JPH0915049A - Optical path length varying mechanism - Google Patents

Optical path length varying mechanism

Info

Publication number
JPH0915049A
JPH0915049A JP16328495A JP16328495A JPH0915049A JP H0915049 A JPH0915049 A JP H0915049A JP 16328495 A JP16328495 A JP 16328495A JP 16328495 A JP16328495 A JP 16328495A JP H0915049 A JPH0915049 A JP H0915049A
Authority
JP
Japan
Prior art keywords
optical path
corner cube
path length
cube prism
incident light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16328495A
Other languages
Japanese (ja)
Inventor
Makoto Komiyama
誠 小宮山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP16328495A priority Critical patent/JPH0915049A/en
Publication of JPH0915049A publication Critical patent/JPH0915049A/en
Pending legal-status Critical Current

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  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE: To control the variation of optical path length easily by disposing a rotary means at a position separated by a predetermined distance from the central axis of a corner cube prism formed to reflect an incident luminous flux back to an incident optical path and turning the rotary shaft of a rotary board while inclining a predetermined angle. CONSTITUTION: A corner cube prism 11 is fixed, at the bottom part thereof, to a board 12 coupled with the rotary shaft 14 of a motor 13. The corner cube prism 11 comprises three internal reflection prism faces making an angle of 90 deg. each other wherein the incoming face and outgoing face are set normal to the diagonal of cube so that the incident light is reflected on three faces and returned back to the incident optical path. The corner cube prism 11 is bonded with the central axis thereof being shifted by a distance (d) from the center of rotation of the board 12. Consequently, the optical path length can be varied by 4d.sinθ.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、フーリエ近赤外分光器
(FT−NIR)などの光路長可変機構の改善に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvement of an optical path length variable mechanism such as a Fourier near infrared spectroscope (FT-NIR).

【0002】[0002]

【従来の技術】フーリエ近赤外分光器およびこれに類す
る分光器において、光路長を可変する方式としては、例
えばボイスコイルによりコーナーキューブをリニアに
移動する方式、ミラー2枚を斜めに対向配置させて取
り付けた円板を往復回転させる方式がある。
2. Description of the Related Art In Fourier near-infrared spectroscopes and similar spectroscopes, the method of varying the optical path length is, for example, a method in which a corner cube is linearly moved by a voice coil, and two mirrors are diagonally opposed to each other. There is a method of reciprocally rotating the attached disc.

【0003】図3は上記の方式による光路長可変のフ
ーリエ近赤外分光器に組み込まれたマイケルソン干渉計
部の一例を示す構成図である。図において、ランプ光源
1からの光は第1のレンズ2により平行光となりビーム
スプリッタ3に入射される。ビームスプリッタ3で入射
光は2分され、一方は固定コーナーキューブ4に入射
し、他方は可動コーナーキューブ5に入射する。
FIG. 3 is a block diagram showing an example of a Michelson interferometer unit incorporated in a Fourier near infrared spectroscope having a variable optical path length according to the above method. In the figure, the light from the lamp light source 1 is collimated by the first lens 2 and is incident on the beam splitter 3. The incident light is split into two by the beam splitter 3, one of which is incident on the fixed corner cube 4 and the other of which is incident on the movable corner cube 5.

【0004】可動コーナーキューブ5はボイスコイル7
に連結されていて、ボイスコイルの駆動により左右方向
に移動し光路長を可変できるようになっている。固定コ
ーナーキューブ4で反射した光はビームスプリッタ3を
通って第2のレンズ6に入り、また可動コーナーキュー
ブ5で反射した光もビームスプリッタ3で反射してレン
ズ6に入る。レンズ6に入る光は干渉光である。レンズ
6で集束された光は試料(図示せず)に導かれ、試料を
通過した光の強度は光検出器(図示せず)で測定され
る。
The movable corner cube 5 is a voice coil 7
The optical path length can be varied by moving the voice coil in the left-right direction by driving the voice coil. The light reflected by the fixed corner cube 4 passes through the beam splitter 3 and enters the second lens 6, and the light reflected by the movable corner cube 5 is also reflected by the beam splitter 3 and enters the lens 6. The light entering the lens 6 is interference light. The light focused by the lens 6 is guided to a sample (not shown), and the intensity of the light passing through the sample is measured by a photodetector (not shown).

