JPH09147744A - Manufacture of shadow mask and device therefor - Google Patents

Manufacture of shadow mask and device therefor

Info

Publication number
JPH09147744A
JPH09147744A JP30269195A JP30269195A JPH09147744A JP H09147744 A JPH09147744 A JP H09147744A JP 30269195 A JP30269195 A JP 30269195A JP 30269195 A JP30269195 A JP 30269195A JP H09147744 A JPH09147744 A JP H09147744A
Authority
JP
Japan
Prior art keywords
shadow mask
resist
steel plate
etching
steel sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30269195A
Other languages
Japanese (ja)
Inventor
Hiroshi Nishikawa
寛 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP30269195A priority Critical patent/JPH09147744A/en
Publication of JPH09147744A publication Critical patent/JPH09147744A/en
Pending legal-status Critical Current

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  • ing And Chemical Polishing (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce the machining time and process of a shadow mask to enhance production efficiency by punching a steel plate from a roll using a rotary press consisting of male and female drums, and cutting it after processes of resist application, exposure, and etching. SOLUTION: A steel plate 2 fed from a roll 2a is sandwiched and passed between the rotating, drum-shaped, blade-equipped male and female dies of a rotary press 7 to form continuous slits in a shadow mask. Next, a resist is applied to one side of the steel plate 2 by a resist application device 8 and baked by an exposure device 9, and burrs produced by punching are removed by an etching device 10. Next, the steel plate 2, from which a film of the resist is removed by a resist peeling device 11, is cut by a cutting press 5 to complete the shadow mask. Thus the slits are machined using the press 7, so the shadow mask can be manufactured with high efficiency while reducing the machining time and process.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はシャドウマスクの製
造方法及び製造装置に関し、さらに詳しくは、カラー陰
極線管に用いられるシャドウマスクの製造方法及び製造
装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shadow mask manufacturing method and manufacturing apparatus, and more particularly to a shadow mask manufacturing method and manufacturing apparatus used for a color cathode ray tube.

【0002】[0002]

【従来の技術】従来より、カラー陰極線管の蛍光体の前
に設けられるシャドウマスクは電子ビームを絞るために
鋼板に多数の孔又は簾状の格子を設けたものである。こ
のシャドウマスクは微細な孔や格子を非常に高い寸法精
度でつくる必要があるため、通常は化学的なエッチング
によって、製造されていた。例えば、図3に示す製造プ
ロセスにおいて、シャドウマスク1の原材料となる鋼板
2はロール2aから展開され、送りローラ3によって、
水平に搬送される。
2. Description of the Related Art Conventionally, a shadow mask provided in front of a phosphor of a color cathode ray tube is a steel plate provided with a large number of holes or blind grids for narrowing an electron beam. Since this shadow mask needs to make fine holes and lattices with extremely high dimensional accuracy, it is usually manufactured by chemical etching. For example, in the manufacturing process shown in FIG. 3, the steel plate 2 which is the raw material of the shadow mask 1 is unrolled from the roll 2 a and is fed by the feed roller 3.
It is transported horizontally.

【0003】まず、鋼板2の表裏両面に孔またはスリッ
トをエッチングにより形成するためのレジスト(感光
剤)を塗布する(ステップP1 )。塗布後はこれを充分
乾燥させる。次に、レジストが塗布された鋼板2に上下
両面から、露光用マスク4を密着させ、真空引き等を行
い、鋼板2と露光マスク4の密着度を高めた後、露光用
の光源4aに当て、エッチングパターンを鋼板上に定着
させる(ステップP2 )。次に、エッチング液を塗布し
(ステップP3 )、露光し(ステップP4 )、露光パタ
ーンに沿ってエッチングし(ステップP5 )、最後に鋼
板2を裁断プレス5により、個別に裁断し(ステップP
6 )、シャドウマスク1を完成する。
First, a resist (photosensitive agent) for forming holes or slits by etching is applied to both front and back surfaces of the steel plate 2 (step P1). After coating, it is thoroughly dried. Next, the exposure mask 4 is brought into close contact with the resist-coated steel plate 2 from both upper and lower sides, vacuuming or the like is performed to increase the adhesion between the steel plate 2 and the exposure mask 4, and then the exposure light source 4a is applied. , The etching pattern is fixed on the steel plate (step P2). Next, an etching solution is applied (step P3), exposed (step P4), etched along the exposure pattern (step P5), and finally the steel plate 2 is cut individually by a cutting press 5 (step P4).
6) Complete shadow mask 1.

