JPH0893448A - Gas filter and manufacture thereof - Google Patents

Gas filter and manufacture thereof

Info

Publication number
JPH0893448A
JPH0893448A JP6256276A JP25627694A JPH0893448A JP H0893448 A JPH0893448 A JP H0893448A JP 6256276 A JP6256276 A JP 6256276A JP 25627694 A JP25627694 A JP 25627694A JP H0893448 A JPH0893448 A JP H0893448A
Authority
JP
Japan
Prior art keywords
filter
composition
sintered body
sheet
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6256276A
Other languages
Japanese (ja)
Inventor
Kiyoshi Tachikawa
清 立川
Hideki Nakamura
秀樹 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP6256276A priority Critical patent/JPH0893448A/en
Publication of JPH0893448A publication Critical patent/JPH0893448A/en
Pending legal-status Critical Current

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  • Processes For Solid Components From Exhaust (AREA)
  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Powder Metallurgy (AREA)

Abstract

PURPOSE: To have an opening hole part hardly closed, and collect fine particles on a sufficient surface area by forming a gas filter with a sheet shaped sintered body on which a plurality of penetrating holes are formed from an outside supplementally. CONSTITUTION: A filter which is formed of a sheet shaped sintered body 1 on which several penetrating holes 4 are formed from an outside supplementally is used as the filter which is formed in such constitution that sufficient surface area is obtained and also closing of the filter is hardly generated, in order to collect soot included in exhaust gas of an internal combustion engine and fine particle (particulate) of several μm and less of hydrocarbon system. More preferably, the sheet shaped sintered bodies 1 are used by being laminated in a layer shape. Such a gas filter is manufactured in such a way that composition 2 including sintered powder and binder is formed in a sheet shape, a plurality of penetrating holes 4 are formed on the composition 2 by penetrating means 3 for forming the penetrating holes 4 on a surface, and then the composition 2 is sintered.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はガス中に含まれる微粒子
を捕獲するフィルタに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter for trapping fine particles contained in gas.

【0002】[0002]

【従来の技術】例えば、内燃機関の排ガスには煤や炭化
水素系の数μm以下の微粒子が含まれている。この微粒
子は通常パティキュレートと呼ばれている。このパティ
キュレートは特にディーゼルエンジンの排ガス中に多
く、通常のガソリンエンジンで使用するNOx分解の触
媒の使用を妨げてきた。そのため、ディーゼルエンジン
のガスに対して、NOx分解のための触媒を適用するた
めには、ガスが触媒に接する前でパティキュレートを補
足するフィルタが必要になっている。このようなフィル
タとしては、従来は、特開平5−141218号公報に
記載されるような金属網によるフィルタが用いられてい
た。
2. Description of the Related Art For example, exhaust gas from an internal combustion engine contains soot and hydrocarbon-based particles of several μm or less. These fine particles are usually called particulates. This particulate matter is especially abundant in the exhaust gas of diesel engines, and has hindered the use of NOx decomposition catalysts used in ordinary gasoline engines. Therefore, in order to apply a catalyst for NOx decomposition to the gas of a diesel engine, a filter that traps particulates before the gas contacts the catalyst is required. As such a filter, a filter based on a metal mesh as described in Japanese Patent Application Laid-Open No. 5-141218 has heretofore been used.

【0003】最近では、さらに高性能なフィルタが要求
されることから、特開昭61−53716号公報に記載
されるような多孔質の焼結体によるフィルタなどが開発
されている。また、特開平5−245317号公報に記
載されるような金属網にセラミックスや金属を焼結させ
てフィルタ層を構成したものが知られている。
Recently, since a filter with higher performance is required, a filter made of a porous sintered body as described in JP-A-61-53716 has been developed. Further, there is known a filter layer formed by sintering ceramics or metal in a metal net as described in JP-A-5-245317.

