JPH09126975A - Method for testing push-in hardness - Google Patents
Method for testing push-in hardnessInfo
- Publication number
- JPH09126975A JPH09126975A JP28863096A JP28863096A JPH09126975A JP H09126975 A JPH09126975 A JP H09126975A JP 28863096 A JP28863096 A JP 28863096A JP 28863096 A JP28863096 A JP 28863096A JP H09126975 A JPH09126975 A JP H09126975A
- Authority
- JP
- Japan
- Prior art keywords
- hardness
- sample
- indenter
- depth
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧子に試験荷重を負荷
し、その時の圧子の試料表面への押込深さから試料の硬
さを求める押込硬さ試験方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an indentation hardness test method in which a test load is applied to an indenter and the hardness of the sample is determined from the depth of indentation of the indenter into the sample surface.
【０００２】[0002]
【従来の技術】従来の押込硬さ試験方法は、あらかじめ
設定されている荷重を圧子に負荷して試料表面に押し込
み、その時の押込深さを求めて試料硬度を算出してい
る。2. Description of the Related Art In the conventional indentation hardness test method, a preset load is applied to an indenter to indent the sample surface, and the indentation depth at that time is calculated to calculate the sample hardness.
【０００３】[0003]
【発明が解決しようとする問題点】従来の試験方法のよ
うに一定荷重における圧子の押込深さを求める場合は、
試料の硬度によって押込深さが変化する。例えば図２の
特性図に示すように、試料Ａは荷重Ｐ2 で押込深さがＤ
1 、試料Ｂは同じ荷重Ｐ2 で押込深さがＤ2 となること
を示す。この押込深さが試料によって異なる様子を図３
(a),(b) に示すが、試料Ａ及びＢの膜厚が同じ厚さｈの
場合、同図(b) に示すようにＤ2 ／ｈが１に近いため試
料Ｂの測定においては基盤Ｅの影響を大きく受けること
になる。特に薄膜試料の場合には、膜厚に対する押込深
さの割合が変化し、この基盤Ｅの影響が無視できないほ
ど大きくなるので、試料の硬度比較を正確に行なえない
という問題を生じていた。[Problems to be Solved by the Invention] When the indentation depth of a indenter under a constant load is obtained as in the conventional test method,
The indentation depth changes depending on the hardness of the sample. For example, as shown in the characteristic diagram of FIG. 2, the sample A has a load P 2 and an indentation depth D.
1 , Sample B shows that the indentation depth becomes D 2 under the same load P 2 . Fig. 3 shows how this indentation depth differs depending on the sample.
As shown in (a) and (b), when the samples A and B have the same film thickness h, D 2 / h is close to 1 as shown in FIG. It will be greatly affected by the foundation E. In particular, in the case of a thin film sample, the ratio of the indentation depth to the film thickness changes, and the influence of this substrate E becomes so large that it cannot be ignored. Therefore, there is a problem that the hardness comparison of the samples cannot be performed accurately.
【０００４】そこで本発明は、薄膜試料等の硬度を測定
し硬度比較を行なうについて、正確な評価等を行なうこ
とができる押込硬さ試験方法を提供することを目的とす
る。Therefore, an object of the present invention is to provide an indentation hardness test method capable of performing accurate evaluation and the like in measuring the hardness of thin film samples or the like and comparing the hardness.
【０００５】[0005]
【問題点を解決するための手段】本発明は上記問題点を
解決するために、次のような構成を採用した。In order to solve the above problems, the present invention adopts the following configuration.
【０００６】すなわち、本発明にかかる押込硬さ試験方
法は、圧子に加えられる試験荷重と、該試験荷重によっ
て試料表面に押込まれる圧子の押込み深さとから試料の
硬度を求める押込硬さ試験方法において、圧子の試料表
面からの押込深さを、試料を載置した基盤の影響が少な
い深さにあらかじめ設定しておき、圧子が当該設定押込
深さに到達した時に圧子に加えられている試験荷重を測
定し、この測定された試験荷重とあらかじめ設定された
押込深さとから試料の硬度を求めることを特徴とする。That is, the indentation hardness test method according to the present invention is the indentation hardness test method for obtaining the hardness of a sample from the test load applied to the indenter and the indentation depth of the indenter pushed into the sample surface by the test load. In, the indentation depth from the sample surface is set in advance to a depth that is less affected by the substrate on which the sample is placed, and the test is applied to the indenter when the indenter reaches the set indentation depth. The load is measured, and the hardness of the sample is obtained from the measured test load and the preset indentation depth.
【０００７】[0007]
【発明の実施の形態】本発明に係る試験方法は、例えば
図３(a) に示すように基盤Ｅの影響が少ない押込深さＤ
1 をあらかじめ設定押込深さとして設定しておき、次い
で電子天秤等の負荷手段によって圧子に荷重を加え、順
次荷重を増加させていく。圧子が試料に接触した時点か
らの圧子の変位を検出し、該変位が設定押込深さに到達
した時点の試験荷重を測定する。この場合、設定押込深
さ到達後荷重の保持時間を設定すると、変位の増加を生
じる場合が多いので、押込深さが設定値になった瞬間の
荷重を測定して動的硬度とする。BEST MODE FOR CARRYING OUT THE INVENTION The test method according to the present invention is, for example, as shown in FIG.
1 is set in advance as the preset indentation depth, and then a load is applied to the indenter by a load means such as an electronic balance to sequentially increase the load. The displacement of the indenter from the time when the indenter contacts the sample is detected, and the test load at the time when the displacement reaches the set indentation depth is measured. In this case, if the holding time of the load after reaching the set indentation depth is set, the displacement often increases, so the load at the moment when the indentation depth reaches the set value is measured and taken as the dynamic hardness.
