JPH09133638A - Method and equipment for inspecting roll film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect and evaluate a defect accurately by irradiating light in parallel with the axis of a film, suppressing the pseudo detect signal by emphasizing a defect signal, capturing the defect signal in the film through an image sensor and then processing the image information. SOLUTION: A linear light source is disposed as main illuminator in parallel with the axis of a roll film. In order to avoid coexistence of a response to a partial defect and a response to a potential pseudo defect on the roll surface on an image, another luminous flux is projected to the surface of film so that the response to a pseudo detect is transferred to the side opposite to the response to a defect. For that purpose, a diffusive illuminator disposed in parallel is employed as a sub-light source. Reflected light from rotating film is captured by an image sensor and subjected to shading correction, A/D conversion and binarization prior to image processing. In the image processing, a decision is made whether a film is acceptable or not using a defect discrimination method where characteristic parameters are determined and classified according to a discrimination function. According to the invention, defect on a film can be inspected quantitatively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting a rolled film wound around a core.
The present invention relates to a method and an apparatus for inspecting a roll-shaped film for detecting a defect generated inside a film wound around a core, for example, a wrinkle, a core wrinkle, black spots, fish eyes, and the like by an image sensor.

[0002]

2. Description of the Related Art Conventionally, attempts have been made to automate the quality inspection of a roll-shaped film wound around a core using an image processing technique. Since it is difficult to distinguish between the wrinkles at the beginning and end of the winding, the spiral (seam) of the paper tube, and the like, the actual defect has not yet reached the stage of practical use.

On the other hand, there are various commercially available image processing apparatuses for inspecting defects in the sheet-shaped film before being wound into a roll. However, in this apparatus, as a matter of course, foreign matter mixed in after the inspection is mixed. It is not possible to detect wrinkles or the like that occur during winding or winding. At present, the quality inspection of the rolled film has to rely solely on visual inspection by an operator depending on the above.

[0004]

When an image sensor is used to inspect a roll-shaped film on which a film is wound, an original defect to be detected, such as a wrinkle, a core wrinkle, a black spot, a fish eye, etc. In addition, winding start wrinkles, winding end wrinkles, paper core clouds, spirals of paper cores, and the like, which are not defects in the quality of the rolled film, are detected as defects. A defect that is not such a quality defect but is detected by the image sensor is called a pseudo defect.

[0005] In order to discriminate a pseudo defect from an original defect, usually, in an image processing method, a target is discriminated by classifying feature parameters into classes according to an identification function. Therefore, it is well known that when a pseudo defect and a defect such as black spots have similar parameter values, it is not easy to distinguish between the two. In particular, since black spots sometimes have a small diameter of 1 mm or less, when a pseudo defect gives dot-like image information, it is not easy to discriminate between the two based only on the characteristic parameters. For this reason, the detection accuracy relying on image processing is limited. For the purpose of compensating for this, it has been an issue to develop an optical system that effectively utilizes the physical characteristics of the roll-shaped film, and to develop a defect detection method and apparatus for improving the detection accuracy. An object of the present invention is to solve such a problem.

That is, an object of the present invention is to suppress and isolate a defect generated inside a roll-shaped film wound around a core by optical means (optical filtering) and image processing. An object of the present invention is to provide a means for inspecting with high accuracy by combining the technique with electronic image filtering.

[0007]

According to the method for inspecting a roll-shaped film according to the present invention, a defect signal is irradiated by irradiating the roll-shaped film with main light or main light and sub-light in parallel with its axis. Using an optical system that emphasizes and suppresses the signal of a pseudo defect, the defect signal inside the roll-shaped film is taken into an image sensor, and the defect is detected and evaluated according to the obtained image information. Separating the pseudo defects by the characteristic parameter, which is characterized by each, and the roll film inspection apparatus according to the present invention, means for rotating the roll film at a certain position, the rotation axis of the roll film and Means for irradiating the main light or the main light and the sub-light in parallel, means for taking in the light radiated by the irradiating means with an image sensor, and means obtained by the means The image information, emphasized signal of the defect, and, further comprising an optical system for suppressing the signal of the pseudo defect, characterized by.