【0004】[0004]

【発明が解決しようとする課題】上述した、多孔質のセ
ラミックスのフィルタや焼結体の層を有するフィルタ
は、パティキュレートを捕獲するという目的に対しては
優れているが、炭化水素系の粘度の高いパティキュレー
トを捕獲した場合には、フィルタの開孔部が閉塞しやす
く、条件によってはフィルタ寿命が著しく低下するとい
う問題があった。
The above-mentioned porous ceramics filter and a filter having a layer of a sintered body are excellent in the purpose of trapping particulates, but the viscosity of hydrocarbons is high. When the high particulate matter is captured, there is a problem that the opening portion of the filter is likely to be closed and the filter life is significantly reduced depending on the conditions.

【0005】また、金属網によるフィルタでは、パティ
キュレート等の微粒子を捕獲するためには極めて細い細
線に加工して網目を細かいものとしなければならずコス
トが高くなってしまうこと、および特開昭61−531
76号公報に記載されるようにパティキュレートを捕獲
するのには表面積を高めることが有効であるが、単純な
金属網では、多孔質の焼結体に比べて表面積が大きくで
きないという問題がある。
Further, in the case of a filter using a metal mesh, in order to capture particulates such as particulates, it is necessary to process the wire into an extremely fine wire to make the mesh fine, which increases the cost. 61-531
As described in Japanese Patent Publication No. 76-76, it is effective to increase the surface area in order to capture particulates, but a simple metal net has a problem that the surface area cannot be increased as compared with a porous sintered body. .

【0006】本発明の目的は、上記問題に鑑み、開孔部
が閉塞されにくく、しかも微粒子を捕獲するために十分
な表面積を有するガス用フィルタを提供することであ
る。
In view of the above-mentioned problems, an object of the present invention is to provide a gas filter which is difficult to close the openings and has a surface area sufficient for capturing fine particles.

【0007】[0007]

【課題を解決するための手段】本発明者は、微粒子の捕
獲のために十分な表面積を得るとともに、閉塞が起こり
難い構造のフィルタを研究し、単純な焼結体層ではな
く、貫通穴を形成した焼結体とすることにより、焼結体
による吸着表面積の多い表面に加えて、閉塞の問題の少
ないフィルタを得ることができることを見いだし本発明
に到達した。
The present inventor has studied a filter having a structure in which a sufficient surface area for trapping fine particles is obtained and clogging is unlikely to occur, and a through hole is formed instead of a simple sintered body layer. It was found that the formed sintered body makes it possible to obtain a filter having less clogging problems in addition to a surface having a large adsorption surface area due to the sintered body.

【0008】すなわち本発明は、数個の貫通穴を外部か
ら付加的に形成したシート状焼結体でなることを特徴と
するガス用フィルタである。また好ましくは、前記シー
ト状焼結体を層状に積層してなることを特徴とするガス
用フィルタである。
That is, the present invention is a gas filter characterized by comprising a sheet-shaped sintered body in which several through holes are additionally formed from the outside. Further, preferably, the gas filter is characterized in that the sheet-shaped sintered body is laminated in layers.

【0009】また本発明の製造方法は、上述した本発明
のガス用フィルタを得るための製造方法であり、焼結さ
れる粉末とバインダーとを含有する組成物をシート形状
に成形し、次いで表面に貫通孔を形成するための貫通手
段によって前記組成物に複数の貫通穴を形成した後、該
組成物を焼結することを特徴とするものである。
The production method of the present invention is a production method for obtaining the above-described gas filter of the present invention, in which a composition containing a powder to be sintered and a binder is formed into a sheet shape, and then the surface is formed. After the plurality of through holes are formed in the composition by a penetrating means for forming a through hole in the composition, the composition is sintered.

【0010】[0010]

