JPH0893951A - Electric hydraulic valve - Google Patents

Electric hydraulic valve

Info

Publication number
JPH0893951A
JPH0893951A JP23299594A JP23299594A JPH0893951A JP H0893951 A JPH0893951 A JP H0893951A JP 23299594 A JP23299594 A JP 23299594A JP 23299594 A JP23299594 A JP 23299594A JP H0893951 A JPH0893951 A JP H0893951A
Authority
JP
Japan
Prior art keywords
valve
poppet valve
poppet
hydraulic
balance piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23299594A
Other languages
Japanese (ja)
Other versions
JP3174695B2 (en
Inventor
Tadashi Kususe
正 楠瀬
Etsuo Kunimoto
悦夫 國本
Noriyasu Arai
徳泰 新井
Tamiya Shirokibara
民也 白木原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP23299594A priority Critical patent/JP3174695B2/en
Publication of JPH0893951A publication Critical patent/JPH0893951A/en
Application granted granted Critical
Publication of JP3174695B2 publication Critical patent/JP3174695B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To provide an electric hydraulic valve for hydraulic driving actuator control which is operable with a small capacity hydraulic power source and can ensure the control precision equal to a spool type valve. CONSTITUTION: A poppet valve 2 for mutually connecting and disconnecting oil holes 11, 12 is pressed to a seat by a return spring 4. A balance piston 20 is provided between a rod 5 for transmitting the electromagnetic force of a force motor part 103 to open the poppet valve 2 and the poppet valve 2, and a balance chamber 21 situated on the poppet valve 2-side end of the balance piston 20 is connected to a tank drain. On the other hand, a hydraulic chamber 304 situated on the rod 5-side end of the balance piston 20 is connected to a hydraulic chamber 302 situated in the valve opening direction of the poppet valve 2 through a communicating passage 301. The piston area AN of the balance piston, the area A2 of the poppet valve 2, and the area A3 of the rod 5 are set to have the relation of A1= A2+A3, so that no hydraulic force is loaded to the force motor 103, and the poppet valve 2 can be thus precisely controlled by the electromagnetic force of the force motor.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は油圧シリンダ等の油圧駆
動アクチュエータの作動をコントロールする電気油圧弁
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrohydraulic valve for controlling the operation of a hydraulically driven actuator such as a hydraulic cylinder.

【0002】[0002]

【従来の技術】油圧シリンダ等の油圧駆動アクチュエー
タの作動をコントロールする電気油圧サーボ弁あるいは
比例制御弁は従来周知であるが、これらの油圧を切り替
える弁部はスプールタイプであった。これらの弁ではパ
イロット段のノズルフラッパで電流入力から変換された
油圧あるいはソレノイド又はフォースモータにより直接
スプールを駆動し弁作用をさせる。
2. Description of the Related Art An electro-hydraulic servo valve or a proportional control valve for controlling the operation of a hydraulically driven actuator such as a hydraulic cylinder is well known in the prior art, but the valve portion for switching these hydraulic pressures was a spool type. In these valves, the spool is directly driven by the hydraulic pressure converted from the current input by the nozzle flapper of the pilot stage or the solenoid or force motor to operate the valve.

【0003】[0003]

【発明が解決しようとする課題】図3には、従来のノズ
ルフラッパ式サーボ弁を示しているが、このサーボ弁で
はパイロット段にあるノズルで作動油が常時消費される
ため、それだけ油圧源の容量を大きくする必要がある。
さらにスプールでは油密が狭い隙間によるため若干の油
もれが発生する。
FIG. 3 shows a conventional nozzle flapper type servo valve. In this servo valve, since the hydraulic oil is constantly consumed by the nozzle in the pilot stage, the capacity of the hydraulic power source is correspondingly increased. Needs to be increased.
In addition, a slight oil leak occurs on the spool due to the narrow oil tight gap.

