JPH09178028A - Bomb main valve operating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily position a chuck against a main valve handle at mounting the chuck to a bomb main valve. SOLUTION: In a bomb 1 stored in a bomb storing box 2, a main 4 is opened/ closed by the drive force of an actuator box 5 arranged on the upper face of the bomb storing box 2. Rotation of the output shaft 11 of an air cylinder 6 is transmitted to a chuck 22 through a spline shaft 15, a connecting shaft 17, a connecting position adjusting mechanism 18, and the like. Because the connecting position adjusting mechanism 18 is provided between the connecting shafts 17, 19, by rotationally movably operating the operation shaft of the connecting position adjusting mechanism 18, the relative positions of the respective engaging pins 22a of the chuck 22 against the recessed parts of a handle 4a can be adjusted in the valve opening direction or in the valve closing direction by rotationally moving the connecting shaft 19 only, and hence the respective engaging pins 22a of the chuck 22 can be engaged with the recessed parts of the handle 4a.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylinder main valve actuating device, and more particularly to a cylinder main valve actuating device configured to operate a main valve of a cylinder by an actuator fixed above the cylinder.

[0002]

2. Description of the Related Art For example, a cylinder filled with a semiconductor material gas used in a semiconductor manufacturing process is stored in a cylinder storage box having an exhaust duct, and a main valve is attached to the top of the cylinder. . Then, in the cylinder source valve actuating device for opening and closing the source valve of the cylinder, the driving force of the actuator is transmitted to the handle of the cylinder source valve to open or close the source valve to control the gas supply.

In this type of cylinder valve actuating device, one end of the valve is connected to the output shaft of the actuator and the other end is connected to the chuck to drive the handle of the original valve through a connecting member (made of a universal joint or the like). When connecting the chuck to the handle of the source valve, the circumferential coupling position of the chuck with respect to the handle of the source valve is adjusted so that the operating position of the actuator matches the operating position of the handle of the source valve. There is a need.

As a conventional example, for example, a fair fair 5-
As disclosed in Japanese Patent No. 23920, an elastic body such as rubber is provided on the inner circumference of the chuck, and the elastic body is deformed so as to bite into the outer circumference of the handle to couple the chuck to the handle of the original valve. As disclosed in Japanese Patent Laid-Open No. 6-117572, a method in which a plurality of pins protruding from a chuck are engaged with an outer peripheral recess of a handle of an original valve to connect the chuck to the handle as disclosed in Japanese Patent Laid-Open No. 6-117572 A plurality of pins protruding from the chuck are engaged with the outer peripheral recess of the handle of the valve, and a pair of J-shaped hooks are engaged with the outer periphery and the lower part of the handle to couple the chuck to the handle. is there.

[0005]

However, in the above cylinder valve actuating device, since the elastic body such as rubber provided on the inner circumference of the chuck is brought into close contact with the outer circumference of the handle to be joined, an excessive tightening torque is required. If it acts on the chuck or if the elastic body is damaged due to aging of the elastic body, the elastic body deforms and the chuck slides on the outer periphery of the handle of the original valve. In some cases, it could not be reliably transmitted.

In order to solve such a problem, the above cylinder valve actuating device has been proposed. However,
In this cylinder valve actuating device, it is necessary to perform alignment so that a plurality of pins provided on the chuck engage with the outer peripheral recess of the handle, and it takes time and effort to attach the chuck when replacing the cylinder. There was such a problem.

Further, in the device (1), since the driving force of the actuator is transmitted to the connecting shaft connected to the chuck through the spline shaft, the piston operating position of the actuator and the opening / closing position of the handle are made to coincide with each other. For fine adjustment when engaging the chuck with the handle, pull out the spline shaft from the output shaft of the actuator and shift the mating position of the spline shaft to adjust the circumferential position of the chuck connected to the spline shaft. Was there. Therefore, fine adjustment when mounting the chuck was troublesome.

Further, since the chuck adjustment angle is determined by the number of grooves in the spline shaft, the chuck attachment position cannot be adjusted to an arbitrary angle. Moreover, in order to align the piston operating position of the actuator with the open / close position of the original valve after the chuck is connected to the handle by performing the above-mentioned alignment, when the chuck connecting position with respect to the original valve handle is shifted in the circumferential direction. The angle range set as the chuck mounting position needs to be large, and the opening degree of the source valve may be reduced accordingly.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a cylinder valve actuating device that solves the above problems.

