JPH0910715A - Cleaning method - Google Patents

Cleaning method

Info

Publication number
JPH0910715A
JPH0910715A JP16351695A JP16351695A JPH0910715A JP H0910715 A JPH0910715 A JP H0910715A JP 16351695 A JP16351695 A JP 16351695A JP 16351695 A JP16351695 A JP 16351695A JP H0910715 A JPH0910715 A JP H0910715A
Authority
JP
Japan
Prior art keywords
cleaning
hexamethylcyclotrisiloxane
article
foreign matter
cleaning agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP16351695A
Other languages
Japanese (ja)
Inventor
Yoshinobu Akimoto
佳伸 秋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP16351695A priority Critical patent/JPH0910715A/en
Publication of JPH0910715A publication Critical patent/JPH0910715A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE: To remove minute foreign matter and oil particles sticking to the surface of a commodity easily and in a short time. CONSTITUTION: A liquid- or gas-phase hexamethylcyclotrisiloxane is caused to adhere to the surface of a commodity, then the adhering hexamethylcyclotrisiloxane is coagulates at normal temperature and the coagulation is air-cleaned. when hexamethylcyclotrisiloxane is coagulated, the coagulation contains foreign matter sticking to the surface of a commodity as a nucleus, and can be easily blown off the surface of a commodity at the time of later air-cleaning. Hexamethylcyclotrisiloxane is coagulated in a shorter time than is water and at normal temperature, as the coagulation point of the former is at 64.5 deg.C, and also removes an oil stain, as the former is soluble in oil.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は極微細な異物の付着も許
されない物品を清浄に洗浄するための洗浄方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method for cleanly cleaning articles in which the attachment of extremely fine foreign matter is not permitted.

【0002】[0002]

【従来の技術】精密機器や医療分野の部品には、数10
μmないし数100μm程度の微細な異物が付着してい
ても、その洗浄度が不足のものもあり、厳密な洗浄処理
が必要となる。このような厳密な洗浄に対して、従来は
特開平5−104072号公報に記載された洗浄方法が
知られている。この洗浄は、物品の表面に水分を付着さ
せ、この付着させた水分を氷結し、常温でエア洗浄する
ものである。
2. Description of the Prior Art For precision equipment and parts in the medical field, there are several tens of thousands.
Even if a minute foreign substance of about μm to several hundreds of μm is attached, the degree of cleaning may be insufficient, and a strict cleaning process is required. For such strict cleaning, the cleaning method described in Japanese Patent Application Laid-Open No. 5-104072 is conventionally known. In this cleaning, moisture is attached to the surface of the article, the attached moisture is frozen, and air cleaning is performed at room temperature.

【0003】[0003]

【発明が解決しようとする課題】上述した洗浄方法は水
分を氷結することから、物品を水の凝固点温度である0
℃以下に冷却する必要がある。このため時間を要し、洗
浄から乾燥までの工程時間が長くなる。また、常温でエ
ア洗浄する際に、氷が一部溶解し、この溶解によって物
品表面に水シミが生じやすくなる。また、使用した水分
を回収の際に、氷の一部が溶解することで水が飛散して
しまい、氷あるいは水の回収率が低下する問題を有して
いる。さらに、水には油溶解性がないため、物品の表面
に不溶性の油汚れがある場合、異物は除去できても油汚
れは十分には除去できないものとなっている。。
Since the above-mentioned cleaning method freezes the water, the temperature of the article is 0, which is the freezing point of water.
It is necessary to cool below ℃. Therefore, it takes time, and the process time from cleaning to drying becomes long. Further, when air cleaning is performed at room temperature, some of the ice melts, and this melting easily causes water stains on the article surface. Further, when the used water is recovered, there is a problem that a part of the ice is melted and the water is scattered to reduce the recovery rate of the ice or the water. Further, since water has no oil solubility, when insoluble oil stains are present on the surface of an article, foreign matter can be removed but oil stains cannot be sufficiently removed. .

【0004】本発明はこのような従来技術の問題点を考
慮してなされたものであり、請求項1の目的は、液体状
のヘキサメチルシクロトリシロキサンを用いて、短時間
で、シミ残りがなく、微細な異物や油分を除去すること
ができる物品の洗浄方法を提供することにある。
The present invention has been made in view of the above problems of the prior art, and the object of claim 1 is to use liquid hexamethylcyclotrisiloxane to remove stains in a short time. It is another object of the present invention to provide a method for cleaning an article that can remove fine foreign matter and oil.