【0004】このため極端に油圧源が制限される状態の
下で使用される場合、例えば停電時に油圧ポンプが停止
した後もアキュムレータ内の油圧で作動を続けるような
装置の場合はアキュムレータ容量が大きくなり、スペー
ス、重量上の不具合がある。
For this reason, when the hydraulic power source is used under extremely limited conditions, for example, in the case of a device that continues to operate with the hydraulic pressure in the accumulator even after the hydraulic pump stops during a power failure, the accumulator capacity is large. There is a problem in space and weight.

【0005】本発明はポペット弁を使用し、小容量の油
圧源により作動可能で、スプール型式の弁と同等の制御
精度を確保でき、圧力による駆動電磁力への負荷力の変
化を無くした油圧駆動アクチュエータ制御用の電気油圧
弁を提供することを課題としている。
The present invention uses a poppet valve, can be operated by a small-capacity hydraulic power source, can ensure the control accuracy equivalent to that of a spool type valve, and eliminates the change of the load force to the driving electromagnetic force due to the pressure. An object is to provide an electrohydraulic valve for controlling a drive actuator.

【0006】[0006]

【課題を解決するための手段】本発明は、リターンスプ
リングによって閉方向に押圧されたポペット弁を有し、
同ポペット弁を電磁力により変位させて油路間の連通を
制御することにより油圧駆動アクチュエータの作動をコ
ントロールする電気油圧弁における前記課題を解決する
ため次の構成をもつ電気油圧弁を提供する。
SUMMARY OF THE INVENTION The present invention has a poppet valve which is pressed in a closing direction by a return spring,
An electrohydraulic valve having the following configuration is provided in order to solve the above problems in an electrohydraulic valve that controls the operation of a hydraulically driven actuator by displacing the poppet valve with an electromagnetic force to control communication between oil passages.

【0007】すなわち、本発明による電気油圧弁では、
ポペット弁は衝棒とバランスピストンをこの順に介して
電磁力により変位され、バランスピストンのポペット弁
側の一端はタンクドレンにつながり、バランスピストン
の衝棒側の他端はポペット弁の弁開方向の室と連絡され
ているとともにバランスピストンの面積がポペット弁と
衝棒の面積の和になっており、かつ、ポペット弁の変位
を測る変位計を備えた構成を採用する。
That is, in the electrohydraulic valve according to the present invention,
The poppet valve is displaced by electromagnetic force through the striking rod and the balance piston in this order, one end of the balance piston on the poppet valve side is connected to the tank drain, and the other end of the balance piston on the striking rod side is in the valve opening direction of the poppet valve. The structure is such that it is connected to the chamber, the area of the balance piston is the sum of the areas of the poppet valve and the striking rod, and a displacement gauge for measuring the displacement of the poppet valve is provided.

【0008】本発明による電気油圧弁でポペット弁を変
位させる電磁力としては、コイルに電流を流すことによ
りコイルの軸方向に力が発生するようにしてその電流の
強弱により発生する力を変化させるようにしたフォース
モータを使用するのが好ましい。
As the electromagnetic force for displacing the poppet valve by the electrohydraulic valve according to the present invention, a force is generated in the axial direction of the coil by passing a current through the coil, and the force generated by the strength of the current is changed. It is preferable to use a force motor so constructed.

【0009】[0009]

【作用】本発明による電気油圧弁では、ポペット弁と同
軸上にバランスピストンを配置し、ポペット弁を変位さ
せる電磁力を衝棒とバランスピストンを介してポペット
弁に伝え、かつ、バランスピストンの面積をポペット弁
と衝棒の面積の和になるように構成していて油圧力が打
ち消され、電磁力に対してはポペット弁のリターンスプ
リング力しか対向しないのでポペット弁は電磁力によっ
て精度良く、かつ、高速で動かすことが可能となる。
In the electrohydraulic valve according to the present invention, the balance piston is arranged coaxially with the poppet valve, the electromagnetic force for displacing the poppet valve is transmitted to the poppet valve through the impact rod and the balance piston, and the area of the balance piston is Is configured to be the sum of the areas of the poppet valve and the striking rod, the oil pressure is canceled, and only the return spring force of the poppet valve opposes the electromagnetic force, so the poppet valve is accurate by the electromagnetic force, and It becomes possible to move at high speed.