[0010]

In order to solve the above problems, the present invention has the following features. According to the present invention, a cylinder filled with gas, a main valve attached to the cylinder, a chuck connected to a handle of the main valve, an actuator installed at a fixed portion above the cylinder, and one end In a cylinder main valve actuating device, which is connected to the chuck and has the other end connected to the output shaft of the actuator, and a connecting member that transmits the driving force of the actuator to the chuck, It is characterized in that a coupling position adjusting mechanism for adjusting the circumferential coupling position is provided.

According to the present invention, since the coupling position adjusting mechanism for adjusting the circumferential coupling position of the chuck with respect to the handle of the source valve is provided, the chuck can be coupled with the handle of the source valve in accordance with the operating position of the actuator. Therefore, fine adjustment of the alignment when the chuck is coupled to the handle of the original valve can be easily performed.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1 is a perspective view showing the construction of an embodiment of a cylinder valve actuating device according to the present invention, and FIG. 2 is a construction diagram of an internal actuator and a driving force transmission mechanism.

The cylinder 1 is filled with a semiconductor material gas, and is stored in a box-shaped cylinder storage box 2. Further, the cylinder 1 is held vertically in the cylinder storage box 2 by the cylinder fixing fitting 3. A main valve 4 is attached to the top of the cylinder 1. The main valve 4 is opened and closed by turning the handle 4a.

Reference numeral 5 denotes an actuator box (actuator), which has an air cylinder 6 as shown in FIG. 2, and is L-shaped on a top plate (fixing portion) 2a in the cylinder storage box 2 located above the main valve 4. It is fixed via a bracket 2b. The air cylinder 6 is composed of a piston 9 in which a valve opening piston 7 and a valve closing piston 8 are integrated, and a cylinder body 10 on which the valve opening piston 7 and the valve closing piston 8 slide. The cylinder body 10 has a left chamber 10a defined by the valve opening piston 7 and a right chamber 10b defined by the valve closing piston 8. In addition, the O-ring 7a,
8a is fitted, and the inner wall of the cylinder body 10 and the outer circumferences of the valve opening piston 7 and the valve closing piston 8 are sealed.

A rack 9a is mounted between the valve opening piston 7 and the valve closing piston 8 so as to extend in the axial direction, and a hollow output that penetrates the rack 9a in the axial direction is formed. A pinion 11a provided on the outer periphery of the shaft 11 meshes. The output shaft 11 is rotatably supported by a pair of bearings 12a and 12b embedded in the upper and lower portions of the cylinder body 10.

The output shaft 11 is a hollow hole 11 penetrating in the axial direction.
A hollow rod 11b has a round rod-shaped connecting shaft 15 inserted therein to form a fitting portion. Output shaft 11
A spline groove 11c is provided at the lower end of the hollow hole 11b. A spline shaft 15 is inserted in the spline groove 11c. The outer periphery of the spline shaft 15 is provided with triangular irregularities that fit into the spline groove 11c.
It is fitted so that it can slide in the axial direction relative to
It rotates integrally with the spline groove 11c.

The lower end of the spline shaft 15 is connected to the upper end 16a of the first universal joint 16, and the universal joint 1
An upper end of a connecting shaft (connecting member) 17 is connected to a lower end 16b of the shaft 6. Further, the lower end of the connecting shaft 17 is connected to the connecting position adjusting mechanism 18.

The connecting shaft 19 connected to the lower end of the connecting position adjusting mechanism 18 has an upper end 20a of the second universal joint 20.
The connecting pin 21a of the third universal joint 21 is connected to the lower end 20b of the universal joint 20. And
The connecting pin 21b orthogonal to the connecting pin 21a of the third universal joint 21 is passed through the shaft of the chuck 22 chucked by the handle 4a of the original valve 4. Chuck 22
Has four engaging pins 22a protruding from the lower surface, and the engaging position is adjusted so that each engaging pin 22a engages with the recess formed in the outer periphery of the handle 4a, and chucking is performed.

A piston 9 which reciprocates in the air cylinder 6.
Driving force is transmitted to the output shaft 11 via the rack 9a and the pinion 11a, and the spline shaft 15 and the first
Universal joint 16, connecting shaft 17, coupling position adjusting mechanism 18,
Connection shaft 19, second universal joint 20, third universal joint 21
Is transmitted to the driving force transmission mechanism 23. Then, the main valve 4 is opened or closed by the chuck 22 being driven through the driving force transmission mechanism 23 and being transmitted to the handle 4 a of the main valve 4.

Reference numeral 24 is a control box, which is provided at a position away from the cylinder storage box 2 and is provided with a valve opening switch button 24a, a valve closing switch button 24b and the like on the front surface. Since the actuator box 5 provided in the cylinder storage box 2 is supplied with an air signal from the air pipes 25 and 26, the cylinder storage box 2 has an explosion-proof structure in which no electric signal is used.