【作用】本発明の最大の特徴の一つは、単純な焼結体層
ではなく、貫通孔を有する焼結体としたことである。す
なわち、本発明のフィルタは、焼結で形成される極めて
小さい微細孔と、通常は機械的な手段で外部から付加的
に貫通させた相対的に大きい細孔との少なくとも2種の
大きさの孔を有する。これにより、ガス中の微小なパテ
ィキュレートは、上記の相対的に大きい細孔(貫通孔)
は、通過するものの、その周辺の多孔質焼結体自身で捕
捉されることになる。ガス中の大きなパティキュレート
は、上記の貫通孔でも捕捉される。貫通孔は、焼結体の
多孔質の孔の大きさに比較して大きいので目詰り(閉
塞)を防止できるという効果がある。上述した従来の金
属網では、パティキュレート等の微粒子を捕獲するため
には、金属の細線径を極めて細くする必要があり、コス
トが高いという問題や、排ガス等の高温の酸化雰囲気で
使用するのに適したFe−Cr−Al鋼などの酸化膜を
形成する合金では加工が難しく網目の小さい金網を得る
ということは難しい。
One of the greatest features of the present invention is that the sintered body has through holes instead of a simple sintered body layer. That is, the filter of the present invention has at least two sizes, that is, extremely small pores formed by sintering and relatively large pores additionally penetrated from the outside by a mechanical means. Has holes. As a result, the minute particulates in the gas are generated in the above-mentioned relatively large pores (through holes).
Will pass through, but will be captured by the porous sintered body itself around it. Large particulates in the gas are also captured in the above through holes. Since the through holes are larger than the size of the porous holes of the sintered body, there is an effect that clogging (blockage) can be prevented. In the above-mentioned conventional metal net, in order to capture fine particles such as particulates, it is necessary to make the fine wire diameter of the metal extremely thin, which causes a problem of high cost and use in a high temperature oxidizing atmosphere such as exhaust gas. It is difficult to work with an alloy that forms an oxide film, such as Fe-Cr-Al steel, which is suitable for the above, and it is difficult to obtain a wire mesh with a small mesh.

【0011】これに対して、本発明によれば焼結体その
ものに貫通穴を形成することで、フィルタを形成するた
め、細線への加工の困難性は無い。また、本発明の貫通
穴は、焼結前の組成物、いわゆるグリーン体の状態でも
機械的に形成することができるため、焼結によって強度
の低い多孔質体に制御する必要はなく、強度が高く、フ
レキシブルなフィルタを構成することが可能である。こ
れは、金属網のフィルタの如く、筒状に巻き回したり、
折り込んだりして多層のフィルタ層を構成するのに都合
が良い。なお、フィルタの厚さが厚くなりすぎると、曲
げ加工しにくくなるので、フィルタの厚さは300μm
以下が望ましい。また、本発明のフィルタは焼結体で構
成されるため、表面を多孔質とすることができ、極めて
高い表面積を有するものとなる。したがって、パティキ
ュレート等を単なる開孔径の差によって捕獲するだけで
なく、表面への吸着により捕獲することが可能である。
On the other hand, according to the present invention, since the filter is formed by forming the through hole in the sintered body itself, there is no difficulty in processing into a fine wire. Further, since the through hole of the present invention can be mechanically formed even in the state of a composition before sintering, that is, a so-called green body, it is not necessary to control the porous body to have a low strength by sintering, and the strength can be improved. It is possible to construct a high and flexible filter. It can be wound into a cylinder like a metal mesh filter,
It is convenient to fold or construct a multilayer filter layer. If the thickness of the filter is too thick, bending processing becomes difficult, so the thickness of the filter is 300 μm.
The following is desirable. Further, since the filter of the present invention is made of a sintered body, the surface can be made porous and has an extremely high surface area. Therefore, it is possible not only to trap the particulates and the like merely by the difference in the opening diameter, but also to trap them by adsorption on the surface.

【0012】また、本発明の製造方法で規定する貫通手
段としては、例えば剣山の如き、針体の集合体や、表面
に突起を複数個有するローラ等を用いることができる。
通常の穴あけの方法は、これらの貫通手段を粉末とバイ
ンダーとを含有するシート状の組成物に押し付ければ、
組成物に容易に貫通穴を形成することが可能である。逆
にシート状の組成物を針体の集合体や細い突起を有する
ローラに押し付けても組成物に貫通穴は形成でき、シー
ト状組成物と貫通手段の動きは相対的なものであり、都
合の良い動きを採用すればよい。焼結体となった後は、
金属薄板と同様の取扱となり、微細な貫通穴を形成する
のは難しくなる。したがって、上述した焼結前の組成物
の状態で貫通穴を形成することが有効である。
As the penetrating means defined in the manufacturing method of the present invention, an aggregate of needles such as Kenzan, a roller having a plurality of protrusions on the surface, and the like can be used.
Ordinary drilling method, by pressing these penetrating means to a sheet-shaped composition containing a powder and a binder,
Through holes can be easily formed in the composition. Conversely, even if the sheet-shaped composition is pressed against an aggregate of needles or a roller having thin protrusions, a through hole can be formed in the composition, and the movement of the sheet-shaped composition and the penetrating means is relative. You should adopt the good movement of. After becoming a sintered body,
It will be handled in the same way as a thin metal plate, and it will be difficult to form minute through holes. Therefore, it is effective to form the through holes in the state of the composition before sintering described above.