【0010】これにより本発明の電気油圧弁では弁開口
面積したがって流量の連続的な制御が可能となり、しか
も漏れが極小でスプール弁並に負荷圧の影響の無いバル
ブが達成できる。
As a result, in the electrohydraulic valve of the present invention, it is possible to continuously control the valve opening area and hence the flow rate, and further, it is possible to achieve a valve which has a minimal leakage and is not affected by load pressure as much as a spool valve.

【0011】[0011]

【実施例】以下、本発明による電気油圧弁を図1に示し
た一実施例により具体的に説明する。図1において、弁
本体部102と、電磁力を発生するフォースモータ部1
03は中間ピース部101を介して連結されている。1
04は電線のコネクタ部である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The electrohydraulic valve according to the present invention will be described in detail below with reference to the embodiment shown in FIG. In FIG. 1, a valve body 102 and a force motor unit 1 that generates an electromagnetic force.
03 are connected via the intermediate piece part 101. 1
Reference numeral 04 is an electric wire connector portion.

【0012】2はポペット、20はバランスピストン、
3はポペットハウジング、301はポペット2の外側の
油圧室302とポペット2の背面の油圧室304を結ぶ
ようポペットハウジング3内に形成された連絡通路であ
る。303はポペット2の内側の油圧室、4はポペット
2のリターンスプリング、21はポペット2とバランス
ピストン20で形成されるバランス室であり、タンクド
レンに連絡されている。
2 is a poppet, 20 is a balance piston,
3 is a poppet housing, and 301 is a communication passage formed in the poppet housing 3 so as to connect the hydraulic chamber 302 outside the poppet 2 and the hydraulic chamber 304 on the back surface of the poppet 2. Reference numeral 303 is a hydraulic chamber inside the poppet 2, 4 is a return spring of the poppet 2, 21 is a balance chamber formed by the poppet 2 and the balance piston 20, and is connected to the tank drain.

【0013】このようにバランスピストン20のポペッ
ト2側の端はタンクドレンに連絡され、バランスピスト
ン20の他端はポペット2の弁開方向の油圧室302と
連絡されている。ポペット2とバランスピストン20は
ポペットハウジング3に摺動可能に挿入され、ポペット
2の頭部でその着座時には油密が保持される。
As described above, the end of the balance piston 20 on the poppet 2 side is connected to the tank drain, and the other end of the balance piston 20 is connected to the hydraulic chamber 302 in the valve opening direction of the poppet 2. The poppet 2 and the balance piston 20 are slidably inserted into the poppet housing 3, and the head of the poppet 2 maintains oil tightness when seated.

【0014】5は衝棒で先端がバランスピストン20の
背面に当接される。501は衝棒案内で、衝棒5が油密
かつ摺動可能にはまっている。衝棒案内501は弁本体
部102と中間ピース部101間に配設されている。6
は後述のコイルコア701の支持案内部、7はそのコイ
ルコア701に巻かれたコイル、701はコイルコア、
702は通電線、8は磁石、9はばねでコイルコア70
1を右方に押すようになっている。10は差動変圧器の
コイル、10aは検出電線、1001は差動変圧器のコ
アでコイルコア支持案内部6に延長して取り付けられて
いる。
Reference numeral 5 is an impact rod, the tip of which is brought into contact with the back surface of the balance piston 20. 501 is an impact rod guide in which the impact rod 5 is oil-tight and slidable. The striking rod guide 501 is disposed between the valve body 102 and the intermediate piece 101. 6
Is a support guide portion of a coil core 701 described later, 7 is a coil wound around the coil core 701, 701 is a coil core,
702 is an electric wire, 8 is a magnet, and 9 is a spring, which is a coil core 70.
It is designed to push 1 to the right. Reference numeral 10 is a coil of a differential transformer, 10a is a detection wire, and 1001 is a core of the differential transformer, which is extended and attached to the coil core support guide portion 6.

