JPH09128727A - Suspension device and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the effect from exerting upon a floating characteristic of a magnetic head slider of an input and output signal lines and also to reduce electric resistance of the input and output signal line. SOLUTION: A load beam part has a terminal supporting part 11a projecting out on a side part of its base part and bent at an arbitrary angle with the surface of this base part, and a flexture part 10 is formed with a 1st connecting terminal part 14 positioned on one end part of this flexture part 10 and connected electrically with the magnetic head slider, a 2nd connecting terminal part positioned on the other end part of the flexture part 10 and a connecting conductor connected with these 1st and 2nd connecting terminal parts on both ends respectively as a thin film pattern of them. In order to direct the 2nd connecting terminal part positioned on the terminal supporting part to the side of the base part of the load beam part 11, the other end part of the flexture is fixed on this terminal supporting part 11a.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk apparatus or a suspension apparatus in a magneto-optical disk apparatus, in which a magnetic head slider flies over a rotating magnetic disk or a magneto-optical disk with a low flying height to perform recording and reproduction, and its manufacture. Regarding the method.

[0002]

2. Description of the Related Art A suspension device, which is a device for supporting a magnetic head slider, carries a magnetic head slider at one end thereof and presses the magnetic head slider toward the surface of a magnetic disk. Due to the rotation of the magnetic disk, an air flow between the magnetic head slider and the magnetic disk produces a lift force, and the balance between the lift force and the pressing force of the suspension device causes the magnetic head slider to relatively move on the magnetic disk while maintaining a minute gap. The recording / reproducing of the magnetic information or the magneto-optical information is thereby performed.

As a known suspension device, Japanese Patent Publication No. 58-22827 discloses a support body having one end attached to a rigid arm and a flexible body attached to the tip of the support body for carrying a magnetic head slider. A basic suspension device with a sex finger is described.
Such a suspension device is available from Hutchinson (H
utchinson Technology In
c. ) Are sold in the form of T-8 or T-19 and are widely used.

Generally, the magnetic head slider is carried on a flexible flexure portion of a suspension device having such a structure, and a plurality of wires are used as signal input / output lines. That is, one end of each wire is connected to each signal terminal of the magnetic head slider, and the other end extends from an integrated circuit element for recording / reproducing signals in a magnetic disk device or a magneto-optical disk device.
Is connected to each terminal provided on the.

In recent years, the flying height of a magnetic head slider has been reduced to 0.
The magnetic head slider itself has been significantly miniaturized, and the force for elastically pressing the magnetic head slider toward the magnetic disk surface has been considerably reduced. When such a miniaturized magnetic head slider is used, the rigidity of the wires for input / output signals may significantly affect the flying characteristics of the slider. In particular, the influence on the movement of the slider in the roll direction becomes large. Further, as the magnetic head slider becomes smaller, it becomes very difficult to connect wires to the signal terminals.

Further, as described above, the other ends of the plurality of wires extending from the magnetic head slider are respectively connected to a plurality of terminals provided on the FPC, but this connection work needs to be performed one by one manually. Therefore, the skill of the worker is required and the work efficiency is very poor.

In order to eliminate such inconveniences, in the suspension devices disclosed in Japanese Patent Laid-Open Nos. 40406/1992 and 2826242/1992, a thin film pattern is formed on a flexure of a suspension composed of a flexure and a load beam. By forming the terminal lead-out portion, the complexity of the work of connecting the slider and the wire due to the miniaturization of the slider is avoided, and the fluctuation of the flying height and the deterioration of the durability of the device due to the rigidity of the wire itself are attempted.

[0008]

However, according to this known suspension device, the flexure having the thin film pattern is provided only on a small part of the tip of the load beam on which the magnetic head slider is mounted.
Since the wire is still used to connect this thin film pattern to the external circuit, the following problems occur.

If the diameter of the wire used for connection with an external circuit is increased in order to reduce the electric resistance of the signal line, the flying characteristic of the miniaturized magnetic head slider is also greatly affected, and this is avoided. Therefore, when a wire having a small diameter is used, not only the electric resistance becomes high, but also the disconnection is apt to occur at the time of connection work, and the yield is deteriorated.

