JPH09148492A - Electronic component packaging device - Google Patents

Electronic component packaging device

Info

Publication number
JPH09148492A
JPH09148492A JP7299917A JP29991795A JPH09148492A JP H09148492 A JPH09148492 A JP H09148492A JP 7299917 A JP7299917 A JP 7299917A JP 29991795 A JP29991795 A JP 29991795A JP H09148492 A JPH09148492 A JP H09148492A
Authority
JP
Japan
Prior art keywords
chip
lead frame
electronic component
packaging device
component packaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7299917A
Other languages
Japanese (ja)
Inventor
Tetsuya Kawachi
哲也 河内
Mitsuo Ariga
光夫 有家
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP7299917A priority Critical patent/JPH09148492A/en
Publication of JPH09148492A publication Critical patent/JPH09148492A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/32257Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic the layer connector connecting to a bonding area disposed in a recess of the surface of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To be able to make a wirebonding between chips and external lead frames and a wirebonding between the chips without generating any position differences of the chips which are made diebonding and without significant step differences and to improve high frequency characteristic and thermal radiation. SOLUTION: A shallow recess 1a and a deep recess 1b are provided in an internal lead frame 1. A short height chip 2a and a tall height chip 2b are mounted on the shallow recess 1a and the deep recess 1b respectively and are made dibonding. Wirebondings between external lead frames 3 and 4 and the short height chip 2a and the tall height chip 2b and wirebondings between the short height chip 2a and the tall height chip 2b are made and these are molded by resin 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品のチップ
を内部リードフレームに載置して樹脂モールドした電子
部品パッケージ装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component packaging device in which a chip of an electronic component is placed on an internal lead frame and resin-molded.

【0002】[0002]

【従来の技術】従来の電子部品パッケージ装置の断面構
造を図2に示す。11は偏平状の内部リードフレーム
で、この内部リードフレーム11上には、低背チップ1
2と高背チップ13がダイボンドされている。14、1
5は外部リードフレームである。低背チップ12は外部
リードフレーム14とワイヤ16aにより接続され、高
背チップ13は外部リードフレーム15とワイヤ16b
により接続され、低背チップ12と高背チップ13とは
ワイヤ16cにより接続されている。そして、これらの
構造部材は、外部リードフレーム14、15の外部リー
ド端子を除いて樹脂17によりモールドされている。
2. Description of the Related Art A cross-sectional structure of a conventional electronic component packaging device is shown in FIG. Reference numeral 11 denotes a flat internal lead frame, and the low-profile chip 1 is mounted on the internal lead frame 11.
2 and the high-height chip 13 are die-bonded. 14, 1
Reference numeral 5 is an external lead frame. The low-profile chip 12 is connected to the external lead frame 14 and the wire 16a, and the high-profile chip 13 is connected to the external lead frame 15 and the wire 16b.
The low-height tip 12 and the high-height tip 13 are connected by a wire 16c. Then, these structural members are molded with resin 17 except the external lead terminals of the external lead frames 14 and 15.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、従来の
電子部品パッケージ装置は、低背チップ12と高背チッ
プ13を内部リードフレーム11にダイボンドする際、
チップ12、13が位置ずれを生ずることがあった。ま
た、低背チップ12と外部リードフレーム14を接続す
るワイヤ16a、高背チップ13と外部リードフレーム
15を接続するワイヤ16b、低背チップ12と高背チ
ップ13間を接続するワイヤ16cに、それぞれ段差が
生じて、ワイヤボンディングが困難な場合もあり、ま
た、接続ワイヤ16a、16bおよび16cの長さが長
くなって、高周波特性が悪化していた。また、モールド
した低背チップ12、高背チップ13の発熱量が大きい
場合、内部リードフレーム11の金属厚みを大きくして
放熱量を大きくする必要があった。 そこで、本発明
は、ダイボンドされるチップの位置ずれが生じることが
なく、チップと外部リードフレームとのワイヤボンディ
ングおよびチップ間のワイヤボンディングをさほど段差
なく行うことができ、かつ、高周波特性を改善し、そし
て熱放散を改善した電子部品パッケージ装置を提供する
ことを目的とする。
However, in the conventional electronic component packaging apparatus, when the low-height chip 12 and the high-height chip 13 are die-bonded to the internal lead frame 11,
The chips 12 and 13 were sometimes displaced. In addition, a wire 16a connecting the low profile chip 12 and the external lead frame 14, a wire 16b connecting the high profile chip 13 and the external lead frame 15, and a wire 16c connecting the low profile chip 12 and the high profile chip 13 are respectively provided. In some cases, there is a step, which makes it difficult to perform wire bonding, and the connection wires 16a, 16b, and 16c become long, which deteriorates high-frequency characteristics. Further, when the heat generation amount of the molded low-height chip 12 and high-height chip 13 is large, it is necessary to increase the metal thickness of the internal lead frame 11 to increase the heat radiation amount. Therefore, the present invention does not cause a displacement of a die-bonded chip, can perform wire bonding between a chip and an external lead frame and wire bonding between chips without much difference, and improves high frequency characteristics. And, it is an object of the present invention to provide an electronic component packaging device with improved heat dissipation.