【0005】このような構成において、マイケルソン干
渉計部の固定コーナーキューブ4を固定にし、可動コー
ナーキューブ5のみを左右方向に移動させ、そのときの
干渉信号の変化を光検出器で測定する。この測定信号を
フーリエ変換すれば試料のスペクトル特性が得られる。
In such a structure, the fixed corner cube 4 of the Michelson interferometer unit is fixed, only the movable corner cube 5 is moved in the left-right direction, and the change in the interference signal at that time is measured by the photodetector. The spectral characteristics of the sample can be obtained by Fourier transforming this measurement signal.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、このよ
うな可動コーナーキューブ5とボイスコイル6からなる
光路長可変機構は外部振動に弱い構造であるという欠点
があった。
However, the variable optical path length mechanism including the movable corner cube 5 and the voice coil 6 has a drawback in that it is vulnerable to external vibration.

【0007】他方、上記の方式による光路長可変機構
は、図4に示すように円板8上に2枚のミラー9,10
を、そのミラーの中心を結ぶ軸に対して斜めに対向配置
させたものであり、円板8を回転(往復回転)させるこ
とにより光路長を変化させるものである。しかしなが
ら、このような構造の光路長可変機構においては円板を
往復回転させる必要があり、そのため複雑な機構が必要
になるという欠点があった。
On the other hand, the optical path length changing mechanism according to the above-mentioned method, as shown in FIG. 4, has two mirrors 9 and 10 on the disk 8.
Are obliquely opposed to the axis connecting the centers of the mirrors, and the optical path length is changed by rotating (reciprocating rotation) the disk 8. However, in the optical path length variable mechanism having such a structure, it is necessary to reciprocally rotate the disc, and therefore there is a drawback that a complicated mechanism is required.

【0008】本発明の目的は、このような点に鑑み、比
較的簡単な構成で、外部振動に強く、また光路長の変化
量を容易に制御することもできる光路長可変機構を実現
しようとするものである。
In view of the above points, an object of the present invention is to realize an optical path length varying mechanism having a relatively simple structure, resistant to external vibration, and capable of easily controlling the amount of change in the optical path length. To do.

【0009】[0009]

【課題を解決するための手段】このような目的を達成す
るために本発明では、コーナーキューブプリズムと、こ
のコーナーキューブプリズムを取り付ける回転基板と、
前記コーナーキューブプリズムの中心軸とは距離dだけ
離れた位置を回転軸として前記回転基板を回転させる回
転手段を備え、前記コーナーキューブプリズムへの入射
光の光軸に対して前記回転基板の回転軸を所定の角度θ
だけ傾けて回転基板を回転させることにより、4d・s
inθの光路長の変化量が得られるように構成したこと
を特徴とする。
In order to achieve such an object, according to the present invention, a corner cube prism and a rotating substrate on which the corner cube prism is mounted,
Rotating means for rotating the rotating substrate about a position separated from the central axis of the corner cube prism by a distance d is provided, and the rotating shaft of the rotating substrate with respect to the optical axis of the incident light to the corner cube prism. Is the predetermined angle θ
By rotating the rotating substrate while tilting only 4d ・ s
It is characterized in that it is configured so as to obtain a variation amount of the optical path length of inθ.

【0010】[0010]

【作用】コーナーキューブプリズムの中心軸とは距離d
だけ離れた位置を回転軸として回転させとると共に、そ
の回転軸を光軸に対してθだけ傾けておく。これによ
り、4d・sinθの光路差の変化量が得られる。変化
量は、距離dと角度θに調節することができる。
[Function] Distance d from the central axis of the corner cube prism
The rotation axis is rotated at a position separated by only, and the rotation axis is tilted by θ with respect to the optical axis. Thereby, the variation amount of the optical path difference of 4d · sin θ can be obtained. The amount of change can be adjusted to the distance d and the angle θ.