【0004】このように、従来のシャドウマスク1の製
造工程は工程数が多く、また露光時間を多く要し、エッ
チング時間も多く要し生産効率に難点があった。
As described above, the conventional manufacturing process of the shadow mask 1 has a large number of steps, requires a long exposure time, requires a long etching time, and thus has a problem in production efficiency.

【0005】[0005]

【発明が解決しようとする課題】そこで本発明が解決し
ようとする課題は加工工程数が少なく、露光時間、エッ
チング時間が少なくて済むシャドウマスクの製造方法及
び製造装置を提供することである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a method and an apparatus for manufacturing a shadow mask, which has a small number of processing steps and a short exposure time and etching time.

【0006】[0006]

【課題を解決するための手段】請求項1の発明に係るシ
ャドウマスクの製造方法はロールから送られた鋼板をロ
ータリープレスにより打ち抜く工程と、打ち抜かれた鋼
板にレジストを塗布する工程と、レジストが塗布された
鋼板を露光する工程と、レジストが露光された鋼板をエ
ッチングする工程と、これらの工程を経た鋼板を裁断す
る工程を含むシャドウマスクの製造方法であり、ロータ
リープレスにより鋼板を連続して打抜き、加工工程を削
減し、加工時間を短縮し生産効率を向上した。
According to a first aspect of the present invention, there is provided a shadow mask manufacturing method, wherein a step of punching a steel sheet sent from a roll by a rotary press, a step of applying a resist to the punched steel sheet, It is a method of manufacturing a shadow mask that includes a step of exposing the coated steel sheet, a step of etching the resist-exposed steel sheet, and a step of cutting the steel sheet that has undergone these steps. The number of punching and processing steps has been reduced, processing time has been shortened, and production efficiency has been improved.

【0007】請求項2の発明に係るシャドウマスクの製
造装置は、鋼板の加工順序に沿って、ロータリープレス
と、レジスト塗布装置と、露光装置と、エッチング装置
と、レジスト膜剥離装置と、裁断プレスを具備する構成
とし、ロータリープレスにより鋼板を連続して打抜き、
加工工程を削減し、加工時間を短縮し生産効率を向上し
た。
A shadow mask manufacturing apparatus according to a second aspect of the present invention is a rotary press, a resist coating apparatus, an exposure apparatus, an etching apparatus, a resist film peeling apparatus, and a cutting press in the order of processing steel plates. The steel plate is continuously punched by a rotary press.
The number of processing steps has been reduced, processing time has been shortened, and production efficiency has been improved.

【0008】請求項3の発明に係るシャドウマスクの製
造装置は、ロータリープレスがドラム状の雄型とドラム
状の雌型とを具備し、これら雄型と雌型の外周には刃が
夫々設けられた請求項2に記載のシャドウマスクの製造
装置の構成とし、雄型と雌型の間に鋼板を挟み、シャド
ウマスクのスリットを打抜き、加工工程を削減し、加工
時間を短縮し生産効率を向上した。
In the shadow mask manufacturing apparatus according to the third aspect of the present invention, the rotary press includes a drum-shaped male die and a drum-shaped female die, and blades are provided on the outer periphery of the male die and the female die, respectively. The structure of the shadow mask manufacturing apparatus according to claim 2, wherein a steel plate is sandwiched between a male mold and a female mold, a slit of the shadow mask is punched out, the processing steps are reduced, the processing time is shortened, and the production efficiency is improved. Improved.