【0004】[0004]

【課題を解決するための手段】本発明は、上記目的を達
成するために、下記手段を採ることを特徴とする。 1.内部リードフレームにチップを載せて電気的に接続
し、該チップと外部リードフレームとをワイヤボンディ
ングして、樹脂モールドしてなる電子部品パッケージ装
置において、前記内部リードフレームに前記チップの載
置される一個もしくは複数個の窪地が形成されてなる電
子部品パッケージ装置。
The present invention is characterized by adopting the following means in order to achieve the above object. 1. In an electronic component packaging device in which a chip is placed on an internal lead frame and electrically connected, and the chip and the external lead frame are wire-bonded and resin-molded, the chip is placed on the internal lead frame. An electronic component packaging device in which one or a plurality of depressions are formed.

【0005】2.前記複数個の窪地の深さが同一もしく
は相違してなる請求項1記載の電子部品パッケージ装
置。
[0005] 2. The electronic component packaging device according to claim 1, wherein the depths of the plurality of depressions are the same or different.

【0006】3.前記内部リードフレームに形成された
前記窪地の裏面金属が、前記樹脂モールドの外部に露出
してなる上記1または上記2記載の電子部品パッケージ
装置。
[0006] 3. 3. The electronic component package device according to 1 or 2 above, wherein a back surface metal of the recess formed in the internal lead frame is exposed to the outside of the resin mold.

【0007】以上のように、本発明は、内部リードフレ
ームに窪地を設けて、この窪地にチップを載置するの
で、チップの位置ずれがなく、また、複数個の高さの異
なるチップの場合には、高さに合わせて窪地の深さを調
整して、前記複数個のチップの高さをほぼ一定にできる
ので、ボンディングワイヤの長さも一定になり、かつ、
チップと外部リードフレーム間およびチップ同士間のワ
イヤボンディングをさほど段差なく行うことができ、ボ
ンディングワイヤも短くなるので高周波特性が向上す
る。また、発熱量の大きいチップの内部リードフレーム
の裏面金属をモールド樹脂の外部に露出させることによ
り、放熱量を大きくすることができると共に、該内部リ
ードフレームの露出した裏面金属をセット基板のグラン
ド電極にそのまま半田付けすることにより、グランドの
強化も図ることができる。
As described above, according to the present invention, since the inner lead frame is provided with the depression and the chip is placed in this depression, there is no displacement of the chip, and in the case of a plurality of chips having different heights. In addition, since the depth of the depression is adjusted according to the height to make the height of the plurality of chips almost constant, the length of the bonding wire is also constant, and
Wire bonding between the chip and the external lead frame and between the chips can be performed without much steps, and the bonding wire is shortened, so that high frequency characteristics are improved. Further, by exposing the back surface metal of the internal lead frame of the chip, which generates a large amount of heat, to the outside of the mold resin, it is possible to increase the amount of heat dissipation, and at the same time, the exposed back surface metal of the internal lead frame is connected to the ground electrode of the set substrate. The ground can be strengthened by directly soldering to the ground.

