JPH09113934A - Liquid crystal display device and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal display device of a reflection type with which the embodiment of high image quality is made possible by increasing the flatness of a reflection surface. SOLUTION: The one surface of a substrate 2 has the specified shapes consisting of recessed parts and projecting parts enclosing the recessed parts longitudinally and transversely respectively at specified pitches. Pixel electrodes 3 consisting of metallic films are formed on the recessed parts and the switching elements 4 are formed on the projecting parts. The switching elements 4 of the respective longitudinal and transverse columns and rows are wired and connected by wirings 9 to the longitudinal and transverse driving lines in proximity thereto. The switching elements 4 on the projecting parts having the specified shapes and the pixel electrodes 3 on the recessed parts are wired and connected by the wirings 9 and transparent electrodes 18 are formed via a liquid crystal layer 17 on the other one surface side of the substrate 2. A substrate for supporting 15 is mounted via a tacky adhesive material 14 on the switching elements 4 and the pixel electrodes 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and a manufacturing method thereof, and more particularly to a reflection type liquid crystal display device capable of realizing high image quality by increasing a flatness of a reflecting surface and a manufacturing method thereof. .

[0002]

2. Description of the Related Art A liquid crystal display device has been developed as a display device to replace a cathode ray tube. FIG. 1 shows a planar configuration example of a liquid crystal display device. Although the number of pixels is 4 × 4 here, the number of pixels may be increased as needed. One pixel is composed of one pixel electrode 3 and one switching element 4. The switching element 4 is usually made of FET.
Considering the yield of FETs, one pixel has one pixel electrode 3
And a plurality of switching elements 4.

Vertical and horizontal drive lines 7 and 8 are connected to the vertical drive unit 5 and the horizontal drive unit 6, respectively, and a specific switching element 4 operates in synchronization with a clock signal supplied to the drive lines 7 and 8. It is driven and a voltage is applied to the pixel electrode 3. For example, the vertical drive unit 5 and the horizontal drive unit 6 are each configured by a hold circuit and a scanning circuit, and the vertical and horizontal drive lines 7 and 8 are configured by a drain bus and a gate bus, respectively.

The pixel electrode and the transparent electrode sandwich a liquid crystal layer, and a voltage between the pixel electrode and the transparent electrode changes the state of the liquid crystal to realize a liquid crystal display.

The liquid crystal display device is classified into a direct view type and a projection type. Among them, the projection type includes a reflection type and a transmission type. Compared with the transmission type, the reflection type liquid crystal display device has an advantage that light utilization efficiency is high and brightness can be increased. In the reflection type liquid crystal display device, the flatness of the reflecting surface is directly linked to the image quality, and therefore it is necessary to increase the flatness of the reflecting surface in order to obtain high image quality.

Conventionally, one of the reasons why the flatness of the reflecting surface and the image quality are not always sufficient is that the switching element and the pixel electrode are formed on the same side of the substrate, and the liquid crystal layer and the transparent electrode are formed thereon. What you have done. In order to solve the problem, a switching element and a pixel electrode are formed on different sides of the substrate, and the switching element and the pixel electrode are electrically connected by a via hole opened in the substrate, and the liquid crystal is superposed on the pixel electrode. A liquid crystal display device having a layer and a transparent electrode is conceivable.

FIG. 2 shows a cross-sectional structural view of this liquid crystal display device. Here, for simplification, one pixel is shown. The substrate 2 is an insulating glass substrate, and the switching element 4 is T
FT (Thin-Film Transistor). The material of the pixel electrode 3 is aluminum, and the surface of the pixel electrode 3 also serves as a reflecting surface.

In the liquid crystal display device shown in FIG. 2, the switching element 4 and the drive line (not shown) are provided on one side of the substrate 2, and the pixel electrode 3 is provided on the other side of the substrate 2.
The switching element 4 is connected to the switching element 4 through a via hole 20 formed in the substrate 2. On the switching element 4, there is a supporting substrate 15 sandwiching the adhesive substance 14. The adhesive substance 14 is insulative, but if electrically conductive, an insulating film may be interposed between the switching element 4 or the drive line and the adhesive substance 14. The same applies when it is desired to protect the switching element 4 and the drive line.

Since the substrate 2 is polished and thinned, the supporting substrate 15 supports the liquid crystal display device. A liquid crystal layer 17 is interposed between the pixel electrode 3 and the transparent electrode 18. The light is on the other side of the substrate 2 (the lower side of FIG. 2)
Then, it is reflected by the surface of the pixel electrode 3 which also serves as a reflecting surface.

A method of manufacturing the liquid crystal display device of FIG. 2 will be described with reference to FIGS.

Step 1: The switching elements 4 are formed vertically and horizontally on one surface of the substrate 2 at a constant pitch (see FIG. 3).
(A)). Step 2: drive lines (not shown) are formed on one surface of the substrate 2 vertically and horizontally at the above-mentioned constant pitch, and land patterns 9a are formed in the vicinity of the switching elements 4, and vertical and horizontal columns and rows of switching elements are formed. 4 is connected to the vertical and horizontal drive lines close to these switching elements 4 by wiring 9, and the switching element 4 and the land pattern 9a in the vicinity thereof are connected by wiring 9 (FIG. 3A). Step 3: The supporting substrate 15 is mounted on the switching element 4, the drive line, and the land pattern 9a formed on the substrate 2 via the adhesive substance 14 (FIG. 3).
(B)). Step 4: The other surface of the substrate 2 is polished to reduce the thickness of the substrate 2 (FIG. 3C). Step 5: A via hole 20 reaching the land pattern 9a is formed on the other surface of the substrate 2 (FIG. 3D). Step 6: A metal film 3a is formed on the entire area of the other surface of the substrate 2, and the film 3a and the land pattern 9a are connected (FIGS. 3D and 4A). Step 7: The film 3a is associated with each switching element 4 and separated to form the pixel electrode 3 (FIG. 4B). Step 8: A liquid crystal layer 17 covering this one surface and a transparent electrode 18 covering this liquid crystal layer 17 are formed on the other one surface side of the substrate 2 (FIG. 4C).

When the substrate 2 is composed of a semiconductor substrate such as a silicon substrate, the substrate 2 and the pixel electrode 3 are formed as shown in FIG.
It is necessary to form the insulating film 12 between them. The switching element 4 may be directly formed on this semiconductor substrate.

When the surface of the pixel electrode 3 is not used as a reflection surface, a reflection layer 16 such as a dielectric multilayer film is used as shown in FIG.
Is preferably interposed between the pixel electrode 3 and the liquid crystal layer 17.

[0014]

However, in the manufacturing method shown in FIG. 3 and FIG. 4, there are cases where the reflecting surface composed of the surface of the pixel electrode 3 and the surface of the reflecting layer 16 cannot achieve sufficient flatness. . As can be seen from FIG. 2, a gap is formed between the pixel electrodes 3 formed separately. This is because the flatness around the gap is deteriorated to cause light scattering, or the local potential difference between the pixel electrodes 3 changes the state of the liquid crystal in the gap to cause alignment disorder, which deteriorates the image quality. .

Further, a recess is formed in the portion of the surface of the pixel electrode 3 which is filled with the via hole 20, and the flatness is deteriorated also in this portion, light scattering occurs, and the image quality is deteriorated.

As described above, it is desired to develop a liquid crystal display device and a manufacturing method thereof in which the flatness of the surface of the pixel electrode which also serves as a reflecting surface does not deteriorate when the pixel electrode is formed on the back surface of the substrate. Further, it is desired to develop a liquid crystal display device and a method for manufacturing the liquid crystal display device in which the liquid crystal is not positioned in the gap between the pixel electrodes.

The present invention has been made in order to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide a reflection type liquid crystal display device in which a pixel electrode is formed on the back surface of a substrate. It is an object of the present invention to provide a liquid crystal display device and a manufacturing method thereof in which the flatness of the surface of the pixel electrode which also serves as a surface is high and the manufacturing process is reduced. Another object of the present invention is to provide another liquid crystal display device having a highly flat reflective surface and a method for manufacturing the same.

[0018]

According to another aspect of the present invention, there is provided a liquid crystal display device comprising: a substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch vertically and horizontally. A pixel electrode of a metal film that covers the concave portion and is formed on the concave portion in each of the constant shapes; a switching element that is formed on the convex portion in the constant shape and that is connected to the pixel electrode by wiring; The vertical and horizontal drive lines, which are close to the switching elements of each column and each row, are connected to these switching elements by wiring, and the one surface of the substrate opposite to the one surface of the substrate provided with the concave portions and the convex portions, the polished one surface of A liquid crystal layer for covering, a transparent electrode for covering the liquid crystal layer, and a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive substance. .

Since a pixel electrode made of a metal film is formed in a concave portion having a certain depth on one surface of the substrate and the surface of the pixel electrode in contact with the surface of the concave portion constitutes the reflecting surface, a flat reflecting surface is formed. Obtainable.

According to another aspect of the liquid crystal display device of the present invention, the substrate is provided with a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in the vertical and horizontal directions. A pixel electrode made of a metal film that covers the concave portion, formed for each shape, and formed for each fixed shape on the convex portion,
A substrate provided with a switching element wiring-connected to the pixel electrode, vertical and horizontal drive lines wiring-connected to the switching elements adjacent to the vertical and horizontal columns and rows, and wiring lines connected to these switching elements. Liquid crystal layer that covers the one surface that is flush with the lower surface of the pixel electrode, that is, the transparent electrode that covers the liquid crystal layer, and the adhesive material on the switching element and the pixel electrode that are formed on the substrate. And a supporting substrate attached via the.

Since the back surface of the surface of the substrate having the switching element constitutes the same plane as the lower surface of the pixel electrode, and the lower surface of this pixel electrode constitutes the reflective surface, a flat reflective surface can be obtained.

On the back side, a transparent electrode is formed via a liquid crystal layer covering the same plane, and a voltage between the pixel electrode and the transparent electrode is applied to the liquid crystal layer as it is. The voltage between both electrodes that changes the state of the liquid crystal can be lowered and the efficiency of changing the state of the liquid crystal can be increased as compared with the case where other layers are provided.

A method of manufacturing a liquid crystal display device according to a third aspect is characterized by performing the following steps. Step 1: Switching elements are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: Recesses having a constant depth are formed on one surface of the substrate in the vertical and horizontal directions at the constant pitch while avoiding the position of the switching element. Step 3: A metal film is formed on the entire surface of one side of the substrate. Step 4: The film is separated for each recess to form a pixel electrode covering the recess. Step 5: Driving lines are formed vertically and horizontally on the convex portion surrounding the concave portion at the above-mentioned constant pitch, and switching elements in each vertical and horizontal column and each row are connected to vertical and horizontal driving lines in proximity to these switching elements. The switching element and one pixel electrode adjacent to the switching element are connected by wiring. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode. Step 8: A liquid crystal layer that covers this one surface and a transparent electrode that covers this liquid crystal layer are formed on the other one surface side of the substrate.

