JPH088720B2 - Ultrasonic transducer manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a method for manufacturing an ultrasonic transducer, particularly a continuous wave (CW) method.
The present invention relates to a method for manufacturing an ultrasonic transducer for transmitting and receiving ultrasonic waves.

[Prior Art] Detectors using ultrasonic waves in various fields including the medical field,
It is used as a measuring instrument, and an ultrasonic transducer is provided to transmit and receive this ultrasonic wave. An ultrasonic transducer generates an ultrasonic wave by applying an electric signal to a piezoelectric element (PZT, etc.) that has electrodes on both sides, and at the same time converts the reflected echo into an electric signal and receives it. Is also going.

Such an ultrasonic transducer has a different configuration when radiating ultrasonic waves as a continuous wave than when radiating ultrasonic waves as a pulse wave.

That is, as shown in FIG. 2, the probe 10 is provided with a transducer 12, and in the case of a pulse wave, ultrasonic waves are transmitted and received by the same transducer at a predetermined time interval. However, in the case of a continuous wave, the transmitter 12a and the receiver 12b are provided separately for transmission and reception because the waves are emitted continuously. The shield plate 14 is arranged between both the transmitter 12a and the receiver 12b. This shield 14
A metal material is used for this to prevent interference when the vibrator 12 transmits and receives ultrasonic waves. Therefore, the transmitter 12
The ultrasonic wave 100 radiated from the inside of the subject 16 from a is reflected by the object 18 and received by the receiving unit 12b.

By the way, in the case of manufacturing the oscillator 12 for such a continuous wave, conventionally, the transmitter 12a, the receiver 12b, and the shield plate 14 are separately manufactured, and the ultrasonic sound absorbing material is bonded with an adhesive or the like. I'm sticking them one by one.

[Problems to be Solved by the Invention] However, since the vibrator 12 has a size of a unit of mm in the related art, the sticking work is complicated, and the manufacturing accuracy regarding the arrangement of the respective constituent parts is low. There was a problem.

SUMMARY OF THE INVENTION The present invention has been made in view of the above conventional problems, and an object thereof is to provide a method for manufacturing an ultrasonic vibrator, which can reduce the number of vibrator manufacturing steps and improve the accuracy of vibrator arrangement. To do.

[Means for Solving the Problems] In order to achieve the above-mentioned object, a method of manufacturing an ultrasonic transducer according to the present invention is configured such that a piezoelectric element plate having electrodes on both surfaces is attached to a sound absorbing material, and then the piezoelectric element is formed. It is characterized in that the plate is cut, and each part of the transmitting oscillator part, the receiving oscillator part, and the shield plate part for preventing the interference of ultrasonic waves is formed separately at a predetermined interval.

[Operation] According to the above configuration, first, a piezoelectric element having electrodes on both sides of a size capable of forming the transmitting portion, the receiving portion, and the shielding plate of the vibrator is prepared, and the piezoelectric element is bonded to the sound absorbing material with an adhesive. Stick. Then, after this, the piezoelectric element is divided into a predetermined size and cut by a cutting machine or the like. This facilitates the manufacture of the vibrator and improves the manufacturing accuracy.

[Embodiment] A preferred embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows an example of the vibrator 20 manufactured according to the present invention. FIG. 1A is a disk-shaped one, and FIG.

In this vibrator 20, a piezoelectric element, which is an electroacoustic transducer, is first attached to a sound absorbing material (damper) 22 with an adhesive or the like.
The sound absorbing material 22 is formed of a material in which ferrite is added to rubber or the like, and has a role of absorbing ultrasonic waves radiated to the rear of the piezoelectric element and enhancing damping characteristics.

A feature of the present invention is that the transmitter and the receiver of the vibrator 20 are easily manufactured. As described above, each component is formed with the piezoelectric element bonded to the sound absorbing material 22. .

That is, the piezoelectric element is cut by a cutting machine (dicing saw) or the like, and as shown in the figure, the transmitter 20a, the receiver 20b, and the shield (isolator).
Separated into 20c. In the embodiment, the width of the shielding plate 20c is 0.8m.
The slit width between the shielding plate 20c and the transmitting unit 20a and the receiving unit 20b is set to about 0.05 to 0.08 mm. In this case, the shielding plate 20c is formed of a piezoelectric element having electrodes on both sides, but since the electrodes are grounded, the same shielding effect as that of a conventional shielding plate made of a metal material can be obtained.

In this way, the transmission unit 20a which is an electroacoustic conversion element
The receiving section 20b is formed, and the ultrasonic waves emitted from the transmitting section 20a are well received by the receiving section 20b.

[Effects of the Invention] As described above, according to the present invention, after the piezoelectric element is bonded to the sound absorbing material, the transmitting / receiving section of the vibrator is cut, so that the manufacture of the vibrator becomes extremely easy. Further, there is an advantage that the arrangement accuracy of each component such as the transmitter and the receiver is significantly improved.

As a result, it is possible to obtain a transducer capable of transmitting and receiving continuous ultrasonic waves satisfactorily with respect to the subject, and it is possible to contribute to image diagnosis when used for image display of the blood flow state of the heart region and the like. .

[Brief description of drawings]

FIG. 1 is a transducer for explaining the present invention, FIG. 1 (a) is a disk-shaped one, FIG. 1 (b) is a short armature-shaped one, and FIG. 2 is a continuous wave ultrasonic wave. It is explanatory drawing which shows the state of transmitting / receiving. 10… Probe 12,20 …… Transducer 12a, 20a …… Transmitter 12b, 20b …… Receiver 14,20c …… Shield plate 22 …… Sound absorbing material.

Claims (1)

[Claims] 1. A shield plate for preventing ultrasonic waves from interfering with a transmitting vibrator unit and a receiving vibrator unit after a piezoelectric element plate having electrodes on both sides is attached to a sound absorbing material and then the piezoelectric element plate is cut. A method of manufacturing an ultrasonic transducer, characterized in that each part and each part are formed separately at a predetermined interval.