【0008】[0008]

【発明の実施の形態】以下に、本発明の電子部品パッケ
ージ装置の実施例について図1を参照して説明する。同
図は本実施例に係る電子部品パッケージ装置の断面によ
る概略の形態を示すものである。1は内部リードフレー
ムで、コバール材などの金属よりなり、厚みが200μ
mである。この内部リードフレーム1には、100μm
の浅い窪地1aと500μmの深い窪地1bがプレスな
どにより形成されている。前記浅い窪地1aには、高さ
300μmのICの低背チップ2aがダイボンディング
され、前記深い窪地1bには、高さ700μmのICの
高背チップ2bがダイボンディングされている。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of an electronic component packaging device of the present invention will be described below with reference to FIG. The figure shows a schematic form of a cross section of the electronic component packaging apparatus according to the present embodiment. Reference numeral 1 denotes an internal lead frame, which is made of metal such as Kovar and has a thickness of 200μ.
m. The inner lead frame 1 has 100 μm
The shallow depression 1a and the deep depression 1b of 500 μm are formed by pressing or the like. An IC low-profile chip 2a having a height of 300 μm is die-bonded to the shallow depression 1a, and an IC high-profile chip 2b having a height of 700 μm is die-bonded to the deep depression 1b.

【0009】3、4はそれぞれ外部リードフレームであ
る。外部リードフレーム3は、低背チップ2aとワイヤ
5aによりボンディングされている。また、外部リード
フレーム4は、高背チップ2bとワイヤ5bによりボン
ディングされている。さらに、低背チップ2aと高背チ
ップ2bは、ワイヤ5cによりボンディングされてい
る。低背チップ2a、高背チップ2bなどの前記部材
は、外部リードフレーム3、4の外部リード端子3a、
4aと内部リードフレーム1に設けた窪地1bの裏面金
属1cとを露出させて、樹脂6によりモールドされる。
Reference numerals 3 and 4 are external lead frames. The external lead frame 3 is bonded to the low-profile chip 2a and the wire 5a. The external lead frame 4 is bonded to the high-profile chip 2b and the wire 5b. Further, the low-height chip 2a and the high-height chip 2b are bonded by the wire 5c. The members such as the low-profile chip 2a and the high-profile chip 2b are the external lead terminals 3a of the external lead frames 3 and 4,
4a and the backside metal 1c of the recess 1b provided in the internal lead frame 1 are exposed and molded with the resin 6.

【0010】以上のように、本実施例は、低背チップ2
a、高背チップ2bの高さに合わせて、そのダイボンド
される内部リードフレーム1の所定場所に窪地1a、1
bを設けているので、低背チップ2a、高背チップ2b
が所定の場所に位置ずれを生じることなくダイボンドさ
れる。また、低背チップ2a、高背チップ2bの高さが
一定になるので、低背チップ2a、高背チップ2b間の
ワイヤボンディングが容易となる。
As described above, this embodiment has the low profile chip 2
a, the recesses 1a, 1 are provided at predetermined positions of the inner lead frame 1 to be die-bonded according to the height of the high-profile chip 2b.
b is provided, so low profile tip 2a and high profile tip 2b
Are die-bonded in place without displacement. Further, since the heights of the low-height chip 2a and the high-height chip 2b are constant, wire bonding between the low-height chip 2a and the high-height chip 2b becomes easy.

【0011】また、本実施例においては、内部リードフ
レーム1に設けた窪地1bの裏面金属1cが、樹脂6か
ら露出しているので、該露出裏面金属1cをセット基板
(図示せず)のグランド電極に直接かつ短距離で接続で
きるので、グランドが強化され周波数特性が向上すると
共に、放熱効果も改善される。
Further, in this embodiment, since the back surface metal 1c of the recess 1b provided in the internal lead frame 1 is exposed from the resin 6, the exposed back surface metal 1c is grounded on the set substrate (not shown). Since it can be directly connected to the electrodes in a short distance, the ground is strengthened, the frequency characteristics are improved, and the heat dissipation effect is also improved.