When each pixel electrode is exposed, the polishing surface formed by polishing the other surface of the substrate forms the same plane as the surface of the pixel electrode, and the surface of this pixel electrode forms the reflecting surface. Therefore, a flat reflecting surface can be obtained. If each pixel electrode is not exposed, a pixel electrode made of a metal film is formed in a recess of a certain depth on one surface of the substrate, and the surface of the pixel electrode in contact with the surface of the recess forms a reflective surface. A flat reflecting surface can be obtained.

The other surface of the substrate is polished to reduce the thickness of the recess of the substrate or expose each pixel electrode, and a liquid crystal layer covering this one surface and a transparent electrode covering this liquid crystal layer are formed. Since the voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the recess and the liquid crystal layer, or to the liquid crystal layer as it is, the state of the liquid crystal is better than that in the case where one side is not polished. It is possible to reduce the voltage between both electrodes that changes the liquid crystal, and it is possible to increase the efficiency that changes the state of the liquid crystal.

A method of manufacturing a liquid crystal display device according to a fourth aspect is characterized by performing the following steps. Step 1: Recesses having a constant depth are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: A metal film is formed on the entire surface of one side of the substrate. Step 3: The film is separated for each recess to form a pixel electrode covering the recess. Step 4: Switching elements are formed vertically and horizontally on the convex portions surrounding the concave portions of the substrate at the constant pitch. Step 5: The drive lines are formed vertically and horizontally on the convex portion at the above-mentioned constant pitch, and the switching elements of each vertical and horizontal column and each row are connected to the vertical and horizontal drive lines close to these switching elements to form the switching elements. A wiring is connected to one pixel electrode adjacent to the switching element. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode. Step 8: A liquid crystal layer that covers this one surface and a transparent electrode that covers this liquid crystal layer are formed on the other one surface side of the substrate.

When each pixel electrode is exposed, the polishing surface obtained by polishing the other surface of the substrate constitutes the same plane as the surface of the pixel electrode, and the surface of this pixel electrode constitutes the reflecting surface. Therefore, a flat reflecting surface can be obtained. If each pixel electrode is not exposed, a pixel electrode made of a metal film is formed in a recess of a certain depth on one surface of the substrate, and the surface of the pixel electrode in contact with the surface of the recess forms a reflective surface. A flat reflecting surface can be obtained.

Further, the other surface of the substrate is polished to reduce the thickness of the recess of the substrate or expose each pixel electrode, and a liquid crystal layer covering this one surface and a transparent electrode covering this liquid crystal layer are formed. Since the voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the recess and the liquid crystal layer, or to the liquid crystal layer as it is, the state of the liquid crystal is better than that in the case where one side is not polished. It is possible to reduce the voltage between both electrodes that changes the liquid crystal, and it is possible to increase the efficiency that changes the state of the liquid crystal.

In the liquid crystal display device according to a fifth aspect of the present invention, there is provided a substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in each of the vertical and horizontal directions, and the constant number on the concave portion. The pixel electrode of a metal film or the pixel electrode of a semiconductor film doped with an impurity, which is formed for each shape, is connected to the pixel electrode which is formed on the projection for each of the certain shapes, and is connected to the pixel electrode by wiring. Switching elements, vertical and horizontal drive lines, which are adjacent to the switching elements in each vertical and horizontal column and each row, and are connected to these switching elements by wiring, and on the opposite side of one side of the substrate having concave and convex portions, A reflective layer of a dielectric multilayer film that covers the polished one side, a liquid crystal layer that covers the reflective layer, a transparent electrode that covers the liquid crystal layer, and an adhesive substance on the switching element and the pixel electrode formed on the substrate. Fitted through Characterized in that it comprises a and a supporting substrate.

Since the other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film and the reflective surface is constituted by the surface of this reflective layer, a flat reflective surface can be obtained.

According to another aspect of the liquid crystal display device of the present invention, the substrate is provided with a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in each of the vertical and horizontal directions, and the constant portion on the concave portion. A pixel electrode of a metal film or a pixel electrode of a semiconductor film doped with an impurity, which is formed for each shape and covers the recess, and a pixel electrode which is formed on the projection for each of the certain shapes and is connected to the pixel electrode by wiring. Switching elements that are present, and vertical and horizontal drive lines that are connected to these switching elements in the vicinity of the vertical and horizontal columns and the switching elements in each row,
A reflective layer of a dielectric multi-layer film that covers one surface of the substrate, which has the concave portion and the convex portion and that is flush with the lower surface of the pixel electrode, and a liquid crystal layer that covers the reflective layer and the liquid crystal. It is characterized by comprising a transparent electrode covering the layer, and a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive material.

The rear surface of the surface of the substrate having the switching elements forms the same plane as the lower surface of the pixel electrode, and the same plane is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer constitutes the reflective surface. Therefore, a flat reflecting surface can be obtained.

Further, a transparent electrode is formed on the back surface side via a reflection layer covering the same plane and a liquid crystal layer covering the reflection layer, and the voltage between the pixel electrode and the transparent electrode is the same as that of the reflection layer and the liquid crystal. Since it is applied to a layer, the voltage between both electrodes that changes the state of the liquid crystal can be lowered compared to the case where there is a substrate or another layer between the pixel electrode and the transparent electrode, and the efficiency of changing the state of the liquid crystal can be improved. Can be higher.

A method of manufacturing a liquid crystal display device according to a seventh aspect is characterized by performing the following steps. Step 1: Switching elements are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: Recesses having a constant depth are formed on one surface of the substrate in the vertical and horizontal directions at the constant pitch while avoiding the position of the switching element. Step 3: A metal film or a semiconductor film doped with impurities is formed on the entire surface of one side of the substrate. Step 4: The film is separated for each recess to form a pixel electrode covering the recess. Step 5: Driving lines are formed vertically and horizontally on the convex portion surrounding the concave portion at the above-mentioned constant pitch, and switching elements in each vertical and horizontal column and each row are connected to vertical and horizontal driving lines in proximity to these switching elements. The switching element and one pixel electrode adjacent to the switching element are connected by wiring. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode. Step 8: On the other one surface side of the substrate, a reflective layer of a dielectric multilayer film that covers this one surface, a liquid crystal layer that covers this reflective layer, and a transparent electrode that covers this liquid crystal layer are formed.

Since the other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film and the surface of this reflective layer constitutes the reflective surface, a flat reflective surface can be obtained.

Further, the other surface of the substrate is polished to reduce the thickness of the recess of the substrate or expose each pixel electrode, and the reflective layer covering this one surface and the liquid crystal layer covering this reflective layer are formed. A transparent electrode covering the liquid crystal layer is formed, and a voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the concave portion, the reflective layer and the liquid crystal layer, or directly to the reflective layer and the liquid crystal layer. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where one surface is not polished.

A method of manufacturing a liquid crystal display device according to an eighth aspect is characterized by performing the following steps. Step 1: Recesses having a constant depth are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: A metal film or a semiconductor film doped with impurities is formed on the entire surface of one side of the substrate. Step 3: The film is separated for each recess to form a pixel electrode covering the recess. Step 4: Switching elements are formed vertically and horizontally on the convex portions surrounding the concave portions of the substrate at the constant pitch. Step 5: The drive lines are formed vertically and horizontally on the convex portion at the above-mentioned constant pitch, and the switching elements of each vertical and horizontal column and each row are connected to the vertical and horizontal drive lines close to these switching elements to form the switching elements. A wiring is connected to one pixel electrode adjacent to the switching element. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode. Step 8: On the other one surface side of the substrate, a reflective layer of a dielectric multilayer film that covers this one surface, a liquid crystal layer that covers this reflective layer, and a transparent electrode that covers this liquid crystal layer are formed.

The other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer constitutes the reflective surface, so that a flat reflective surface can be obtained.

Further, the other surface of the substrate is polished to reduce the thickness of the concave portion of the substrate or expose each pixel electrode, and the reflective layer covering this one surface and the liquid crystal layer covering this reflective layer are formed. A transparent electrode covering the liquid crystal layer is formed, and a voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the concave portion, the reflective layer and the liquid crystal layer, or directly to the reflective layer and the liquid crystal layer. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where one surface is not polished.

In a liquid crystal display device according to a ninth aspect, a substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in each of the vertical and horizontal directions; Pixel electrodes of an impurity-doped semiconductor film that covers the recesses formed for each shape, switching elements formed for each of the constant shapes at the portions of the film that cover the projections, and each vertical and horizontal column and row Of the dielectric multi-layered film which covers the polished one side opposite to the one side of the substrate provided with the vertical and horizontal drive lines which are wire-connected to these switching elements and which has the concave portion and the convex portion. A reflective layer, a liquid crystal layer covering the reflective layer, a transparent electrode covering the liquid crystal layer, a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive substance, Be equipped with And it features.

Since the other polished surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the reflective surface is constituted by the surface of this reflective layer, a flat reflective surface can be obtained.

Further, a pixel electrode of a semiconductor film that covers the concave portion is formed for each of the above-mentioned constant shapes, and a switching element is formed for each of the above-mentioned constant shapes at the portion that overlaps the convex portion of this film. Since the switching element and the switching element are connected by the same semiconductor film, it is possible to save the trouble of newly connecting them with a conductive material or the like.

In a liquid crystal display device according to a tenth aspect of the present invention, there is provided a substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch vertically and horizontally, and the constant shape of the concave portion. Pixel electrodes of the semiconductor film doped with impurities that cover the concave portions formed in each of the above, switching elements formed in each of the constant shapes in the portion that overlaps the convex portions of this film, and the vertical and horizontal columns and rows One side that is in the same plane as the lower surface of the pixel electrode on the side opposite to the one side of the substrate provided with the vertical and horizontal drive lines that are connected to these switching elements and is connected to these switching elements and the concave and convex portions. And a liquid crystal layer that covers the reflective layer, a transparent electrode that covers the liquid crystal layer, a switching element and a pixel electrode that are formed on the substrate, and are attached via an adhesive substance. For support Characterized in that it comprises a plate, a.

The rear surface of the surface of the substrate having the switching element forms the same plane as the lower surface of the pixel electrode, and the same plane is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer constitutes the reflective surface. Therefore, a flat reflecting surface can be obtained.