【0005】請求項2の目的は、気体状のヘキサメチル
シクロトリシロキサンを用いて同様な洗浄を可能とする
ことにある。
The object of claim 2 is to enable similar cleaning using gaseous hexamethylcyclotrisiloxane.

【0006】請求項3の目的は、請求項1又は2の洗浄
方法に加えて、洗浄剤を回収することによる洗浄コスト
の低下である。
The object of claim 3 is, in addition to the cleaning method of claim 1 or 2, to reduce the cleaning cost by recovering the cleaning agent.

【0007】[0007]

【課題を解決するための手段および作用】上記目的を達
成する請求項1の発明は、物品の表面に液体状のヘキサ
メチルシクロトリシロキサンを付着させ、付着したヘキ
サメチルシクロトリシロキサンを常温で凝固した後、エ
ア洗浄することを特徴とする。請求項2の発明は、物品
の表面に気体状のヘキサメチルシクロトリシロキサンを
付着させ、付着したヘキサメチルシクロトリシロキサン
を常温で凝固した後、エア洗浄することを特徴とする。
請求項3の発明は、凝固したヘキサメチルシクロトリシ
ロキサンを回収し、ヘキサメチルシクロトリシロキサン
を、再生して使用することを特徴とする。
Means for Solving the Problems and Actions In order to achieve the above object, the invention of claim 1 is characterized in that liquid hexamethylcyclotrisiloxane is adhered to the surface of an article and the adhered hexamethylcyclotrisiloxane is solidified at room temperature. After that, air cleaning is a feature. The invention of claim 2 is characterized in that gaseous hexamethylcyclotrisiloxane is adhered to the surface of the article, the adhered hexamethylcyclotrisiloxane is solidified at room temperature, and then air cleaning is performed.
The invention of claim 3 is characterized in that the solidified hexamethylcyclotrisiloxane is recovered and the hexamethylcyclotrisiloxane is regenerated and used.

【0008】請求項1の発明においては、物品の表面に
付着させた液体状のヘキサメチルシクロトリシロキサン
が凝固するとき、物品の表面に付着している異物を核と
して凝固し、異物をヘキサメチルシクロトリシロキサン
の結晶中に取り込むことができる。このときの異物の見
かけの大きさはヘキサメチルシクロトリシロキサンの結
晶の成長に対応して格段に大きくなる。したがって、そ
の後のエア洗浄の際に、物品の表面から簡単に吹き飛ば
すことができる。これにより、シミが残らない状態で除
去することが可能である。このヘキサメチルシクロトリ
シロキサンの凝固点は64.5℃であるので、水に比べ
て短時間で、しかも常温で固化させることができる。ま
たヘキサメチルシクロトリシロキサンは、水不溶性の油
に対し溶解性を有しているため、物品の表面に残留して
いる水不溶性の油汚れを溶解して除去することができ
る。
According to the first aspect of the present invention, when the liquid hexamethylcyclotrisiloxane attached to the surface of the article is solidified, the foreign matter attached to the surface of the article is solidified as a nucleus, and the foreign matter is hexamethyl. It can be incorporated into the crystals of cyclotrisiloxane. The apparent size of the foreign matter at this time becomes significantly large in accordance with the growth of hexamethylcyclotrisiloxane crystals. Therefore, it can be easily blown off from the surface of the article during the subsequent air cleaning. As a result, it is possible to remove the stain without leaving it. Since the freezing point of this hexamethylcyclotrisiloxane is 64.5 ° C., it can be solidified in a shorter time than water and at room temperature. Further, since hexamethylcyclotrisiloxane has solubility in water-insoluble oil, water-insoluble oil stains remaining on the surface of the article can be dissolved and removed.

