item from a plurality of items. Therefore, all the measurement items shown in the measurement item correspondence table can be surely recognized, and the circuit configuration can be simplified and the cost can be reduced as much as the recognition process is unnecessary, and the measurement speed can be increased. can do.

According to the first embodiment described above, the selected measurement item correspondence table of Tables 1 to 4 is displayed on the display unit 8 and the measurement on the display unit 8 is performed every time the measured value is input. Since the number of points and the display of measurement items are switched (see steps 102 to 105 in FIG. 8), it is possible to confirm the selected measurement item correspondence table and confirm that the target measurement item is displayed on the display unit 8. After that, measurement end key 1
You can press 1 to end the measurement.

According to the first embodiment, when changing the measurement item correspondence table during measurement, the measurement item correspondence table can be changed with one touch by operating the table selection key 10. Moreover, the display of the display unit 8 is changed in accordance with the change of the measurement item correspondence table (step 10 in FIG. 8).
7), the changed measurement item correspondence table can be confirmed.

In the first embodiment, in the case of measuring "straight line", "circle", "sphere" and "quadrangle", FIGS. 5 (b), (c), (d) and ( Although it is not necessary to perform the measurement in each of the measurement procedures shown in e), when measuring other measurement items, FIGS. 5 (f) to (j), FIG. 6, and FIGS. It is necessary to perform the measurement according to the measurement procedure shown in each. Note that the calculation procedure stored in the memory 23 corresponding to the measurement items shown in FIGS. 5F to 5J, 6 and 7A to 7C is the most general procedure for the operator. It can be made by the operator himself according to the measurement procedure.

In addition, in the first embodiment, as shown in FIG.
As shown in FIG. 3, a touch sensor 11A is provided near the operation unit 7 on the console 2A, and a command to end the measurement is output to the control unit 3A when the hand is separated from the touch sensor 11A. Good.

According to this configuration, when the measurement is completed and the hand is released from the operation section 7 and the touch sensor 11A, the measurement completion command is output to the control unit 3A, so that the measurement completion command is issued each time the measurement is completed. Operation for giving (operation for ending measurement)
You can move to the next measurement without having to perform
The operator can concentrate on the measurement.

FIG. 9 shows a modification of the first embodiment. In this modification, a touch sensor 11B similar to the touch sensor 11A is provided on the entire outer circumference of the operation unit 7 (joystick).

According to the modified example of FIG. 9, when the measurement is completed and the hand is released from the operation section 7, the hand is separated from the touch sensor 11A and the measurement end command is output to the control unit 3A. It is not necessary to perform the measurement end operation every time.

FIG. 10 shows a second modification of the first embodiment.
Is shown. In one modification, a measurement end switch 11C is provided at the lower end of the Z-axis spindle 4 on which the contact probe 6 is mounted.

In the measurement in which the contact type probe 6 is manually moved, the measurement is performed while holding the grip portion 4a integral with the Z-axis spindle 4 with both hands. When the hand is released from the grip 4a and the switch 11C is pressed at the end of the measurement, a command to end the measurement is output to the control unit 3A.

According to this modification, it is possible to push the switch 11C immediately after releasing the hand from the grip 4a at the end of the measurement.

In another modification shown in FIG. 10, the grip portion 4a is used.
A touch sensor 11D similar to the touch sensor 11A is provided on the entire outer circumference of the. According to this modification, when the measurement is completed and the hand is released from the grip portion 4a, the hand is released from the touch sensor 11D and the measurement end command is issued.
Since it is output to A, it is not necessary to perform the measurement end operation every time the measurement is completed.

FIG. 11 is a block diagram showing the measurement item determining section 24A of the three-dimensional coordinate measuring machine according to the second embodiment of the present invention. This three-dimensional coordinate measuring machine can use a measurement item correspondence table (see, for example, Table 5) including one or more combinations in which a plurality of measurement items correspond to one measurement point.

The three-dimensional coordinate measuring machine according to the second embodiment is equipped with the measuring machine body 1A, the console 2A and the control unit 3A shown in FIG. 1 as in the first embodiment.

In this three-dimensional coordinate measuring machine, the contact probe 6 which outputs a trigger signal when the object to be measured is contacted.
Is mounted on the tip of the Z-axis spindle 4 (see FIG. 3) as in the first embodiment. Then, in order to recognize (determine) one measurement item among a plurality of measurement items corresponding to the same number of measurement points, the measurement value capturing unit 21 of the control unit 3A shown in FIG. (Measurement point coordinates) and normal vector information are taken in.