Further, since a double connection work is required, that is, connection between the thin film pattern and one end of the wire and connection between the other end of the wire and a cable terminal of the FPC extending from the integrated circuit element for recording / reproducing signals are required. The work process becomes complicated accordingly, and since it is necessary to manually perform the wire connection work one by one, the skill of the worker is required and the work efficiency is very poor. In addition, since the connection work uses wires, disconnection is likely to occur at the time of connection, and the yield is deteriorated.

Therefore, an object of the present invention is to provide a suspension device in which the flying characteristics of the magnetic head slider, particularly the movement in the roll direction, are not affected by the input / output signal lines and the electrical resistance of the input / output signal lines can be lowered. It is to provide a manufacturing method.

Another object of the present invention is to make it easy to connect the input / output signal line to an external circuit, prevent yield deterioration, and reduce the manufacturing cost associated with the connection. And to provide a manufacturing method thereof.

[0013]

SUMMARY OF THE INVENTION The present invention relates to a suspension device including a flexible flexure portion for carrying a magnetic head slider near one end and a load beam portion for supporting the flexure portion. Is. In particular, according to the present invention, the load beam portion has a terminal supporting portion that projects laterally from the base portion and is bent at an arbitrary angle with the surface of the base portion, and the flexure portion has the flexure portion. A first connection terminal portion located at one end of the flexure portion and electrically connected to the magnetic head slider; a second connection terminal portion located at the other end of the flexure portion; And a connection conductor connected to each of the first and second connection terminal portions is formed as a thin film pattern, and the second connection terminal portion is located at the position of the terminal support portion on the side of the base portion of the load beam portion. The other end of the flexure portion is fixed on the terminal support portion so as to face.

The second connecting terminal portion electrically connected to the magnetic head slider by the thin film pattern has the other end portion of the flexure portion fixed to the terminal supporting portion projecting to the side of the base portion of the load beam portion. Therefore, it is located in this terminal support part. As a result, the second connection terminal portion can be directly connected without interposing a wire to the other end of the FPC connection cable whose one end is connected to an external circuit such as an electronic circuit for recording / reproducing signals. Become. As a result, the flying characteristics of the magnetic head slider, particularly the movement in the roll direction, are not affected by the input / output signal line, and the electrical resistance of the input / output signal line can be reduced. Especially,
This effect is remarkable in a small magnetic head slider. Further, when the number of signal terminals of the magnetic head slider is large, the number of input / output signal lines is also large, so that this effect is more significant. Also, since no wires are used,
The disconnection does not occur during the connection work with the external circuit, and the deterioration of the yield can be prevented.

Further, the second connection terminal portion is fixed to the terminal support portion bent at an arbitrary angle with the surface of the base portion of the load beam portion so as to face the side portion of the base portion of the load beam portion. Also, the connection terminal also faces the side at this position, and the connection work with the FPC for connecting with an external circuit becomes very easy. Moreover, since the positions of the connection terminals are determined, automation is possible and the manufacturing cost associated with the connection can be reduced. Furthermore, since the flexure portion is attached over almost the entire length of the load beam portion, an increase in the damper effect can be expected.

It is desirable that the flexure portion has a free-moving portion that can freely move with respect to the load beam portion near the other end. As a result, even when the other end of the flexure part is fixed to the terminal support part, the intermediate part can freely move with respect to the load beam part, so that it cannot be bent at a steep angle, resulting in a connection conductor. Since an excessive stress is not applied to the thin film pattern such as, it is possible to prevent the deterioration of the electrical characteristics such as insulation characteristics and electric resistance.

It is preferable that this free-moving portion of the flexure portion has, for example, a curved play for preventing twisting. By providing such play, even if a part of the flexure part is twisted during bending, excessive stress will not be applied to the thin film pattern of the connecting conductor, etc., so that the electrical characteristics such as insulation characteristics and electrical resistance will deteriorate. Is very effective for.

In the embodiment of the present invention, the terminal supporting portion is bent substantially at a right angle to the surface of the base portion of the load beam portion. However, this bending angle may be any value as long as the connection work with an external circuit is facilitated. If the bending angle is shallow, the length of the terminal supporting portion protruding downward is short, which is more convenient.

The load beam portion preferably has a slit at a position where the terminal support portion should be bent. By providing the slits in this way, when bending is performed, excessive stress is not applied to the thin film pattern of the connecting conductor and the bending work is facilitated.