[0008]

The feature of the present invention is an inspection system comprising an optical system for realizing optical filtering, electronic image filtering, and an inspection method, and a material handling system for precise handling of a roll film. In general, in a visual inspection, a work is placed under diffused light, and a defect is found and evaluated based on human pattern recognition ability.

In view of the limitations of image processing technology, the optical filtering of the present invention firstly devises optical means in image capture to emphasize the optical response of the original defect,
It suppresses and suppresses the occurrence of optical response of pseudo defects specific to roll films.

In introducing the illumination light into the roll, an effective optical response is obtained from the defect, a potential pseudo defect is not irradiated as much as possible, and an effective illuminance is ensured without generating extra background light. Therefore, a light source having directivity is employed.

As the light source or illumination, a linear light source illumination arranged parallel to the axis of the roll film is adopted. This is called the main light. To avoid the coexistence of some defect responses and the potential pseudo-defect response on the roll surface in the image, apply a light flux adjusted separately from the main light flux to the surface of the roll-shaped film, and The response turns to the opposite side of the light and dark from the defect response. In order to achieve this, dispersive illumination arranged parallel to the axis of the roll film is employed. The luminous flux of this illumination is called sub-light in comparison with the main light.

[0012] Electronic image filtering applies image processing technology to an image obtained through optical filtering to detect and evaluate an original defect.
A defect discrimination method that classifies feature parameters by a discriminant function is employed. The inspection device has a function of quickly and surely handling a roll-like film which is a heavy object, giving a rotation necessary for scanning, and precisely holding and adjusting an optical system.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a roll film and a defect to be inspected will be described. The roll-shaped film is obtained by winding the film around a cylinder made of paper or the like. Film length 1000m or 500
There are various types such as m and the width. These are defined by standards. The film to be inspected is typically a transparent wrap film, but if it is a transparent film wound into a roll, material, thickness,
It can be inspected regardless of the purpose.

The nature of each defect and pseudo defect, the mechanism of occurrence, and the position in the roll film will be described. FIG. 1 shows the positions where defects (wrinkles and foreign matter) occur. The wrinkles are looseness or wrinkles generated in the sheet film that has been run for winding and wound as it is in the roll. It is convenient to distinguish these wrinkles according to the place where they occur in the roll.For example, the present inventors have found that what occurs near the winding core is wrinkled around the winding core, resulting from the operation of the winding machine. What occurs on the outside is called turning wrinkles.

There are two types of foreign substances, fish eyes and black spots. The fish eyes are translucent unfused resins generated in the resin flow channel stagnation due to dispersion of various additives during film formation. The black spots are dust that adheres during the film running and kogation generated when the flow of the resin is stopped in the resin flow path portion or the screw flight portion during film formation. What is wound up in a roll as such is called foreign matter.

Pseudo defects include spirals in the paper tube, wrinkles at the beginning of winding,
There are what we call the end-of-wind wrinkles and the paper core cloud.
The spiral of the paper tube occurs because of the manufacturing reason of the paper tube that winds the film. The winding start wrinkle and the winding end wrinkle are generated at the winding start end and the winding end end of the film, respectively. The paper core cloud is generated when the tension applied to the film at the time of winding changes, and air is trapped between the layers of the film.

FIG. 2 shows a system configuration of the inspection method according to the present invention. In order to scan and capture an image into the image sensor, for example, irradiate the rotating roll-shaped film with main light or main light and sub-light in a manner to suppress pseudo defects, capture the reflected light into the image sensor, After performing shading correction and A / D conversion, for example, binarization and image processing are performed, and determination and pass / fail determination are performed.

Inspection methods can be broadly classified into a method in which the optical response of the defect to be examined is a bright side with respect to the average background (bright defect method) and a method in which the optical response is a dark side (dark defect method) with respect to the average background. it can. When two inspection methods are established for one type of defect, a method is selected in which optical filtering and electronic image filtering are easier and the defect detection accuracy is higher.

Next, the bright defect method will be described. Optical filtering of bright defect method As a typical example, a method of detecting wrinkles will be described. FIG. 3 shows a wrinkle detection system. In this case, no auxiliary light is used. The main light is a linear light source. A linear light source is a linear light source in which point light sources having appropriate forward directivity are arranged in a line, that is, optical fiber illumination, LE
D illumination.

