JPH0886812A - Laminate probe contact for very small pitch inspection - Google Patents

Abstract

PURPOSE: To provide a probe contact which can inspect a very small pitch- interval circuit such as highly integrated circuit a plurality of times without trouble. CONSTITUTION: The probe contacts are formed from a ultrathin sheet and covered with an insulating film excluding at least a contact part of needle parts 12 thereof. A cut 13 is formed on the sheet in the rear of the needle parts to make a long thin plate body 14 with the needle parts arranged successively. The needle parts are made movable elastically in the longitudinal direction of the cut. The probe contacts thus arranged are laminated in plurality in layers.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultra-fine pitch inspection laminated layer capable of performing a precise tri-inspection for disconnection, short circuit, etc. of an electrode or pattern of a semiconductor or liquid crystal having an ultra-fine pitch interval. It relates to probe contacts.

[0002]

2. Description of the Related Art Highly integrated circuits, ICs, having a minute pitch interval
In the circuit inspection of an LSI or the like, conventionally, as shown in FIG. 5, a large number of minute probe pins 3 each having a bent tip are arranged in parallel so as to abut the terminal portion 2 of the highly integrated circuit 1. The following card type probe contacts are used. But recently, with the remarkable technological progress of the electro industry,
Although ultra-fine highly integrated circuits with a pitch interval of 0.06 mm have been developed, this conventional card-type probe contact must support inspection of these ultra-fine highly integrated circuits. I couldn't. In order to inspect a highly integrated circuit having a pitch interval of 0.06 mm, the interval between the probe pins 3 must be 0.06 mm or less.
In the case of a drive probe contact, the adjacent probe pin 3
Since the insulator coating could not be applied, it must be prevented from contacting, so that a certain distance is necessary, and the limit is 0.12 mm.

In order to solve such a problem, the present applicant has developed a probe contact in which the probe contact is made of an ultrathin plate, and has previously filed a patent application. This contact probe has an ultra-thin plate thickness of 0.06 mm.
Since the following can be done and the insulator coating can be easily formed, it can sufficiently cope with the inspection of an ultra-fine highly integrated circuit of 0.06 mm or less, Since the durability of the spring property of movement was weak, there was a problem that it was not possible to support a large number of inspections of hundreds of thousands of times.

[0004]

DISCLOSURE OF THE INVENTION The present invention is intended to solve such a problem, and is 0.06 mm.
It is an object of the present invention to provide a probe contact that can perform circuit inspection of a highly integrated circuit or the like having an ultra-fine pitch interval hundreds of thousands of times without trouble.

[0005]

In order to achieve the above object, the present inventor, as a result of diligent research, formed a probe contact in an ultra-thin plate, and provided the probe contact at the rear of the needle portion. By forming a notch in the thin plate, and by configuring the needle portion so as to be elastically movable in the front-rear direction of the notch, it is found that a large number of inspections of hundreds of thousands of times can be performed without hindrance. The present invention has been reached.

That is, according to the present invention, the probe contact is formed of an ultra-thin plate, and the probe contact is covered with an insulating film except at least the contact portion of the needle portion, and the needle contact is formed.
A thin plate at the rear of the dollar portion is formed with a slit to form an elongated plate body in which the needle portion is continuously provided, and the needle portion can be elastically moved in the front-rear direction of the slit. It is characterized in that a large number of contact layers are laminated. In the past, however, it has not been known at all to form a notch at the rear of the needle portion, to form the probe contact with a thin plate, or to stack the probe contacts in contact with each other.

[0007]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a side view showing an embodiment of the present invention, in which the probe contact 11 is formed in an ultrathin plate having a thickness of 0.06 mm or less, and the needle portion 12 is formed in a diamond-shaped frame. Nee
An example in which the notch 13 is formed behind the dollar portion 12 is shown.
The needle portion 12 can be elastically moved in the front-rear direction as shown by the arrow in FIG. In the figure, 15 is
It is a terminal portion for attaching a lead wire.

A slender plate body 14 in which a needle portion 12 is connected in series.
By selecting the length (the same as the length of the notch 13), it is possible to set the elastic force (spring pressure) that elastically moves to a desired value. Further, by selecting the thickness of the notch 13, it is possible to adjust the stroke of elastic movement of the tip needle portion 12. In the embodiment of FIG. 2, the thickness of the notch 13 is 1/3 of that of FIG. To adjust to a finer spring pressure,
As shown in FIG. 2, a concave cut portion 18 may be formed on the upper end of the elongated plate body 14. By selecting the length of the notch 13 and the size of the concave cut portion 18, it is possible to adjust to a desired fine spring pressure. In the probe contact 11 of the present invention, except for the needle portion 12,
An insulating film of fluororesin (Teflon) is formed. The insulator coating may be formed entirely except for the contact portion of the needle portion 12 with the electrode or pattern. Further, an insulating material other than tetrafluororesin (Teflon) may be used as long as good insulating properties can be obtained.

