JPH09161233A - Magnetic head, testing method and manufacture thereof - Google Patents

Magnetic head, testing method and manufacture thereof

Info

Publication number
JPH09161233A
JPH09161233A JP31900495A JP31900495A JPH09161233A JP H09161233 A JPH09161233 A JP H09161233A JP 31900495 A JP31900495 A JP 31900495A JP 31900495 A JP31900495 A JP 31900495A JP H09161233 A JPH09161233 A JP H09161233A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic field
electrodes
magnetic head
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP31900495A
Other languages
Japanese (ja)
Inventor
Yoshimi Yamashita
良美 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP31900495A priority Critical patent/JPH09161233A/en
Publication of JPH09161233A publication Critical patent/JPH09161233A/en
Withdrawn legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PROBLEM TO BE SOLVED: To unnecessitate a large coil for generating magnetic field and to effectively impart the magnetic field to a magneto resistance element by generating magnetic field by a magnetic head itself. SOLUTION: A connecting part 23 is provided on one end of magnetic shields 2, 3, electrodes 201, 301 are provided on the other end and a current I for generating magnetic field is made to flow through them. The magnetic field in accordance with the current is generated in a magneto resistance element and measurement of magnetic resistance and control of magnetic domain are performed. At the time of measurement, by generating magnetic field between the magnetic shields causing a current to flow between the electrodes 201, 301 and controlling temp. by heat treatment, the heat treatment of the magneto resistance element is performed in the magnetic field. An insulation resistance between electrodes 201, 301 and the electrodes 101, 102 of the magneto resistance element or the electrodes 501, 502 of a write coil is measured. By measuring capacitance between the electrode 201 and a recording medium, a distance between a magnetic head and the recording medium is detected.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はハードディスクドラ
イブ(HDD) 装置に用いられる磁気ヘッド及びその試験方
法及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a hard disk drive (HDD) device, a method for testing the same, and a method for manufacturing the same.

【0002】[0002]

【従来の技術】従来,磁気ヘッドの製造過程において,
磁気特性の測定や, 磁気材料の磁区制御は,外部より大
きなコイルにより磁場を均一に発生させた装置内に磁気
ヘッドを構成する磁気抵抗(MR)素子を置いて行われてい
た。
2. Description of the Related Art Conventionally, in the manufacturing process of a magnetic head,
The measurement of magnetic properties and the control of magnetic domains in magnetic materials have been performed by placing a magnetoresistive (MR) element that constitutes a magnetic head in an apparatus in which a magnetic field is uniformly generated by a coil that is larger than the outside.

【0003】図2(A),(B) は磁気ヘッドの従来例の説明
図である。図2(A) は断面図, 図2(B) は平面図であ
る。図において, 1は磁気抵抗(MR)素子, 2は下部磁気
シールド, 3は上部磁気シールド, 4は書き込み用のラ
イトポール, 5はライトコイル, 101, 102は磁気抵抗効
果素子の端子 (電極), 501, 502 はライトコイルの端子
である。
2A and 2B are explanatory views of a conventional example of a magnetic head. 2 (A) is a sectional view and FIG. 2 (B) is a plan view. In the figure, 1 is a magnetoresistive (MR) element, 2 is a lower magnetic shield, 3 is an upper magnetic shield, 4 is a write pole for writing, 5 is a write coil, 101 and 102 are terminals (electrodes) of the magnetoresistive element. , 501 and 502 are terminals of the light coil.

【0004】[0004]

【発明が解決しようとする課題】図2に示されるよう
に,磁気抵抗効果(MR)素子 1を挟む磁気シールド 2, 3
の存在により, 磁気抵抗効果素子に外部より有効な磁場
を与えることは極めて困難であった。
As shown in FIG. 2, magnetic shields sandwiching a magnetoresistive effect (MR) element 1 are provided.
It is extremely difficult to give an effective magnetic field to the magnetoresistive effect element from the outside due to the existence of the.

【0005】本発明は,磁気抵抗効果素子の磁気特性試
験に際し, 外部磁場印加用に従来から用いられていた磁
場発生用の大きなコイルを不要とし, 磁気抵抗効果素子
に効果的に磁場をあたえることを目的とする。
The present invention eliminates the need for a large coil for generating a magnetic field, which has been conventionally used for applying an external magnetic field, in a magnetic characteristic test of a magnetoresistive effect element, and effectively applies a magnetic field to the magnetoresistive effect element. With the goal.

