JPH09145328A - Measuring device for levitation amount of magnetic recording apparatus - Google Patents
Measuring device for levitation amount of magnetic recording apparatusInfo
- Publication number
- JPH09145328A JPH09145328A JP30547295A JP30547295A JPH09145328A JP H09145328 A JPH09145328 A JP H09145328A JP 30547295 A JP30547295 A JP 30547295A JP 30547295 A JP30547295 A JP 30547295A JP H09145328 A JPH09145328 A JP H09145328A
- Authority
- JP
- Japan
- Prior art keywords
- light
- luminous flux
- magnetic head
- levitation amount
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は磁気記録装置におけ
る磁気ヘッドを搭載したスライダの微小隙間を測定する
方法としてフラストレーティッド・トータル・リフレク
ションを利用した浮上量測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flying height measuring apparatus utilizing frustrated total reflection as a method for measuring a minute gap of a slider having a magnetic head mounted in a magnetic recording apparatus.
【0002】[0002]
【従来の技術】従来の技術は特開平3−212868 号公報の
ように発光部,光路,受光部の全てを光集積化したセン
サを磁気ヘッド・スライダに搭載している装置が紹介さ
れている。また、別の方法として特開平3−54405号公報
に記載のように、磁気ヘッド・スライダには光路のみを
搭載して発光部および受光部を装置外部に設置して、光
路と発光部及び受光部を光ファイバで接続する装置が紹
介されている。2. Description of the Related Art As a prior art, Japanese Patent Application Laid-Open No. 3-212868 discloses an apparatus in which a sensor in which all of a light emitting section, an optical path and a light receiving section are optically integrated is mounted on a magnetic head slider. . As another method, as disclosed in Japanese Patent Laid-Open No. 3-54405, only the optical path is mounted on the magnetic head slider, and the light emitting section and the light receiving section are installed outside the device, and the optical path, the light emitting section and the light receiving section are installed. A device that connects the parts with an optical fiber has been introduced.
【0003】[0003]
【発明が解決しようとする課題】従来の技術のうちセン
サを光集積化する方法は、磁気ヘッド・スライダが小形
化すると発光部,光路,受光部すべてを集積化すること
が困難となる。また、発光部の出力光量が戻り光の影響
を受けて安定しないため、測定に誤差を生じる欠点があ
る。Among the conventional techniques, in the method of optically integrating a sensor, it becomes difficult to integrate all of the light emitting portion, the optical path, and the light receiving portion when the magnetic head slider is downsized. In addition, since the output light amount of the light emitting unit is not stable due to the influence of the return light, there is a drawback that an error occurs in measurement.
【0004】一方、光路と受光部および受光部を光ファ
イバで接続する方法は光ファイバがロードアームおよび
ジンバルのばね剛性に影響を与える欠点がある。On the other hand, the method of connecting the optical path to the light receiving portion and the light receiving portion with an optical fiber has a drawback that the optical fiber affects the spring rigidity of the load arm and the gimbal.
【0005】本発明の目的は、FTRを利用したセンサ
を小形化する磁気ヘッド・スライダに対応して構成でき
る浮上量測定装置を提供することにある。It is an object of the present invention to provide a flying height measuring device which can be constructed so as to be compatible with a magnetic head slider for miniaturizing a sensor using an FTR.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明はガイドアームをロードアーム上に突き出し
た形状にして、発光部および受光部をガイドアームに設
置することで磁気ヘッド・スライダとロードアームから
成る磁気ヘッド支持系にはセンサ測定部のみを形成す
る。In order to achieve the above object, the present invention provides a magnetic head slider by providing a guide arm projecting above a load arm and installing a light emitting portion and a light receiving portion on the guide arm. Only the sensor measurement unit is formed on the magnetic head support system including the load arm.
【0007】[0007]
【発明の実施の形態】本発明の第1の実施例を図1およ
び図2を用いて説明する。図1は本発明の全体構成を示
した斜視図であり、図2は図1における測定主要部を示
した側面図である。図1で、1は磁気ディスク、2はセ
ンサ測定部12と一体になっている磁気ヘッド・スライ
ダ、3は磁気ヘッド・スライダ2を支持するロードアー
ム、7はロードアーム3を取り付けるガイドアーム、4
は発光素子5から発振された光束10およびセンサ測定
部12からの光束11を反射される直角プリズム、8は
発光素子5を駆動するための回路、9は受光素子6から
の信号から浮上量を求める回路、13は光束10および
11をセンサ測定部から入出力させるための回折格子で
ある。BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing the entire configuration of the present invention, and FIG. 2 is a side view showing the main measurement part in FIG. In FIG. 1, 1 is a magnetic disk, 2 is a magnetic head slider integrated with a sensor measuring unit 12, 3 is a load arm for supporting the magnetic head slider 2, 7 is a guide arm for mounting the load arm 3, 4
Is a rectangular prism that reflects the light beam 10 oscillated from the light emitting element 5 and the light beam 11 from the sensor measurement unit 12, 8 is a circuit for driving the light emitting element 5, and 9 is the flying height from the signal from the light receiving element 6. A circuit to be obtained, 13 is a diffraction grating for inputting and outputting the light fluxes 10 and 11 from the sensor measurement unit.