A cylindrical lens may be provided on the entire surface in order to improve the directivity in a method perpendicular to the axis (in a cross-sectional direction). Also,
A light source that emits a light beam through a slit is referred to as a rod-shaped light source. Since the light of the primary light source is introduced from one side or both sides, the volume efficiency is good and it is suitable for the inspection of a roll film.

A wrinkle is basically a complicated overlap of layers in which air is entangled in a folded portion of a film. Accordingly, by irradiating the wrinkles with directional illumination at an appropriate angle, reflected light corresponding to the wrinkles is generated. By detecting this reflected light with an image sensor, wrinkles can be evaluated. In order to make the intensity difference between the reflected light from the wrinkles and the background light stand out, it is important to increase the directivity of the illumination light introduced into the roll-shaped film and to select the incident angle with respect to the wrinkles. When the position (depth) in the roll-like film is close to the paper tube, such as a wrinkle or a core wrinkle, the main light is reflected from the paper tube and becomes strong background light. Is large (for example, total reflection condition).

The selection of the incident angle with respect to the defect is optical filtering, but the use of a directional light source does not cause extra background light on the roll film surface.

FIG. 4 shows image information obtained by an actual detection system using electronic image filtering in the bright defect method. FIG. 4 and FIG. 5 are image examples of a wrinkle and a core wrinkle, respectively. White parts represent wrinkles. Since this image has no pseudo defects, the wrinkle intensity can be determined based on the total area of the white portions.

FIG. 6 and FIG. 7 show another example, in which
It is an image of a core wrinkle, but an image in which a paper tube cloud, a spiral of the paper tube, and a wrinkle at the beginning of winding which are a pseudo defect at the same time as the wrinkles are detected.
A method for distinguishing wrinkles from pseudo defects by image processing technology, that is, electronic image filtering will be described in detail.

FIG. 8 is an image obtained by compressing the image of the wrinkle shown in FIG. As shown in FIG. 6, turning wrinkles result in a very large image. Processing this image takes considerable time. Therefore, it is convenient to leave the horizontal direction of the image as it is and compress only the vertical direction to 1/4 as in this example to perform image processing to obtain the image shown in FIG. Since the wrinkles are elongated, their characteristics are maintained even when compressed in the vertical direction.

FIG. 9 is a schematic diagram showing a pseudo defect detected simultaneously with wrinkles. Since the wrinkles are elongated vertically, the ratio of W to L becomes a small value. As shown in FIG. 7, the wrinkles at the beginning of the winding are small broken points, so that both W and L have small values. Since the spiral of the paper tube is obliquely elongated,
The ratio between S and W × L is a small value. Since the paper tube cloud has a large shape in the horizontal direction, the ratio of W to L has a large value.

With respect to the data of the sample work, characteristic parameters were sought and selected, and W, L, S, W / L, etc. were set as shown in Table 1. By using this list of characteristic parameters, wrinkles and pseudo defects can be distinguished.

If a pseudo defect is detected as a defect in an actual online defect inspection of the rolled film, the characteristic parameter is changed as appropriate and the list of characteristic parameters is corrected, thereby erroneously detecting the pseudo defect. Could be prevented.

[0029]

[Table 1]

Next, the dark defect method will be described. The dark defect method is a method of detecting a defect in a roll-shaped film by setting the response of the defect to a dark side with respect to a background. As a representative example, a case of a foreign substance will be described. The roll-shaped film is irradiated with linear light parallel to its axis and reflected from the paper tube surface, and at the same time, the dispersed light is superimposed on the roll-shaped film surface near the image sensor capture side, so that the information of the winding end wrinkle can be obtained. Suppress.

FIG. 10 shows a schematic diagram of the optical system. First, a roll-shaped film surface having no winding end wrinkles as a pseudo defect will be considered. The main light (intensity Iro) is introduced into the roll film, is scattered and reflected by the paper tube, and exits from the roll film surface as main light emission (intensity Ir) to reach the image sensor. If there is a foreign matter on the optical path of the main light (Iro) reflected from the paper tube, the light is absorbed or scattered there, so that the light intensity that exits the roll-shaped film surface and reaches the image sensor is Δr than Ir. And it becomes Id.