【0006】[0006]

【課題を解決するための手段】上記課題の解決は, 1)一対の磁気シールド膜で挟まれた磁気抵抗効果素子
を有し,該磁気シールド膜は導電材料からなり,それぞ
れの一端は接続され,それぞれの他端には電極が設けら
れている磁気ヘッド,あるいは 2)前記電極間に電流を流し,前記磁気シールド膜間に
磁界を発生させ,前記磁気抵抗効果素子の磁気特性を測
定する磁気ヘッドの試験方法,あるいは 3)前記電極間に電流を流し,前記磁気シールド膜間に
磁界を発生させながら,前記磁気抵抗効果素子を熱処理
する磁気ヘッドの製造方法,あるいは 4)前記電極と記録媒体間の静電容量を測定することに
より磁気ヘッドと記録媒体との距離を検出する磁気ヘッ
ドの試験方法,あるいは 5)前記電極間にバイアス磁界用の電流を流しながら再
生することを特徴とする磁気ヘッドにより達成される。
Means for Solving the Problems To solve the above problems, 1) a magnetoresistive effect element sandwiched between a pair of magnetic shield films is formed, and the magnetic shield films are made of a conductive material, and one ends of each are connected. , A magnetic head having electrodes on the other end thereof, or 2) a magnetic field for measuring the magnetic characteristics of the magnetoresistive element by passing a current between the electrodes to generate a magnetic field between the magnetic shield films. Head testing method, or 3) Method for manufacturing magnetic head, in which heat is applied to the magnetoresistive effect element while applying a current between the electrodes to generate a magnetic field between the magnetic shield films, or 4) Method for manufacturing the magnetic head. A method for testing a magnetic head in which the distance between the magnetic head and the recording medium is detected by measuring the capacitance between them, or 5) A current for a bias magnetic field is passed between the electrodes. Is achieved by the magnetic head is characterized in that play.

【0007】次に,本発明の作用について説明する。本
発明では磁気ヘッド自身で磁場を発生するため, (1) 外部からの磁場の印加なしで磁気抵抗効果素子の磁
気特性を試験することができる。従って, 試験の際のプ
ロービングで, 外部磁場印加用のコイルを避ける必要が
無く一般のプローバを用いることができる。 (2) また,製造プロセス中に検査できることで,ウェー
ハプロセス後の加工・組立の歩留りを向上できる。 (3)さらに,磁気抵抗効果素子の磁区制御を行う際の磁
場中のアニールが可能となる。
Next, the operation of the present invention will be described. In the present invention, since the magnetic head itself generates a magnetic field, (1) the magnetic characteristics of the magnetoresistive effect element can be tested without applying a magnetic field from the outside. Therefore, it is not necessary to avoid the coil for applying an external magnetic field during probing during the test, and a general prober can be used. (2) In addition, since the inspection can be performed during the manufacturing process, the processing and assembly yield after the wafer process can be improved. (3) Furthermore, it becomes possible to anneal in a magnetic field when controlling the magnetic domains of the magnetoresistive effect element.

【0008】[0008]

【発明の実施の形態】次に, 図を用いて本発明の磁気ヘ
ッドを説明する。図1(A),(B) は実施の形態の説明図で
ある。
BEST MODE FOR CARRYING OUT THE INVENTION Next, a magnetic head of the present invention will be described with reference to the drawings. 1A and 1B are explanatory views of the embodiment.

【0009】図1(A) は断面図, 図1(B) は平面図であ
る。図において, 1は磁気抵抗(MR)素子, 2は下部磁気
シールド, 3は上部磁気シールド, 4は書き込み用のラ
イトポール, 5はライトコイル, 23は上下の磁気シール
ドの接続部, 101, 102 は磁気抵抗効果素子の端子 (電
極), 501, 502 はライトコイルの端子, 201, 301は本発
明に係る磁場発生用電流を上下の磁気シールドに流すた
めの端子である。
FIG. 1A is a sectional view and FIG. 1B is a plan view. In the figure, 1 is a magnetoresistive (MR) element, 2 is a lower magnetic shield, 3 is an upper magnetic shield, 4 is a write pole for writing, 5 is a write coil, 23 is a connection part between upper and lower magnetic shields, 101, 102. Are terminals (electrodes) of the magnetoresistive effect element, 501 and 502 are terminals of the write coil, and 201 and 301 are terminals for flowing the magnetic field generating current according to the present invention to the upper and lower magnetic shields.

【0010】一般的な磁気ヘッドは上記の上下の磁気シ
ールドの間に磁気抵抗効果素子がある。この状態では磁
気抵抗効果素子は磁気シールドにより磁気シールドされ
ているから, 磁気抵抗効果素子の磁気特性を測定するこ
とはできない。また,磁気抵抗効果素子の磁区制御のた
めの磁場中熱処理を行う際にも強力な外部磁場が必要と
なる。
A general magnetic head has a magnetoresistive effect element between the upper and lower magnetic shields. In this state, since the magnetoresistive effect element is magnetically shielded by the magnetic shield, the magnetic characteristics of the magnetoresistive effect element cannot be measured. Also, a strong external magnetic field is required when performing heat treatment in a magnetic field for controlling the magnetic domains of the magnetoresistive element.