【0008】このように構成された本発明第1の実施例
について、その動作を説明する。図1で、ガイドアーム
7はロードアーム3が取り付けてある部分からロードア
ーム3上に磁気ヘッド・スライダ2まで突き出ている。
ガイドアーム7の上部には直角プリズム4,発光素子
5,受光素子6が搭載されている。発光素子5から発振
された光束10は直角プリズム4で反射して磁気ヘッド
・スライダ2に形成されたセンサ測定部12に図2に示
す回折格子13によって入射角θが臨界角以上になるよ
うに入射される。入射角θが臨界角以上では光は全反射
される。このとき、センサ測定部12と空気の境界には
エバネッセント波が光の波長程度の領域まで空気側にし
み出している。センサ測定部12と磁気ディスク1の浮
上量が十分大きな場合には光束10は全反射して回折格
子13で回折されたのち直角プリズムで反射されて受光
素子6へ光束11として導かれる。このときの光束11
の光量をL1 とする。しかし、磁気ディスク1とセンサ
測定部12の浮上量が光の波長程度以下となりエバネッ
セント波がしみ出た領域に達すると光束10が磁気ディ
スク1に吸収されて光束11の光量が図3のように浮上
量に対して変化する。この光学現象をフラストレーティ
ッド・トータル・リフレクション(以下FTR)という。
逆にFTR時の光束11の光量をL2 とすると、L2 と
L1 を受光素子6で検出して浮上量演算回路9でL2 /
L1 を求めることで浮上量が測定できる。The operation of the first embodiment of the present invention thus constructed will be described. In FIG. 1, the guide arm 7 projects from the portion where the load arm 3 is attached onto the load arm 3 to the magnetic head slider 2.
A rectangular prism 4, a light emitting element 5, and a light receiving element 6 are mounted on the guide arm 7. The light beam 10 oscillated from the light emitting element 5 is reflected by the rectangular prism 4 and is incident on the sensor measuring section 12 formed on the magnetic head slider 2 by the diffraction grating 13 shown in FIG. It is incident. When the incident angle θ is greater than the critical angle, the light is totally reflected. At this time, at the boundary between the sensor measuring unit 12 and the air, the evanescent wave seeps out to the air side up to a region of about the wavelength of light. When the flying heights of the sensor measuring unit 12 and the magnetic disk 1 are sufficiently large, the light beam 10 is totally reflected, diffracted by the diffraction grating 13, and then reflected by the right-angle prism to be guided to the light receiving element 6 as a light beam 11. Light flux 11 at this time
Let L 1 be the amount of light. However, when the levitation amount of the magnetic disk 1 and the sensor measurement unit 12 becomes equal to or less than the wavelength of light and reaches the area where the evanescent wave exudes, the light beam 10 is absorbed by the magnetic disk 1 and the light amount of the light beam 11 is as shown in FIG. It changes with the flying height. This optical phenomenon is called frustrated total reflection (FTR).
On the contrary, when the light amount of the light flux 11 at the time of FTR is L 2 , L 2 and L 1 are detected by the light receiving element 6 and L 2 / L is calculated by the flying height calculation circuit 9.
The flying height can be measured by obtaining L 1 .
【0009】このように構成された浮上量測定装置はシ
ーク動作時の磁気ヘッド・スライダ2の挙動計測も図5
に示すようにガイドアーム7をシークモータ14に取り
付けてシークさせると測定できる。また、回折格子13
の代わりに図6に示すようにマイクロプリズム15およ
び16を用いても同様にセンサ測定部へ光束10を入射
角θで入射することができる。また、磁気ディスク装置
内にノイズが発生するときには、発光素子5および受光
素子6の出力が安定しないので、図7のように発光素子
5および受光素子6を磁気ディスク装置の外で、その間
を光ファイバ17,18で接続するとノイズに強い浮上
量測定装置を構成できる。The flying height measuring device constructed as described above also measures the behavior of the magnetic head slider 2 during a seek operation.
Measurement can be performed by attaching the guide arm 7 to the seek motor 14 and seeking as shown in FIG. In addition, the diffraction grating 13
Instead of the above, the light beam 10 can be similarly incident on the sensor measurement portion at the incident angle θ by using the micro prisms 15 and 16 as shown in FIG. Further, when noise is generated in the magnetic disk device, the outputs of the light emitting element 5 and the light receiving element 6 are not stable. Therefore, as shown in FIG. 7, the light emitting element 5 and the light receiving element 6 are placed outside the magnetic disk device and light is emitted between them. If the fibers 17 and 18 are connected, a flying height measuring device resistant to noise can be constructed.