Further, a transparent electrode is formed on the back surface side via a reflection layer covering the same plane and a liquid crystal layer covering the reflection layer, and the voltage between the pixel electrode and the transparent electrode is the same as that of the reflection layer and the liquid crystal. Since it is applied to a layer, the voltage between both electrodes that changes the state of the liquid crystal can be lowered compared to the case where there is a substrate or another layer between the pixel electrode and the transparent electrode, and the efficiency of changing the state of the liquid crystal can be improved. Can be higher.

Further, a pixel electrode of a semiconductor film that covers the concave portion is formed for each of the above-mentioned constant shapes, and a switching element is formed for each of the above-mentioned constant shapes at the portion that overlaps the convex portion of this film, and the pixel electrode is formed. Since the switching element and the switching element are connected by the same semiconductor film, it is possible to save the trouble of newly connecting them with a conductive material or the like.

A method of manufacturing a liquid crystal display device according to an eleventh aspect is characterized by performing the following steps. Step 1: Recesses having a constant depth are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: An impurity-doped semiconductor film is formed on the entire surface of one side of the substrate. Step 3: The film is separated for each recess to form a pixel electrode covering the recess. Step 4: A switching element is formed on the convex portion surrounding the concave portion of the substrate on the convex portion of the film. Step 5: The drive lines are formed vertically and horizontally on the convex portion at the above-mentioned constant pitch, and the switching elements in the vertical and horizontal columns and rows are connected to the vertical and horizontal drive lines close to these switching elements. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode. Step 8: On the other one surface side of the substrate, a reflective layer of a dielectric multilayer film that covers this one surface, a liquid crystal layer that covers this reflective layer, and a transparent electrode that covers this liquid crystal layer are formed.

The other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer constitutes the reflective surface, so that a flat reflective surface can be obtained.

Also, the other surface of the substrate is polished to reduce the thickness of the recess of the substrate or expose each pixel electrode, and a reflective layer covering this one surface and a liquid crystal layer covering this reflective layer are formed. A transparent electrode covering the liquid crystal layer is formed, and a voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the concave portion, the reflective layer and the liquid crystal layer, or directly to the reflective layer and the liquid crystal layer. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where one surface is not polished.

Further, a pixel electrode of a semiconductor film that covers the concave portion is formed for each of the constant shapes, and a switching element is formed for each of the constant shapes at a portion of the film that extends over the convex portion of the pixel electrode. Since the switching element and the switching element are connected by the same semiconductor film, it is possible to save the trouble of newly connecting them with a conductive material or the like.

According to a twelfth aspect, in the liquid crystal display device according to the first aspect, the second aspect, the fifth aspect, the sixth aspect, the ninth aspect or the tenth aspect, between the substrate and the supporting substrate,
A first electrode of a metal film or an impurity-doped semiconductor film formed corresponding to each pixel electrode and connected to each pixel electrode, and a transparent electrode formed on this film via an insulating film. And a second electrode of a metal film or a semiconductor film doped with impurities, which is connected to the second electrode.

By connecting the counter electrode consisting of the first electrode and the second electrode in parallel to the pixel electrode and the transparent electrode, the capacitance between the pixel electrode and the transparent electrode can be increased and the voltage of the pixel electrode can be stabilized. .

Further, since the counter electrode is formed by sandwiching the substrate with the liquid crystal layer and the transparent electrode, it is possible to generate the auxiliary capacitance without deteriorating the flatness of the reflecting surface.

According to a thirteenth aspect, in the liquid crystal display device according to the first aspect, the second aspect, the fifth aspect, the sixth aspect, the ninth aspect, or the tenth aspect, the substrate is a glass substrate mixed with impurities. It is characterized by

By mixing impurities into the substrate, the substrate can scatter or block light, so that the light passes through the substrate and reaches the switching element, and the ON / OFF operation of the switching element is unstable. Can be prevented.

The method of manufacturing a liquid crystal display device according to claim 14 is characterized in that the following steps are executed. Step 1: Switching elements are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: drive lines are formed vertically and horizontally on one surface of the substrate at the constant pitch, and land patterns are formed in the vicinity of each switching element, and switching elements in each vertical and horizontal column and each row are brought close to these switching elements. The vertical and horizontal drive lines are connected by wiring, and the switching element and the land pattern in the vicinity thereof are connected by wiring. Step 3: A supporting substrate is mounted on the switching elements, drive lines, and land patterns formed on the substrate via an adhesive material. Step 4: The other surface of the substrate is polished to reduce the thickness of the substrate. Step 5: A recess corresponding to each switching element is formed on the other surface of the substrate, and a via hole reaching the land pattern is formed in the recess or at the edge of the recess. Step 6: A metal film is formed on the entire area of the other surface of the substrate, and the film and the land pattern are connected. Step 7: The other surface of the substrate is polished to expose the other surface of the substrate and the metal film in the recess is separated to form a pixel electrode. Step 8: A liquid crystal layer that covers the polished one surface and a transparent electrode that covers the liquid crystal layer are formed on the other surface of the substrate.

When a metal film is formed on the other surface of the substrate and the film and the land pattern are connected to each other, a depression is formed in the portion of the surface of the film filled with the via hole. By polishing, the film can be separated to form pixel electrodes in each recess, and the surface of the film can be leveled, and the surface of the pixel electrode constitutes the reflective surface, so that a flat reflective surface can be obtained. You can

A liquid crystal layer covering the polished one surface and a transparent electrode covering the liquid crystal layer are formed on the other surface of the substrate, and the voltage between the pixel electrode and the transparent electrode is directly applied to the liquid crystal. The state of the liquid crystal can be changed over the layers.

In the liquid crystal display device and the manufacturing method thereof according to claims 1 to 14, since the substrate is located in the gap between the pixel electrodes and the liquid crystal is not located, there is a local potential difference between the pixel electrodes. It is possible to prevent liquid crystal alignment disorder.

[0060]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on embodiments shown in the drawings. The arrow at the bottom of the drawing indicates the traveling direction of light.

FIG. 7 shows an embodiment of the present invention. Here, the substrate 2 is a glass substrate, and the switching element 4 is a TFT. The material of the pixel electrode 3 is aluminum, and the surface of the pixel electrode 3 also serves as a reflecting surface.

In this liquid crystal display device, the substrate 2 is provided with a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch vertically and horizontally, and on the concave portion for each constant shape. The formed pixel electrode 3 of an aluminum film that covers the concave portion, the switching element 4 that is formed on the convex portion in the above-described fixed shape and is connected to the pixel electrode 3 by the aluminum wiring 9, and the vertical and horizontal directions. A substrate provided with vertical and horizontal drive lines (not shown), which are adjacent to the switching elements 4 in each column and each row, and which are connected to these switching elements 4 by aluminum wirings 9, and concave and convex portions. Liquid crystal layer 1 covering the polished one side opposite to the one side
7, a transparent electrode 18 covering the liquid crystal layer 17, a supporting substrate 15 mounted on the switching element 4 and the pixel electrode 3 formed on the substrate 2 via an adhesive substance 14,
It has.

In this liquid crystal display device, the pixel electrode 3 and the switching element 4 are not connected through the via hole but are connected by the simple wiring 9 on the substrate 2.

A pixel electrode 3 made of an aluminum film is formed in a concave portion having a constant depth on one surface of the substrate 2, and the surface of the pixel electrode 3 which is in contact with the surface of the concave portion constitutes a reflecting surface, so that it is flat. A reflective surface can be obtained.

In the case of adopting such a structure, it is preferable that the plate thickness of the concave portion of the substrate 2 left between the pixel electrode 3 and the liquid crystal layer 17 is thinner. This is because the thinner the ratio, the higher the ratio of the voltage applied to the liquid crystal layer 17 and the higher the efficiency of changing the state of the liquid crystal.

In the most extreme case, it is preferable that the plate thickness of the recess of the substrate 2 is 0, that is, the pixel electrode 3 is exposed on the other side of the substrate 2. FIG. 8 shows an example thereof.

In this liquid crystal display device, the substrate 2 is provided with a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch vertically and horizontally, and on the concave portion for each constant shape. The formed pixel electrode 3 of an aluminum film that covers the concave portion, the switching element 4 that is formed on the convex portion in the above-described fixed shape and is connected to the pixel electrode 3 by the aluminum wiring 9, and the vertical and horizontal directions. A substrate provided with vertical and horizontal drive lines (not shown), which are adjacent to the switching elements 4 in each column and each row, and which are connected to these switching elements 4 by aluminum wirings 9, and concave and convex portions. 2, a liquid crystal layer 17 that covers the one surface that is flush with the lower surface of the pixel electrode 3 on the opposite side, a transparent electrode 18 that covers the liquid crystal layer 17, a switching element 4 formed on the substrate 2, Pixel electric And the supporting substrate 15 mounted via an adhesive material 14 on the 3, and a.

The concave portion of the substrate 2 is, so to speak, a window, and the convex portion surrounding the concave portion is, so to speak, a window frame. Since the back surface of the surface of the substrate 2 having the switching element 4 constitutes the same plane as the lower surface of the pixel electrode 3, and the lower surface of the pixel electrode 3 constitutes the reflecting surface, a flat reflecting surface can be obtained.

A transparent electrode 18 is formed on the back surface side of the liquid crystal layer 17 covering the same plane, and the voltage between the pixel electrode 3 and the transparent electrode 18 is applied to the liquid crystal layer 17 as it is. As compared with the case where the substrate 2 or another layer is provided between the transparent electrode 3 and the transparent electrode 18, the voltage between both electrodes for changing the state of the liquid crystal can be lowered, and the efficiency for changing the state of the liquid crystal can be increased. .

Next, a method of manufacturing such a liquid crystal display device will be described with reference to FIGS. 9 and 10.

Step 1: The switching elements 4 are formed vertically and horizontally on one surface of the substrate 2 at a constant pitch (see FIG. 9).
(A)). The plate thickness of the substrate 2 is, eg, 1 mm. Step 2: Recesses 2b having a constant depth are formed on one surface of the substrate 2 vertically and horizontally at the constant pitch while avoiding the position of the switching element 4 (FIG. 9B). This depth is, for example, 5
μm.