【0009】請求項2の発明においては、ヘキサメチル
シクロトリシロキサンのベーパー雰囲気に物品を導入す
ることにより、物品の表面にヘキサメチルシクロトリシ
ロキサンのベーパーを凝結させ、物品の表面に満遍なく
ヘキサメチルシクロトリシロキサンを付着させることが
できる。このベーパーの凝結の際に、異物がヘキサメチ
ルシクロトリシロキサンの結晶中に取り込まれる確率を
一層高めることができる。ヘキサメチルシクロトリシロ
キサンの蒸気が凝結するときは、異物が核となる傾向が
あり、したがって、異物は凝固する以前に、確実に液滴
に取り込まれてしまうからである。この際、ヘキサメチ
ルシクロトリシロキサンは引火点が23℃であるため引
火の危険性があり、防爆条件下における洗浄が好まし
い。
In the second aspect of the present invention, the hexamethylcyclotrisiloxane vapor is condensed on the surface of the article by introducing the article into the hexamethylcyclotrisiloxane vapor atmosphere, and the hexamethylcyclotrisiloxane is evenly distributed on the surface of the article. Trisiloxane can be attached. It is possible to further increase the probability that foreign substances are taken into the crystals of hexamethylcyclotrisiloxane during the condensation of the vapor. This is because, when the vapor of hexamethylcyclotrisiloxane is condensed, the foreign matter tends to serve as a nucleus, so that the foreign matter is surely taken into the droplet before solidifying. At this time, hexamethylcyclotrisiloxane has a flash point of 23 ° C. and thus may be inflammable. Therefore, cleaning under explosion-proof conditions is preferable.

【0010】請求項3の発明では、エア洗浄の際に除去
されたヘキサメチルシクロトリシロキサンは、常温では
液化することがなく、これを利用して回収することがで
き、この回収したヘキサメチルシクロトリシロキサンを
再利用することで洗浄のランニングコストを低下させる
ことが可能となる。
According to the third aspect of the invention, the hexamethylcyclotrisiloxane removed during the air cleaning does not liquefy at room temperature and can be recovered using this, and the recovered hexamethylcyclotrisiloxane can be recovered. By reusing trisiloxane, it is possible to reduce the running cost of cleaning.

【0011】[0011]

【実施例】 (実施例1〜3)本実施例の洗浄に用いる物品として、
外径約10mm、長さ約20mmのアルミニウム製の円
柱形試料Xを用いた。この試料Xには、常温常湿で保存
した際の25μm以上のパーティクルが付着している。
図1は本実施例に用いる洗浄装置を示し、試料Xを直径
1mm、8mmピッチのステンレス製メッシュの洗浄か
ご1に20個ずつ収容し、試料Xに各洗浄剤を表1の処
理工程に示される方法で付着させ、その後、表1の処理
工程に示される方法で洗浄剤を凝固させた。この洗浄剤
が固化した後、圧力約4atmのイオン化され、洗浄液
の凝固点以上の温度に加熱されたクリーンエアを洗浄か
ご1の上部から、矢印Aで示すように供給した。洗浄か
ご1の下方にはフード2を配置してあり、エアにより除
去された洗浄剤を回収槽3に回収するようになってい
る。回収された洗浄剤は0.2μmのフィルターを用い
て循環させて、パーティクルの除去を行い再生した。
[Examples] (Examples 1 to 3) As articles used for cleaning in this example,
A cylindrical sample X made of aluminum having an outer diameter of about 10 mm and a length of about 20 mm was used. Particles of 25 μm or more are attached to the sample X when stored at room temperature and normal humidity.
FIG. 1 shows a cleaning apparatus used in this example, in which 20 pieces of sample X are housed in each cleaning basket 1 of stainless steel mesh having a diameter of 1 mm and a pitch of 8 mm, and each cleaning agent is shown in the treatment steps of Table 1 in sample X. Then, the cleaning agent was solidified by the method shown in the treatment step of Table 1. After the cleaning agent solidified, clean air heated to a temperature equal to or higher than the freezing point of the cleaning liquid, which had been ionized at a pressure of about 4 atm, was supplied from above the cleaning basket 1 as indicated by an arrow A. A hood 2 is arranged below the cleaning basket 1 so that the cleaning agent removed by air is recovered in the recovery tank 3. The collected cleaning agent was circulated through a 0.2 μm filter to remove particles and regenerated.

【0012】クリーンエアの供給により洗浄剤が除去さ
れた試料Xに対して、残存異物評価を行い、且つ洗浄剤
回収率を求めた。表2に洗浄結果を示す。
Residual foreign matter was evaluated on the sample X from which the cleaning agent was removed by supplying clean air, and the cleaning agent recovery rate was obtained. Table 2 shows the cleaning results.

