JPH09110562A - Apparatus for producing metal-ceramic composite member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the mass-production of a metal-ceramic composite member at a low cost by using an apparatus for continuously supplying ceramic members, preheating and passing through a molten metal to effect the bonding with the metal and cooling the bonded member with a cooling roll. SOLUTION: A ceramic member 20 is continuously supplied by a transfer means 1. A guide-integrated die 9 is heated with preheaters 8, 8' and the ceramic member 20 in the die is preheated in the preheating zone 2. The ceramic member 20 is passed through a molten metal 13 in a crucible 12 in the bonding zone 3 to contact the molten metal 13 with the top and bottom faces of the ceramic member 20 and the applied molten metal is solidified by controlling the temperature with bonding heaters 14, 14' placed near twin rolls 21, 21', cooling water in a cooling pipe built in the twin rolls 21, 21' and water-cooled jackets 17, 17'. The metal-bonded ceramic member is cooled in the cooling zone 4 by a cooling means 18. The obtained metal-ceramic composite member is cut at the joint part of the ceramic member with a cutter 19 in the cutting zone 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a metal-ceramics composite member, which is particularly suitable for automobile parts, electronic parts and the like, and is a strong composite of oxide, nitride, carbide ceramics and metal. The present invention relates to a manufacturing apparatus for manufacturing a member.

[0002]

2. Description of the Related Art Metal-ceramics composite members that utilize the characteristics of ceramics such as chemical stability, high melting point, insulation, and hardness and the characteristics of metals such as high strength, high toughness, workability, and conductivity are known. Widely used in automobiles, electronic devices, etc.,
Typical examples thereof include rotors for automobile turbochargers, substrates and packages for mounting high-power electronic devices.

The main manufacturing methods of the above metal-ceramic composite member are adhesion, plating, metallization, thermal spraying,
Shrink fitting, cast iron, brazing and DBC methods are known, but in recent years, due to cost problems, alumina substrates have been used.
Most of the metal-ceramic composite members are manufactured by the BC method and brazing using an aluminum nitride substrate.

The applicant of the present invention directly
As a continuous device for joining aluminum as a metal plate, a device shown in Japanese Patent Application No. 7-26068 "Metal-ceramic composite member manufacturing apparatus" was proposed.

This apparatus comprises a conveying means for continuously supplying a ceramic member, a preheating section for preheating the conveyed ceramic member, and a preheated ceramic member which is passed through a molten metal in a crucible. The main parts are a joint part for joining metal to at least a part of the peripheral surface of the member, and a cooling part for gradually cooling the joined ceramic member to form a metal-ceramic composite member.

With this device, it is possible to obtain a large amount of ceramics composite members and obtain a considerable effect.
In the case of gradually cooling the joined ceramic members, since an integrated die having an inner surface having a tapered shape was used, there was a problem in that the dies were separated from each other.

[0007]

As described above, in the conventional method, the direct bonding method to the alumina substrate is as follows.
Although the DBC method of directly bonding a copper plate is known, a method of directly bonding aluminum has not been known until now.

The present invention aims to improve the apparatus previously filed by the present applicant as described above, and particularly when gradually cooling the ceramic members joined in the crucible, the cooling efficiency is increased,
It is an object of the present invention to provide a device capable of smoothly separating dies.

[0009]

Means for Solving the Problems The inventors of the present invention have conducted extensive studies to solve such problems, and as a result, as a means for gradually cooling a ceramics member joined in a crucible, a joint portion of a conventional integrated die is used. It was found that the cooling efficiency can be increased by twin rolls instead of the above, and the method of the present invention can be provided.

That is, the first aspect of the present invention is, in a metal-ceramic composite member manufacturing apparatus in which a metal is adhered to at least a part of a ceramic member, a conveying means for continuously supplying the ceramic member, and the conveying means. A preheating unit for preheating the ceramic member, and a cooling unit having a cooling roll for joining the metal to at least a part of the peripheral surface of the ceramic member by passing the preheated ceramic member through the molten metal in the crucible. Make up.

The roll is a rotating roll.