As the normal vector information, the coordinate values of the measuring instrument body 1A immediately before the contact type probe 6 comes into contact with the object to be measured, the moving direction of the contact type probe at the time of contact, the measuring instrument body 1A after making contact. Data of any one of the coordinate value, the coordinate value of the measuring instrument main body 1A when decelerated and stopped due to contact, and the touchback movement direction is used.

In the three-dimensional coordinate measuring machine according to the second embodiment, the measurement item determining section 24 of the control unit 3A shown in FIG.
Has the configuration shown in FIG. That is, the measurement item determination unit 24 includes the first normal vector calculation unit 31, the second normal vector calculation unit 32, and the vector comparison unit 33.
A shape error calculation unit 34 and an error comparison unit 35.

The first normal vector calculation unit 31 calculates the normal vector at each measurement point by vector calculation using the measurement value of each measurement point and the normal vector information fetched by the measurement value fetching unit 21. To do. Second normal vector calculation unit 3
2 calculates the normal vector at each measurement point in the measurement item calculated by the shape calculation unit 25 shown in FIG. The vector comparison unit 33 compares whether or not the normal vectors output from the normal vector calculation units 31 and 32 are substantially parallel. The shape error calculator 34 calculates an error (shape error) of the shape calculated by the shape calculator 25 with respect to the shape (for example, “cylinder, cone”) of the measurement item. Then, the error comparison unit 35 compares the shape errors calculated by the shape error calculation unit 34.

The three-dimensional coordinate measuring machine according to the second embodiment can use the measurement item correspondence table shown in Table 5. In the measurement item correspondence table shown in Table 5, the number of measurement points is 1 (hereinafter, the number of measurement points is represented only by numbers), “point” is 2, “straight line” is 3, “circle, plane” is 4 and “sphere is”. "Is 5 and" square "is 6
"Cylinder, cone", 7 "Circle of plane and sphere", 8 "Work coordinate system (1)", 9 "Intersection of 3 planes"
“Work coordinate system (2)” is registered as a measurement item corresponding to 11 respectively.

[0093]

[Table 5] FIGS. 13A and 13B show the number of measurement points and the measurement procedure corresponding to “plane” and “cone” of the measurement items registered in the measurement item correspondence table shown in Table 5. A calculation procedure created according to such a measurement procedure is stored in the memory 23 corresponding to each measurement item.

Next, the operation of the three-dimensional coordinate measuring machine according to the second embodiment will be described based on the flowchart shown in FIG.

Before the measurement is started, the measurement item correspondence table of Table 5 is selected by operating the table selection key 10.

Since steps 100 to 108 of the flowchart shown in FIG. 15 are the same as those of the flowchart shown in FIG. In the second embodiment, when a plurality of measurement items are selected corresponding to one measurement point in step 104, for example, the measurement point (3)
When the measurement item "circle, plane" corresponding to is selected, characters and icons representing the measurement item (circle, plane) are displayed on the display unit 8 in step 105 (see FIG. 12).
Similarly, when “cylinder, cone” corresponding to the number of measurement points (6) is selected in step 104, characters and icons representing measurement items (cylinder, cone) are displayed on the display unit 8 in step 105.

The determination result of step 108 in FIG. 15 is Yes.
When s is reached, the process proceeds to step 120, and the process branches for each measurement point.

That is, when the number of measurement points (the number of measurement points at the time the measurement end command is issued) is 1, step 121
Go to, recognize as a "point", calculate the point and end.

When the number of measurement points is 2, the process proceeds to step 122, the line is recognized, the line is calculated, and the process is ended.

When the number of measurement points is 3, the process proceeds to step 123, the "circle" and the "plane" are calculated, and the surface normal vector at each measurement point calculated based on the normal vector information,
Compare the calculated normal vector at each measurement point of "circle" and "plane", and when both vectors are substantially parallel, recognize the "plane" of the two measurement items "circle, plane", finish.

When the number of measurement points is 4, the routine proceeds to step 124, where it is recognized as a "sphere", the sphere is calculated, and the procedure ends.

When the number of measurement points is 5, the process proceeds to step 125, the rectangle is recognized, the rectangle is calculated, and the process is terminated.

When the number of measurement points is 6, the process proceeds to step 126, "cylinder" and "cone" are calculated, and of the two calculated shapes, the shape having the smaller shape error (cylindricity / cone) is recognized, finish.

When the number of measurement points is 7, the routine proceeds to step 127, where it is recognized as "a plane-sphere intersection", this intersection is calculated, and the process ends.

When the number of measurement points is 8, the process proceeds to step 128, where it is recognized that "work coordinate system (1) is set" with the center of the circle as the origin, this coordinate system is calculated, and the process ends.