When the valve opening switch button 24a of the control box 24 is turned on, the air pipe 25
The cylinder 1 defined by the valve opening piston 7 via
Compressed air is supplied to the left chamber 10a of 0
Slide in _one direction. As a result, the rack 9 of the piston 9
The pinion 11a meshing with a rotates in the valve opening direction.

Therefore, the rotational driving force of the output shaft 11 is transmitted through the spline shaft 15 into which the spline groove 11c fits, through the first universal joint 16, the connecting shaft 17, the connecting position adjusting mechanism 18, the connecting shaft 19, and the second connecting shaft. It is transmitted to the handle 4 a of the original valve 4 via the universal joint 20, the third universal joint 21, and the chuck 22. As a result, the main valve 4 is opened.

Contrary to the above, the control box 24
When the valve closing switch button 24b is turned on, compressed air is supplied to the right chamber 10b of the cylinder 10 defined by the valve closing piston 8 through the air pipe 26 so that the piston 9 moves in the X ₂ direction. Slide on. As a result, the pinion 11a that meshes with the rack 9a of the piston 9 rotates in the valve closing direction.

The rotational driving force of the output shaft 11 is transmitted through the spline shaft 15 fitted in the spline groove 11c to the first universal joint 16, the connecting shaft 17, the connecting position adjusting mechanism 18, the connecting shaft 19, and the Since it is transmitted to the handle 4a of the original valve 4 via the second universal joint 20, the third universal joint 21, and the chuck 22, the original valve 4 is closed.

The structure of the coupling position adjusting mechanism 18 will be described below. FIG. 3 is a view showing a mounting state of the coupling position adjusting mechanism 18, FIG. 4 is an enlarged vertical cross section of the coupling position adjusting mechanism 18, and FIG. 5 is an enlarged plan view of the coupling position adjusting mechanism 18.

The coupling position adjusting mechanism 18 includes the upper housing 2
A worm gear 30 is provided inside a housing 29 in which 7 and the lower housing 28 are integrated by tightening a mounting bolt 29a. The worm gear 30 includes a worm 31 that extends horizontally between the upper housing 27 and the lower housing 28, and a worm wheel 32 that meshes with a gear 31 a of the worm 31.

An operating shaft 33 is inserted into the hollow hole 31b of the worm 31. Both ends 33a of the operating shaft 33
Is protruded from the front and rear surfaces of the housing 29, and the operation lever 34 is provided so that it can be mounted. In this embodiment, since both ends 33a of the operating shaft 33 are subjected to a pair of chamfering processes, both ends 33a of the operating shaft 33 are oval when viewed in the axial direction. The operation lever 34 is provided with an oval engagement hole 34a so that the end 33a of the operation shaft 33 can be fitted therein. Therefore, the operation shaft 33 can be rotated by fitting the engaging hole 34a of the operation lever 34 into the end portion 33a of the operation shaft 33.

Both end portions of the operating shaft 33 are rotatably supported by cylindrical bearings 35 and 36, and each bearing 3
Reference numerals 5 and 36 are held in semicircular recesses 27a and 28a of the upper housing 27 and the lower housing 28, respectively. The operation shaft 33 is integrally connected to the worm 31 by a lock pin 37 that penetrates in the radial direction.
Can be rotated together with.

The worm wheel 32 is formed in a disk shape, and a gear portion 32a that meshes with the gear 31a of the worm 31 is provided on the outer circumference of the worm wheel 32. Further, the connecting shaft 19 is inserted into a through hole 32b that vertically penetrates the worm wheel 32. The connecting shaft 19 is attached to the worm wheel 3 by a lock pin 38 penetrating from the horizontal direction.
2 is integrally connected to the worm wheel 32 and can rotate together with the worm wheel 32.

The connecting shaft 19 is rotatably supported by cylindrical bearings 39 and 40 arranged above and below the worm wheel 32. The bearings 39 and 40 are provided with holes 27b in the upper housing 27 and the lower housing 28, respectively. 28b.
Further, above the hole 27b of the upper housing 27, an insertion hole 27c into which the lower end of the connecting shaft 17 is inserted is provided. The insertion hole 27c is provided on the same line as the holes 27b and 28b.

Therefore, the connecting shaft 17 is coaxially connected to the connecting shaft 19 and the worm wheel 32. The connecting shaft 17 is integrally connected to the upper housing 27 by a lock pin 41 that penetrates the insertion hole 27c in the radial direction. Therefore, the rotational driving force of the connecting shaft 17 is transmitted to the connecting shaft 19 via the housing 29, the operation shaft 33, the worm 31, and the worm wheel 32. Then, it is transmitted to the chuck 22 coupled to the handle 4a of the original valve 4.