Step 3: A metal film 3 is formed on the entire surface of one side of the substrate 2.
a is formed (FIG. 9C). This metal is, for example, aluminum. Step 4: The metal film 3a is separated into each recess 2b by etching or the like to form the pixel electrode 3 that covers the recess 2b (FIG. 9).
(D)). Step 5: Drive lines (not shown) are formed vertically and horizontally on the convex portion 2a surrounding the concave portion 2b at the above-mentioned constant pitch, and the switching elements 4 of each vertical and horizontal column and each row are arranged close to these switching elements 4. The vertical and horizontal drive lines are connected by wiring 9 and the switching element 4 and one pixel electrode 3 adjacent to the switching element 4 are connected by wiring 9 (FIG. 9D). The wiring may be connected by vapor deposition or etching of aluminum. The steps 4 and 5 may be combined into one step. In step 1 above, a plurality of switching elements 4 are formed on one surface of the substrate 2 vertically and horizontally at a constant pitch, and in step 5, the plurality of switching elements 4 are formed.
Alternatively, one pixel electrode 3 adjacent thereto may be connected by a wiring 9. In consideration of the yield of switching elements, one pixel may be composed of one pixel electrode and a plurality of switching elements, and a plurality of switching elements may be connected by wiring to one pixel electrode.

Step 6: The supporting substrate 15 is mounted on the switching element 4, the pixel electrode 3, and the drive line (not shown) formed on the substrate 2 via the adhesive material 14 (FIG. 9). (E)). A protective insulating film may be formed on the switching element 4, the pixel electrode 3, and the drive line, and the supporting substrate may be mounted on the adhesive material that covers the insulating film.

Step 7: Polishing the other surface of the substrate 2,
The recess 2b of the substrate 2 is thinned or each pixel electrode 3 is exposed (FIGS. 9E and 10A). In addition,
The liquid crystal display device when the plate thickness of the recess 2b of the substrate 2 is thin corresponds to FIG. 7, and the liquid crystal display device when each pixel electrode 3 is exposed corresponds to FIG. Step 8: A liquid crystal layer 17 that covers this one surface and a transparent electrode 18 that covers this liquid crystal layer 17 are formed on the other one surface side of the substrate 2 (FIG. 10B).

When each pixel electrode 3 is exposed, the substrate 2
Since the polishing surface formed by polishing the other one surface of the above constitutes the same plane as the surface of the pixel electrode 3, and the reflecting surface is constituted by the surface of this pixel electrode 3, a flat reflecting surface can be obtained.
When each pixel electrode 3 is not exposed, the pixel electrode 3 made of a metal film is formed in the recess 2b having a certain depth on one surface of the substrate 2, and the surface of the pixel electrode 3 in contact with the surface of the recess 2b forms a reflective surface. Therefore, a flat reflecting surface can be obtained.

Further, the other surface of the substrate 2 is polished to reduce the plate thickness of the recess 2b of the substrate 2, or each pixel electrode 3 is formed.
And a liquid crystal layer 17 covering one side of the liquid crystal layer 1 and the liquid crystal layer 1
7 is formed, and the voltage between the pixel electrode 3 and the transparent electrode 18 is applied to the thin substrate 2 of the recess 2b and the liquid crystal layer 17, or as it is.
Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered, and the efficiency for changing the state of the liquid crystal can be increased, as compared with the case where one surface is not polished.

In FIGS. 9A to 9D, the pixel electrode 3 is formed after the switching element 4 is formed, but the formation process may be reversed. That is, the liquid crystal display device may be manufactured by the following steps.

Step 1: Recesses 2b having a constant depth are formed on one surface of the substrate 2 vertically and horizontally at a constant pitch. Step 2: A metal film 3a is formed on the entire surface of one surface of the substrate 2. Step 3: The film is separated for each recess 2b to form the pixel electrode 3 covering the recess 2b. Step 4: The switching elements 4 are formed vertically and horizontally on the convex portion 2a surrounding the concave portion 2b of the substrate 2 at the constant pitch. Step 5: The drive lines are formed vertically and horizontally on the convex portion 2a at the above-mentioned constant pitch, and the switching elements 4 of each vertical and horizontal column and each row are connected to the vertical and horizontal drive lines close to these switching elements 4 by wiring 9. The wiring is connected, and the switching element 4 and one pixel electrode 3 adjacent to the switching element 4 are connected by the wiring 9. Step 6: The supporting substrate 15 is mounted on the switching element 4, the pixel electrode 3, and the drive line formed on the substrate 2 via the adhesive substance 14. Step 7: The other surface of the substrate 2 is polished to reduce the plate thickness of the recess 2b of the substrate 2 or expose each pixel electrode 3. Step 8: A liquid crystal layer 17 covering the one surface of the substrate 2 and a transparent electrode 18 covering the liquid crystal layer 17 are formed on the other surface of the substrate 2.

Although the insulating glass substrate is used for the substrate 2 in FIGS. 9 and 10, a semiconductor substrate may be used for the substrate 2. This is shown in FIGS. 11 and 12.

If the pixel electrode 3 is formed on the substrate 2 as it is, the substrate 2 and the pixel electrode 3 may be electrically connected. Therefore, the insulating film 12 is formed between the substrate 2 and the pixel electrode 3. ing. The step of covering one surface of the substrate 2 with the insulating film 12 may be set immediately before the step of forming the metal film 3a for the pixel electrode 3 on the entire one surface of the substrate 2. The connection terminal of the switching element 4 may be exposed by etching or the like. The switching element 4 is formed directly on the substrate 2. 11 and 12 depending on the degree to which the substrate 2 is polished.

By the way, when a material other than a material having a mirror property such as aluminum is used for the pixel electrode 3, it is necessary to provide the reflective layer 16 between the pixel electrode 3 and the liquid crystal layer 17 separately from the pixel electrode 3. is there. In the following, the pixel electrode 3
The case where the reflective layer 16 is provided without using the surface of 1 as the reflective surface will be described. The pixel electrode 3 is formed of a semiconductor (for example, polysilicon) film doped with impurities.

FIG. 13 shows an embodiment of the present invention. Here, the substrate 2 is a glass substrate, and the switching element 4
Will be made with TFT. A reflective layer 16 made of a dielectric multilayer film is provided between the pixel electrode 3 and the liquid crystal layer 17, and the surface of the reflective layer 16 constitutes a reflective surface.

In this liquid crystal display device, the substrate 2 is provided with a constant shape composed of a concave portion having a constant depth and convex portions surrounding the concave portion at a constant pitch in the vertical and horizontal directions, and the constant shape on the concave portion. The formed pixel electrode 3 of a semiconductor film that is doped with an impurity and covers the concave portion, and the switching element, which is formed on the convex portion in the above-described fixed shape, is connected to the pixel electrode 3 by an aluminum wiring 9. 4, vertical and horizontal drive lines (not shown), which are adjacent to the switching elements 4 in each vertical and horizontal column and each row, and which are connected to these switching elements 4 by aluminum wirings 9, and concave and convex portions. A reflective layer 16 of a dielectric multilayer film that covers the polished one surface of the substrate 2 opposite to the one surface, a liquid crystal layer 17 that covers the reflective layer 16, and a transparent electrode 18 that covers the liquid crystal layer 17. ,
A supporting substrate 15 mounted on the switching element 4 and the pixel electrode 3 formed on the substrate 2 via an adhesive substance 14 is provided.

In order to protect the pixel electrode 3 of the semiconductor film, the pixel electrode 3 and the substrate 2 are covered with the insulating film 12. A hole for wiring connection is formed in the insulating film 12. The pixel electrode 3 may be formed of a metal film instead of the semiconductor.

Since the other polished one surface of the substrate 2 is covered with the reflective layer 16 of the dielectric multilayer film, and the surface of this reflective layer 16 constitutes the reflective surface, a flat reflective surface can be obtained. it can.

The thinner the thickness of the recess of the substrate 2 left between the pixel electrode 3 and the reflective layer 16, the better. This is because the thinner the ratio, the higher the ratio of the voltage applied to the liquid crystal layer 17 and the higher the efficiency of changing the state of the liquid crystal.

In the most extreme case, it is preferable that the plate thickness of the concave portion of the substrate 2 is 0, that is, the pixel electrode 3 is exposed on the other side of the substrate 2. FIG. 14 shows an example.

In this liquid crystal display device, the substrate 2 is provided with a constant shape composed of a concave portion having a constant depth and convex portions surrounding the concave portion at a constant pitch vertically and horizontally, and on the concave portion, each constant shape is provided. The formed pixel electrode 3 of an impurity-doped semiconductor film that covers the concave portion is connected to the pixel electrode 3 formed on the convex portion in the predetermined shape by the aluminum wiring 9. The element 4, vertical and horizontal drive lines (not shown), which are adjacent to the switching elements 4 in each vertical and horizontal column and each row, and are connected to these switching elements 4 by aluminum wirings 9, concave portions and convex portions A reflective layer 16 of a dielectric multilayer film that covers one surface of the substrate 2 that is opposite to the one surface that is flush with the lower surface of the pixel electrode 3, and a liquid crystal layer 17 that covers the reflective layer 16. Transparent covering the liquid crystal layer 17 Adhesive material 14 and electrode 18, on the switching element 4 and the pixel electrode 3 formed on the substrate 2
And a supporting substrate 15 attached via the.

The concave portion of the substrate 2 is, so to speak, a window, and the convex portion surrounding the concave portion is, so to speak, a window frame. The rear surface of the surface of the substrate 2 having the switching element 4 constitutes the same plane as the lower surface of the pixel electrode 3, and the reflection layer 16 of the dielectric multilayer film covers the same plane. Therefore, a flat reflecting surface can be obtained.

Further, a transparent electrode 18 is formed on the back surface side via a reflective layer 16 covering the same plane and a liquid crystal layer 17 covering the reflective layer 16, and the pixel electrode 3 and the transparent electrode 1 are formed.
Since the voltage between 8 is applied to the reflective layer 16 and the liquid crystal layer 17 as it is, the voltage between the two electrodes that changes the state of the liquid crystal as compared with the case where the substrate 2 or another layer is provided between the pixel electrode 3 and the transparent electrode 18. Can be lowered, and the efficiency of changing the state of the liquid crystal can be increased.

Next, the manufacturing process of such a liquid crystal display device will be described with reference to FIGS.

Step 1: Recesses 2b having a constant depth are formed on one surface of the substrate 2 by etching at a constant pitch vertically and horizontally (FIG. 15 (a)). The thickness of the substrate 2 is, for example, 1 mm, and the depth of the recess 2b is, for example, 5 μm. Step 2: An impurity-doped semiconductor film 3a is formed on the entire surface of one side of the substrate 2 (FIG. 15B). A metal may be used instead of the semiconductor. Step 3: The film 3a is separated for each recess 2b to form the pixel electrode 3 that covers the recess 2b (FIG. 15C).