【0013】本発明の焼結する粉末としては排ガス等の
腐食環境を考慮し、ステンレス鋼が好ましい。特に好ま
しくは、排ガスによる熱疲労損傷を低減するためには、
熱膨張係数が低いことが好ましく、オーステナイト系ス
テンレス鋼よりも熱膨張率の低いフェライト系ステンレ
ス鋼が好ましい。本発明に使用する代表的な鋼の粉末と
しては、SUS430,SUS429,SUS434な
どのフェライト系ステンレスの他、耐食性が必要な場合
にはSUS304,SUS316,SUS347,SU
SXM7などのオーステナイト系ステンレス、さらに強
度も必要な場合には、SUS410、SUS416、S
US420J1,J2、SUS440Cなどを使用する
ことが可能である。最も好ましいのは、耐熱性に優れた
JIS FCH1、FCH2などのFe−Cr−Al鋼
である。
As the powder to be sintered according to the present invention, stainless steel is preferable in consideration of corrosive environment such as exhaust gas. Particularly preferably, in order to reduce thermal fatigue damage due to exhaust gas,
A low coefficient of thermal expansion is preferable, and a ferritic stainless steel having a lower coefficient of thermal expansion than an austenitic stainless steel is preferable. Typical steel powders used in the present invention include ferritic stainless steels such as SUS430, SUS429, and SUS434, and SUS304, SUS316, SUS347, SU when corrosion resistance is required.
Austenitic stainless steel such as SXM7, SUS410, SUS416, S when strength is also required
US420J1, J2, SUS440C, etc. can be used. Most preferable are Fe-Cr-Al steels such as JIS FCH1 and FCH2 which have excellent heat resistance.

【0014】本発明において、粉末原料としてFe−C
r−Al鋼が好ましい理由は次の通りである。CrはC
23系を主体とする酸化膜を形成するが、さらに耐熱
性を確保するには被膜の保護性と密着性に優れたAl2
3の酸化膜を形成するAlの添加が有効である。好ま
しいCr量は、15−30%であり、より好ましくは1
8−28%である。また、Alは熱膨張係数を増加する
元素であり、熱疲労損傷を防ぐためには少ない方が良
く、耐酸化性の点からは高い方が良い。好ましいAl量
は2−12%である。本発明では合金粉末として使用す
るため、Al量の増加による冷間加工性の劣化が問題と
ならないため、5%以上のAlの添加が可能である。よ
り好ましい範囲は5−9%である。
In the present invention, Fe-C is used as the powder raw material.
The reason why r-Al steel is preferable is as follows. Cr is C
An oxide film mainly composed of r 2 O 3 is formed, but in order to further secure heat resistance, Al 2 which has excellent film protection and adhesion
It is effective to add Al to form an oxide film of O 3 . The preferable amount of Cr is 15-30%, and more preferably 1
It is 8-28%. In addition, Al is an element that increases the thermal expansion coefficient, and it is preferable that the amount is small in order to prevent thermal fatigue damage, and the higher is preferable from the viewpoint of oxidation resistance. The preferred amount of Al is 2-12%. In the present invention, since it is used as an alloy powder, deterioration of cold workability due to an increase in the amount of Al does not pose a problem, so 5% or more of Al can be added. A more preferable range is 5-9%.