According to the present invention, further, the first connecting terminal portion located at one end of the flexure portion and electrically connected to the magnetic head slider and the other end portion of the flexure portion are provided. Forming a flexible flexure portion having, as a thin film pattern, a second connecting terminal portion located and a connecting conductor whose both ends are respectively connected to the first and second connecting terminal portions; Forming a load beam portion having a terminal supporting portion protruding laterally; fixing a flexure portion on the load beam portion so that the second connecting terminal portion is fixed on the terminal supporting portion; After fixing the flexure part on the load beam part, the second connection terminal part is directed to the side of the base part of the load beam part at the position of the terminal support part and the terminal support part is connected to the surface of the base part of the load beam part. Any Method of manufacturing a suspension device that includes a step of bending at an angle is provided.

Since the other end portion of the flexure portion where the second connection terminal portion is located is fixed on the load beam portion, the terminal support portion is bent, so that the workability is good. Moreover, the bending angle can be freely set.

It is preferable that the step of forming the load beam section includes the step of forming a slit at a position where the terminal supporting section protruding laterally is to be bent. By providing the slit in this way, when bending,
Excessive stress is not applied to the thin film pattern of the connecting conductor and the bending work is facilitated.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a plan view showing a suspension device according to an embodiment of the present invention.

In the figure, 10 is a flexible flexure portion for carrying a magnetic head slider (not shown) by a tongue portion 10a provided at one end portion, and 11 is a load for supporting and fixing the flexure portion 10. Beam portions 12 are base plate portions fixed to the base portion of the load beam portion 11, respectively.

FIG. 2 is a sectional view taken along the line AA in FIG. 1. As shown in FIG. 2, the load beam portion 11 projects to the side of the base plate portion 12 and the base plate portion 12 is provided.
Has a terminal support portion 11a bent substantially at right angles to the surface of the. On the terminal support portion 11a, the second
Flexure part 1 where the connection terminal part (15) of is located
The other end of 0 is fixed.

Terminal support portion 1 for the load beam portion 11
The bending direction of 1a may be a direction substantially perpendicular to the direction opposite to the surface to which the base plate portion 12 is fixed, as shown in FIGS.
As shown in FIGS. 7C and 7D, the direction may be substantially perpendicular to the same side as the surface of the base plate portion 12 to which the base plate portion 12 is fixed. However, the second connection terminal portion (15)
The other end portion of the flexure portion 10 is fixed on the terminal support portion 11a so that is directed to the side of the base plate portion 12. Further, as shown in FIGS. 6B and 6D, by shortening the length of the terminal supporting portion 11a in the protruding direction, the length of the terminal supporting portion 11a protruding downward is shortened, which is convenient. is there. In the present embodiment, the terminal support portion 11a is bent at a substantially right angle, but the bending angle may be any value as long as it facilitates the connection work with the external circuit. If the bending angle is shallow, the length of the terminal supporting portion 11a protruding downward is short, which is more convenient.

The flexure portion 10 is, in this embodiment,
About 25 μm thick stainless steel plate (eg SUS304
TA). FIG. 3 shows the structure of only the flexure portion 10 in detail. As is clear from the figure, on the flexure portion 10, four connection conductors 13 in a thin film pattern are provided as input / output signal lines.
a to 13d are formed over the entire length. Also,
On one end of the flexure portion 10, four connection terminals 14a to 14 directly connected to the magnetic head slider are provided.
The first connection terminal portion 14 made of d is also provided by a thin film pattern, and the other end portion thereof is directly connected to a connection cable by an FPC (not shown) for connecting to an external circuit. The second connection terminal portion 15 composed of is also provided in a thin film pattern. These connection terminals 14a to 14d and connection terminals 15a to 15
d is electrically connected to each other by connection conductors 13a to 13d.

The thin film pattern is formed by the same known patterning method as that for forming a printed circuit board on a thin metal plate. That is, although not shown, a polyimide layer (lower insulating layer) having a thickness of about 5 μm and a patterned thickness of about 4 μm
m copper layer (conductor layer) and a polyimide layer (upper insulating layer) having a thickness of about 5 μm are laminated on the flexure portion 10 in this order. However, the connection terminals 14a to 14d and the connection terminals 15a to 15d are
A nickel layer and a gold layer are laminated on the copper layer, and the upper insulating layer is not formed thereon. 1 and 3, the connection conductors 13a to 13d are shown by solid lines for easy understanding.