【0009】[0009]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

実施の形態例 以下に図1、図2を参照しつつ、本発明の好適な実施の
形態例について説明する。シャドウマスク製造装置6は
鋼板2の加工順序に沿って、ロータリープレス7、レジ
スト塗布装置8、露光装置9、エッチング装置10、レ
ジスト膜剥離装置11、裁断プレス5の順に鋼板2に沿
って備えられている。
Exemplary Embodiment Hereinafter, a preferred exemplary embodiment of the present invention will be described with reference to FIGS. 1 and 2. The shadow mask manufacturing apparatus 6 is provided along the processing order of the steel sheet 2 in the order of the rotary press 7, the resist coating apparatus 8, the exposure apparatus 9, the etching apparatus 10, the resist film peeling apparatus 11, and the cutting press 5 along the steel sheet 2. ing.

【0010】そして、ロータリープレス7はドラム状の
雄型7aと同じくドラム状の雌型7bを含み、これらの
雄型7aと雌型7bの外周には刃7cが夫々設けられ、
打抜き不要な箇所に付いては、隙間7dを設けることに
より、その部分は鋼板2は通過する。
The rotary press 7 includes a drum-shaped male die 7a and a drum-shaped female die 7b, and blades 7c are provided on the outer circumferences of these male die 7a and female die 7b, respectively.
By providing a gap 7d at a portion where punching is not necessary, the steel plate 2 passes through that portion.

【0011】動作としては、雄型7a、雌型7bの間に
鋼板2を挟み、これらの型を回転させることにより、鋼
板2に複数の連続したスリット2aを形成することがで
きる。
In operation, the steel plate 2 is sandwiched between the male mold 7a and the female mold 7b and these molds are rotated to form a plurality of continuous slits 2a in the steel plate 2.

【0012】次に、この製造装置6を用いたシャドウマ
スクの製造方法について説明する。ロール2aから送ら
れた鋼板2はロータリープレス7により、予定された形
状に打ち抜かれる(打抜き工程S1 )、そしてレジスト
塗布装置8により、鋼板2の片面にレジストが塗布され
る(レジスト塗布工程S2 )。次いで、露光装置9にて
レジストが焼き付けられる(露光工程S3 )。そして、
エッチング装置10にて、打抜きによって発生したバリ
を除去し、適度なテーパを付けるエッチングを行う(エ
ッチング工程S4 )。次いで、レジスト膜剥離装置11
にてレジスト膜を除去し(レジスト剥離工程S5 )、最
後に裁断プレス5にて裁断し(裁断工程S6 )、シャド
ウマスク1が完成する。
Next, a method of manufacturing a shadow mask using the manufacturing apparatus 6 will be described. The steel plate 2 sent from the roll 2a is punched into a predetermined shape by the rotary press 7 (punching step S1), and a resist is applied to one surface of the steel sheet 2 by the resist coating device 8 (resist coating step S2). . Next, the resist is baked by the exposure device 9 (exposure step S3). And
The etching apparatus 10 removes burrs generated by punching and performs etching with an appropriate taper (etching step S4). Next, the resist film peeling device 11
Then, the resist film is removed (resist stripping step S5) and finally cut by the cutting press 5 (cutting step S6) to complete the shadow mask 1.

【0013】以上述べた本発明の実施の形態によれば、
従来シャドウマスクの製造において、スリット2bの加
工工程をレジスト塗布、露光、エッチングにより行って
いたのに代えて、ロータリープレス7を用いて行うので
短時間で且つ、加工時間も短く済み生産効率の高い製造
を可能とした。
According to the embodiment of the present invention described above,
In the manufacture of a shadow mask in the related art, the process of processing the slits 2b is performed by using a rotary press 7 instead of performing resist coating, exposure, and etching. Therefore, the process time is short and the process time is short, and the production efficiency is high. Made possible.

【0014】[0014]

【発明の効果】本発明によれば、加工工程が少なく、加
工時間の少ない生産効率の良い、シャドウマスクの製造
方法及び製造装置が提供できる。
According to the present invention, it is possible to provide a shadow mask manufacturing method and manufacturing apparatus which have a small number of processing steps, a short processing time, and high production efficiency.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 (a)本発明のシャドウマスク製造装置の一
部であるロータリープレスの斜視図、(b)その側面
図。
1A is a perspective view of a rotary press which is a part of a shadow mask manufacturing apparatus of the present invention, and FIG. 1B is a side view thereof.