【0013】表1より実施例1〜3は比較例1〜3に比
べて、高温での洗浄剤の固化が可能で、比較例のような
冷却装置の必要なく、設備が簡素化でき、設備的に有利
であることが判る。
From Table 1, Examples 1 to 3 can solidify the cleaning agent at a high temperature as compared with Comparative Examples 1 to 3 and can simplify the equipment without the need for a cooling device as in the Comparative Example. It turns out that it is advantageous.

【0014】表2より実施例1〜3は比較例1〜3に比
べて洗浄剤固化時間が著しく短いため、洗浄工程の合計
時間の短縮が可能で、また同等の洗浄力を有し、洗浄剤
回収率が優れていることが判る。
From Table 2, Examples 1 to 3 have a significantly shorter cleaning agent solidification time than Comparative Examples 1 to 3, so that the total time of the cleaning process can be shortened and the cleaning power is equivalent. It can be seen that the agent recovery rate is excellent.

【0015】また、回収された洗浄剤を用いて、試料X
を用いて表1に示される処理工程により同様の洗浄を行
ったところ、洗浄結果は表2と同等のものが得られた。
これより、回収した洗浄剤は再生して使用することが可
能となっている。
Further, using the collected cleaning agent, sample X
When the same washing was carried out by the treatment steps shown in Table 1 using the above, the washing results obtained were the same as those in Table 2.
As a result, the collected cleaning agent can be recycled and used.

【0016】[0016]

【表1】 [Table 1]

【0017】[0017]

【表2】 [Table 2]

【0018】なお、表2の「残存異物評価」欄における
「○」は200倍の光学顕微鏡で観察した結果、25μ
m以上の異物が認められないことを示す。また、同表の
「洗浄剤回収率」欄における数値は、(回収された洗浄
剤の重量)/(試料及び洗浄かごに付着した洗浄剤の重
量)×100によって算出した値である。
Incidentally, "○" in the "Residual foreign matter evaluation" column of Table 2 is 25 μm as a result of observation with a 200 × optical microscope.
It indicates that foreign matter of m or more is not recognized. In addition, the numerical value in the "cleaning agent recovery rate" column of the table is a value calculated by (weight of recovered cleaning agent) / (weight of cleaning agent attached to sample and cleaning basket) x 100.

【0019】(実施例4〜6)本実施例の洗浄に用いる
物品として、外径約10mm、長さ約20mmのアルミ
ニウム製の円柱形試料Xを用いた。この試料Xには、加
工した際の水不溶性の切削油とキリ粉、及び常温常湿で
保存した際の25μm以上のパーティクルが付着してい
る。
(Examples 4 to 6) As an article used for cleaning in this example, a cylindrical sample X made of aluminum having an outer diameter of about 10 mm and a length of about 20 mm was used. On this sample X, water-insoluble cutting oil and drill powder when processed, and particles of 25 μm or more when stored at room temperature and normal humidity are attached.

【0020】この試料Xを図1に示すように、直径1m
m、8mmピッチのステンレス製メッシュの洗浄かご1
に20個ずつ収容し、試料Xに各洗浄剤を表1の処理工
程に示される方法で付着させ、その後、表1の処理工程
に示される方法で洗浄剤を凝固させた。なお、同表にお
ける実施例1は実施例4に、実施例2は実施例5に、実
施例3は実施例6に相当し、比較例1は比較例4に、比
較例2は比較例5に、比較例3は比較例6に相当するも
のである。
As shown in FIG. 1, this sample X has a diameter of 1 m.
m, 8 mm pitch stainless steel mesh cleaning basket 1
Twenty of each of the cleaning agents were housed in the container, and each cleaning agent was attached to the sample X by the method shown in the processing step of Table 1, and then the cleaning agent was solidified by the method shown in the processing step of Table 1. In the table, Example 1 corresponds to Example 4, Example 2 corresponds to Example 5, Example 3 corresponds to Example 6, Comparative Example 1 is Comparative Example 4, and Comparative Example 2 is Comparative Example 5. Comparative Example 3 corresponds to Comparative Example 6.