The load beam section 11 has a thickness of about 62 to 76 μm.
The flexure part 1 is made of stainless steel plate
0 is fixedly supported at several places. As described above, the load beam portion 11 is provided with the terminal support portion 11a which projects to the side of the base plate portion 12 and is bent substantially at a right angle to the surface of the base plate portion 12.
The other end of the flexure portion 11 is fixed on the terminal support portion 11a so that the second connection terminal portion 15 faces the side of the base plate portion 12 at the position of the terminal support portion 11a.

Flexure section 10 and load beam section 11
The fixation with the is made at a plurality of welding points 16 by laser welding or the like. The other end of the flexure portion 10 and the terminal support portion 11a are also fixed to each other at a welding point such as laser welding which is not shown in FIG. By thus fixing the flexure portion 10 and the load beam portion 11 in spots, the flexure portion 10 is not fixed to the load beam portion 11 and is free to move freely.
Is near the other end. As a result, even when the flexure portion 10 is attached to the load beam portion 11, the free moving portion 10b in the middle of the flexure portion 10 can freely move with respect to the load beam portion 11, so that an excessive stress is applied to the thin film pattern such as the connection conductor. Absent.

A slit 17 is formed along the bending line 19 at a portion of the bending line 19 of the terminal supporting portion 11a which is bent so as to project laterally from the load beam portion 11.

The base plate portion 12 is made of stainless steel or iron, and is fixed to the base portion of the load beam portion 11 at a welding point 18. The base portion of the load beam portion 11 may be configured as the base plate portion without separately providing the base plate portion.

Next, a method of manufacturing the suspension device of this embodiment will be described.

First, the flexure portion 10 having a thin film pattern thereon is formed. The thin film pattern is located at one end of the flexure portion 10 and has one end electrically connected to the first connection terminal portion 14 connected to the magnetic head slider and the first connection terminal portion 14. Connection conductor 1
3a to 13d and a second connection terminal portion 15 located at the other end of the flexure portion 10 and electrically connected to the other end of the connection conductors 13a to 13d. On the other hand, before and after this, the load beam portion 11 having the terminal support portion 11a that partially projects laterally is formed. As shown in FIG. 4, a slit 17 is formed along the bending line 19 at the portion of the bending line 19 between the load beam portion 11 and the terminal supporting portion 11a. Further, the base plate portion 12 having a predetermined shape is also prepared. Note that, as described above, the base portion of the load beam portion 11 may be configured as the base plate portion without separately providing the base plate portion.

Next, the flexure portion 10 and the base plate portion 12 are fixed onto the load beam portion 11 by spot welding at several points by laser welding or the like. In this case, the other end portion of the load beam portion 11 is spot-welded onto the terminal supporting portion 11a so that the second connection terminal portion 15 is fixed onto the terminal supporting portion 11a. After that, the second connection terminal portion 15 is directed to the side of the base plate portion 12 at the position of the terminal support portion 11a, and the terminal support portion 11a is formed into a bending line 19 so as to be substantially perpendicular to the surface of the base plate portion 11. Fold along. In this description, the terminal supporting portion 11a is bent at a substantially right angle, but the bending angle may be any value as long as it facilitates the connection work with the external circuit. The terminal support 11
Although the flexure portion 10 can be spot-welded after bending a, the workability is poor in this case because the direction of spot welding needs to be changed.

As described above, since the other end of the flexure portion 10 where the second connection terminal portion 15 is located is fixed to the load beam portion 11, the terminal support portion 11a is bent. The workability is good, and the bending angle can be freely set. Further, since the slit 17 is provided in a part along the bending line 19, excessive stress is not applied to the thin film pattern such as the connecting conductor when the bending is performed. The electrical characteristics do not deteriorate, and the bending work becomes easy.