【図2】 本発明のシャドウマスクの製造方法と装置を
示す概略図。
FIG. 2 is a schematic view showing a method and an apparatus for manufacturing a shadow mask of the present invention.

【図3】 従来のシャドウマスクの製造方法と装置を示
す概略図。
FIG. 3 is a schematic view showing a conventional shadow mask manufacturing method and apparatus.

【符号の説明】[Explanation of symbols]

1 シャドウマスク 2 鋼板 2a ロール 2b スリット 3 送りローラ 4 露光用マスク 4a 光源 5 裁断プレス 6 シャドウマスク製造装置 7 ロータリープレス 7a 雄型 7b 雌型 7c 刃 7d 隙間 8 レジスト塗布装置 9 露光装置 10 エッチング装置 11 レジスト剥離装置 S1 打抜きステップ S2 レジスト塗布ステップ S3 露光ステップ S4 エッチングステップ S5 レジスト剥離ステップ S6 裁断ステップ 1 Shadow Mask 2 Steel Plate 2a Roll 2b Slit 3 Feeding Roller 4 Exposure Mask 4a Light Source 5 Cutting Press 6 Shadow Mask Manufacturing Device 7 Rotary Press 7a Male 7b Female 7c Blade 7d Gap 8 Resist Coating Device 9 Exposure Device 10 Etching Device 11 Resist stripping device S1 punching step S2 resist coating step S3 exposure step S4 etching step S5 resist stripping step S6 cutting step

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 ロールから送られた鋼板をロータリープ
レスにより打ち抜く工程と、 打ち抜かれた鋼板にレジストを塗布する工程と、 レジストが塗布された鋼板を露光する工程と、 レジストが露光された鋼板をエッチングする工程と、 前記工程を経た鋼板を裁断する工程を含むシャドウマス
クの製造方法。
1. A step of punching a steel sheet sent from a roll by a rotary press, a step of applying a resist to the punched steel sheet, a step of exposing the resist-coated steel sheet, and a step of exposing the resist-exposed steel sheet. A method of manufacturing a shadow mask, comprising a step of etching, and a step of cutting the steel sheet that has undergone the above steps.
【請求項2】 鋼板の加工順序に沿って、 ロータリープレスと、 レジスト塗布装置と、 露光装置と、 エッチング装置と、 レジスト膜剥離装置と、 裁断プレスを具備するシャドウマスクの製造装置。2. A shadow mask manufacturing apparatus comprising a rotary press, a resist coating apparatus, an exposure apparatus, an etching apparatus, a resist film peeling apparatus, and a cutting press in the order of processing steel sheets. 【請求項3】 前記ロータリープレスは、 ドラム状の雄型と、 ドラム状の雌型とを具備し、 前記雄型と雌型の外周には刃が夫々設けられた請求項2
に記載のシャドウマスクの製造装置。
3. The rotary press includes a drum-shaped male die and a drum-shaped female die, and blades are provided on outer circumferences of the male die and the female die, respectively.
An apparatus for manufacturing a shadow mask according to 1.
JP30269195A 1995-11-21 1995-11-21 Manufacture of shadow mask and device therefor Pending JPH09147744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30269195A JPH09147744A (en) 1995-11-21 1995-11-21 Manufacture of shadow mask and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30269195A JPH09147744A (en) 1995-11-21 1995-11-21 Manufacture of shadow mask and device therefor

Publications (1)

Publication Number Publication Date
JPH09147744A true JPH09147744A (en) 1997-06-06

Family

ID=17912038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30269195A Pending JPH09147744A (en) 1995-11-21 1995-11-21 Manufacture of shadow mask and device therefor

Country Status (1)

Country Link
JP (1) JPH09147744A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001316854A (en) * 2000-04-28 2001-11-16 Shin Sti Technology Kk Device for removing peeling solution on etched substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001316854A (en) * 2000-04-28 2001-11-16 Shin Sti Technology Kk Device for removing peeling solution on etched substrate
JP4528415B2 (en) * 2000-04-28 2010-08-18 住友化学株式会社 Stripping solution removal method for etching substrate

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