Id = Ir−Δr... Δr = k ・ Ir... K: Attenuation rate due to foreign matter When the secondary light (intensity Iso) is superimposed, the light intensity on the roll-shaped film surface becomes the main light emission (Ir) and sub-light reflection (Is). Let It be It = Is + Ir... This It becomes light entering the image sensor. A guide for defect detection is a signal level ratio between the defect signal and the background light. Δ
The ratio between r and It, that is, the signal level ratio is as follows.

Δr / It = k · Ir / (Is + Ir) = k / (1 + Is / Ir)... Defects are easier to detect as the signal level ratio increases. From the formula, Δr / It becomes large when Ir is large or Is is large, that is, when the main light emission is relatively stronger than the sub light reflection. That is, a large signal level ratio can be maintained.

Next, the portion where the winding end wrinkles are present on the surface of the roll film will be considered. Winding end wrinkles are those in which a part of the winding end of the film floats irregularly from the roll surface and sandwiches an air layer. Due to the difference in the refractive index between the resin and the air, this portion serves as a light beam reflector. The emission of the main light decreases and becomes a dark signal. That is, it becomes a pseudo defect signal. The side light is reflected and becomes a bright signal of the image sensor, which cancels this. That is, the pseudo defect signal is suppressed. Since the side light has weakened directivity, the side light itself does not form a new shadow. In addition, since the sub-light is substantially reflected on the surface of the scroll, it is possible to prevent the inside foreign matter from exerting an illumination effect.

It is difficult to calculate the behavior of the main light emission and the sub-light reflection at the wrinkle at the winding end because not only the relevant light beam but also the neighboring light beams are multiple-reflected. The roll-like film surface under the end-of-wind wrinkles is the reflective surface of the relevant light flux. As expected from the fact that the system is composed of the reflecting surface and the wrinkle structure located thereon, it is experimentally confirmed that the effect of the auxiliary light can be realized in the range of Is / Ir <l. discovered. That is, the decrease in the signal level ratio due to the superimposition of the sub light can be suppressed to １ ／ or less.

A specific method of superimposing the sub light will be described. First, the signal level ratio of the foreign matter using only the main light (Δr / Ir)
After obtaining the condition for maximizing, the sub-light is superimposed, and the intensity of the sub-light,
Adjust conditions such as direction.

FIG. 1 shows a general model of sub light superimposition.
It looks like 1. That is, it comprises a primary light source and means for receiving and adjusting the light flux thereof, and converting and adjusting to a proper light flux (secondary light source) as sub-light.

A part of the light flux emitted from the secondary light source is directed to point A, which is the emission point of the main light. If spatially permissible, unnecessary light fluxes may be suppressed to prevent background light from increasing. As described above, in order to maintain the signal level ratio of the foreign matter, it is a principle that the auxiliary light is necessary and minimized.

There are various methods for realizing the dispersive sub-light. It is natural to select a light source having a uniform light flux condition in the axial direction of the roll film. For example, it is one method to irradiate various line illumination lights having directivity to a reflector having a dispersion reflection property. As shown in FIG. 13, there is also a method in which the light flux of a fluorescent lamp in which the light source itself is dispersive is applied to a normal (non-dispersive) reflector, and directed to the surface of the roll film.

As an effective method for fisheye detection,
As shown in FIG. 12, the light response of the fluorescent lamp is guided to the roll surface through the milky acrylic plate which is a dispersing plate, and the angular response of the light beam of the auxiliary light is adjusted to suppress the dark response of the wrinkle at the end of winding. Can be. The output waveform of the one-dimensional image sensor is as shown in FIG. In the case of the main light alone, the foreign matter signal (a and b) and the winding end wrinkle signal (c)
Are both dark signals, but by superimposing the sub-light, the foreign matter signals (a ′ and b ′), which are defect signals, remain dark signals, and the winding end wrinkles (c ′), which are pseudo defect signals,
Since the signal changes to a bright signal, binarization processing can be easily performed.