When the number of measurement points is 9, the process proceeds to step 129, recognizes as "intersection of three planes", calculates this intersection, and ends.

When the number of measurement points is 11, the process proceeds to step 130, and the "work coordinate system (2)
"Setting", calculate this coordinate system, and finish.

If there is no measurement item corresponding to the number of measurement points, for example, if the number of measurement points is 10 at the time when the measurement end command is issued, error processing is performed and the process ends.

As described above, according to the second embodiment, a combination in which a plurality of measurement items correspond to one measurement point (a combination of three measurement points and a circle, a combination of planes, and six measurement points and a cylinder, a cone) With respect to (combination), it is only necessary to recognize one measurement item from the two small measurement items corresponding to the same number of measurement points, and therefore it is possible to reduce erroneous recognition of the shape. Further, by selecting shapes that are easily distinguishable from each other as a plurality of measurement items corresponding to the same number of measurement points, it is possible to further reduce erroneous recognition of shapes.

According to the second embodiment described above, the measurement points shown in Table 5 are the minimum points required to measure the corresponding measurement items, so that the measurement is performed most efficiently. be able to.

In the second embodiment, instead of the contact type probe, a trigger type probe such as a non-contact type optical probe which outputs a trigger signal when the object to be measured is focused may be used. Good.

FIG. 16 is a flowchart showing the operation of the three-dimensional coordinate measuring machine according to the third embodiment of the present invention.
This three-dimensional coordinate measuring machine is a modification of the second embodiment.

In this three-dimensional coordinate measuring machine, when the object to be measured is brought into contact with the measuring machine body 1A, they are orthogonal to each other.
A scanning probe (detector) that can be displaced in one direction is attached to the tip of the Z-axis spindle 4 (see FIG. 3). Moreover, in order to recognize (determine) one measurement item from a plurality of measurement items corresponding to the same number of measurement points, the measurement value capturing unit 21 shown in FIG. It is designed to capture information and information. Here, the measurement value at each measurement point is a value obtained by adding the position coordinate of the measuring machine main body 1A when the scanning probe comes into contact with each measurement point and the displacement amount of the scanning probe. Further, the normal vector information is data of the surface normal vector of each measurement point obtained from the displacement amount of the scanning probe.

The three-dimensional coordinate measuring machine according to the third embodiment can use the measurement item correspondence table shown in Table 6, for example. In this measurement item correspondence table, the number of measurement points is 1 (hereinafter,
The number of measurement points is indicated only by numbers), “point” is 2, “straight line” is 3, “circle, plane, distance between straight line and point” is 4 “sphere, distance between straight line and straight line, plane and point” Is 5 "" square, ellipse, oval, intersection of circle and straight line, intersection of straight line and plane ", 6 is" cylinder, cone, two-stage cylinder, intersection of plane and plane, circle and circle. "The intersection of" and "the intersection of the plane and the sphere" in 7,
8 is "work coordinate system (1)", 9 is "intersection of 3 planes"
However, 11 is associated with “work coordinate system (2)” and registered as measurement items.

[0115]

[Table 6] 14A to 14C show "distance between straight line" among the measurement items registered in the measurement item correspondence table shown in Table 6,
The number of measurement points and the measurement procedure corresponding to the “intersection of a straight line and a plane” and the “intersection of a plane and a plane” are shown. A calculation procedure created according to such a measurement procedure is stored in the memory 23 corresponding to each measurement item.

Next, the operation of the three-dimensional coordinate measuring machine according to the third embodiment will be described with reference to the flowchart shown in FIG.

Before the measurement is started, the measurement item correspondence table of Table 6 is selected by operating the table selection key 10.

Note that steps 100 to 108 of the flowchart shown in FIG. 16 are the same as those in the flowchart shown in FIG. In the third embodiment, when a plurality of measurement items are selected corresponding to one measurement point in step 104, for example, the measurement point (3)
When the measurement item "circle, plane, straight line and point distance" corresponding to is selected, characters and icons representing all measurement items (circle, plane, straight line and point distance) are displayed on the display unit 8 in step 105. Is displayed in.

The determination result of step 108 in FIG. 16 is Yes.
When s is reached, the process proceeds to step 130 and the process branches for each measurement point.

That is, when the number of measurement points (the number of measurement points at the time when the measurement end command is issued) is 1, step 131
Go to, recognize as a "point", calculate the point and end.

When the number of measurement points is 2, the process proceeds to step 132, the line is recognized, the line is calculated, and the process is terminated.