【0021】この洗浄剤が固化した後、圧力約4atm
のイオン化され、洗浄液の凝固点以上の温度に加熱され
たクリーンエアを洗浄かご1の上部から、矢印Aで示す
ように供給した。洗浄かご1の下方にはフード2を配置
してあり、エアにより除去された洗浄剤を回収槽3に回
収するようになっている。回収された洗浄剤は0.2μ
mのフィルターを用いて循環させて、キリ粉とパーティ
クルの除去を行い再生した。
After the cleaning agent is solidified, the pressure is about 4 atm.
The clean air, which was ionized and heated to a temperature equal to or higher than the freezing point of the cleaning liquid, was supplied from the upper part of the cleaning basket 1 as shown by an arrow A. A hood 2 is arranged below the cleaning basket 1 so that the cleaning agent removed by air is recovered in the recovery tank 3. 0.2μ of collected cleaning agent
It was circulated using a filter of m to remove dust and particles and regenerated.

【0022】クリーンエアの供給により洗浄剤が除去さ
れた試料Xに対して、残存異物評価及び残存切削油評価
を行い、且つ洗浄剤の回収率を求めた。表3に洗浄結果
を示す。
For the sample X from which the cleaning agent had been removed by supplying clean air, residual foreign matter evaluation and residual cutting oil evaluation were performed, and the cleaning agent recovery rate was determined. Table 3 shows the cleaning results.

【0023】表3より実施例4〜6は、いずれも水では
洗浄できない不水溶性の切削油が試料に付着している場
合でも、良好な洗浄結果が得られるばかりでなく、比較
例4〜6に比べて洗浄工程の合計時間及び洗浄剤回収率
に優れていることが判る。
From Table 3, in Examples 4 to 6, not only good cleaning results are obtained even when the water-insoluble cutting oil that cannot be washed with water adheres to the sample. It can be seen that the total time of the cleaning process and the cleaning agent recovery rate are superior to those of No. 6.

【0024】ここで、試料を洗浄剤に浸漬する際の洗浄
槽の槽数及び洗浄時間は切削油の状態で適宜、設定する
ものである。また、洗浄手段としては、超音波洗浄、揺
動、噴流、浸漬等の適宜の手段を併用することができ
る。
Here, the number of cleaning tanks and the cleaning time when the sample is immersed in the cleaning agent are appropriately set depending on the state of the cutting oil. Further, as the cleaning means, suitable means such as ultrasonic cleaning, rocking, jetting, dipping and the like can be used in combination.

【0025】また試料に切削油が付着している場合、試
料に付着している洗浄剤を凝固させる際の洗浄剤の凝固
点が降下するため、容易に凝固ができなくなくなる。こ
のため試料の切削油を予め洗浄により除去することは、
洗浄剤を容易に凝固させるのに効果が大きい。
When the cutting oil adheres to the sample, the freezing point of the cleaning agent at the time of solidifying the cleaning agent adhering to the sample is lowered, so that the solidification cannot be easily performed. Therefore, removing the cutting oil of the sample by washing beforehand is
It is very effective in easily solidifying the cleaning agent.

【0026】本実施例においても、回収された洗浄剤を
用いて、試料Xに対して表1に示される処理工程により
同様の洗浄を行ったところ、洗浄結果は表3と同等のも
のが得られた。これより、回収した洗浄剤は再生して使
用しても充分に洗浄することができる。
Also in this example, when the sample X was subjected to the same cleaning process as shown in Table 1 using the recovered cleaning agent, the same cleaning results as in Table 3 were obtained. Was given. As a result, the recovered cleaning agent can be sufficiently washed even if it is regenerated and used.

【0027】[0027]

【表3】 [Table 3]

【0028】なお、表3における残存異物評価及び洗浄
剤回収率は表2と同様であり、「残存切削油評価」欄に
おける「○」は四塩化炭素抽出法で油分が認められなも
のを、「×」は同法で油分が認められたものを示す。
The residual foreign matter evaluation and cleaning agent recovery rate in Table 3 are the same as those in Table 2, and "○" in the "Residual cutting oil evaluation" column indicates that no oil content was recognized by the carbon tetrachloride extraction method, "X" indicates that oil was found by the same method.