When the intensity of the auxiliary light is increased and deeply introduced into the inside of the roll-shaped film, the signal level ratio is significantly lower than that of a colorless signal level such as fish eye (a → a ′). That is, it is possible to selectively detect only the colored foreign matter whose response is not erased.
This is performed by the optical system shown in FIG. 13 to provide an inspection system for black spots.

The foreign matter detection system of FIG. 12 naturally detects black spots as shown in FIG. If the same image is binarized with different thresholds, fish eyes and black spots can be distinguished, but if resin burning or kogation is a serious concern, such as film formation by an extruder of soft vinyl chloride, As for the detection limit of black spots, it is particularly required to improve the performance. Therefore, what has been devised is a detection system for black spots using the optical system shown in FIG. 13, and optically distinguishes between fish eyes and black spots by filtering. At this time, if a yellow fluorescent lamp (with a fluorescent filter coating on the inner surface of the fluorescent tube) is used as the fluorescent lamp light source along the halogen lamp wavelength distribution of the rod-shaped light source, the signals of various patterns of the paper tube are suppressed and the black color is reduced. It has been discovered that the detection limit (diameter / color tone) of the spots can be improved.

The output waveform of the one-dimensional image sensor of the black spot detection system is as shown in FIG. In the case of the main light alone, the black spot signal (b) and the winding end wrinkle signal (c) are both dark signals, but the black spot signal (b), which is a defect signal, is a dark signal by superimposing the sub light. As it is, the winding end wrinkle (c ′), which is a pseudo defect signal, turns into a bright signal, so that the binarization process can be easily performed.

Electronic Image Filtering by Dark Defect Method By utilizing the difference in signal polarity of an image obtained by using such an optical system, binarization can extract only dark defects. If this signal is analyzed by the image processing device, the defect can be recognized and classified using only relatively simple parameters as shown in Table 1.

Inspection System An integrated inspection system including material handling for realizing the above-described inspection method will be described. Inspection systems can be installed directly downstream of the film-forming and winding process for offline and real-time quality inspection, or can be installed downstream of stock points to perform pre-shipment inspections. May be the purpose.
The system of the present invention is compatible with any of the above, but is reliable enough for the former online application.

The functions to be provided by the present system are as follows. A: Capable of handling a roll-shaped film (hereinafter, also referred to as a "roll") continuously fed from a previous process of forming and winding a film in conformity with an inspection apparatus main body which is a batch process. B: Capable of mechanically and optically handling various types of rolls having various roll diameters, widths, and film colors. C: Scroll that is a heavy work (for example, winding diameter φ160 m
m, width 300 mm and 6 kg) can be handled while securing optical accuracy while securing the tact time (the workpiece becomes a part of the optical system during inspection).

As a representative embodiment of the inspection system, a system for a soft vinyl chloride wrap film will be described with reference to FIGS. 16, 17 and 18. FIG. The design base of this system is as follows. Roll dimensions: Film winding length 500m to 1000m, winding diameter (outer diameter of the winding) φ130mm to φ160mm Width 250mm to 450mm Minutes Defects to be inspected: Wrinkles (core wrinkles, swirling wrinkles), fish eyes, black spots Three inspection systems Detection accuracy: Fish eyes 1 mm or more Black spots 0.5 mm or more Wrinkles 10 m or more In case of vinyl chloride film, Inspection of black spots is particularly important, because the resin tends to burn in the film.

This system comprises a winding diameter / width detecting device, a scroll separating device, an inspection device, and a dispensing device. FIG.
6 shows the configuration of the inspection system. The roll diameter and width of the rolled film conveyed from the previous process are detected by a winding diameter / width detecting device prior to the defect inspection, and a work of inappropriate size is discriminated and removed.

Regarding the width of the scroll, a large number of photoelectric tubes are arranged in the lateral direction at the entrance of the inspection device, and the approximate dimensions are measured in advance.
An alarm is issued to shut down the equipment and protect the precision inspection equipment. Also, as with the width, a number of photoelectric tubes are arranged in the vertical direction at the entrance of the inspection device, the approximate dimensions are measured in advance, and if it is not a standard product input in advance to the inspection device,
An alarm is issued to shut down the equipment and protect the precision inspection equipment.

It has an important function of monitoring the film forming / winding process and protecting the optical system of the inspection device at the same time. The roll separating device continuously receives one roll from the system.
Pick up each book and supply it to the inspection system.