In the apparatus of the present invention, in order to continuously manufacture the metal-ceramic composite member, the molten metal must be continuously supplied and the temperature of the molten metal must be maintained at a constant temperature. In this case, as a method of supplying the molten metal, a method of supplying the molten metal melted in another melting furnace to the crucible in the apparatus of the present invention, heating and holding it at a predetermined bonding temperature as necessary, or a metal raw material Is stably supplied to the crucible in the apparatus of the present invention, melted in the crucible, and heated and held at a constant temperature, but in any case, a crucible and a heater for holding the molten metal. And are required.

If the ceramic member at room temperature is directly inserted into the molten metal, the ceramic member may be cracked by thermal shock. To prevent this, it is necessary to preheat the ceramic member. In this case, it is also possible to preheat the ceramic member in a separate heating device and supply the preheated member by using the carrying means of the device of the present invention.
Since there is a problem of safety inconvenience when carrying a heated member and a problem of thermal shock during transportation, in the case of the device of the present invention, the residual heat of the heater for heating the molten metal using the guide integrated die is used. A ceramic heater is preheated by using a heater in the guide-integrated die as well as using it.

One of the features of the apparatus of the present invention is how to remove the influence of the dirt layer such as oxides on the surface of the molten metal and to bring the ceramic member and the clean molten metal into contact with each other. In the invention, a method of inserting the ceramic member into the molten metal and moving the ceramic member in the molten metal to remove dirt adhering to the surface of the ceramic member when entering the molten metal is adopted.

Various means can be considered for moving the molten metal, but in the present invention, a guide is provided as shown in the embodiments described later, and the ceramic member is moved through the guide while being inserted into the molten metal. And

According to the present invention, as a method of forming a metal body at predetermined positions on the front and back surfaces of a ceramic member, a ceramic member wet with a molten metal is passed through a die and brought into contact with a cooling twin roll provided at a predetermined position. The molten metal is solidified to form a metal body having a predetermined shape.

In this case, it is preferable that the twin rolls be controlled to the solidification temperature of the metal by constantly cooling with water or an inert gas and heating with a heater in order to solidify the molten metal on the surface of the ceramic member.

In order to prevent high temperature oxidation of each material of the metal-guide integrated die used in the present invention, it is necessary to set a specific atmosphere inside the apparatus as necessary. Although the embodiment described below was performed in a nitrogen gas atmosphere, a similar effect can be obtained by using an inert gas such as argon or hydrogen gas, or a reducing gas, or a mixture of these gases.

The metal used in the present invention is aluminum, copper, iron, nickel, silver or gold, or an alloy containing these metals as main components, while the ceramic member is aluminum, silicon or the like. Examples include oxides, nitrides, and carbides.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a schematic view of the device of the present invention. In the apparatus of the present invention, the conveying means 1 for continuously supplying the ceramic members 20 one by one using the pinch roller 6 from the left side, the guide integrated die 9 and the preheating heater 8,
The preheating part 2 which preheats the ceramic member 20 in the die by heating at 8'and the molten metal heater 11 and 11 'which melts the metal in the crucible 12 forms the molten metal 13, and the molten metal 13
As the ceramic member 20 passes through the inside, the metal melt 13 is brought into contact with the front and back surfaces of the ceramic member 20, and the obtained ceramic member 20 is melted by the melt heater 1.
Bonding heaters 14 and 14 'arranged adjacent to the twin rolls 21 and 21' next to the rolls 11 and 11 'and twin rolls 21 and 21'
Cooling water 22,2 in cooling pipes 23,23 'incorporated in the
2'and a joint 3 for controlling the temperature with water cooling jackets 17 and 17 'to solidify the metal melt 13 in contact with each other,
The metal-ceramic composite member obtained as a post-process is used as a main component with a cooling unit 4 having a cooling means 18 for gradually cooling the ceramic member bonded with the metal for preventing the ceramic member 20 from cracking. And a shearing portion 5 having a cutter 19 that shears at the joint portion.

First, using the above apparatus, 36 mm × 112 mm
A 0.635 mm x alumina ceramic member was continuously conveyed to the preheating section 2 using the conveying means 1. in this case,
In the preheating section 2, heat is transferred to the entire guide section 15 by the preheating heaters 8 and 8 ′, so that water cooling jackets 7 and 7 ′ are provided at the inlets of the guide sections to keep the temperature below 100 ° C.