【0029】[0029]

【発明の効果】請求項1の発明は、物品の表面に液体状
のヘキサメチルシクロトリシロキサンを付着させて凝固
し、その後、常温でエア洗浄することによって、物品の
表面の微細な異物が洗浄剤の結晶中に取り込まれ、洗浄
剤が部分的に融解すると同時に、容易に吹き飛ばすこと
ができる。また、ヘキサメチルシクロトリシロキサンは
油脂類に対する溶解性もあるため、油脂類も除去でき、
洗浄効果を大幅に向上させることができる。さらに、ヘ
キサメチルシクロトリシロキサンの凝固点は64.5℃
と水の凝固点(0℃)に比較して著しく高いため、凝固
させる際の工数も短くでき、しかも設備的にも有利とな
る。
According to the first aspect of the invention, liquid hexamethylcyclotrisiloxane is adhered to the surface of an article to solidify it, and then air cleaning is performed at room temperature to clean fine foreign matters on the surface of the article. It is taken into the crystal of the agent and the detergent is partially melted, and at the same time, it can be easily blown off. Hexamethylcyclotrisiloxane is also soluble in oils and fats, so oils and fats can also be removed,
The cleaning effect can be greatly improved. Furthermore, the freezing point of hexamethylcyclotrisiloxane is 64.5 ° C.
Since it is remarkably higher than the freezing point (0 ° C.) of water, the number of steps for solidifying can be shortened, and it is also advantageous in terms of equipment.

【0030】請求項2の発明は、物品をヘキサメチルシ
クロトリシロキサンのベーパー雰囲気に物品を導入する
ことにより、物品の表面に満遍なく洗浄剤を付着させる
ことができ、異物が洗浄剤の結晶中に取り込まれる確率
を高め、異物の除去力を高めるとができる。
According to the second aspect of the present invention, by introducing the article into the vapor atmosphere of hexamethylcyclotrisiloxane, the detergent can be evenly adhered to the surface of the article, and foreign matters are contained in the crystal of the detergent. It is possible to increase the probability of being taken in and increase the ability to remove foreign matter.

【0031】請求項3の発明は、ヘキサメチルシクロト
リシロキサンが水に比べて融解しにくいため、固体で回
収しやすく、水よりも回収効率が良くなる。
According to the third aspect of the invention, since hexamethylcyclotrisiloxane is less likely to melt than water, it can be easily recovered as a solid and the recovery efficiency is better than that of water.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の洗浄方法に用いられる洗浄装置の概念
図である。
FIG. 1 is a conceptual diagram of a cleaning device used in a cleaning method of the present invention.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 物品の表面に液体状のヘキサメチルシク
ロトリシロキサンを付着させ、付着したヘキサメチルシ
クロトリシロキサンを常温で凝固した後、エア洗浄する
ことを特徴とする物品の洗浄方法。
1. A method for cleaning an article, which comprises depositing liquid hexamethylcyclotrisiloxane on the surface of the article, solidifying the attached hexamethylcyclotrisiloxane at room temperature, and then performing air cleaning.
【請求項2】 物品の表面に気体状のヘキサメチルシク
ロトリシロキサンを付着させ、付着したヘキサメチルシ
クロトリシロキサンを常温で凝固した後、エア洗浄する
ことを特徴とする物品の洗浄方法。
2. A method for cleaning an article, comprising depositing gaseous hexamethylcyclotrisiloxane on the surface of the article, coagulating the attached hexamethylcyclotrisiloxane at room temperature, and then performing air cleaning.
【請求項3】 凝固した前記ヘキサメチルシクロトリシ
ロキサンを回収し、ヘキサメチルシクロトリシロキサン
を、再生して使用することを特徴とする請求項1又は2
記載の洗浄方法。
3. The hexamethylcyclotrisiloxane which is solidified is recovered and the hexamethylcyclotrisiloxane is regenerated and used.
The described cleaning method.
JP16351695A 1995-06-29 1995-06-29 Cleaning method Withdrawn JPH0910715A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16351695A JPH0910715A (en) 1995-06-29 1995-06-29 Cleaning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16351695A JPH0910715A (en) 1995-06-29 1995-06-29 Cleaning method

Publications (1)

Publication Number Publication Date
JPH0910715A true JPH0910715A (en) 1997-01-14

Family

ID=15775357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16351695A Withdrawn JPH0910715A (en) 1995-06-29 1995-06-29 Cleaning method

Country Status (1)

Country Link
JP (1) JPH0910715A (en)

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