The inspection device receives the scroll from the scroll separating device, lifts it to a predetermined position, chucks it with a chucking mechanism, rotates the scroll, and optically scans it. After the inspection, it is discharged to the dispensing device.

The dispensing device has a mechanism for transporting accepted products to an alignment device for robot handling and rejected products to a defective product stock conveyor based on the inspection results.

Next, the inspection apparatus will be described in detail.
The inspection device is compatible with various kinds of scroll brands, and has various functions of saving space, increasing speed, and accurately holding and rotating heavy objects. The main parts are a scroll lifting mechanism, a scroll holding / rotating mechanism,
It consists of a lighting assembly and a camera. An optical system including illumination, a work, and a camera is called an optical system, and first, a device relating to the optical system will be described.

The general specifications of the optical system are as follows. 1-dimensional image sensor camera 2048bit 6 units Main light source Bar-shaped line illumination 3 sets Sub-light source White and yellow fluorescent lights 1 set Reflector / Dispersion plate Aluminum / acrylic 1 set Each wrinkle, fish eye, black spot inspection system Each time an inspection stage is provided, a large amount of space is required. In order to make this inspection apparatus in-line, space saving must be realized. Therefore, an arrangement of an optical system as shown in FIG. 17 is adopted.

Main light, sub light,
The cameras (one-dimensional image sensor) are circumferentially arranged in consideration of mechanical interference and optical interference. Two cameras for foreign matter and black spots were provided side by side to increase the detection limit, and wrinkle detection cameras were provided for winding wrinkles and turning wrinkles, respectively, in order to ensure the reflection response of wrinkles. In addition, a dedicated inspection system is provided to enhance the detection accuracy of black spots.

By arranging in this manner, wrinkles, fish eyes, and black spots can be inspected in one stage. Each optical system is provided with a function for precisely and finely adjusting the distance and angle to the roll film. By inputting the winding diameter value for each brand in advance, the lighting and the camera are automatically moved and fixed so as to correspond to the change in the winding diameter. Since the light transmittance of the roll film is very different between yellow and green, the voltage of the main light is automatically changed so that the output of the image sensor is the same even if the color changes. I have.

High speed is realized by sequentially taking in images of the three inspection systems during the constant speed rotation time in the tact time of one work. The illumination is always on, and as a measure for preventing interference of the optical system, a shutter is attached to each illumination, and the illumination of the inspection system or the shutter of the illumination group is sequentially opened to take in an image. In addition, the shutter employs a rotary shutter to shorten the operation time.

Next, a device for handling the scroll will be described. FIG. 18 shows a schematic diagram of the apparatus. Camera positioning and
Attach it to the underframe via the holding mechanism. The lighting component is attached to a pair of left and right movable pedestals via a positioning / holding mechanism to form a lighting assembly. When chucking the work on the holding / rotating mechanism, the assembly is divided into right and left, and a passage is opened for the ascending work. After chucking the work, close the assembly. After capturing the image, separate the left and right assemblies again, remove the work from the holding / rotating mechanism, and lower it.

When the scroll is chucked on the rotating shaft at a fixed position, the paper tube is damaged if the core of the scroll has a large discrepancy with the rotating shaft core. Generally, the diameter of the paper tube used for the scroll does not change depending on the brand. That is, the inner diameter of the paper tube is constant. The following describes a method of controlling the lifting / lowering device for precisely performing the alignment using this fact.

A photoelectric tube for transmitting and receiving light is attached to the center of the chucking device, and is turned on when the upper surface of the scroll is raised, and is turned off when the upper surface of the paper tube is passed. In the control logic, this O
The combination of N and OFF is used as a scroll rising end signal and input to the air cylinder control circuit. That is, if the operation is stopped within a certain period of time after being turned off, chucking can always be performed at the center of the paper tube. By doing so, even if the size of the roll-shaped film changes depending on the brand, the chucking can be accurately performed.

By providing the inspection apparatus with the above functions, an inspection apparatus having a function of handling the rolled film promptly and surely and accurately holding and adjusting an optical system required for the inspection is realized. . The performance of this device has been demonstrated to be comparable to in-line visual inspection.