When the number of measurement points is 3, 4, 5 or 6, the operation proceeds to step 133, where "circle", "plane""distance between straight line and point" is calculated, and each measurement point obtained from the displacement amount of the scanning probe. Comparing the surface normal vector at and the surface normal vector at each measurement point in each calculated measurement item (circle, plane, straight line and point distance), recognize the shape in which both vectors are the best, and finish. To do.

When the number of measurement points is 7, the routine proceeds to step 134, where it is recognized as an "intersection of a plane and a sphere", this intersection is calculated, and the process ends.

When the number of measurement points is 8, the process proceeds to step 135, recognizes that "work coordinate system (1) is set" with the center of the circle as the origin, calculates this coordinate system, and ends.

When the number of measurement points is 9, the process proceeds to step 136, where it is recognized as an "intersection of three planes", this intersection is calculated, and the process is terminated.

When the number of measuring points is 11, the process proceeds to step 137, and the "work coordinate system (2)
"Setting", calculate this coordinate system, and finish.

If there is no measurement item corresponding to the number of measurement points, for example, if the number of measurement points is 10 at the time the measurement end command is issued, error processing is performed and the process ends.

According to the third embodiment described above, when recognizing one measurement item from a plurality of measurement items corresponding to one measurement point, each measurement that best represents the shape of the object to be measured. Reliability of recognition because it recognizes the shape in which the surface normal vector of the point (surface normal vector obtained from the displacement of the scanning probe) and the calculated surface normal vector at each measurement point of each measurement item are the best match. Goes up. Therefore, many measurement items such as distance calculation and complex shape can be registered.

The present invention is not limited to the three-dimensional coordinate measuring machine described in each of the above embodiments, but can be applied to a two-dimensional coordinate measuring machine.

Specifically, the two-dimensional coordinate measuring machine is movable in two directions orthogonal to each other with respect to the object to be inspected, and a CCD camera as a detector for obtaining image data of the object to be inspected,
An image in which the image data from the CCD camera is subjected to image processing to create the coordinates of the edge portion and the edge normal vector (normal vector information) of each measurement point of the DUT, and the data representing the coordinates and the vector are output. It is provided with a measuring machine main body having a processing section, an operation console 2A and a control unit 3A shown in FIG. The measurement value acquisition unit 21 shown in FIG.
Captures the data of the coordinates of the edge portion and the edge normal vector output from the image processing unit. Furthermore, the measurement item determination unit 22 (see FIG. 2) of the two-dimensional coordinate measuring machine uses the edge method of each measurement point when recognizing one measurement item from a plurality of measurement items corresponding to one measurement point. It is configured to recognize the shape in which the line vector and the calculated surface normal vector at each measurement point of each measurement item are most matched.

According to such a two-dimensional coordinate measuring machine, when recognizing one measurement item from a plurality of measurement items corresponding to one measurement point, as in the case of the third embodiment. , Reliable recognition because it recognizes the shape in which the edge normal vector of each measurement point that best represents the shape of the DUT and the edge normal vector of each calculated measurement point of each measurement item are the best match. The degree goes up. Therefore, many measurement items such as distance calculation and complex shape can be registered.

[0132]

As described above, in the multidimensional coordinate measuring machine according to the invention described in claim 1, the determining unit determines the calculation procedure corresponding to the measurement shape of the measurement item according to the number of measurement points, Since the shape calculation unit calculates the shape of the object to be measured based on the determined calculation procedure and the measured value, there is no possibility of erroneous recognition of the shape due to the measurement operation. Therefore, it is not necessary to confirm whether or not the shape of the object to be measured is correctly recognized for each measurement, and the operator can concentrate on the measurement work. Further, by additionally storing in the storage means the arbitrary measurement item corresponding to the number of measurement points and the calculation procedure corresponding to the measurement item, the necessary measurement items can be increased.
In addition, the operation of selecting a measurement item and inputting a key is not required, and an erroneous recognition of the shape due to an input error does not occur. Therefore, the measurement operation is simple, erroneous recognition of the shape due to erroneous operation can be prevented, many kinds of shapes can be automatically recognized, and measurement items can be arbitrarily added.

According to the multidimensional coordinate measuring machine of the second aspect of the present invention, by storing the calculation procedure in the storage means for each measurement item, it is possible to automatically recognize a complicated geometric shape or a complex shape. it can.

According to the multidimensional coordinate measuring machine of the third aspect of the present invention, a plurality of measurement item correspondence tables that meet the requirements of the operator are prepared, and one of the optimum measurement items including the measurement item is prepared. You can select the item correspondence table.