【0011】このため,本発明では磁気シールド 2, 3
の一端に接続部23を設け, 他端に電極201, 301を設け
て, 図示のように磁場発生用電流Iを流すようにする。
磁気抵抗効果素子にはこの電流に応じた磁場が発生し,
磁気抵抗の測定や,磁区制御を行うことができる。
Therefore, in the present invention, the magnetic shield 2, 3
A connecting portion 23 is provided at one end of the electrode and electrodes 201 and 301 are provided at the other end so that a magnetic field generating current I flows as shown in the figure.
A magnetic field corresponding to this current is generated in the magnetoresistive element,
It is possible to measure magnetic resistance and control magnetic domains.

【0012】いま例えば簡単なモデルを考え, ギャップ
を挟んで反対方向に上下の導線を流れる無限に長い直線
電流を仮定し,上下の導線の径をaとしギャップをtと
すると, ギャップ内に発生する磁界Hは, H=2I/2πr で表される。ここに,r=(a+t)/2である。
Considering a simple model, for example, assuming an infinitely long straight line current flowing in the upper and lower conductors in opposite directions across the gap, and assuming that the diameter of the upper and lower conductors is a and the gap is t, it occurs in the gap. The magnetic field H to be applied is represented by H = 2I / 2πr. Here, r = (a + t) / 2.

【0013】この式に,a=2μm,t=0.4 μmを代
入すると,H/I=3.3 Oe/mAとなる。磁気シールドで
は数100 mAの電流を流すことができるため,強い磁界を
発生することができる。
Substituting a = 2 μm and t = 0.4 μm into this equation gives H / I = 3.3 Oe / mA. Since a magnetic shield can pass a current of several 100 mA, a strong magnetic field can be generated.

【0014】次に, 本発明の電極を用いて実施できる種
々の測定法について説明する。 (1) 電極201, 301間に電流を流し,磁気シールド間に磁
場を発生させると共に,外部より,例えば 200〜300 ℃
で1時間の熱処理を行って温度制御することにより, 磁
気抵抗効果素子の磁場中熱処理を行うことができる。 (2) 電極 201, 301 と, 他の電極すなわち磁気抵抗効果
素子の電極 101, 102 あるいはライトコイルの電極 50
1, 502 との間の絶縁抵抗を測定できる。 (3)電極 201と記録媒体 (ディスク) との間の静電容量
を測定して, 磁気ヘッドと記録媒体間の距離を検出する
ことができる。 (4)記録を再生する際に, 電極201, 301間に電流を流し
てバイアス磁場を印加することにより,読み取り信号の
S/N 比を上げ, 再生特性を向上できる。
Next, various measuring methods that can be carried out using the electrode of the present invention will be described. (1) A current is made to flow between the electrodes 201 and 301 to generate a magnetic field between the magnetic shields, and from the outside, for example 200 to 300 ℃
It is possible to perform the heat treatment in the magnetic field of the magnetoresistive effect element by performing the heat treatment for 1 hour and controlling the temperature. (2) Electrodes 201 and 301, and other electrodes, that is, electrodes 101 and 102 of the magnetoresistive effect element or electrodes 50 of the write coil.
Insulation resistance between 1, 502 can be measured. (3) By measuring the electrostatic capacitance between the electrode 201 and the recording medium (disk), the distance between the magnetic head and the recording medium can be detected. (4) At the time of reproducing the recording, by applying a bias magnetic field by applying a current between the electrodes 201 and 301, the read signal
It is possible to raise the S / N ratio and improve the playback characteristics.

【0015】[0015]

【発明の効果】本発明によれば, 磁気抵抗効果素子の磁
気特性試験あるいは磁区制御に際し,外部磁場印加用に
従来から用いられていた大きなコイルを不要とし, 磁気
抵抗効果素子に効果的に磁場をあたえるができる。この
結果,製造プロセス中の磁気特性を測定できるため歩留
を向上できる。また,磁気ヘッドと記録媒体間の距離も
検出でき,さらに,ヘッドにバイアス磁場を容易に印加
でき再生特性を向上できる。
According to the present invention, when a magnetic characteristic test or magnetic domain control of a magnetoresistive effect element, a large coil conventionally used for applying an external magnetic field is not required, and the magnetic field is effectively applied to the magnetoresistive effect element. You can give As a result, the magnetic characteristics during the manufacturing process can be measured, and the yield can be improved. In addition, the distance between the magnetic head and the recording medium can be detected, and a bias magnetic field can be easily applied to the head to improve the reproduction characteristics.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の実施の形態の説明図FIG. 1 is an explanatory diagram of an embodiment of the present invention.