【0015】本発明においては上述のFe−Cr−Al
鋼だけでなく、この合金系に被膜の密着性を高めて耐熱
性を更に高める常套手段としてY、Scを含む希土類元
素、代表的にはLa,Ceが添加できるのは言うまでも
ない。希土類元素の過剰添加は、粒界に酸化物を生じ酸
素のパスを形成して、酸化を助長することになるため
0.1%以下が望ましい。また、合金系として、耐熱性
に優れたInconel 600,Inconel 601,Inconel 690,ハステ
ロイ X等のNi基の耐熱合金の使用も可能である。
In the present invention, the above-mentioned Fe-Cr-Al is used.
It goes without saying that not only steel but also rare earth elements including Y and Sc, typically La and Ce, can be added to this alloy system as a conventional means for enhancing the adhesion of the coating and further improving the heat resistance. Excessive addition of a rare earth element forms an oxide at the grain boundary to form a path for oxygen and promotes oxidation, so 0.1% or less is desirable. Further, as the alloy system, it is possible to use Ni-based heat-resistant alloys such as Inconel 600, Inconel 601, Inconel 690, and Hastelloy X, which have excellent heat resistance.

【0016】[0016]

【実施例】まず、表1に示す組成であり、平均粒径5μ
mに調整した原料粉末を準備した。この原料粉末にステ
アリン酸0.84vol%、水10vol%、グリセリ
ン0.84vol%を添加して、ヘンシェルミキサーで
混合した。得られた混合体をロール間隙に通すことによ
り、シート状の組成物を得た。このシート状組成物2に
対して、図2に示す剣山の如く針状の突起を複数有する
貫通手段3を押し当て、貫通孔4を形成した。その後、
得られた組成物を1350℃×2時間、10マイナス3
乗Torr下の真空中で焼結を行ないシート状焼結体1でな
るフィルタを得た。
EXAMPLES First, the composition is shown in Table 1, and the average particle size is 5 μm.
A raw material powder adjusted to m was prepared. To this raw material powder, 0.84 vol% stearic acid, 10 vol% water, and 0.84 vol% glycerin were added and mixed with a Henschel mixer. The sheet-like composition was obtained by passing the obtained mixture through a roll gap. A penetrating means 3 having a plurality of needle-like protrusions like a sword mountain shown in FIG. 2 was pressed against the sheet-shaped composition 2 to form a penetrating hole 4. afterwards,
The obtained composition was treated at 1350 ° C. for 2 hours, 10 minus 3
Sintering was performed in a vacuum under a square Torr to obtain a sheet-shaped sintered body 1.

【0017】[0017]

【表1】 [Table 1]

【0018】表2に、得られたフィルタの平均の厚さ、
貫通孔の平均の開孔径の測定結果、ならびにJIS Z
2248で規定される90度曲げ試験結果、600℃×
10時間および1000℃×10時間の大気中加熱を行
い耐酸化性を酸化増量として評価した結果を示した。な
お酸化増量の評価は、シート状焼結体の外寸法を厚さの
ない平板と仮定したときの表面積に対する重量の増加分
で評価した。
Table 2 shows the average thickness of the obtained filters,
Measurement result of average aperture diameter of through-hole, and JIS Z
90 ° bending test result specified by 2248, 600 ° C ×
The results obtained by heating in the atmosphere for 10 hours and at 1000 ° C. for 10 hours and evaluating the oxidation resistance as the oxidation weight increase are shown. The increase in oxidation was evaluated by the increase in weight with respect to the surface area when the outer dimension of the sheet-shaped sintered body was assumed to be a flat plate having no thickness.

【0019】[0019]

【表2】 [Table 2]

【0020】本発明の典型的なガス用フィルタの表面ミ
クロ焼結組織写真を図1に示す。図1を見ると明らかな
ように、本発明のガス用フィルタの表面は多孔質であ
り、大きな表面積が確保できていることがわかる。ま
た、貫通手段によって形成された貫通孔は焼結により貫
通孔内壁も多孔質の表面となり、微粒子の捕獲に有効な
表面が形成されたことがわかる。
A photograph of the surface micro-sintered structure of a typical gas filter of the present invention is shown in FIG. As is clear from FIG. 1, it is understood that the surface of the gas filter of the present invention is porous and a large surface area can be secured. Further, it can be seen that the through hole formed by the through means has a porous surface on the inner wall of the through hole due to sintering, and a surface effective for capturing fine particles is formed.