In order to form the insulator film on the probe contact 11, it is sufficient to coat the fluororesin fine powder by a vapor deposition method or an electrostatic coating method. The probe contacts of the present invention are preferably formed from steel, copper alloys, tungsten or hardened steel strip. If formed from such a material, it can be easily formed into an ultra-thin plate of 0.02 mm. Each of the probe contacts 11 is formed with four through holes 16. The laminated guide pins are inserted into the through holes, and both ends of the guide pins are fixed to the frame body for accommodating the laminated probe contacts 11, thereby forming the laminated probe contact of the present invention. it can. The number of through holes 16 formed in the probe contact 11 is not particularly limited as long as it is plural. Further, since the probe contacts 11 having the same shape and a thickness of 0.06 mm or less may be simply stacked in a row,
The through hole 16 is not always necessary.

The probe contact mounting frame of the present invention comprises:
Although an insulating material is usually used, a metal such as a special alloy can be used particularly when rigidity is required. In this case, even if the metal is not insulation-coated, there is no problem because the probe contact to be contacted is insulation-coated. FIG.
In the embodiment shown in (1), the needle portion 12 is formed in a diamond-shaped frame. If formed in this way, the needle portion 12 itself also bends, so that the spring property of the probe contact 11 is improved. However, as shown in FIG.
As shown in FIG. 4, the tip needle portion has a substantially S-shaped shape 1 even if the elongated plate body 14 is formed with the projection 12 '.
It does not matter if it is formed in 2 ″. Also,
As shown in FIG. 2, the protrusion 17 may be formed at the tip of the diamond-shaped frame.

[0011]

According to the present invention, since the probe contact is formed on a thin plate covered with an insulator, the probe contacts are stacked and stacked in a row, whereby a highly integrated circuit with an ultra-fine pitch interval of 0.04 mm. It can be inspected even without problems. Also, by stacking the rows in a plurality of rows such as two rows and three rows, the needle portions are arranged in a zigzag pattern at intervals of 1/2 and 1/3 of the thin plate. It is possible to inspect even high-integrated circuits with a pitch interval of 1/2 or 1/3 of the thin plate without any trouble. Although the needle tip of the probe contact of the present invention is not covered with an insulator, it is separated from the adjacent needle tip by the thickness of the insulator coating layer, and therefore there is no possibility of contact. Absent. The needle portion may be covered with an insulator as long as it is not a contact portion with an electrode or a pattern, and the portion which is unlikely to come into contact with the adjacent needle tip portion is covered with an insulator. It doesn't matter.

A probe contact of the present invention shown in FIG. 1 was prepared from beryllium copper having a plate thickness of 50 μm, an insulating film of 5 μm (total of the front and back surfaces was 10 μm), and a standard stroke of 100 μm. A large number of the probe contacts were laminated in a row to form a laminated probe contact, and the elastic durability of elastic movement was measured. Stroke 2
Three types of laminated probe contacts with needle pressures of 0 micron and 60 micron shown in Table 1 below were made.

[0013]

[Table 1]

When the spring durability of elastic movement was measured for the above-mentioned three types of laminated probe contacts, all of the probe contacts 1 to 3 of the present invention were springs capable of withstanding 1 million shots. It showed good durability. On the other hand, the probe contact made in the same manner except that the notch 13 was not formed could not be used after 20,000 shots.

[0015]

As described above, according to the present invention, the probe contact is formed of an ultra-thin plate and the notch is formed at the rear of the needle portion, so that the spring durability of elastic movement is remarkably increased. As a result, inspection of highly integrated circuits with ultra-fine pitches of 0.06 mm or less can be performed many times without any trouble, and since only thin plates are stacked, assembly is extremely easy and manufacturing is inexpensive. As a result, it has an extremely epoch-making and tremendous effect which is not seen in the conventional probe contact of this kind.

[0016]

[Brief description of drawings]

FIG. 1 is a side view showing a probe contact of the present invention.

FIG. 2 is a side view showing another embodiment of the probe contact of the present invention.

FIG. 3 is a partial side view showing another embodiment of the probe contact of the present invention.

FIG. 4 is a partial side view showing another embodiment of the probe contact of the present invention.

FIG. 5 is a perspective view of a conventional card type probe contact.

[Explanation of symbols]

 11 probe contact 12, 12 ', 12 "needle part 18 concave cut part

Claims (6)

[Claims] 1. A probe contact is formed of an ultra-thin plate, and the probe contact is covered with an insulating film except at least the contact portion of the needle portion, and the probe contact is formed on the rear portion of the needle portion. A large number of probe contacts are formed so that a slit is formed in the thin plate to form an elongated plate body in which a needle portion is continuously provided, and the needle portion is elastically movable in the front-back direction of the slit direction. Laminated probe contact for ultra-fine pitch inspection characterized by being laminated. 2. The probe contact according to claim 1, wherein the ultra-thin plate is formed of steel, copper alloy, tungsten or hardened steel plate. 3. The probe contact according to claim 1, wherein the ultrathin plate has a thickness of 0.12 mm or less. 4. The laminate is formed by forming an opening in the laminated probe contact, fitting a guide pin into the opening, and fixing the guide pin to a frame body for accommodating the probe contact. The probe contact according to claim 1, wherein the probe contact is fixed. 5. The probe contact according to claim 1, wherein the insulator film is formed by a vapor deposition method. 6. The probe contact according to claim 1, wherein the upper end of the elongated plate body having the needle portion connected thereto is cut into a concave shape to control the spring pressure of the needle portion.