Step 4: An insulating film 12 for protecting the pixel electrodes 3 is formed on the entire surface of one side of the substrate 2, and the switching elements 4 are arranged vertically and horizontally on the insulating film 12 covering the convex portion 2a surrounding the concave portion 2b of the substrate. Formed at the constant pitch (FIG. 15).
(D)). However, a semiconductor film 3a forming the pixel electrode 3
If the switching element 4 and the drive line are not formed on the same film as above, the insulating film 12 may not be formed. Step 5: Drive lines (not shown) are formed vertically and horizontally on the convex portion 2a at the above-mentioned constant pitch, and vertical and horizontal switching lines 4 are provided in the vertical and horizontal drive lines adjacent to the switching elements 4. To the switching element 4 and one pixel electrode 3 adjacent to the switching element 4 by wiring 9 (FIG. 15).
(E)). The wiring may be connected by vapor deposition or etching of aluminum. The insulating film 12 has a hole 12a for connecting a wiring. In the above step 4, the convex portion 2a
A plurality of switching elements 4 are formed vertically and horizontally on the insulating film 12 that covers the plurality of switching elements 4 at the constant pitch, and in step 5, the plurality of switching elements 4 and one pixel electrode 3 adjacent thereto are formed.
And may be connected to each other by the wiring 9. In consideration of the yield of switching elements, one pixel may be composed of one pixel electrode and a plurality of switching elements, and a plurality of switching elements may be connected by wiring to one pixel electrode.

Step 6: The supporting substrate 15 is mounted on the switching element 4, the pixel electrode 3, and the drive line formed on the substrate 2 via the adhesive substance 14 (FIG. 15).
(E), FIG. 16 (a)). A protective insulating film is formed on the switching element 4, the pixel electrode 3, and the drive line,
The supporting substrate 15 may be mounted on the adhesive material 14 that covers the insulating film.

Step 7: Polishing the other surface of the substrate 2,
The thickness of the recess 2b of the substrate 2 is reduced, or each pixel electrode 3 is exposed (FIG. 16B). The liquid crystal display device in which the plate thickness of the recess 2b of the substrate 2 is thin corresponds to FIG. 13, and the liquid crystal display device in which each pixel electrode 3 is exposed corresponds to FIG. Step 8: On one side of the other side of the substrate 2, a reflective layer 16 of a dielectric multilayer film that covers the one side, a liquid crystal layer 17 that covers the reflective layer 16, and a transparent electrode 18 that covers the liquid crystal layer 17 are formed. (FIG. 16C).

The other polished one surface of the substrate 2 is covered with the reflective layer 16 of the dielectric multilayer film, and the surface of this reflective layer 16 constitutes the reflective surface, so that a flat reflective surface can be obtained. it can.

Further, the other surface of the substrate 2 is polished to reduce the plate thickness of the concave portion 2b of the substrate 2, or each pixel electrode 3 is formed.
And a reflective layer 16 covering this one side and
6 and a transparent electrode 1 covering the liquid crystal layer 17
8 and the voltage between the pixel electrode 3 and the transparent electrode 18 is applied to the thin substrate 2 of the recess 2b, the reflective layer 16 and the liquid crystal layer 17, or as it is. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where the one surface is not polished.

In FIGS. 15A to 15D, the switching element 4 is formed after the pixel electrode 3 is formed, but the formation process may be reversed. That is, the liquid crystal display device may be manufactured by the following steps.

Step 1: The switching elements 4 are formed vertically and horizontally on one surface of the substrate 2 at a constant pitch. Step 2: The recesses 2b having a constant depth are formed on one surface of the substrate 2 while avoiding the position of the switching element 4 in the vertical and horizontal directions at the constant pitch. Step 3: A semiconductor film 3a doped with a metal or an impurity is formed on the entire surface of one surface of the substrate 2. Step 4: The film 3a is separated for each recess 2b to form the pixel electrode 3 covering the recess 2b. Step 5: Driving lines are formed vertically and horizontally on the convex portion 2a surrounding the concave portion 2b at the constant pitch, and the switching elements 4 in each vertical and horizontal column and each row are formed as vertical and horizontal driving lines close to these switching elements 4. The wiring 9 is connected by wiring, and the switching element 4 and one pixel electrode 3 adjacent to the switching element 4 are connected by the wiring 9. Step 6: The supporting substrate 15 is mounted on the switching element 4, the pixel electrode 3, and the drive line formed on the substrate 2 via the adhesive substance 14. Step 7: The other surface of the substrate 2 is polished to reduce the plate thickness of the recess 2b of the substrate 2 or expose each pixel electrode 3. Step 8: On one side of the other side of the substrate 2, a reflective layer 16 of a dielectric multilayer film that covers the one side, a liquid crystal layer 17 that covers the reflective layer 16, and a transparent electrode 18 that covers the liquid crystal layer 17 are formed. To do.

A film of a semiconductor such as polysilicon is used as the pixel electrode 3
When used for, the pixel electrode 3 and the switching element 4 can be formed in this semiconductor film. 17 and 1
8 shows an example. This semiconductor film is covered with a protective insulating film.

FIG. 17 shows an embodiment of the present invention. Here, the substrate 2 is a glass substrate, and the switching element 4
Will be made with TFT. A reflective layer 16 made of a dielectric multilayer film is provided between the pixel electrode 3 and the liquid crystal layer 17, and the surface of the reflective layer 16 constitutes a reflective surface.

In this liquid crystal display device, the substrate 2 is provided with a constant shape composed of a concave portion having a constant depth and convex portions surrounding the concave portion at a constant pitch vertically and horizontally, and on the concave portion for each constant shape. The formed pixel electrode 3 of a semiconductor film, which is doped with impurities and covers the concave portion, and the switching element 4, which is formed on the convex portion of the film in a predetermined shape.
And vertical and horizontal drive lines (not shown), which are adjacent to the switching elements 4 in each vertical and horizontal column and each row, and are connected to these switching elements 4 by wiring 9, and a concave portion and a convex portion. A reflective layer 16 of a dielectric multilayer film that covers the polished one surface of the substrate 2 opposite the one surface, a liquid crystal layer 17 that covers the reflective layer 16, and a transparent electrode 18 that covers the liquid crystal layer 17.
And a supporting substrate 15 mounted on the switching element 4 and the pixel electrode 3 formed on the substrate 2 via an adhesive substance 14.

In order to protect the pixel electrode 3 formed of a semiconductor film and the switching element 4, the semiconductor film and the substrate 2 are covered with an insulating film 12 except for the connection terminals of the switching element 4.

The other polished one surface of the substrate 2 is covered with the reflecting layer 16 of the dielectric multilayer film, and the reflecting surface is constituted by the surface of the reflecting layer 16, so that a flat reflecting surface can be obtained. it can.

Further, the pixel electrode 3 made of a semiconductor film that covers the recesses.
Are formed for each of the constant shapes, and the switching element 4 is formed for each of the constant shapes in a portion of the film overhanging the convex portion, and the pixel electrode 3 and the switching element 4 are connected by the same semiconductor film. Therefore, it is possible to eliminate the trouble of newly wiring them with a conductive material. Further, the configuration of the liquid crystal display device can be simplified as compared with the case of FIG.

The plate thickness of the concave portion of the substrate 2 left between the pixel electrode 3 and the reflective layer 16 is preferably as thin as possible. This is because the thinner the ratio, the higher the ratio of the voltage applied to the liquid crystal layer 17 and the higher the efficiency of changing the state of the liquid crystal.

In the most extreme case, it is preferable that the plate thickness of the concave portion of the substrate 2 is 0, that is, the pixel electrode 3 is exposed on the other side of the substrate 2. FIG. 18 shows an example.

In this liquid crystal display device, a substrate 2 having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion is provided at a constant pitch in the vertical and horizontal directions, and the concave portion is formed for each constant shape. The pixel electrode 3 made of an impurity-doped semiconductor film covering the concave portion and the switching element 4 formed in the constant shape in the portion of the film covering the convex portion.
And vertical and horizontal drive lines (not shown), which are adjacent to the switching elements 4 in each vertical and horizontal column and each row, and are connected to these switching elements 4 by wiring 9, and a concave portion and a convex portion. A reflective layer 16 of a dielectric multilayer film that covers one surface of the substrate 2 that is flush with the lower surface of the pixel electrode 3, and a liquid crystal layer 17 that covers the reflective layer 16 and the liquid crystal layer 17 The adhesive material 14 is formed on the transparent electrode 18 that covers the switching element 4 and the pixel electrode 3 that are formed on the substrate 2.
And a supporting substrate 15 attached via the.

The concave portion of the substrate 2 is, so to speak, a window, and the convex portion surrounding the concave portion is, so to speak, a window frame. The rear surface of the surface of the substrate 2 having the switching element 4 constitutes the same plane as the lower surface of the pixel electrode 3, and the reflection layer 16 of the dielectric multilayer film covers the same plane. Therefore, a flat reflecting surface can be obtained.

Further, a transparent electrode 18 is formed on the back surface side via a reflective layer 16 covering the same plane and a liquid crystal layer 17 covering the reflective layer 16, and the pixel electrode 3 and the transparent electrode 1 are formed.
Since the voltage between 8 is applied to the reflective layer 16 and the liquid crystal layer 17 as it is, the voltage between the two electrodes that changes the state of the liquid crystal as compared with the case where the substrate 2 or another layer is provided between the pixel electrode 3 and the transparent electrode 18. Can be lowered, and the efficiency of changing the state of the liquid crystal can be increased.

Furthermore, the pixel electrode 3 made of a semiconductor film that covers the recesses.
Are formed for each of the constant shapes, and the switching element 4 is formed for each of the constant shapes at the portion of the film overhanging the convex portion, and the pixel electrode 3 and the switching element 4 are connected by a semiconductor film. Therefore, it is possible to eliminate the trouble of newly wiring them with a conductive material. Also,
The configuration of the liquid crystal display device can be simplified as compared with the case of FIG.

Next, a method of manufacturing such a liquid crystal display device will be described.

Step 1: Recesses 2b having a constant depth are formed on one surface of the substrate 2 vertically and horizontally at a constant pitch. The thickness of the substrate 2 is, for example, 1 mm, and the depth of the recess 2b is, for example, 5 μm.

Step 2: An impurity-doped semiconductor film 3a is formed on the entire surface of one surface of the substrate 2. Step 3: The film 3a is separated for each recess 2b to form the pixel electrode 3 covering the recess 2b. Step 4: A switching element 4 is formed on a portion of the convex portion 2a surrounding the concave portion 2b of the substrate 2 over the convex portion 2a of the film, and a protective insulating film 12 is formed on the semiconductor film and the substrate 2. . The connection terminal of the switching element 4 may be exposed by etching or the like. Step 5: Drive lines are formed vertically and horizontally on the convex portion 2a at the above-mentioned constant pitch, and switching elements 4 in each column and row are provided in the vertical and horizontal drive lines adjacent to the switching elements 4 with aluminum wiring 9. Connect the wiring with.