[0062]

The present invention has the following effects, and has solved the above-mentioned problems. By eliminating the ambiguity, that is, by digitizing the inspection, which depends on the skill of the operator, by image processing, it is possible to quantitatively inspect the defects of the roll-shaped film. Individual differences are eliminated, the same test results are obtained at any time, and erroneous judgments are eliminated. Labor saving and automation are achieved. Workers are freed from long hours of simple work, eliminating one of the causes of worker fatigue. It is possible to grasp the occurrence status and trends of individual defects and to perform quality control and production control by computerization. Online process management is possible. Space can be saved by combining the inspection systems for wrinkles, fish eyes, and black spots on a single axis single inspection stage.

[Brief description of the drawings]

FIG. 1 Location of internal defects and pseudo defects in roll-shaped film

[Fig. 2] System configuration diagram

[Fig. 3] Wrinkle detection system

[Fig. 4] Turning wrinkle image

FIG. 5: Wrinkle core image

FIG. 6 is a wrinkle image

FIG. 7: Wrinkle core image

FIG. 8 is an image obtained by compressing a rotating wrinkle image to 1/4.

FIG. 9: Wrinkles and pseudo defects

FIG. 10 is a schematic diagram of a foreign matter detection system.

FIG. 11 is a general model diagram of secondary light.

FIG. 12 shows a method for realizing dispersive sub-light.

FIG. 13 shows a method for realizing dispersive sub-light.

FIG. 14 is an image sensor output waveform of a black spot inspection system.

FIG. 15 is an image sensor output waveform of a foreign substance inspection system.

FIG. 16 is a schematic diagram of an apparatus.

FIG. 17 shows an optical system of a single inspection stage.

FIG. 18 is a schematic diagram of an optical system.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Katsuhiko Aoki 2-1-1 Tangodori, Minami-ku, Aichi Prefecture Mitsui Toatsu Chemical Co., Ltd. (72) Inventor Koichi Takahashi 2-chome, Tango-dori, Minami-ku, Aichi Prefecture Mitsui Toatsu Chemical Co., Ltd. (72) Inventor Hiromi Tsuji 2-1, Tango Dori, Minami-ku, Nagoya-shi, Aichi Prefecture Mitsui Toatsu Chemical Co., Ltd. (72) Inventor Tokuhiko Funakura 1-chome Takasago, Takaishi-shi, Osaka Prefecture 6th Mitsui Toatsu Chemical Co., Ltd. (72) Inventor Yasuo Okumura 2-8-1, Akanehama, Narashino City, Chiba Prefecture Toyo Engineering Co., Ltd. (72) Inventor Sadaho Ohta 2-8 Akanehama, Narashino City, Chiba Prefecture No. 1 in Toyo Engineering Co., Ltd. (72) Inventor Yuichi Ito 3-5 Kasumigaseki, Kasumigaseki, Chiyoda-ku, Tokyo Toyo Engineering Ring Co., Ltd. (72) Inventor Tsukasa Ono 13-35 Miyanari-cho, Gamagori-shi, Aichi Kowa Stock Company Gamagori factory (72) Keibun Yagi 13-35 Miyanari-cho, Gamagori-shi, Aichi Kowa Stock Company Gamagori Inside the factory (72) Inventor Masafumi Mori 13-35 Miyanari-cho, Gamagori-shi, Aichi Kowa Stock Company Inside the Gamagori factory

Claims (3)

[Claims] An optical system for illuminating a roll-shaped film with main light or main light and sub-light in parallel with its axis to enhance a defect signal and suppress a pseudo defect signal. A defect signal in the roll film is taken into an image sensor, and the defect is detected and evaluated according to the obtained image information. 2. The method for inspecting a roll-shaped film according to claim 1, wherein pseudo defects detected simultaneously with the defects are classified according to characteristic parameters. 3. A means for rotating a roll-shaped film at a fixed position, means for irradiating main light or main light and sub-light in parallel with a rotation axis of the roll-shaped film, and light radiated by the irradiating means. Means for capturing images with an image sensor,
An inspection apparatus for a roll-shaped film, comprising: an optical system which emphasizes a defect signal on the image information obtained by the means and suppresses a pseudo defect signal.