【0021】また表2に示すように本発明の試料のう
ち、Fe−Cr−Al系合金粉末を使用した試料No.
1〜7は1000℃の耐酸化性試験において、市販のス
テンレス粉末を使用した試料No.8および9に比べて
酸化増量が少なく、耐酸化性という点で優れていること
がわかる。また本発明の試料はいずれも90度曲げ試験
は、破損とならず良好であったことから、筒状に多層に
巻いて多層フィルタに使用することができることがわか
る。
Further, as shown in Table 2, among the samples of the present invention, sample No. using Fe-Cr-Al alloy powder was used.
Sample Nos. 1 to 7 in the oxidation resistance test at 1000 ° C. used commercially available stainless steel powder. It can be seen that compared with Nos. 8 and 9, the increase in the amount of oxidation is small and the oxidation resistance is excellent. In addition, all the samples of the present invention were good in the 90-degree bending test without being damaged, and thus it can be seen that they can be wound in multiple layers in a tubular shape and used for a multilayer filter.

【0022】[0022]

【発明の効果】本発明によれば、表面積の大きい焼結表
面を有するため、パティキュレート等の微粒子を捕獲す
るフィルタとして有効に作用するものとなる。また本発
明は、貫通孔を有していることから、フィルタ閉塞の問
題が少ないという利点がある。さらに、本発明のガス用
フィルタは曲げ加工が可能であり、筒状に多層に巻いて
フィルタ層を形成することも可能あり有用である。
According to the present invention, since it has a sintered surface with a large surface area, it effectively acts as a filter for trapping particulates such as particulates. In addition, the present invention has an advantage that the problem of filter blockage is small because it has a through hole. Furthermore, the gas filter of the present invention can be bent, and it is also useful because it can be wound in multiple layers in a tubular shape to form a filter layer.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のガス用フィルタの300倍の表面焼結
金属ミクロ組織を示す写真である。
FIG. 1 is a photograph showing a 300-fold surface sintered metal microstructure of the gas filter of the present invention.

【図2】本発明の製造工程の一例を示す説明図である。FIG. 2 is an explanatory view showing an example of a manufacturing process of the present invention.

【符号の説明】[Explanation of symbols]

1 シート状焼結体、2 シート状組成物、3 貫通手
段、4 貫通孔
1 sheet-like sintered body, 2 sheet-like composition, 3 penetrating means, 4 through-holes

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数個の貫通穴を外部から付加的に形成
したシート状焼結体でなることを特徴とするガス用フィ
ルタ。
1. A gas filter, comprising a sheet-shaped sintered body having a plurality of through holes additionally formed from the outside.
【請求項2】 複数個の貫通穴を外部から付加的に形成
したシート状焼結体を層状に積層してなることを特徴と
するガス用フィルタ。
2. A gas filter, comprising a plurality of sheet-shaped sintered bodies, each having a plurality of through holes additionally formed from the outside, laminated in layers.
【請求項3】 焼結される粉末とバインダーとを含有す
る組成物をシート形状に成形し、次いで貫通孔を形成す
るための貫通手段によって前記組成物に複数の貫通穴を
形成した後、該組成物を焼結することを特徴とするガス
用フィルタの製造方法。
3. A composition containing a powder to be sintered and a binder is formed into a sheet shape, and then a plurality of through holes are formed in the composition by a through means for forming the through holes. A method for producing a gas filter, which comprises sintering the composition.
JP6256276A 1994-09-26 1994-09-26 Gas filter and manufacture thereof Pending JPH0893448A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6256276A JPH0893448A (en) 1994-09-26 1994-09-26 Gas filter and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6256276A JPH0893448A (en) 1994-09-26 1994-09-26 Gas filter and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH0893448A true JPH0893448A (en) 1996-04-09

Family

ID=17290402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6256276A Pending JPH0893448A (en) 1994-09-26 1994-09-26 Gas filter and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH0893448A (en)

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