Step 6: The supporting substrate 15 is mounted on the insulating film 12 and the drive line via the adhesive substance 14. When the adhesive substance 14 is insulative, it is not always necessary to form the insulating film 12.

Step 7: Polishing the other surface of the substrate 2,
The plate thickness of the recess 2b of the substrate 2 is thinned or each pixel electrode 3 is exposed. The liquid crystal display device when the thickness of the recess 2b of the substrate 2 is thin corresponds to FIG. 17, and the liquid crystal display device when each pixel electrode 3 is exposed corresponds to FIG. Step 8: On one side of the other side of the substrate 2, a reflective layer 16 of a dielectric multilayer film that covers the one side, a liquid crystal layer 17 that covers the reflective layer 16, and a transparent electrode 18 that covers the liquid crystal layer 17 are formed. To do.

The other polished one surface of the substrate 2 is covered with the reflective layer 16 of the dielectric multilayer film, and the surface of this reflective layer 16 constitutes the reflective surface, so that a flat reflective surface can be obtained. it can.

Further, the other surface of the substrate 2 is polished to reduce the plate thickness of the recess 2b of the substrate 2, or each pixel electrode 3 is formed.
And a reflective layer 16 covering this one side and
6 and a transparent electrode 1 covering the liquid crystal layer 17
8 and the voltage between the pixel electrode 3 and the transparent electrode 18 is applied to the thin substrate 2 of the recess 2b, the reflective layer 16 and the liquid crystal layer 17, or as it is. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where the one surface is not polished.

Further, the pixel electrode 3 made of a semiconductor film that covers the concave portion.
Are formed for each of the constant shapes, and the switching element 4 is formed for each of the constant shapes at the portion of the film overhanging the convex portion, and the pixel electrode 3 and the switching element 4 are connected by a semiconductor film. Therefore, it is possible to eliminate the trouble of newly wiring them with a conductive material. Also,
The configuration of the liquid crystal display device can be simplified.

By the way, the voltage of the pixel electrode 3 needs to maintain a stable value for a certain period of time. Therefore, the larger the capacitance of the pixel electrode 3, the better. To increase the capacity, it is effective to form a capacitor or a counter electrode and connect them in parallel to generate an auxiliary capacity.

When the pixel electrode 3 and the switching element 4 are formed on the same one surface side of the substrate 2 and the liquid crystal layer 17 and the transparent electrode 18 are formed thereon, when the counter electrode is formed so as to overlap the pixel electrode 3, one surface is formed. The unevenness on the side becomes more conspicuous, the flatness thereof deteriorates, and there is an adverse effect such as disordered alignment of the liquid crystal.

However, when the counter electrode is formed with the liquid crystal layer 17 and the transparent electrode 18 sandwiching the substrate 2, the flatness of the reflecting surface is not deteriorated. Also, a large auxiliary capacitance can be generated. FIG. 19 shows an example.

FIG. 19 shows an embodiment of the present invention. A counter electrode is added to the structure shown in FIG. A stacked capacitor cell (stacked capacitor) is formed of polysilicon doped with impurities.

In this liquid crystal display device, impurities which are formed between the substrate 2 and the supporting substrate 15 in correspondence with each pixel electrode 3 and which are connected through the holes formed in the insulating film 12 for each pixel electrode 3 are provided. A first electrode 31 of a doped semiconductor film, and a second electrode 32 of a semiconductor film doped with impurities, which is formed on the film via the insulating film 11 and is wire-connected to the transparent electrode 18. Is equipped with. A metal film may be used instead of the semiconductor film.

The pixel electrode 3 and the transparent electrode 18 have a first electrode 31.
By parallelly connecting the counter electrode including the second electrode 32 and the second electrode 32, the capacitance between the pixel electrode 3 and the transparent electrode 18 can be increased, and the voltage of the pixel electrode 3 can be stabilized. Claim 1,
It is also applicable to the liquid crystal display device according to claim 2, claim 5, claim 6, claim 9, or claim 10.

As a method of manufacturing this liquid crystal display device, immediately before the step of mounting the supporting substrate 15 on one surface side of the substrate 2 via the adhesive substance 14, the counter electrode composed of the first electrode 31 and the second electrode 32 is provided. It is only necessary to set a step of forming and connecting the pixel electrode 3 and the transparent electrode 18 in parallel.

On the other hand, when a material having a high light transmittance, such as a glass substrate for visible light and a silicon substrate for infrared light, is used for the substrate 2, the light passes through the substrate 2 and reaches the switching element 4, and the switching element ON / OF of 4
The F operation may become unstable. This is especially true in a reflective liquid crystal display device.

To prevent this, in the liquid crystal display device of FIG. 20, the substrate is made of a glass substrate containing impurities.
By mixing impurities into the substrate 2, the substrate 2 (impurities in the substrate 2) can scatter or block light. Moreover, the transmittance of visible light, infrared light, and ultraviolet light can be adjusted by the impurities. A substrate that does not transmit visible light, infrared light, and ultraviolet light may be used.

By the way, in the liquid crystal display device shown in FIGS. 2 to 5, the pixel electrode 3 and the switching element 4 are connected to each other with the via hole 20 sandwiching the substrate 2, and the alignment disorder of the liquid crystal between the pixel electrodes 3 is disturbed. There is a problem that the image quality is deteriorated by the depression of the portion formed by filling the via hole 20 on the surface of the pixel electrode 3. In order to solve the above problem in a liquid crystal display device in which the pixel electrode 3 and the switching element 4 are connected by the via hole 20, the liquid crystal display device may be manufactured as shown in FIGS. 21 and 22.

Step 1: The switching elements 4 are formed vertically and horizontally on one surface of the substrate 2 at a constant pitch (FIG. 21).
(A)). Step 2: drive lines (not shown) are formed on one surface of the substrate 2 vertically and horizontally at the above-mentioned constant pitch, and land patterns 9a are formed in the vicinity of the switching elements 4, and vertical and horizontal columns and rows of switching elements are formed. 4 is connected to vertical and horizontal drive lines close to these switching elements 4 by wiring 9, and the switching element 4 and the land pattern 9a in the vicinity thereof are connected by wiring 9 (FIG. 21 (a)). Step 3: The supporting substrate 15 is mounted on the switching element 4, the drive line, and the land pattern 9a formed on the substrate 2 via the adhesive substance 14 (FIG. 21).
(B)). Step 4: The other surface of the substrate 2 is polished to reduce the thickness of the substrate 2 (FIG. 21 (c)). Step 5: Each switching element 4 is provided on the other surface of the substrate 2.
And a via hole 20 reaching the land pattern 9a is formed in the recess 21 or at the edge of the recess 21 (FIG. 21D). Step 6: A metal film 3a is formed on the entire area of the other surface of the substrate 2, and the film 3a and the land pattern 9a are connected (FIGS. 21 (d) and 22 (a)). Step 7: The other surface of the substrate 2 is polished to expose the other surface of the substrate 2 and the metal film 3a of the recess 21 is separated to form the pixel electrode 3 (FIG. 22B). . Step 8: The liquid crystal layer 17 covering the polished one surface on the other surface side of the substrate 2, and the transparent electrode 1 covering the liquid crystal layer 17.
And 8 (FIG. 22 (c)).

When the metal film 3a is formed on the other surface of the substrate 2 and the film 3a and the land pattern 9a are connected to each other, a recess is formed in the surface of the film 3a filled with the via holes 20. However, by polishing the one surface side, the film 3a can be separated to form the pixel electrode 3 in each recess 21, and the surface of the film 3a can be smoothed to form a reflective surface on the surface of the pixel electrode 3. Therefore, a flat reflecting surface can be obtained.

A liquid crystal layer 17 covering the polished one surface and a transparent electrode 18 covering the liquid crystal layer 17 are formed on the other one surface side of the substrate 2, and the pixel electrode 3 and the transparent electrode 18 are formed. The voltage between them can be applied to the liquid crystal layer 17 as it is to change the state of the liquid crystal.

In the liquid crystal display device and the manufacturing method thereof according to claims 1 to 14, since the substrate 2 is located in the gap between the pixel electrodes 3 and the liquid crystal is not located, a local potential difference between the pixel electrodes 3 is generated. It is possible to prevent the alignment disorder of the liquid crystal due to.

When polishing the substrate 2 according to claims 3, 4, 7, 8, 11, and 14, the recess 2 formed in the substrate 2 is used.
It is desirable to grind parallel to the surfaces of b and 21. Also,
The liquid crystal layer 17 and the reflective layer 16 are preferably laminated in parallel. This is to achieve a constant high image quality over the entire liquid crystal screen.

The above embodiment is an example of the present invention, and the present invention is not limited to the above embodiment.

[0136]

According to the liquid crystal display device of the first aspect,
As described above, a pixel electrode made of a metal film is formed in a recess of a certain depth on one surface of the substrate, and the surface of the pixel electrode in contact with the surface of the recess forms a reflective surface, so that a flat reflection is obtained. The surface can be obtained and high image quality can be realized.

According to the liquid crystal display device of the second aspect, as described above, the rear surface of the surface of the substrate having the switching element is flush with the lower surface of the pixel electrode, and the lower surface of the pixel electrode is the reflective surface. Since it is configured, a flat reflecting surface can be obtained, and high image quality can be realized.

Further, a transparent electrode is formed on the back surface side via a liquid crystal layer covering the same plane, and the voltage between the pixel electrode and the transparent electrode is applied to the liquid crystal layer as it is. The voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where there is a substrate or another layer.

According to the method of manufacturing a liquid crystal display device according to a third aspect, as described above, when the other surface of the substrate is polished to expose each pixel electrode, the other surface of the substrate is polished. The polished surface that is formed is flush with the surface of the pixel electrode,
Since the reflecting surface is formed by the surface of the pixel electrode, a flat reflecting surface can be obtained and high image quality can be realized. If each pixel electrode is not exposed, a pixel electrode made of a metal film is formed in a recess of a certain depth on one surface of the substrate, and the surface of the pixel electrode in contact with the surface of the recess forms a reflective surface. A flat reflective surface can be obtained, and high image quality can be realized.

Further, the other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode, and a liquid crystal layer covering this one surface and a transparent electrode covering this liquid crystal layer are formed. Since the voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the recess and the liquid crystal layer, or to the liquid crystal layer as it is, the state of the liquid crystal is better than that in the case where one side is not polished. It is possible to reduce the voltage between both electrodes that changes the liquid crystal, and it is possible to increase the efficiency that changes the state of the liquid crystal.