【0015】11は油穴で油圧室302につながる。1
2も油穴で油圧室303につながる。13はドレン穴で
衝棒案内501とコイルコア支持案内部6間につながっ
ていて、衝棒5と衝棒案内501の間を通って油圧室3
04から漏れてくる油、及びバランスピストン20とポ
ペット2からバランス室21へ漏れて来る油を外部に排
出できる。ここでバランスピストン20のピストン面積
A1はポペット2の面積A2と衝棒5の面積A3の和と
なっている。
Reference numeral 11 is an oil hole connected to the hydraulic chamber 302. 1
2 is also connected to the hydraulic chamber 303 by an oil hole. Reference numeral 13 denotes a drain hole which is connected between the striking rod guide 501 and the coil core supporting and guiding portion 6 and passes between the striking rod 5 and the striking rod guide 501 to form the hydraulic chamber 3.
The oil leaking from 04 and the oil leaking from the balance piston 20 and the poppet 2 to the balance chamber 21 can be discharged to the outside. Here, the piston area A1 of the balance piston 20 is the sum of the area A2 of the poppet 2 and the area A3 of the impact rod 5.

【0016】図1に示した電気油圧弁は以上説明した構
成を有しておりその作動は次のとおりである。図1にお
いて本体フォースモータ部103は磁性材料であるた
め、磁石8によりコイル7を横断する磁束が発生する。
The electrohydraulic valve shown in FIG. 1 has the structure described above, and its operation is as follows. In FIG. 1, the main body force motor unit 103 is made of a magnetic material, so that a magnetic flux that crosses the coil 7 is generated by the magnet 8.

【0017】そこでコイル7に電流を流すとコイル7の
軸方向に力が発生するが、電流を右方向に力が発生する
方向に流すとこの力はコイルコア支持案内部6、衝棒
5、バランスピストン20を介してポペット2に伝達さ
れる。この力がリターンスプリング4の力に打ち勝つと
ポペット2はリフトし、油圧室302と303が、した
がって油穴11と12がつながり弁作用が行われる。
When a current is applied to the coil 7, a force is generated in the axial direction of the coil 7. When a current is applied in the right direction, the force is applied to the coil core support guide 6, the striking rod 5, the balance. It is transmitted to the poppet 2 via the piston 20. When this force overcomes the force of the return spring 4, the poppet 2 is lifted and the hydraulic chambers 302 and 303, and thus the oil holes 11 and 12 are connected and a valve action is performed.

【0018】この時、電流の強弱によりコイル7に発生
する力は変化するので、弁開度をコイル7に流す電流値
により変化できるが、実際の弁開度、すなわち弁変位
は、差動変圧器コイル10により検出されるので、適宜
のコントローラで弁開度の指令値と実際の弁開度を比較
してその偏差の大小により電流を強弱させ弁変位を指令
値に追従させる。つまり本弁は弁変位すなわち流量を連
続的に制御できる比例制御弁として作動する。
At this time, since the force generated in the coil 7 changes depending on the strength of the current, the valve opening can be changed depending on the value of the current flowing in the coil 7. However, the actual valve opening, that is, the valve displacement, can be changed by the differential transformation. Since it is detected by the controller coil 10, an appropriate controller compares the command value of the valve opening with the actual valve opening, and the current is made stronger or weaker according to the magnitude of the deviation so that the valve displacement follows the command value. That is, this valve operates as a proportional control valve capable of continuously controlling the valve displacement, that is, the flow rate.