【0012】[0012]

【発明の効果】本発明は、以上のように、内部リードフ
レームに窪地を設け、この窪地にチップを載置してダイ
ボンドするので、チップの位置ずれが生じず、チップと
外部リードフレーム間をさほど段差なくワイヤボンディ
ングすることができる。
As described above, according to the present invention, since the recess is formed in the internal lead frame and the chip is placed on the recess and die-bonded, the chip is not displaced and the chip and the external lead frame are not separated from each other. Wire bonding can be performed without a step.

【0013】また、複数個の高さの異なるチップをダイ
ボンドする場合には、その高さに合わせて前記窪地の深
さを調整するで、前記複数個のチップの高さをほぼ一定
にすることができて、チップ間のワイヤボンディングを
段差なく行うことができる。このように、段差のないワ
イヤボンディングにより接続ワイヤが短くなり、高周波
特性が改善される。
When a plurality of chips having different heights are die-bonded, the height of the plurality of chips can be made substantially constant by adjusting the depth of the depression according to the height. As a result, wire bonding between chips can be performed without a step. In this way, the stepless wire bonding shortens the connecting wire and improves the high frequency characteristics.

【0014】また、本発明は、発熱量の大きいチップが
ダイボンドされる内部リードフレームの窪地の裏面金属
をモールド樹脂の外部に露出させるので、チップの放熱
量を大きくすることができると共に、該内部リードフレ
ームの露出裏面金属をセット基板のグランド電極にその
まま半田付けすることにより、グランドの強化も図るこ
とができる。
Further, according to the present invention, since the back surface metal of the recess of the internal lead frame to which a chip having a large amount of heat generation is die-bonded is exposed to the outside of the molding resin, it is possible to increase the amount of heat dissipation of the chip and It is possible to strengthen the ground by directly soldering the exposed backside metal of the lead frame to the ground electrode of the set substrate.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の電子部品パッケージ装置の一実施例
の断面形態図
FIG. 1 is a sectional form view of an embodiment of an electronic component packaging device of the present invention.

【図2】 従来の電子部品パッケージ装置の断面形態図FIG. 2 is a cross-sectional view of a conventional electronic component packaging device.

【符号の説明】[Explanation of symbols]

1 内部リードフレーム 1a、1b 窪地 1c 裏面金属 2a 低背チップ 2b 高背チップ 3、4 外部リードフレーム 5a、5b、5c ワイヤ 6 樹脂 1 Internal lead frame 1a, 1b Recess 1c Backside metal 2a Low profile chip 2b High profile chip 3, 4 External lead frame 5a, 5b, 5c Wire 6 Resin

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 内部リードフレームにチップを載せて電
気的に接続し、該チップと外部リードフレームとをワイ
ヤボンディングし、樹脂モールドしてなる電子部品パッ
ケージ装置において、 前記内部リードフレームに前記チップの載置される一個
もしくは複数個の窪地が形成されてなる電子部品パッケ
ージ装置。
1. An electronic component package device comprising a chip mounted on an internal lead frame for electrical connection, wire bonding between the chip and an external lead frame, and resin molding, comprising: An electronic component packaging device in which one or a plurality of recesses to be placed are formed.
【請求項2】 前記複数個の窪地の深さが同一もしくは
相違してなる請求項1記載の電子部品パッケージ装置。
2. The electronic component packaging device according to claim 1, wherein the depths of the plurality of depressions are the same or different.
【請求項3】 前記内部リードフレームに形成された前
記窪地の裏面金属が、前記樹脂モールドの外部に露出し
てなる請求項1または請求項2記載の電子部品パッケー
ジ装置。
3. The electronic component packaging device according to claim 1, wherein a back surface metal of the recess formed in the internal lead frame is exposed to the outside of the resin mold.
JP7299917A 1995-11-17 1995-11-17 Electronic component packaging device Pending JPH09148492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7299917A JPH09148492A (en) 1995-11-17 1995-11-17 Electronic component packaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7299917A JPH09148492A (en) 1995-11-17 1995-11-17 Electronic component packaging device

Publications (1)

Publication Number Publication Date
JPH09148492A true JPH09148492A (en) 1997-06-06

Family

ID=17878495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7299917A Pending JPH09148492A (en) 1995-11-17 1995-11-17 Electronic component packaging device

Country Status (1)

Country Link
JP (1) JPH09148492A (en)

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