As shown in FIG. 5, it is possible to bend the terminal support portion 11a of the load beam portion 11 and the flexure portion 10 at the same time after the flexure portion 10 is adhered and fixed on the load beam portion 11, but this method is also possible. According to this, the flexure portion 10 is bent at a steep angle. For this reason, the strain of the insulating layer or the conductor layer forming the wiring pattern of the connecting conductor or the like becomes large, and the microscopic destruction of the film or the crack of the conductor occurs. The characteristics are likely to deteriorate. However, as in the present embodiment, the flexure portion 10 and the load beam portion 11 are fixed to each other in a spot manner, only the terminal support portion 11a is bent at an arbitrary angle, and further, it is freely movable with respect to the load beam portion 12. The free moving part 10b is replaced with the flexure part 10
If it is provided in the vicinity of the other end of the terminal support portion 1,
Even when 1a is bent, an excessive stress is not applied to the thin film pattern such as the connecting conductor, so that the deterioration of electrical characteristics can be prevented.

As described above, in the present embodiment, the second connection terminal portion 15 formed by the thin film pattern provided on the flexure portion 10 is connected to the terminal support portion 11a projecting to the side of the base plate portion 12 on the other side of the flexure portion 10. By fixing the end portion, the terminal support portion 11a is located. As a result, the second connection terminal portion 15 has an FPC whose one end is connected to an external circuit such as an electronic circuit for recording / reproducing signals.
The connection cable can be directly connected to the other end without interposing a wire. As a result, the flying characteristics of the magnetic head slider, particularly the movement in the roll direction, are not affected by the input / output signal line, and the electrical resistance of the input / output signal line can be reduced. Further, since no wire is used at all, disconnection does not occur at the time of connection work with an external circuit, and it is possible to prevent deterioration in yield.

Further, the second connection terminal portion 15 is fixed to the terminal support portion 11a which is bent at an arbitrary angle with the surface of the base plate portion 12 so as to face the side of the base plate portion 12. Therefore, the connection terminal 1
5a to 15d are also directed to the side, and the connection work with the FPC for connecting with an external circuit becomes very easy. Moreover, since the positions of the connection terminals 15a to 15d are determined, automation is possible and the manufacturing cost associated with the connection can be reduced. Furthermore, since the flexure portion 10 is attached over substantially the entire length of the load beam portion 11, it is possible to expect an increase in the damper effect.

FIG. 6 is a plan view showing a suspension device according to another embodiment of the present invention.

In the figure, 110 is a tongue portion 110 provided with a magnetic head slider (not shown) at one end.
a flexible flexure portion for carrying by a, 111 a load beam portion for supporting and fixing the flexure portion 110,
Reference numerals 112 respectively denote base plate portions fixed to the base portion of the load beam portion 111.

The load beam portion 111 projects laterally from the base plate portion 112 and the base plate portion 11
2 is a terminal supporting portion 111 bent almost at right angles to the surface
a. However, in FIG.
a is shown in a state before being folded. A second connection terminal portion (115) described later is provided on the terminal support portion 111a.
The other end of the flexure portion 110 where is positioned is fixed. In the present embodiment, the terminal support portion 11
Although 1a is bent at a substantially right angle, this bending angle may be any value as long as it is an angle that facilitates connection work with an external circuit. A smaller bending angle is more convenient because the length of the terminal supporting portion 111a protruding downward becomes shorter.

In this embodiment, the flexure portion 110 is made of a stainless steel plate (for example, SUS3) having a thickness of about 25 μm.
04TA). FIG. 7 shows the configuration of only the flexure section 110 in detail. As is clear from the figure, four connection conductors 113a to 113d in the form of a thin film pattern are formed on the flexure section 110 as input / output signal lines over the entire length thereof. Further, on one end of the flexure portion 110, the first connection terminal portion 11 including four connection terminals 114a to 114d directly connected to the magnetic head slider is formed.
4 is also provided by a thin film pattern, and at the other end thereof, connecting terminals 115a to 115a which are directly connected to a connecting cable by an FPC (not shown) for connecting to an external circuit.
The second connection terminal portion 115 made of 115d is also provided in a thin film pattern. These connection terminals 114a-
114d and the connection terminals 115a to 115d are electrically connected to each other by connection conductors 113a to 113d.

The thin film pattern is formed by the same known patterning method as that for forming a printed circuit board on a thin metal plate. That is, although not shown, a polyimide layer (lower insulating layer) having a thickness of about 5 μm and a patterned thickness of about 4 μm
m copper layer (conductor layer) and a polyimide layer (upper insulating layer) having a thickness of about 5 μm are laminated on the flexure portion 10 in this order. However, in the portions of the connection terminals 114a to 114d and the connection terminals 115a to 115d, the nickel layer and the gold layer are laminated and formed on the copper layer, and the upper insulating layer is not formed thereon. In addition, in FIG. 6 and FIG. 7, in order to facilitate understanding, the connection conductor 113a is shown.
.About.113d is represented by a solid line.