Next, the preheated ceramic member is
Aluminum was adhered to the front and back surfaces of the ceramic member 20 by passing through the molten aluminum inside the joint 3.
In this case, the inner diameter of the guide portion 15 of the integrated die is set to a shape through which the ceramic member 20 can pass, while the sectional shape of the integrated die 16 on the outlet side and the twin rolls 21 and 21 '.
As shown in FIG. 2, the minimum gap on the outer circumference of each of the above is made wider than the thickness of the ceramic member in the vertical direction.

In this case, aluminum as a metal is set in the crucible 12, the ceramic member 20 is put in from the entrance of the guide portion 15 of the integrated die, and its tip passes through the integrated guide die 16 and the twin roll 21. , 21 'are set so as to reach the joint portion, and then the crucible 12 is heated in a nitrogen gas (N ₂ ) atmosphere to melt the aluminum. The molten aluminum 13 passes through the integrated die 16 on the outlet side and enters the joint between the twin rolls 21 and 21 '. While flowing through this, the temperature of the tip portion falls below the melting point and the portion solidifies. To prevent the molten metal from flowing out.

The guide portion 1 of the integral die on the inlet side
The clearance is set to 0.2 mm or less so that the molten metal does not enter the gap between the No. 5 and the crucible 12 or the ceramic member 20. 75 molten aluminum
After being heated to 0 ° C., a ceramic member was continuously supplied from the inlet side, and the ceramic member sequentially entered the molten metal 13 and, after getting wet with the molten metal 13, entered the integrated die 16 on the outlet side, and then the twin rolls. It was continuously extruded from the outlet through the joint between 21 and 21 '.

In this case, the cooling pipe 2 through which the water 22, 22 'passes
By contacting the twin rolls 21 and 21 'pre-cooled with 3,23', aluminum is completely solidified on the front and back surfaces of the ceramic member, and both have a thickness of 0.5 mm.
As a result of the aluminum body, a composite substrate having high bonding strength could be obtained.

Another embodiment of the present invention will be described below.

36 mm × 5 in advance as a ceramic member
A plurality of 2 mm × 0.635 mm AlN substrates were prepared and passed through the molten aluminum in the same manner as in Example 1 to obtain a metal-ceramic composite member made of an aluminum-AlN member.

The metal-ceramics composite member obtained in the cooling section 4 was guided to the shearing section 5, and the aluminum in the joint portion of the ceramics composite member was cut by the cutter 19 to obtain a composite member having a predetermined shape.

[0029]

As described above, by using the apparatus of the present invention, molten metal can be continuously bonded to various ceramic members, and a predetermined metal-ceramic composite member can be manufactured inexpensively and in large quantities. It is an excellent continuous manufacturing device that can be used.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view of a metal-ceramic composite member manufacturing apparatus of the present invention.

FIG. 2 is a plan view showing a joining and solidifying means in the device of the present invention.

[Explanation of symbols]

 1 conveying means 2 preheating part 3 joining part 4 cooling part 5 shearing part 6 pinch roller 7 water cooling jacket 7'water cooling jacket 8 preheating heater 8'preheating heater 9 guide integrated die 11 molten metal heater 11 'molten metal heater 12 crucible 13 molten metal 14 joining Heater 14 'Bonding heater 15 Guide part of integrated die 16 Integrated die 17 Water cooling jacket 17' Water cooling jacket 18 Cooling means 19 Cutter 20 Ceramics member 21 Twin roll 21 'Twin roll 22 Cooling water 22' Cooling water 23 Cooling pipe 23 ' Cooling pipe

Claims (2)

[Claims] 1. In a manufacturing apparatus for a metal-ceramic composite member in which a metal is adhered to at least a part of a ceramic member, a conveying means for continuously supplying the ceramic member and a preheating section for preheating the conveyed ceramic member. And a cooling section having a cooling roll for joining the metal to at least a part of the peripheral surface of the ceramic member by passing the preheated ceramic member through the molten metal in the crucible. -Ceramics composite member manufacturing apparatus. 2. The apparatus for manufacturing a metal-ceramic composite member according to claim 1, wherein the roll is a rotating roll.