【0011】[0011]

【実施例】以下図面を用いて本発明を詳しく説明する。
図1は本発明に係る光路長可変機構の一実施例を示す構
成図である。図において、11はコーナーキューブプリ
ズム、12は回転基板、13はモータである。コーナー
キューブプリズム11の底面は基板12に取り付けら
れ、基板12はモータ13の回転軸(以下単に軸とい
う)14に連結されている。なお、モータ13および軸
14からなる部分を回転手段という。
The present invention will be described in detail below with reference to the drawings.
FIG. 1 is a configuration diagram showing an embodiment of an optical path length varying mechanism according to the present invention. In the figure, 11 is a corner cube prism, 12 is a rotating substrate, and 13 is a motor. The bottom surface of the corner cube prism 11 is attached to a substrate 12, and the substrate 12 is connected to a rotating shaft (hereinafter simply referred to as shaft) 14 of a motor 13. The portion composed of the motor 13 and the shaft 14 is referred to as rotating means.

【0012】コーナーキューブプリズム11は、互に9
0゜をなす3つの内反射プリズム面から構成され(図で
は説明を簡潔にするために2面の反射プリズム面を示し
てある)、入射面と出射面は立方体の対角線に垂直にな
っていて、入射光は3面で反射し入射光束が入射光路に
戻って来るように形成されている。このコーナーキュー
ブプリズム11はその中心軸が基板12の回転中心(回
転手段による回転の回転軸)から距離dだけ偏心して接
合されている。
The corner cube prisms 11 are separated from each other by 9
It consists of three 0 ° internal reflecting prism surfaces (two reflecting prism surfaces are shown in the figure for the sake of simplicity), and the incident surface and the outgoing surface are perpendicular to the diagonal of the cube. The incident light is formed so that the incident light is reflected by the three surfaces and the incident light flux returns to the incident light path. The corner cube prism 11 is joined with its center axis decentered from the center of rotation of the substrate 12 (the rotation axis of rotation by the rotation means) by a distance d.

【0013】回転軸を図示のように光軸に対してθだけ
傾けて配置し、基板12を回転させると、コーナーキュ
ーブプリズム11も回転するが、光軸方向にも動くた
め、光路差が変化する。その変化量(光路差の可変量)
は、 2×2d・sinθ=4d・sinθ である。可変量は偏心量dと角度θにより調節できる。
When the substrate 12 is rotated by arranging the rotation axis with an inclination of θ with respect to the optical axis as shown in the figure, the corner cube prism 11 also rotates, but it also moves in the optical axis direction, so the optical path difference changes. To do. Amount of change (variable amount of optical path difference)
Is 2 × 2d · sin θ = 4d · sin θ. The variable amount can be adjusted by the eccentric amount d and the angle θ.

【0014】戻り光を入射光と同じ方向にする場合は、
図2に示すように固定ミラー15を配設し、光を折り返
せばよい。光路差の可変量は 8d・sinθ となる。
When the return light is directed in the same direction as the incident light,
A fixed mirror 15 may be provided as shown in FIG. 2 to return the light. The variable amount of the optical path difference is 8d · sin θ.

【0015】なお、本発明は上記実施例の構造に限定さ
れるものではなく、各種の変形が可能である。
The present invention is not limited to the structure of the above embodiment, but various modifications can be made.

【0016】[0016]

【発明の効果】以上説明したように本発明によれば次の
ような効果がある。 (1) 円板を一方向に回転させることにより光路差を変え
ることができ、従来のように左右方向への移動や往復回
転のような複雑な動作を必要とせず、簡単な回転機構で
済む。 (2) 外部振動に強い構造とすることができる。 (3) 偏心量dと角度θの調節により、光路差の任意の変
化量を得ることができる。
As described above, according to the present invention, the following effects can be obtained. (1) The optical path difference can be changed by rotating the disc in one direction, which does not require complicated operations such as lateral movement and reciprocating rotation as in the past, and a simple rotating mechanism is sufficient. . (2) The structure can be strong against external vibration. (3) By adjusting the eccentricity amount d and the angle θ, it is possible to obtain an arbitrary variation amount of the optical path difference.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る光路差可変機構の一実施例を示す
構成図
FIG. 1 is a configuration diagram showing an embodiment of an optical path difference varying mechanism according to the present invention.

【図2】本発明の他の実施例構成図FIG. 2 is a configuration diagram of another embodiment of the present invention.