【0010】[0010]
【発明の効果】本発明の浮上量測定装置はガイドアーム
がロードアーム上に突き出ているので、ガイドアーム上
に発光素子および受光素子を設置できる。そのため、磁
気ヘッド・スライダとロードアームから成る磁気ヘッド
支持系には必要最小限のセンサ測定部のみを形成できる
ので、磁気ヘッド支持系に外力を与えることなく浮上量
が計測できる。According to the flying height measuring apparatus of the present invention, the guide arm projects above the load arm, so that the light emitting element and the light receiving element can be installed on the guide arm. Therefore, since only the minimum necessary sensor measuring portion can be formed in the magnetic head support system including the magnetic head slider and the load arm, the flying height can be measured without applying an external force to the magnetic head support system.
【図1】本発明の全体構成を説明する斜視図。FIG. 1 is a perspective view illustrating an overall configuration of the present invention.
【図2】センサ測定部の側面図。FIG. 2 is a side view of a sensor measurement unit.
【図3】浮上量と反射率の関係を示した特性図。FIG. 3 is a characteristic diagram showing the relationship between the flying height and the reflectance.
【図4】センサ測定部付磁気ヘッド・スライダの斜視
図。FIG. 4 is a perspective view of a magnetic head slider with a sensor measurement unit.
【図5】シーク動作時の構成を説明した正面図。FIG. 5 is a front view illustrating the configuration during a seek operation.
【図6】センサ測定部の側面図。FIG. 6 is a side view of a sensor measurement unit.
【図7】ノイズ対策した場合の本発明の全体構成の斜視
図。FIG. 7 is a perspective view of the overall configuration of the present invention when noise countermeasures are taken.
1…磁気ディスク、2…磁気ヘッド・スライダ、3…ロ
ードアーム、4…直角プリズム、5…発光素子、6…受
光素子、7…ガイドアーム、8…発光素子駆動回路、9
…浮上量演算回路、10,11…光束、12…センサ測
定部。DESCRIPTION OF SYMBOLS 1 ... Magnetic disk, 2 ... Magnetic head slider, 3 ... Load arm, 4 ... Right angle prism, 5 ... Light emitting element, 6 ... Light receiving element, 7 ... Guide arm, 8 ... Light emitting element drive circuit, 9
... Flying height calculation circuit, 10, 11 ... Luminous flux, 12 ... Sensor measuring section.
Claims (2)
上特性を計測するに際し、光が全反射する際に生じるエ
バネッセント波を利用した測定装置において、ガイドア
ームをロードアーム上まで突き出した形状とすること
で、前記ガイドアーム上に発光素子および受光素子を設
置することを特徴とする磁気記録装置の浮上量測定装
置。1. A measuring device that utilizes an evanescent wave generated when light is totally reflected when measuring the flying characteristics of a magnetic head slider of a magnetic recording device, wherein a guide arm is projected to a position above a load arm. Thus, the flying height measuring device of the magnetic recording device, wherein the light emitting element and the light receiving element are installed on the guide arm.
ノイズ対策として光ファイバを光路として用いた磁気記
録装置の浮上量測定装置。2. The flying height measuring apparatus for a magnetic recording device according to claim 1, wherein an optical fiber is used as an optical path as a measure against noise in the magnetic recording device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30547295A JPH09145328A (en) | 1995-11-24 | 1995-11-24 | Measuring device for levitation amount of magnetic recording apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30547295A JPH09145328A (en) | 1995-11-24 | 1995-11-24 | Measuring device for levitation amount of magnetic recording apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09145328A true JPH09145328A (en) | 1997-06-06 |
Family
ID=17945571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30547295A Pending JPH09145328A (en) | 1995-11-24 | 1995-11-24 | Measuring device for levitation amount of magnetic recording apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09145328A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6381831B1 (en) | 1999-05-27 | 2002-05-07 | Autonetworks Technologies, Ltd. | Terminal mounting machine |
US8144549B2 (en) | 2006-12-08 | 2012-03-27 | Hitachi, Ltd. | Head stack assembly and information recording apparatus |
-
1995
- 1995-11-24 JP JP30547295A patent/JPH09145328A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6381831B1 (en) | 1999-05-27 | 2002-05-07 | Autonetworks Technologies, Ltd. | Terminal mounting machine |
US8144549B2 (en) | 2006-12-08 | 2012-03-27 | Hitachi, Ltd. | Head stack assembly and information recording apparatus |
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