【0019】ポペット2の弁作用において、バランスピ
ストン20のピストン面積A1、ポペット2の面積A
2、及び衝棒5の面積A3の関係は前記したように A1=A2+A3 の関係が成り立ち、バランス室21はドレン圧でほぼ零
なのでフォースモータに対し油圧力は働かず、フォース
モータの負荷はリターンスプリング4のみとなり、油圧
室303,302の圧力の大小の影響を受けない。この
ため、コイル7の力でポペット2を精度良くかつ高速に
動かすことが可能となる。
In the valve action of the poppet 2, the piston area A1 of the balance piston 20 and the area A of the poppet 2 are
2 and the area A3 of the striking rod 5 have the relationship of A1 = A2 + A3 as described above, and since the balance chamber 21 has almost zero drain pressure, the oil pressure does not work to the force motor and the load of the force motor returns. Only the spring 4 is provided and is not affected by the magnitude of the pressure in the hydraulic chambers 303, 302. Therefore, the poppet 2 can be moved accurately and at high speed by the force of the coil 7.

【0020】本弁はポペット形式であるため、閉弁時は
油圧室302と303間の漏れが殆ど無い。また、衝棒
5からドレン穴13及びポペット2、バランスピストン
20の摺動部を伝わってバランス室21への油の漏れは
存在するが、隙間が小さく摺動長さが長いので漏れは極
小である。
Since this valve is a poppet type, there is almost no leakage between the hydraulic chambers 302 and 303 when the valve is closed. Further, although there is oil leakage from the striking rod 5 to the balance chamber 21 through the drain hole 13, the poppet 2, and the sliding portion of the balance piston 20, there is a small gap and a long sliding length, so the leakage is minimal. is there.

【0021】ところで、ドレン穴13は衝棒5からの漏
れを外部に導くため作動油はコイル7に行かない。従っ
て、作動油の代りに水を作動液とする場合でもコイル7
の絶縁不良等の不具合は発生しない。なお、本体フォー
スモータ部103の内部に粘度の高い油を入れておくと
コイル7の制振に効果がある。以上のように本弁は漏れ
のない比例制御弁として作動する。
By the way, since the drain hole 13 guides the leakage from the striking rod 5 to the outside, the hydraulic oil does not go to the coil 7. Therefore, even when water is used as the hydraulic fluid instead of hydraulic oil, the coil 7
Insulation failure and other problems do not occur. It should be noted that putting high-viscosity oil inside the main body force motor section 103 is effective for damping the coil 7. As described above, this valve operates as a leak-free proportional control valve.

【0022】図2は本実施例による電気油圧弁を使った
油圧サーボシリンダのシステム図で、1と1’が図1の
弁、10,10’は図1の弁の作動変圧器コイルであ
る。Aは油圧シリンダでばねリターン式、Bは変位計で
油圧シリンダAの位置を計測できる。Cは周知のサーボ
コントローラで、第1の作用として指令値と変位計Bで
計測された実際のシリンダロッドの位置を比較して弁1
または弁1’を便宜開閉する電流指令をおくる。
FIG. 2 is a system diagram of a hydraulic servo cylinder using an electrohydraulic valve according to the present embodiment. Reference numerals 1 and 1'represent the valves of FIG. 1, and 10 and 10 'are the working transformer coils of the valves of FIG. . A is a hydraulic cylinder, which is a spring return type, and B is a displacement gauge, which can measure the position of the hydraulic cylinder A. C is a well-known servo controller, which compares the command value with the actual position of the cylinder rod measured by the displacement gauge B as a first action to make the valve 1
Alternatively, a current command to open / close the valve 1'for convenience is sent.

【0023】コントローラCの第2の作用として、前述
の弁開閉指令に対して、実際のポペット変位を差動変圧
器コイル10,10’で検出し指令と比較し、その偏差
に応じて電流を変化させる。以上の作用によって前述の
ように本弁を比例弁として作動させる。
As a second action of the controller C, the actual poppet displacement is detected by the differential transformer coils 10 and 10 'in response to the above-mentioned valve opening / closing command and compared with the command, and the current is changed according to the deviation. Change. With the above operation, this valve operates as a proportional valve as described above.