According to the method of manufacturing a liquid crystal display device according to a fourth aspect, as described above, when each pixel electrode is exposed by polishing the other surface of the substrate, the other surface of the substrate is polished. The polished surface that is formed is flush with the surface of the pixel electrode,
Since the reflecting surface is formed by the surface of the pixel electrode, a flat reflecting surface can be obtained and high image quality can be realized. If each pixel electrode is not exposed, a pixel electrode made of a metal film is formed in a recess of a certain depth on one surface of the substrate, and the surface of the pixel electrode in contact with the surface of the recess forms a reflective surface. A flat reflective surface can be obtained, and high image quality can be realized.

Further, the other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode, and a liquid crystal layer covering this one surface and a transparent electrode covering the liquid crystal layer are formed. Since the voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the recess and the liquid crystal layer, or to the liquid crystal layer as it is, the state of the liquid crystal is better than that in the case where one side is not polished. It is possible to reduce the voltage between both electrodes that changes the liquid crystal, and it is possible to increase the efficiency that changes the state of the liquid crystal.

According to the liquid crystal display device of the fifth aspect, as described above, the other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the reflective surface is covered with the surface of the reflective layer. Since it is configured, a flat reflecting surface can be obtained, and high image quality can be realized.

According to the liquid crystal display device of the sixth aspect, as described above, the rear surface of the surface of the substrate having the switching element forms the same plane as the lower surface of the pixel electrode, and this same plane is formed of the dielectric multilayer film. Since the reflective layer covers and the reflective surface is constituted by the surface of the reflective layer, a flat reflective surface can be obtained and high image quality can be realized.

Further, a transparent electrode is formed on the back surface side via a reflection layer covering the same plane and a liquid crystal layer covering the reflection layer, and the voltage between the pixel electrode and the transparent electrode is the same as that of the reflection layer and the liquid crystal. Since it is applied to a layer, the voltage between both electrodes that changes the state of the liquid crystal can be lowered compared to the case where there is a substrate or another layer between the pixel electrode and the transparent electrode, and the efficiency of changing the state of the liquid crystal can be improved. Can be higher.

According to the method of manufacturing a liquid crystal display device according to a seventh aspect, as described above, the other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer is covered. Since the reflecting surface is configured, a flat reflecting surface can be obtained and high image quality can be realized.

Also, the other surface of the substrate is polished to reduce the thickness of the recess of the substrate or expose each pixel electrode, and the reflective layer covering this one surface and the liquid crystal layer covering this reflective layer are formed. A transparent electrode covering the liquid crystal layer is formed, and a voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the concave portion, the reflective layer and the liquid crystal layer, or directly to the reflective layer and the liquid crystal layer. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where one surface is not polished.

According to the method of manufacturing a liquid crystal display device according to an eighth aspect, as described above, the other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer is covered. Since the reflecting surface is configured, a flat reflecting surface can be obtained and high image quality can be realized.

Further, the other surface of the substrate is polished to reduce the thickness of the recess of the substrate or expose each pixel electrode, and the reflective layer covering this one surface and the liquid crystal layer covering this reflective layer are formed. A transparent electrode covering the liquid crystal layer is formed, and a voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the concave portion, the reflective layer and the liquid crystal layer, or directly to the reflective layer and the liquid crystal layer. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where one surface is not polished.

According to the liquid crystal display device of the ninth aspect, as described above, the other polished surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the reflective surface is covered by the surface of the reflective layer. Since it is configured, a flat reflecting surface can be obtained, and high image quality can be realized.

Further, the pixel electrode of the semiconductor film covering the concave portion is formed for each of the above-mentioned constant shapes, and the switching element is formed for each of the above-mentioned constant shape at the portion of the film over the convex portion. Since the switching element and the switching element are connected by a semiconductor film, it is possible to eliminate the trouble of newly wiring them with a conductive material.

According to the liquid crystal display device of the tenth aspect,
As described above, the back surface of the surface having the switching element on the substrate constitutes the same plane as the lower surface of the pixel electrode, and the reflection layer of the dielectric multilayer film covers the same plane. Since it is configured, a flat reflecting surface can be obtained and high image quality can be realized.

Further, a transparent electrode is formed on the back surface side via a reflection layer covering the same plane and a liquid crystal layer covering the reflection layer, and the voltage between the pixel electrode and the transparent electrode is the same as that of the reflection layer and the liquid crystal. Since it is applied to a layer, the voltage between both electrodes that changes the state of the liquid crystal can be lowered compared to the case where there is a substrate or another layer between the pixel electrode and the transparent electrode, and the efficiency of changing the state of the liquid crystal can be improved. Can be higher.

Further, the pixel electrode of the semiconductor film covering the concave portion is formed for each of the above-mentioned constant shapes, and the switching element is formed for each of the above-mentioned constant shape in the portion of the film that extends over the convex portion of the pixel electrode. Since the switching element and the switching element are connected by a semiconductor film, it is possible to eliminate the trouble of newly wiring them with a conductive material.

According to the method of manufacturing a liquid crystal display device according to the eleventh aspect, as described above, the other polished one surface of the substrate is covered with the reflective layer of the dielectric multilayer film, and the surface of this reflective layer is covered. Since the reflecting surface is configured, a flat reflecting surface can be obtained and high image quality can be realized.

Further, the other surface of the substrate is polished to reduce the plate thickness of the concave portion of the substrate or expose each pixel electrode, and the reflective layer covering this one surface and the liquid crystal layer covering this reflective layer are formed. A transparent electrode covering the liquid crystal layer is formed, and a voltage between the pixel electrode and the transparent electrode is applied to the substrate having a thin plate thickness of the concave portion, the reflective layer and the liquid crystal layer, or directly to the reflective layer and the liquid crystal layer. Therefore, the voltage between both electrodes for changing the state of the liquid crystal can be lowered and the efficiency for changing the state of the liquid crystal can be increased as compared with the case where one surface is not polished.

Further, a pixel electrode of a semiconductor film that covers the concave portion is formed for each of the above-mentioned constant shapes, and a switching element is formed for each of the above-mentioned constant shapes at the portion that overlaps the convex portion of this film. Since the switching element and the switching element are connected by a semiconductor film, it is possible to eliminate the trouble of newly wiring them with a conductive material.

According to the liquid crystal display device of the twelfth aspect,
As described above, by connecting the counter electrode composed of the first electrode and the second electrode in parallel to the pixel electrode and the transparent electrode, the capacitance between the pixel electrode and the transparent electrode can be increased and the voltage of the pixel electrode can be stabilized. And high image quality can be realized.

Further, since the counter electrode is formed with the liquid crystal layer and the transparent electrode sandwiching the substrate, the auxiliary capacitance can be generated without deteriorating the flatness of the reflecting surface.

According to the liquid crystal display device of the thirteenth aspect,
As described above, by mixing impurities into the substrate, the substrate can scatter or block light, so that the light passes through the substrate, reaches the switching element, and reaches the switching element O
The N / OFF operation can be prevented from becoming unstable, and high image quality can be realized.

According to the method for manufacturing a liquid crystal display device according to the fourteenth aspect, as described above, when the metal film is formed on the other surface of the substrate and the film and the land pattern are connected, A depression is formed in the portion of the surface filled with the via hole, but by polishing this one side, the film can be separated to form the pixel electrode in each recess, and the surface of the film can be smoothed. Since the reflecting surface is formed by the surface of, the flat reflecting surface can be obtained and high image quality can be realized.

Further, a liquid crystal layer covering the polished one surface and a transparent electrode covering the liquid crystal layer are formed on the other surface of the substrate, and the voltage between the pixel electrode and the transparent electrode is directly applied to the liquid crystal. The state of the liquid crystal can be changed over the layers.

Further, in the liquid crystal display device and the manufacturing method thereof according to claims 1 to 14, since the substrate is located in the gap between the pixel electrodes and the liquid crystal is not located, the potential difference between the pixel electrodes causes a local potential difference. The alignment disorder of the liquid crystal can be prevented, and high image quality can be realized.

[Brief description of the drawings]

FIG. 1 is a plan configuration diagram of a liquid crystal display device.

FIG. 2 is a sectional structural view of a conventional liquid crystal display device.

FIG. 3 is an explanatory view of a conventional method for manufacturing a liquid crystal display device.

FIG. 4 is an explanatory view of a conventional method for manufacturing a liquid crystal display device.

FIG. 5 is a sectional structural view of a conventional liquid crystal display device using a semiconductor substrate.

FIG. 6 is a cross-sectional structural view of a conventional liquid crystal display device having a reflective layer.

FIG. 7 is a sectional structural view of a liquid crystal display device of the present invention.

FIG. 8 is a sectional structural view of a liquid crystal display device of the present invention.

FIG. 9 is an explanatory view of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 10 is an explanatory diagram of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 11 is a sectional structural view of a liquid crystal display device of the present invention using a semiconductor substrate.

FIG. 12 is a sectional structural view of a liquid crystal display device of the present invention using a semiconductor substrate.

FIG. 13 is a sectional structural view of a liquid crystal display device of the present invention having a reflective layer.

FIG. 14 is a sectional structural view of a liquid crystal display device of the present invention having a reflective layer.

FIG. 15 is an explanatory diagram of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 16 is an explanatory diagram of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 17 is a sectional structural view of a liquid crystal display device of the present invention.

FIG. 18 is a sectional structural view of a liquid crystal display device of the present invention.

FIG. 19 is a sectional structural view of a liquid crystal display device of the present invention to which an auxiliary capacitance is added.

FIG. 20 is a sectional structural view of a liquid crystal display device of the present invention using a glass substrate containing impurities.

FIG. 21 is an explanatory diagram of a method for manufacturing a liquid crystal display device of the present invention.

FIG. 22 is an explanatory diagram of a method for manufacturing a liquid crystal display device of the present invention.

[Description of Reference Signs] 1 ... Liquid crystal display device, 2 ... Substrate, 2a ... Convex portion, 2b, 21
... recesses, 3 ... pixel electrodes, 3a ... film, 4 ... switching element, 5 ... vertical drive section, 6 ... horizontal drive section, 7 ... vertical drive line, 8 ... horizontal drive line, 9 ... wiring, 9a ... Land pattern, 11, 12, 13 ... Insulating film, 12a ... Hole, 14 ... Adhesive substance, 15 ... Supporting substrate, 16 ... Reflective layer, 17 ... Liquid crystal layer, 18 ... Transparent electrode, 20 ... Via hole, 31 ... First electrode, 32 ... Second electrode.