【図3】フーリエ近赤外分光器に組み込まれたマイケル
ソン干渉計部の従来例を示す構成図
FIG. 3 is a configuration diagram showing a conventional example of a Michelson interferometer unit incorporated in a Fourier near-infrared spectroscope.

【図4】従来の他の光路差可変機構の一例を示す構成図
である。
FIG. 4 is a configuration diagram showing an example of another conventional optical path difference varying mechanism.

【符号の説明】[Explanation of symbols]

11 円板 12 コーナーキューブプリズム 13 モータ 14 軸 15 固定ミラー 11 disk 12 corner cube prism 13 motor 14 axis 15 fixed mirror

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】入射光束が入射光路に反射されるように形
成されたコーナーキューブプリズムと、 このコーナーキューブプリズムを取り付ける回転基板
と、 前記コーナーキューブプリズムの中心軸とは所定の距離
dだけ離れた位置に回転軸を設けて前記回転基板を回転
させる回転手段を備え、前記コーナーキューブプリズム
への入射光の光軸に対して前記回転基板の回転軸を所定
の角度θだけ傾けて回転基板を回転させることにより、
4d・sinθの光路長の変化量が得られるように構成
したことを特徴とする光路長可変機構。
1. A corner cube prism formed so that an incident light beam is reflected in an incident light path, a rotating substrate on which the corner cube prism is mounted, and a central axis of the corner cube prism are separated by a predetermined distance d. The rotating substrate is provided with a rotating shaft at a position to rotate the rotating substrate, and the rotating substrate is rotated by inclining the rotating shaft of the rotating substrate by a predetermined angle θ with respect to the optical axis of the incident light to the corner cube prism. By letting
An optical path length variable mechanism characterized in that it is configured to obtain an amount of change in optical path length of 4d · sin θ.
【請求項2】前記距離dおよび角度θの設定を変えるこ
とにより光路差の可変量を調節するように構成したこと
を特徴とする請求項1記載の光路長可変機構。
2. The optical path length varying mechanism according to claim 1, wherein the variable amount of the optical path difference is adjusted by changing the settings of the distance d and the angle θ.
【請求項3】前記コーナーキューブプリズムの前面に固
定ミラーを配設し、戻り光を入射光と同じ方向に戻すよ
うにしたことを特徴とする請求項1記載の光路長可変機
構。
3. The variable optical path length mechanism according to claim 1, wherein a fixed mirror is arranged on the front surface of the corner cube prism to return the return light in the same direction as the incident light.
JP16328495A 1995-06-29 1995-06-29 Optical path length varying mechanism Pending JPH0915049A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16328495A JPH0915049A (en) 1995-06-29 1995-06-29 Optical path length varying mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16328495A JPH0915049A (en) 1995-06-29 1995-06-29 Optical path length varying mechanism

Publications (1)

Publication Number Publication Date
JPH0915049A true JPH0915049A (en) 1997-01-17

Family

ID=15770901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16328495A Pending JPH0915049A (en) 1995-06-29 1995-06-29 Optical path length varying mechanism

Country Status (1)

Country Link
JP (1) JPH0915049A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2393263A (en) * 2002-09-18 2004-03-24 Teraview Ltd Varying the path length of a beam of radiation
WO2004027491A1 (en) 2002-09-18 2004-04-01 Teraview Limited Apparatus for varying the path length of a beam of radiation

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2393263A (en) * 2002-09-18 2004-03-24 Teraview Ltd Varying the path length of a beam of radiation
WO2004027491A1 (en) 2002-09-18 2004-04-01 Teraview Limited Apparatus for varying the path length of a beam of radiation
GB2393263B (en) * 2002-09-18 2004-10-27 Teraview Ltd Apparatus for varying the path length of a beam of radiation
JP2005539260A (en) * 2002-09-18 2005-12-22 テラビュー リミテッド Apparatus for changing the path length of a radiation beam
US7742172B2 (en) 2002-09-18 2010-06-22 Teraview Limited Apparatus for varying the path length of a beam of radiation
EP1543372B1 (en) * 2002-09-18 2015-07-01 TeraView Limited Apparatus for varying the path length of a beam of radiation

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