【0024】このように本発明になる弁2個を用いる
と、図2に示すように、本弁を比例制御弁として作動さ
せ、これにより油圧シリンダを任意にかつ漏れが少なく
駆動させることができる。
By using the two valves according to the present invention as described above, as shown in FIG. 2, the present valve can be operated as a proportional control valve, whereby the hydraulic cylinder can be driven arbitrarily and with little leakage. .

【0025】[0025]

【発明の効果】本発明による電気油圧弁はポペット弁を
使用しこれをフォースモータ等の電磁力で位置制御する
ため漏れを極小にできる。また、本発明による電気油圧
弁では、電磁力をポペットに伝える衝棒とポペットとの
間にバランスピストンを配置し、これによって電磁力に
対し油圧力が負荷とならないようピストン面積を選定し
ていて油圧力の平衡を完全に達成しているのでスプール
形式の弁と同等の連続的な制御精度を確保できる。
The electrohydraulic valve according to the present invention uses a poppet valve, and the position of the poppet valve is controlled by an electromagnetic force of a force motor or the like, so that leakage can be minimized. Further, in the electrohydraulic valve according to the present invention, the balance piston is arranged between the impact rod and the poppet for transmitting the electromagnetic force to the poppet, and the piston area is selected so that the hydraulic pressure does not become a load against the electromagnetic force. Since the balance of hydraulic pressure is completely achieved, the continuous control accuracy equivalent to that of the spool type valve can be secured.

【0026】以上により、油圧源の容量が小さくでき、
さらに極端に油圧源が制限される場合、例えば、停電時
に油圧源が停止した後もアキュムレータ内の油圧で作動
を続けるような装置の場合も性能を損なうことなく小さ
い容量のアキュムレータで作動させることができ、スペ
ース、重量上非常に有利になる。
From the above, the capacity of the hydraulic source can be reduced,
When the hydraulic power source is extremely limited, for example, even in the case of a device that continues to operate with the hydraulic pressure in the accumulator even after the hydraulic power source stops during a power failure, it is possible to operate with a small capacity accumulator without impairing the performance. This is very advantageous in terms of space and weight.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係わる電気油圧弁の構造
図。
FIG. 1 is a structural diagram of an electrohydraulic valve according to an embodiment of the present invention.

【図2】本発明の電気油圧弁を適用した油圧サーボシリ
ンダの油圧系統図。
FIG. 2 is a hydraulic system diagram of a hydraulic servo cylinder to which the electrohydraulic valve of the present invention is applied.

【図3】従来のノズルフラッパ型サーボ弁の断面図。FIG. 3 is a sectional view of a conventional nozzle flapper type servo valve.

【符号の説明】[Explanation of symbols]

1 弁本体 2 ポペット 4 リターンスプリング 5 衝棒 7 コイル 8 磁石 10 差動変圧器のコイル 20 バランスピストン 301 連絡通路 1001 差動変圧器のコア 1 Valve Main Body 2 Poppet 4 Return Spring 5 Impact Rod 7 Coil 8 Magnet 10 Differential Transformer Coil 20 Balance Piston 301 Communication Passage 1001 Differential Transformer Core

───────────────────────────────────────────────────── フロントページの続き (72)発明者 白木原 民也 広島県三原市糸崎町5007番地 三菱重工業 株式会社三原製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tamiya Shiraki 5007 Itozaki-cho, Mihara-shi, Hiroshima Mitsubishi Heavy Industries Ltd. Mihara Works