Claims (14)

[Claims] 1. A substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch vertically and horizontally, and formed on the concave portion for each constant shape. A pixel electrode made of a metal film covering the concave portion, a switching element formed on the convex portion for each of the constant shapes and wiring-connected to the pixel electrode, and each of the vertical and horizontal columns and the switching element in each row. Close,
Vertical and horizontal drive lines that are wired and connected to these switching elements, and a liquid crystal layer that covers the polished one side opposite to the one side of the substrate provided with the concave portion and the convex portion, and this liquid crystal layer A liquid crystal display device comprising: a transparent electrode for covering; and a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive material. 2. A substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in the vertical and horizontal directions, and formed on the concave portion for each of the constant shapes. A pixel electrode made of a metal film covering the concave portion, a switching element formed on the convex portion for each of the constant shapes and wiring-connected to the pixel electrode, and each of the vertical and horizontal columns and the switching element in each row. Close,
Vertical and horizontal drive lines wired to these switching elements and one surface of the substrate opposite to the one surface of the substrate provided with the concave portion and the convex portion and forming the same plane as the lower surface of the pixel electrode are covered. A liquid crystal display device comprising a liquid crystal layer, a transparent electrode covering the liquid crystal layer, and a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive substance. . 3. A method of manufacturing a liquid crystal display device, which comprises performing the following steps. Step 1: Switching elements are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: Recesses having a constant depth are formed on one surface of the substrate in the vertical and horizontal directions at the constant pitch while avoiding the position of the switching element. Step 3: A metal film is formed on the entire surface of one surface of the substrate. Step 4: The film is separated for each of the recesses to form a pixel electrode covering the recess. Step 5: Drive lines are formed vertically and horizontally at the constant pitch on the convex portion surrounding the concave portion, and the switching elements in each vertical and horizontal column and each row are wired to the vertical and horizontal drive lines close to these switching elements. Then, the switching element and one pixel electrode adjacent to the switching element are connected by wiring. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the recess of the substrate or expose the pixel electrodes. Step 8: A liquid crystal layer that covers the one surface of the substrate and a transparent electrode that covers the liquid crystal layer are formed on the other surface of the substrate. 4. A method of manufacturing a liquid crystal display device, which comprises performing the following steps. Step 1: Recesses having a constant depth are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: A metal film is formed on the entire area of one surface of the substrate. Step 3: The film is separated for each of the recesses to form a pixel electrode covering the recess. Step 4: Switching elements are formed vertically and horizontally on the convex portion surrounding the concave portion of the substrate at the constant pitch. Step 5: drive lines are formed vertically and horizontally on the convex portion at the constant pitch, and the switching elements of each vertical and horizontal column and each row are connected by wiring to the vertical and horizontal drive lines adjacent to these switching elements. The switching element and one pixel electrode adjacent to the switching element are connected by wiring. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the recess of the substrate or expose the pixel electrodes. Step 8: A liquid crystal layer that covers the one surface of the substrate and a transparent electrode that covers the liquid crystal layer are formed on the other surface of the substrate. 5. A substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in the vertical and horizontal directions, and formed on the concave portion for each of the constant shapes. A pixel electrode of a metal film or a pixel electrode of a semiconductor film doped with an impurity, which covers the concave portion; and a switching element which is formed on the convex portion in each of the constant shapes and is wiring-connected to the pixel electrode, Proximity to the switching elements in each vertical and horizontal column and each row,
Vertical and horizontal drive lines wired and connected to these switching elements, and a reflective layer of a dielectric multilayer film that covers the polished one side opposite to the one side of the substrate having the recess and the protrusion. A liquid crystal layer covering the reflective layer, a transparent electrode covering the liquid crystal layer, and a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive substance. A liquid crystal display device provided. 6. A substrate having a constant shape composed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch in the vertical and horizontal directions, and formed on the concave portion for each of the constant shapes. A pixel electrode of a metal film or a pixel electrode of a semiconductor film doped with an impurity, which covers the concave portion, and a switching element which is formed on the convex portion in each of the constant shapes and is wiring-connected to the pixel electrode. , Adjacent to the switching elements in each row and column,
Vertical and horizontal drive lines wired to these switching elements and one surface of the substrate opposite to the one surface of the substrate provided with the concave portion and the convex portion and forming the same plane as the lower surface of the pixel electrode are covered. A reflective layer of a dielectric multilayer film, a liquid crystal layer that covers the reflective layer, a transparent electrode that covers the liquid crystal layer, and the switching element and the pixel electrode formed on the substrate, which are mounted via an adhesive material. Liquid crystal display device comprising: 7. A method of manufacturing a liquid crystal display device, which comprises performing the following steps. Step 1: Switching elements are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: Recesses having a constant depth are formed on one surface of the substrate in the vertical and horizontal directions at the constant pitch while avoiding the position of the switching element. Step 3: A metal film or a semiconductor film doped with impurities is formed on the entire surface of one surface of the substrate. Step 4: The film is separated for each of the recesses to form a pixel electrode covering the recess. Step 5: Drive lines are formed vertically and horizontally at the constant pitch on the convex portion surrounding the concave portion, and the switching elements in each vertical and horizontal column and each row are wired to the vertical and horizontal drive lines close to these switching elements. Then, the switching element and one pixel electrode adjacent to the switching element are connected by wiring. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the recess of the substrate or expose the pixel electrodes. Step 8: A reflective layer of a dielectric multilayer film that covers the one surface of the other side of the substrate, and a liquid crystal layer that covers the reflective layer.
A transparent electrode that covers the liquid crystal layer is formed. 8. A method of manufacturing a liquid crystal display device, which comprises performing the following steps. Step 1: Recesses having a constant depth are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: A metal film or a semiconductor film doped with impurities is formed on the entire surface of one surface of the substrate. Step 3: The film is separated for each of the recesses to form a pixel electrode covering the recess. Step 4: Switching elements are formed vertically and horizontally on the convex portion surrounding the concave portion of the substrate at the constant pitch. Step 5: drive lines are formed vertically and horizontally on the convex portion at the constant pitch, and the switching elements of each vertical and horizontal column and each row are connected by wiring to the vertical and horizontal drive lines adjacent to these switching elements. The switching element and one pixel electrode adjacent to the switching element are connected by wiring. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the recess of the substrate or expose the pixel electrodes. Step 8: A reflective layer of a dielectric multilayer film that covers the one surface of the other side of the substrate, and a liquid crystal layer that covers the reflective layer.
A transparent electrode that covers the liquid crystal layer is formed. 9. A substrate having a constant shape formed of a concave portion having a constant depth and a convex portion surrounding the concave portion at a constant pitch vertically and horizontally, and formed on the concave portion for each constant shape. A pixel electrode of an impurity-doped semiconductor film that covers the recess, a switching element formed in each of the constant shapes in a portion of the film that overlaps the protrusion, and vertical and horizontal columns and rows of the switching element. Close,
Vertical and horizontal drive lines wired and connected to these switching elements, and a reflective layer of a dielectric multilayer film that covers the polished one side opposite to the one side of the substrate having the recess and the protrusion. A liquid crystal layer covering the reflective layer, a transparent electrode covering the liquid crystal layer, and a supporting substrate mounted on the switching element and the pixel electrode formed on the substrate via an adhesive substance. A liquid crystal display device provided. 10. A substrate provided with a constant shape vertically and horizontally at constant pitches, each of which comprises a concave portion having a constant depth and a convex portion surrounding the concave portion, and the concave portion formed for each constant shape. A pixel electrode of an impurity-doped semiconductor film that covers the concave portion, a switching element formed in the constant shape in the portion of the film that overlaps the convex portion, and a vertical and horizontal column and a proximity of the switching element in each row. did,
Vertical and horizontal drive lines wired to these switching elements and one surface of the substrate opposite to the one surface of the substrate provided with the concave portion and the convex portion and forming the same plane as the lower surface of the pixel electrode are covered. A reflective layer of a dielectric multilayer film, a liquid crystal layer that covers the reflective layer, a transparent electrode that covers the liquid crystal layer, and the switching element and the pixel electrode formed on the substrate, which are mounted via an adhesive material. Liquid crystal display device comprising: 11. A method of manufacturing a liquid crystal display device, which comprises performing the following steps. Step 1: Recesses having a constant depth are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: An impurity-doped semiconductor film is formed on the entire surface of one surface of the substrate. Step 3: The film is separated for each of the recesses to form a pixel electrode covering the recess. Step 4: A switching element is formed on a portion of the film, which overlaps the convex portion on the convex portion surrounding the concave portion of the substrate. Step 5: Drive lines are formed vertically and horizontally on the convex portion at the constant pitch, and the switching elements in each vertical and horizontal column and each row are wire-connected to the vertical and horizontal drive lines close to these switching elements. Step 6: A supporting substrate is mounted on the switching elements, the pixel electrodes, and the drive lines formed on the substrate via an adhesive material. Step 7: The other surface of the substrate is polished to reduce the plate thickness of the recess of the substrate or expose the pixel electrodes. Step 8: A reflective layer of a dielectric multilayer film that covers the one surface of the other side of the substrate, and a liquid crystal layer that covers the reflective layer.
A transparent electrode that covers the liquid crystal layer is formed. 12. The liquid crystal display device according to claim 1, claim 2, claim 5, claim 6, claim 9, or claim 10, wherein the substrate is provided between the substrate and the supporting substrate. A metal film or a semiconductor film doped with impurities, which is formed corresponding to each pixel electrode and is connected to each pixel electrode, and an insulating film formed on this film and connected to the transparent electrode. And a semiconductor film doped with impurities, the liquid crystal display device. 13. The liquid crystal display device according to claim 1, claim 2, claim 5, claim 6, claim 9, or claim 10, wherein the substrate is a glass substrate mixed with impurities. Characteristic liquid crystal display device. 14. A method of manufacturing a liquid crystal display device, which comprises performing the following steps. Step 1: Switching elements are formed vertically and horizontally on one surface of the substrate at a constant pitch. Step 2: drive lines are formed vertically and horizontally on the one surface of the substrate at the constant pitch, and land patterns are formed in the vicinity of the switching elements, and the vertical and horizontal columns and rows of the switching elements are provided with these switching elements. To the drive lines in the vertical and horizontal directions adjacent to the switching element and to connect the switching element and the land pattern in the vicinity thereof. Step 3: A supporting substrate is mounted on the switching element, the drive line, and the land pattern formed on the substrate via an adhesive material. Step 4: The other surface of the substrate is polished to reduce the thickness of the substrate. Step 5: Form a recess corresponding to each of the switching elements on the other surface of the substrate, and form a via hole reaching the land pattern in the recess or at an edge of the recess. Step 6: A metal film is formed on the entire area of the other surface of the substrate, and the film and the land pattern are connected. Step 7: The other surface of the substrate is polished to expose the other surface of the substrate, and the films in the recesses are separated to form pixel electrodes. Step 8: A liquid crystal layer that covers the one surface and a transparent electrode that covers the liquid crystal layer are formed on the other surface of the substrate.