【０００８】測定された荷重をＰ、設定押込深さをＤ、
圧子形状による係数をＫとすれば、硬度Ｈは、Ｈ＝Ｋ・
Ｐ／Ｄ2 として算出される。The measured load is P, the set indentation depth is D,
If the coefficient due to the shape of the indenter is K, the hardness H is H = K.
Calculated as P / D 2 .
【０００９】荷重負荷後の圧子の変位増加を考慮してよ
り正確な測定を行なうには、図１に示すように設定押込
深さＤ1 に到達する前の深さＤ0 の時点から荷重増加速
度を減少させるようにし、Ｄ1 に到達する時間ｔ2 とＤ
0 に到達する時間ｔ1 に対しｔ2 −ｔ1 ＝ｔ3 の間に押
込深さがＤ1 になる様に荷重を増加させていき、ｔ3時
間経過時点の押込深さと荷重を測定すればよい。すなわ
ち、Ｄ1 とＤ0 ／Ｄ1とｔ3 を設定して試験を行なう。In order to perform a more accurate measurement in consideration of the displacement increase of the indenter after the load is applied, as shown in FIG. 1, the load is increased from the time of the depth D 0 before the set indentation depth D 1 is reached. The speed is reduced so that the time t 2 to reach D 1 and D
The load is increased so that the indentation depth becomes D 1 during t 2 −t 1 = t 3 with respect to the time t 1 at which 0 is reached, and the indentation depth and the load at the time point t 3 can be measured. Good. That is, the test is conducted by setting D 1 and D 0 / D 1 and t 3 .
【００１０】上記したように、本発明においては試料に
加える変形（押込深さ）が等しくなるように荷重を加
え、該荷重の相違によって硬度を比較するので、試料を
載置した基盤の影響を等しくすることができ、正確に硬
度比較を行なうことができる。As described above, in the present invention, a load is applied so that the deformation (indentation depth) applied to the sample becomes equal, and the hardness is compared by the difference in the load, so the influence of the substrate on which the sample is placed is affected. They can be made equal, and hardness comparison can be performed accurately.
【００１１】[0011]
【発明の効果】上記説明から明らかなように、本発明に
かかる押込硬さ試験方法によれば、試料を載置した基盤
からの影響を等しくして試料の硬度測定を行なうことが
できるようになった。特に薄膜試料の場合でも硬度比較
を正確に行なうことができるようになった。As is apparent from the above description, according to the indentation hardness test method of the present invention, it is possible to measure the hardness of a sample while making the influence of the substrate on which the sample is placed equal. became. In particular, even in the case of a thin film sample, the hardness comparison can be accurately performed.
【図１】本発明の実施例において圧子変位の増加を考慮
して試験を行なう場合の設定要素を説明する図である。FIG. 1 is a diagram illustrating setting elements when a test is performed in consideration of an increase in displacement of an indenter in an example of the present invention.
【図２】試料に応じた荷重と押込深さの関係を示す図で
ある。FIG. 2 is a diagram showing a relationship between a load and an indentation depth according to a sample.
【図３】試験荷重を一定とした場合、試料に応じて圧子
の押込深さが変わることを示す図である。FIG. 3 is a diagram showing that the indentation depth of the indenter changes depending on the sample when the test load is constant.
Ａ，Ｂ…試料 Ｄ1 、Ｄ2 …押込深さ Ｅ… 基盤 ｈ… 試料の厚みA, B ... sample D 1, D 2 ... indentation depth E ... foundation h ... Thickness of the sample
Claims (1)
重によって試料表面に押込まれる圧子の押込み深さとか
ら試料の硬度を求める押込硬さ試験方法において、圧子
の試料表面からの押込深さを、試料を載置した基盤の影
響が少ない深さにあらかじめ設定しておき、圧子が当該
設定押込深さに到達した時に圧子に加えられている試験
荷重を測定し、この測定された試験荷重とあらかじめ設
定された押込深さとから試料の硬度を求めることを特徴
とする押込硬さ試験方法。1. An indentation depth from a sample surface of an indenter in an indentation hardness test method for determining a hardness of a sample from a test load applied to the indenter and an indentation depth of the indenter pushed into the sample surface by the test load. Is set in advance to a depth at which the influence of the substrate on which the sample is placed is small, the test load applied to the indenter when the indenter reaches the set indentation depth is measured, and the measured test load An indentation hardness test method, characterized in that the hardness of a sample is obtained from the indentation depth and a preset indentation depth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8288630A JP3014087B2 (en) | 1996-10-30 | 1996-10-30 | Indentation hardness tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8288630A JP3014087B2 (en) | 1996-10-30 | 1996-10-30 | Indentation hardness tester |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62078155A Division JPH07104245B2 (en) | 1987-03-30 | 1987-03-30 | Indentation hardness test method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09126975A true JPH09126975A (en) | 1997-05-16 |
| JP3014087B2 JP3014087B2 (en) | 2000-02-28 |
Family
ID=17732670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8288630A Expired - Lifetime JP3014087B2 (en) | 1996-10-30 | 1996-10-30 | Indentation hardness tester |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3014087B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232657A (en) * | 2007-03-16 | 2008-10-02 | Mitsutoyo Corp | Hardness testing machine |
| JP2014020943A (en) * | 2012-07-19 | 2014-02-03 | Shimadzu Corp | Hardness tester |
-
1996
- 1996-10-30 JP JP8288630A patent/JP3014087B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232657A (en) * | 2007-03-16 | 2008-10-02 | Mitsutoyo Corp | Hardness testing machine |
| JP2014020943A (en) * | 2012-07-19 | 2014-02-03 | Shimadzu Corp | Hardness tester |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3014087B2 (en) | 2000-02-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071217 Year of fee payment: 8 |