However, when the operating shaft 33 is rotated by using the operating lever 34, the operating shaft 33 is rotated by the worm 31 and the worm wheel 32.
Therefore, the coupling position of the chuck 22 to the handle 4a of the original valve 4 can be adjusted in the circumferential direction.
In the worm gear 30, the worm wheel 32 causes the worm 3 to rotate even if a force to rotate the connecting shaft 19 acts.
The rotation of the operation shaft 33 is restricted by the engagement with the operation shaft 33.
The worm wheel 32 cannot be rotated unless the is rotated.

FIG. 6 shows that the chuck 2 is attached to the handle 4a of the main valve 4.
It is a bottom view showing the state where 2 was attached. Therefore, if the engaging pins 22a of the chuck 22 are attached to the recesses 4b formed on the outer periphery of the handle 4a so that the engagement pins 22a are engaged, the rotation transmitted by the driving of the piston 9 is surely transmitted to the handle 4a. can do. However, at the time of cylinder replacement, a new cylinder 1 is fixed in the cylinder storage box 2 in a vertical state by the cylinder fixing metal fitting 3, and then the chuck 2
When attaching 2 to the handle 4a, the engagement pins 22a of the chuck 22 may not coincide with the recesses 4b of the handle 4a.

In this case, conventionally, the spline shaft 15 fitted in the spline groove 11c of the output shaft 11 is once pulled out and rotated by a predetermined angle, and then the spline shaft 15 is again rotated.
Although the engaging pins 22a of the chuck 22 were engaged with the recesses 4b of the handle 4a by inserting the engaging pins 22a into the spline groove 11c, it took a considerable amount of labor and time.

However, in this embodiment, the connecting shaft 17
Since the coupling position adjusting mechanism 18 is provided between the operating shaft 33 and the connecting shaft 19, the engaging hole 34a of the operating lever 34 is inserted into the operating shaft 33.
When the operation shaft 33 is fitted to the end of the handle and the operating shaft 33 is turned, only the connecting shaft 19 is turned to turn the recess 4 of the handle 4a.
The relative position of each engagement pin 22a of the chuck 22 with respect to b can be adjusted in the valve opening direction or the valve closing direction. Therefore, each engagement pin 22a of the chuck 22 is attached to the handle 4a.
It can be easily adjusted so that it can be engaged with the recess 4b.

In the above embodiment, the coupling position adjusting mechanism 1
Although the worm gear 30 is used in FIG. 8, the present invention is not limited to this, but it goes without saying that another mechanism may be used.

[0037]

As described above, according to the present invention, since the connecting position adjusting mechanism for adjusting the connecting position of the chuck with respect to the handle of the original valve in the circumferential direction is provided, the chuck of the original valve is adjusted according to the operating position of the actuator. Can be attached to the handle. Therefore, it is possible to easily make a fine adjustment of the alignment when connecting the chuck to the handle of the main valve, so adjust the connecting position of the chuck to match the handle of the main valve in a short time even when replacing the cylinder. You can

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of an embodiment of a cylinder main valve actuating device according to the present invention.

FIG. 2 is a configuration diagram of an internal structure of an actuator and a driving force transmission mechanism.

FIG. 3 is a view showing a mounting state of a coupling position adjusting mechanism.

FIG. 4 is a vertical cross-sectional view showing an enlarged coupling position adjusting mechanism.

FIG. 5 is an enlarged plan view showing a coupling position adjusting mechanism.

FIG. 6 is a bottom view showing a state where a chuck is attached to the original valve handle.

[Explanation of symbols]

 1 cylinder 2 cylinder storage box 4 four-way valve 4a handle 5 actuator box 6 air cylinder 9 piston 10 cylinder body 11 output shaft 15 spline shaft 18 coupling position adjusting mechanism 22 chuck 22a engagement pin 29 housing 30 worm gear 31 worm 32 worm wheel 33 operation Axis 34 Operation lever

Claims (1)

[Claims] 1. A cylinder filled with gas, a main valve attached to the cylinder, a chuck connected to a handle of the main valve, an actuator installed at a fixed portion above the cylinder, and one end thereof. Is connected to the chuck, the other end is connected to the output shaft of the actuator, and a cylinder main valve actuating device comprising a connecting member for transmitting the driving force of the actuator to the chuck, wherein the chuck with respect to the handle of the main valve A cylinder valve actuating device, comprising a connecting position adjusting mechanism for adjusting the connecting position in the circumferential direction of the cylinder.