The load beam section 111 has a size of about 62 to 76 μm.
The flexure portion 110 is fixedly supported at several places. As described above, the load beam portion 111 includes the base plate portion 112.
Is provided with a terminal support portion 111a which projects laterally and is bent substantially at a right angle to the surface of the base plate portion 112. On the terminal support portion 111a, the flexure portion 111 is arranged so that the second connection terminal portion 115 faces the side of the base plate portion 112 at the position of the terminal support portion 111a.
The other end of is fixed.

Flexure section 110 and load beam section 1
11 is fixed to a plurality of welding points 11 by laser welding or the like.
Made in 6. The other end of the flexure portion 110 and the terminal support portion 111a are also fixed to each other at a welding point 116 by laser welding or the like. In this way, the flexure portion 110 and the load beam portion 111 are fixed to each other in a spot manner, so that the flexure portion 110 is not fixed to the load beam portion 111 but is free to move freely.
b is provided near the other end. Accordingly, even when the flexure portion 110 is attached to the load beam portion 111, the free moving portion 110b in the middle of the flexure portion 110 can freely move with respect to the load beam portion 111, so that excessive stress is applied to the thin film pattern such as the connection conductor. Absent.

Free-moving portion 110 of flexure portion 110
In the present embodiment, b is provided with a curved play 110c as a countermeasure against twisting. By providing such play 110c, the degree of freedom of the free-moving portion 110b is further increased, and even if a part of the flexure portion 110 is twisted at the time of bending, an excessive stress is almost applied to the thin film pattern such as the connecting conductor thereon. Absent. Therefore, it is very effective in preventing deterioration of electrical characteristics.

Although not clearly shown in FIG. 6, a slit is formed along the bending line of the terminal supporting portion 111a, which is bent to project laterally from the load beam portion 111. Has been done.

The base plate portion 112 is made of stainless steel or iron, and is fixed to the base portion of the load beam portion 111 at welding points 118. The base portion of the load beam portion 111 may be configured as the base plate portion without separately providing the base plate portion.

The structure of the suspension device according to the present embodiment is such that the flexure portion 110 has a curved play 110c.
It is the same as the case of the embodiment of FIG. 1 except that is provided. Also, the effect of this embodiment is that by providing this curved play 110c, even if a part of the flexure portion 110 is twisted during bending, an excessive stress is not applied to the thin film pattern such as the connection conductor thereon. The function and effect are the same as those of the embodiment of FIG. 1 except that the deterioration of the electrical characteristics can be prevented more reliably.

The embodiments described above all show the present invention by way of example and not by way of limitation, and the present invention can be embodied in various other modified and modified forms. Therefore, the scope of the present invention is defined only by the claims and their equivalents.

[0053]

As described above in detail, according to the present invention, the load beam portion has the terminal supporting portion projecting to the side of the base portion and bent at an arbitrary angle with the surface of the base portion. The flexure portion has a first connection terminal portion located at one end of the flexure portion and electrically connected to the magnetic head slider, and a first connection terminal portion located at the other end of the flexure portion. A second connecting terminal portion and a connecting conductor whose both ends are respectively connected to the first and second connecting terminal portions are formed as a thin film pattern, and the second connecting terminal portion is located at the position of the terminal supporting portion. Since the other end of the flexure portion is fixed on the terminal support portion so as to face the side of the base portion of the load beam portion,
The connection terminal portion of can be directly connected without interposing a wire at the other end of the connection cable of the FPC having one end connected to an external circuit such as an electronic circuit for recording / reproducing signals. As a result, the flying characteristics of the magnetic head slider, particularly the movement in the roll direction, are not affected by the input / output signal line, and the electrical resistance of the input / output signal line can be reduced. In particular, this effect is remarkable in a small magnetic head slider. Further, when the number of signal terminals of the magnetic head slider is large, the number of input / output signal lines is also large, so that this effect is more significant. Further, since no wire is used at all, disconnection does not occur at the time of connection work with an external circuit, and it is possible to prevent deterioration in yield.