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 リターンスプリングによって閉方向に押
圧されたポペット弁を有し、同ポペット弁を電磁力によ
り変位させて油路間の連通を制御することにより油圧駆
動アクチュエータの作動をコントロールする電気油圧弁
において、前記ポペット弁は衝棒とバランスピストンを
この順に介して前記電磁力により変位され、前記バラン
スピストンの前記ポペット弁側の一端はタンクドレンに
つながり、前記バランスピストンの前記衝棒側の他端は
前記ポペット弁の弁開方向の室と連絡されているととも
に同バランスピストンの面積は前記ポペット弁と前記衝
棒の面積の和になっており、かつ、前記ポペット弁の変
位を測る変位計を有することを特徴とする電気油圧弁。
1. An electrohydraulic device having a poppet valve which is pressed in the closing direction by a return spring, and displacing the poppet valve by an electromagnetic force to control communication between oil passages to control the operation of a hydraulic drive actuator. In the valve, the poppet valve is displaced by the electromagnetic force through an impact rod and a balance piston in this order, one end of the balance piston on the poppet valve side is connected to a tank drain, and the other end of the balance piston on the impact rod side is connected. The end is connected to the chamber in the valve opening direction of the poppet valve, the area of the balance piston is the sum of the areas of the poppet valve and the striking rod, and a displacement meter for measuring the displacement of the poppet valve. An electrohydraulic valve characterized by having.
JP23299594A 1994-09-28 1994-09-28 Electric hydraulic valve Expired - Fee Related JP3174695B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23299594A JP3174695B2 (en) 1994-09-28 1994-09-28 Electric hydraulic valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23299594A JP3174695B2 (en) 1994-09-28 1994-09-28 Electric hydraulic valve

Publications (2)

Publication Number Publication Date
JPH0893951A true JPH0893951A (en) 1996-04-12
JP3174695B2 JP3174695B2 (en) 2001-06-11

Family

ID=16948158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23299594A Expired - Fee Related JP3174695B2 (en) 1994-09-28 1994-09-28 Electric hydraulic valve

Country Status (1)

Country Link
JP (1) JP3174695B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045257A1 (en) * 2003-11-07 2005-05-19 Japan Science And Technology Agency Actuator using fluid cylinder, method of controlling the actuator, and choke valve devices

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045257A1 (en) * 2003-11-07 2005-05-19 Japan Science And Technology Agency Actuator using fluid cylinder, method of controlling the actuator, and choke valve devices
JPWO2005045257A1 (en) * 2003-11-07 2007-05-17 独立行政法人科学技術振興機構 Actuator using fluid cylinder, control method therefor, and choke valve device
US7392734B2 (en) 2003-11-07 2008-07-01 Japan Science And Technology Agency Actuator using fluid cylinder, method of controlling the actuator, and choke valve devices
JP4741950B2 (en) * 2003-11-07 2011-08-10 独立行政法人科学技術振興機構 Actuator using fluid cylinder, control method thereof, and choke valve device

Also Published As

Publication number Publication date
JP3174695B2 (en) 2001-06-11

Similar Documents

Publication Publication Date Title
CA1074663A (en) Electro-hydraulic proportional control servo valve
CA2307406C (en) Pilot solenoid control valve with pressure responsive diaphragm
KR100292544B1 (en) Pilot solenoid control valve and hydraulic control system using same
US4175589A (en) Fluid pressure drive device
MXPA00009798A (en) Electrically operated pressure control valve.
EP0953776B1 (en) Solenoid operated dual spool control valve
JP2744004B2 (en) Hydraulic pressure control device
EP0411808B1 (en) Logic valve
JP3556860B2 (en) Fluid pressure actuator control device
JPH05263804A (en) Hydraulic control system
US11274752B2 (en) Flow control valve with load-sense signal generation
JP3174695B2 (en) Electric hydraulic valve
JP3600936B2 (en) Valve devices, especially proportional and directional valves
CA2463620C (en) Auto-relieving pressure modulating valve
US4561628A (en) Electromagnetically operated hydraulic actuator
JPH06173907A (en) Electric hydraulic valve
JP2000283109A (en) Actuator controller
JPH0423125B2 (en)
JPH049487Y2 (en)
JP3240454B2 (en) Pressure control valve
JP7369519B2 (en) Solenoid proportional valve and directional valve
JP2664534B2 (en) Position / force control device of actuator for shield moat machine
JP2564086Y2 (en) Operation control device
JPH0542294Y2 (en)
JP2000320703A (en) Valve device

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20010306

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080330

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090330

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100330

Year of fee payment: 9

LAPS Cancellation because of no payment of annual fees