【図2】 従来例の説明図FIG. 2 is an explanatory diagram of a conventional example.

【符号の説明】[Explanation of symbols]

1 磁気抵抗(MR)素子 2 下部磁気シールド 3 上部磁気シールド 4 ライトポール 5 ライトコイル 23 上下の磁気シールドの接続部 101, 102 磁気抵抗効果素子の端子 (電極), 501, 502 ライトコイルの端子 201, 301 磁場発生用電流を上下の磁気シールドに流
すための端子
1 Magnetoresistive (MR) element 2 Lower magnetic shield 3 Upper magnetic shield 4 Write pole 5 Write coil 23 Connection part of upper and lower magnetic shields 101, 102 Magnetoresistive element terminal (electrode), 501, 502 Light coil terminal 201 , 301 Terminal for passing current for magnetic field generation to upper and lower magnetic shields

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 一対の磁気シールド膜で挟まれた磁気抵
抗効果素子を有し,該磁気シールド膜は導電材料からな
り,それぞれの一端は接続され,それぞれの他端には電
極が設けられていることを特徴とする磁気ヘッド。
1. A magnetoresistive effect element sandwiched between a pair of magnetic shield films, wherein the magnetic shield film is made of a conductive material, one end of each is connected, and an electrode is provided at each of the other ends. The magnetic head is characterized by
【請求項2】 前記電極間に電流を流し,前記磁気シー
ルド膜間に磁界を発生させ,前記磁気抵抗効果素子の磁
気特性を測定することを特徴とする磁気ヘッドの試験方
法。
2. A method of testing a magnetic head, wherein a current is passed between the electrodes to generate a magnetic field between the magnetic shield films, and the magnetic characteristics of the magnetoresistive effect element are measured.
【請求項3】 前記電極間に電流を流し,前記磁気シー
ルド膜間に磁界を発生させながら,前記磁気抵抗効果素
子を熱処理することを特徴とする磁気ヘッドの製造方
法。
3. A method of manufacturing a magnetic head, wherein the magnetoresistive effect element is heat-treated while applying a current between the electrodes to generate a magnetic field between the magnetic shield films.
【請求項4】 前記電極と記録媒体間の静電容量を測定
することにより磁気ヘッドと該記録媒体との距離を検出
することを特徴とする磁気ヘッドの試験方法。
4. A method of testing a magnetic head, wherein the distance between the magnetic head and the recording medium is detected by measuring the electrostatic capacitance between the electrode and the recording medium.
【請求項5】 前記電極間にバイアス磁界用の電流を流
しながら再生することを特徴とする磁気ヘッド。
5. A magnetic head for reproducing while applying a bias magnetic field current between the electrodes.
JP31900495A 1995-12-07 1995-12-07 Magnetic head, testing method and manufacture thereof Withdrawn JPH09161233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31900495A JPH09161233A (en) 1995-12-07 1995-12-07 Magnetic head, testing method and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31900495A JPH09161233A (en) 1995-12-07 1995-12-07 Magnetic head, testing method and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH09161233A true JPH09161233A (en) 1997-06-20

Family

ID=18105431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31900495A Withdrawn JPH09161233A (en) 1995-12-07 1995-12-07 Magnetic head, testing method and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH09161233A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6633459B2 (en) * 2000-06-20 2003-10-14 Seagate Technology Llc Functional recording-head on-slider lap monitor
JP2005032429A (en) * 2003-07-11 2005-02-03 Sae Magnetics (Hk) Ltd Slider, and system and method using slider
US8654479B2 (en) * 2012-06-28 2014-02-18 Tdk Corporation Thin-film magnetic recording head with thin film which constructs sensor or heater beneath main magnetic pole

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6633459B2 (en) * 2000-06-20 2003-10-14 Seagate Technology Llc Functional recording-head on-slider lap monitor
JP2005032429A (en) * 2003-07-11 2005-02-03 Sae Magnetics (Hk) Ltd Slider, and system and method using slider
US7042670B2 (en) * 2003-07-11 2006-05-09 Sae Magnetics (H.K.) Ltd. Method for adjusting flying height of magnetic heads using an electrical charge through an electrical pad on the slider
US8654479B2 (en) * 2012-06-28 2014-02-18 Tdk Corporation Thin-film magnetic recording head with thin film which constructs sensor or heater beneath main magnetic pole

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Effective date: 20030304