Further, the second connection terminal portion is fixed to the terminal support portion bent at an arbitrary angle with the surface of the base portion of the load beam portion so that the second connection terminal portion faces the side of the base portion of the load beam portion. Therefore, the connection terminal also faces the side, and the connection work with the FPC for connecting to the external circuit becomes very easy. Moreover, since the positions of the connection terminals are determined, automation is possible and the manufacturing cost associated with the connection can be reduced. Furthermore, since the flexure portion is attached over almost the entire length of the load beam portion, an increase in the damper effect can be expected. Also,
Since the spot welding is performed from the same direction including the welding points other than the terminal supporting portion before the terminal supporting portion is bent, the productivity is improved as compared with the case where the terminal supporting portion is bent and then the direction is changed.

[Brief description of the drawings]

FIG. 1 is a plan view showing a configuration of a suspension device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a plan view showing in detail a configuration of a flexure portion in the embodiment of FIG.

FIG. 4 is a plan view showing a structure of a terminal support portion of a load beam unit in the suspension apparatus of FIG.

FIG. 5 is a perspective view showing a structural example of a bent portion of the load beam portion.

FIG. 6 is a plan view showing a configuration of a suspension device according to another embodiment of the present invention.

FIG. 7 is a plan view showing in detail the configuration of the flexure portion in the embodiment of FIG.

[Explanation of symbols]

10, 110 Flexure part 10b, 110b Free-moving part 11, 111 Load beam part 11a, 111a Terminal support part 12, 112 Base plate part 13a-13d, 113a-113d Connection conductor 14 First connection terminal part 15 Second connection terminal Parts 14a to 14d, 15a to 15d, 114a to 114
d, 115a to 115d Connection terminal 16, 18, 116, 118 Welding point 17 Slit 110c Play

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Haruyuki Morita 1-13-1, Nihonbashi, Chuo-ku, Tokyo TDC Corporation (72) Inventor Akihiro Takei 4056 Sakuradai, Nakatsu, Aikawa-cho, Aiko-gun, Kanagawa Prefecture Incorporated (72) Inventor Ichiro Kodera 4056 Sakuradai, Nakatsu, Aikawa-cho, Aiko-gun, Kanagawa Japan

Claims (7)

[Claims] 1. A suspension device including a flexible flexure portion for carrying a magnetic head slider near one end portion, and a load beam portion supporting the flexure portion, wherein the load beam portion is the load. The beam portion has a terminal supporting portion that projects to the side of the base portion and is bent at an arbitrary angle with the surface of the base portion of the load beam portion, and the flexure portion has one end of the flexure portion. A first connection terminal portion located at a position electrically connected to the magnetic head slider, and a second connection terminal portion located at the other end of the flexure portion,
Connection conductors whose both ends are respectively connected to the first and second connection terminal portions are formed as a thin film pattern, and the second connection terminal portion is located at the position of the terminal support portion and the base portion of the load beam portion. The suspension device, wherein the other end of the flexure portion is fixed on the terminal support portion so as to face laterally. 2. The apparatus according to claim 1, wherein the flexure portion has a free moving portion that is freely movable with respect to the load beam portion near the other end portion. 3. The apparatus according to claim 2, wherein the flexure portion has a twisting play in the free moving portion. 4. The device according to claim 1, wherein the terminal support portion is bent substantially at a right angle to the surface of the base portion of the load beam portion. 5. The apparatus according to claim 1, wherein the load beam portion has a slit at a position where the terminal support portion should be bent. 6. A first connection terminal portion located at one end of the flexure portion and electrically connected to the magnetic head slider, and a second connection terminal portion located at the other end of the flexure portion. Forming a flexible flexure portion having a connection terminal portion and a connection conductor whose both ends are respectively connected to the first and second connection terminal portions as a thin film pattern; and projecting to the side Forming a load beam part having a terminal supporting part, and forming the load beam part on the terminal supporting part.
Fixing the flexure portion on the load beam portion so that the connection terminal portion is fixed, and after the flexure portion is fixed on the load beam portion, the second connection terminal portion supports the terminal support. And a step of bending the terminal support part at an arbitrary angle with the surface of the base part of the load beam part so that the terminal support part faces the side of the base part of the load beam part. Manufacturing method. 7. The step of forming the load beam part comprises:
The manufacturing method according to claim 6, further comprising forming a slit at a position where the terminal supporting portion protruding laterally should be bent.