According to the multidimensional coordinate measuring machine of the fifth aspect of the present invention, when the measurement is completed, the operator can generate a command to end the measurement simply by releasing the hand from the touch sensor.
It is not necessary to be aware of the command to end the measurement every time the measurement is completed, and the operator can concentrate on the measurement.

According to the multidimensional coordinate measuring machine of the sixth aspect of the present invention, the determined measurement item can be easily confirmed by looking at the display section.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a schematic configuration of a three-dimensional coordinate measuring machine according to a first embodiment of the present invention.

FIG. 2 is a plan view showing a display unit of the first embodiment.

FIG. 3 is a perspective view showing a schematic configuration of a three-dimensional coordinate measuring machine according to the first embodiment.

FIG. 4 is a plan view showing a console according to the first embodiment.

5 is an explanatory diagram showing the number of measurement points and the measurement procedure corresponding to each measurement item registered in the measurement item correspondence table of Table 1. FIG.

FIG. 6 is an explanatory diagram showing the number of measurement points and the measurement procedure corresponding to one of the measurement items registered in the measurement item correspondence table of Table 2.

FIG. 7 is an explanatory diagram showing the number of measurement points and the measurement procedure corresponding to a part of the measurement items registered in the measurement item correspondence table of Table 3;

FIG. 8 is a flowchart showing an operation of the three-dimensional coordinate measuring machine according to the first embodiment.

FIG. 9 is a perspective view of a joystick showing a modified example of the first embodiment.

FIG. 10 is a perspective view of an operation unit of a manual coordinate measuring machine showing another modification of the first embodiment.

FIG. 11 is a block diagram showing a main part of a three-dimensional coordinate measuring machine according to a second embodiment of the present invention.

FIG. 12 is a plan view showing a display unit of a three-dimensional coordinate measuring machine according to a second embodiment.

FIG. 13 is an explanatory diagram showing the number of measurement points and the measurement procedure corresponding to some of the measurement items registered in the measurement item correspondence table of Table 5.

FIG. 14 is an explanatory diagram showing the number of measurement points and the measurement procedure corresponding to some of the measurement items registered in the measurement item correspondence table of Table 6;

FIG. 15 is a flowchart showing an operation of the three-dimensional coordinate measuring machine according to the second embodiment.

FIG. 16 is a flowchart showing an operation of the coordinate measuring machine according to the third embodiment.

[Explanation of symbols]

6 Contact Type Probe 8 Display Section 11 Measurement End Key (Measurement End Command Section) 11A, 11B, 11D Touch Sensor (Measurement End Command Section) 11C Measurement End Switch (Measurement End Command Section) 21 Measured Value Acquisition Section 22 Measured Point Count Section 23 memory (storage means) 24 measurement item determination unit (determination unit) 25 shape calculation unit

Claims (6)

[Claims] 1. A multidimensional coordinate measuring machine for measuring the shape of an object to be measured by relatively moving the object to be measured and a detector, wherein a measurement value of each measurement point of the object to be detected detected by the detector. A measurement value capturing unit that captures, a measurement point counting unit that counts the number of measurement points, a measurement item that corresponds to the measurement points and indicates a measurement shape, and a calculation procedure that corresponds to the measurement shape of the measurement item are stored. A storage unit, a determination unit that determines a calculation procedure corresponding to the measurement shape of the measurement item according to the number of measurement points counted by the measurement point counting unit, a calculation procedure determined by the determination unit, and the measurement value. A multi-dimensional coordinate measuring machine, comprising: a shape calculation unit that calculates the shape of the object to be measured based on the measurement value acquired by the acquisition unit. 2. The calculation procedure is a calculation formula created according to the measurement procedure of the corresponding measurement item, and is stored in the storage means for each measurement item.
The described multidimensional coordinate measuring machine. 3. The storage means stores at least one of a measurement item correspondence table showing a plurality of combinations of measurement items and a plurality of measurement item correspondence tables having different combinations of the measurement items. The multidimensional coordinate measuring machine according to claim 1 or 2, which is characterized. 4. A measurement end command unit for instructing the end of measurement, wherein the measurement item determination unit corresponds to the counted number of measurement points when a measurement end command is received from the measurement end command unit. The multidimensional coordinate measuring machine according to claim 3, wherein a measurement item is determined based on the measurement item correspondence table. 5. The measurement end command section is composed of a touch sensor provided at a position where a worker's hand comes into contact at the time of measurement, and when the worker releases the hand from the touch sensor at the end of measurement, the measurement end command is issued. The multidimensional coordinate measuring machine according to claim 4, wherein a command is output to the measurement item determining unit. 6. The multidimensional coordinate measuring machine according to claim 4, further comprising a display unit for displaying the measurement item determined by the determination unit.